US20150155523A1 - Organic electroluminescence display device - Google Patents
Organic electroluminescence display device Download PDFInfo
- Publication number
- US20150155523A1 US20150155523A1 US14/559,960 US201414559960A US2015155523A1 US 20150155523 A1 US20150155523 A1 US 20150155523A1 US 201414559960 A US201414559960 A US 201414559960A US 2015155523 A1 US2015155523 A1 US 2015155523A1
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- Prior art keywords
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- organic
- organic electroluminescence
- inorganic
- element layer
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- 238000005401 electroluminescence Methods 0.000 title claims abstract description 35
- 239000010410 layer Substances 0.000 claims abstract description 93
- 239000012044 organic layer Substances 0.000 claims abstract description 24
- 238000007789 sealing Methods 0.000 claims abstract description 19
- 230000000630 rising effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 22
- 239000000463 material Substances 0.000 description 21
- 230000005525 hole transport Effects 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- -1 quinacridone compound Chemical class 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- NRCMAYZCPIVABH-UHFFFAOYSA-N Quinacridone Chemical compound N1C2=CC=CC=C2C(=O)C2=C1C=C1C(=O)C3=CC=CC=C3NC1=C2 NRCMAYZCPIVABH-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000007644 letterpress printing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007645 offset printing Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000011342 resin composition Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- MGADZUXDNSDTHW-UHFFFAOYSA-N 2H-pyran Chemical compound C1OC=CC=C1 MGADZUXDNSDTHW-UHFFFAOYSA-N 0.000 description 1
- OGGKVJMNFFSDEV-UHFFFAOYSA-N 3-methyl-n-[4-[4-(n-(3-methylphenyl)anilino)phenyl]phenyl]-n-phenylaniline Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 OGGKVJMNFFSDEV-UHFFFAOYSA-N 0.000 description 1
- ZOKIJILZFXPFTO-UHFFFAOYSA-N 4-methyl-n-[4-[1-[4-(4-methyl-n-(4-methylphenyl)anilino)phenyl]cyclohexyl]phenyl]-n-(4-methylphenyl)aniline Chemical compound C1=CC(C)=CC=C1N(C=1C=CC(=CC=1)C1(CCCCC1)C=1C=CC(=CC=1)N(C=1C=CC(C)=CC=1)C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 ZOKIJILZFXPFTO-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZCQWOFVYLHDMMC-UHFFFAOYSA-N Oxazole Chemical compound C1=COC=N1 ZCQWOFVYLHDMMC-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- RJGDLRCDCYRQOQ-UHFFFAOYSA-N anthrone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3CC2=C1 RJGDLRCDCYRQOQ-UHFFFAOYSA-N 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- XJHABGPPCLHLLV-UHFFFAOYSA-N benzo[de]isoquinoline-1,3-dione Chemical class C1=CC(C(=O)NC2=O)=C3C2=CC=CC3=C1 XJHABGPPCLHLLV-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- IBHBKWKFFTZAHE-UHFFFAOYSA-N n-[4-[4-(n-naphthalen-1-ylanilino)phenyl]phenyl]-n-phenylnaphthalen-1-amine Chemical compound C1=CC=CC=C1N(C=1C2=CC=CC=C2C=CC=1)C1=CC=C(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C3=CC=CC=C3C=CC=2)C=C1 IBHBKWKFFTZAHE-UHFFFAOYSA-N 0.000 description 1
- WCPAKWJPBJAGKN-UHFFFAOYSA-N oxadiazole Chemical compound C1=CON=N1 WCPAKWJPBJAGKN-UHFFFAOYSA-N 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 150000004032 porphyrins Chemical class 0.000 description 1
- RQGPLDBZHMVWCH-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole Chemical class C1=NC2=CC=NC2=C1 RQGPLDBZHMVWCH-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- PWYVVBKROXXHEB-UHFFFAOYSA-M trimethyl-[3-(1-methyl-2,3,4,5-tetraphenylsilol-1-yl)propyl]azanium;iodide Chemical compound [I-].C[N+](C)(C)CCC[Si]1(C)C(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=C1C1=CC=CC=C1 PWYVVBKROXXHEB-UHFFFAOYSA-M 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
- H10K59/8722—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/84—Parallel electrical configurations of multiple OLEDs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H01L51/5253—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/86—Series electrical configurations of multiple OLEDs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/873—Encapsulations
- H10K59/8731—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
Definitions
- the present invention relates to an organic electroluminescence display device.
- Organic electroluminescence display apparatuses require a sealed structure for isolating the organic EL (Electro-Luminescence) film such as the light-emitting layer from the air.
- a sealed structure for isolating the organic EL (Electro-Luminescence) film such as the light-emitting layer from the air.
- a structure in which a multilayer sealing film containing an organic film of a resin sandwiched between inorganic films is used for sealing the organic EL film is known (Japanese Patent No. 4303591).
- An object of the invention is to provide a sealing film which maintains a high barrier property and in which the refraction of light and the spread of water can be prevented.
- the organic electroluminescence display device is characterized by having: a circuit board; an element layer which contains an organic electroluminescence film and a positive electrode and a negative electrode sandwiching the organic electroluminescence film and which is formed on the circuit board; and a sealing film sealing the element layer: in which the sealing film contains an inorganic layer covering the element layer and an organic layer formed between a part of the element layer and a part of the inorganic layer; the upper surface of the element layer has an inorganic contact area contacting the inorganic layer and an organic contact area contacting the organic layer; the organic contact area is a hollow in the upper surface of the element layer; and the area of the upper surface of the organic layer is smaller than the area of the lower surface contacting the inner surface of the hollow.
- the inorganic layer fills the hollow in the element layer, the inorganic layer can be formed on a surface with less unevenness and a high barrier property can be achieved.
- the refraction of light can be prevented in the inorganic contact area because there is no organic layer having a high refractive index, and the spread of water can be prevented because the organic layer is discontinuously provided.
- the organic electroluminescence display device of (1) may be characterized in that the positive electrode is two or more pixel electrodes under the organic electroluminescence film and the negative electrode is a common electrode on the organic electroluminescence film.
- the organic electroluminescence display device of (2) may be characterized in that the upper surface of the element layer has the inorganic contact area and the organic contact area in an area over each of the pixel electrodes.
- the organic electroluminescence display device of (2) or (3) may be characterized by further having an insulating layer formed between an edge of each of the pixel electrodes and the common electrode, in which the upper surface of the element layer has a protruding part along the shape of the insulating layer, and the hollow is formed from a low area which is over each of the pixel electrodes and is adjacent to the protruding part to an area rising to form the protruding part.
- the organic electroluminescence display device of any one of (1) to (4) may be characterized in that the organic contact area is completely surrounded by the inorganic contact area.
- FIG. 1 is a perspective view of an embodiment of the organic electroluminescence display device according to the invention.
- FIG. 2 is a cross-section showing an embodiment of the circuit board in detail.
- FIG. 1 is a perspective view of an embodiment of the organic electroluminescence display device according to the invention.
- the organic electroluminescence display device has a circuit board 10 .
- an integrated circuit chip 12 for driving an element for displaying an image is provided on the circuit board 10 .
- a flexible wiring substrate 14 is connected to the circuit board 10 for electrically connecting the circuit board 10 to an external device.
- the display device has an opposite substrate 16 .
- the opposite substrate 16 is provided in such a way that it faces the circuit board 10 at a distance.
- the opposite substrate 16 may be a color filter substrate.
- the opposite substrate 16 is attached to the circuit board 10 with a fill agent filled in an area surrounded by a damming material.
- FIG. 2 is a cross-section showing an embodiment of the circuit board 10 in detail.
- An element layer 18 is provided on the circuit board 10 .
- the element layer 18 contains an organic electroluminescence film 20 .
- the organic electroluminescence film 20 contains a hole transport layer (not shown in the drawings).
- the hole transport layer can be formed using metal phthalocyanine such as copper phthalocyanine and copper tetra(t-butyl) phthalocyanine, metal-free phthalocyanine, a quinacridone compound, an aromatic amine low-molecular hole injection transport material such as 1,1-bis(4-di-p-tolylaminophenyl)cyclohexane, N,N′-diphenyl-N,N′-bis(3-methylphenyl)-1,1′-biphenyl-4,4′-diamine and N,N′-di(1-naphthyl)-N,N′-diphenyl-1,1′-biphenyl-4,4′-diamine, a high-molecular hole transport material such as poly(para-phenylene vinylene) and polyaniline, a polythiophene oligomer material, or other known hole transport materials.
- metal phthalocyanine such as copper phthalocyan
- an organic light-emitting layer (not shown in the drawings) is formed.
- the organic light-emitting layer is a layer that emits light when electric current flows, and the organic light-emitting material forming the organic light-emitting layer may be a material that is generally used as an organic light-emitting material.
- Examples thereof are known fluorescent low-molecular materials capable of emitting light from the singlet state such as materials of coumarin, perylene, pyran, anthrone, porphyrin, quinacridone, N,N′-dialkyl-substituted quinacridone, naphthalimide and N,N′-diaryl-substituted pyrrolopyrrole, and known phosphorescent low-molecular materials capable of emitting light from the triplet state such as rare-earth metal complexes.
- an electron transport layer (not shown in the drawings) is formed.
- the material of the electron transport layer maybe a material that is generally used as an electron transport material. Examples thereof are low-molecular materials of triazole, oxazole, oxadiazole, silole, boron and the like, and the electron transport layer can be formed by a vacuum vapor deposition method.
- a vacuum vapor deposition method is used for a deposition-type material
- a known film formation method such as a nozzle printing method, a spin coating method, a slit coating method, an ink-jet method or a letterpress printing method can be used for a coating-type material.
- the element layer 18 contains two or more pixel electrodes 22 (positive electrodes).
- a transparent electrode material such as ITO (a composite oxide of indium and tin), IZO (a composite oxide of indium and zinc), tin oxide, zinc oxide, indium oxide and a composite oxide of aluminum oxide can be used.
- ITO indium tin oxide
- the pixel electrodes 22 are formed by film-forming of ITO by a sputtering method.
- the element layer 18 also contains a common electrode 24 (negative electrode).
- a common electrode 24 (negative electrode)
- a transparent electrode material such as ITO, IZO, tin oxide, zinc oxide, indium oxide and a composite oxide of aluminum oxide, or the like can be also used, though the material is not limited to these examples.
- An example of the method for forming the common electrode 24 (negative electrode) is a formation method by a sputtering method.
- the present embodiment has a constitution in which the hole transport layer, the organic light-emitting layer and the electron transport layer have been laminated between the pixel electrodes 22 , which are positive electrodes, and the common electrode 24 , which is a negative electrode, from the side of the pixel electrodes 22 . It is possible to apply a laminate structure in which layers such as a hole blocking layer and an electron injection layer selected if necessary have been laminated in addition to the hole transport layer and the organic light-emitting layer between the pixel electrodes 22 and the common electrode 24 . Furthermore, the same formation methods as for the hole transport layer, the organic light-emitting layer and the negative electrode layer can be used for forming these layers.
- the organic electroluminescence film 20 is sandwiched between the pixel electrodes 22 (positive electrodes) and the common electrode 24 (negative electrode).
- the pixel electrodes 22 are under the organic electroluminescence film 20 .
- the common electrode 24 is on the organic electroluminescence film 20 .
- An insulating layer 26 is between an edge of each of the pixel electrodes 22 and the common electrode 24 .
- the contact (short circuit) of the pixel electrodes 22 and the common electrode 24 can be prevented by the insulating layer 26 .
- the insulating layer 26 is formed using a photosensitive material by a photolithography method. Specifically, a photosensitive resin composition is coated on the circuit board 10 and a partitioned pattern is formed by pattern-exposure and development.
- the insulating layer 26 is formed using a resin composition in such a way that the light-emitting area corresponding to each pixel is divided, and the insulating layer 26 is formed to cover an edge of one of the pixel electrodes 22 for example.
- the upper surface of the element layer 18 has a protruding part 28 along the shape of the insulating layer 26 .
- a hollow 30 is formed in the upper surface of the element layer 18 from a low area which is over each of the pixel electrodes 22 and is adjacent to the protruding part 28 to an area rising to form the protruding part 28 .
- the organic layer 32 is provided in the hollow 30 .
- the organic layer 32 is formed from an acrylic resin, polyethylene terephthalate or the like and can be formed by optional appropriate processes including a vacuum process such as vapor deposition, sublimation and a combination thereof and a coating process such as a nozzle printing method, a spin coating method, a slit coating method, an ink-jet method, a letterpress printing method, an intaglio offset printing method and a letterpress reverse offset printing method.
- the organic layer 32 is polymerized by applying UV after the film formation.
- the upper surface of the element layer 18 has an organic contact area 34 contacting the organic layer 32 .
- the organic contact area 34 is in an area over each of the pixel electrodes 22 .
- the organic contact area 34 is the hollow 30 in the upper surface of the element layer 18 .
- the area of the upper surface of the organic layer 32 is smaller than the area of the lower surface contacting the inner surface of the hollow 30 .
- An inorganic layer 36 is formed on the organic layer 32 .
- an SiN, SiO or SiON film is formed by a plasma CVD method.
- an SiN film is formed by generating plasma in a mixed gas of SiH 4 , NH 3 and N 2 during the film formation.
- the thickness of the SiN film is 400 nm and the film formation is conducted at a substrate temperature of 100° C. or lower.
- the inorganic layer 36 can be formed by optional appropriate processes including conventional vacuum processes such as sputtering, vapor deposition, sublimation, CVD (chemical vapor deposition), PECVD (plasma-enhanced chemical vapor deposition), ECR-PECVD (electron cyclotron resonance plasma-enhanced chemical vapor deposition) and a combination thereof.
- conventional vacuum processes such as sputtering, vapor deposition, sublimation, CVD (chemical vapor deposition), PECVD (plasma-enhanced chemical vapor deposition), ECR-PECVD (electron cyclotron resonance plasma-enhanced chemical vapor deposition) and a combination thereof.
- a sealing film 38 sealing the element layer 18 is constituted by the inorganic layer 36 and the organic layer 32 .
- the sealing film 38 contains the organic layer 32 .
- the organic layer 32 is between a part of the element layer 18 and a part of the inorganic layer 36 .
- the organic contact area 34 is completely surrounded by an inorganic contact area 40 .
- the sealing film 38 also contains the inorganic layer 36 .
- the inorganic layer 36 is formed to cover the element layer 18 .
- the upper surface of the element layer 18 has the inorganic contact area 40 contacting the inorganic layer 36 .
- the inorganic contact area 40 is in an area over each of the pixel electrodes 22 .
- the sealing film 38 By thus forming the sealing film 38 by a two-layer structure unlike the conventional three-layer structure, it is possible to shorten the time and cut the cost for the sealing step and the subsequent step for exposing terminals.
- the inorganic layer 36 can be formed on a surface with less unevenness and a high barrier property can be achieved.
- the refraction of light can be prevented in the inorganic contact area 40 because there is no organic layer 32 having a high refractive index, and the spread of water can be prevented because the organic layer 32 is discontinuously provided.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/181,592 US9608232B2 (en) | 2013-12-04 | 2016-06-14 | Organic electroluminescence display device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013-251216 | 2013-12-04 | ||
JP2013251216A JP2015109192A (ja) | 2013-12-04 | 2013-12-04 | 有機エレクトロルミネッセンス表示装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US15/181,592 Continuation US9608232B2 (en) | 2013-12-04 | 2016-06-14 | Organic electroluminescence display device |
Publications (1)
Publication Number | Publication Date |
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US20150155523A1 true US20150155523A1 (en) | 2015-06-04 |
Family
ID=53266062
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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US14/559,960 Abandoned US20150155523A1 (en) | 2013-12-04 | 2014-12-04 | Organic electroluminescence display device |
US15/181,592 Active US9608232B2 (en) | 2013-12-04 | 2016-06-14 | Organic electroluminescence display device |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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US15/181,592 Active US9608232B2 (en) | 2013-12-04 | 2016-06-14 | Organic electroluminescence display device |
Country Status (5)
Country | Link |
---|---|
US (2) | US20150155523A1 (zh) |
JP (1) | JP2015109192A (zh) |
KR (1) | KR101701009B1 (zh) |
CN (1) | CN104701462A (zh) |
TW (1) | TWI545748B (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9277602B2 (en) * | 2014-04-30 | 2016-03-01 | Samsung Display Co., Ltd. | Organic electroluminescent display device |
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Also Published As
Publication number | Publication date |
---|---|
KR20150065144A (ko) | 2015-06-12 |
US20160285040A1 (en) | 2016-09-29 |
TWI545748B (zh) | 2016-08-11 |
US9608232B2 (en) | 2017-03-28 |
CN104701462A (zh) | 2015-06-10 |
JP2015109192A (ja) | 2015-06-11 |
TW201528500A (zh) | 2015-07-16 |
KR101701009B1 (ko) | 2017-01-31 |
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