US20060157227A1 - Cooling device of thin plate type for preventing dry-out - Google Patents
Cooling device of thin plate type for preventing dry-out Download PDFInfo
- Publication number
- US20060157227A1 US20060157227A1 US10/559,042 US55904205A US2006157227A1 US 20060157227 A1 US20060157227 A1 US 20060157227A1 US 55904205 A US55904205 A US 55904205A US 2006157227 A1 US2006157227 A1 US 2006157227A1
- Authority
- US
- United States
- Prior art keywords
- section
- coolant
- cooling device
- thin plate
- type cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0233—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0266—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with separate evaporating and condensing chambers connected by at least one conduit; Loop-type heat pipes; with multiple or common evaporating or condensing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2339/00—Details of evaporators; Details of condensers
- F25B2339/02—Details of evaporators
- F25B2339/021—Evaporators in which refrigerant is sprayed on a surface to be cooled
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2245/00—Coatings; Surface treatments
- F28F2245/02—Coatings; Surface treatments hydrophilic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2245/00—Coatings; Surface treatments
- F28F2245/04—Coatings; Surface treatments hydrophobic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2270/00—Thermal insulation; Thermal decoupling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Definitions
- the present invention relates to a thin plate-type cooling device for cooling a semiconductor integrated circuit device, etc., and more particularly to a thin plate-type cooling device capable of preventing a coolant from drying out using the phase transition of operation fluid.
- cooling technologies In response to the increase of the rate of heat emission, cooling technologies have been developed such as fin-fan, peltier, water-jet, immersion, heat pipe type coolers, etc., which are generally known.
- the fin-fan type cooler which compulsorily cools devices using fins and/or fans has been used for tens of years, but has some defects such as noise, vibration, and low cooling efficiency as compared with its large volume.
- the peltier type cooler doesn't make noise or vibration, it has a problem that it requires too many heat dissipation devices at its hot junction, needing large driving power due to its low efficiency.
- the water-jet type cooler goes mainstream in cooling device research because of its excellent efficiency, but its structure is complicated due to the use of a thin film pump driven by an external power supply, and it is significantly affected by gravity, as well as a problem that it is difficult to achieve robust design when applied to personal mobile electronic equipment.
- the gas flowing from an evaporation section towards a condensation section acts as resistance against the fluid returning from the condensation section towards the evaporation section. Accordingly, if a large amount of heat is applied to the heat pipe, the liquid into which the gas with a high velocity is to change cannot return to the evaporation section, so a dry-out phenomenon by which the coolant in the liquid state is exhausted occurs in the evaporation section. And there is a problem that its installation location is significantly restricted because the coolant gasified inside the pipe moves depending upon buoyancy and pressure difference, and the liquefied coolant in the heat pipe depends on gravity due to the structure and size of the medium of the returning section.
- the thin plate-type cooling device disclosed includes a thin plate-shaped housing having a fluid circulation loop therein and a coolant having a phase transition characteristic, circulating the circulation loop in the housing, wherein the circulation loop in the housing includes: a coolant storage section formed on one end inside the housing for storing the coolant in the liquid state; an evaporation section including at least one first tiny channel connected to the one end of the coolant storage section, wherein the coolant in the liquid state in the first tiny channel is partly filled from the coolant storage section to a predetermined area of the first tiny channel due to the surface tension with an inner wall of the first tiny channel, the surface tension inside the first tiny channel is set more than gravity, and the coolant in the liquid state filled in the first tiny channel can be gasified by the heat absorbed from a heat source; a condensation section including at least one second tiny channel disposed away from the first tiny channel of the evaporation section as much as a predetermined distance in the longitudinal direction on a same plane for condensing the coolant in the gas state gasified and
- the heat of the external heat source contacting the cooling device can be dissipated using the latent heat during phase transition.
- the coolant in the gas state is not completely condensed in the condensation section and reaches the condensation section via the liquefied coolant transfer section and/or the coolant storage section, contained in the condensed coolant in the form of bubbles. If the bubbles contained in the coolant in the liquid state reach the evaporation section, there is concern that the dry-out phenomenon by which the coolant in the liquid state is exhausted occurs in the evaporation section.
- a thin plate-type cooling device includes a thin plate-shaped housing in which a circulation loop of a fluid is formed, and a coolant capable of changing from one state to another, circulating along the circulation loop inside the housing, wherein the circulation loop inside the housing includes an evaporation section formed on one end of the circulation loop, wherein the liquefied coolant is at least partly filled by a capillary action and the coolant filled in a liquid state is gasified by heat transferred from an external heat source, a gaseous coolant transfer section formed adjacent to the evaporation section, wherein the gasified coolant is transferred through the gaseous coolant transfer section and the gaseous coolant transfer section has at least one first cavity for containing the gaseous coolant which has not been condensed, a liquefied coolant transfer section formed adjacent to the condensation section and thermally insulated from the evaporation section, wherein the liquefied coolant is transferred towards the evaporation section, and a thermal insulation section for thermally
- FIG. 1 a shows the external appearance of a thin plate-type cooling device according to a first embodiment of this invention.
- FIG. 1 b shows a schematic section on an X-Y plane of the thin plate-type cooling device of the first embodiment viewed in a second direction.
- FIG. 2 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device of the first embodiment.
- FIG. 2 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the first embodiment.
- FIG. 2 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the first embodiment.
- FIG. 3 a shows a schematic sectional view taken in the first direction on the X-Y plane of a thin plate-type cooling device of a second embodiment.
- FIG. 3 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the second embodiment.
- FIG. 3 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the second embodiment.
- FIG. 4 a shows a schematic sectional view taken in the first direction on the X-Y plane of a plate-type cooling device of a third embodiment.
- FIG. 4 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the third embodiment.
- FIG. 4 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the third embodiment.
- FIG. 5 a shows a schematic sectional view taken in the first direction on the X-Y plane of a thin plate-type cooling device of a fourth embodiment.
- FIG. 5 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the fourth embodiment.
- FIG. 5 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the fourth embodiment.
- FIG. 5 d shows a schematic sectional view taken along the C-C′ line on the Y-Z plane of the thin plate-type cooling device of the fourth embodiment.
- FIG. 1 a shows the external appearance of a thin plate-type cooling device 100 according to a first embodiment of this invention. It is preferable that the external appearance of the thin plate-type cooling device 100 of this invention is approximately rectangular, and the thin plate-type cooling device 100 is formed by bonding a lower plate 100 a and an upper plate 100 b in each of which internal elements have been formed.
- an “X-axis direction” is the longitudinal direction (from the left to the right of the drawing) of the thin plate-type cooling device 100 of this invention
- a “Y-axis direction” is the lateral direction (into the drawing) of the thin plate-type cooling device 100
- a “Z-axis direction” is the vertical direction (from the bottom of the top of the drawing) of the thin plate-type cooling device 100 .
- a “section viewed in a first direction” is the section viewed in the negative Z-axis direction (i.e., the direction from the bottom of the top of the drawing), and a “section viewed in a second direction” is the section viewed in the positive Z-axis direction (i.e., the direction from the top of the bottom of the drawing).
- FIG. 1 b shows a schematic section on an X-Y plane of the thin plate-type cooling device 100 of the first embodiment viewed in the second direction.
- the lower plate 100 a of the thin plate-type cooling device 100 forms a circulation loop of a coolant inside an approximately rectangular housing 112 by being combined with the upper plate 100 b .
- the coolant circulates in the arrow direction and cools an external heat source contacting the cooling device 100 , using the latent heat during its phase transition between liquid and gas states.
- the housing 112 can be manufactured of a material such as semiconductor, e.g. Si, Ga, etc., a novel substance-laminated material, e.g. Self Assembled Monolayer (SAM), metal and/or alloy, e.g. Cu, Al, etc. with high conductivity, ceramic, a high molecular substance, e.g. plastic, a crystalline material, e.g. diamond.
- a semiconductor chip as the external heat source
- the housing can be made of the same material as that of the surface of the external source so as to minimize the thermal contact resistance.
- the housing can be integrally formed as one piece with the surface material of the external source during the process of manufacturing the semiconductor chip.
- the coolant to be injected into the thin plate-type cooling device 100 can be selected from things capable of changing its phase between liquid and gas states due to the external heat.
- a suitable coolant should be selected.
- any of a series of alcohol such as methanol, ethanol, etc.
- water or alcohol as the coolant, it has an advantage that a large amount of heat can transferred because its heat capacity is large, and its contact angle by the surface tension with the inner wall of semiconductor is small, so that the current speed of the coolant becomes high.
- water or alcohol as the coolant unlike CFC, does not cause any environmental pollution even though it leaks from the thin plate-type cooling device 100 by any reason.
- the thin plate-type cooling device 100 includes an evaporation section 104 formed on one end inside the thin plate-type cooling device 100 , in which the coolant in the liquid state is at least partly filled due to the capillary action and the coolant in the liquid state filled is gasified due to the heat transferred from the external heat source, a gaseous coolant transfer section 106 formed adjacent to the evaporation section 104 , in which the coolant gasified is transferred in a predetermined direction due to the pressure difference, a condensation section 108 formed adjacent to the gaseous coolant transfer section 106 , in which the coolant in the gas state is condensed into the liquid state, and liquefied coolant transfer sections 102 and 110 formed adjacent to the condensation section 108 and thermally insulated from the evaporation section 104 , in which the coolant condensed into the liquid state is transferred towards the evaporation section 104 .
- the evaporation section 104 , the gaseous coolant transfer section 106 , the condensation section 108 and the liquefied coolant transfer sections 102 and 110 may be formed only on the lower plate 100 a of the thin plate-type cooling device 100 .
- the upper plate 100 b of the thin plate-type cooling device 100 may have only cavities on predetermined areas. The configuration of the upper plate 100 b will be described later referring to FIGS. 2 to 5 .
- the coolant inside the thin plate-type cooling device 100 forms the circulation loop along the arrows of the drawing. That is, the coolant sequentially circulates via the evaporation section 104 , the gaseous coolant transfer section 106 , the condensation section 108 , the liquefied coolant transfer section 110 near the condensation section, and the liquefied coolant transfer section 102 near the evaporation section.
- the thin plate-type cooling device 100 may further include a coolant storage section (not shown) whose volume is suitable for storing a predetermined amount of the coolant in the liquid state in the liquefied coolant transfer sections 102 and 110 .
- a coolant storage section (not shown) whose volume is suitable for storing a predetermined amount of the coolant in the liquid state in the liquefied coolant transfer sections 102 and 110 .
- a part of the liquefied coolant transfer section 102 near the evaporation section may be used for the coolant storage section.
- a plurality of coolant storage sections may be formed.
- the evaporation section 104 is adjacent to one end (“exit side”) of the liquefied coolant transfer section 102 near the evaporation section, and a plurality of tiny channels are formed in the evaporation section 104 , so that all or a part of the tiny channels are filled with the coolant stored in the liquefied coolant transfer section 102 near the evaporation section by the capillary action.
- the evaporation section 104 is disposed adjacent to the external heat source (not shown), and thereby the coolant in the liquid state accumulated in the tiny channels by the heat transferred form the heat source is gasified, so it changes into the gaseous state.
- the heat from the heat source is absorbed to the coolant as much as the latent heat caused by the phase transition of the coolant, and the heat from the heat source can be eliminated as the coolant in the gas state is condensed to dissipate the heat as described later.
- the surface tension in the tiny channels is larger than gravity.
- the smaller the contact angle of the meniscus of the liquefied coolant accumulated in the tiny channels the more it is preferable.
- the inner walls of the tiny channels is formed of or treated with a hydrophilic material.
- the hydrophilic material treatment is performed by plating, coating, coloring, anodization, plasma treatment, laser treatment, etc.
- the surface coarseness of the inner walls of the tiny channels can be adjusted in order to improve the heat transfer efficiency.
- the hydrophilic treatment is performed on the surfaces of the liquefied coolant transfer sections 110 and 102 and the evaporation section 104 and the hydrophobic treatment is performed on the surfaces of the gaseous coolant transfer section 106 and the condensation section 108 , so that the flow of the coolant is improved to increase the cooling efficiency.
- the cross-sections of the tiny channels may be circular, elliptical, rectangular, square, polygonal, etc.
- the magnitude of the surface tension of the coolant can be controlled by increasing or decreasing the cross-sections of the tiny channels in the longitudinal direction thereof (i.e., the X axis direction), the transfer direction and velocity of the coolant can also be controlled by forming a plurality of grooves or nodes on the inner wall thereof.
- the coolant gasified in the evaporation section 104 is transferred in the opposite direction to the liquefied coolant transfer section 102 near the evaporation section, and the gaseous coolant transfer section 106 is formed adjacent to the evaporation section 104 to function as a passage through the gaseous coolant is transferred.
- the gaseous coolant transfer section 106 may include a plurality of guides 118 so that the gasified coolant can be transferred in a predetermined direction (i.e., in the opposite direction to the coolant storage section 102 ).
- the guides 118 have the function of increasing the mechanical strength of the thin plate-type cooling device 100 . Accordingly, the guides 118 may not be included if there is no problem in the mechanical strength.
- the condensation section 108 is the area where the gaseous coolant transferred inwards through the gaseous coolant transfer section 106 is condensed and liquefied again.
- the condensation section 108 is formed away from the evaporation section 104 by a predetermined distance on the same plane.
- the condensation section 108 may include a plurality of tiny channels (not shown) similar to the tiny channels formed on the evaporation section 104 .
- the tiny channels of the condensation section 108 may extend to the liquefied coolant transfer section 110 as described below, and further extend to the liquefied coolant transfer section 102 near the evaporation section.
- the tiny channels of the condensation section 108 make it easy for the gaseous coolant to be condensed, and precipitate the completion of the coolant circulation loop by providing surface tension to transfer the coolant in the liquid state condensed towards the liquefied coolant transfer section 102 near the evaporation section.
- the depth of the tiny channels of the condensation section 108 is preferably deeper than that of the tiny channels of the evaporation section 104 , which is however not limited to this.
- the shape and change of the cross-sections, the formation of the grooves or nodes of the tiny channels of the condensation section 108 will not described in detail because they are similar to those of the tiny channels of the evaporation section 104 .
- a plurality of fins may be formed outside the condensation section 108 of the thin plate-type cooling device 100 .
- the fins may have a radial shape or other shapes outside the condensation section 108 .
- the air brought by the fan 120 touches the inner wall of the fins facing each other, so that the heat dissipation efficiency can be maximized.
- the fins include micro actuators
- the air surrounding the cooling device may be circulated utilizing the heat dissipated from the condensation section 108 .
- the fins have a tiny structure including thermoelectric conversion devices, the heat dissipated from the condensation section 108 is converted into electricity which can be used as the energy for tiny driving.
- the coolant in the gas state can be easily condensed in the condensation section 108 only by the convention of the air surrounding the condensation section 108 .
- the liquefied coolant transfer section 110 forms a passage through which the liquefied coolant condensed in the condensation section 108 is transferred towards the liquefied coolant transfer section 102 near the evaporation section. As shown in the drawing, the liquefied coolant transfer section 110 is thermally insulated from the gaseous coolant transfer section 106 , the condensation section 108 and the evaporation section 104 by a thermal insulation section 116 .
- the thermal insulation section 116 may be formed as partitions inside the thin plate-type cooling device 100 , spaces internally sealed in the thin plate-type cooling device 100 , or openings vertically penetrating the thin plate-type cooling device 100 . If the thermal insulation section 116 is the spaces internally sealed in the thin plate-type cooling device 100 , it may be in a vacuum state or filled with an insulation substance such as air.
- the liquefied coolant transfer section 110 is preferably symmetry along the longitudinal direction of the thin plate-type cooling device 100 .
- the coolant circulation loop being formed symmetry along the longitudinal direction of the thin plate-type cooling device 100 is a structure which is very advantageous in dissipating heat if it has the shape of a thin plate, i.e. its sectional length-width ratio is large, so that the cooling device 100 can radially dissipate the heat transferred from the heat source utilizing the large surface area.
- This bidirectional coolant circulation loop has an advantage that even though one of the coolant circulations in the liquefied coolant transfer section 110 is not properly performed because of the effect of gravity depending upon the installation position of the cooling device 100 , the other coolant circulation can be maintained.
- the liquefied coolant transfer section 110 may include tiny channels so as not to be affected by gravity, where a plurality of grooves (not shown) may be formed in the tiny channels in the direction facing the coolant storage section 102 . Further, it is preferable that the sections of the tiny channels formed on the evaporation section 104 or the liquefied coolant transfer sections 110 and 102 gradually decrease from the liquefied coolant transfer section 110 contacting the condensation section 108 to the evaporation section 104 contacting the gaseous coolant transfer section 106 .
- a plurality of guides may be formed to determine the transfer direction of the liquefied coolant at a boundary between the liquefied coolant transfer section 102 near the evaporation section and the liquefied coolant transfer section 110 and a boundary between the condensation section 108 and the liquefied coolant transfer section 110 , whereby the resistance of the coolant circulation occurring because the current path of the coolant rapidly curves can be reduced.
- the evaporation section 104 is directly attached to the heat source (not shown) not via a heat conductor to reduce the contact heat resistance, so in the embodiment the cooling device 100 is provided with fastening means 114 for fastening the cooling device 100 to the external heat source adjacent to the evaporation section 104 with bolts or rivets.
- the fastening means 114 may not be included because it is not relevant to the circulation of coolant.
- FIG. 2 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the first embodiment
- FIG. 2 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the first embodiment
- FIG. 2 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the first embodiment.
- the sectional view taken in the first direction shown in FIG. 2 a is the bottom view of the upper plate 100 b of the thin plate-type cooling device 100 .
- the upper plate 100 b of the thin plate-type cooling device 100 has a first cavity 124 for providing a space, where the coolant in the gas state which has not been condensed can be contained, on an area corresponding to the gaseous coolant transfer section 106 of the lower plate 100 a .
- the upper plate 100 b may include the thermal insulation section 116 corresponding to the thermal insulation section 116 of the lower plate 100 a .
- the upper plate 100 b may be formed of the same material as that of the housing 112 of the lower plate 100 a .
- the upper plate 100 b may be formed of glass, etc.
- the first cavity 124 is formed in order that its section is semi-oval in the direction parallel to the Y axis on the Y-Z plane.
- FIG. 3 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the second embodiment
- FIG. 3 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the second embodiment
- FIG. 3 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the second embodiment.
- the sectional view taken in the first direction shown in FIG. 3 a is the bottom view of the upper plate 100 b of the thin plate-type cooling device 100 .
- the upper plate 100 b of the thin plate-type cooling device 100 has a plurality of first cavities 124 on areas corresponding to the gaseous coolant transfer section 106 of the lower plate 100 a , where the plurality of first cavities 124 respectively correspond to a plurality of transfer paths of gaseous coolant formed by the second guides 118 of the gaseous coolant transfer section 106 and each of them has a semi-oval section on the Y-Z plane.
- the first cavities 124 of the second embodiment have the same functions or shapes as that of the first embodiment, except that they are separated to correspond to the second guides 118 of the lower plate 100 a.
- FIG. 4 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the third embodiment
- FIG. 4 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the third embodiment
- FIG. 4 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the third embodiment.
- the sectional view taken in the first direction shown in FIG. 4 a is the bottom view of the upper plate 100 b of the thin plate-type cooling device 100 .
- the upper plate 100 b of the thin plate-type cooling device 100 in the third embodiment further includes a plurality of second cavities 126 formed on areas corresponding to the condensation section 108 of the lower plate 100 a . That is, the upper plate 100 b includes the plurality of the first cavities 124 formed on areas corresponding to the gaseous coolant transfer section 106 of the lower plate 100 a and the plurality of second cavities 126 formed on areas corresponding to the condensation section 108 of the lower plate 100 a , where the first and second cavities 124 and 126 are respectively connected to each other.
- each of the second cavities 126 becomes narrow as it proceeds to the area corresponding to the liquefied coolant transfer section 110 . Accordingly, when the lower plate 100 a and the upper plate 100 b are bound, the sections of the second cavities 126 become small as they proceed to the liquefied coolant transfer section 110 and the surface tension to the liquefied coolant becomes large, so the coolant in the gas state which has not been condensed in the condensation section 108 can return to the first cavity 124 on the area corresponding to the gaseous coolant transfer section 106 . Accordingly, since the coolant in the gas state is contained in the coolant in the liquid state in the form of bubbles, it is possible to prevent the coolant in the gas state from reaching the evaporation section 104 more efficiently.
- FIG. 5 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the fourth embodiment
- FIG. 5 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment
- FIG. 5 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment
- FIG. 5 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the fourth embodiment
- FIG. 5 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment
- FIG. 5 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment
- FIG. 5 d shows a schematic sectional view taken along the C-C′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment.
- the sectional view taken in the first direction shown in FIG. 5 a is the bottom view of the upper plate 100 b of the thin plate-type cooling device 100 .
- the upper plate 100 b of the thin plate-type cooling device 100 in the third embodiment further includes a plurality of third cavities 128 formed on areas corresponding to the liquefied coolant transfer section 110 of the lower plate 100 a . It is preferable that each of third cavities 128 has a semi-oval shape. Moreover, the plurality of third cavities 128 may be formed in a plurality of rows along the liquefied coolant transfer section 110 .
- the coolant in the gas state which has not been condensed in the condensation section 108 is transferred to the liquefied coolant transfer section 110 in the formed of bubbles contained in the coolant in the liquid state, it can be captured by the plurality of third cavities 128 . Accordingly, it is possible to prevent the coolant in the gas state from reaching the evaporation section 104 in the formed of bubbles contained in the coolant in the liquid state far more efficiently.
- the cooling device 100 of this invention described above can be manufactured by various methods widely known such as a MEMS (Micro Electro Mechanical System) method or a SAM (Self Assembled Monolayer) method using a semiconductor device manufacturing process. Referring to FIGS. 1 b and 2 a , the manufacturing method will be described briefly.
- MEMS Micro Electro Mechanical System
- SAM Self Assembled Monolayer
- the surface of the lower plate 100 a of the thin plate-type cooling device 100 is etched to form the coolant storage section 102 , the first tiny channels 120 of the evaporation section 104 , the first guides 122 of the condensation section 108 , the second guides 118 of the gaseous coolant transfer section 106 , and the liquefied coolant transfer section 110 .
- the surface of the lower plate 100 b is etched to form the cavities 124 , 126 and/or 128 and/or the thermal insulation section 116 .
- an anodic bonding may be performed by applying a voltage to them, so that they can be unified. Then, the pressure is reduced to make the circulation loop be in the vacuum state through a coolant insertion hole (not shown) formed to be connected to the coolant storage section 102 , a predetermined amount of coolant is inserted into it, and the coolant insertion hole is sealed.
- the cavity corresponding to the condensation section 108 may be replaced by the cavity of the third embodiment, or the cavity corresponding to the liquefied coolant transfer section 110 may be replaced by the cavity of the fourth embodiment.
- an area except the areas the upper plate 100 b on which the cavities are formed may also have the same structure as that of the lower plate 100 a.
- the coolant in the gas state which has not been condensed in the condensation section can be contained or captured, so it is possible to prevent the dry-out phenomenon caused because the coolant in the gas state stays in the channels to the evaporation section and the liquefied coolant cannot be sufficiently supplied.
- the coolant in the liquid state is rushed to the evaporation section without external power, so it is possible to prevent the dry-out phenomenon in the evaporation section and to sufficiently supply the coolant in the liquid state to the evaporation section all the time.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Thermal Sciences (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nanotechnology (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The present invention provides a thin plate type cooling device including at least one cavity formed on an inside wall of coolant circulation loop in order to prevent dry-out of the coolant.
Description
- The present invention relates to a thin plate-type cooling device for cooling a semiconductor integrated circuit device, etc., and more particularly to a thin plate-type cooling device capable of preventing a coolant from drying out using the phase transition of operation fluid.
- As design rules decrease due to the trend towards large scale integration of semiconductor devices, and thereby the line width of electronic devices constituting semiconductor devices narrows, small-sized and high performance electronic equipment has been achieved owing to a larger number of transistors per unit area, which causes, however, that the ratio of heat emission of a semiconductor device per unit area increases. The increase of the rate of heat emission deteriorates the performance of semiconductor devices and lessens the life expectancy thereof, and eventually decreases the reliability of a system adopting semiconductor devices. Particularly in semiconductor devices, parameters are too easily affected by operation temperatures, and thereby it further deteriorates the characteristics of integrated circuits.
- In response to the increase of the rate of heat emission, cooling technologies have been developed such as fin-fan, peltier, water-jet, immersion, heat pipe type coolers, etc., which are generally known.
- The fin-fan type cooler which compulsorily cools devices using fins and/or fans has been used for tens of years, but has some defects such as noise, vibration, and low cooling efficiency as compared with its large volume. Although the peltier type cooler doesn't make noise or vibration, it has a problem that it requires too many heat dissipation devices at its hot junction, needing large driving power due to its low efficiency.
- The water-jet type cooler goes mainstream in cooling device research because of its excellent efficiency, but its structure is complicated due to the use of a thin film pump driven by an external power supply, and it is significantly affected by gravity, as well as a problem that it is difficult to achieve robust design when applied to personal mobile electronic equipment.
- And in the cooling device using a heat pipe, since the flowing directions of gas and fluid inside a pipe are opposite each other, the gas flowing from an evaporation section towards a condensation section acts as resistance against the fluid returning from the condensation section towards the evaporation section. Accordingly, if a large amount of heat is applied to the heat pipe, the liquid into which the gas with a high velocity is to change cannot return to the evaporation section, so a dry-out phenomenon by which the coolant in the liquid state is exhausted occurs in the evaporation section. And there is a problem that its installation location is significantly restricted because the coolant gasified inside the pipe moves depending upon buoyancy and pressure difference, and the liquefied coolant in the heat pipe depends on gravity due to the structure and size of the medium of the returning section.
- In order to solve the above problem, it has been disclosed in Korea Patent Application No. 2001-52584, “A thin plate-type cooling device”, by the applicant of this invention that the cooling performance of a small-sized thin plate-type cooling device is hardly affected by gravity and the coolant is naturally circulated without any external power supply. The thin plate-type cooling device disclosed includes a thin plate-shaped housing having a fluid circulation loop therein and a coolant having a phase transition characteristic, circulating the circulation loop in the housing, wherein the circulation loop in the housing includes: a coolant storage section formed on one end inside the housing for storing the coolant in the liquid state; an evaporation section including at least one first tiny channel connected to the one end of the coolant storage section, wherein the coolant in the liquid state in the first tiny channel is partly filled from the coolant storage section to a predetermined area of the first tiny channel due to the surface tension with an inner wall of the first tiny channel, the surface tension inside the first tiny channel is set more than gravity, and the coolant in the liquid state filled in the first tiny channel can be gasified by the heat absorbed from a heat source; a condensation section including at least one second tiny channel disposed away from the first tiny channel of the evaporation section as much as a predetermined distance in the longitudinal direction on a same plane for condensing the coolant in the gas state gasified and transferred from the first tiny channel, wherein the surface tension between an inner wall of the second tiny channel and the coolant condensed is set more than gravity; a gaseous coolant transfer section disposed between the first tiny channel of the evaporation section and the second tiny channel of the condensation section; and a liquefied coolant transfer section separated from the gaseous coolant transfer section for transferring the coolant in the liquid state condensed in the condensation section towards the coolant storage section.
- According to the thin plate-type cooling device disclosed, as the coolant circulating around the circulation loop inside the housing changes its phase between liquid and gas states, the heat of the external heat source contacting the cooling device can be dissipated using the latent heat during phase transition.
- According to the thin plate-type cooling device disclosed, however, there is a possibility that the coolant in the gas state is not completely condensed in the condensation section and reaches the condensation section via the liquefied coolant transfer section and/or the coolant storage section, contained in the condensed coolant in the form of bubbles. If the bubbles contained in the coolant in the liquid state reach the evaporation section, there is concern that the dry-out phenomenon by which the coolant in the liquid state is exhausted occurs in the evaporation section.
- In order to solve the problems above, it is an object of the present invention to provide a thin plate-type cooling device for preventing the dry-out phenomenon in the evaporation section.
- Moreover, it is another object of the present invention to provide a thin plate-type cooling device wherein its cooling efficiency is increased by improving the flow of the coolant.
- In order to achieve the objects above, a thin plate-type cooling device includes a thin plate-shaped housing in which a circulation loop of a fluid is formed, and a coolant capable of changing from one state to another, circulating along the circulation loop inside the housing, wherein the circulation loop inside the housing includes an evaporation section formed on one end of the circulation loop, wherein the liquefied coolant is at least partly filled by a capillary action and the coolant filled in a liquid state is gasified by heat transferred from an external heat source, a gaseous coolant transfer section formed adjacent to the evaporation section, wherein the gasified coolant is transferred through the gaseous coolant transfer section and the gaseous coolant transfer section has at least one first cavity for containing the gaseous coolant which has not been condensed, a liquefied coolant transfer section formed adjacent to the condensation section and thermally insulated from the evaporation section, wherein the liquefied coolant is transferred towards the evaporation section, and a thermal insulation section for thermally insulating the evaporation section from at least a part of the liquefied coolant transfer section.
-
FIG. 1 a shows the external appearance of a thin plate-type cooling device according to a first embodiment of this invention. -
FIG. 1 b shows a schematic section on an X-Y plane of the thin plate-type cooling device of the first embodiment viewed in a second direction. -
FIG. 2 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device of the first embodiment. -
FIG. 2 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the first embodiment. -
FIG. 2 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the first embodiment. -
FIG. 3 a shows a schematic sectional view taken in the first direction on the X-Y plane of a thin plate-type cooling device of a second embodiment. -
FIG. 3 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the second embodiment. -
FIG. 3 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the second embodiment. -
FIG. 4 a shows a schematic sectional view taken in the first direction on the X-Y plane of a plate-type cooling device of a third embodiment. -
FIG. 4 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the third embodiment. -
FIG. 4 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the third embodiment. -
FIG. 5 a shows a schematic sectional view taken in the first direction on the X-Y plane of a thin plate-type cooling device of a fourth embodiment. -
FIG. 5 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device of the fourth embodiment. -
FIG. 5 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device of the fourth embodiment. -
FIG. 5 d shows a schematic sectional view taken along the C-C′ line on the Y-Z plane of the thin plate-type cooling device of the fourth embodiment. - Hereinafter, the exemplary embodiments of the present invention will now be described in detail, referring to attached drawings.
- Referring to
FIG. 1 a, first,FIG. 1 a shows the external appearance of a thin plate-type cooling device 100 according to a first embodiment of this invention. It is preferable that the external appearance of the thin plate-type cooling device 100 of this invention is approximately rectangular, and the thin plate-type cooling device 100 is formed by bonding alower plate 100 a and anupper plate 100 b in each of which internal elements have been formed. - For the sake of understanding and description, it is defined that, as shown in
FIG. 1 a, an “X-axis direction” is the longitudinal direction (from the left to the right of the drawing) of the thin plate-type cooling device 100 of this invention, a “Y-axis direction” is the lateral direction (into the drawing) of the thin plate-type cooling device 100, and a “Z-axis direction” is the vertical direction (from the bottom of the top of the drawing) of the thin plate-type cooling device 100. Moreover, it is also defined that a “section viewed in a first direction” is the section viewed in the negative Z-axis direction (i.e., the direction from the bottom of the top of the drawing), and a “section viewed in a second direction” is the section viewed in the positive Z-axis direction (i.e., the direction from the top of the bottom of the drawing). - Referring to
FIG. 1 b,FIG. 1 b shows a schematic section on an X-Y plane of the thin plate-type cooling device 100 of the first embodiment viewed in the second direction. As shown in the drawing, thelower plate 100 a of the thin plate-type cooling device 100 forms a circulation loop of a coolant inside an approximatelyrectangular housing 112 by being combined with theupper plate 100 b. The coolant circulates in the arrow direction and cools an external heat source contacting thecooling device 100, using the latent heat during its phase transition between liquid and gas states. - The
housing 112 can be manufactured of a material such as semiconductor, e.g. Si, Ga, etc., a novel substance-laminated material, e.g. Self Assembled Monolayer (SAM), metal and/or alloy, e.g. Cu, Al, etc. with high conductivity, ceramic, a high molecular substance, e.g. plastic, a crystalline material, e.g. diamond. Particularly, in case of a semiconductor chip as the external heat source, the housing can be made of the same material as that of the surface of the external source so as to minimize the thermal contact resistance. In case that the thin plate-type cooling device 100 is made of semiconductor, the housing can be integrally formed as one piece with the surface material of the external source during the process of manufacturing the semiconductor chip. - Next, the coolant to be injected into the thin plate-
type cooling device 100 can be selected from things capable of changing its phase between liquid and gas states due to the external heat. In this embodiment, it is preferable to use water whose latent heat and surface tension are high as the coolant, because it is desirable not to use any of a series of CFC as the coolant in consideration of environmental pollution. - In addition, since the surface tension between the coolant and an inner wall of the thin plate-
type cooling device 100 varies depending upon the material of the housing, a suitable coolant should be selected. For example, any of a series of alcohol such as methanol, ethanol, etc., may be used as the coolant besides water. In case of water or alcohol as the coolant, it has an advantage that a large amount of heat can transferred because its heat capacity is large, and its contact angle by the surface tension with the inner wall of semiconductor is small, so that the current speed of the coolant becomes high. Moreover, water or alcohol as the coolant, unlike CFC, does not cause any environmental pollution even though it leaks from the thin plate-type cooling device 100 by any reason. - The selection of the coolant is merely of an optional matter for the implementation of this invention, which does not limit the technical scope of this invention.
- As shown in the drawing, the thin plate-
type cooling device 100 includes anevaporation section 104 formed on one end inside the thin plate-type cooling device 100, in which the coolant in the liquid state is at least partly filled due to the capillary action and the coolant in the liquid state filled is gasified due to the heat transferred from the external heat source, a gaseouscoolant transfer section 106 formed adjacent to theevaporation section 104, in which the coolant gasified is transferred in a predetermined direction due to the pressure difference, acondensation section 108 formed adjacent to the gaseouscoolant transfer section 106, in which the coolant in the gas state is condensed into the liquid state, and liquefiedcoolant transfer sections condensation section 108 and thermally insulated from theevaporation section 104, in which the coolant condensed into the liquid state is transferred towards theevaporation section 104. - The
evaporation section 104, the gaseouscoolant transfer section 106, thecondensation section 108 and the liquefiedcoolant transfer sections lower plate 100 a of the thin plate-type cooling device 100. Moreover, theupper plate 100 b of the thin plate-type cooling device 100 may have only cavities on predetermined areas. The configuration of theupper plate 100 b will be described later referring to FIGS. 2 to 5. - The coolant inside the thin plate-
type cooling device 100 forms the circulation loop along the arrows of the drawing. That is, the coolant sequentially circulates via theevaporation section 104, the gaseouscoolant transfer section 106, thecondensation section 108, the liquefiedcoolant transfer section 110 near the condensation section, and the liquefiedcoolant transfer section 102 near the evaporation section. - Alternatively, the thin plate-
type cooling device 100 may further include a coolant storage section (not shown) whose volume is suitable for storing a predetermined amount of the coolant in the liquid state in the liquefiedcoolant transfer sections coolant transfer section 102 near the evaporation section may be used for the coolant storage section. In addition, a plurality of coolant storage sections may be formed. - The
evaporation section 104 is adjacent to one end (“exit side”) of the liquefiedcoolant transfer section 102 near the evaporation section, and a plurality of tiny channels are formed in theevaporation section 104, so that all or a part of the tiny channels are filled with the coolant stored in the liquefiedcoolant transfer section 102 near the evaporation section by the capillary action. In addition, theevaporation section 104 is disposed adjacent to the external heat source (not shown), and thereby the coolant in the liquid state accumulated in the tiny channels by the heat transferred form the heat source is gasified, so it changes into the gaseous state. Accordingly, the heat from the heat source is absorbed to the coolant as much as the latent heat caused by the phase transition of the coolant, and the heat from the heat source can be eliminated as the coolant in the gas state is condensed to dissipate the heat as described later. - It is preferable that the surface tension in the tiny channels is larger than gravity. In addition, the smaller the contact angle of the meniscus of the liquefied coolant accumulated in the tiny channels, the more it is preferable. In order to do so, it is preferable that the inner walls of the tiny channels is formed of or treated with a hydrophilic material. For example, the hydrophilic material treatment is performed by plating, coating, coloring, anodization, plasma treatment, laser treatment, etc. In addition, the surface coarseness of the inner walls of the tiny channels can be adjusted in order to improve the heat transfer efficiency.
- Meanwhile, besides the tiny channels of the
evaporation section 104, it is preferable that the hydrophilic treatment is performed on the surfaces of the liquefiedcoolant transfer sections evaporation section 104 and the hydrophobic treatment is performed on the surfaces of the gaseouscoolant transfer section 106 and thecondensation section 108, so that the flow of the coolant is improved to increase the cooling efficiency. - Further, the cross-sections of the tiny channels may be circular, elliptical, rectangular, square, polygonal, etc. Particularly, the magnitude of the surface tension of the coolant can be controlled by increasing or decreasing the cross-sections of the tiny channels in the longitudinal direction thereof (i.e., the X axis direction), the transfer direction and velocity of the coolant can also be controlled by forming a plurality of grooves or nodes on the inner wall thereof.
- Next, the coolant gasified in the
evaporation section 104 is transferred in the opposite direction to the liquefiedcoolant transfer section 102 near the evaporation section, and the gaseouscoolant transfer section 106 is formed adjacent to theevaporation section 104 to function as a passage through the gaseous coolant is transferred. As shown in the drawing, the gaseouscoolant transfer section 106 may include a plurality ofguides 118 so that the gasified coolant can be transferred in a predetermined direction (i.e., in the opposite direction to the coolant storage section 102). Theguides 118 have the function of increasing the mechanical strength of the thin plate-type cooling device 100. Accordingly, theguides 118 may not be included if there is no problem in the mechanical strength. - The
condensation section 108 is the area where the gaseous coolant transferred inwards through the gaseouscoolant transfer section 106 is condensed and liquefied again. In this embodiment, thecondensation section 108 is formed away from theevaporation section 104 by a predetermined distance on the same plane. - Meanwhile, the
condensation section 108 may include a plurality of tiny channels (not shown) similar to the tiny channels formed on theevaporation section 104. The tiny channels of thecondensation section 108 may extend to the liquefiedcoolant transfer section 110 as described below, and further extend to the liquefiedcoolant transfer section 102 near the evaporation section. The tiny channels of thecondensation section 108 make it easy for the gaseous coolant to be condensed, and precipitate the completion of the coolant circulation loop by providing surface tension to transfer the coolant in the liquid state condensed towards the liquefiedcoolant transfer section 102 near the evaporation section. - The depth of the tiny channels of the
condensation section 108 is preferably deeper than that of the tiny channels of theevaporation section 104, which is however not limited to this. In addition, the shape and change of the cross-sections, the formation of the grooves or nodes of the tiny channels of thecondensation section 108 will not described in detail because they are similar to those of the tiny channels of theevaporation section 104. - Moreover, in order to increase the efficiency of the heat dissipation, a plurality of fins may be formed outside the
condensation section 108 of the thin plate-type cooling device 100. The fins may have a radial shape or other shapes outside thecondensation section 108. The air brought by thefan 120 touches the inner wall of the fins facing each other, so that the heat dissipation efficiency can be maximized. - Further, if the fins include micro actuators, the air surrounding the cooling device may be circulated utilizing the heat dissipated from the
condensation section 108. If the fins have a tiny structure including thermoelectric conversion devices, the heat dissipated from thecondensation section 108 is converted into electricity which can be used as the energy for tiny driving. - In addition, by forming the volume of the
condensation section 108 to be more than the volume of theevaporation section 104, the coolant in the gas state can be easily condensed in thecondensation section 108 only by the convention of the air surrounding thecondensation section 108. - The liquefied
coolant transfer section 110 forms a passage through which the liquefied coolant condensed in thecondensation section 108 is transferred towards the liquefiedcoolant transfer section 102 near the evaporation section. As shown in the drawing, the liquefiedcoolant transfer section 110 is thermally insulated from the gaseouscoolant transfer section 106, thecondensation section 108 and theevaporation section 104 by athermal insulation section 116. - The
thermal insulation section 116 may be formed as partitions inside the thin plate-type cooling device 100, spaces internally sealed in the thin plate-type cooling device 100, or openings vertically penetrating the thin plate-type cooling device 100. If thethermal insulation section 116 is the spaces internally sealed in the thin plate-type cooling device 100, it may be in a vacuum state or filled with an insulation substance such as air. - As shown in the drawing, the liquefied
coolant transfer section 110 is preferably symmetry along the longitudinal direction of the thin plate-type cooling device 100. The coolant circulation loop being formed symmetry along the longitudinal direction of the thin plate-type cooling device 100 is a structure which is very advantageous in dissipating heat if it has the shape of a thin plate, i.e. its sectional length-width ratio is large, so that thecooling device 100 can radially dissipate the heat transferred from the heat source utilizing the large surface area. - This bidirectional coolant circulation loop has an advantage that even though one of the coolant circulations in the liquefied
coolant transfer section 110 is not properly performed because of the effect of gravity depending upon the installation position of thecooling device 100, the other coolant circulation can be maintained. - As described above, even the liquefied
coolant transfer section 110 may include tiny channels so as not to be affected by gravity, where a plurality of grooves (not shown) may be formed in the tiny channels in the direction facing thecoolant storage section 102. Further, it is preferable that the sections of the tiny channels formed on theevaporation section 104 or the liquefiedcoolant transfer sections coolant transfer section 110 contacting thecondensation section 108 to theevaporation section 104 contacting the gaseouscoolant transfer section 106. - Meanwhile, a plurality of guides (not shown) may be formed to determine the transfer direction of the liquefied coolant at a boundary between the liquefied
coolant transfer section 102 near the evaporation section and the liquefiedcoolant transfer section 110 and a boundary between thecondensation section 108 and the liquefiedcoolant transfer section 110, whereby the resistance of the coolant circulation occurring because the current path of the coolant rapidly curves can be reduced. - Meanwhile, it is preferable that the
evaporation section 104 is directly attached to the heat source (not shown) not via a heat conductor to reduce the contact heat resistance, so in the embodiment thecooling device 100 is provided with fastening means 114 for fastening thecooling device 100 to the external heat source adjacent to theevaporation section 104 with bolts or rivets. The fastening means 114 may not be included because it is not relevant to the circulation of coolant. - Next, referring to
FIGS. 2 a to 2 c, theupper plate 100 b of the thin plate-type cooling device 100 according to the first embodiment of this invention will be described in detail.FIG. 2 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the first embodiment,FIG. 2 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the first embodiment, andFIG. 2 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the first embodiment. In this embodiment, the sectional view taken in the first direction shown inFIG. 2 a is the bottom view of theupper plate 100 b of the thin plate-type cooling device 100. - As shown in the drawings, in this embodiment, the
upper plate 100 b of the thin plate-type cooling device 100 has afirst cavity 124 for providing a space, where the coolant in the gas state which has not been condensed can be contained, on an area corresponding to the gaseouscoolant transfer section 106 of thelower plate 100 a. Moreover, theupper plate 100 b may include thethermal insulation section 116 corresponding to thethermal insulation section 116 of thelower plate 100 a. Theupper plate 100 b may be formed of the same material as that of thehousing 112 of thelower plate 100 a. Alternatively, theupper plate 100 b may be formed of glass, etc. - Referring to
FIG. 2 c, thefirst cavity 124 is formed in order that its section is semi-oval in the direction parallel to the Y axis on the Y-Z plane. By providing the space for containing the coolant in the gas state, thefirst cavity 124 prevents the coolant in the gas state which has not been condensed in thecondensation section 108 from being bubbles in the coolant in the liquid state. - Next, referring to
FIGS. 3 a to 3 c, theupper plate 100 b of the thin plate-type cooling device 100 according to a second embodiment of this invention will be described in detail.FIG. 3 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the second embodiment,FIG. 3 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the second embodiment, andFIG. 3 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the second embodiment. In this embodiment, the sectional view taken in the first direction shown inFIG. 3 a is the bottom view of theupper plate 100 b of the thin plate-type cooling device 100. - As shown in the drawings, in this embodiment, the
upper plate 100 b of the thin plate-type cooling device 100 has a plurality offirst cavities 124 on areas corresponding to the gaseouscoolant transfer section 106 of thelower plate 100 a, where the plurality offirst cavities 124 respectively correspond to a plurality of transfer paths of gaseous coolant formed by thesecond guides 118 of the gaseouscoolant transfer section 106 and each of them has a semi-oval section on the Y-Z plane. As compared with thefirst cavity 124 of the first embodiment, thefirst cavities 124 of the second embodiment have the same functions or shapes as that of the first embodiment, except that they are separated to correspond to thesecond guides 118 of thelower plate 100 a. - Next, referring to
FIGS. 4 a to 4 c, theupper plate 100 b of the thin plate-type cooling device 100 according to a third embodiment of this invention will be described in detail.FIG. 4 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the third embodiment,FIG. 4 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the third embodiment, andFIG. 4 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the third embodiment. In this embodiment, the sectional view taken in the first direction shown inFIG. 4 a is the bottom view of theupper plate 100 b of the thin plate-type cooling device 100. - As shown in the drawings, the
upper plate 100 b of the thin plate-type cooling device 100 in the third embodiment further includes a plurality ofsecond cavities 126 formed on areas corresponding to thecondensation section 108 of thelower plate 100 a. That is, theupper plate 100 b includes the plurality of thefirst cavities 124 formed on areas corresponding to the gaseouscoolant transfer section 106 of thelower plate 100 a and the plurality ofsecond cavities 126 formed on areas corresponding to thecondensation section 108 of thelower plate 100 a, where the first andsecond cavities - Moreover, as shown in the drawing, it is preferable that the width of each of the
second cavities 126 becomes narrow as it proceeds to the area corresponding to the liquefiedcoolant transfer section 110. Accordingly, when thelower plate 100 a and theupper plate 100 b are bound, the sections of thesecond cavities 126 become small as they proceed to the liquefiedcoolant transfer section 110 and the surface tension to the liquefied coolant becomes large, so the coolant in the gas state which has not been condensed in thecondensation section 108 can return to thefirst cavity 124 on the area corresponding to the gaseouscoolant transfer section 106. Accordingly, since the coolant in the gas state is contained in the coolant in the liquid state in the form of bubbles, it is possible to prevent the coolant in the gas state from reaching theevaporation section 104 more efficiently. - Next, referring to
FIGS. 5 a to 4 d, theupper plate 100 b of the thin plate-type cooling device 100 according to a fourth embodiment of this invention will be described in detail.FIG. 5 a shows a schematic sectional view taken in the first direction on the X-Y plane of the thin plate-type cooling device 100 of the fourth embodiment,FIG. 5 b shows a schematic sectional view taken along the A-A′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment,FIG. 5 c shows a schematic sectional view taken along the B-B′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment, andFIG. 5 d shows a schematic sectional view taken along the C-C′ line on the Y-Z plane of the thin plate-type cooling device 100 of the fourth embodiment. In this embodiment, the sectional view taken in the first direction shown inFIG. 5 a is the bottom view of theupper plate 100 b of the thin plate-type cooling device 100. - As shown in the drawings, the
upper plate 100 b of the thin plate-type cooling device 100 in the third embodiment further includes a plurality ofthird cavities 128 formed on areas corresponding to the liquefiedcoolant transfer section 110 of thelower plate 100 a. It is preferable that each ofthird cavities 128 has a semi-oval shape. Moreover, the plurality ofthird cavities 128 may be formed in a plurality of rows along the liquefiedcoolant transfer section 110. - In this embodiment, when the coolant in the gas state which has not been condensed in the
condensation section 108 is transferred to the liquefiedcoolant transfer section 110 in the formed of bubbles contained in the coolant in the liquid state, it can be captured by the plurality ofthird cavities 128. Accordingly, it is possible to prevent the coolant in the gas state from reaching theevaporation section 104 in the formed of bubbles contained in the coolant in the liquid state far more efficiently. - The
cooling device 100 of this invention described above can be manufactured by various methods widely known such as a MEMS (Micro Electro Mechanical System) method or a SAM (Self Assembled Monolayer) method using a semiconductor device manufacturing process. Referring toFIGS. 1 b and 2 a, the manufacturing method will be described briefly. - That is, the surface of the
lower plate 100 a of the thin plate-type cooling device 100 is etched to form thecoolant storage section 102, the firsttiny channels 120 of theevaporation section 104, thefirst guides 122 of thecondensation section 108, thesecond guides 118 of the gaseouscoolant transfer section 106, and the liquefiedcoolant transfer section 110. - Then, as described above, the surface of the
lower plate 100 b is etched to form thecavities thermal insulation section 116. - After the
lower plate 100 a and theupper plate 100 b where the above structures have been formed are attached to each other, an anodic bonding may be performed by applying a voltage to them, so that they can be unified. Then, the pressure is reduced to make the circulation loop be in the vacuum state through a coolant insertion hole (not shown) formed to be connected to thecoolant storage section 102, a predetermined amount of coolant is inserted into it, and the coolant insertion hole is sealed. - Although the present invention has been described by way of exemplary embodiments, it should be understood that those skilled in the art might make many changes and substitutions without departing from the spirit and the scope of the present invention which is defined only by the appended claims. For example, in the configuration of the first embodiment, the cavity corresponding to the
condensation section 108 may be replaced by the cavity of the third embodiment, or the cavity corresponding to the liquefiedcoolant transfer section 110 may be replaced by the cavity of the fourth embodiment. Moreover, alternatively, an area except the areas theupper plate 100 b on which the cavities are formed may also have the same structure as that of thelower plate 100 a. - According to present invention, by forming one or more cavities having a predetermined shape on the gaseous coolant transfer section, the condensation section and/or the liquefied coolant transfer section in the thin plate-type cooling device, the coolant in the gas state which has not been condensed in the condensation section can be contained or captured, so it is possible to prevent the dry-out phenomenon caused because the coolant in the gas state stays in the channels to the evaporation section and the liquefied coolant cannot be sufficiently supplied.
- In addition, according to present invention, by changing the depth, width or shape of the channels to adjust the surface tension of the coolant in the liquid state, the coolant in the liquid state is rushed to the evaporation section without external power, so it is possible to prevent the dry-out phenomenon in the evaporation section and to sufficiently supply the coolant in the liquid state to the evaporation section all the time.
- In addition, according to present invention, surface treatment is partly performed on the lower and upper channels, so the flow of the coolant is improved and the cooling efficiency is increased.
Claims (8)
1. A thin plate-type cooling device comprising:
a thin plate-shaped housing in which a circulation loop of a fluid is formed; and
a coolant capable of changing from one state to another, circulating along said circulation loop inside said housing,
wherein said circulation loop inside said housing comprises:
an evaporation section formed on one end of said circulation loop, wherein said liquefied coolant is at least partly filled by a capillary action and said coolant filled in a liquid state is gasified by heat transferred from an external heat source;
a gaseous coolant transfer section formed adjacent to said evaporation section, wherein said gasified coolant is transferred through said gaseous coolant transfer section and said gaseous coolant transfer section has at least one first cavity for containing said gaseous coolant which has not been condensed;
a liquefied coolant transfer section formed adjacent to said condensation section and thermally insulated from said evaporation section, wherein said liquefied coolant is transferred towards said evaporation section; and
a thermal insulation section for thermally insulating said evaporation section from at least a part of said liquefied coolant transfer section.
2. A thin plate-type cooling device as claimed in claim 1 , wherein at least a part of said liquefied coolant transfer section comprises a liquefied coolant storage section for storing said coolant in the liquid state.
3. A thin plate-type cooling device as claimed in claim 2 , wherein at least a part of said liquefied coolant transfer section comprises a plurality of liquefied coolant storage sections.
4. A thin plate-type cooling device as claimed in claim 2 , wherein said liquefied coolant storage section comprises a tiny channel of which surface tension is set to be more than gravity.
5. A thin plate-type cooling device as claimed in claim 1 , wherein a cross-section of a tiny channel of said evaporation section and/or said liquefied coolant transfer section becomes small from said liquefied coolant transfer section contacting said condensation section to said evaporation section contacting said gaseous coolant transfer section.
6. A thin plate-type cooling device as claimed in claim 1 , wherein said condensation section has at least one second cavity.
7. A thin plate-type cooling device as claimed in claim 1 , wherein said liquefied coolant transfer section has at least one third cavity.
8. A thin plate-type cooling device as claimed in claim 1 , wherein hydrophilic treatment is performed on surfaces of said liquefied coolant transfer section and said evaporation section, and hydrophobic treatment is performed on surfaces of said gaseous coolant transfer section and said condensation section.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2003-0035078A KR100505279B1 (en) | 2003-05-31 | 2003-05-31 | Cooling device of thin plate type for preventing dry-out |
KR10-2003-0035078 | 2003-05-31 | ||
PCT/KR2003/002281 WO2004106822A1 (en) | 2003-05-31 | 2003-10-28 | Cooling device of thin plate type for preventing dry-out |
Publications (1)
Publication Number | Publication Date |
---|---|
US20060157227A1 true US20060157227A1 (en) | 2006-07-20 |
Family
ID=36659730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/559,042 Abandoned US20060157227A1 (en) | 2003-05-31 | 2003-10-28 | Cooling device of thin plate type for preventing dry-out |
Country Status (9)
Country | Link |
---|---|
US (1) | US20060157227A1 (en) |
EP (1) | EP1639301A1 (en) |
JP (1) | JP2006526128A (en) |
KR (1) | KR100505279B1 (en) |
CN (1) | CN100447991C (en) |
AU (1) | AU2003273115A1 (en) |
BR (1) | BR0318323A (en) |
RU (1) | RU2005137166A (en) |
WO (1) | WO2004106822A1 (en) |
Cited By (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070151708A1 (en) * | 2005-12-30 | 2007-07-05 | Touzov Igor V | Heat pipes with self assembled compositions |
ITTV20080145A1 (en) * | 2008-11-14 | 2010-05-15 | Uniheat Srl | CLOSED OSCILLATING HEAT PIPE SYSTEM IN POLYMERIC MATERIAL |
US20100132923A1 (en) * | 2006-08-09 | 2010-06-03 | Batty J Clair | Minimal-Temperature-Differential, Omni-Directional-Reflux, Heat Exchanger |
US20100243214A1 (en) * | 2007-12-04 | 2010-09-30 | Electronics and Telecommunications Research Insti tute | Flat plate type micro heat transport device |
WO2010124025A2 (en) * | 2009-04-21 | 2010-10-28 | Duke University | Thermal diode device and methods |
US20110024085A1 (en) * | 2009-07-28 | 2011-02-03 | Huang Yu-Po | Heat pipe and method for manufacturing the same |
WO2010094662A3 (en) * | 2009-02-17 | 2011-02-24 | Stemke, Gudrun | Evaporator and cooling device using such an evaporator |
JP2011226686A (en) * | 2010-04-17 | 2011-11-10 | Molex Inc | Heat transporting unit, electronic circuit board, and electronic device |
US20120018128A1 (en) * | 2010-07-21 | 2012-01-26 | Asia Vital Components Co., Ltd. | Slim type pressure-gradient-driven low-pressure thermosiphon plate |
US20120018131A1 (en) * | 2010-07-21 | 2012-01-26 | Asia Vital Components Co., Ltd. | Pressure difference driven heat spreader |
US20120018130A1 (en) * | 2010-07-21 | 2012-01-26 | Asia Vital Components Co., Ltd. | Thermal siphon structure |
US20120087090A1 (en) * | 2009-06-17 | 2012-04-12 | Taqing Feng | Heat dissipation device and radio frequency module with the same |
US20120111553A1 (en) * | 2009-05-18 | 2012-05-10 | Vadim Tsoi | Heat spreading device and method therefore |
US20130213610A1 (en) * | 2012-02-22 | 2013-08-22 | Chun-Ming Wu | Heat pipe structure |
DE102011015097B4 (en) * | 2011-03-15 | 2013-10-24 | Asia Vital Components Co., Ltd. | Cooling unit with hydrophilic compound layer |
US20140246176A1 (en) * | 2013-03-04 | 2014-09-04 | Asia Vital Components Co., Ltd. | Heat dissipation structure |
US8842435B2 (en) | 2012-05-15 | 2014-09-23 | Toyota Motor Engineering & Manufacturing North America, Inc. | Two-phase heat transfer assemblies and power electronics incorporating the same |
US20150034288A1 (en) * | 2011-10-04 | 2015-02-05 | Nec Corporation | Flat Plate Cooling Device and Method for Using the Same |
US20160259383A1 (en) * | 2013-12-13 | 2016-09-08 | Fujitsu Limited | Loop heat pipe, method of manufacturing the same, and electronic device |
US20170293329A1 (en) * | 2016-04-11 | 2017-10-12 | Qualcomm Incorporated | Multi-phase heat dissipating device for an electronic device |
US9854705B2 (en) | 2013-12-24 | 2017-12-26 | Toshiba Home Technology Corporation | Sheet-type heat pipe |
US20180007814A1 (en) * | 2016-06-30 | 2018-01-04 | Ford Global Technologies, Llc | Coolant flow distribution using coating materials |
WO2018144020A1 (en) | 2017-02-03 | 2018-08-09 | Hewlett-Packard Development Company, L.P. | Thermal control with vapor and isolation chambers |
US20180255663A1 (en) * | 2016-08-30 | 2018-09-06 | Panasonic Intellectual Property Management Co., Ltd. | Cooling device and electronic device using same |
US20180283526A1 (en) * | 2017-03-29 | 2018-10-04 | Ford Global Technologies, Llc | Coolant system pressure drop reduction |
US20190021188A1 (en) * | 2015-12-18 | 2019-01-17 | Fujikura Ltd. | Vapor chamber |
US20190090386A1 (en) * | 2016-05-23 | 2019-03-21 | Fujitsu Limited | Loop heat pipe and manufacturing method for loop heat pipe and electronic device |
US20190101341A1 (en) * | 2017-09-29 | 2019-04-04 | Auras Technology Co., Ltd. | Liquid cooling device |
CN109764706A (en) * | 2019-03-12 | 2019-05-17 | 山东省科学院能源研究所 | A kind of micro-channel heat exchanger structure and working method with jet pipe |
US20190195567A1 (en) * | 2017-12-26 | 2019-06-27 | Cooler Master Co.,Ltd. | Heat dissipation structure |
CN110243217A (en) * | 2019-05-05 | 2019-09-17 | 山东大学 | A kind of plate loop heat pipe evaporator with enclosed fluid reservoir |
US20190293362A1 (en) * | 2018-03-26 | 2019-09-26 | Shinko Electric Industries Co., Ltd. | Loop heat pipe |
US20190353431A1 (en) * | 2018-05-18 | 2019-11-21 | Microsoft Technology Licensing, Llc | Two-phase thermodynamic system having compensational wick geometry to enhance fluid flow |
US10746474B2 (en) | 2016-04-11 | 2020-08-18 | Qualcomm Incorporated | Multi-phase heat dissipating device comprising piezo structures |
CN112218481A (en) * | 2019-07-10 | 2021-01-12 | 汎海科技股份有限公司 | Heat dissipation plate, manufacturing method thereof and electronic device with heat dissipation plate |
US11143461B2 (en) * | 2018-02-27 | 2021-10-12 | Shinko Electric Industries Co., Ltd. | Flat loop heat pipe |
US11181323B2 (en) | 2019-02-21 | 2021-11-23 | Qualcomm Incorporated | Heat-dissipating device with interfacial enhancements |
US20220151099A1 (en) * | 2020-11-09 | 2022-05-12 | Baidu Usa Llc | Symmetrical cold plate design |
CN114916193A (en) * | 2022-04-24 | 2022-08-16 | 大连保税区金宝至电子有限公司 | Method for counter-gravity liquid delivery and heat sink |
US11744044B2 (en) * | 2020-11-05 | 2023-08-29 | Deeia, Inc. | Loop thermosyphon devices and systems, and related methods |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100659582B1 (en) * | 2004-12-10 | 2006-12-20 | 한국전자통신연구원 | Loop type micro heat transport device |
JP2007120399A (en) * | 2005-10-27 | 2007-05-17 | Konica Minolta Medical & Graphic Inc | Micro fluid chip and micro comprehensive analysis system |
EP2003944A4 (en) * | 2006-03-06 | 2011-06-22 | Univ Tokyo Sci Educ Found | Method of ebullient cooling, ebullient cooling apparatus, flow channel structure and application product thereof |
US7824075B2 (en) | 2006-06-08 | 2010-11-02 | Lighting Science Group Corporation | Method and apparatus for cooling a lightbulb |
WO2008050894A1 (en) * | 2006-10-27 | 2008-05-02 | Canon Kabushiki Kaisha | Heat transfer controlling mechanism and fuel cell system having the heat transfer controlling mechanism |
JP2012524998A (en) * | 2009-04-21 | 2012-10-18 | ユナ ティーアンドイー カンパニーリミテッド | Solar module with cooling device and method of manufacturing the same |
FR2950134B1 (en) * | 2009-09-14 | 2011-12-09 | Commissariat Energie Atomique | THERMAL EXCHANGE DEVICE WITH ENHANCED CONVECTIVE BOILING AND IMPROVED EFFICIENCY |
TW201128154A (en) * | 2010-02-12 | 2011-08-16 | Micro Base Technology Corp | Cooling and heat-dissipation system, and cooling device thereof |
KR101205715B1 (en) * | 2010-05-24 | 2012-11-28 | 한국과학기술원 | Heat spreader with flat plate and manufacturing method thereof |
JPWO2013005622A1 (en) * | 2011-07-07 | 2015-02-23 | 日本電気株式会社 | Cooling device and manufacturing method thereof |
JP2013069740A (en) * | 2011-09-21 | 2013-04-18 | Nec Corp | Flat plate type cooling device and usage of the same |
JP6070036B2 (en) * | 2012-10-05 | 2017-02-01 | 富士通株式会社 | Loop thermosyphon and electronic equipment |
JP6121854B2 (en) | 2013-09-18 | 2017-04-26 | 東芝ホームテクノ株式会社 | Sheet-type heat pipe or personal digital assistant |
JP6183090B2 (en) * | 2013-09-18 | 2017-08-23 | 富士通株式会社 | Heat pipe and heat pipe manufacturing method |
JP6206389B2 (en) | 2014-04-08 | 2017-10-04 | トヨタ自動車株式会社 | heat pipe |
JP6101728B2 (en) * | 2015-03-30 | 2017-03-22 | 株式会社フジクラ | Vapor chamber |
JP2017035953A (en) * | 2015-08-07 | 2017-02-16 | 株式会社フジクラ | Vehicular air conditioner |
JP6863058B2 (en) * | 2017-05-09 | 2021-04-21 | 富士通株式会社 | Heat pipes and electronic devices |
CN109671688B (en) * | 2017-10-16 | 2020-08-28 | 中车株洲电力机车研究所有限公司 | Refrigerant phase change cold plate |
CN110440619A (en) * | 2018-05-04 | 2019-11-12 | 泰硕电子股份有限公司 | Communicated the joint temperature-uniforming plate assemblies of multiple temperature-uniforming plates with extending capillary layer |
CN110440618A (en) * | 2018-05-04 | 2019-11-12 | 泰硕电子股份有限公司 | The circuit temperature-uniforming plate that liquid, vapour separate |
FI20215154A1 (en) * | 2021-02-15 | 2022-08-16 | Teknologian Tutkimuskeskus Vtt Oy | Heat dissipation apparatus |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4392362A (en) * | 1979-03-23 | 1983-07-12 | The Board Of Trustees Of The Leland Stanford Junior University | Micro miniature refrigerators |
US6437981B1 (en) * | 2000-11-30 | 2002-08-20 | Harris Corporation | Thermally enhanced microcircuit package and method of forming same |
US20020117293A1 (en) * | 2000-08-17 | 2002-08-29 | Ocean Power Corporation | Heat exchange element with hydrophilic evaporator surface |
US6681843B2 (en) * | 2001-07-31 | 2004-01-27 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
US6840310B2 (en) * | 2002-07-05 | 2005-01-11 | Sony Corporation | Cooling device, electronic apparatus and acoustic apparatus, and method for producing the cooling device |
US6976527B2 (en) * | 2001-07-17 | 2005-12-20 | The Regents Of The University Of California | MEMS microcapillary pumped loop for chip-level temperature control |
US7188484B2 (en) * | 2003-06-09 | 2007-03-13 | Lg Electronics Inc. | Heat dissipating structure for mobile device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3549933B2 (en) * | 1995-01-27 | 2004-08-04 | 住友精密工業株式会社 | Plate fin type element cooler |
JPH11307704A (en) * | 1998-04-27 | 1999-11-05 | Denso Corp | Boiling and cooling device |
JP2000049265A (en) * | 1998-07-31 | 2000-02-18 | Denso Corp | Boiling cooler |
JP2001227852A (en) * | 2000-02-16 | 2001-08-24 | Komatsu Ltd | Thermal insulating panel |
KR100414860B1 (en) * | 2001-08-29 | 2004-01-13 | (주)아이큐리랩 | Cooling device of thin plate type |
-
2003
- 2003-05-31 KR KR10-2003-0035078A patent/KR100505279B1/en not_active IP Right Cessation
- 2003-10-28 US US10/559,042 patent/US20060157227A1/en not_active Abandoned
- 2003-10-28 EP EP03754299A patent/EP1639301A1/en not_active Withdrawn
- 2003-10-28 CN CNB2003801103289A patent/CN100447991C/en not_active Expired - Fee Related
- 2003-10-28 BR BRPI0318323-8A patent/BR0318323A/en not_active IP Right Cessation
- 2003-10-28 JP JP2005500269A patent/JP2006526128A/en active Pending
- 2003-10-28 AU AU2003273115A patent/AU2003273115A1/en not_active Abandoned
- 2003-10-28 RU RU2005137166/12A patent/RU2005137166A/en not_active Application Discontinuation
- 2003-10-28 WO PCT/KR2003/002281 patent/WO2004106822A1/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4392362A (en) * | 1979-03-23 | 1983-07-12 | The Board Of Trustees Of The Leland Stanford Junior University | Micro miniature refrigerators |
US20020117293A1 (en) * | 2000-08-17 | 2002-08-29 | Ocean Power Corporation | Heat exchange element with hydrophilic evaporator surface |
US6437981B1 (en) * | 2000-11-30 | 2002-08-20 | Harris Corporation | Thermally enhanced microcircuit package and method of forming same |
US6976527B2 (en) * | 2001-07-17 | 2005-12-20 | The Regents Of The University Of California | MEMS microcapillary pumped loop for chip-level temperature control |
US6681843B2 (en) * | 2001-07-31 | 2004-01-27 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
US6840310B2 (en) * | 2002-07-05 | 2005-01-11 | Sony Corporation | Cooling device, electronic apparatus and acoustic apparatus, and method for producing the cooling device |
US7188484B2 (en) * | 2003-06-09 | 2007-03-13 | Lg Electronics Inc. | Heat dissipating structure for mobile device |
Cited By (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070151708A1 (en) * | 2005-12-30 | 2007-07-05 | Touzov Igor V | Heat pipes with self assembled compositions |
US8042606B2 (en) * | 2006-08-09 | 2011-10-25 | Utah State University Research Foundation | Minimal-temperature-differential, omni-directional-reflux, heat exchanger |
US20100132923A1 (en) * | 2006-08-09 | 2010-06-03 | Batty J Clair | Minimal-Temperature-Differential, Omni-Directional-Reflux, Heat Exchanger |
US20100243214A1 (en) * | 2007-12-04 | 2010-09-30 | Electronics and Telecommunications Research Insti tute | Flat plate type micro heat transport device |
US8490683B2 (en) * | 2007-12-04 | 2013-07-23 | Electronics And Telecommunications Research Institute | Flat plate type micro heat transport device |
ITTV20080145A1 (en) * | 2008-11-14 | 2010-05-15 | Uniheat Srl | CLOSED OSCILLATING HEAT PIPE SYSTEM IN POLYMERIC MATERIAL |
WO2010094662A3 (en) * | 2009-02-17 | 2011-02-24 | Stemke, Gudrun | Evaporator and cooling device using such an evaporator |
WO2010124025A2 (en) * | 2009-04-21 | 2010-10-28 | Duke University | Thermal diode device and methods |
WO2010124025A3 (en) * | 2009-04-21 | 2011-01-20 | Duke University | Thermal diode device and methods |
US8716689B2 (en) | 2009-04-21 | 2014-05-06 | Duke University | Thermal diode device and methods |
US9423192B2 (en) * | 2009-05-18 | 2016-08-23 | Huawei Technologies Co., Ltd. | Heat spreading device and method with sectioning forming multiple chambers |
US20120111553A1 (en) * | 2009-05-18 | 2012-05-10 | Vadim Tsoi | Heat spreading device and method therefore |
US8792240B2 (en) * | 2009-06-17 | 2014-07-29 | Huawei Technologies Co., Ltd. | Heat dissipation device and radio frequency module with the same |
US20120087090A1 (en) * | 2009-06-17 | 2012-04-12 | Taqing Feng | Heat dissipation device and radio frequency module with the same |
US20110024085A1 (en) * | 2009-07-28 | 2011-02-03 | Huang Yu-Po | Heat pipe and method for manufacturing the same |
JP2011226686A (en) * | 2010-04-17 | 2011-11-10 | Molex Inc | Heat transporting unit, electronic circuit board, and electronic device |
US20120018128A1 (en) * | 2010-07-21 | 2012-01-26 | Asia Vital Components Co., Ltd. | Slim type pressure-gradient-driven low-pressure thermosiphon plate |
US20120018130A1 (en) * | 2010-07-21 | 2012-01-26 | Asia Vital Components Co., Ltd. | Thermal siphon structure |
US20120018131A1 (en) * | 2010-07-21 | 2012-01-26 | Asia Vital Components Co., Ltd. | Pressure difference driven heat spreader |
US8973646B2 (en) * | 2010-07-21 | 2015-03-10 | Asisa Vital Components Co., Ltd. | Slim type pressure-gradient-driven low-pressure thermosiphon plate |
US9074823B2 (en) * | 2010-07-21 | 2015-07-07 | Asia Vital Components Co., Ltd. | Thermal siphon structure |
US9353996B2 (en) * | 2010-07-21 | 2016-05-31 | Asia Vital Components Co., Ltd. | Pressure difference driven heat spreader |
DE102011015097B4 (en) * | 2011-03-15 | 2013-10-24 | Asia Vital Components Co., Ltd. | Cooling unit with hydrophilic compound layer |
US20150034288A1 (en) * | 2011-10-04 | 2015-02-05 | Nec Corporation | Flat Plate Cooling Device and Method for Using the Same |
US9506699B2 (en) * | 2012-02-22 | 2016-11-29 | Asia Vital Components Co., Ltd. | Heat pipe structure |
US20130213610A1 (en) * | 2012-02-22 | 2013-08-22 | Chun-Ming Wu | Heat pipe structure |
US8842435B2 (en) | 2012-05-15 | 2014-09-23 | Toyota Motor Engineering & Manufacturing North America, Inc. | Two-phase heat transfer assemblies and power electronics incorporating the same |
US20140246176A1 (en) * | 2013-03-04 | 2014-09-04 | Asia Vital Components Co., Ltd. | Heat dissipation structure |
US20160259383A1 (en) * | 2013-12-13 | 2016-09-08 | Fujitsu Limited | Loop heat pipe, method of manufacturing the same, and electronic device |
US11789505B2 (en) | 2013-12-13 | 2023-10-17 | Shinko Electric Industries Co., Ltd. | Loop heat pipe |
US11009927B2 (en) * | 2013-12-13 | 2021-05-18 | Shinko Electric Industries Co., Ltd. | Loop heat pipe, method of manufacturing the same, and electronic device |
US9854705B2 (en) | 2013-12-24 | 2017-12-26 | Toshiba Home Technology Corporation | Sheet-type heat pipe |
US20190021188A1 (en) * | 2015-12-18 | 2019-01-17 | Fujikura Ltd. | Vapor chamber |
US20170293329A1 (en) * | 2016-04-11 | 2017-10-12 | Qualcomm Incorporated | Multi-phase heat dissipating device for an electronic device |
US10746474B2 (en) | 2016-04-11 | 2020-08-18 | Qualcomm Incorporated | Multi-phase heat dissipating device comprising piezo structures |
US10353445B2 (en) * | 2016-04-11 | 2019-07-16 | Qualcomm Incorporated | Multi-phase heat dissipating device for an electronic device |
US10624238B2 (en) * | 2016-05-23 | 2020-04-14 | Fujitsu Limited | Loop heat pipe and manufacturing method for loop heat pipe and electronic device |
US20190090386A1 (en) * | 2016-05-23 | 2019-03-21 | Fujitsu Limited | Loop heat pipe and manufacturing method for loop heat pipe and electronic device |
US10568240B2 (en) * | 2016-06-30 | 2020-02-18 | Ford Global Technologies, Llc | Coolant flow distribution using coating materials |
US20180007814A1 (en) * | 2016-06-30 | 2018-01-04 | Ford Global Technologies, Llc | Coolant flow distribution using coating materials |
US10349556B2 (en) * | 2016-08-30 | 2019-07-09 | Panasonic Intellectual Property Management Co., Ltd. | Cooling device and electronic device using same |
US20180255663A1 (en) * | 2016-08-30 | 2018-09-06 | Panasonic Intellectual Property Management Co., Ltd. | Cooling device and electronic device using same |
WO2018144020A1 (en) | 2017-02-03 | 2018-08-09 | Hewlett-Packard Development Company, L.P. | Thermal control with vapor and isolation chambers |
EP3510849B1 (en) * | 2017-02-03 | 2023-08-30 | Hewlett-Packard Development Company, L.P. | Thermal control with vapor and isolation chambers |
US10760672B2 (en) * | 2017-03-29 | 2020-09-01 | Ford Global Technologies, Llc | Coolant system pressure drop reduction |
US20180283526A1 (en) * | 2017-03-29 | 2018-10-04 | Ford Global Technologies, Llc | Coolant system pressure drop reduction |
CN108691997A (en) * | 2017-03-29 | 2018-10-23 | 福特全球技术公司 | The pressure drop of coolant system reduces |
US20190101341A1 (en) * | 2017-09-29 | 2019-04-04 | Auras Technology Co., Ltd. | Liquid cooling device |
US11686532B2 (en) | 2017-12-26 | 2023-06-27 | Cooler Master Co., Ltd. | Heat dissipation structure |
US10907907B2 (en) * | 2017-12-26 | 2021-02-02 | Cooler Master Co., Ltd. | Heat dissipation structure |
CN112040719A (en) * | 2017-12-26 | 2020-12-04 | 讯凯国际股份有限公司 | Heat radiation structure |
US20190195567A1 (en) * | 2017-12-26 | 2019-06-27 | Cooler Master Co.,Ltd. | Heat dissipation structure |
US11143461B2 (en) * | 2018-02-27 | 2021-10-12 | Shinko Electric Industries Co., Ltd. | Flat loop heat pipe |
US10876799B2 (en) * | 2018-03-26 | 2020-12-29 | Shinko Electric Industries Co., Ltd. | Loop heat pipe |
US20190293362A1 (en) * | 2018-03-26 | 2019-09-26 | Shinko Electric Industries Co., Ltd. | Loop heat pipe |
US20190353431A1 (en) * | 2018-05-18 | 2019-11-21 | Microsoft Technology Licensing, Llc | Two-phase thermodynamic system having compensational wick geometry to enhance fluid flow |
US11181323B2 (en) | 2019-02-21 | 2021-11-23 | Qualcomm Incorporated | Heat-dissipating device with interfacial enhancements |
US11549758B2 (en) * | 2019-03-12 | 2023-01-10 | Energy Research Institute Of Shandong Academy Of Sciences | Microchannel heat exchanger structure with nozzle and working method thereof |
US20210247142A1 (en) * | 2019-03-12 | 2021-08-12 | Energy Research Institute Of Shandong Academy Of Sciences | Microchannel heat exchanger structure with nozzle and working method thereof |
CN109764706A (en) * | 2019-03-12 | 2019-05-17 | 山东省科学院能源研究所 | A kind of micro-channel heat exchanger structure and working method with jet pipe |
CN110243217A (en) * | 2019-05-05 | 2019-09-17 | 山东大学 | A kind of plate loop heat pipe evaporator with enclosed fluid reservoir |
CN112218481A (en) * | 2019-07-10 | 2021-01-12 | 汎海科技股份有限公司 | Heat dissipation plate, manufacturing method thereof and electronic device with heat dissipation plate |
US11617283B2 (en) * | 2019-07-10 | 2023-03-28 | Therlect Co., Ltd. | Heat dissipating plate, manufacturing method therefor and electronic device having the same |
US11744044B2 (en) * | 2020-11-05 | 2023-08-29 | Deeia, Inc. | Loop thermosyphon devices and systems, and related methods |
US20220151099A1 (en) * | 2020-11-09 | 2022-05-12 | Baidu Usa Llc | Symmetrical cold plate design |
US11812582B2 (en) * | 2020-11-09 | 2023-11-07 | Baidu Usa Llc | Symmetrical cold plate design |
CN114916193A (en) * | 2022-04-24 | 2022-08-16 | 大连保税区金宝至电子有限公司 | Method for counter-gravity liquid delivery and heat sink |
Also Published As
Publication number | Publication date |
---|---|
KR100505279B1 (en) | 2005-07-29 |
RU2005137166A (en) | 2006-06-10 |
WO2004106822A1 (en) | 2004-12-09 |
CN100447991C (en) | 2008-12-31 |
JP2006526128A (en) | 2006-11-16 |
AU2003273115A1 (en) | 2005-01-21 |
KR20040103151A (en) | 2004-12-08 |
CN1781007A (en) | 2006-05-31 |
EP1639301A1 (en) | 2006-03-29 |
BR0318323A (en) | 2006-07-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20060157227A1 (en) | Cooling device of thin plate type for preventing dry-out | |
US7249627B2 (en) | Cooling device of hybrid-type | |
KR100294317B1 (en) | Micro-cooling system | |
US7556086B2 (en) | Orientation-independent thermosyphon heat spreader | |
KR100495699B1 (en) | Flat plate heat transferring apparatus and manufacturing method thereof | |
US7607470B2 (en) | Synthetic jet heat pipe thermal management system | |
EP2141740A2 (en) | Semiconductor device | |
US7843695B2 (en) | Apparatus and method for thermal management using vapor chamber | |
US20060060331A1 (en) | Apparatus and method for enhanced heat transfer | |
KR100414860B1 (en) | Cooling device of thin plate type | |
US9945617B2 (en) | Thermal ground planes, thermal ground plane structures, and methods of heat management | |
CN113314483B (en) | Apparatus and method for dissipating heat in a plurality of semiconductor device modules | |
Tong et al. | Liquid cooling devices and their materials selection | |
JP2007263427A (en) | Loop type heat pipe | |
Chen et al. | High power electronic component | |
CN212436167U (en) | Liquid cooling radiating assembly and electronic equipment carrying same | |
US20220049905A1 (en) | Oscillating heat pipe channel architecture | |
US20220412662A1 (en) | Integrated Heat Spreader | |
Yuncu et al. | Elliptic Micropillar Wick Evaporators for Thermal Management of High Flux Electronics | |
Wei | Modeling, optimization and thermal characterization of micropillar evaporator based high performance silicon vapor chamber | |
KR20050082311A (en) | Micro cooling device manufactured by mems process | |
KR100648354B1 (en) | Cooling apparatus type computer using micro cooling system | |
Khan | Study of pool boiling enhancement structures and development of two phase cooling solution for electronics package |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ICURIE LAB HOLDINGS LIMITED, UNITED KINGDOM Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CHOI, JAE JOON;PARK, JIHWANG;LEE, JEONG HYUN;AND OTHERS;REEL/FRAME:017362/0484 Effective date: 20051121 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |