US20150167679A1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
US20150167679A1
US20150167679A1 US14/571,355 US201414571355A US2015167679A1 US 20150167679 A1 US20150167679 A1 US 20150167679A1 US 201414571355 A US201414571355 A US 201414571355A US 2015167679 A1 US2015167679 A1 US 2015167679A1
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US
United States
Prior art keywords
vacuum pump
inlet
shaft
rotor
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/571,355
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English (en)
Inventor
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=52023216&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=US20150167679(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Assigned to PFEIFFER VACUUM GMBH reassignment PFEIFFER VACUUM GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KOCH, BERNHARD
Publication of US20150167679A1 publication Critical patent/US20150167679A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum pump or vacuum pump stage with a housing that has at least one inlet.
  • Rotatable sleeves prove themselves in vacuum pumps, e.g., in form of a Holweck pump stage.
  • One or a number of sleeves is secured on one side of a hub that itself is provided on a shaft.
  • Such a design is disclosed, e.g., in DE 10 2011 112 689 A1.
  • the inlet is arranged not axially with respect to the shaft, as in a pump that forms part of the state-of-the art (DE 10 2011 112 689 A1), but radially with respect to the shaft and the rotatable sleeve.
  • DE 20 2010 012 795 U1 To the state-of-the art (DE 20 2010 012 795 U1) also belongs a vacuum pump in which deflection elements are provided in the inlet region. These deflection elements provide for deflection of particles in the flow or delivery direction of the pump.
  • deflection elements consists in that the mounting of the deflection elements in a vacuum pump is time and costs intensive.
  • the object of the invention is to provide a vacuum pump or a vacuum pump stage with a radially arranged inlet in which the suction capacity increases without changing the size of the inlet.
  • the object of the invention is achieved with a vacuum pump or a vacuum pump stage having a housing with at least one inlet, a rotor provided with a shaft, with the at least one inlet being arranged radially with respect to the shaft and with the inlet widening in direction of the shaft.
  • the inventive construction of the inlet and, thus, of the suction opening so influences the movement direction of the molecules that they cannot any more leave the suction flange of the pump or the pump stage in the direction of the recipient and remain in the pumping process.
  • the gas molecules which hit the inner wall, after hitting the inner wall would be deflected in the direction of the rotating sleeve and would be located with a high degree of probability, in the vacuum pump or the vacuum pump stage.
  • the number of gas molecules which are not immediately located in the vacuum pump or the vacuum pump stage, after impacting the inner wall of the widened inlet would be displaced, with a high degree of probability, into the pump or the pump stage, whereby the suction capacity of the vacuum pump or the vacuum pump stage is noticeably increases.
  • the same principle applies to the radial inlet of a turbomolecular pump stage with oppositely rotatable rotor and stator bladings.
  • the gas molecules are already displaced in the pump active region in the preferred direction, so that the suction capacity also increases in this case.
  • the inlet can be located at the high-vacuum side of the rotor or in the region of the first rotor disc, or in the further path of the pump active structure at an arbitrary point for forming an additional inlet for a split flow pump.
  • the inventive configuration not only increases the probability that the gas molecule would necessarily enter the pump active region but also that the gas molecule that is already located in the pump active region, would, after an undesirable exit from the pump active region, be guided anew in the pump active region, so that, it can be displaced therein, thereby additionally increasing the suction capacity.
  • the vacuum pump has at least one Holweck stage with a one-piece rotor and a surrounding it stator, wherein the delivery structure is provided on one of the two parts, or a cross-thread Holweck stage having a one-piece shaft, wherein a delivery structure is formed as an opposite thread structure or rotor of a turbomolecular pump wherein the delivery structure includes at least one rotor disc and stator disc.
  • the inventive configuration with the inlet widening in direction of the shaft can be used particular advantageously in these vacuum pumps.
  • the vacuum pump stage is formed as a Holweck stage with a one-piece rotor and a surrounding it stator, wherein the delivery structure is provided on one of the two parts, or a cross-thread Holweck stage having a one-piece shaft, wherein a delivery structure is formed as an opposite thread structure or rotor of a turbomolecular pump wherein the delivery structure includes at least one rotor disc and stator disc.
  • the inventive configuration with the inlet widening in direction of the shaft can be used particular advantageously in such vacuum pump stages.
  • the vacuum pump or the vacuum pump stage has a Holweck pump stage comprising a rotor having a shaft, a hub connected with the shaft, and a sleeve connected with the hub and concentric relative to the shaft, wherein the inlet widens in direction of the sleeve.
  • the gas molecules which hit the inner wall, after hitting the inner wall would be deflected in the direction of the rotating sleeve and would be located with a high degree of probability, in the vacuum pump or the vacuum pump stage.
  • the inlet is formed as an inlet for guiding gas through the inlet in channels arranged in a rotational direction of the rotor.
  • the advantage of this embodiment consists in that the gas molecules which enter the suction opening, are immediately displaced into the channels arranged in a rotational direction of the rotor, e.g., of a Holweck stator. The immediate also increases the suction capacity of the vacuum pump or the vacuum pump stage.
  • the inlet widens in rotational direction of the rotor.
  • the gas molecules when hitting the rotating sleeve are deflected in the rotational direction, so that it is sufficient to widen the inlet in this direction.
  • the opposite side of the inlet flange can, as known from the state-of-the art, be formed as partially cylindrical.
  • a curved outer profile forms an inlet widening.
  • the inlet can widens linearly.
  • the advantage of the curved outer profile consists in that the profile can so be adapted that the gas molecules would be deflected, with a high degree of probability in the direction of the rotating sleeve after impacting the outer profile, and in the opposite direction.
  • the curved profile enables to provide a smaller widening of the inlet in the direction of the pump space than is the case with a linear outer profile.
  • the inlet can, as discussed above, also widened linearly conically. This configuration can be easily implemented and increases, despite this, the suction capacity of the vacuum pump or the vacuum pump stage.
  • the inlet can be so formed that it widens in all directions. It is also possible that the inlet simply widens in the rotational direction of the rotor. If the widening inlet is provided on a side arranged in the rotational direction of the rotor, the costs of forming a widening inlet are reduced.
  • the vacuum pump stage is formed as a molecular vacuum pump, in particular, as a Holweck pump.
  • the vacuum pump stage is advantageously formed as a molecular pump stage, preferably as Holweck pump stage.
  • the inventive configuration of the inlet flanges permits their use as Holweck pump stages in which pump active surfaces are provided in the stator.
  • the invention can be used also as used as a Holweck pump stage in which the pump active structures are provided on the sleeve, i.e., on the rotor.
  • the invention can be used in a cross-thread Holweck pump stages in which pump active structures are provided on both the rotor and the stator.
  • the invention can also be used in turbomolecular pump stages in which the pump active structure is formed of rotor and stator blades.
  • FIG. 1 a cross-sectional view of a prior art vacuum pump
  • FIG. 2 a cross-sectional view illustrating movement of a gas molecule in an inlet of the prior art vacuum pump
  • FIG. 3 a cross-sectional view illustrating movement of a gas molecule in an asymmetrical inlet of the prior art vacuum pump
  • FIG. 4 a cross-sectional view of an inlet of a vacuum pump according to the present invention
  • FIG. 5 a cross-sectional view of another embodiment of an inlet of a vacuum pump according to the present invention.
  • FIG. 6 a cross-sectional view illustrating an inlet of a turbomolecular pump stage with a rotor
  • FIG. 7 a longitudinal schematic cross-sectional view of the turbomolecular pump stage shown in FIG. 6 .
  • FIG. 1 shows a longitudinal cross-sectional view of a prior art vacuum pump 1 .
  • a housing 2 of the vacuum pump 1 has a suction opening, inlet 4 through which a gas is aspirated in the vacuum pump. After compression, the gas is expelled through an outlet 6 of the vacuum pump 1 .
  • a rotor 10 that, together with a stator 30 , generate a pumping action.
  • the rotor 10 has a shaft 12 supported, at its end adjacent to the suction opening 4 , by a permanent magnetic bearing 14 .
  • the opposite end of the shaft 12 is supported by a roller bearing 16 .
  • This bearing arrangement has an advantage, in comparison with other possible bearing arrangements such as support of the shaft end opposite the suction opening with a flying roller bearing that consists in providing a lubricant-free bearing at the suction side, in a narrow gap due to a simpler rotationally dynamic support, and in shorter constructional length.
  • a permanent magnet 20 that cooperates with an energized drive spool.
  • the rotor is set to rotate with an adequately rapid speed.
  • the speed is determined in accordance with used pumping principles and reaches, as a rule, when molecular principles are used, several tens thousand revolutions per minute.
  • the stator 30 has, on its surface adjacent to the rotor, a plurality of helical grooves or channels 32 .
  • a hub 40 is secured on the shaft 12 .
  • the hub 40 has a first side 42 and a second side 44 opposite the first side 42 .
  • the second side 44 is located adjacent to the suction opening.
  • a first sleeve 50 is secured on the first side, and a second sleeve 52 is secured on the second side. Both sleeves 50 , 52 cooperate with the stator 30 and its helical grooves 32 for producing a pumping action in accordance with Holweck principle.
  • the gas stream flows through the suction opening in a groove S between the second sleeve 52 and the stator 30 .
  • the first sleeve 50 is arranged downstream, in the flow direction, and, thereby, compresses the stream.
  • FIG. 2 shows the housing 2 provided with an inlet 4 .
  • FIG. 2 shows a rotatable sleeve 52 and a pumping active structure 32 .
  • FIG. 2 schematically shows how a gas molecule 60 hits the sleeve 52 . Because of a possible movement direction, the molecule might not enter the Holweck channel 32 , but rather the suction region 62 in the direction of the recipient, i.e., in direction opposite the direction shown with arrow A.
  • FIG. 3 shows a known inlet flange formed with an asymmetrically bored inlet channel. This shape guides the gas molecule 60 in different directions of the inlet 4 . The resulting direction is shown with arrow 80 .
  • FIG. 4 shows the inventive geometry of the inlet 4 which is a further improvement in comparison with the state-of-the art and according to which, the inlet 4 widens in the direction of the sleeve 52 . This so influences the direction of movement of the molecule 60 that it cannot any more leave the suction flange of the pump 1 in the direction of the recipient, i.e. in direction opposite the direction shown with arrow A and remains in the pumping process.
  • FIG. 5 shows a modified embodiment of the invention.
  • the inlet 4 widens linearly conically.
  • the gas molecules which impact the wall 64 of the inlet 4 also move back in direction of the pumping space so that here also, the pump suction capacity noticeably increases.
  • FIG. 6 shows a pump stage 66 of a turbomolecular pump having a suction opening 62 .
  • the pump stage 66 has a rotor 68 with rotor blades 70 .
  • the gas molecules (not shown) are displaced in direction of arrow A in the pump stage 66 .
  • the gas molecules When the gas molecules are deflected by the rotor blades 70 in direction of the outlet, they impinge the inner wall 64 of the suction opening 62 and are guided again in direction of the rotor 68 .
  • FIG. 7 shows schematically the pump stage 66 with the rotor 68 .
  • the rotor 68 has rotor discs 72 , 74 .
  • stator discs 76 , 78 There are also provided stator discs 76 , 78 , with the rotor discs 72 , 74 and the stator discs 76 , 78 forming opposite rotor and stator bladings.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
US14/571,355 2013-12-18 2014-12-16 Vacuum pump Abandoned US20150167679A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013114290.7A DE102013114290A1 (de) 2013-12-18 2013-12-18 Vakuumpumpe
DE102013114290.7 2013-12-18

Publications (1)

Publication Number Publication Date
US20150167679A1 true US20150167679A1 (en) 2015-06-18

Family

ID=52023216

Family Applications (1)

Application Number Title Priority Date Filing Date
US14/571,355 Abandoned US20150167679A1 (en) 2013-12-18 2014-12-16 Vacuum pump

Country Status (4)

Country Link
US (1) US20150167679A1 (de)
EP (1) EP2886870B2 (de)
JP (1) JP6118784B2 (de)
DE (1) DE102013114290A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6755611B1 (en) * 1999-05-28 2004-06-29 Boc Edwards Japan Limited Vacuum pump
US20050118014A1 (en) * 1999-10-18 2005-06-02 Sarcos Lc Compact molecular-drag vacuum pump
EP2385257A2 (de) * 2010-05-08 2011-11-09 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146492A (ja) 1984-08-11 1986-03-06 Mitsuwa Seiki Co Ltd 分子ポンプ
JPH0213195U (de) * 1988-06-30 1990-01-26
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH0475196U (de) * 1990-11-09 1992-06-30
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
JPH0717986U (ja) * 1993-09-08 1995-03-31 二国機械工業株式会社 渦流ポンプ
DE19508566A1 (de) 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
GB2333127A (en) * 1997-10-21 1999-07-14 Varian Associates Molecular drag compressors having finned rotor construction
DE19821634A1 (de) 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB9921983D0 (en) 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
GB2360066A (en) 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
GB0414316D0 (en) 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
DE202005019644U1 (de) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008024764A1 (de) 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102009035332A1 (de) 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202010012795U1 (de) 2010-09-21 2012-01-13 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102011112689B4 (de) 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102011112691A1 (de) 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6755611B1 (en) * 1999-05-28 2004-06-29 Boc Edwards Japan Limited Vacuum pump
US20050118014A1 (en) * 1999-10-18 2005-06-02 Sarcos Lc Compact molecular-drag vacuum pump
EP2385257A2 (de) * 2010-05-08 2011-11-09 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EP_2385257_A2_I - Translation from Espacenet *
EP_2385257_A2_I-Translation from Espacenet *

Also Published As

Publication number Publication date
EP2886870B2 (de) 2020-12-23
JP6118784B2 (ja) 2017-04-19
EP2886870A1 (de) 2015-06-24
DE102013114290A1 (de) 2015-06-18
EP2886870B1 (de) 2017-12-20
JP2015117697A (ja) 2015-06-25

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Owner name: PFEIFFER VACUUM GMBH, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:KOCH, BERNHARD;REEL/FRAME:034512/0674

Effective date: 20141024

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION