US11747264B2 - Corrosion detection sensor, electrical apparatus including the same, and method of detecting corrosion - Google Patents

Corrosion detection sensor, electrical apparatus including the same, and method of detecting corrosion Download PDF

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US11747264B2
US11747264B2 US17/611,194 US201917611194A US11747264B2 US 11747264 B2 US11747264 B2 US 11747264B2 US 201917611194 A US201917611194 A US 201917611194A US 11747264 B2 US11747264 B2 US 11747264B2
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thin film
resistance
corrosion detection
metal thin
corrosion
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US20220307969A1 (en
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Hisakatsu Kawarai
Raizo Maeda
Tetsuo Tanaka
Osamu Mizuno
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
    • G01N17/04—Corrosion probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
    • G01N17/02—Electrochemical measuring systems for weathering, corrosion or corrosion-protection measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/20—Investigating the presence of flaws

Definitions

  • the present disclosure relates to a corrosion detection sensor, an electrical apparatus including the same, and a corrosion detection method.
  • Japanese Patent Laying-Open No. 2010-38838 discloses a deterioration diagnosis system that accurately estimates a future amount of corrosion to a conductive member.
  • the deterioration diagnosis system includes a diagnostic processor and an ambient environment database.
  • the diagnostic processor records environment data of a housing where a diagnosis target is housed (including the temperature and the humidity in the housing) and corrosion data of the diagnosis target for a predetermined period of time, and estimates a future amount of corrosion to the diagnosis target based on the recorded data.
  • the ambient environment database is stored with ambient environment data including previous temperatures and humidities outside the housing.
  • the deterioration diagnosis system disclosed in PTL 1 requires to install a device capable of determining whether or not a predetermined period of time (for example, one month, two months or three months) has elapsed. Further, as the ambient environment database, for example, weather statistics information database must be prepared (see paragraph [0008] of PTL 1). Thus, the system may become advanced and complex.
  • the present disclosure has been made in order to solve the aforementioned problems, and an object of the present disclosure is to provide a technique capable of determining the degree of progress of corrosion to an electrical apparatus caused by a corrosive gas with a simple configuration.
  • a corrosion detection sensor detects corrosion to an electrical apparatus caused by a corrosive gas.
  • the corrosion detection sensor includes a metal thin film to be corroded by the corrosive gas, a resistive element connected in series to the metal thin film, a resistance measuring unit that measures a combined resistance of the metal thin film and the resistive element, and a resistance output unit that outputs a detection result indicating that the combined resistance measured by the resistance measuring unit is greater than a predetermined reference resistance.
  • the reference resistance is determined according to a danger level indicating that the electrical apparatus is corrosively damaged by the corrosive gas.
  • the danger level is a ratio of an actual reduction amount of a film thickness of the metal thin film to a maximum reduction amount of the film thickness of the metal thin film.
  • the maximum reduction amount is an reduction amount of the film thickness of the metal thin film until the electrical apparatus is corrosively damaged when the electrical apparatus and the metal thin film are exposed to an environment containing the corrosive gas.
  • the metal thin film includes a plurality of thin films connected in parallel.
  • the materials of the plurality of thin films are the same.
  • the film thicknesses of the plurality of thin films are different from each other.
  • Each of the plurality of thin films is defined with a corresponding reference resistance.
  • the resistance output unit outputs the detection result each time when the combined resistance measured by the resistance measuring unit becomes greater than the corresponding reference resistance.
  • the metal thin film includes a plurality of thin films connected in series.
  • Each of the plurality of thin films includes a material to be corroded by the corrosive gases different from each other in type.
  • the metal thin film includes a first thin film, a second thin film, a third thin film, and a fourth thin film.
  • the first thin film and the second thin film are connected in series.
  • the third thin film and the fourth thin film are connected in series.
  • the first thin film and the second thin film are connected in parallel to the third thin film and the fourth thin film.
  • Each of the first thin film and the third thin film includes a material to be corroded by a first corrosive gas.
  • Each of the second thin film and the fourth thin film includes a material to be corroded by a second corrosive gas different from the first corrosive gas.
  • the film thickness of the first thin film and the film thickness of the third thin film are different from each other.
  • the film thickness of the second thin film and the film thickness of the fourth thin film are different from each other.
  • a first reference resistance is defined for the first thin film and the second thin film.
  • a second reference resistance is defined for the third thin film and the fourth thin film.
  • the metal thin film includes a plurality of thin films connected in parallel.
  • the materials of the plurality of thin films are different from each other.
  • Each of the plurality of thin films is defined with a corresponding reference resistance.
  • the resistance output unit outputs the detection result each time when the combined resistance measured by the resistance measuring unit becomes greater than the corresponding reference resistance.
  • the metal thin film includes a first thin film, a second thin film, and a third thin film.
  • the first thin film and the second thin film are connected in series.
  • the first thin film and the second thin film are connected in parallel to the third thin film.
  • the first thin film and the third thin film include different materials from each other to be corroded by a first corrosive gas.
  • the second thin film includes a material to be corroded by a second corrosive gas different from the first corrosive gas.
  • a first reference resistance is defined for the first thin film and the second thin film.
  • a second reference resistance is defined for the third thin film.
  • the resistance output unit outputs the detection result each time when the combined resistance measured by the resistance measuring unit becomes greater than any one of the first reference resistance and the second reference resistance.
  • the corrosion detection sensor further includes an insulating substrate.
  • the metal thin film and the resistive element are integrally disposed on the insulating substrate.
  • the corrosion detection sensor further includes an insulating substrate.
  • the metal thin film is disposed on the insulating substrate.
  • the resistive element is disposed outside the insulating substrate as a discrete component.
  • An electrical apparatus includes the corrosion detection sensor and an electrical apparatus main body.
  • corrosion to an electrical apparatus caused by a corrosive gas is detected by a corrosion detection sensor.
  • the corrosion detection sensor includes a metal thin film to be corroded by a corrosive gas and a resistive element connected in series to the metal thin film.
  • the corrosion detection method includes: a step of measuring a combined resistance of the metal thin film and the resistive element; and a step of outputting a detection result indicating that the combined resistance measured in the measuring step is greater than a predetermined reference resistance.
  • the reference resistance is determined according to a danger level indicating that the electrical apparatus is corrosively damaged by the corrosive gas.
  • FIG. 1 is a diagram illustrating an electrical apparatus equipped with a corrosion detection sensor according to a first embodiment
  • FIG. 2 is a diagram illustrating an example configuration of a sensor body according to the first embodiment
  • FIG. 3 is a perspective view illustrating an example configuration of a corrosion detection structure
  • FIG. 4 is a cross-sectional view of the corrosion detection structure taken along line IV-IV of FIG. 3 ;
  • FIG. 5 is a perspective view illustrating another example configuration of a corrosion detection structure
  • FIG. 6 is a cross-sectional view of the corrosion detection structure taken along line VI-VI of FIG. 5 ;
  • FIG. 7 is a perspective view illustrating still another example configuration of a corrosion detection structure
  • FIG. 8 is a cross-sectional view of the corrosion detection structure taken along line VIII-VIII of FIG. 7 ;
  • FIG. 9 is a flowchart illustrating a corrosion detection procedure according to the first embodiment
  • FIG. 10 is a diagram illustrating an example configuration of a sensor body according to a second embodiment
  • FIG. 11 is a flowchart illustrating a corrosion detection procedure for detecting corrosion to the sensor body illustrated in FIG. 10 ;
  • FIG. 12 is a diagram illustrating another example configuration of a sensor body according to the second embodiment.
  • FIG. 13 is a diagram illustrating still another example configuration of a sensor body according to the second embodiment.
  • FIG. 14 is a flowchart illustrating a corrosion detection procedure for detecting corrosion to the sensor body illustrated in FIG. 13 ;
  • FIG. 15 is a diagram illustrating still another example configuration of a sensor body according to the second embodiment.
  • FIG. 16 is a diagram illustrating an example configuration of a sensor body according to a third embodiment
  • FIG. 17 is a diagram illustrating another example configuration of a sensor body according to the third embodiment.
  • FIG. 18 is a diagram illustrating still another example configuration of a sensor body according to the third embodiment.
  • FIG. 19 is a view illustrating an electrical apparatus equipped with a corrosion detection sensor according to a fourth embodiment
  • FIG. 20 is a perspective view illustrating an example configuration of a corrosion detection structure according to a fourth embodiment
  • FIG. 21 is a cross-sectional view of the corrosion detection structure taken along line XXI-XXI of FIG. 20 ;
  • FIG. 22 is a diagram illustrating a configuration of a sensor body according to a second example of the fourth embodiment.
  • FIG. 23 is a diagram illustrating a configuration of a sensor body according to a third example of the fourth embodiment.
  • FIG. 24 is a diagram illustrating a configuration of a sensor body according to a fourth example of the fourth embodiment.
  • FIG. 25 is a diagram illustrating a configuration of a sensor body according to a fifth example of the fourth embodiment.
  • FIG. 26 is a diagram illustrating a configuration of a sensor body according to a sixth example of the fourth embodiment.
  • FIG. 27 is a diagram illustrating an example configuration of a sensor body according to a fifth embodiment
  • FIG. 28 is a diagram illustrating another example configuration of a sensor body according to the fifth embodiment.
  • FIG. 29 is a diagram illustrating still another example configuration of a sensor body according to the fifth embodiment.
  • FIG. 30 is a diagram illustrating still another example configuration of a sensor body according to the fifth embodiment.
  • FIG. 31 is a diagram illustrating an example configuration of a sensor body according to a sixth embodiment.
  • FIG. 32 is a diagram illustrating another example configuration of a sensor body according to the sixth embodiment.
  • FIG. 33 is a diagram illustrating a first example configuration of a sensor body according to a seventh embodiment
  • FIG. 34 is a diagram illustrating a second example configuration of a sensor body according to the seventh embodiment.
  • FIG. 35 is a diagram illustrating a third example configuration of a sensor body according to the seventh embodiment.
  • FIG. 36 is a diagram illustrating a fourth example configuration of a sensor body according to the seventh embodiment.
  • FIG. 1 is a diagram illustrating an electrical apparatus equipped with a corrosion detection sensor according to a first embodiment.
  • an electrical apparatus 900 is, for example, a power converter such as an inverter or a converter, but the electrical apparatus is not limited thereto in particular.
  • the electrical apparatus 900 is installed in a programmable logic controller (PLC), an elevator, a generator, an automobile, a railway, or the like. Under the operating environment of various applications, the electrical apparatus 900 (more specifically, an electrical apparatus main body 90 to be described later) may be corrosively damaged by a corrosive gas.
  • PLC programmable logic controller
  • the electrical apparatus 900 includes a corrosion detection sensor 101 and an electrical apparatus main body 90 .
  • the corrosion detection sensor 101 is configured to estimate the degree of progress of corrosion to the electrical apparatus body 90 .
  • the corrosion detection sensor 101 includes a sensor body 11 , a resistance measuring instrument 20 , a control unit 30 , and a notification unit 40 .
  • FIG. 2 is a diagram illustrating an example configuration of the sensor body 11 according to the first embodiment.
  • the sensor body 11 includes a corrosion detection structure 21 , a circuit board 3 , a wire 4 , and solder 5 .
  • the circuit board 3 is, for example, a printed circuit board, and is configured to support various wires and electronic components mounted thereon.
  • the wire 4 includes wires 41 and 42 .
  • Each of the wires 41 and 42 is a conductive wire disposed on the circuit board 3 .
  • the wire 41 and the wire 42 are spaced from each other.
  • the wire 41 and the wire 42 may be made of copper (Cu) or the like.
  • the corrosion detection structure 21 is connected between the wire 41 and the wire 42 , and is mounted on the wires 41 and 42 with the solder 5 interposed therebetween.
  • the corrosion detection structure 21 is configured to detect the degree of progress of corrosion to the corrosion detection sensor 101 , and estimate the degree of progress of corrosion to the electrical apparatus main body 90 based on the degree of progress of corrosion to the corrosion detection sensor 101 .
  • the configuration of the corrosion detection structure 21 will be described later.
  • the resistance measuring instrument 20 measures a resistance of the sensor body 11 , and outputs the measurement result to the control unit 30 .
  • the electrical apparatus body 90 applies a predetermined voltage between both ends of the sensor body 11 (i.e., between the wire 41 and the wire 42 ).
  • the resistance measuring instrument 20 includes, for example, a voltmeter 201 and an ammeter 202 .
  • the voltmeter 201 measures a voltage applied between both ends of the sensor body 11 , and outputs the measurement result to the control unit 30 .
  • the ammeter 202 measures an electrical current flowing through the sensor body 11 , and outputs the measurement result to the control unit 30 .
  • the voltage may be applied between both ends of the sensor body 11 by a power source (such as a compact battery) independent of the electrical apparatus main body 90 .
  • the resistance measuring instrument 20 corresponds to the “resistance measuring unit” according to the present disclosure.
  • the control unit 30 includes, for example, a microprocessor, and controls the notification unit 40 based on the measurement result of the resistance of the sensor body 11 measured by the resistance measuring instrument 20 , More specifically, when the resistance measured by the resistance measuring instrument 20 becomes greater than a predetermined reference resistance REF, the control unit 30 controls the notification unit 40 to notify the user of the result.
  • the reference resistance REF is determined in advance based on the danger level of the corrosive damage to the electrical apparatus main body 90 caused by a corrosive gas. The method of setting the reference resistance REF and the danger level will be described in detail later.
  • the control unit 30 is not an essential component of the corrosion detection sensor 101 .
  • the corrosion detection sensor 101 may include a circuit (such as a comparator circuit) to compare the resistance measured by the resistance measuring instrument 20 with the reference resistance REF.
  • the notification unit 40 includes a liquid crystal display, an LED (Light Emitting Diode) indicator, and the like, and notifies the user that the resistance measured by the resistance measuring instrument 20 is greater than the reference resistance REF.
  • LED Light Emitting Diode
  • the notification unit 40 is an example of the “resistance output unit” according to the present disclosure.
  • the “resistance output unit” according to the present disclosure is not limited to outputting a measurement result of the resistance measured by the resistance measuring instrument 20 (or a detection result indicating that the measured resistance is greater than the reference resistance REF) to a user, and may be configured to output the measurement result to an electronic device.
  • the control unit 30 is a comparator circuit or the like
  • the “resistance output unit” according to the present disclosure may output the comparison result between the resistance measured by the resistance measuring instrument 20 and the reference resistance REF as a voltage signal level (i.e., as a H (high) level or a L (low) level).
  • FIG. 3 is a perspective view illustrating an example configuration of the corrosion detection structure 21 .
  • FIG. 4 is a cross-sectional view of the corrosion detection structure 21 taken along line IV-IV in FIG. 3 .
  • the corrosion detection structure 21 includes an insulating substrate 6 , an electrode pair 7 , a metal thin film 8 , and a resistor 9 .
  • the insulating substrate 6 is, for example, an insulating substrate having a cuboid shape.
  • the insulating substrate 6 may be made of, for example, aluminum oxide (Al 2 O 3 ) or glass (SiO 2 or the like).
  • the electrode pair 7 includes a pair of electrodes, that is, a first electrode 71 and a second electrode 72 .
  • the first electrode 71 and the second electrode 72 are disposed on opposite side surfaces of the cuboid body of the insulating substrate 6 .
  • Each of the first electrode 71 and the second electrode 72 is a conductive thin film, and may be formed by, for example, tin (Sn) plating.
  • the first electrode 71 is electrically connected to the metal thin film 8
  • the second electrode 72 is electrically connected to the resistor 9 .
  • the metal thin film 8 is a thin film made of metal and disposed on the insulating substrate 6 .
  • the width and the length of the metal thin film 8 are significantly larger than the thickness (film thickness) of the metal thin film 8 .
  • the film thickness of the metal thin film 8 is 3 ⁇ m to 12 ⁇ m
  • the width of the metal thin film 8 is 0.8 mm
  • the length of the metal thin film 8 is 1.6 mm.
  • the metal thin film 8 is corroded by the corrosive gas.
  • the metal thin film 8 may be made of silver (Ag) or copper. These materials are typical metals used in an electrical apparatus, and are sensitive to major corrosive gases, whereby are suitable as materials for quantitatively evaluating the corrosiveness of an environment where the electrical apparatus 900 is installed.
  • the corrosive gas is a collective term of sulfur-based gas, chlorine-based gas, and nitrogen oxide.
  • the sulfur-based gas includes hydrogen sulfide (H 2 S), sulfur dioxide (SO 2 ), sublimed sulfur (S 8 ), and the like.
  • the chlorine-based gas includes chlorine gas (Cl 2 ).
  • the nitrogen oxide (NO x ) includes, for example, nitrogen dioxide (NO 2 ).
  • the material of the metal thin film 8 is silver, it is sensitive to sublimed sulfur and chlorine gas.
  • copper is sensitive to hydrogen sulfide, sulfur dioxide and nitrogen dioxide.
  • the resistor 9 is disposed on the insulating substrate 6 and connected in series to the metal thin film 8 .
  • the resistor 9 is resistant to the corrosive gas.
  • the resistor 9 may be made of a semiconductor oxide (for example, ruthenium oxide (RuO 2 )).
  • the resistor 9 may be made of a particular metal such as tin.
  • the resistance value of the resistor 9 is preferably set higher than the resistance value of the metal thin film 8 .
  • the resistor 9 corresponds to the “resistive element” according to the present disclosure.
  • FIGS. 3 and 4 it is illustrated that the film thickness of the metal thin film 8 is equal to the film thickness of the resistor 9 , it is merely a schematic illustration and is not an essential condition.
  • the configuration illustrated in FIGS. 3 and 4 is merely an example configuration of the corrosion detection structure, and the other configurations such as those illustrated in FIGS. 5 to 8 may be employed.
  • FIG. 5 is a perspective view illustrating another example configuration of a corrosion detection structure.
  • FIG. 6 is a cross-sectional view of a corrosion detection structure 22 taken along line VI-VI in FIG. 5 .
  • the resistor 9 in the corrosion detection structure 22 , the resistor 9 , the metal thin film 8 , and the resistor 9 are connected in series in this order between the first electrode 71 and the second electrode 72 .
  • FIG. 7 is a perspective view illustrating still another example configuration of a corrosion detection structure.
  • FIG. 8 is a cross-sectional view of a corrosion detection structure 23 taken along line VIII-VIII in FIG. 7 .
  • the metal thin film 8 , the resistor 9 , and the metal thin film 8 are connected in series in this order between the first electrode 71 and the second electrode 72 .
  • the number of the metal thin films 8 and the number of the resistive elements 9 provided in the corrosion detection structure may be one or more. Further, the connection order of the metal thin film 8 and the resistor 9 is not particularly limited.
  • the description will be carried out by using the corrosion detection structure 21 (see FIGS. 3 and 4 ) as a representative example, and it should be noted that the corrosion detection structure 21 may be appropriately replaced with the corrosion detection structure 22 or the corrosion detection structure 23 .
  • the “danger level” is used as a parameter for adjusting a timing to notify the user.
  • a method of setting the danger level will be described hereinafter.
  • the electrical apparatus 900 equipped with the corrosion detection sensor 101 is exposed to an environment containing the corrosive gas so as to determine in advance an reduction amount of the film thickness of the metal thin film 8 until the electrical apparatus main body 90 is corrosively damaged.
  • the reduction amount thus determined is referred to as the “maximum reduction amount”. More specifically, the initial film thickness of the metal thin film 8 is set to be sufficiently large (such as 20 ⁇ m). Then, the film thickness of the metal thin film 8 at a time when the electrical apparatus main body 90 is corrosively damaged (or at a time immediately before the time when the electrical apparatus main body 90 is corrosively damaged) is measured.
  • the ratio of the reduction amount of the film thickness of the metal thin film 8 caused by the corrosive gas under actual operating conditions to the maximum reduction amount is defined as the “danger level” (see the following expression (1)).
  • the danger level the actual reduction amount of the film thickness of the metal thin film 8/the maximum reduction amount ⁇ 100%
  • FIG. 9 is a flowchart illustrating a corrosion detection procedure according to the first embodiment.
  • the procedure illustrated in the flowchart of FIG. 9 and FIGS. 11 and 14 to be described later is called from a main routine (not shown) and executed by the control unit 30 every time when a predetermined period has elapsed.
  • each step (hereinafter it will be abbreviated as “S”) is implemented by the control unit 30 via software processing, and it may be implemented by an electronic circuit provided in the control unit 30 via hardware processing.
  • the control unit 30 controls the resistance measuring instrument 20 to measure a resistance between both ends of the sensor body 11 .
  • the resistance measured by the resistance measuring instrument 20 is a combined resistance of the resistance of the insulating substrate 6 , the resistance of the metal thin film 8 , the resistance of the resistor 9 , and the resistance of the electrode pair 7 , and will be referred to as the “combined resistance X” hereinafter.
  • the control unit 30 compares the combined resistance X measured in S 11 with the reference resistance REF.
  • the reference resistance REF may be set to a value which is slightly greater than the combined resistance X before corroded by the corrosive gas by a small amount (for example, by an amount equal to several percent of the combined resistance X before corrosion).
  • the control unit 30 If the combined resistance X is equal to or smaller than the reference resistance REF (NO in S 12 ), the control unit 30 skips the subsequent step in S 13 and returns the procedure to the main routine. Then, a series of steps illustrated in FIG. 9 are executed again after the predetermined period has elapsed. On the other hand, if the combined resistance X is greater than the reference resistance REF (YES in S 12 ), the control unit 30 proceeds the procedure to S 13 .
  • the control unit 30 controls the notification unit 40 to notify that the danger level has reached a predetermined value (for example 25% as described above).
  • a predetermined value for example 25% as described above.
  • the notification unit 40 is an LED indicator
  • the notification unit 40 does not operate until the danger level reaches 25%, and when the danger level reaches 25%, the notification unit 40 notifies the user by emitting red light indicating that the danger level has reached 25%.
  • the notification mode of the danger level to the user is not limited.
  • the notification unit 40 when the notification unit 40 is a liquid crystal display, it may display a numerical value indicating the danger level (such as a numerical value of 25%).
  • the notification unit 40 when the notification unit 40 is a buzzer, a speaker or the like, it may notify an increase of the danger level by sound.
  • the electrical apparatus 900 (an inverter in the present example) is exposed to an environment where the corrosion to the metal thin film 8 is accelerated. More specifically, in the first example of the first embodiment, an exposure test was performed on the electrical apparatus 900 in an environment having a temperature of 75° C. and containing sublimed sulfur. As the metal thin film 8 , the silver thin film having a film thickness of 3 ⁇ m as described above was used.
  • the combined resistance X before the start of the exposure test (hereinafter also referred to as “initial combined resistance X0”) was 1000 k ⁇
  • the reference resistance REF may be set to 1010 k ⁇ which is 1% greater than the initial combined resistance X0.
  • a copper thin film having a film thickness of 3 ⁇ m was used as the metal thin film 8 provided in the corrosion detection structure 21 .
  • the maximum reduction amount of the copper thin film was 12 ⁇ m.
  • the initial combined resistance X0 of the sensor body 11 was 1000 k ⁇ .
  • the electrical apparatus 900 equipped with the corrosion detection sensor 101 was exposed to an environment of 40° C./95% RH/(3 ppm H 2 S+10 ppm NO 2 ). Thus, the combined resistance X became greater than 1010 k ⁇ after 1.2 days from the start of the exposure test.
  • the metal thin film 8 the copper thin film having a film thickness of 3 ⁇ m
  • the corrosion detection structure 21 it is possible to determine the degree of progress of corrosion to the electrical apparatus 900 caused by the corrosive gas with a very simple configuration. By setting the danger level to a desired value of less than 100%, it is possible to notify the user of the degree of progress of corrosion to the electrical apparatus 900 before the electrical apparatus main body 90 suffers from a corrosive damage, which makes it possible for the user to take necessary countermeasures such as repair or replacement of the electrical apparatus main body 90 .
  • the overall configuration of the electrical apparatus according to the second embodiment is the same as the overall configuration of the electrical apparatus 900 (see FIG. 1 ) according to the first embodiment except that the corrosion detection sensor is different.
  • the configuration of the corrosion detection sensor according to the second embodiment is the same as the configuration of the corrosion detection sensor 101 (see FIG. 1 ) according to the first embodiment except for the configuration of the sensor body. Therefore, for the sake of clarity of the drawings, only the sensor body is illustrated in the drawings.
  • FIG. 10 is a diagram illustrating an example configuration of a sensor body according to the second embodiment.
  • a sensor body 121 includes two corrosion detection structures 21 A and 21 B connected in parallel.
  • the configuration of each of the corrosion detection structures 21 A and 21 B is the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 A is the same as the material of the metal thin film 8 provided in the corrosion detection structure 21 B.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 A is different from the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 B.
  • the metal thin film 8 provided in the corrosion detection structure 21 A is thinner than the metal thin film 8 provided in the corrosion detection structure 21 B.
  • the resistance value of the corrosion detection structure 21 A is greater than the resistance value of the corrosion detection structure 21 B.
  • both the material of the metal thin film 8 provided in the corrosion detection structure 21 A and the material of the metal thin film 8 provided in the corrosion detection structure 21 B were silver.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 A was 3 ⁇ m.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 B was 6 ⁇ m.
  • the resistance value of the corrosion detection structure 21 A was 1000 k ⁇ , and the resistance value of the corrosion detection structure 21 B was 100 k ⁇ .
  • a first reference resistance REF1 is determined based on the resistance (the combined resistance X) between both ends of the sensor body 121 when the corrosion detection structure 21 A having a thin metal thin film 8 among the two corrosion detection structures 21 A and 21 B is corrosively disconnected while the corrosion detection structure 21 B having a thick metal thin film 8 is not disconnected.
  • a second reference resistance REF2 is determined based on the combined resistance X of the sensor body 121 when both of the two corrosion detection structures 21 A and 21 B are corrosively disconnected.
  • the second coefficient K2 is greater than the first coefficient K1 (K2>K1). Therefore, the second reference resistance REF2 is greater than the first reference resistance REF1 (REF2>REF1).
  • the initial combined resistance X0 is 91 k ⁇ .
  • the first reference resistance REF1 is set to 92 k ⁇ , which is 1.2% greater than the initial combined resistance X0.
  • the second reference resistance REF2 is set to 101 k ⁇ , which is 11% greater than the initial combined resistance X0.
  • the combined resistance X becomes greater than the first reference resistance REF1
  • the combined resistance X becomes greater than the second reference resistance REF2
  • FIG. 11 is a flowchart illustrating a corrosion detection procedure for detecting corrosion to the sensor body 121 illustrated in FIG. 10 .
  • the control unit 30 controls the resistance measuring instrument 20 to measure the resistance (combined resistance X) between both ends of sensor body 121 .
  • the control unit 30 turns off both of the two LEDs when the danger level is equal to or smaller than D1.
  • the control unit 30 turns on (or flashes) one LED and turns off the other LED (S 25 ).
  • the control unit 30 turns on both of the two LEDs (S 24 ).
  • the control unit 30 may control the LED to emit light with a color corresponding to each danger level. For example, the control unit 30 may turn off the LED when the danger level is D1 or less, and may control the LED to emit yellow light when the danger level is greater than D1 but is equal to or smaller than D2, and emit red light when the danger level is greater than D2.
  • an exposure test was performed on the electrical apparatus 900 (specifically, an inverter) equipped with a corrosion detection sensor including the sensor body 121 illustrated in FIG. 10 .
  • the initial combined resistance X0 was 91 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 21 B (the silver thin film having a film thickness of 6 ⁇ m).
  • FIG. 12 is a diagram illustrating another example configuration of a sensor body according to the second embodiment.
  • FIG. 12 shows a specific configuration (the material and film thickness of the metal thin film 8 and the initial resistance of the corrosion detection structure) of the corrosion detection structure according to a second example of the second embodiment.
  • the configuration of the sensor body 122 is substantially the same as the configuration of the sensor body 121 (see FIG. 10 ).
  • both the material of the metal thin film 8 provided in the corrosion detection structure 21 C and the material of the metal thin film 8 provided in the corrosion detection structure 21 D were copper.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 C was 3 ⁇ m.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 D was 6 ⁇ m.
  • the resistance value of the corrosion detection structure 21 C was 1000 k ⁇ , and the resistance value of the corrosion detection structure 21 D was 100 k ⁇ .
  • an exposure test was performed on the electrical apparatus 900 (an inverter) equipped with a corrosion detection sensor including the sensor body 122 .
  • the initial combined resistance X0 was 91 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 21 D (a copper thin film having a film thickness of 6 ⁇ m).
  • FIG. 13 is a diagram illustrating still another example configuration of a sensor body according to the second embodiment.
  • FIG. 13 shows a specific configuration of the corrosion detection structure according to a third example of the second embodiment.
  • the sensor body 131 includes three corrosion detection structures 21 E to 21 G connected in parallel.
  • the configuration of each of the corrosion detection structures 21 E to 21 G is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 E, the material of the metal thin film 8 provided in the corrosion detection structure 21 F, and the material of the metal thin film 8 provided in the corrosion detection structure 21 G are the same.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 E, the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 F, and the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 G are different from each other.
  • the metal thin film 8 provided in the corrosion detection structure 21 E is the thinnest, the metal thin film 8 provided in the corrosion detection structure 21 F is the second thinnest, and the metal thin film 8 provided in the corrosion detection structure 21 G is the thickest.
  • the resistance value of the corrosion detection structure 21 E is the greatest, the resistance value of the corrosion detection structure 21 F is the second greatest, and the resistance value of the corrosion detection structure 21 G is the lowest.
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 E, the material of the metal thin film 8 provided in the corrosion detection structure 21 F, and the material of the metal thin film 8 provided in the corrosion detection structure 21 G were all silver.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 G was 9 ⁇ m.
  • the resistance value of the corrosion detection structure 21 E was 1000 k ⁇
  • the resistance value of the corrosion detection structure 21 F was 100 k ⁇
  • the resistance value of the corrosion detection structure 21 G was 10 k ⁇ .
  • three reference resistances are prepared for comparing with the combined resistance X.
  • the first reference resistance REF1 is determined based on the combined resistance X between both ends of the sensor body 131 when the corrosion detection structure 21 E having the thinnest metal thin film 8 among the three corrosion detection structures 21 E to 21 G is corrosively disconnected while the other two corrosion detection structures 21 F and 21 G are not disconnected.
  • the second reference resistance REF2 is determined based on the combined resistance X between both ends of the sensor body 131 when the corrosion detection structures 21 E and 21 F are corrosively disconnected while the corrosion detection structure 21 G having the thickest metal thin film 8 is not disconnected.
  • the third reference resistance REF3 is determined based on the combined resistance X of the sensor body 131 when the three corrosion detection structures 21 E to 21 G are all corrosively disconnected.
  • the third coefficient K3, the second coefficient K2, and the first coefficient K1 increase in this order (K3>K2>K1). Therefore, the third reference resistance REF3, the second reference resistance REF2, and the first reference resistance REF1 increase in this order (REF3>REF2>REF1).
  • the initial combined resistance X0 was 9.01 k ⁇ .
  • the first reference resistance REF1 was set to 9.02 k ⁇ , which is 0.1% greater than the initial combined resistance X0.
  • the second reference resistance REF2 was set to 9.10 k ⁇ , which is 1% greater than the initial combined resistance X0.
  • the third reference resistance REF3 was set to 10.1 k ⁇ , which is 12% greater than the initial combined resistance X0.
  • the combined resistance X becomes greater than the first reference resistance REF1
  • the combined resistance X becomes greater than the second reference resistance REF2
  • the combined resistance X becomes greater than the third reference resistance REF3
  • FIG. 14 is a flowchart illustrating a corrosion detection procedure for detecting corrosion to the sensor body 131 illustrated in FIG. 13 .
  • the control unit 30 controls the resistance measuring instrument 20 to measure the resistance (combined resistance X) between both ends of sensor body 131 .
  • the notification mode of each of the danger levels D1 to D3 to the user is the same as the notification mode described with reference to FIG. 11 .
  • the notification unit 40 is an LED indicator which includes three LEDs
  • the control unit 30 turns off all of the three LEDs when the danger level is equal to or smaller than D1.
  • the danger level is greater than D1 but is equal to or smaller than D2
  • the control unit 30 turns on one LED and turns off the other two LEDs.
  • the danger level is greater than D2 but is equal to or smaller than D3
  • the control unit 30 turns on two LEDs and turns off one LED
  • the control unit 30 turns on all of the three LEDs.
  • the control unit 30 may control the LED to emit light with a color corresponding to each danger level. For example, the control unit 30 may turn off the LED when the danger level is D1 or less, and may control the LED to emit green light when the danger level is greater than D1 and D2 or less, emit yellow light when the danger level is greater than D2 and D3 or less, and emit red light when the danger level is greater than D3.
  • an exposure test was performed on the electrical apparatus 900 (an inverter) equipped with a corrosion detection sensor including a sensor body 131 illustrated in FIG. 13 .
  • the initial combined resistance X0 was 9.01 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 21 F.
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 21 G.
  • FIG. 15 is a diagram illustrating still another example configuration of a sensor body according to the second embodiment.
  • FIG. 15 shows a specific configuration of corrosion detection structures 21 H to 21 J provided in a sensor body 132 according to the fourth example of the second embodiment.
  • the configuration of the sensor body 132 is substantially the same as the configuration of the sensor body 131 (see FIG. 13 ).
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 H, the material of the metal thin film 8 provided in the corrosion detection structure 21 I, and the material of the metal thin film 8 provided in the corrosion detection structure 21 J were all copper.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 H was 3 ⁇ m.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 I was 6 ⁇ m.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 J was 9 ⁇ m.
  • the resistance value of the corrosion detection structure 21 H was 1000 k ⁇
  • the resistance value of the corrosion detection structure 21 I was 100 k ⁇
  • the resistance value of the corrosion detection structure 21 J was 10 k ⁇ .
  • the degree of progress of corrosion to the electrical apparatus caused by the corrosive gas may be determined with a simple configuration as in the first embodiment.
  • a plurality of corrosion detection structures are connected in parallel, and a plurality of danger levels are set.
  • the degree of progress of corrosion may be notified to the user in a stepwise manner in more detail.
  • FIGS. 10 , 12 , 13 and 15 it is described that two or three corrosion detection structures are connected in parallel, and it is acceptable to use four or more corrosion detection structures.
  • N is an integer of 2 or more
  • N parallel circuits are formed. As the number of N becomes greater, the configuration of the corrosion detection sensor becomes more complicated, which makes it possible to notify the degree of progress (the danger level) of corrosion to the user in more detail.
  • the electrical apparatus 900 may be installed in a variety of environments, and may be exposed to a variety of corrosive gases.
  • a configuration capable of detecting corrosion caused by a plurality of types of corrosive gases will be described.
  • FIG. 16 is a diagram illustrating an example configuration of a sensor body according to the third embodiment.
  • FIG. 16 shows a specific configuration of corrosion detection structures 21 K, 21 L provided in a sensor body 14 according to a first example of the third embodiment.
  • the sensor body 14 includes two corrosion detection structures 21 K and 21 L connected in series, and three wires 41 to 43 .
  • the configuration of each of the corrosion detection structures 21 K and 21 L is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the wire 41 and the wire 42 are spaced from each other.
  • the corrosion detection structure 21 K is connected between the wire 41 and the wire 42 , and is mounted on the wires 41 and 42 with the solder interposed therebetween.
  • the wire 42 and the wire 43 are spaced from each other.
  • the corrosion detection structure 21 L is connected between the wire 42 and the wire 43 , and is mounted on the wires 42 and 43 the solder interposed therebetween.
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 K is different from the material of the metal thin film 8 provided in the corrosion detection structure 21 L. In the present embodiment, it is essential that the corrosion detection structures 21 K and 21 L connected in series have different materials.
  • the sensitivity of the metal thin film 8 to a corrosive gas depends on the material thereof. Specifically, as described above, silver is sensitive to sublimed sulfur, chlorine gas, and the like. Copper is sensitive to hydrogen sulfide, sulfur dioxide, nitrogen dioxide, and the like. When sublimed sulfur or the like is present in an environment where the electrical apparatus 900 is installed, the corrosion rate of silver is faster than the corrosion rate of copper. Therefore, the degree of progress (the danger level) of corrosion to the electrical apparatus 900 caused by sublimed sulfur or the like may be evaluated by using a corrosion detection structure including a silver thin film. On the other hand, when hydrogen sulfide or the like is present in an environment where the electrical apparatus 900 is installed, the corrosion rate of copper is faster than the corrosion rate of silver. Therefore, the danger level of corrosion to the electrical apparatus 900 caused by hydrogen sulfide or the like may be evaluated by using a corrosion detection structure including a copper thin film.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 K is equal to the film thickness of the metal thin film 8 provided in the corrosion detection structure 21 L.
  • these film thicknesses may be different from each other.
  • the film thickness of each metal thin film 8 may be appropriately set in consideration of the corrosion rate of each material to be corroded by different type or concentration of the corrosive gas, the danger level to be notified to the user, or the like.
  • the resistance value of the corrosion detection structure 21 K is equal to the resistance value of the corrosion detection structure 21 L.
  • the corrosion detection sensor according to the present disclosure may sense an increase in resistance caused by the corrosive disconnection, it is not essential that the two resistance values are equal to each other.
  • the two resistance values are equal to each other.
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 K was silver, and the material of the metal thin film 8 provided in the corrosion detection structure 21 L was copper.
  • the resistance value of the corrosion detection structure 21 K and the resistance value of the corrosion detection structure 21 L were 1000 k ⁇ .
  • a reference resistance REF is prepared for comparing with the combined resistance X.
  • the corrosion detection procedure performed by using a corrosion detection sensor including the sensor body 14 illustrated in FIG. 16 is the same as the procedure described in the first embodiment (see the flowchart of FIG. 9 ), and the description thereof will not be repeated.
  • an exposure test was performed on the electrical apparatus 900 (an inverter) equipped with a corrosion detection sensor including the sensor body 14 illustrated in FIG. 16 .
  • the initial combined resistance X0 was 2000 k ⁇ .
  • the reference resistance REF was set to 2020 k ⁇ , which is 1% greater than the initial combined resistance X0.
  • the combined resistance X became greater than the reference resistance REF, and the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 21 K (a silver thin film having a film thickness of 3 ⁇ m).
  • FIG. 17 is a diagram illustrating an example configuration of a sensor body according to the third embodiment.
  • FIG. 17 shows a specific configuration of corrosion detection structures provided in a sensor body 15 according to a second example of the third embodiment.
  • the sensor body 15 includes four corrosion detection structures 21 M to 21 P and three wires 41 to 43 .
  • the corrosion detection structure 21 M and the corrosion detection structure 21 N are connected in series by the wire 42 .
  • the corrosion detection structure 21 O and the corrosion detection structure 21 P are connected in series by the wire 42 .
  • the corrosion detection structures 21 M and 21 N are connected in parallel to the corrosion detection structures 21 O and 21 P between the wire 41 and the wire 43 .
  • the configuration of each of the corrosion detection structures 21 M to 21 P is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the material of the metal thin film 8 (corresponding to the “first thin film” according to the present disclosure) provided in the corrosion detection structure 21 M is different from the material of the metal thin film 8 (corresponding to the “second thin film” according to the present disclosure) provided in the corrosion detection structure 21 N.
  • the material of the metal thin film 8 (corresponding to the “third thin film” according to the present disclosure) provided in the corrosion detection structure 21 O is different from the material of the metal thin film 8 (corresponding to the “fourth thin film” according to the present disclosure) provided in the corrosion detection structure 21 P.
  • the resistance value of the corrosion detection structure 21 M is equal to the resistance value of the corrosion detection structure 21 N.
  • the resistance value of the corrosion detection structure 21 O is equal to the resistance value of the corrosion detection structure 21 P.
  • the resistance value of each of the corrosion detection structures 21 M and 21 N is greater than the resistance value of each of the corrosion detection structures 21 O and 21 P.
  • the material of the metal thin film 8 provided in the corrosion detection structures 21 M and 21 O was silver, and the material of the metal thin film 8 provided in the corrosion detection structures 21 N and 21 P was copper.
  • the resistance value of each of the corrosion detection structures 21 M and 21 N was 1000 k ⁇ , and the resistance value of each of the corrosion detection structures 21 O and 21 P was 100 k ⁇ .
  • the first reference resistance REF1 and the second reference resistance REF2 are prepared for comparing with the combined resistance X.
  • the first reference resistance REF1 is determined based on the combined resistance X between both ends of the sensor body 15 when at least one of the corrosion detection structures 21 M and 21 N connected in series is corrosively disconnected.
  • the second reference resistance REF2 is determined based on the combined resistance X between both ends of the sensor body 15 when at least one of the corrosion detection structures 21 O and 21 P connected in series is corrosively disconnected.
  • the specific setting method using a coefficient is the same as the setting method in the first example (see FIG. 10 ) of the second embodiment.
  • the corrosion detection procedure performed by using a corrosion detection sensor including the sensor body 15 is the same as the procedure represented by the flowchart illustrated in FIG. 11 , and the description thereof will not be repeated.
  • an exposure test was performed on the electrical apparatus 900 (an inverter) equipped with a corrosion detection sensor including the sensor body 15 .
  • the initial combined resistance X0 was 182 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 21 O (a silver thin film having a film thickness of 6 ⁇ m).
  • FIG. 18 is a diagram illustrating still another example configuration of a sensor body according to the third embodiment.
  • FIG. 18 shows a specific configuration of corrosion detection structures provided in a sensor body 16 according to a third example of the third embodiment.
  • the sensor body 16 includes six corrosion detection structures 21 Q to 21 V and three wires 41 to 43 .
  • the corrosion detection structure 21 Q and the corrosion detection structure 21 R are connected in series by the wire 42 .
  • the corrosion detection structure 21 S and the corrosion detection structure 21 T are connected in series by the wire 42
  • the corrosion detection structure 21 U and the corrosion detection structure 21 V are connected in series by the wire 42 .
  • the corrosion detection structures 21 Q and 21 R, the corrosion detection structures 21 S and 21 T, and the corrosion detection structures 21 U and 21 V are connected in parallel between the wire 41 and the wire 43 .
  • the configuration of each of the corrosion detection structures 21 Q to 21 V is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 Q is different from the material of the metal thin film 8 provided in the corrosion detection structure 21 R.
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 S is different from the material of the metal thin film 8 provided in the corrosion detection structure 21 T.
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 U is different from the material of the metal thin film 8 provided in the corrosion detection structure 21 V.
  • the resistance value of the corrosion detection structure 21 Q is equal to the resistance value of the corrosion detection structure 21 R.
  • the resistance value of the corrosion detection structure 21 S is equal to the resistance value of the corrosion detection structure 21 T.
  • the resistance value of the corrosion detection structure 21 U is equal to the resistance value of the corrosion detection structure 21 V.
  • the resistance value of each of the corrosion detection structures 21 Q and 21 R is greater than the resistance value of each of the corrosion detection structures 21 S and 21 T. Further, the resistance value of each of the corrosion detection structures 21 S and 21 T is greater than the resistance value of each of the corrosion detection structures 21 U and 21 V.
  • the material of the metal thin film 8 provided in the corrosion detection structures 21 Q, 21 S and 21 U was silver, and the material of the metal thin film 8 provided in the corrosion detection structures 21 R, 21 T and 21 V was copper.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structures 21 U and 21 V was 9 ⁇ m.
  • the resistance value of each of the corrosion detection structures 21 Q and 21 R was 1000 k ⁇
  • the resistance value of each of the corrosion detection structures 21 S and 21 T was 100 k ⁇
  • the resistance value of each of the corrosion detection structures 21 U and 21 V was 10 k ⁇ .
  • the first reference resistance REF1 to the third reference resistance REF3 are prepared for comparing with the combined resistance X.
  • the first reference resistance REF1 is determined based on the combined resistance X between both ends of the sensor body 16 when at least one of the corrosion detection structures 21 Q and 21 R connected in series is corrosively disconnected.
  • the second reference resistance REF2 is determined based on the combined resistance X between both ends of the sensor body 16 when at least one of the corrosion detection structures 21 S and 21 T connected in series is corrosively disconnected.
  • the third reference resistance REF3 is determined based on the combined resistance X between both ends of the sensor body 16 when at least one of the corrosion detection structures 21 U and 21 V connected in series is corrosively disconnected.
  • the specific setting method using a coefficient is the same as the setting method in the third embodiment (see FIG. 13 ) of the second embodiment.
  • the corrosion detection procedure performed by using a corrosion detection sensor including the sensor body 16 is the same as the procedure represented by the flowchart illustrated in FIG. 14 , and the description thereof will not be repeated.
  • the degree of progress of corrosion to the electrical apparatus caused by the corrosive gas may be determined with a simple configuration as in the first embodiment and the second embodiment. Further, in the third embodiment, a plurality of corrosion detection structures different from each other in the material of the metal thin film 8 are connected in series. Since the corrosive property (corrosion rate) differs depending on the combination of the type of corrosive gas and the type of metal, it is possible to detect corrosion to the electrical apparatus 900 caused by a plurality of types of corrosive gas. Further, by combining the serial connection and the parallel connection of the corrosion detection structures, it is possible to notify the user of the degree of progress (the danger level) of corrosion to the electrical apparatus 900 in detail.
  • both the metal thin film 8 and the resistor 9 are provided inside the corrosion detection structure.
  • the configuration of the corrosion detection structure is not limited thereto.
  • the resistor 9 may be provided outside the corrosion detection structure.
  • FIG. 19 is a view illustrating an electrical apparatus equipped with a corrosion detection sensor according to a fourth embodiment.
  • an electrical apparatus 904 includes a corrosion detection sensor 104 .
  • the corrosion detection sensor 104 includes a sensor body 171 .
  • the sensor body 171 differs from the sensor body 11 (see FIG. 1 ) of the first embodiment in that the sensor body 171 includes a corrosion detection structure 24 instead of the corrosion detection structure 21 and further includes a fixed resistor 50 .
  • the other configurations of the sensor body 171 are the same as the corresponding configurations of the sensor body 11 , and the description thereof will not be repeated.
  • the configuration of the corrosion detection structure 24 for example, the configuration of the first example of the fourth embodiment to be described later may be adopted.
  • the fixed resistor 50 may be, for example, a surface-mount resistor (chip resistive element) or a lead wire resistor.
  • the fixed resistor 50 is connected in series to the corrosion detection structure 24 .
  • the fixed resistor 50 is resistant to corrosive gases.
  • the resistance value of the fixed resistor 50 is set greater than the resistance value of the metal thin film 8 (see FIGS. 20 and 21 ).
  • the fixed resistor 50 is another example of the “resistive element” according to the present disclosure.
  • FIG. 20 is a perspective view illustrating an example configuration of the corrosion detection structure 24 according to the fourth embodiment.
  • FIG. 21 is a cross-sectional view of the corrosion detection structure 24 taken along line XXI-XXI of FIG. 20 .
  • the corrosion detection structure 24 differs from the corrosion detection structures 21 to 23 (see FIGS. 3 , 5 and 7 ) of the first embodiment in that the corrosion detection structure 24 does not include the resistor 9 .
  • the metal thin film 8 is disposed on the insulating substrate 6 and is electrically connected to the first electrode 71 and the second electrode 72 . Similar to the first embodiment, the metal thin film 8 is made of metal (such as silver or copper) which will be corroded by a corrosive gas.
  • a fixed resistor 50 may be disposed outside the corrosion detection structure 24 as a discrete component. Similar to the first embodiment, in the fourth embodiment, it is possible to sense the degree of progress of corrosion to the electrical apparatus 900 caused by the corrosive gas. Since the detection method is the same as the method in the first embodiment (see FIG. 9 ), the detailed description thereof will not be repeated.
  • the material of the metal thin film 8 provided in the corrosion detection structure 24 was silver.
  • the resistance value of the fixed resistor 50 was 1000 k ⁇ .
  • two or more series circuits each of which includes the corrosion detection structure 24 and the fixed resistor 50 , may be suitably connected in series or in parallel.
  • the configuration of the sensor body in the fourth embodiment is substantially the same as the configuration of the sensor body described in the second embodiment and the third embodiment except that the fixed resistor 50 is provided outside the corrosion detection structure instead of the resistor 9 .
  • the effectiveness of the corrosion detection sensor is verified mainly based on the corresponding configuration described in the second embodiment and the third embodiment
  • FIG. 22 is a diagram illustrating the configuration of a sensor body according to a second example of the fourth embodiment.
  • a sensor body 172 is equivalent to the sensor body 121 illustrated in FIG. 10 or the sensor body 122 illustrated in FIG. 12 .
  • an, exposure test was performed on the electrical apparatus 904 (an inverter) equipped with a corrosion detection sensor including the sensor body 172 .
  • the initial combined resistance X0 was 91 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 24 B (a silver thin film having a film thickness of 6 ⁇ m).
  • FIG. 23 is a diagram illustrating the configuration of a sensor body according to a third example of the fourth embodiment.
  • a sensor body 173 is equivalent to the sensor body 131 illustrated in FIG. 13 or the sensor body 132 illustrated in FIG. 15 .
  • FIG. 24 is a diagram illustrating the configuration of a sensor body according to a fourth example of the fourth embodiment.
  • a sensor body 174 is equivalent to the sensor body 14 illustrated in FIG. 16 .
  • FIG. 25 is a diagram illustrating the configuration of a sensor body according to a fifth example of the fourth embodiment.
  • a sensor body 175 is equivalent to the sensor body 15 illustrated in FIG. 17 .
  • an exposure test was performed on the electrical apparatus 904 (an inverter) equipped with a corrosion detection sensor including the sensor body 175 .
  • the initial combined resistance X0 was 182 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 24 J (a silver thin film having a film thickness of 6 ⁇ m).
  • FIG. 26 is a diagram illustrating the configuration of a sensor body according to a sixth example of the fourth embodiment.
  • a sensor body 176 is equivalent to the sensor body 16 illustrated in FIG. 18 .
  • the electrical apparatus 904 is exposed to an environment containing sublimed sulfur so as to confirm the corrosive disconnection of the metal thin film 8 made of silver.
  • the degree of progress of corrosion to the electrical apparatus 904 caused by the corrosive gas may be determined with a simple configuration as in the first embodiment.
  • a plurality of corrosion detection structures in series it is possible to detect the corrosion to the electrical apparatus 904 caused by a plurality of types of corrosive gases.
  • a plurality of corrosion detection structures in parallel it is possible to notify the user of the degree of progress (the danger level) of corrosion to the electrical apparatus 904 in more detail.
  • the materials of the metal thin films in the plurality of corrosion detection structures are different from each other.
  • the overall configuration of the electrical apparatus according to the fifth embodiment is the same as the overall configuration of the electrical apparatus 900 according to the first embodiment (see FIG. 1 ) except that the different material of the metal thin film.
  • the material of the metal thin film may be a silver-based alloy or a copper-based alloy in addition to silver or copper.
  • additive elements in the silver-based alloy or the copper-based alloy include nickel (Ni), titanium (Ti), magnesium (Mg), aluminum (Al), tin (Sn), palladium (Pd), gold (Au), zinc (Zn), and platinum (Pt).
  • the additive element may be added in the range of 0 wt % to 30 wt % with respect to silver or copper.
  • copper may be added to a silver-based alloy in the range of 0 wt % to 30 wt %
  • silver may be added to a copper-based alloy in the range of 0 wt % to 30 wt %.
  • the silver-based alloy and the copper-based alloy may include three or more kinds of constituent elements.
  • FIG. 27 is a diagram illustrating an example configuration of a sensor body according to the fifth embodiment.
  • FIG. 27 shows a specific configuration of corrosion detection structures provided in a sensor body according to a first example of the fifth embodiment.
  • a sensor body 181 includes two corrosion detection structures 25 A and 25 B connected in parallel.
  • the configuration of each of the corrosion detection structures 25 A and 25 B is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 A is different from the material of the metal thin film 8 provided in the corrosion detection structure 25 B.
  • the maximum reduction amount of the material of the metal thin film 8 provided in the corrosion detection structure 25 A is greater than the maximum reduction amount of the material of the metal thin film 8 provided in the corrosion detection structure 25 B.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 A is equal to the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 B.
  • the resistance value of the corrosion detection structure 25 A is greater than the resistance value of the corrosion detection structure 25 B.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 A and the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 B were both 3 ⁇ m.
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 A was silver
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 B was a silver-zinc alloy (the addition amount of zinc was 0.4 wt %).
  • the maximum reduction amount of the silver-zinc alloy thin film (the addition amount of zinc was 0.4 wt %) was 9.1 ⁇ m.
  • the resistance value of the corrosion detection structure 25 A was 1000 k ⁇ , and the resistance value of the corrosion detection structure 25 B was 100 k ⁇ .
  • two reference resistances are prepared for comparing with the combined resistance X.
  • the first reference resistance REF is determined based on the resistance (combined resistance X) between both ends of the sensor body 181 when the corrosion detection structure 25 A is corrosively disconnected but the corrosion detection structure 25 B is not disconnected.
  • the second reference resistance REF2 is determined based on the combined resistance X of the sensor body 181 when both of the two corrosion detection structures 25 A and 25 B are corrosively disconnected.
  • the second coefficient K2 is greater than the first coefficient K1 (K2>K1). Therefore, the second reference resistance REF2 is greater than the first reference resistance REF1 (REF2>REF1).
  • the initial combined resistance X0 is 91 k ⁇ .
  • the first reference resistance REF1 is set to 92 k ⁇ , which is 1.2% greater than the initial combined resistance X0.
  • the second reference resistance REF2 is set to 101 k ⁇ , which is a value 11% greater than the initial combined resistance X0.
  • the combined resistance X becomes greater than the first reference resistance REF1
  • the combined resistance X becomes greater than the second reference resistance REF2
  • the flowchart of the corrosion detection procedure in the fifth embodiment is the same as the flowchart of the corrosion detection procedure in the second embodiment (see FIG. 11 ), and therefore, the detailed description thereof will not be repeated.
  • an exposure test was performed on the electrical apparatus 900 (an inverter) equipped with a corrosion detection sensor including the sensor body 181 illustrated in FIG. 27 .
  • the initial combined resistance X0 was 91 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 25 B (a silver-zinc alloy thin film having a film thickness of 3 ⁇ m).
  • FIG. 28 is a diagram illustrating another example configuration of a sensor body according to the fifth embodiment.
  • FIG. 28 shows a specific configuration of corrosion detection structures provided in a sensor body according to a second example of the fifth embodiment.
  • the configuration of the sensor body 182 is substantially the same as the configuration of the sensor body 181 (see FIG. 27 ).
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 C and the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 D were both 3 ⁇ m.
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 C was a copper-zinc alloy (the addition amount of zinc was 30 wt %).
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 D was copper.
  • the resistance value of the corrosion detection structure 25 C was 1000 k ⁇ , and the resistance value of the corrosion detection structure 25 D was 100 k ⁇ .
  • FIG. 29 is a diagram illustrating still another example configuration of a sensor body according to the fifth embodiment.
  • FIG. 29 shows a specific configuration of corrosion detection structures provided in a sensor body according to a third example of the fifth embodiment.
  • a sensor body 183 includes three corrosion detection structures 25 E to 25 G connected in parallel.
  • the configuration of each of the corrosion detection structures 25 E to 25 G is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 E, the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 F, and the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 G are equal to each other.
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 E, the material of the metal thin film 8 provided in the corrosion detection structure 25 F, and the material of the metal thin film 8 provided in the corrosion detection structure 25 G are different from each other.
  • the maximum reduction amount of the metal thin film 8 provided in the corrosion detection structure 25 E is the greatest, the maximum reduction amount of the metal thin film 8 provided in the corrosion detection structure 25 F is the second greatest, and the maximum reduction amount of the metal thin film 8 provided in the corrosion detection structure 25 G is the smallest.
  • the resistance value of the corrosion detection structure 25 E is the greatest, the resistance value of the corrosion detection structure 25 F is the second greatest, and the resistance value of the corrosion detection structure 25 G is the lowest.
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 E, the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 F, and the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 G were all 3 ⁇ m.
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 E was silver.
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 F was a silver-zinc alloy (the addition amount of zinc was 0.4 wt %).
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 G was a silver-aluminum alloy (the addition amount of aluminum was 0.4 wt %).
  • the resistance value of the corrosion detection structure 25 E was 1000 k ⁇
  • the resistance value of the corrosion detection structure 25 F was 100 k ⁇
  • the resistance value of the corrosion detection structure 25 G was 10 k ⁇ .
  • the first reference resistance REF1 is determined based on the combined resistance X between both ends of the sensor body 183 when the corrosion detection structure 25 E whose maximum reduction amount is the largest among the three corrosion detection structures 25 E to 25 G is corrosively disconnected but the remaining two corrosion detection structures 25 F and 25 G are not disconnected.
  • the second reference resistance REF2 is determined based on the combined resistance X between both ends of the sensor body 183 when the corrosion detection structures 25 E and 25 F are corrosively disconnected but the corrosion detection structure 25 G whose maximum reduction amount is the smallest is not disconnected.
  • the third reference resistance REF3 is determined based on the combined resistance X of the sensor body 183 when all of the three corrosion detection structures 25 E to 25 G are corrosively disconnected.
  • the third coefficient K3, the second coefficient K2, and the first coefficient K1 increase in this order (K3>K2>K1). Therefore, the third reference resistance REF3, the second reference resistance REF2, and the first reference resistance REF1 increase in this order (REF3>REF2>REF1).
  • the initial combined resistance X0 was 9.01 k ⁇ .
  • the first reference resistance REF1 was set to 9.02 k ⁇ , which is 0.1% greater than the initial combined resistance X0.
  • the second reference resistance REF2 was set to 9.10 k ⁇ , which is a value 1% greater than the initial combined resistance X0.
  • the third reference resistance REF3 was set to 10.1 k ⁇ , which is a value 12% greater than the initial combined resistance X0. In this case, if the combined resistance X becomes greater than the first reference resistance REF1, it means that the silver metal thin film 8 provided in the corrosion detection structure 25 E was corrosively disconnected, which indicates that the danger level has reached 25%.
  • the combined resistance X becomes greater than the second reference resistance REF2
  • the combined resistance X becomes greater than the third reference resistance REF3
  • the flowchart of the corrosion detection procedure in the third example of the fifth embodiment is the same as the flowchart of the corrosion detection procedure in the third example of the second embodiment (see FIG. 14 ), and therefore, the detailed description thereof will not be repeated.
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 25 F (a silver-zinc alloy thin film having a film thickness of 3 ⁇ m).
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 25 G (a silver-aluminum alloy thin film having a film thickness of 3 ⁇ m).
  • FIG. 30 is a diagram illustrating still another example configuration of a sensor body according to the fifth embodiment.
  • FIG. 30 shows a specific configuration of corrosion detection structures provided in the sensor body according to the fourth example of the fifth embodiment.
  • the configuration of the sensor body 184 is substantially the same as the configuration of the sensor body 183 (see FIG. 29 ).
  • the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 H, the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 I, and the film thickness of the metal thin film 8 provided in the corrosion detection structure 25 J were all 3 ⁇ m.
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 H was a copper-tin alloy (the addition amount of tin was 6 wt %).
  • the material of the metal thin film 8 provided in the corrosion detection structure 25 I was a copper-zinc alloy (the addition amount of zinc was 30 wt %).
  • the material of the metal thin film 8 provided in the corrosion detection structure 21 J was copper.
  • the resistance value of the corrosion detection structure 25 H was 1000 k ⁇
  • the resistance value of the corrosion detection structure 25 I was 100 k ⁇
  • the resistance value of the corrosion detection structure 25 J was 10 k ⁇ .
  • the degree of progress of corrosion to the electrical apparatus caused by the corrosive gas may be determined with a simple configuration as in the second embodiment.
  • a plurality of corrosion detection structures are connected in parallel, and a plurality of danger levels are set.
  • N is an integer of 2 or more
  • N parallel circuits are formed. As the number of N becomes greater, the configuration of the corrosion detection sensor becomes more complicated, which makes it possible to notify the degree of progress (the danger level) of corrosion to the user in more detail.
  • Silver or a silver-based alloy is sensitive to sublimed sulfur, chlorine gas, and the like.
  • Copper or a copper-based alloy is sensitive to hydrogen sulfide, sulfur dioxide, nitrogen dioxide, and the like.
  • sublimed sulfur or the like is present in an environment where the electrical apparatus is installed, the corrosion rate of silver or a silver-based alloy is faster than the corrosion rate of copper or a copper-based alloy. Therefore, the degree of progress (the danger level) of corrosion to the electrical apparatus caused by sublimed sulfur or the like may be evaluated by using a corrosion detection structure including a silver thin film or a silver-based alloy thin film.
  • the corrosion rate of copper or a copper-based alloy is faster than the corrosion rate of silver or a silver-based alloy. Therefore, the danger level of corrosion to the electrical apparatus caused by hydrogen sulfide or the like may be evaluated by using a corrosion detection structure including a copper thin film or the copper-based alloy thin film.
  • FIG. 31 is a diagram illustrating an example configuration of a sensor body according to a sixth embodiment.
  • FIG. 31 shows a specific configuration of corrosion detection structures provided in the sensor body according to a first example of the sixth embodiment.
  • a sensor body 191 includes three corrosion detection structures 26 A to 26 C and three wires 41 to 43 .
  • the corrosion detection structure 26 A and the corrosion detection structure 26 B are connected in series by the wire 42 .
  • the corrosion detection structures 26 A and 26 B are connected in parallel to the corrosion detection structure 26 C between the wire 41 and the wire 43 .
  • the configuration of each of the corrosion detection structures 26 A to 26 C is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 A or the corrosion detection structure 26 B is different from the material of the metal thin film 8 provided in the corrosion detection structure 26 C.
  • the resistance value of each of the corrosion detection structures 26 A and 26 B is greater than the resistance value of the corrosion detection structure 26 C.
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 A was silver
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 B was copper
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 C was a silver-zinc alloy (the addition amount of zinc was 0.4 wt %).
  • the resistance value of each of the corrosion detection structures 26 A and 26 B was 1000 k ⁇
  • the resistance value of the corrosion detection structure 26 C was 200 k ⁇ .
  • the first reference resistance REF1 and the second reference resistance REF2 are prepared for comparing with the combined resistance X.
  • the first reference resistance REF1 is determined based on the combined resistance X between both ends of the sensor body 191 when at least one of the corrosion detection structures 26 A and 26 B connected in series is corrosively disconnected.
  • the second reference resistance REF2 is determined based on the combined resistance X between both ends of the sensor body 191 when the corrosion detection structure 26 C is corrosively disconnected.
  • a specific setting method using a coefficient is the same as the setting method in the first example (see FIG. 10 ) of the second embodiment.
  • the corrosion detection procedure performed by using the corrosion detection sensor including the sensor body 191 is the same as the procedure represented by the flowchart illustrated in FIG. 11 , and the description thereof will not be repeated.
  • an exposure test was performed on the electrical apparatus 900 (an inverter) equipped with a corrosion detection sensor including the sensor body 191 .
  • the initial combined resistance X0 was 182 k ⁇ .
  • the increase in resistance was confirmed to be caused by the corrosive disconnection of the corrosion detection structure 26 C (a silver-zinc alloy thin film having a film thickness of 3 ⁇ m).
  • FIG. 32 is a diagram illustrating another example configuration of a sensor body according to the sixth embodiment.
  • FIG. 32 shows a specific configuration of corrosion detection structures provided in the sensor body according to a second example of the sixth embodiment.
  • the sensor body 191 includes four corrosion detection structures 26 D to 26 G and three wires 41 to 43 .
  • the corrosion detection structure 26 D and the corrosion detection structure 26 E are connected in series by the wire 42 .
  • the corrosion detection structures 26 D and 26 E, the corrosion detection structure 26 F, and the corrosion detection structure 26 G are connected in parallel between the wire 41 and the wire 43 .
  • the configuration of each of the corrosion detection structures 26 D to 26 G is substantially the same as the configuration of the corrosion detection structure 21 illustrated in FIGS. 3 and 4 .
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 D or the corrosion detection structure 26 E, the material of the metal thin film 8 provided in the corrosion detection structure 26 F, and the material of the metal thin film 8 provided in the corrosion detection structure 26 G are different from each other.
  • the resistance value of the corrosion detection structure 26 D is equal to the resistance value of the corrosion detection structure 26 E.
  • the resistance value of each of the corrosion detection structures 26 D and 26 E is greater than the resistance value of the corrosion detection structure 26 F.
  • the resistance value of the corrosion detection structure 26 F is greater than the resistance value of the corrosion detection structure 26 G.
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 D was silver
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 E was copper
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 F was a silver-zinc alloy (the addition amount of zinc was 0.4 wt %)
  • the material of the metal thin film 8 provided in the corrosion detection structure 26 G was a silver-aluminum alloy (the addition amount of aluminum was 0.4 wt %).
  • the film thickness of the metal thin film 8 provided in each of the corrosion detection structures 26 D to 26 G was 3 ⁇ m.
  • the resistance value of each of the corrosion detection structures 26 D and 26 E was 1000 k ⁇
  • the resistance value of the corrosion detection structure 26 F was 200 k ⁇
  • the resistance value of the corrosion detection structure 26 G was 20 k ⁇ .
  • the first reference resistance REF1 to the third reference resistance REF3 are prepared for comparing with the combined resistance X.
  • the first reference resistance REF1 is determined based on the combined resistance X between both ends of the sensor body 192 when at least one of the corrosion detection structures 26 D and 26 E connected in series is corrosively disconnected.
  • the second reference resistance REF2 is determined based on the combined resistance X between both ends of the sensor body 192 when the corrosion detection structure 26 F is corrosively disconnected.
  • the third reference resistance REF3 is determined based on the combined resistance X between both ends of the sensor body 192 when the corrosion detection structure 26 G is corrosively disconnected.
  • a specific setting method using a coefficient is the same as the setting method in the third example (see FIG. 13 ) of the second embodiment.
  • the corrosion detection procedure performed by using a corrosion detection sensor including the sensor body 192 is the same as the procedure represented by the flowchart illustrated in FIG. 14 , and the description thereof will not be repeated.
  • an exposure test was performed on the electrical apparatus 900 (an inverter) equipped with a corrosion detection sensor including the sensor body 192 .
  • the initial combined resistance X0 was 18 k ⁇ .
  • the degree of progress of corrosion to the electrical apparatus 900 caused by the corrosive gas may be determined with a simple configuration as in the first to fifth embodiments.
  • the resistor 9 may be provided outside the corrosion detection structure.
  • the configuration of the electrical apparatus including the corrosion detection sensor according to the seventh embodiment is substantially the same as the configuration of the electrical apparatus 904 including the corrosion detection sensor according to the fourth embodiment (see FIG. 19 ).
  • the configuration of the corrosion detection structure in the seventh embodiment is substantially the same as the configuration of the corrosion detection structure 24 in the fourth embodiment (see FIG. 20 ).
  • the metal thin film to be corroded by the corrosive gas is made of a silver-based alloy, a copper-based alloy, or the like in addition to silver and copper.
  • FIG. 33 is a diagram illustrating a configuration of a sensor body according to a first example of a seventh embodiment.
  • a sensor body 193 is equivalent to the sensor body 181 illustrated in FIG. 27 or the sensor body 182 illustrated in FIG. 28 .
  • FIG. 34 is a diagram illustrating a configuration of a sensor body according to a second example of the seventh embodiment.
  • a sensor body 194 is equivalent to the sensor body 183 illustrated in FIG. 29 or the sensor body 184 illustrated in FIG. 30 .
  • FIG. 35 is a diagram illustrating a configuration of a sensor body according to f of third example the seventh embodiment.
  • a sensor body 195 is equivalent to the sensor body 191 illustrated in FIG. 31 .
  • FIG. 36 is a diagram illustrating a configuration of a sensor body according to a fourth example of the seventh embodiment.
  • a sensor body 196 is equivalent to the sensor body 192 illustrated in FIG. 32 .
  • the electrical apparatus 904 is exposed to an environment containing sublimed sulfur to confirm the corrosive disconnection of the metal thin film 8 made of silver or a silver-based alloy.
  • the degree of progress of corrosion to the electrical apparatus 904 caused by a corrosive gas may be determined with a simple configuration as in the fourth embodiment.
  • the degree of progress of corrosion to the electrical apparatus 904 caused by a corrosive gas may be determined with a simple configuration as in the fourth embodiment.
  • by connecting a plurality of corrosion detection structures in series it is possible to detect the corrosion to the electrical apparatus 904 caused by a plurality of types of corrosive gases.
  • a plurality of corrosion detection structures in parallel it is possible to notify the user of the degree of progress (the danger level) of corrosion to the electrical apparatus 904 in more detail.

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