US20060019197A1 - Sensitizer dyes for photoacid generating systems - Google Patents

Sensitizer dyes for photoacid generating systems Download PDF

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US20060019197A1
US20060019197A1 US11/158,922 US15892205A US2006019197A1 US 20060019197 A1 US20060019197 A1 US 20060019197A1 US 15892205 A US15892205 A US 15892205A US 2006019197 A1 US2006019197 A1 US 2006019197A1
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medium
substituted
dye
group
unsubstituted
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David Waldman
Eric Kolb
Kirk Hutchinson
Richard Minns
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Aprilis Inc
DCE Aprilis Inc
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Aprilis Inc
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Assigned to APRILIS, INC. reassignment APRILIS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KOLB, ERIC S., HUTCHINSON, KIRK D., MINNS, RICHARD A., WALDMAN, DAVID A.
Publication of US20060019197A1 publication Critical patent/US20060019197A1/en
Priority to US12/070,913 priority patent/US7892702B2/en
Assigned to DCE APRILIS, INC. reassignment DCE APRILIS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DOW CORNING ENTERPRISES, INC. AS COLLATERAL AGENT
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B3/00—Dyes with an anthracene nucleus condensed with one or more carbocyclic rings
    • C09B3/78—Other dyes in which the anthracene nucleus is condensed with one or more carbocyclic rings
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B3/00—Dyes with an anthracene nucleus condensed with one or more carbocyclic rings
    • C09B3/78—Other dyes in which the anthracene nucleus is condensed with one or more carbocyclic rings
    • C09B3/82—Preparation from starting materials already containing the condensed anthracene nucleus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403—Layers; Shape, structure or physical properties thereof
    • G11B7/24035—Recording layers
    • G11B7/24044—Recording layers for storing optical interference patterns, e.g. holograms; for storing data in three dimensions, e.g. volume storage
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/244—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only
    • G11B7/246—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only containing dyes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/244—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/244—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only
    • G11B7/249—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising organic materials only containing organometallic compounds

Definitions

  • Photoacid generation has become valuable in the fields of photoresists and cationic polymerization.
  • Cationic photopolymerization has developed into an excellent alternative to free-radical photopolymerization for applications that can take advantage of the high speed, low temperature, and environmental friendliness of radiation curing technology.
  • cationic photopolymerization processes are not inhibited by oxygen, and by employing monomers and oligomers such as epoxides and oxetanes that undergo rapid cationic ring opening polymerization (CROP), shrinkage resulting from polymerization can be dramatically reduced.
  • CROP cationic ring opening polymerization
  • PAGs onium salt photoacid generators
  • photosensitizer dyes are used in conjunction with the PAGs to enable photoinitiated acid generation and cationic photopolymerization at longer wavelengths in the near ultraviolet and visible spectral regions.
  • Increasing the concentration of the photosensitizer dye results in an increase in the absorption of the medium, thereby increasing the optical path length of the medium.
  • the absorbance of the medium can cause undesirable tradeoffs such as non-uniform polymerization throughout the volume of a polymerizable medium, impaired fidelity of holograms recorded in such media and a diminished increase in the dynamic range of a holographic recording medium as a function of increasing the medium's thickness.
  • A absorbance of the sample medium, and is also referred to as the optical density of the medium
  • I o is the intensity of the incident light in units of quanta per second
  • I is the intensity of the light transmitted through the sample medium in units of quanta per second
  • c is the concentration of the absorbing species in units of mol liter ⁇ 1
  • ⁇ is the molar absorptivitiy in units of liters mol ⁇ 1 cm ⁇ 1 and is also referred to as the molecular extinction coefficient
  • the decrease in light intensity with depth into the medium from the front surface of the medium leads to non-uniformity of the extent of polymerization that occurs within the medium, so that less polymerization occurs depthwise in the interior of a medium as compared to at or near the front surface that is exposed to the incident light.
  • the amount of light penetrating into a medium would be capable of initiating an identical number of polymerization events at all depths and thus the extent of polymerization would be uniform throughout the depth of the medium. In reality this cannot occur in a medium that exhibits reasonable sensitized polymerization kinetics and thus the degree of chemical segregation, concomitant with the extent of polymerization, is nonuniform through the depth of the recording medium.
  • the degree of this nonuniformity can be significant if high absorbance is needed to achieve good recording sensitivity or if increases in media thickness are required to establish a roadmap for increased capacity of information stored in a set form factor such as a disk or card.
  • the characteristic level of absorbance of a sensitized medium is crucial in applications such as holographic recording media, where uniformity of the refractive index modulation of each hologram, which develops from chemical segregation that is induced by polymerization reactions, is critical.
  • angle multiplexing methods of various types are used to record holograms in co-locational or substantially overlapped areas in order to achieve high areal density. Such methods typically result in formation of holograms that exhibit diffraction efficiency less than about 0.05% and which are required to exhibit both good angular selectivity characteristics and good image quality.
  • a first hologram is recorded and then a second hologram is recorded using a reference beam angle where most desirably the first hologram has a first minimum of intensity (the “null” or minimum of the Bragg selectivity curve).
  • a first minimum of intensity the “null” or minimum of the Bragg selectivity curve.
  • Subsequent holograms recorded in substantially the same storage location are similarly recorded most desirably at the first such minimum of intensity of the hologram that is recorded with the most similar reference beam angle.
  • the Bragg selectivity curve exhibits increased intensity at the angle of the expected first minimum, and thus a poorly defined first minimum exists which, by way of example, is commonly observed as a shoulder of the main Bragg peak, then the multiplexed holograms must instead be recorded at the second minimum or “null” of the Bragg selectivity curve.
  • the deviation from an ideal sinc 2 Bragg selectivity profile, that in accordance with coupled wave analysis see Kolgenik, Bell Syst. Tech. J.
  • the effects of lowering the extinction coefficient or required concentration of a dye are most apparent when it is desirable to use a thicker polymerizable medium (e.g., to hold more information per unit surface area) or when a hologram must have high fidelity.
  • concentrations that generate both a useful amount of polymerization and high recording sensitivity presently available photosensitizer dyes are limited to use in polymerizable media with thicknesses of about 300 micrometers or less.
  • photosensitizer dyes such as rubrene and 5,12-bis(phenylethynyl)naphthacene (BPEN) have extinction coefficients at specific wavelengths of visible light, especially light in the 500-550 nm region (e.g., from commercially-available lasers such as an argon ion laser or frequency-doubled Nd:YAG laser) that result in reduced performance when used in relatively thick holographic recording media having thicknesses greater than about 300 micrometers.
  • commercially-available lasers such as an argon ion laser or frequency-doubled Nd:YAG laser
  • the recording media is made sensitive to actinic radiation of a desired energy level (wavelength) by the incorporation of a sensitizer dye.
  • the normal polymerization procedure is to irradiate the photopolymer with photons which will then begin the polymerization process.
  • the reaction sequence associated with this process is complex.
  • a simplified, but reasonably good model is as follows: the dye is first excited by photons and then the excited dye transfers energy to the initiator to provide an excited initiator or the excited dye reacts with the initiator via a oxidation-reduction process to form an initiative species. In either case the initiative species or excited initiator then combines with a monomer, which begins a chain reaction with additional monomers to result in polymerization.
  • Photosensitizer dyes should also undergo efficient electron transfer reactions and preferably bleach completely at the relevant wavelength when exposed to visible light in the presence of an onium salt (e.g., a wavelength corresponding to a laser).
  • photosensitizer dyes should have adequate solubility, especially in cationic polymerization media, and should not inhibit cationic processes (e.g., should be sufficiently non-basic).
  • This invention provides a series of novel 5-alkynyl substituted naphthacene dyes.
  • This invention further provides such dyes that are efficient photosensitizers for onium salt photoacid generators (PAGs) when exposed to actinic radiation. Additionally, such dyes further exhibit desirably low extinction coefficients, thus making it possible to employ the dyes of the present invention within thicker layer of recordable media than previously achievable (Example 5).
  • This invention also provides a process for use of these dyes for the uniform polymerization of thick media. Even further, this invention provides a process or method for the utilization of these dyes for the recording of holograms with good recording sensitivity and good image fidelity.
  • Holographic recording media comprising inventive dyes of the present invention showed high signal-to-noise ratio for a given number of images (as indicated by high cumulative grating strength) and achieved recording sensitivity better than an HRM of the same thickness comprising a sensitizing dye of prior art (Example 6).
  • the enhanced recording sensitivity exhibited by use of a sensitizer of the present invention is more advantageous as the thickness of the recording media is increased further, as the limitations due to low concentration of the dye become more severe.
  • the photosensitizer dyes of this invention also preferably completely bleach upon exposure to light when used in combination with a photoacid generator.
  • the present invention includes a dye represented by Structural Formula (I):
  • R 1 is a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkenyl group, a substituted or unsubstituted aryl group or a substituted or unsubstituted heteroaryl group or —Si(R 5 ) 3 .
  • R 2 , R 3 , and R 4 are each independently —H, a halogen, a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkenyl group, a substituted or unsubstituted alkylethynyl group, a substituted or unsubstituted alkenylethynyl group, a substituted or unsubstituted aryl group, a substituted or unsubstituted heteroaryl group, or the group —C ⁇ C—Si(R 5 ) 3 .
  • Each R 5 is independently a substituted or unsubstituted alkyl, a substituted or unsubstituted aryl or a substituted or unsubstituted heteroaryl group.
  • Rings A and B are independently substituted or unsubstituted, but are preferably unsubstituted.
  • the present invention is a polymerizable medium, comprising:
  • One type of polymerizable medium is a holographic recording medium, where the medium comprises:
  • the medium is advantageously greater than 300 ⁇ m thick.
  • Another type of polymerizable medium is a holographic recording medium, where the medium comprises:
  • the present invention also includes a method of generating acid, comprising the step of exposing to visible light a composition comprising:
  • the present invention is a method of recording holograms within a holographic recording medium disclosed herein.
  • the method generally comprises the step of passing into the medium a reference beam of coherent actinic radiation and at substantially the same location in the medium simultaneously passing into the medium an object beam of the same coherent actinic radiation, such that the dye dislosed herein in combination with the PAG is capable of producing acid upon exposure to the actinic radiation, thereby forming within the medium an interference pattern and thereby recording a hologram within the medium.
  • Advantages of the present invention include photosensitizer dyes with low extinction coefficients when exposed to visible light.
  • holographic recording media having a thickness greater than about 300 micrometers, and which exhibit good recording sensitivity and good image fidelity, can be prepared with these dyes.
  • These photosensitizer dyes also bleach upon exposure to visible light when in the presence of a photoacid generator.
  • the FIGURE is a plot of recording sensitivity as a function of cumulative fluence.
  • the result, described in Example 6, compares a holographic recording media (HRM) employing MeOPEN dye of the present invention to an HRM employing a commercially available dye BPEN.
  • HRM holographic recording media
  • the present invention relates to a new class of 5-alkynyl substituted naphthacene photosensitizing dyes, which can sensitize onium salt photoacid generators (“PAGs”) when exposed to visible light.
  • Dyes represented by Structural Formula (I) can be substituted with one or more halogen atoms on Rings A and B.
  • Rings A and B include substituted and unsubstituted alkyl groups, alkoxy, trialkylammonium, and diarylamino groups.
  • R 2 , R 3 and R 5 in Structural Formula (II) are as described above for Structural Formula (I) and R 4 is —H, a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group, or a substituted or unsubstituted heteroaryl group.
  • the compound represented by Structural Formula (II) is characterized by one or more of the following features: (1) R 4 is a substituted or unsubstituted phenyl group, preferably unsubsituted phenyl, (2) R 2 is —H, (3) R 3 is —H, and (4) each R 5 is an alkyl group, preferably methyl. More preferably, the compound represented by Structural Formula (II) is characterized by Feature (1); Features (1) and (2); Features (1), (2) and (3); or Features (1), (2), (3) and (4).
  • the photosensitizing dye is represented by Structural Formula (I), where the compound has one or more of the following features: (1) R 1 and R 4 are each a substituted or unsubstituted aryl or a substituted or unsubstituted heteroaryl group, preferably a substituted or unsubstituted aryl group, even more preferably phenyl, (2) R 2 is —H, and (3) R 3 is —H. More preferably, the compound represented by Structural Formula (I) is characterized by Feature (1); Features (1) and (2); or Features (1), (2) and (3).
  • R 2 and R 3 in Structural Formula (III) are as described above for Structural Formula (I) and R 1 is a substituted or unsubstituted aryl or a substituted or unsubstituted heteroaryl group.
  • the dye represented by Structural Formula (III) is represented by Structural Formula (IV):
  • R 2 and R 3 in Structural Formula (IV) are as described above for Structural (III) and R 10 is —H, a halogen, or an alkyl, alkoxy, trialkylammonium, or a diarylamino group; and y is an integer from 1 to 5.
  • R 2 , R 3 and R 10 in Structural Formula (V) are the same as described above in Structural Formula (IV).
  • the dye represented by Structural Formula (IV) or (V) is preferably characterized by one or more of the following features: (1) R 2 is —H, (2) R 3 is —H, and (3) R 10 is —H, —CH 3 or —OCH 3 . More preferably, the compound represented by Structural Formula (IV) or (V) is characterized by Feature (1); Features (1) and (2); or Features (1), (2) and (3).
  • Photosensitizing dyes of the present invention can be used to sensitize “PAGs” such as iodonium, sulfonium, diazonium or phosphonium salts to produce acid when exposed to actinic radiation. Most commonly, iodonium or sulfonium salts are used.
  • Suitable iodonium salts include (4-octyloxyphenyl)phenyliodonium hexafluoroantimonate, ditolyliodonium tetrakis(pentafluorophenyl)borate, diphenyliodonium tetrakis(pentafluorophenyl)borate, tolylphenyliodonium tetrakis(pentafluorophenyl)borate, cumyltolyliodonium tetrakis(pentafluorophenyl)borate, di(4-t-butylphenyl)iodonium tris(trifluoromethylsulfonyl)methylate, dicumyliodonium tetrakis(3,5-bistrifluoromethylphenyl)borate, di(4-t-butylphenyl)iodonium tetrakis(3,5-bistrifluoro
  • Suitable sulfonium salts include those disclosed in co-pending U.S. Provisional Patent Application No. ______ entitled FLUOROARYLSULFONIUM PHOTOACID GENERATORS (Attorney Docket No. 3174.1007-000), filed on Dec. 23, 2002, the teachings of which are incorporated herein by reference.
  • Photosensitizer dyes of the present invention advantageously have extinction coefficients in the visible region, for example, at wavelengths of commercially available solid state lasers such as 532 nm, 528 nm, 523 nm, 488 nm and 460 nm, of less than 16,000 L mol ⁇ 1 cm ⁇ 1 , preferably less than 10,000 L mol ⁇ 1 cm ⁇ 1 , more preferably less than 6,000 L mol ⁇ 1 cm ⁇ 1 , and even more preferably less than 2,000 L mol ⁇ 1 cm ⁇ 1 .
  • solid state lasers such as 532 nm, 528 nm, 523 nm, 488 nm and 460 nm
  • a photopolymerizable holographic recording medium it is advantageous to increase the thickness of a photopolymerizable holographic recording medium, for example, to increase the amount of information contained per unit area.
  • the medium is advantageously greater than 300 ⁇ m thick, greater than 500 ⁇ m thick, greater than 1,000 ⁇ m thick or greater than 2,000 ⁇ m thick.
  • a medium can be greater than 300 ⁇ m thick and less than 1000 ⁇ m thick, greater than 500 ⁇ m thick and less than 1000 ⁇ m thick, or greater than 300 ⁇ m thick and less than 500 ⁇ m thick.
  • Polymerizable recording media with a thickness of less than 300 ⁇ m can also be prepared, such as between 100 ⁇ m and 300 ⁇ m.
  • Monomers suitable for use in polymerizable media include, for examples, those containing epoxide, oxetane, cyclic ether, 1-alkenyl ethers including vinyl ether and 1-propenyl ether, unsaturated hydrocarbon, lactone, cyclic ester, lactam, cyclic carbonate, cyclic acetal, aldehyde, cyclic sulfide, cyclosiloxane, cyclotriphosphazene, or polyol functional groups, and combinations thereof.
  • Epoxides, oxetanes and and 1-alkenyl ether functional groups are preferred.
  • a polymerizable medium can contain one or more different polymerizable monomers.
  • Monomers suitable for use in holographic recording media typically undergo acid-initiated cationic polymerization (also referred to as “cationic monomers”), such as epoxides.
  • Siloxanes substituted with one or more epoxide moieties are commonly used in holographic recording media.
  • a preferred type of epoxy group is a cycloalkene oxide group, especially a cyclohexene oxide group.
  • Siloxane monomers can be difunctional, such as those in which two or more epoxide groupings (e.g., cyclohexene oxide groupings) are linked to an Si—O—Si grouping. These monomers have the advantage of being compatible with the preferred siloxane binders.
  • Exemplary difunctional epoxide monomers are those of the formula: RSi(R 1 ) 2 OSi(R 2 ) 2 R (VI), where each group R is, independently, a monovalent epoxy functional group having 2-10 carbon atoms; each group R 1 is a monovalent substituted or unsubstituted C 1- alkyl, C 1-12 cycloalkyl, aralkyl or aryl group; and each group R 2 is, independently, R 1 , or a monovalent substituted or unsubstituted C 1-12 alkyl, C 1-12 cycloalkyl, aralkyl or aryl group.
  • each group R is a 2-(3,4-epoxycyclohexyl)ethyl grouping; each grouping R 1 is a methyl group, and each group R 2 is a methyl group, and which is available from Rhodia Silicones, Rock Hill, S.C., under the tradename S 200.
  • the preparation of this specific compound is described in, inter alia, U.S. Pat. Nos. 5,387,698 and 5,442,026. Additional siloxane monomers are described in PCT Publication No. WO 02/19040 and U.S. Publication No. 2002/068223, the teachings of which are incorporated herein by reference.
  • Siloxane monomers that are suitable for use in holographic recording media can also be polyfunctional.
  • a “polyfunctional” monomer is a compound having at least three groups of the specified functionality, in the present case at least three epoxy groups.
  • the terms “polyfunctional” and “multifunctional” are used interchangeably herein.
  • Polyfunctional monomers have the advantage of being compatible with the preferred siloxane binders and providing for rapid structural buildup and high crosslink density.
  • Polyfunctional monomers suitable for use in holographic recording media typically have three or four epoxides (preferably cyclohexene oxide) groupings connected by a linker through a Si—O group, i.e., a “siloxane group”, to a central Si atom.
  • the epoxides are connected by a linker to a central polysiloxane ring.
  • polufunctional monomers suitable for use in holography have a plurality of epoxides as pendant groups on a siloxane polymer, copolymer or oligomer.
  • polyfunctional monomers suitable for use in polymerizable media typically has three or four epoxides (preferably cyclohexene oxide) groupings connected by a linker through a Si—O group, i.e., a “siloxane group”, to a central Si atom.
  • epoxides are connected by a linker to a central polysiloxane ring.
  • Examples of such polyfunctional monomers are found in U.S. Publication No. 2002/0068223 and PCT Publication WO 02/19040, the contents of which are incorporated herein by reference in their entirety.
  • siloxane monomers of this type include the compounds represented by Structural Formulae (VII)—(XI): Further description of suitable siloxane monomers can be found in U.S. Publication No. 2002/0068223 and PCT Publication WO 02/19040, the teachings of which are incorporated by reference.
  • the holographic recording medium additionally comprises a second or third monomer that undergoes cationic polymerization or, alternatively, supports cationic polymerization.
  • monomers that support cationic polymerization may be essentially inert to cationic polymerization.
  • the second monomer is a vinyl ether comprising one or more alkenyl ether groupings or a propenyl ether comprising one or more propenyl ether groupings.
  • the second monomer is a siloxane comprising two or more or three or more cyclohexene oxide groups, as described above.
  • the second monomer is a siloxane having at least two cyclohexene oxide groups and the third monomer is a siloxane having at least two cyclohexene oxide groups.
  • additional monomers is described in U.S. Ser. No. 08/970,066, filed Nov. 13, 1997, the contents of which are incorporated herein by reference.
  • a binder used in the process and preparation of the present medium should be chosen such that it does not inhibit cationic polymerization of the monomers used (e.g., “supports” cationic polymerization), such that it is miscible with the monomers used, and such that its refractive index is significantly different from that of the polymerized monomer or oligomer (e.g., the refractive index of the binder differs from the refractive index of the polymerized monomer by at least 0.04 and preferably at least 0.09).
  • Binders in this embodiment are not required to incrase cohesion in said medium, as is generally the case, and are preferably “diffusible”, but can be substantially or wholly non-diffusible.
  • Diffusable binders can, by way of example, segregate from the polymerizing monomer(s) or oligomer(s) during holographic recording via diffusion-type motion of the binder component.
  • Non diffusible binders can be a monomer(s) or oligomer(s) that is pre-polymerized to form a moderate to high molecular weight polymeric or copolymer structure that supports cationic polymerization and is a substantially non diffusible component relative to the time scale of diffusion processes during holographic recording events.
  • binders can be inert to the polymerization processes described herein or optionally can polymerize (by cationic, free radical or other suitable polymerization) during one or more polymerization events.
  • a binder is inert to the polymerization processes defined herein and, even more preferably, is diffusible.
  • Preferred binders for use in holographic recording media are polysiloxanes, due in part to availability of a wide variety of polysiloxanes and the well documented properties of these oligomers and polymers.
  • the physical, optical, and chemical properties of the polysiloxane binder can all be adjusted for optimum performance in the recording medium inclusive of, for example, dynamic range, recording sensitivity, image fidelity, level of light scattering, and data lifetime.
  • the efficiency of holograms produced by the present process in the present medium is markedly dependent upon the particular binder employed.
  • binders include poly(methyl phenyl siloxanes) and oligomers thereof, 1,3,5-trimethyl-1,1,3,5,5-pentaphenyltrisiloxane and other pentaphenyltrimethyl siloxanes. Examples are sold by Dow Corning Corporation under the tradename Dow Corning 710 and Dow Corning 705 and have been found to give efficient holograms.
  • a diffusible binder having a polymerizable moiety can be found in U.S. Pat. No. 5,759,721, the contents of which are incorporated herein by reference.
  • This patent discloses a siloxane polymer having a number of pendant epoxide (cyclohexene oxide) groups.
  • the binder was a poly(methylhydrosiloxane) which was hydrosilated with a 90:10 w/w mixture of 2-vinylnaphthalene and 2-vinyl(cyclohex-3-ene oxide).
  • the binder is a solid polymer matrix formed in situ from a matrix precursor by a curing step (curing indicating a step of inducing reaction of the precursor to form the polymeric matrix).
  • the precursor it is possible for the precursor to be one or more monomers, one or more oligomers, or a mixture of monomer and oligomer. In addition, it is possible for there to be greater than one type of precursor functional group, either on a single precursor molecule or in a group of precursor molecules.
  • examples of precursors that support cationic polymerization are typically polymerizable by free radical or anionic means and include molecules containing styrene, certain substituted styrenes, vinyl naphthalene, certain substituted vinyl naphthalenes and vinyl ethers, which can optionally be mixed with certain co-monomers.
  • the proportions of PAG, photosensitizing dye, monomer(s) or oligomer(s), and binder in holographic recording media of the present invention may vary rather widely, and the optimum proportions for specific components and methods of use can readily be determined empirically by skilled workers. Guidance in selecting suitable proportions is provided in U.S. Pat. No. 5,759,721, the teachings of which are incorporated herein by reference.
  • the solution of monomers with binder can comprise a wide range of compositional ratios, preferably ranging from about 90 parts binder and 10 parts monomer or oligomer (w/w) to about 10 parts binder and 90 parts monomer or oligomer (w/w). It is preferred that the medium comprise from about 0.167 to about 5 parts by weight of the binder per total weight of the monomers. Typically, the medium comprises between about 0.005% and about 0.5% by weight dye, and between about 1.0% and about 10.0% by weight PAG.
  • Acid generated by the method of the present invention can be used in polymerizing one or more polymerizable monomers, as is described above.
  • Such polymerizable monomers can form protective, decorative and insulating coatings (e.g., for metal, rubber, plastic, molded parts or films, paper, wood, glass cloth, concrete, ceramics), potting compounds, printing inks, sealants, adhesives, molding compounds, wire insulation, textile coatings, laminates, impregnated tapes, varnishes, and antiadhesive coatings.
  • Acid generated by this method can also be used to etch a substrate or to catalyze or initiate a chemical reaction in printed circuit boards or other laser direct imagine processes.
  • a particularly advantageous use of this method is to generate acid uniformly throughout the thickness of the medium in the area of the exposure or illuminated area to maintain optimal physical and optical properties.
  • An aliphatic group is a hydrocarbon group which can be saturated or unsaturated; branched, straight chained or cyclic; and substituted or unsubstituted. Aliphatic groups of the present invention typically have 1 to about 12 carbon atoms.
  • An alkyl group is preferably a straight chained or branched saturated aliphatic group with 1 to about 12 carbon atoms, e.g, methyl, ethyl, n-propyl, iso-propyl, n-butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl or octyl, or a saturated cycloaliphatic group with 3 to about 12 carbon atoms.
  • An alkenyl group is preferably a straight chained or branched aliphatic group having one or more double bonds with 2 to about 12 carbon atoms, e.g, ethenyl, 1-propenyl, 1-butenyl, 2-butenyl, 2-methyl-1-propenyl, pentenyl, hexenyl, heptenyl or octenyl, or a cycloaliphatic group having one or more double bonds with 3 to about 12 carbon atoms.
  • An alkynyl group is preferably a straight chained or branched aliphatic group having one or more triple bonds with 2 to about 12 carbon atoms, e.g, ethynyl, 1-propynyl, 1-butynyl, 3-methyl-1-butynyl, 3,3-dimethyl-1-butynyl, pentynyl, hexynyl, heptynyl or octynyl, or a cycloaliphatic group having one or more triple bonds with 3 to about 12 carbon atoms.
  • Suitable aryl groups for the present invention are those which 1) do not react directly with light in the absence of PAG to initiate or induce cationic polymerization;
  • Suitable heteroaryl groups for the present invention are those which 1) do not react directly with light in the absence of PAG to initiate or induce cationic polymerization and 2) do not interfere with acid initiated cationic polymerization.
  • Heteroaryl groups include, but are not limited to, furanyl and fused polycyclic aromatic ring systems in which a carbocyclic aromatic ring or heteroaryl ring is fused to one or more other heteroaryl rings (e.g., benzofuranyl).
  • Suitable substituents on alkyl, alkenyl, alkynyl, aryl, heteroaryl and aliphatic groups are those which 1) do not react directly with light in the absence of PAG to initiate or induce cationic polymerization and 2) do not interfere with acid initiated cationic polymerization.
  • suitable substituents include, but are not limited to, alkyl, aryl, —OH, halogen (—Br, —Cl, —I and —F), —O(R′), —O—CO—(R′), —COOH, N(Ar′) 2 , —COO(R′), and —S(R′).
  • Each R′ is independently a substituted or unsubstituted aliphatic group or a substituted or unsubstituted aryl group, preferably an alkyl group or an aryl group and each Ar group is a substituted or unsubstituted aryl group preferably a phenyl group.
  • Monosubstituted photosensitizing dyes of the present invention can be prepared by halogenating naphthacene with a suitable agent (e.g., CuBr 2 to brominatenaphthacene at the 5 position). Next, the halogenated naphthacene undergoes a Sonogashira coupling reaction with a substituted acetylene in the presence of suitable catalysts to yield the desired dye (Sonogashira, K.; Tohda, Y.; Hagihara, N. Tetrahedron Lett., 1975, 4467).
  • a suitable agent e.g., CuBr 2 to brominatenaphthacene at the 5 position.
  • Disubstituted photosensitizing dyes of the present invention can be prepared by a synthetic route comprising two additional steps.
  • naphthacene is halogenated with a suitable agent to produce a 5-halonaphthacene as described above.
  • the 5-halonaphthacene then undergoes a Suzuki coupling reaction with phenylboronic acid in the presence of a suitable catalyst (e.g., dichlorobis(triarylphosphine) palladium(II)) and base to produce 5-phenylnaphthacene (Miyaura, N.; Suzuki, A. Chem. Rev., 1995, 95, 2457).
  • a suitable catalyst e.g., dichlorobis(triarylphosphine) palladium(II)
  • the 5-phenylnaphthacene is again halogenated to give a 5-phenyl-12-halonaphthacene.
  • the 5-phenyl-12-halonaphthacene undergoes a Sonogashira coupling reaction with a substituted acetylene to produce the product.
  • This intermediate dye was prepared by modifying the method described in J. Org. Chem., 1970, 35 (5), 1315-18.
  • a reflux condenser was added to the flask and the mixture was refluxed at 85° C. for 24 hours.
  • UV-Vis analysis of the product in THF showed a ⁇ max at 488 nm.
  • UV-Vis analysis of the product using HPLC with the product dissolved in 5% dichloromethane/hexanes showed ⁇ max at 427 nm, 453 nm and 484 nm.
  • UV-Vis analysis of the product using HPLC with the product dissolved in 5% dichloromethane/hexanes showed a ⁇ max at 423 nm, 449 nm and 479 nm.
  • UV-Vis analysis of the product using HPLC with the product dissolved in 5% dichloromethane/hexanes showed a ⁇ max at 435 nm, 462 nm and 493 nm.
  • 5-Bromo-12-phenylnaphthacene (0.600 g, 1.565 mmol), 15 mg of copper(I) iodide (0.0783 mmol), 41 mg of triphenylphosphine (0.157 mmol) and 55 mg of dichlorobis(triphenylphosphine)palladium(II) catalyst (0.0783 mmol) were added to an oven-dried glass pressure tube equipped with a magnetic stirrer. Dry triethylamine (20 ml) was added and the mixture was degassed with nitrogen for 15 minutes. Phenylacetylene (0.176 g, 0.19 ml, 1.72 mmol) was then added by syringe.
  • the tube was sealed and heated in an oil bath to 95° C. while covered with aluminum foil to exclude light (for the duration of the reaction and work up, exposure to light was minimized).
  • the reaction mixture was heated for three hours, and then allowed to cool slowly.
  • the tube contents were dark red with a white precipitate. Upon further cooling, a dark red precipitate formed.
  • TLC analysis with 30% dichlormethane/hexanes showed that all 5-bromo-12-phenylnaphthacene had been consumed.
  • the contents of the reaction tube were transferred to a 250-ml round-bottomed flask, rinsed with dichloromethane, and the solvents were removed by rotary evaporation.
  • the solids were dissolved in 75 ml dichloromethane, and extracted 3 times with 10% aqueous HCl and once with water. Na 2 SO 4 was added to the organic layer and stirred for 30 minutes.
  • the solids were filtered off and the solution transferred to a 250-ml round-bottomed flask.
  • the solvents were removed by rotary evaporation to yield a dark red oil that was dried overnight at room temperature under vacuum.
  • the resulting semi-solid comprised the product (lower R f ) and a reaction by-product, as observed by TLC.
  • This material was purified by silica gel chromatography using 10% dichloromethane/hexanes as eluent. Pure fractions were combined and the solvent was removed by rotary evaporation. After drying under vacuum overnight, the product was obtained as a dark red powder in 65% yield.
  • UV-Vis analysis of the product in THF showed a ⁇ max at 456 nm, 486 nm and 520 nm.
  • UV-Vis analysis of the product using HPLC with the product dissolved in 5% dichloromethane/hexanes showed a ⁇ max at 453 nm, 482 nm and 516 nm.
  • step 4 phenylacetylene was substituted with trimethylsilylacetylene (R ⁇ (CH 3 ) 3 Si), 1-ethynyl-cyclohexene (R ⁇ C 6 H 9 ), or t-butylacetylene (R ⁇ C 4 H 9 ).
  • UV-Vis analysis of the product where R is C 6 H 9 using HPLC with the product dissolved in 5% dichloromethane/hexanes showed a ⁇ max at 451 nm, 481 nm and 515 nm.
  • the tube was sealed and heated in an oil bath to 95° C. while covered with aluminum foil to exclude light (for the duration of the reaction and work up, exposure to light was minimized).
  • the reaction mixture was heated for two hours, and then allowed to cool slowly.
  • the tube contents were dark red with a white precipitate. Upon further cooling, a dark red precipitate formed.
  • TLC analysis with 30% dichloromethane/hexanes showed that all 5-bromonaphthacene had been consumed.
  • the contents of the reaction tube were transferred to a 250-ml round-bottomed flask, rinsed with dichloromethane, and the solvents were removed by rotary evaporation.
  • the solids were dissolved in 75 ml dichloromethane and extracted 3 times with 10% aqueous HCl and once with water. Na 2 SO 4 was added to the organic layer and stirred for 30 minutes. The solids were filtered off and the solution was transferred to a 250-ml round-bottomed flask. The solvents were removed by rotary evaporation to yield a dark red oil that was dried overnight at room temperature under vacuum.
  • the resulting semi-solid comprised the product (higher R f ) and a reaction by-product, as seen by TLC.
  • This material was purified by silica gel chromatography using 20% dichloromethane/hexanes as eluent. Pure fractions were combined and the solvent was removed by rotary evaporation. After drying under vacuum overnight, the product was obtained as a dark red powder in 57% yield.
  • UV-Vis analysis of the product at a concentration of 5 ⁇ 10 ⁇ 5 M in THF showed a ⁇ max at 450 nm, 478 nm and 511 nm.
  • UV-Vis analysis of the product using HPLC with the product dissolved in 5% dichloromethane/hexanes showed a ⁇ max at 446 nm, 474 nm and 507 nm.
  • UV-Vis analysis of the 4-ethynyltoluene product at a concentration of 5 ⁇ 10 ⁇ 5 M in THF showed a ⁇ max at 451 nm, 479 nm and 513 nm.
  • UV-Vis analysis of the product using HPLC with the product dissolved in 5% dichloromethane/hexanes showed a ⁇ max at 447 nm, 475 nm and 508 nm.
  • UV-Vis analysis of the 1-ethynyl-4-methoxybenzene product at a concentration of 5 ⁇ 10 ⁇ 5 M in THF showed a ⁇ max at 451 nm, 480 nm and 515 nm.
  • UV-Vis analysis of the product using HPLC with the product dissolved in 5% dichloromethane/hexanes showed a ⁇ max at 447 nm, 476 nm and 510 nm.
  • the dyes prepared above were characterized spectroscopically. Commercially available dyes rubrene (2 formulations tested) and BPEN were also characterized for comparison purposes.
  • the ⁇ max for the dyes in THF solvent was determined using a Hewlett-Packard 8452A photodiode array spectrophotometer. The absorption behavior observed in THF closely approximates the absorption behavior achieved in a standard holographic formulation.
  • a 500 ⁇ m layer of photo-polymerizable medium comprising MeOPEN has better recording sensitivity compared to a medium comprising a sensitizing dye of prior art.
  • a photo-polymerizable medium for holographic recording comprising a monofunctional naphthacene dye of the present invention for sensitization of Rhodorsil 2074 (Iodoium salt Photo Acid Generator (PAG) with borate anion available from Rhodia Corporation, Inc.) at 532 nm was prepared and compared to a medium comprising BPEN, commercially available from Aldrich Chemical, for sensitizing said PAG in a formulation for a media thickness of 500 microns.
  • Rhodorsil 2074 Iodoium salt Photo Acid Generator (PAG) with borate anion available from Rhodia Corporation, Inc.
  • Rhodorsil was added to this solution in an amount 6% w/w of the final recording medium and this mixture was stirred at room temperature for 30 minutes to form a uniform solution. To this solution was added a polyfunctional monomer of Structure Formula (VII) and the resulting mixture was stirred for 1 hour to yield a uniform and homogenous solution.
  • the two formulations were coated so as to be sandwiched between two glass slides in a manner that provided for the final thickness of the recording material to be 500 microns.
  • the kinetics and extent of photopolymerization exhibited by the two holographic recording materials were obtained by calorimetric analysis using a Perkin-Elmer DSC-7 Differential Scanning Calorimetry (see Waldman et al., J. Imaging Sci. Technol. 41, (5), pp. 497-514, (1997)) equipped with a DPS-7 photocalorimetric module and a Crystalaser, Inc. diode pumped solid state (DPSS) frequency doubled Nd:YAG laser, emitting at 532 nm, that was coupled into a multimode fiber having a 200 ⁇ m core.
  • DPSS diode pumped solid state
  • the kinetics of photopolymerization was fast, but for the formulation comprising BPEN the extent of polymermization achieved was lower indicative of being dye limited by comparison to the formulation comprising MeOPEN as the sensitizer.
  • the optical density (OD) was measured with a Perkin-Elmer Lambda9 spectrophotometer for each formulation in a 1 mm path cell.
  • the formulation comprising BPEN had a value for OD that was 25% higher than the value for the formulation comprising MeOPEN.
  • the coatings were subsequently strobe flashed with a Xe strobe lamp to provide for the OD of the coatings to be about the same at the onset of holographic recording.
  • the final OD before holographic recording was 0.11 and 0.10 for the formulations comprising MeOPEN and BPEN, respectively.
  • the intensities of the two writing beams were equal at the condition of equal semiangles about the normal, and the total incident intensity for recording was 6.45 mW/cm 2 as measured at the bisecting condition.
  • the sample was mounted onto an optically encoded motorized rotation stage, Model 495 from Newport Corporation, for rotation of ⁇ about the perpendicular to the face of the sample in the interaction plane, and this stage was mounted onto an optically encoded motorized rotation statge, 496B from Newport Corporation, for rotation of ⁇ about the vertical axis denoted as the y-axis.
  • Multiplexed co-locational plane-wave transmission holograms were recorded by combining azimuthal and planar-angle multiplexing (see method of Waldman et al., J. Imaging Sci. Technol. 41, (5), pp. 497-514, (1997)).
  • Azimuthal multiplexing was carried out via rotations of ⁇ about an axis perpendicular to the surface plane of the sample (i.e. z-axis at the condition of equal semiangles for the writing beams) and through the x-y center of the imaged area for a specific value of ⁇ , where ⁇ denotes the rotational position of the sample plane about the y-axis, said axis being perpendicular to the interaction plane.
  • Angle multiplexing was carried out in the standard manner by rotation of ⁇ which defines ⁇ 1 and ⁇ 2 , the external signal and reference writing beam angles, respectively, and thus the grating angle for the plane-wave holograms.
  • ⁇ were limited to the range of 0° ⁇ 180° and ⁇ was 1.5°, thus corresponding to 120 co-locational recordings, respectively, for each of the first three grating angle conditions specified by ⁇ having the value of ⁇ 16°, or ⁇ 10°, or ⁇ 4° (counterclockwise rotation) from the bisector condition for the two writing beams. Additionally, a last cycle of 23 holograms was recorded, after a total of 360 were recorded during the first three cycles, by incrementing ⁇ by 8° for ⁇ having the value +7.0° (clockwise rotation).
  • the length of the exposure times was controlled via a direct serial computer interface to a Newport mechancial shutter and a schedule was used that ramped exposure times to longer values in monotonic fashion in accordance with the monotonic decline in recording senstivity that is exhibited by the recording material.
  • Reconstruction of the 383 co-locationally multiplexed plane-wave gratings was accomplished by utilization of reading beams that corresponded to the recording beams, but with an incident irradiance, measured at normal incidence to the sample, of 4.0 mW/cm 2 .
  • Diffraction intensity data was obtained for all 383 co-locationally recorded holograms, after completion of the recording of the multiplexed holograms, using two Model 818-SL/CM photodiodes and a Model 2835-C dual channel multi-function optical meter from Newport Corporation. Apertures were placed on the face of the photodiode detectors to ensure that diffraction from only one azimuthal angle condition was detected for each Bragg angle that was interrogated.
  • the read angle was tuned to the optimum Bragg condition (i.e. value for maximum diffraction efficiency) for each ⁇ , ⁇ combination used in the multiplexing sequence by rotation of the media about the y-axis for a given value of ⁇ , and the diffraction efficiency was measured at each ⁇ angular increment of 0.005° to 0.01° for each ⁇ , ⁇ combination to obtain accurate Bragg detuning profiles for each multiplexed hologram.
  • the optimum Bragg condition i.e. value for maximum diffraction efficiency
  • the FIGURE shows recording sensitivity in cm/mJ, as determined from the measured values of diffraction efficiency, ⁇ i , of each hologram, as a function of cumulative exposure fluence in mJ/cm 2 .
  • Sensitivity in cm/mJ is calculated in the standard manner as ( ⁇ i 0.5 /I i *t i )/T, where T is thickness of the recording material, t i is the length of the recording time for the ith recording event, and I i is the intensity for the recording event.
  • the recording sensitivity for the holographic recording medium comprising a sensitizer of the present invention declined with nonlinear dependence on cumulative recording fluence from a high of about 3.5 to a value of 0.5 cm/mJ after a cumulative exposure fluence of about 100 mJ/cm 2 , whereas for the coating comprising the conventional sensitizer (BPEN) the peak value was only about 1.75 cm/mJ and it declined in nonlinear fashion to a value of about 0.25 cm/mJ at a cumulative exposure fluence of 100 mJ/cm 2 .

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US20050059543A1 (en) * 2002-12-23 2005-03-17 Aprilis Fluoroarylsulfonium photoacid generators
WO2008021208A2 (fr) * 2006-08-12 2008-02-21 Stx Aprilis, Inc. Colorants sensibilisateurs pour systèmes de production de photoacides, utilisant des longueurs d'onde courtes du spectre visible
US20080085455A1 (en) * 2006-10-10 2008-04-10 General Electric Company Methods for storing holographic data and storage media derived therefrom
US20090042105A1 (en) * 2002-12-23 2009-02-12 Dce Aprilis, Inc. Sensitizer dyes for photoacid generating systems
US20140203114A1 (en) * 2012-01-13 2014-07-24 Funai Electric Co., Ltd. Non-photosensitive siloxane coating for processing hydrophobic photoimageable nozzle plate
US20200026190A1 (en) * 2018-07-17 2020-01-23 Shin-Etsu Chemical Co., Ltd. Photosensitive resin composition, photosensitive resin coating, photosensitive dry film, and black matrix

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US7989488B2 (en) 2007-09-25 2011-08-02 General Electric Company Compositions and methods for storing holographic data
US7901839B2 (en) 2007-09-25 2011-03-08 General Electric Company Compositions and methods for storing holographic data
US20170137663A9 (en) * 2015-03-03 2017-05-18 Jsr Corporation Composition for resist underlayer film formation, resist underlayer film, and production method of patterned substrate

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US20050059543A1 (en) * 2002-12-23 2005-03-17 Aprilis Fluoroarylsulfonium photoacid generators
US20090042105A1 (en) * 2002-12-23 2009-02-12 Dce Aprilis, Inc. Sensitizer dyes for photoacid generating systems
US20090182172A1 (en) * 2002-12-23 2009-07-16 Kolb Eric S Fluoroarylsulfonium photoacid generators
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WO2008021208A2 (fr) * 2006-08-12 2008-02-21 Stx Aprilis, Inc. Colorants sensibilisateurs pour systèmes de production de photoacides, utilisant des longueurs d'onde courtes du spectre visible
WO2008021208A3 (fr) * 2006-08-12 2008-04-03 Dce Aprilis Inc Colorants sensibilisateurs pour systèmes de production de photoacides, utilisant des longueurs d'onde courtes du spectre visible
US20080085455A1 (en) * 2006-10-10 2008-04-10 General Electric Company Methods for storing holographic data and storage media derived therefrom
US20140203114A1 (en) * 2012-01-13 2014-07-24 Funai Electric Co., Ltd. Non-photosensitive siloxane coating for processing hydrophobic photoimageable nozzle plate
US20200026190A1 (en) * 2018-07-17 2020-01-23 Shin-Etsu Chemical Co., Ltd. Photosensitive resin composition, photosensitive resin coating, photosensitive dry film, and black matrix
US11693318B2 (en) * 2018-07-17 2023-07-04 Shin-Etsu Chemical Co., Ltd. Photosensitive resin composition, photosensitive resin coating, photosensitive dry film, and black matrix

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