US20090242870A1 - Light emitting device and method for manufacturing the same - Google Patents

Light emitting device and method for manufacturing the same Download PDF

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US20090242870A1
US20090242870A1 US12/193,588 US19358808A US2009242870A1 US 20090242870 A1 US20090242870 A1 US 20090242870A1 US 19358808 A US19358808 A US 19358808A US 2009242870 A1 US2009242870 A1 US 2009242870A1
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layer
aln
source gas
type
gan layer
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Gyu Beom KIM
Sang Joon Lee
Chang Suk HAN
Kwang Choong Kim
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Seoul Viosys Co Ltd
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Seoul Optodevice Co Ltd
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Assigned to SEOUL OPTO DEVICE CO., LTD. reassignment SEOUL OPTO DEVICE CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KIM, KWANG CHOONG, HAN, CHANG SUK, KIM, GYU BEOM, LEE, SANG JOON
Priority to US12/535,244 priority Critical patent/US8716046B2/en
Publication of US20090242870A1 publication Critical patent/US20090242870A1/en
Priority to US12/775,119 priority patent/US8716048B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2304/00—Special growth methods for semiconductor lasers
    • H01S2304/04—MOCVD or MOVPE
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3054—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping
    • H01S5/3063—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping using Mg
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
    • H01S5/3216—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities quantum well or superlattice cladding layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser

Definitions

  • the present invention relates to a light emitting device and a method for manufacturing the same. More particularly, the present invention relates to a light emitting device that has a p-type AlN/GaN layer of a super lattice structure between a p-type nitride semiconductor layer and an active layer, and to a method for manufacturing the same.
  • nitride-based semiconductors are widely used in blue/green light emitting diodes or laser diodes for light sources of full-color displays, traffic lights, general lighting fixtures, optical communication devices, etc.
  • the nitride-based semiconductor includes an active layer of a multi-quantum well structure disposed between n-type and p-type nitride semiconductor layers to emit light by recombination of electrons and holes in the active layer.
  • the p-type nitride semiconductor layer includes p-AlGaN as an electronic blocking layer (EBL) and is doped with Mg, which is combined with hydrogen, deteriorating crystallinity of the p-type nitride semiconductor layer while deteriorating electrical conductivity of the p-type nitride semiconductor layer.
  • EBL electronic blocking layer
  • Mg Mg
  • the present invention provides a light emitting device that includes a p-type nitride semiconductor layer with improved electrical conductivity and/or crystallinity, and a method for manufacturing the same.
  • the present invention discloses a light emitting device, including: an n-type nitride semiconductor layer; an active layer on the n-type nitride semiconductor layer; an AlN/GaN layer of a super lattice structure formed by alternately growing an AlN layer and a GaN layer on the active layer; and a p-type nitride semiconductor layer on the AlN/GaN layer of the super lattice structure, wherein at least one of the AlN layer and the GaN layer is doped with a p-type dopant.
  • the p-type nitride semiconductor layer may be a p-GaN layer.
  • the AlN/GaN layer of the super lattice structure may have an identical amount of p-type dopant in each pair of AlN layer and GaN layer alternately grown on the active layer.
  • the AlN/GaN layer of the super lattice structure may have a variable amount of p-type dopant in each pair of AlN layer and GaN layer alternately grown on the active layer.
  • the p-type dopant may be Mg or Zn.
  • the AlN layer may be a p-type AlN layer doped with the p-type dopant.
  • the GaN layer may be thicker than the AlN layer.
  • the present invention also discloses a method for manufacturing a light emitting device that includes: forming an n-type nitride semiconductor layer on a substrate; forming an active layer on the n-type nitride semiconductor layer; forming an AlN/GaN layer of a super lattice structure by alternately growing an AlN layer and a GaN layer on the active layer; and forming a p-type nitride semiconductor layer on the AlN/GaN layer of the super lattice structure, wherein at least one of the AlN layer and the GaN layer is doped with a p-type dopant.
  • the p-type nitride semiconductor layer may be a p-GaN layer.
  • the GaN layer may be thicker than the AlN layer.
  • the forming of an AlN/GaN layer of a super lattice structure may be performed in a reaction chamber, and include: (a) supplying source gases comprising a p-type dopant source gas, an N source gas, and an Al source gas into the reaction chamber to grow a p-type AlN layer doped with the p-type dopant on the active layer; (b) supplying NH 3 gas while stopping the growth of the p-type AlN layer by stopping the supply of the p-type dopant source gas and the Al source gas into the reaction chamber; (c) supplying NH 3 gas and a Ga source gas into the reaction chamber to grow a u-GaN layer on the p-type AlN layer; (d) supplying NH 3 gas while stopping the growth of the u-GaN layer by stopping the supply of the Ga source gas; and repeating (a) to (d) until the AlN/GaN layer of the super lattice structure is formed on the active layer.
  • the method may further include supplying source gases comprising the Ga source gas, the N source gas, and the p-type dopant source gas into the reaction chamber to grow the p-type nitride semiconductor layer doped with the p-type dopant on the substrate, after the forming of an AlN/GaN layer of a super lattice structure.
  • the p-type dopant source gas may be supplied in an identical flow into the reaction chamber.
  • the p-type dopant source gas may be supplied in different flows into the reaction chamber.
  • the forming of an AlN/GaN layer of a super lattice structure may be performed in a reaction chamber, and include: (a) supplying source gases comprising a p-type dopant source gas, an N source gas, and an Al source gas into the reaction chamber to grow a p-type AlN layer doped with the p-type dopant on the active layer; (b) supplying NH 3 gas while stopping the growth of the p-type AlN layer by stopping the supply of the p-type dopant source gas and the Al source gas into the reaction chamber; (c) supplying the p-type dopant source gas, a Ga source gas, and NH 3 gas into the reaction chamber to grow a p-GaN layer on the p-type AlN layer; (d) supplying NH 3 gas while stopping the growth of the p-GaN layer by stopping the supply of the p-type dopant source gas and the Ga source gas; and repeating (a) to (d) until the AlN/Ga
  • the forming of an AlN/GaN layer of a super lattice structure may be performed in a reaction chamber, and include: (a) supplying source gases comprising an N source gas and an Al source gas into the reaction chamber to grow the AlN layer on the active layer; (b) supplying NH 3 gas while stopping the growth of the AlN layer by stopping the supply of the Al source gas into the reaction chamber; (c) supplying a p-type dopant source gas, a Ga source gas, and NH 3 gas into the reaction chamber to grow a p-GaN layer on the AlN layer; (d) supplying NH 3 gas while stopping the growth of the p-GaN layer by stopping the supply of the p-type dopant source gas and the Ga source gas; and repeating (a) to (d) until the AlN/GaN layer of the super lattice structure is formed on the active layer.
  • the p-type dopant may be Mg or Zn, and the p-type dopant source gas may be CP 2 Mg or DMZn.
  • FIG. 1 is a cross-sectional view illustrating a light emitting device according to one embodiment of the present invention
  • FIG. 2 is a flowchart of a method for manufacturing a light emitting device according to one embodiment of the present invention
  • FIG. 3 is a timing diagram illustrating the method for manufacturing the light emitting device according to the embodiment of the present invention.
  • FIG. 4 is a graph depicting the relationship between light emission and Mg flow.
  • FIG. 5 is a graph depicting the relationship between light emitting amount and Al flow.
  • FIG. 1 is a cross-sectional view illustrating a light emitting device according to one embodiment of the present invention.
  • the light emitting device includes an n-type nitride semiconductor layer 25 , an active layer 27 , an AlN/GaN layer of a super lattice structure 28 , and a p-type nitride semiconductor layer 29 . Further, the light emitting device may include a substrate 21 , a buffer layer 23 , a transparent electrode layer 31 , an n-electrode 33 , and a p-electrode 35 .
  • the substrate 21 refers to a wafer used for manufacturing a nitride-based light emitting device.
  • the substrate is generally made of sapphire (Al 2 O 3 ) or silicon carbide (SiC), but the present invention is not limited thereto.
  • the substrate may be a heterogeneous substrate, such as Si, GaAs, spinel, etc., or a homogeneous substrate, such as GaN, suitable for growing a nitride semiconductor layer thereon.
  • the buffer layer 23 serves to relieve the lattice mismatch between the substrate 21 and the nitride semiconductor layer during growth of the nitride semiconductor layer on the substrate 21 .
  • the buffer layer 23 may be formed of an InAlGaN, SiC or ZnO-based material.
  • the n-type nitride semiconductor layer 25 is generally formed of GaN, but the present invention is not limited thereto. That is, the n-type nitride semiconductor layer 25 may be formed of an (Al, In, Ga)N-based binary or quarternary nitride semiconductor. The n-type nitride semiconductor layer 25 may be formed of a single layer or multiple layers, and may include a super lattice layer.
  • the active layer 27 may have a single quantum well structure or a multi-quantum well structure.
  • a quantum barrier layer and a quantum well layer are alternately stacked 2 or more times to 20 or less times.
  • the composition of the active layer 27 is determined according to luminescence wavelengths needed.
  • InGaN is suitable for the active layer (quantum well layer).
  • the quantum barrier layer is formed of nitride, for example, GaN or InGaN, which has a higher band gap than that of the quantum well layer.
  • the AlN/GaN layer of the super lattice structure 28 is formed by alternately growing an AlN layer 28 a and a GaN layer 28 b between the active layer 27 and the p-type nitride semiconductor layer 29 .
  • the AlN/GaN layer of the super lattice structure 28 can block dislocations from spreading into the p-type nitride semiconductor layer 29 on the AlN/GaN layer, thereby improving the hole concentration and crystallinity of the p-type nitride semiconductor layer 29 .
  • the AlN/GaN layer 28 of the super lattice structure can prevent diffusion of Mg in the AlN/GaN layer to allow suitable doping of Mg.
  • the AlN/GaN layer 28 at least one of the AlN layer and the GaN layer is doped with a p-type dopant.
  • the AlN/GaN layer 28 may be constituted by any combination of Mg doped p-type AlN and u-GaN, Mg undoped AlN and Mg doped p-GaN, or Mg doped p-type AlN and Mg doped p-GaN.
  • Mg is used as the p-type dopant in this embodiment, the present invention is not limited to Mg and may employ Zn.
  • the GaN layer 28 b is preferably thicker than the AlN layer 28 a . With this configuration, it is possible to prevent an increase of Vf and deterioration of crystallinity.
  • the p-type nitride semiconductor layer 29 is generally formed of GaN, but the present invention is not limited thereto. That is, the p-type nitride semiconductor layer 29 may be formed of an (Al, In, Ga)N-based binary or quarternary nitride semiconductor. The p-type nitride semiconductor layer 29 is formed using Mg as a dopant.
  • the transparent electrode layer 31 is disposed on the p-type nitride semiconductor layer 29 and may be formed of a transparent metallic layer such as Ni/Au or a conductive oxide such as ITO.
  • the n-electrode 33 is formed on the n-type nitride semiconductor layer 25 , and the p-electrode 31 is formed on the transparent electrode layer 31 .
  • the n-electrode and p-electrode may be formed of various metallic materials such as Ti/Al and the like.
  • the buffer layer, n-type nitride semiconductor layer, and active layer can be formed by various techniques such as metal-organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), hydride vapor phase epitaxy, and the like.
  • MOCVD metal-organic chemical vapor deposition
  • MBE molecular beam epitaxy
  • hydride vapor phase epitaxy and the like.
  • MOCVD is used in the related art. Therefore, a method of forming the p-type nitride semiconductor layer by MOCVD will be described below.
  • FIG. 2 is a flowchart of a method for manufacturing a light emitting device according to one embodiment of the present invention
  • FIG. 3 is a timing diagram illustrating the method for manufacturing the light emitting device according to the embodiment of the present invention.
  • a substrate 21 is prepared in S 01 .
  • the substrate 21 may have a buffer layer 23 , an n-type nitride semiconductor layer 25 , and an active layer 27 sequentially formed thereon.
  • source gases are supplied into the reaction chamber to deposit the buffer layer 23 , the n-type nitride semiconductor layer 25 , and the active layer 27 on the substrate 21 .
  • the buffer layer 23 may be formed of nitride or other known materials by any of methods well known to those skilled in the art. Thus, a detailed description of the material and method for forming buffer layer will be omitted herein.
  • the n-type nitride semiconductor layer 25 may generally be formed using Si as a dopant.
  • a source gas for Si include inactive gases such as SiH 4 , Si 2 H 4 , etc. and metal organic sources such as DTBSi.
  • the n-type nitride semiconductor layer 25 may have a Si concentration in the range of 1 ⁇ 10 17 /cm 3 ⁇ 5 ⁇ 10 19 /cm 3 , and a thickness of 1.0 ⁇ 5.0 ⁇ m.
  • the active layer 27 may have a single quantum well structure or a multi-quantum well structure.
  • the multi-quantum well structure of the active layer 27 is formed by alternately stacking a quantum well layer of In x Ga 1-x N (0.1 ⁇ x ⁇ 1) and a quantum barrier layer of In y Ga 1-y N (0 ⁇ y ⁇ 0.5) 2 or more times to 20 or less times.
  • each quantum well layer has a thickness of 1 ⁇ 5 nm and contains indium in the range of 0.1 ⁇ x ⁇ 0.4
  • each quantum barrier layer has a thickness of 5 ⁇ 40 nm and contains indium in the range of 0.1 ⁇ y ⁇ 0.2.
  • a p-type AlN layer 28 a is grown by supplying a p-type dopant source gas, an N source gas, and an Al source gas into the reaction chamber in S 03 .
  • the supply of the source gases is performed for a period of time T 1 .
  • Examples of the p-type dopant source gas include, but are not limited to, CP 2 Mg, DmZn, and the like.
  • Examples of the N source gas include, but are not limited to, NH 3 , dimethylhydrazine (DMHy), and the like.
  • Examples of the Al source gas include, but are not limited to, trimethyl aluminum (TMAl), Al(CH 3 ) 3 , and the like.
  • CP 2 Mg i.e. an Mg source gas, is employed as the p-type dopant source gas, but the present invention is not limited thereto.
  • the period of time T 1 can be set to a time for forming the AlN layer 28 a to a desired thickness.
  • the growth of the p-type AlN layer is stopped by stopping the supply of the Mg source gas and the Al source gas into the reaction chamber in S 05 . Stopping the growth of the p-type AlN layer is performed for a period of time T 2 .
  • the reaction chamber is provided with an exhaust pump for discharging the source gases to the outside, so that most of Mg and Al source gases can be discharged from the reaction chamber to the outside in a predetermined period of time after stopping the supply of the source gases.
  • the period of time T 2 is set to a time for discharging the Mg and Al source gases from the reaction chamber to the outside, and may be in the range of 1 ⁇ 60 seconds.
  • NH 3 gas is supplied to supply nitrogen elements while the growth of the nitride semiconductor layer is stopped.
  • the N source gas comprises NH 3
  • the NH 3 gas can be continuously supplied while the supply of the Mg source gas and the Al source gas is stopped.
  • the NH 3 gas can be separately supplied during the step of growing the p-type AlN layer in S 05 .
  • a Ga source gas and NH 3 gas are supplied into the reaction chamber to grow a u-GaN layer 28 b on the p-type AlN layer 28 a in S 07 .
  • the Ga source gas include, but are not limited to, trimethyl gallium (TMGa), triethyl gallium (TEGa), and the like.
  • the growth of the u-GaN layer 28 b is carried out for a period of time T 3 , which may be in the range of 1 ⁇ 60 seconds.
  • the growth of the u-GaN layer is stopped by stopping the supply of the Ga source gas into the reaction chamber in S 09 . Stopping the growth of the u-GaN layer is carried out for a period of time T 4 .
  • the reaction chamber is provided with the exhaust pump for discharging the source gases to the outside, so that most Ga source gas can be discharged from the reaction chamber to the outside in a predetermined period of time after stopping the supply of the source gas.
  • the period of time T 4 is set to a time for discharging the Ga source gas from the reaction chamber to the outside, and may be in the range of 1 ⁇ 60 seconds.
  • the growth of the p-type AlN layer 28 a , stopping the growth of the p-type AlN layer 28 a , the growth of the u-GaN layer 28 b , and stopping the growth of the u-GaN layer 28 b are repeated to form an AlN/GaN super lattice layer 28 .
  • the p-type AlN layers 28 a and the u-GaN layers 28 b are alternately stacked to a total thickness of 300 ⁇ 400 ⁇ .
  • the AlN/GaN layer 28 of the super lattice structure is constituted by 10 to 100 pairs of AlN and GaN layers. Accordingly, each thickness of the p-type AlN layers 28 a and the u-GaN layers 28 b constituting the super lattice layer maybe determined so as to realize the total thickness of the super lattice layer.
  • the n-type nitride semiconductor layer 25 , active layer 27 , AlN/GaN layer of the super lattice structure 28 , and p-type nitride semiconductor layer 29 can be grown in the same reaction chamber.
  • an Mg doped p-type nitride semiconductor layer 29 is grown by supplying the Ga source gas, the N source gas, and the Mg source gas into the reaction chamber in S 13 .
  • the p-type nitride semiconductor layer 29 and the active layer 27 on the substrate 21 are subjected to patterning, followed by formation of a transparent electrode layer 31 , an n-electrode 33 , and a p-electrode 35 to provide a light emitting device as shown in FIG. 1 .
  • the AlN/GaN layer 28 of the super lattice structure is formed by alternately growing the p-type AlN layer 28 a and the u-GaN layer 28 b between the active layer 27 and the p-type nitride semiconductor layer 29 such that the AlN/GaN layer 28 can block dislocations from spreading into the nitride semiconductor layer 29 growing on the AlN/GaN layer, thereby improving the hole concentration and crystallinity of the p-type nitride semiconductor layer 29 while preventing diffusion of Mg in the AlN/GaN layer to allow suitable doping of Mg.
  • FIG. 4 is a graph depicting the relationship between light emission and Mg flow. As can be seen in FIG. 4 , overall light emission was increased due to the use of the AlN/GaN layer of the super lattice structure. When growing the AlN/GaN layer, light emission was varied according to the Mg flow, and maximum light emission was obtained near 180 sccm of Mg.
  • FIG. 5 is a graph depicting the relationship between light emission and Al flow. As can be seen in FIG. 5 , overall light emission was increased due to the use of the AlN/GaN layer of the super lattice structure. When growing the AlN/GaN layer, the light emission was varied according to the Al flow, and maximum light emission was obtained near 40 sccm of Al.
  • the method of manufacturing the light emitting device according to the embodiment of the present invention can be applied to a light emitting diode and other nitride-based optical devices such as a laser diode and the like.
  • the AlN/GaN layer of the super lattice structure has been described as being formed by sequentially growing the AlN layer and the GaN layer in this order, the present invention is not limited to this sequence. That is, the GaN layer can be grown prior to the AlN layer when forming the AlN/GaN layer of the super lattice structure.
  • a constant amount of Mg is supplied in each pair of AlN and GaN layers that are alternately stacked to form the AlN/GaN layer of the super lattice structure.
  • the present invention is not limited to this configuration. That is, the amount of Mg in each pair of AlN and GaN layers may be varied, for example, gradually increased or decreased from one pair to another.
  • the AlN/GaN layer is constituted by the p-type AlN layer and the u-GaN layer in this embodiment, but the present invention is not limited to this configuration.
  • the formation of the AlN/GaN layer of the super lattice structure may be performed by (a) supplying source gases comprising an Mg source gas, an N source gas, and an Al source gas into a reaction chamber to grow an Mg doped p-type AlN layer on the active layer; (b) supplying NH 3 gas while stopping the growth of the p-type AlN layer by stopping the supply of the Mg source gas and the Al source gas into the reaction chamber; (c) supplying the Mg source gas, a Ga source gas, and NH 3 gas into the reaction chamber to grow a p-GaN layer on the p-type AlN layer; (d) supplying NH 3 gas while stopping the growth of the p-GaN layer by stopping the supply of the Mg source gas and the Ga source gas; and repeating the steps of (a) to (d) until the AlN/GaN layer of the super lattice structure comprising the Mg doped p-type AlN layers and the Mg doped p-
  • the formation of the AlN/GaN layer of the super lattice structure may be performed by (a) supplying source gases comprising an N source gas and an Al source gas into the reaction chamber to grow an AlN layer on the active layer; (b) supplying NH 3 gas while stopping the growth of the AlN layer by stopping the supply of the Al source gas into the reaction chamber; (c) supplying an Mg source gas, a Ga source gas, and NH 3 gas into the reaction chamber to grow a p-GaN layer on the AlN layer; (d) supplying NH 3 gas while stopping the growth of the p-GaN layer by stopping the supply of the Mg source gas and the Ga source gas; and repeating the steps of (a) to (d) until the AlN/GaN layer of the super lattice structure comprising the Mg undoped p-type AlN layers and the Mg doped p-GaN layers is formed on the active layer.
  • the p-type dopant is Mg, and thus, the p-type dopant source gas is CP 2 Mg in this embodiment, the p-type dopant may be Zn, and thus, the p-type dopant source gas may be DMZn.
  • an AlN/GaN layer of a super lattice structure is formed between a p-type nitride semiconductor layer and an active layer to decrease density of crystal defects, for example, dislocation density, thereby improving crystallinity of the p-type nitride semiconductor layer.
  • the light emitting device according to the embodiments of the present invention has a lower drive voltage, and improved light emitting efficiency and output.
  • Mg is doped through the AlN/GaN layer of the super lattice structure to prevent undesirable diffusion of Mg, so that suitable doping can be obtained, thereby improving light emitting efficiency of the light emitting device.

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US12/775,119 US8716048B2 (en) 2008-03-25 2010-05-06 Light emitting device and method for manufacturing the same

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120138891A1 (en) * 2010-10-27 2012-06-07 The Regents Of The University Of California METHOD FOR REDUCTION OF EFFICIENCY DROOP USING AN (Al,In,Ga)N/Al(x)In(1-x)N SUPERLATTICE ELECTRON BLOCKING LAYER IN NITRIDE BASED LIGHT EMITTING DIODES
US20150243845A1 (en) * 2014-02-26 2015-08-27 Epistar Corporation Light-emitting device
US9281437B2 (en) 2012-07-13 2016-03-08 Lg Innotek Co., Ltd. Light emitting device, and method for fabricating the same
CN113471060A (zh) * 2021-05-27 2021-10-01 南昌大学 一种减少硅衬底上AlN薄膜微孔洞的制备方法
CN115986014A (zh) * 2022-11-17 2023-04-18 淮安澳洋顺昌光电技术有限公司 一种设有连接层的外延片及包含该外延片的发光二极管

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7902545B2 (en) * 2008-05-14 2011-03-08 Baker Hughes Incorporated Semiconductor for use in harsh environments
KR20130129683A (ko) * 2012-05-21 2013-11-29 포항공과대학교 산학협력단 그레이드 초격자 구조의 전자 차단층을 갖는 반도체 발광 소자
JP5874592B2 (ja) * 2012-09-21 2016-03-02 豊田合成株式会社 Ｉｉｉ族窒化物半導体発光素子の製造方法
US9773889B2 (en) 2014-07-18 2017-09-26 Taiwan Semiconductor Manufacturing Company Limited Method of semiconductor arrangement formation
CN106299051A (zh) * 2016-08-05 2017-01-04 华灿光电（浙江）有限公司 一种发光二极管外延片及其制备方法
US10516076B2 (en) 2018-02-01 2019-12-24 Silanna UV Technologies Pte Ltd Dislocation filter for semiconductor devices
CN109166910B (zh) * 2018-09-06 2020-07-14 中山大学 一种p型AlGaN半导体材料及其外延制备方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270247A (en) * 1991-07-12 1993-12-14 Fujitsu Limited Atomic layer epitaxy of compound semiconductor
US5994158A (en) * 1996-02-06 1999-11-30 Oki Electric Industry Co., Ltd. Method of fabricating an abrupt hetero interface by organometallic vapor phase growth
US6266355B1 (en) * 1997-09-12 2001-07-24 Sdl, Inc. Group III-V nitride laser devices with cladding layers to suppress defects such as cracking
US20020025661A1 (en) * 1997-11-18 2002-02-28 Nikolaev Audrey E. Method for growing III-V compound semiconductor structures with an integral non-continuous quantum dot layer utilizing HVPE techniques
US20040004223A1 (en) * 1997-01-09 2004-01-08 Nichia Chemical Industries, Ltd. Nitride semiconductor device
US6998284B2 (en) * 2004-02-17 2006-02-14 Sumitomo Electric Industries, Ltd. Semiconductor device having quantum well structure, and method of forming the same
US20060191474A1 (en) * 2005-02-02 2006-08-31 Agency For Science, Technology And Research Method and structure for fabricating III-V nitride layers on silicon substrates
US20060267025A1 (en) * 2005-05-16 2006-11-30 Dong-Sing Wuu Light emitting device
US20080003838A1 (en) * 2006-06-22 2008-01-03 Asm International N.V. Deposition of complex nitride films
US20090152529A1 (en) * 2007-12-14 2009-06-18 Palo Alto Research Center Incorporated Light emitting devices with inhomogeneous quantum well active regions
US7683379B2 (en) * 2004-07-30 2010-03-23 Fujikura Ltd. Light emitting element and manufacturing method thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2795294B2 (ja) * 1991-10-12 1998-09-10 日亜化学工業株式会社 窒化ガリウムアルミニウム半導体の結晶成長方法。
JP3497790B2 (ja) * 1999-11-29 2004-02-16 星和電機株式会社 Ｐ型窒化ガリウム系半導体の製造方法及びｐ型窒化ガリウム系半導体を用いた発光素子
JP2001223429A (ja) * 2000-02-09 2001-08-17 Fuji Photo Film Co Ltd 半導体レーザ装置
JP3453558B2 (ja) * 2000-12-25 2003-10-06 松下電器産業株式会社 窒化物半導体素子
US7332365B2 (en) * 2004-05-18 2008-02-19 Cree, Inc. Method for fabricating group-III nitride devices and devices fabricated using method
JP2006128527A (ja) * 2004-11-01 2006-05-18 Osaka Gas Co Ltd ＧａＮ系化合物半導体の製造方法
JP2006245066A (ja) * 2005-02-28 2006-09-14 Seiwa Electric Mfg Co Ltd 発光ダイオード及び発光ダイオードの製造方法
JP5025168B2 (ja) * 2006-06-08 2012-09-12 昭和電工株式会社 Ｉｉｉ族窒化物半導体積層構造体の製造方法
EP1883140B1 (de) * 2006-07-27 2013-02-27 OSRAM Opto Semiconductors GmbH LD oder LED mit Übergitter-Mantelschicht und Dotierungsgradienten

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270247A (en) * 1991-07-12 1993-12-14 Fujitsu Limited Atomic layer epitaxy of compound semiconductor
US5994158A (en) * 1996-02-06 1999-11-30 Oki Electric Industry Co., Ltd. Method of fabricating an abrupt hetero interface by organometallic vapor phase growth
US20040004223A1 (en) * 1997-01-09 2004-01-08 Nichia Chemical Industries, Ltd. Nitride semiconductor device
US6266355B1 (en) * 1997-09-12 2001-07-24 Sdl, Inc. Group III-V nitride laser devices with cladding layers to suppress defects such as cracking
US20020025661A1 (en) * 1997-11-18 2002-02-28 Nikolaev Audrey E. Method for growing III-V compound semiconductor structures with an integral non-continuous quantum dot layer utilizing HVPE techniques
US6998284B2 (en) * 2004-02-17 2006-02-14 Sumitomo Electric Industries, Ltd. Semiconductor device having quantum well structure, and method of forming the same
US7683379B2 (en) * 2004-07-30 2010-03-23 Fujikura Ltd. Light emitting element and manufacturing method thereof
US20060191474A1 (en) * 2005-02-02 2006-08-31 Agency For Science, Technology And Research Method and structure for fabricating III-V nitride layers on silicon substrates
US20060267025A1 (en) * 2005-05-16 2006-11-30 Dong-Sing Wuu Light emitting device
US20080003838A1 (en) * 2006-06-22 2008-01-03 Asm International N.V. Deposition of complex nitride films
US20090152529A1 (en) * 2007-12-14 2009-06-18 Palo Alto Research Center Incorporated Light emitting devices with inhomogeneous quantum well active regions

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120138891A1 (en) * 2010-10-27 2012-06-07 The Regents Of The University Of California METHOD FOR REDUCTION OF EFFICIENCY DROOP USING AN (Al,In,Ga)N/Al(x)In(1-x)N SUPERLATTICE ELECTRON BLOCKING LAYER IN NITRIDE BASED LIGHT EMITTING DIODES
US9281437B2 (en) 2012-07-13 2016-03-08 Lg Innotek Co., Ltd. Light emitting device, and method for fabricating the same
US20150243845A1 (en) * 2014-02-26 2015-08-27 Epistar Corporation Light-emitting device
CN113471060A (zh) * 2021-05-27 2021-10-01 南昌大学 一种减少硅衬底上AlN薄膜微孔洞的制备方法
CN115986014A (zh) * 2022-11-17 2023-04-18 淮安澳洋顺昌光电技术有限公司 一种设有连接层的外延片及包含该外延片的发光二极管

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EP2105974A3 (en) 2012-08-22
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JP5322523B2 (ja) 2013-10-23
KR101308130B1 (ko) 2013-09-12
EP2105974A2 (en) 2009-09-30
US20100216272A1 (en) 2010-08-26
US8716048B2 (en) 2014-05-06
JP2009239243A (ja) 2009-10-15
KR20090102203A (ko) 2009-09-30
US20090291519A1 (en) 2009-11-26

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