US20130037214A1 - Curved glass sheet etching device - Google Patents

Curved glass sheet etching device Download PDF

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Publication number
US20130037214A1
US20130037214A1 US13/299,438 US201113299438A US2013037214A1 US 20130037214 A1 US20130037214 A1 US 20130037214A1 US 201113299438 A US201113299438 A US 201113299438A US 2013037214 A1 US2013037214 A1 US 2013037214A1
Authority
US
United States
Prior art keywords
receiving
hole
etching device
base
glass sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US13/299,438
Inventor
Shyan-Juh Liu
Chu-Sheng Chen
Xing-Rong Xiao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Futaihua Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
Original Assignee
Futaihua Industry Shenzhen Co Ltd
Hon Hai Precision Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futaihua Industry Shenzhen Co Ltd, Hon Hai Precision Industry Co Ltd filed Critical Futaihua Industry Shenzhen Co Ltd
Assigned to HON HAI PRECISION INDUSTRY CO., LTD., Fu Tai Hua Industry (Shenzhen) Co., Ltd. reassignment HON HAI PRECISION INDUSTRY CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHEN, Chu-sheng, LIU, SHYAN-JUH, XIAO, XING-RONG
Publication of US20130037214A1 publication Critical patent/US20130037214A1/en
Abandoned legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/04Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
    • B05B13/0442Installation or apparatus for applying liquid or other fluent material to separate articles rotated during spraying operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B3/00Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements
    • B05B3/02Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements
    • B05B3/10Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces
    • B05B3/1007Spraying or sprinkling apparatus with moving outlet elements or moving deflecting elements with rotating elements discharging over substantially the whole periphery of the rotating member, i.e. the spraying being effected by centrifugal forces characterised by the rotating member

Definitions

  • the present disclosure generally relates to an etching device, and particularly, to an etching device used for etching a curved glass sheet.
  • a glass surface may be etched by an etching device.
  • the etching device may include a plurality of nozzles arranged side by side. A plurality of glass sheets may be placed vertically below the nozzles.
  • an etching solution may go down along a side surface of the glass sheet with a uniform speed.
  • the above-mentioned etching device may be only fit to etch a flat glass sheet.
  • a flow speed of the etching solution along a side surface may not be uniform due to an uneven surface of the glass sheet.
  • a staying time of the etching solution on the side surface may vary, and the glass sheet may be etched unevenly.
  • FIG. 1 is a schematic, isometric view of an etching device of an embodiment, on which a plurality of curved glass sheets are mounted.
  • FIG. 2 is a schematic, exploded, isometric view of the etching device of FIG. 1 .
  • FIG. 3 is a schematic, cross-sectional view of FIG. 1 , taken along line III-III.
  • an embodiment of an etching device 100 is used to etch a plurality of curved glass sheets 200 .
  • the etching device 100 comprises a base 10 , a receiving member 30 , an air compressor 40 , and a plurality of rotating members 50 .
  • the receiving member 30 is configured for receiving an etching solution, and is connected to the air compressor 40 .
  • the etching solution may be jetted out from the receiving member 30 which is controlled by the air compressor 40 .
  • the plurality of rotating members 50 are rotatably mounted on the base 10 , adjacent to the receiving member 30 .
  • the plurality of curved glass sheets 200 are fixed to the rotating member 50 .
  • the etching solution may be sprayed onto surfaces of the plurality of curved glass sheets 200 .
  • the base 10 is configured for mounting the receiving member 30 and the plurality of rotating members 50 .
  • the base 10 is substantially plate-like.
  • a first mounting hole 11 and a plurality of second mounting holes 13 are defined in the base 10 .
  • the first mounting hole 11 is defined at a center of the base 10 .
  • the plurality of second mounting holes 13 are defined around the first mounting hole 11 , and are arranged evenly on an imaginary circle which is concentric with the first mounting hole 11 .
  • the receiving member 30 comprises a receiving portion 31 and a cover portion 33 .
  • the receiving portion 31 is substantially cylindrical, and is mounted in the first mounting hole 11 accordingly.
  • the receiving portion 31 comprises a first end surface 311 away from the base 10 ; a second end surface 312 opposite to the first end surface 311 , adjacent to the base 10 ; and a side surface 313 connecting the first end surface 311 and the second end surface 312 .
  • a receiving hole 3110 is defined at a center of the first end surface 311 , extending along an axial direction of the receiving portion 31 .
  • the second end surface 312 is fixed to the base 10 .
  • a plurality of spraying holes 3130 are defined on the side surface 313 around the receiving hole 3110 , extending along a radial direction of the receiving portion 31 .
  • the plurality of spraying holes 3130 are distributed all over the side surface 313 .
  • the plurality of spraying holes 3130 are arranged uniformly, forming a layered structure along the axial direction.
  • Each layer of the plurality of spraying holes 3130 is substantially parallel to the first end surface 311 . It is to be understood that the plurality of spraying holes 3130 may be arranged unevenly.
  • the cover portion 33 is disposed on the first end surface 311 to cover the receiving portion 31 .
  • the cover portion 33 is substantially cylindrical, and defines a communicating hole 330 at a center of the cover portion 33 .
  • the communicating hole 330 interconnects with the receiving hole 3110 .
  • the air compressor 40 is connected to the communicating hole 330 , such that when the air compressor 40 generates high pressure air, the etching solution can be jetted out from the receiving portion 31 .
  • the air compressor 40 may be omitted, and in alternative embodiments, the receiving member 30 may be rotatably placed on the base 10 , and may be driven to rotate by a driving member, such that the etching solution can be jetted out by a centrifugal force.
  • Each of the plurality of rotating members 50 is mounted in one of the plurality of second mounting holes 13 .
  • Each of the plurality of rotating members 50 comprises a main body 51 , and a rotating shaft 53 connected to the main body 51 .
  • the main body 51 is substantially cylindrical, and is placed opposite to each of the plurality of spraying holes 3130 of the receiving member 30 .
  • the plurality of curved glass sheets 200 may be mounted on a side surface of the main body 51 . In the illustrated embodiment, the plurality of curved glass sheets 200 are adhered to the side surface of the main body 51 with adhesive.
  • Each rotating shaft 53 passes through one of the plurality of second mounting holes 13 , and is then rotatably fixed to the base 10 .
  • the plurality of rotating members 50 may further comprise a plurality of sucking discs placed on the main body 51 to adhere the plurality of curved glass sheets 200 .
  • the plurality of rotating members 50 may further comprise a plurality of latching modules placed on the main body 51 to securely latch the plurality of curved glass sheets 200 .
  • the etching device 100 further comprises a plurality of driving members (not shown) to drive the rotating members 50 to rotate relative to the base 10 .
  • a quantity of the driving members is the same as that of the plurality of rotating members 50 .
  • Each of the plurality of driving members is connected to one of the plurality of rotating members 50 . It is to be understood that the quantity of the plurality of driving members may be smaller than that of the plurality of rotating members 50 , and in alternative embodiments, one or more gear assemblies connects the plurality of rotating members 50 .
  • the plurality of glass sheets 200 are mounted on the side surface of the main body 51 , then the plurality of rotating members 50 rotate, and the etching solution is sprayed onto surfaces of the plurality of glass sheets 200 . Because the plurality of glass sheets 200 can be rotated with the plurality of rotating members 50 , and the etching solution can be sprayed onto the plurality of glass sheets 200 at different angles and different heights, the plurality of glass sheets 200 may be evenly etched with the etching solution, even if the surfaces are uneven.
  • the etching device 100 may be used for etching a flat glass sheet, or with other etching solutions.
  • the etching device 100 may be used for etching objects made of other materials.

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Weting (AREA)

Abstract

An etching device is disclosed. The etching device comprises a base; a receiving member mounted on the base, the receiving member defines a receiving hole to receive an etching solution, the receiving member comprises a side surface, the side surface defines at least one spraying hole interconnected with the receiving hole, and at least one spraying hole is adapted to spray the etching solution; and at least one rotating member rotatably mounted on the base, opposite to the side surface of the receiving member.

Description

    BACKGROUND
  • 1. Technical Field
  • The present disclosure generally relates to an etching device, and particularly, to an etching device used for etching a curved glass sheet.
  • 2. Description of Related Art
  • In glass manufacturing processes, a glass surface may be etched by an etching device. The etching device may include a plurality of nozzles arranged side by side. A plurality of glass sheets may be placed vertically below the nozzles. When etching the glass sheet, an etching solution may go down along a side surface of the glass sheet with a uniform speed. However, the above-mentioned etching device may be only fit to etch a flat glass sheet. When such an etching device is used for etching a curved glass sheet, a flow speed of the etching solution along a side surface may not be uniform due to an uneven surface of the glass sheet. Thus, a staying time of the etching solution on the side surface may vary, and the glass sheet may be etched unevenly.
  • Therefore, there is room for improvement within the art.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a schematic, isometric view of an etching device of an embodiment, on which a plurality of curved glass sheets are mounted.
  • FIG. 2 is a schematic, exploded, isometric view of the etching device of FIG. 1.
  • FIG. 3 is a schematic, cross-sectional view of FIG. 1, taken along line III-III.
  • DETAILED DESCRIPTION
  • Referring to FIG. 1, an embodiment of an etching device 100 is used to etch a plurality of curved glass sheets 200. The etching device 100 comprises a base 10, a receiving member 30, an air compressor 40, and a plurality of rotating members 50. The receiving member 30 is configured for receiving an etching solution, and is connected to the air compressor 40. The etching solution may be jetted out from the receiving member 30 which is controlled by the air compressor 40. The plurality of rotating members 50 are rotatably mounted on the base 10, adjacent to the receiving member 30. The plurality of curved glass sheets 200 are fixed to the rotating member 50. The etching solution may be sprayed onto surfaces of the plurality of curved glass sheets 200.
  • Referring to FIGS. 2 and 3, the base 10 is configured for mounting the receiving member 30 and the plurality of rotating members 50. In the illustrated embodiment, the base 10 is substantially plate-like. A first mounting hole 11 and a plurality of second mounting holes 13 are defined in the base 10. The first mounting hole 11 is defined at a center of the base 10. The plurality of second mounting holes 13 are defined around the first mounting hole 11, and are arranged evenly on an imaginary circle which is concentric with the first mounting hole 11.
  • The receiving member 30 comprises a receiving portion 31 and a cover portion 33. The receiving portion 31 is substantially cylindrical, and is mounted in the first mounting hole 11 accordingly. The receiving portion 31 comprises a first end surface 311 away from the base 10; a second end surface 312 opposite to the first end surface 311, adjacent to the base 10; and a side surface 313 connecting the first end surface 311 and the second end surface 312. A receiving hole 3110 is defined at a center of the first end surface 311, extending along an axial direction of the receiving portion 31. The second end surface 312 is fixed to the base 10. A plurality of spraying holes 3130 are defined on the side surface 313 around the receiving hole 3110, extending along a radial direction of the receiving portion 31. The plurality of spraying holes 3130 are distributed all over the side surface 313. In the illustrated embodiment, the plurality of spraying holes 3130 are arranged uniformly, forming a layered structure along the axial direction. Each layer of the plurality of spraying holes 3130 is substantially parallel to the first end surface 311. It is to be understood that the plurality of spraying holes 3130 may be arranged unevenly. The cover portion 33 is disposed on the first end surface 311 to cover the receiving portion 31. The cover portion 33 is substantially cylindrical, and defines a communicating hole 330 at a center of the cover portion 33. The communicating hole 330 interconnects with the receiving hole 3110.
  • The air compressor 40 is connected to the communicating hole 330, such that when the air compressor 40 generates high pressure air, the etching solution can be jetted out from the receiving portion 31.
  • It is understood that the air compressor 40 may be omitted, and in alternative embodiments, the receiving member 30 may be rotatably placed on the base 10, and may be driven to rotate by a driving member, such that the etching solution can be jetted out by a centrifugal force.
  • Each of the plurality of rotating members 50 is mounted in one of the plurality of second mounting holes 13. Each of the plurality of rotating members 50 comprises a main body 51, and a rotating shaft 53 connected to the main body 51. The main body 51 is substantially cylindrical, and is placed opposite to each of the plurality of spraying holes 3130 of the receiving member 30. The plurality of curved glass sheets 200 may be mounted on a side surface of the main body 51. In the illustrated embodiment, the plurality of curved glass sheets 200 are adhered to the side surface of the main body 51 with adhesive. Each rotating shaft 53 passes through one of the plurality of second mounting holes 13, and is then rotatably fixed to the base 10. In one embodiment, the plurality of rotating members 50 may further comprise a plurality of sucking discs placed on the main body 51 to adhere the plurality of curved glass sheets 200. In another embodiment, the plurality of rotating members 50 may further comprise a plurality of latching modules placed on the main body 51 to securely latch the plurality of curved glass sheets 200.
  • The etching device 100 further comprises a plurality of driving members (not shown) to drive the rotating members 50 to rotate relative to the base 10. In the illustrated embodiment, a quantity of the driving members is the same as that of the plurality of rotating members 50. Each of the plurality of driving members is connected to one of the plurality of rotating members 50. It is to be understood that the quantity of the plurality of driving members may be smaller than that of the plurality of rotating members 50, and in alternative embodiments, one or more gear assemblies connects the plurality of rotating members 50.
  • During etching process, the plurality of glass sheets 200 are mounted on the side surface of the main body 51, then the plurality of rotating members 50 rotate, and the etching solution is sprayed onto surfaces of the plurality of glass sheets 200. Because the plurality of glass sheets 200 can be rotated with the plurality of rotating members 50, and the etching solution can be sprayed onto the plurality of glass sheets 200 at different angles and different heights, the plurality of glass sheets 200 may be evenly etched with the etching solution, even if the surfaces are uneven.
  • It can be appreciated that the etching device 100 may be used for etching a flat glass sheet, or with other etching solutions. The etching device 100 may be used for etching objects made of other materials.
  • It is to be understood, however, that even though numerous characteristics and advantages of the disclosure have been set forth in the foregoing description, together with details of the structure and function of the embodiments, the disclosure is illustrative only, and changes may be made in detail, especially in the matters of shape, size, and arrangement of parts within the principles of the embodiments to the full extent indicated by the broad general meaning of the terms in which the appended claims are expressed.

Claims (20)

1. An etching device, comprising:
a base;
a receiving member mounted on the base, wherein the receiving member defines a receiving hole to receive an etching solution, the receiving member comprises a side surface, the side surface defines at least one spraying hole interconnected with the receiving hole, and at least one spraying hole is adapted to spray the etching solution; and
at least one rotating member rotatably mounted on the base, opposite to the side surface of the receiving member.
2. The etching device of claim 1, wherein the receiving member comprises a receiving portion, the receiving portion comprises a first end surface connected to the side surface and away from the base, the receiving hole is defined on the first end surface, a quantity of the at least one spraying hole is greater than one, and the at least one spraying hole is arranged around the receiving hole.
3. The etching device of claim 2, wherein the receiving portion is cylindrical, the receiving hole extends along an axial direction of the receiving portion, and the at least one spraying hole extends along a radial direction of the receiving portion.
4. The etching device of claim 2, wherein the at least one spraying hole is arranged uniformly around the receiving hole.
5. The etching device of claim 4, wherein the at least one spraying hole is distributed all over the side surface of the receiving member.
6. The etching device of claim 4, wherein the at least one spraying hole forms a layered structure, and each layer of the at least one spraying hole is parallel to the first end surface of the receiving portion.
7. The etching device of claim 2, wherein the receiving member further comprises a cover portion connected to the first end surface of the receiving portion, and the cover portion defines a communicating hole connected to the receiving hole.
8. The etching device of claim 7, further comprising an air compressor connected to the communicating hole.
9. The etching device of claim 2, wherein a quantity of the at least one rotating member is greater than one, and the at least one rotating member is arranged around the receiving member.
10. The etching device of claim 1, wherein the receiving member is rotatably mounted on the base.
11. The etching device of claim 1, wherein each of the at least one rotating member comprises a main body, and a rotating shaft connected to the main body; the base defines at least one mounting hole; the rotating shaft passes through each of the at least one mounting hole.
12. A curved glass sheet etching device comprising:
a base;
a receiving member mounted on the base, wherein the receiving member comprises a receiving portion; the receiving portion comprises a first end surface away from the base, and a side surface connected to the first end surface; a receiving hole is defined on the first end surface to receive an etching solution; a plurality of spraying holes are defined on the side surface; the plurality of spaying holes are interconnected with the receiving hole, and are adapted to spray the etching solution; and
a plurality of rotating members rotatably mounted on the base, wherein the plurality of rotating members are arranged around the receiving member, and comprise side surfaces opposite to the side surface of the receiving member, the side surfaces of the plurality of rotating members are configured to mount the curved glass sheet.
13. The curved glass sheet etching device of claim 12, wherein the receiving portion is cylindrical, the receiving hole extends along an axial direction of the receiving portion, and the plurality of spraying holes are arranged along a radial direction of the receiving hole.
14. The curved glass sheet etching device the of claim 12, wherein the plurality of spraying holes are arranged uniformly.
15. The etching device for etching the curved glass sheet of claim 14, wherein the spraying holes are distributed in the whole side surface of the receiving portion.
16. The curved glass sheet etching device of claim 15, wherein the plurality of spraying holes form a layered structure, and each layer of the plurality of spraying holes is parallel to the first end surface of the receiving portion.
17. The curved glass sheet etching device of claim 12, wherein the receiving member further comprises a cover portion connected to the first end surface of the receiving portion, and the cover portion defines a communicating hole interconnected to the receiving hole.
18. The curved glass sheet etching device of claim 17, further comprising an air compressor connected to the communicating hole.
19. The curved glass sheet etching device of claim 12, wherein the receiving member is rotatably mounted on the base.
20. The curved glass sheet etching device of claim 12, wherein each of the plurality of rotating members comprises a main body, and a rotating shaft connected to the main body; the base defines a plurality of mounting holes; the rotating shaft rotatably fixed to the base passes through each of the plurality of mounting holes.
US13/299,438 2011-08-11 2011-11-18 Curved glass sheet etching device Abandoned US20130037214A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201110229889.7 2011-08-11
CN201110229889.7A CN102923936B (en) 2011-08-11 2011-08-11 Etching device

Publications (1)

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US20130037214A1 true US20130037214A1 (en) 2013-02-14

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US13/299,438 Abandoned US20130037214A1 (en) 2011-08-11 2011-11-18 Curved glass sheet etching device

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CN (1) CN102923936B (en)
TW (1) TWI412502B (en)

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CN107916747A (en) * 2017-11-13 2018-04-17 德睿盛兴(大连)装配式建筑科技有限公司 Exquisiteness builds the assembled wallboard and production method of smooth outside
CN107962501B (en) * 2017-12-01 2019-09-20 福建和达玻璃技术有限公司 The anti-dazzle surface processing equipment of special-shaped glass cover board with angle
CN108000368B (en) * 2017-12-01 2020-03-31 福建和达玻璃技术有限公司 Anti-dazzle surface treatment equipment and treatment method for curved-edge glass cover plate
CN113499912A (en) * 2021-06-04 2021-10-15 重庆工程职业技术学院 Wheel hub paint spraying apparatus is used in new energy automobile production convenient to it is fixed

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1392855A (en) * 1918-08-12 1921-10-04 Jr Benjamin Skidmore Hydraulic air-compressor and vacuum-producer
US4485759A (en) * 1983-01-19 1984-12-04 Multi-Arc Vacuum Systems Inc. Planetary substrate support apparatus for vapor vacuum deposition coating
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
US6399513B1 (en) * 1999-11-12 2002-06-04 Texas Instruments Incorporated Ozonated DI water process for organic residue and metal removal processes
US6406551B1 (en) * 1999-05-14 2002-06-18 Fsi International, Inc. Method for treating a substrate with heat sensitive agents
US20040087158A1 (en) * 2002-10-29 2004-05-06 Dainippon Screen Mfg. Co., Ltd. Substrate processing method and substrate processing apparatus
US6866723B2 (en) * 2000-08-09 2005-03-15 M.Fsi Ltd. Wet cleaning process and wet cleaning equipment
US20050200123A1 (en) * 2004-03-12 2005-09-15 Fsi International, Inc. Rotary unions, fluid delivery systems, and related methods
US20060048801A1 (en) * 2003-10-28 2006-03-09 Jacobs John W Tungsten plug corrosion prevention method using gas sparged water
US20060131276A1 (en) * 2004-12-17 2006-06-22 Johnston Steven W Uniformity in batch spray processing using independent cassette rotation
US20070161248A1 (en) * 2005-11-23 2007-07-12 Christenson Kurt K Process for removing material from substrates
US8409451B2 (en) * 2006-07-04 2013-04-02 Nec Corporation Apparatus for etching substrate and method of fabricating thin-glass substrate

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3953276A (en) * 1972-10-26 1976-04-27 Zenith Radio Corporation Etching apparatus with plural nozzle arrangements
AU1340301A (en) * 1999-10-19 2001-04-30 Phifer Smith Corporation A method and apparatus for treating a substrate with an ozone-solvent solution
KR100732019B1 (en) * 2006-02-17 2007-06-25 (주)지원테크 Apparatus of etching a glass substrate
KR101375848B1 (en) * 2006-12-08 2014-03-18 (주)스마트에이스 Apparatus for etching substratee and fabrication line for fabricating liquid crystal display device using thereof
JP4215170B2 (en) * 2007-01-25 2009-01-28 株式会社テスコム Glass panel reduction planarization method and glass panel reduction planarization apparatus
CN201347410Y (en) * 2009-02-09 2009-11-18 新鋐源科技股份有限公司 Upright type etching mechanism

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1392855A (en) * 1918-08-12 1921-10-04 Jr Benjamin Skidmore Hydraulic air-compressor and vacuum-producer
US4485759A (en) * 1983-01-19 1984-12-04 Multi-Arc Vacuum Systems Inc. Planetary substrate support apparatus for vapor vacuum deposition coating
US4485759B1 (en) * 1983-01-19 1987-02-10
US4851095A (en) * 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
US6406551B1 (en) * 1999-05-14 2002-06-18 Fsi International, Inc. Method for treating a substrate with heat sensitive agents
US6399513B1 (en) * 1999-11-12 2002-06-04 Texas Instruments Incorporated Ozonated DI water process for organic residue and metal removal processes
US6866723B2 (en) * 2000-08-09 2005-03-15 M.Fsi Ltd. Wet cleaning process and wet cleaning equipment
US20040087158A1 (en) * 2002-10-29 2004-05-06 Dainippon Screen Mfg. Co., Ltd. Substrate processing method and substrate processing apparatus
US20060048801A1 (en) * 2003-10-28 2006-03-09 Jacobs John W Tungsten plug corrosion prevention method using gas sparged water
US20050200123A1 (en) * 2004-03-12 2005-09-15 Fsi International, Inc. Rotary unions, fluid delivery systems, and related methods
US20060131276A1 (en) * 2004-12-17 2006-06-22 Johnston Steven W Uniformity in batch spray processing using independent cassette rotation
US20070161248A1 (en) * 2005-11-23 2007-07-12 Christenson Kurt K Process for removing material from substrates
US8409451B2 (en) * 2006-07-04 2013-04-02 Nec Corporation Apparatus for etching substrate and method of fabricating thin-glass substrate

Also Published As

Publication number Publication date
CN102923936B (en) 2014-12-10
TWI412502B (en) 2013-10-21
CN102923936A (en) 2013-02-13
TW201307232A (en) 2013-02-16

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AS Assignment

Owner name: HON HAI PRECISION INDUSTRY CO., LTD., TAIWAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LIU, SHYAN-JUH;CHEN, CHU-SHENG;XIAO, XING-RONG;REEL/FRAME:027250/0459

Effective date: 20111117

Owner name: FU TAI HUA INDUSTRY (SHENZHEN) CO., LTD., CHINA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LIU, SHYAN-JUH;CHEN, CHU-SHENG;XIAO, XING-RONG;REEL/FRAME:027250/0459

Effective date: 20111117

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION