CN1781007A - Cooling device of thin plate type for preventing dry-out - Google Patents
Cooling device of thin plate type for preventing dry-out Download PDFInfo
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- CN1781007A CN1781007A CNA2003801103289A CN200380110328A CN1781007A CN 1781007 A CN1781007 A CN 1781007A CN A2003801103289 A CNA2003801103289 A CN A2003801103289A CN 200380110328 A CN200380110328 A CN 200380110328A CN 1781007 A CN1781007 A CN 1781007A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0233—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0266—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with separate evaporating and condensing chambers connected by at least one conduit; Loop-type heat pipes; with multiple or common evaporating or condensing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2339/00—Details of evaporators; Details of condensers
- F25B2339/02—Details of evaporators
- F25B2339/021—Evaporators in which refrigerant is sprayed on a surface to be cooled
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2245/00—Coatings; Surface treatments
- F28F2245/02—Coatings; Surface treatments hydrophilic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2245/00—Coatings; Surface treatments
- F28F2245/04—Coatings; Surface treatments hydrophobic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2270/00—Thermal insulation; Thermal decoupling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
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- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nanotechnology (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
The present invention provides a thin plate type cooling device including at least one cavity formed on an inside wall of coolant circulation loop in order to prevent dry-out of the coolant.
Description
Technical field
The present invention relates to be used for the cooling device of the thin plate-type of cooling semiconductor integrated circuit device etc., prevent the cooling device of the thin plate-type that cooling agent becomes dry in particular to the phase transformation that can use operating fluid.
Background technology
Because extensive integrated trend towards semiconductor device, reducing of design rule, and the live width that constitutes the electronic installation of semiconductor device thus narrows down, the electronic installation of the less and superior performance of size is owing to the transistor that per unit area has greater number is implemented, but this heat radiation of semiconductor device that causes per unit area is than increase.The increase of hot emission rate has worsened the performance of semiconductor device and has shortened its life cycle, and has finally reduced to adopt the reliability of the system of semiconductor device.In semiconductor device, parameter is easy to be subjected to operating temperature to be influenced especially, and this has further worsened the characteristic of integrated circuit thus.
In response to the increase of hot emission rate, be developed such as the cooling technology of cooler of fin-fan, peltier effect (peltier), water jet, submergence, heat-pipe-type etc., these are known.
Use the cooler of the fin-fans type of fin and/or fan forced cooling device to use decades, but because its bigger volume, and have some defectives such as noise, vibration and lower cooling effectiveness.Although the peltier effect type cooler does not produce noise or vibration, its problem is that it needs too many heat abstractor on thermal center point, because its poor efficiency, this needs bigger driving power.
The cooler of water jet type in cooling device research because its good efficient but main flow, but its structure is comparatively complicated owing to use by very thin membrane pump that external power source drove, and it is subjected to gravity influences significantly, and problem is to be difficult to realize healthy and strong design when being applied to individual electronic apparatus.
In the cooling device that uses such heat pipe, because the flow direction of gas in the pipe and liquid is opposite each other, the resistance that the gas that flows towards condensation portion from evaporation section returns towards evaporation section from condensation portion as fluid.Correspondingly, if a large amount of heat is applied to heat pipe, the gas with fair speed will be changed to its liquid can not get back to evaporation section, and drying (dry-out) phenomenon that is discharged from of Ye Tai cooling agent takes place in evaporation section like this.And have individual problem to be its installation site because the cause that the cooling agent that gasifies in pipe moves according to buoyancy and pressure gap and significantly being restricted, the cooling agent of the liquefaction in the heat pipe depends on gravity owing to the structure of the medium of returning part and the cause of size.
In order to address the above problem, Korean Patent publication No.2001-52584 disclose a kind of applicant's of the present invention " thin plate-type cooling device ": the cooling performance of undersized thin plate-type cooling device is subjected to the influence of gravity hardly, and cooling agent is not having Natural Circulation under the situation of external power source.Disclosed thin plate-type cooling device comprises plate-shaped housing that wherein has fluid circulation loop and the cooling agent with phase-change characteristic, circulate in the closed circuit of described cooling agent in housing, closed circuit in its middle shell comprises: be formed on the refrigerant storage part on the end of enclosure interior, be used for storing cooling agent in liquid condition; The evaporation section that comprises first minim channel of the end that at least one is connected to the refrigerant storage part, wherein since with the surface tension of the inwall of first minim channel, the cooling agent of the liquid state in first minim channel partly is filled to the presumptive area of first minim channel from the refrigerant storage part, surface tension within first minim channel is set up greater than gravity, and the cooling agent that is filled in the liquid state in first minim channel can be by the hot gasization from thermal source absorbed; Condensation portion, described condensation portion comprises at least one second minim channel, it leaves from the first minim channel setting of evaporation section with big as far as possible preset distance on identical surface in the vertical, be used for condensation gasification and from the cooling agent of the gaseous state of first minim channel transmission, wherein the surface tension between the cooling agent of the inwall of second minim channel and institute's condensation is set up greater than gravity; Be arranged on other cooling agent hop between second minim channel of first minim channel of evaporation section and condensation portion; And, be used for partly being transmitted in the liquid coolant of condensation portion institute condensation towards refrigerant storage from the liquefied coolant hop that the gaseous coolant hop separates.
According to the cooling device of disclosed thin plate-type, between liquid, gaseous state, change its phase time at the cooling agent that centers on the recycle loop within the housing, the heat of the external heat source of contact cooling device can use the latent heat in phase transition process to distribute.
But, cooling device according to disclosed thin plate-type, have such possibility: the cooling agent of gaseous state is total condensation in condensation portion not, and partly reaching condensation portion by liquefied coolant hop and/or refrigerant storage, its form with bubble is contained in the cooling agent of institute's condensation.If the bubble that is contained in the cooling agent with liquid state arrives evaporation section, it is that the dry-out phenomenon that liquid cooling agent is discharged takes place in evaporation section that individual problem is arranged.
Summary of the invention
In order to address the above problem, an object of the present invention is to provide the thin plate-type cooling device of the dry-out phenomenon in a kind of part that avoids evaporating.
In addition, other purpose of the present invention provides the thin plate-type cooling device that a kind of wherein its cooling effectiveness increases by the improvement flow of coolant.
To achieve these goals, the thin plate-type cooling device comprises: the plate-shaped housing, and wherein the closed circuit of fluid is formed; And the cooling agent that can change to another kind of state from a kind of state, recycle loop within the housing, closed circuit within its middle shell comprises the evaporation section on the end that is formed on closed circuit, wherein Ye Hua cooling agent is filled by capillarity at least in part, liquid cooling agent of filling is by the hot gasization from external heat source transmitted, adjacent formed gaseous coolant hop with evaporation section, wherein Qi Hua cooling agent is transmitted through the gaseous coolant hop, and the gaseous coolant hop has at least one first Room, be used to hold the gaseous coolant that does not have condensation, form the liquefied coolant hop adjacent and from the evaporation section heat insulation with condensation portion, wherein Ye Hua cooling agent transmits towards evaporation section, and thermal insulation part, be used for evaporation section from a part of heat insulation of liquefied coolant hop at least.
Description of drawings
Fig. 1 has shown the outward appearance according to the thin plate-type cooling device of the first embodiment of the present invention;
Fig. 1 b has shown the schematic cross-section on the X-Y plane of thin plate-type cooling device of first embodiment that observes from second direction;
Fig. 2 a has shown on the X-Y plane of thin plate-type cooling device of first embodiment schematic cross-sectional view of being got from the first direction;
Fig. 2 b has shown on the Y-Z plane of thin plate-type cooling device of first embodiment along the schematic cross-sectional view that A-A ' got;
Fig. 2 c has shown on the Y-Z plane of thin plate-type cooling device of first embodiment along the schematic cross-sectional view that B-B ' got;
Fig. 3 a has shown the schematic cross-sectional view of getting from first direction on the X-Y plane of thin plate-type cooling device of second embodiment;
Fig. 3 b has shown the schematic cross-sectional view of being got along A-A ' line on the Y-Z plane of thin plate-type cooling device of second embodiment;
Fig. 3 c has shown the schematic cross-sectional view of being got along B-B ' line on the Y-Z plane of thin plate-type cooling device of second embodiment;
Fig. 4 a has shown the schematic cross-sectional view of getting from first direction on the X-Y plane of thin plate-type cooling device of the 3rd embodiment;
Fig. 4 b has shown the schematic cross-sectional view of being got along A-A ' line on the Y-Z plane of thin plate-type cooling device of the 3rd embodiment;
Fig. 4 c has shown the schematic cross-sectional view of being got along B-B ' line on the Y-Z plane of thin plate-type cooling device of the 3rd embodiment;
Fig. 5 a has shown the schematic cross-sectional view of getting from first direction on the X-Y plane of thin plate-type cooling device of the 4th embodiment;
Fig. 5 b has shown the schematic cross-sectional view of being got along A-A ' line on the Y-Z plane of thin plate-type cooling device of the 4th embodiment;
Fig. 5 c has shown the schematic cross-sectional view of being got along B-B ' line on the Y-Z plane of thin plate-type cooling device of the 4th embodiment;
Fig. 5 d has shown the schematic cross-sectional view of being got along C-C ' line on the Y-Z plane of thin plate-type cooling device of the 4th embodiment.
The specific embodiment
After this, describe embodiments of the invention with reference to the accompanying drawings in detail.
With reference to Fig. 1 a, at first, Fig. 1 a has shown the outward appearance according to the thin plate-type cooling device 100 of the first embodiment of the present invention.Preferably, the outward appearance of thin plate-type cooling device 100 of the present invention roughly is a rectangle, and thin plate-type cooling device 100 is by forming lower plate 100a and upper plate 100b bonding, and each has formed inner member lower plate 100a and upper plate 100b.
In order to understand and to illustrate, as shown in Fig. 1 a, define the longitudinal direction that " X-direction " is the thin plate-type cooling device 100 of this invention (in the drawings from left to right), " Y direction " is the horizontal direction (in figure) of thin plate-type cooling device 100, and " Z-direction " is the vertical direction top of bottom (in the drawings from) of thin plate-type cooling device 100.In addition, also defining " part of observing on the first direction " is on Z axle negative direction (i.e. the direction of the bottom at the top from figure), and " part of observing from second direction " is part observed on the Z axle positive direction the direction of the top of the bottom of accompanying drawing (that is, from).
With reference to Fig. 1 b, Fig. 1 b has shown the signal part on the X-Y plane of thin plate-type cooling device 100 of first embodiment that second direction is looked.As shown in the drawing, the lower plate 100a of thin plate-type cooling device 100 is by being combined to form coolant circulation circuit within the essentially rectangular housing 112 with upper plate 100b.Cooling agent is in the direction cocycle of arrow and use the external heat source of the latent heat cooling contact cooling device 100 in the process of the phase transformation between liquid, the gaseous state.
The housing of housing 112 can be by such as the semi-conducting material of Si, Ga etc., such as the novel substance laminated material of self-assembled monolayer (SAM), having than the metal of high conduction and/or alloy, pottery, such as the polymer substance of plastics, such as the material manufacturing of adamantine crystalline material such as Cu, Al etc.Especially, under situation as the semiconductor chip of external heat source type, housing can by with the surperficial identical materials formation of external source to minimize the thermo-contact impedance.Under the situation of thin plate-type cooling device 100, can form as single-piece with the surfacing one of external source at the process middle shell of the technology of making semiconductor chip by the semiconductor manufacturing.
Then, be injected into thin plate-type cooling device 100 cooling agent since outside heat can from can be between the liquids and gases state material of phase transformation selected.In this embodiment, preferably use the same high water of latent heat and surface tension, because be desirable as cooling agent considering that any CFC is not used in environmental pollution with cooling agent.
In addition, change, must select suitable cooling agent because the surface tension between cooling agent and the thin plate-type cooling device 100 depends on the material of housing.For example, except water, can be used as cooling agent such as one of a series of alcohol of methyl alcohol, ethanol etc.Under the situation as cooling agent, advantage is that relatively large heat can be transmitted greatly owing to its heat capacity ratio, and by less with the capillary contact angle of semi-conductive inwall, the flow velocity of cooling agent becomes higher like this at water or alcohol.In addition, different with CFC, water or alcohol do not cause any environmental pollution as cooling agent, though its from thin plate-type cooling device 100 owing to any reason is leaked.
The selection of cooling agent just is used to implement a kind of optional matter of the present invention, but whether in order to limit technical scope of the present invention.
As shown in the drawing, thin plate-type cooling device 100 comprises the evaporation section 104 on the end that is formed in the thin plate-type cooling device 100, wherein Ye Tai cooling agent is filled at least in part owing to capillarity, and the liquid coolant of being filled is owing to gasify from the heat that external heat source transmitted, be formed gaseous coolant hop 106 adjacent to evaporation section 104, wherein Qi Hua cooling agent transmits owing to pressure differential on predetermined direction, condensation portion 108, described condensation portion 108 is formed adjacent to gaseous coolant hop 106, wherein the cooling agent of gaseous state is condensed into liquid state, be formed adjacent to the liquefied coolant hop 102 of condensation portion 108 and 110 and, wherein be condensed into liquid cooling agent towards evaporation section 104 transmission from evaporation section 104 heat insulations.
Cooling agent within the thin plate-type cooling device 100 forms closed circuit along the arrow among the figure.That is, cooling agent is by the liquefied coolant hop 110 of evaporation section 104, gaseous coolant hop 106, condensation portion 108, close condensation portion and liquefied coolant hop 102 sequential loop of close evaporation section.
Alternatively, thin plate-type cooling device 100 may further include refrigerant storage part (not shown), and the volume of described refrigerant storage part is suitable for the liquefied coolant with liquid state storing predetermined amount in liquefied coolant hop 102 and 110.For example, a part can be used to the refrigerant storage part near the liquefied coolant hop 102 of evaporation section.In addition, a plurality of refrigerant storage parts can be formed.
Preferably, the surface tension in the minim channel is greater than gravity.In addition, the contact angle of the meniscus of the cooling agent of the liquefaction of being assembled in minim channel is more little, and is preferred.In order to do like this, preferably, the inwall of minim channel is formed or is handled by water wetted material.For example, hydrophilic material treatment is by execution such as plating, coating, painted, anode processing, plasma treatment, laser treatment.In addition, the surface roughness of the inwall of minim channel can be adjusted to improve efficiency of thermal transfer.
Simultaneously, except the minim channel of evaporation section 104, preferably, hydrophilic treated liquefied coolant hop 102 and 110 and the surface of evaporation section 104 on carry out, hydrophilic treated is carried out on the surface of gaseous coolant hop 106 and evaporation section 104, and flow of coolant is modified to increase cooling effectiveness like this.
In addition, the cross section of minim channel can be circle, ellipse, rectangle, square, polygon etc.Especially, the capillary size of cooling agent can be by increasing or reducing longitudinal direction (promptly, the cross section of the minim channel X-axis) is controlled, and the transmission direction of cooling agent and speed also can be by forming a plurality of grooves or node be controlled on inwall.
Then, the cooling agent of gasification is transferred to the liquid coolant hop 102 near evaporation section on relative direction in evaporation section 104, and gaseous coolant hop 106 is formed adjacent to the passage of evaporation section 104 to be transmitted as gaseous coolant.As shown in FIG., gaseous coolant hop 106 can comprise a plurality of guiding pieces 118, and Qi Hua cooling agent can be in transmission on the predetermined direction (promptly on the direction relative with liquid coolant hop 102) like this.Guiding piece 118 can have the function of the mechanical strength that increases thin plate-type cooling device 100.Correspondingly, if mechanical strength is no problem, can not comprise guiding piece 118.
Simultaneously, condensation portion 108 can comprise to be formed on evaporation section 104 on the similar a plurality of minim channel (not shown) of minim channel.The minim channel of condensation portion 10 can be extended liquefied coolant hop 110, and is as described below, and extends to the liquefied coolant hop 102 near evaporation section further.The minim channel of condensation portion 108 makes that gaseous refrigerant is easy to be condensed, and, precipitate when finishing coolant circulation circuit by providing surface tension so that the cold-producing medium in the liquid state of institute's condensation is transmitted towards the liquefied coolant hop 102 near evaporation section.
The degree of depth of the minim channel of condensation portion 108 is dark than the minim channel of evaporation section 104 preferably, but be not limited thereto.In addition, the groove of the minim channel of the shape of cross section and change, condensation portion 108 or the formation of node will no longer describe in detail, because they are similar to the minim channel of evaporation section 104.
In addition, in order to increase radiating efficiency, a plurality of ribs can be formed on the outside of condensation portion 108 of thin plate-type cooling device 100.Rib has radial shape or other shape outside condensation portion 108.By fanning the inwall of 120 caused air contacts rib toward each other, can allow radiating efficiency maximize like this.
In addition, if rib comprises micro-actuator, the air that centers on cooling device can be used to the thermal cycle that autocondensation part 108 is distributed.If rib has the micro-structure that comprises thermoelectric conversion device, the heat of being distributed from condensation portion 108 is converted into electricity, and this can be used for the energy of little driving.
In addition, the volume of the volume ratio evaporation section 104 by forming condensation portion 108 is bigger, the cold-producing medium of gaseous state can be only convection current (convention) by the air that centers on condensation portion 108 be easy to condensation in condensation portion 108.
Liquefied coolant hop 110 forms a passage, and the liquefied coolant of institute's condensation is transmitted towards the liquefied coolant hop 102 near evaporation section in condensation portion 108.As shown in FIG., liquefied coolant hop 110 passes through thermal insulation part 116 heat insulations from gaseous coolant hop 106, condensation portion 108 and evaporation section 104.
As shown in FIG., liquefied coolant hop 110 is preferably along the longitudinal direction symmetry of thin plate-type cooling device 100.The coolant circulation circuit that is symmetrically formed by the longitudinal direction along thin plate-type cooling device 100 is the very good structure of dispelling the heat, if it has the shape of thin plate, be that its cross section length-width ratio is bigger, cooling device 100 can utilize bigger surface area radially to distribute the heat of transmitting from thermal source like this.
This two-way coolant circulation circuit has such advantage: though one of circulate coolant in the liquefied coolant hop 110 since depend on cooling device 100 the installation site gravity effect and when suitably not carried out, other circulate coolant can be held.
As mentioned above, even liquefied coolant hop 110 can comprise minim channel not to be subjected to the influence of gravity, on the direction of refrigerant storage part 102, a plurality of groove (not shown) can be formed in the minim channel.In addition, preferably, the cross section that is formed on the minim channel on evaporation section 104 or the liquefied coolant hop 102 and 110 reduces gradually from liquefied coolant hop 110 to the evaporation section 104 that contacts gaseous coolant hop 106 of condensation by contact part 108.
Simultaneously, a plurality of guiding piece (not shown) can be formed with near the liquefied coolant hop 102 of evaporation section and the border between the liquefied coolant hop 110 and the transmission direction of determining the cold-producing medium of liquefaction on the border between condensation portion 108 and the liquefied coolant hop 110, thus since the flow path of cooling agent rapidly the resistance of the crooked circulate coolant that cause took place can be reduced.
Simultaneously, preferably, evaporation section 104 is not directly connected to the thermal source (not shown) and reduces thermal contact resistance by heat conductor, and in described embodiment, cooling device 100 is provided with the fixture 114 that is used for cooling device 100 is fixed to by bolt or rivet external heat source like this.Can not comprise fixture 114, because the circulation of itself and cooling agent is irrelevant.
Then, with reference to Fig. 2 a-2c, will be described in detail according to the upper plate 100b of the thin plate-type cooling device 100 of first embodiment of this invention.Fig. 2 a has shown the schematic cross-sectional view of being got on the first direction on the X-Y plane of the thin plate-type cooling device 100 of first embodiment, Fig. 2 b shown on the Y-Z plane of thin plate-type cooling device 100 of first embodiment along the schematic cross-sectional view that A-A ' got, and Fig. 2 c has shown on the Y-Z plane of thin plate-type cooling device 100 of first embodiment along the schematic cross-sectional view that B-B ' got.In this embodiment, the viewgraph of cross-section of being got on the first direction shown in Fig. 2 a is the upward view of the upper plate 100b of thin plate-type cooling device 100.
As shown in FIG., in this embodiment, on the zone of the gaseous coolant hop 106 of corresponding lower plate 100a, the upper plate 100b of thin plate-type cooling device 100 has first Room 124 in the space that the condensing agent that is used to provide the gaseous state that is not condensed can be received.In addition, upper plate 100b can comprise the thermal insulation part 116 corresponding thermal insulation parts 116 with lower plate 100a.Upper plate 100b can be formed by the same material with the housing 112 of lower plate 100a.Alternatively, upper plate 100b can be formed by glass etc.
With reference to Fig. 2 c, first Room 124 is formed, and its cross section is a semiellipse on the direction that is parallel to the Y-axis line on the Y-Z plane like this.The space of the cooling agent by being provided for holding gaseous state, first Room 124 prevent that not the cooling agent of the gaseous state of condensation bubbles in condensation portion 108 in the cooling agent of liquid state.
Then, with reference to Fig. 3 a-3c, the upper plate 100b of thin plate-type cooling device 100 according to a second embodiment of the present invention will explain.Fig. 3 a has shown the schematic cross-sectional view of being got on the first direction on the X-Y plane of the thin plate-type cooling device 100 of second embodiment, Fig. 3 b has shown the schematic cross-sectional view of being got along A-A ' line on the Y-Z plane of the thin plate-type cooling device 100 of second embodiment, and Fig. 3 c has shown the schematic cross-sectional view of being got along B-B ' line on the Y-Z plane of the thin plate-type cooling device 100 of second embodiment.In this embodiment, the viewgraph of cross-section of being got on the first direction shown in Fig. 3 a is the upward view of the upper plate 100b of thin plate-type cooling device 100.
As shown in FIG., in this embodiment, the upper plate 100b of thin plate-type cooling device 100 has a plurality of first Room 124 on the zone of the gaseous coolant hop 106 of corresponding lower plate 100a, on described zone, a plurality of transmission paths of corresponding respectively second guiding piece, the 118 formed gaseous coolants by gaseous coolant hop 106 in a plurality of first Room 124, and they each has semi-elliptical cross-section on the Y-Z plane.Compare with first Room 124 of first embodiment, first Room 124 of second embodiment has function or the shape that is basically the same as those in the first embodiment, except they are separated second guiding piece 118 with corresponding lower plate 100a.
Then, with reference to Fig. 4 a-4c, the upper plate 100b of the thin plate-type cooling device 100 of a third embodiment in accordance with the invention will at length be illustrated.Fig. 4 a has shown the schematic cross-sectional view of being got on the first direction on the X-Y plane of the thin plate-type cooling device 100 of the 3rd embodiment, Fig. 4 b has shown the schematic cross-sectional view of being got along A-A ' line on the Y-Z plane of the thin plate-type cooling device 100 of the 3rd embodiment, and Fig. 4 c has shown the schematic cross-sectional view of being got along B-B ' line on the Y-Z plane of the thin plate-type cooling device 100 of the 3rd embodiment.In this embodiment, the viewgraph of cross-section of being got on the first direction shown in Fig. 4 a is the upward view of the upper plate 100b of thin plate-type cooling device 100.
As shown in FIG., the upper plate 100b of the thin plate-type cooling device 100 among the 3rd embodiment comprises a plurality of second Room on the corresponding region of the condensation portion 108 that is formed on lower plate 100a.That is, upper plate 100b comprises a plurality of first Room 124 on the corresponding region of the gaseous coolant hop 106 that is formed on lower plate 100a and is formed on first and second Room 124,126 by a plurality of second Room 126 on the corresponding region of the condensation portion 108 of lower plate 100a connected to one another respectively.
In addition, as shown in FIG., preferably, the width of each second Room 126 becomes narrower when it proceeds to corresponding liquefied coolant hop 110 regional.Correspondingly, when lower plate 100a and upper plate 100b are bound, the cross section of second Room 126 becomes less at them during to liquefied coolant hop 110, the surface tension of cooling agent to liquefaction becomes bigger, and the cooling agent of the gaseous state that is not condensed in condensation portion 108 can be got back to first Room 124 on the zone of corresponding gaseous coolant hop 106 like this.Correspondingly, owing to the form of the cooling agent in the gaseous state with bubble is contained in the liquid cooling agent, just can prevent more effectively that the cooling agent of gaseous state from arriving evaporation section 104.
Then, with reference to Fig. 5 a-4d, the upper plate 100b of the thin plate-type cooling device 100 of a fourth embodiment in accordance with the invention will explain.Fig. 5 a has shown the schematic cross-sectional view of being got on the first direction on the X-Y plane of the thin plate-type cooling device 100 of the 4th embodiment, Fig. 5 b has shown the schematic cross-sectional view of being got along A-A ' line on the Y-Z plane of the thin plate-type cooling device 100 of the 4th embodiment, and Fig. 5 c has shown the schematic cross-sectional view of being got along B-B ' line on the Y-Z plane of the thin plate-type cooling device 100 of the 4th embodiment.In this embodiment, the viewgraph of cross-section of being got on the first direction shown in Fig. 5 a is the upward view of the upper plate 100b of thin plate-type cooling device 100.
As shown in FIG., the upper plate 100b of the thin plate-type cooling device 100 among the 3rd embodiment also comprises a plurality of the 3rd Room 128 on the corresponding region of the condensation portion 108 that is formed on lower plate 100a.Preferably, each the 3rd Room 128 has half elliptic.In addition, a plurality of the 3rd Room 128 can form many rows along liquefied coolant hop 110.
In this embodiment, when the form of the bubble that not cooling agent of the gaseous state of institute's condensation is not held in cooling agent with the form of liquid state in condensation portion 108 is transferred to liquefied coolant hop 110, it can be caught by a plurality of the 3rd Room 128.Correspondingly, the form that just can more effectively prevent the bubble that held in the cooling agent of cooling agent with liquid state of gaseous state arrives evaporation section 104.
Above-mentioned cooling device of the present invention 100 can be made by the method such as the different well-known of MEMS (MEMS) method or SAM (self-assembled monolayer) method of using semiconductor device fabrication.With reference to Fig. 1 b, 2a, manufacture method is with concise description.
Promptly, the lower plate 100a's of thin plate-type cooling device 100 is surperficial etched with formation liquefied coolant hop 102, first minim channel 120 of evaporation section 104, first guiding piece 122 of condensation portion 108, second guiding piece 118 of gaseous coolant hop 106, and liquefied coolant hop 110.
Then, as mentioned above, lower plate 100b's is surperficial etched to form chamber 124,126 and/or 128 and/or thermal insulation part 116.
When lower plate 100a that is formed at said structure and upper plate 100b were connected to each other, the anode bonding can be performed by they are applied voltage, and they can become one like this.Then, pressure is reduced to allow closed circuit be in vacuum state by the cooling agent patchhole (not shown) that is formed to be connected to refrigerant storage part 102, and the cooling agent of scheduled volume is inserted into wherein, and the cooling agent patchhole is sealed.
Although preferred embodiments of the present invention have been disclosed for illustrative, those of ordinary skill are appreciated that and can make amendment to the present invention under the situation that does not deviate from spirit of the present invention and essence, its scope is by claims and be equal to and limit.For example, in the structure of first embodiment, the chamber of corresponding condensation portion 108 can replace by the chamber of the 3rd embodiment, and the chamber of perhaps corresponding liquefied coolant hop 110 can replace by the chamber of the 4th embodiment.In addition, alternatively, the zone except the chamber is formed the zone of upper plate 100b thereon also can have the structure identical with lower plate 100a.
[industrial applicability]
According to the present invention, by the gaseous coolant hop in the thin plate-type cooling device, cold Form one or more with reservation shape on solidifying part and/or the liquefied coolant hop The chamber, the cooling agent of the gaseous state that is not condensed in condensation portion can be received or catch, like this Just can prevent because the cooling agent of gaseous state is retained in the described passage to evaporation section and liquefaction Cooling agent can not Enough supply and dry phenomenon.
In addition, according to the present invention, the degree of depth, width or shape by changing passage are to adjust liquid state The surface tension of cooling agent, liquid cooling agent is rushed to evaporation section and does not need external energy, this It can prevent dry-out phenomenon and fully constantly with the cooling agent of liquid state in evaporation section sample Supply to evaporation section.
In addition, according to the present invention, the part actuating surface is processed on lower and upper passage, like this cooling agent Flow modifiedly, cooling effectiveness is increased.
Claims (8)
1. thin plate-type cooling device comprises:
The plate-shaped housing, wherein the closed circuit of fluid is formed; And
Can change to the cooling agent of another kind of state from a kind of state, the described recycle loop within the described housing;
Described closed circuit within the wherein said housing comprises:
Be formed on the evaporation section on the end of described closed circuit, the cooling agent of wherein said liquefaction is filled by capillarity at least in part, and described liquid cooling agent of filling is by the hot gasization from external heat source transmitted;
Gaseous coolant hop with the adjacent formation of described evaporation section, the cooling agent of wherein said gasification is transmitted through described gaseous coolant hop, and described gaseous coolant hop has at least one first Room, is used to hold the described gaseous coolant that is not condensed;
Form the liquefied coolant hop adjacent and from described evaporation section heat insulation, the cooling agent of wherein said liquefaction transmits towards described evaporation section with described condensation portion; And
Thermal insulation part is used for a part of heat insulation of described evaporation section from described at least liquefied coolant hop.
2. thin plate-type cooling device according to claim 1 is characterized in that, the part of described at least liquefied coolant hop comprises the liquefied coolant storage area that is used to store liquid described cooling agent.
3. thin plate-type cooling device according to claim 2 is characterized in that, the part of described at least liquefied coolant hop comprises a plurality of liquefied coolant storage areas.
4. thin plate-type cooling device according to claim 2 is characterized in that, described liquefied coolant storage area comprises that its surface tension is set up the minim channel greater than gravity.
5. thin plate-type cooling device according to claim 1, it is characterized in that the cross section of the minim channel of described evaporation section and/or described liquefied coolant hop become less from described liquefied coolant hop to the described evaporation section that contacts described gaseous coolant hop that contacts described condensation portion.
6. thin plate-type cooling device according to claim 1 is characterized in that, described condensation portion has at least one second Room.
7. thin plate-type cooling device according to claim 1 is characterized in that, described liquefied coolant hop has at least one the 3rd Room.
8. thin plate-type cooling device according to claim 1, it is characterized in that, hydrophilic treated is carried out on the surface of described liquefied coolant hop and described evaporation section, and hydrophilic treated is carried out on the surface of described gaseous coolant hop and described condensation portion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2003-0035078A KR100505279B1 (en) | 2003-05-31 | 2003-05-31 | Cooling device of thin plate type for preventing dry-out |
| KR1020030035078 | 2003-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1781007A true CN1781007A (en) | 2006-05-31 |
| CN100447991C CN100447991C (en) | 2008-12-31 |
Family
ID=36659730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003801103289A Expired - Fee Related CN100447991C (en) | 2003-05-31 | 2003-10-28 | Cooling device of thin plate type for preventing dry-out |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20060157227A1 (en) |
| EP (1) | EP1639301A1 (en) |
| JP (1) | JP2006526128A (en) |
| KR (1) | KR100505279B1 (en) |
| CN (1) | CN100447991C (en) |
| AU (1) | AU2003273115A1 (en) |
| BR (1) | BR0318323A (en) |
| RU (1) | RU2005137166A (en) |
| WO (1) | WO2004106822A1 (en) |
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- 2003-10-28 EP EP03754299A patent/EP1639301A1/en not_active Withdrawn
- 2003-10-28 CN CNB2003801103289A patent/CN100447991C/en not_active Expired - Fee Related
- 2003-10-28 BR BRPI0318323-8A patent/BR0318323A/en not_active IP Right Cessation
- 2003-10-28 JP JP2005500269A patent/JP2006526128A/en active Pending
- 2003-10-28 AU AU2003273115A patent/AU2003273115A1/en not_active Abandoned
- 2003-10-28 RU RU2005137166/12A patent/RU2005137166A/en not_active Application Discontinuation
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Also Published As
| Publication number | Publication date |
|---|---|
| KR100505279B1 (en) | 2005-07-29 |
| RU2005137166A (en) | 2006-06-10 |
| WO2004106822A1 (en) | 2004-12-09 |
| CN100447991C (en) | 2008-12-31 |
| JP2006526128A (en) | 2006-11-16 |
| AU2003273115A1 (en) | 2005-01-21 |
| US20060157227A1 (en) | 2006-07-20 |
| KR20040103151A (en) | 2004-12-08 |
| EP1639301A1 (en) | 2006-03-29 |
| BR0318323A (en) | 2006-07-18 |
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