US11674875B2 - Fluid medium monitoring apparatus - Google Patents

Fluid medium monitoring apparatus Download PDF

Info

Publication number
US11674875B2
US11674875B2 US17/269,162 US202017269162A US11674875B2 US 11674875 B2 US11674875 B2 US 11674875B2 US 202017269162 A US202017269162 A US 202017269162A US 11674875 B2 US11674875 B2 US 11674875B2
Authority
US
United States
Prior art keywords
ultraviolet rays
fluid medium
light
unit
collimator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US17/269,162
Other languages
English (en)
Other versions
US20220057314A1 (en
Inventor
Hyun Kook PARK
Chang Ho Choi
Seong Hwan Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zeus Enp Co Ltd
Zeus Co Ltd
Original Assignee
Zeus Enp Co Ltd
Zeus Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeus Enp Co Ltd, Zeus Co Ltd filed Critical Zeus Enp Co Ltd
Assigned to ZEUS CO., LTD., ZEUS ENP CO., LTD. reassignment ZEUS CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHOI, CHANG HO, PARK, HYUN KOOK, PARK, SEONG HWAN
Publication of US20220057314A1 publication Critical patent/US20220057314A1/en
Application granted granted Critical
Publication of US11674875B2 publication Critical patent/US11674875B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring
    • G01N15/075—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0053—Investigating dispersion of solids in liquids, e.g. trouble
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N2015/0693—Investigating concentration of particle suspensions by optical means, e.g. by integrated nephelometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G01N2021/054—Bubble trap; Debubbling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/3103—Atomic absorption analysis
    • G01N2021/3122—Atomic absorption analysis using a broad source with a monochromator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3129—Determining multicomponents by multiwavelength light
    • G01N2021/3137—Determining multicomponents by multiwavelength light with selection of wavelengths after the sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring

Definitions

  • the present invention relates to a fluid medium monitoring apparatus, and more particularly, to a fluid medium monitoring apparatus capable of accurately monitoring a state of a fluid medium under usage conditions of the fluid medium.
  • etching processes are performed in a semiconductor manufacturing process such as a semiconductor wafer manufacturing process, a solar cell manufacturing process, or the like.
  • a high-temperature etching solution such as a phosphoric acid solution is used for etching a silicon nitride film.
  • a concentration of the eluate in the etching solution increases as an etching process of the semiconductor wafer proceeds.
  • the concentration of the eluate in the etching solution is increased by a certain concentration or higher, the etching solution is replaced.
  • etching solution Since it is difficult to perform microanalysis on a concentration of silicon in an etching solution at a high temperature, some of the etching solution is collected and cooled to room temperature. In order to increase detection sensitivity of the cooled etching solution, a concentration of the etching solution is detected after performing chemical treatment on the etching solution multiple times.
  • the eluate is easily extracted from the etching solution when the high-temperature etching solution is lowered to room temperature, it may be difficult to accurately measure the concentration of the eluate in the etching solution.
  • the present invention is directed to providing a fluid medium monitoring apparatus capable of accurately monitoring a state of a fluid medium under usage conditions of the fluid medium.
  • One aspect of the present invention provides a fluid medium monitoring apparatus including a light source unit configured to apply light, a first collimator unit configured to collimate light applied from the light source unit, a flow cell unit in which a fluid medium flows and light is allowed to absorb a wavelength of the fluid medium while proceeding in a moving direction of the fluid medium, and a light detection unit configured to detect a wavelength of the light passing through the flow cell unit.
  • the light detection unit may include a second collimator unit configured to collect the light passing through the flow cell unit, and a light detection unit configured to detect a wavelength of light passing through the second collimator unit.
  • the light source unit may include a light-emitting lamp configured to apply light, and a convex lens unit configured to collect the light applied from the light-emitting lamp.
  • the first collimator unit may make angles of pieces of light, which has a predetermined angle incident from the light source unit, parallel.
  • the fluid medium monitoring apparatus may further include a noise reduction unit installed on the light detection unit to cool the light detection unit.
  • the fluid medium monitoring apparatus may further include a slit unit configured to diffract the light while the light applied from the second collimator unit passes therethrough, and a wavelength selection unit disposed between the slit unit and the light detection unit to split light incident from the slit unit to the light detection unit in a spectrum manner.
  • the fluid medium monitoring apparatus may further include a detection wavelength adjuster configured to adjust a wavelength of light applied to the light detection unit by rotating the wavelength selection unit.
  • the fluid medium monitoring apparatus may further include a wavelength selection unit disposed between the light source unit and the first collimator unit to split light incident from the light source unit in a spectrum manner.
  • the fluid medium monitoring apparatus may further include a first optical fiber unit connected to the light source unit and the first collimator unit to form an optical path so that the light applied from the light source unit is applied to the first collimator unit.
  • the fluid medium monitoring apparatus may further include a second optical fiber unit configured to form an optical path so that light applied through the flow cell unit is applied to the light detection unit.
  • a high-temperature fluid medium is introduced into the flow cell unit and light is applied to the fluid medium, it is not necessary to chemically treat the fluid medium multiple times in order to measure the concentration of the fluid medium and increase detection sensitivity of the fluid medium under conditions in which the fluid medium is used in an actual semiconductor process.
  • FIG. 1 is a configuration diagram illustrating a fluid medium monitoring apparatus according to a first embodiment of the present invention.
  • FIG. 3 is a configuration diagram illustrating a fluid medium monitoring apparatus according to a third embodiment of the present invention.
  • FIG. 1 is a configuration diagram illustrating the fluid medium monitoring apparatus according to the first embodiment of the present invention.
  • the fluid medium monitoring apparatus includes a light source unit 10 , a first collimator unit 20 , a flow cell unit 30 , and light detection units 40 and 50 .
  • the light source unit 10 applies light.
  • the light source unit 10 includes a light-emitting lamp 11 which applies light and a convex lens unit 13 which collects the light applied from the light-emitting lamp 11 .
  • a light-emitting lamp 11 an ultraviolet lamp which applies ultraviolet rays (UV) in a wavelength range of 150 to 450 nm may be applied.
  • UV ultraviolet rays
  • the first collimator unit 20 collimates the light applied from the light source unit 10 in a parallel manner. Since the first collimator unit 20 collimates the light in the parallel manner, the light is incident on the flow cell unit 30 in the parallel manner. Of course, the first collimator unit 20 may apply the light applied from the light source unit 10 to be slightly refracted or apply the light so that wavelengths of the light cross, according to optical design.
  • the first collimator unit 20 applies pieces of light having a predetermined angle passing through the convex lens unit 13 to be parallel to an inside of the flow cell unit 30 .
  • the flow cell unit 30 allows a fluid medium to flow and allows light to absorb a wavelength of the fluid medium while proceeding in a moving direction of the fluid medium.
  • a flow chamber (not illustrated) is formed inside the flow cell unit 30 so that the fluid medium flows. Since the light proceeds in the flow cell unit 30 in the moving direction of the fluid medium, scattering and refraction of the light due to bubbles or eluates when the light passes through the fluid medium may be minimized so that light loss may be reduced. Further, wavelengths of eluates contained in the fluid medium may be smoothly absorbed while the light passes through the fluid medium, and thus light detection efficiency may be improved.
  • the fluid medium may be an etching solution which is used in a semiconductor process when a semiconductor wafer, a solar cell, or the like is manufactured.
  • the etching solution may include a phosphoric acid solution of 150 to 200° C.
  • the flow cell unit 30 may be formed of a quartz material, a Pyrex glass, or a Teflon material that may prevent heat deformation and corrosion by a high-temperature etching solution.
  • An inlet pipe 31 is connected to a lower portion of the flow cell unit 30 so that the fluid medium is introduced, and a discharge pipe 33 is formed on an upper portion of the flow cell unit 30 so that the flowing fluid medium is discharged from the flow cell unit 30 .
  • the light proceeds in a longitudinal direction of the flow cell unit 30 . Since the inlet pipe 31 is connected to the lower portion of the flow cell unit 30 and the discharge pipe 33 is connected to the upper portion of the flow cell unit 30 , the fluid medium flows from a lower side to an upper side of the flow cell unit 30 .
  • the light detection units 40 and 50 include a second collimator unit 40 which collects the light passing through the flow cell unit 30 , and the light detection unit 50 which detects the wavelength of the light applied from the second collimator unit 40 .
  • the second collimator unit 40 collects parallel light applied from the flow cell unit 30 . Since the parallel light is collected while passing through the second collimator unit 40 , detection efficiency in the light detection unit 50 may be improved.
  • the fluid medium monitoring apparatus further includes a noise reduction unit 51 which is installed on the light detection unit 50 to cool the light detection unit 50 .
  • the noise reduction unit 51 may be a cooling element or cooling device which reduces noise of the light detection unit 50 by cooling the light detection unit 50 . Since the noise reduction unit 51 suppresses overheating of the light detection unit 50 , noise of detection signals may be reduced.
  • the fluid medium monitoring apparatus further includes a slit unit 53 which diffracts the light while the parallel light applied from the second collimator unit 40 passes therethrough, and a wavelength selection unit 55 which is disposed between the slit unit 53 and the light detection unit 50 and splits light incident from the slit unit 53 in a spectrum manner.
  • a diffraction grating which splits light into a plurality of wavelengths in the spectrum manner may be applied. The diffraction grating splits light into a plurality of wavelengths in an almost parallel manner and the spectrum manner.
  • the light detection unit 50 Since the slit unit 53 and the wavelength selection unit 55 split the light into the plurality of wavelengths in the spectrum manner, the light detection unit 50 detects the plurality of wavelengths in a short period of about 5 to 10 msec. Therefore, a scan time of the light detection unit 50 is significantly reduced.
  • the fluid medium monitoring apparatus further includes a first optical fiber unit 61 which is connected to the light source unit 10 and the first collimator unit 20 and forms an optical path so that the light applied from the light source unit 10 is applied to the first collimator unit 20 .
  • the first collimator unit 20 and the first optical fiber unit 61 are connected by a first optical fiber coupler 62 .
  • the light source unit 10 may be installed at various positions regardless of the installation position of the flow cell unit 30 , a degree of freedom of installation of the light source unit 10 and the flow cell unit 30 may be increased.
  • the light source unit 10 may be installed to be spaced apart from the flow cell unit 30 .
  • a high-temperature fluid medium of about 150 to 200° C. passes through the flow cell unit 30 so that the flow cell unit 30 is heated by the high-temperature fluid medium. Since the light source unit 10 is installed to be spaced apart from the flow cell unit 30 by the first optical fiber unit 61 , the light source unit 10 may be prevented from being overheated due to the heat of the flow cell unit 30 . Further, in order to cool or thermally insulate the light source unit 10 , it is not necessary to install a separate cooling device or thermal insulating member.
  • the fluid medium monitoring apparatus further includes a second optical fiber unit 65 which forms an optical path so that the parallel light applied through the flow cell unit 30 is applied to the light detection unit 50 .
  • the second optical fiber unit 65 is connected to the second collimator unit 40 on which the light is incident through the flow cell unit 30 and to the light detection unit 50 .
  • the second optical fiber unit 65 is connected to the light detection unit 50 by a second optical fiber coupler 66 .
  • the second optical fiber unit 65 may be connected to the flow cell unit 30 and the light detection unit 50 .
  • the light detection unit 50 may be installed at various positions regardless of the installation position of the flow cell unit 30 , a degree of freedom of installation of the light detection unit 50 and the flow cell unit 30 may be increased.
  • the light detection unit 50 may be provided to be spaced apart from the flow cell unit 30 .
  • a high-temperature fluid medium of about 150 to 200° C. passes through the flow cell unit 30 so that the flow cell unit 30 is heated by the high-temperature fluid medium. Since the light detection unit 50 is installed to be spaced apart from the flow cell unit 30 by the second optical fiber unit 65 , the light detection unit 50 may be prevented from being overheated due to the heat of the flow cell unit 30 . Further, in order to cool or thermally insulate the light detection unit 50 , it is not necessary to install a separate cooling device or thermal insulating member.
  • first optical fiber unit 61 and the second optical fiber unit 65 may be installed or both of the first optical fiber unit 61 and the second optical fiber unit 65 may be installed.
  • first optical fiber unit 61 and the second optical fiber unit 65 are installed on both sides of the flow cell unit 30 , the flow cell unit 30 , the light source unit 10 , and the light detection unit 50 do not need to be arranged in a line, and thus a degree of freedom of installation of the fluid medium monitoring apparatus may be increased.
  • the first optical fiber unit 61 and the second optical fiber unit 65 may not be installed.
  • the light source unit 10 and the flow cell unit 30 may be connected by the first collimator unit 20
  • the light detection unit 50 and the flow cell unit 30 may be connected by the second collimator unit 40 .
  • a fluid medium monitoring apparatus according to a second embodiment of the present invention will be described.
  • components are substantially the same as those of the first embodiment except for a light detection unit and a detection wavelength adjuster. Therefore, the same reference numerals are assigned to the same components as the first embodiment and descriptions thereof will be omitted.
  • FIG. 2 is a configuration diagram illustrating the fluid medium monitoring apparatus according to the second embodiment of the present invention.
  • the fluid medium monitoring apparatus further includes a detection wavelength adjuster 57 which adjusts a wavelength of light applied to a light detection unit 50 by rotating a wavelength selection unit 55 .
  • a detection wavelength adjuster 57 As the detection wavelength adjuster 57 , a step motor capable of rotating a wavelength selection unit 55 by one pitch is provided. Pieces of light having a specific unit wavelength is applied one by one to the light detection unit 50 each time the wavelength selection unit 55 is rotated by one pitch. A pitch angle of the detection wavelength adjuster 57 may be appropriately adjusted according to a range of the unit wavelength.
  • the light detection unit 50 detects and combines the plurality of unit wavelengths one by one. Therefore, it is possible to monitor a state such as a concentration of the fluid medium or the like by combining the plurality of unit wavelengths.
  • a photomultiplier tube capable of sequentially detecting the unit wavelengths of the light applied from the wavelength selection unit 55 may be applied.
  • the unit wavelengths are sequentially read, and thus detection sensitivity may be significantly increased. Further, since it is necessary to combine the plurality of unit wavelengths, an analysis speed may be increased.
  • a fluid medium monitoring apparatus according to a third embodiment of the present invention will be described.
  • components are substantially the same as those of the first embodiment except for a wavelength selection unit. Therefore, the same reference numerals are assigned to the same components as the first embodiment and descriptions thereof will be omitted.
  • FIG. 3 is a configuration diagram illustrating the fluid medium monitoring apparatus according to the third embodiment of the present invention.
  • the fluid medium monitoring apparatus further includes a wavelength selection unit 55 which is disposed between a light source unit 10 and a first collimator unit 20 and splits light incident from the light source unit 10 in a spectrum manner.
  • the wavelength selection unit 55 is disposed between a first optical fiber coupler 62 and a convex lens unit 13 of the light source unit 10 .
  • the wavelength selection unit 55 selects one unit wavelength from among a plurality of unit wavelengths of light applied from the light source unit 10 and transmits the one unit wavelength to a first optical fiber unit 61 .
  • the light having the one unit wavelength reaches the first collimator unit 20 , a flow cell unit 30 , and a second collimator unit 40 through the first optical fiber unit 61 and reaches a light detection unit 50 through a second optical fiber unit 65 .
  • the one unit wavelength described above is defined as a wavelength that absorbs a wavelength of one type of eluate among a plurality of eluates contained in a fluid medium.
  • the light having the one unit wavelength is applied to the flow cell unit 30 and the fluid medium absorbs the wavelength of one type of eluate, a background phenomenon in which spectrum disturbance occurs between the wavelengths when a plurality of types of eluates absorb the plurality of wavelengths may be prevented. Therefore, only a specific eluate contained in the fluid medium absorbs the unit wavelength, and thus the concentration of the fluid medium and the like may be detected more accurately.
  • a second convex lens 56 is disposed between the light detection unit 50 and a second optical fiber coupler 66 .
  • the second convex lens 56 collects light applied from the second optical fiber coupler 66 to the light detection unit 50 .
  • a detection element a PMT or avalanche photodiode (APD) with improved sensitivity may be applied.
US17/269,162 2018-09-20 2020-03-20 Fluid medium monitoring apparatus Active US11674875B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20180113038 2018-09-20
KR1020190055827A KR20200034563A (ko) 2018-09-20 2019-05-13 유동매체 모니터링장치
KR10-2019-0055827 2019-05-13
PCT/KR2020/003822 WO2020230995A1 (ko) 2018-09-20 2020-03-20 유동매체 모니터링장치

Publications (2)

Publication Number Publication Date
US20220057314A1 US20220057314A1 (en) 2022-02-24
US11674875B2 true US11674875B2 (en) 2023-06-13

Family

ID=70002293

Family Applications (2)

Application Number Title Priority Date Filing Date
US17/269,162 Active US11674875B2 (en) 2018-09-20 2020-03-20 Fluid medium monitoring apparatus
US17/268,158 Pending US20220349814A1 (en) 2018-09-20 2020-03-20 Flow cell device

Family Applications After (1)

Application Number Title Priority Date Filing Date
US17/268,158 Pending US20220349814A1 (en) 2018-09-20 2020-03-20 Flow cell device

Country Status (5)

Country Link
US (2) US11674875B2 (ko)
KR (4) KR20200034563A (ko)
CN (2) CN112654852A (ko)
TW (2) TWI784250B (ko)
WO (2) WO2020230996A1 (ko)

Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4368047A (en) * 1981-04-27 1983-01-11 University Of Utah Research Foundation Process for conducting fluorescence immunoassays without added labels and employing attenuated internal reflection
US4771629A (en) * 1985-09-17 1988-09-20 Westinghouse Electric Corp. System for chemical analysis
CN1339610A (zh) 2001-10-09 2002-03-13 张添 基因芯片时间分辨荧光检测方法及检测装置
CN1717581A (zh) 2002-10-28 2006-01-04 华盛顿大学 波长可调谐表面等离子体激元谐振传感器
WO2007062800A1 (en) 2005-11-29 2007-06-07 Ge Healthcare Bio-Sciences Ab Methods and apparatus for measuring the concentration of a substance in a solution
US20070146704A1 (en) * 2005-12-22 2007-06-28 Palo Alto Research Center Incorporated Sensing photon energies emanating from channels or moving objects
US20100009458A1 (en) * 2008-07-14 2010-01-14 Fujifilm Corporation Detection method, detection apparatus, and sample cell and kit for detection
US20110284768A1 (en) * 2009-01-30 2011-11-24 Satoshi Takahashi Fluorescence analyzing device and fluorescence analyzing method
US20120262711A1 (en) * 2011-04-14 2012-10-18 Shimadzu Corporation Spectrometric measurement device and program
TW201307620A (zh) 2011-07-28 2013-02-16 Dongjin Semichem Co Ltd 銅膜蝕刻工序控制方法及銅膜蝕刻液組合物的再生方法
US20140070101A1 (en) * 2011-04-11 2014-03-13 Panasonic Corporation Gas component detection device
KR20140118864A (ko) 2013-03-29 2014-10-08 시스멕스 가부시키가이샤 입자측정장치
CN104280355A (zh) * 2014-10-24 2015-01-14 中国科学院上海光学精密机械研究所 氨气和二氧化硫气体浓度的检测装置和检测方法
WO2016171042A1 (ja) 2015-04-21 2016-10-27 国立大学法人香川大学 分光測定装置
KR101785859B1 (ko) 2016-08-04 2017-10-16 중앙대학교 산학협력단 구리이온 검출용 형광실리콘 나노입자, 이의 제조방법, 및 이를 이용한 검출센서
KR20170134742A (ko) 2015-08-18 2017-12-06 토쿠시마 대학 농도 측정 장치
CN206906244U (zh) * 2017-04-25 2018-01-19 南京舜唯科技工程有限公司 基于近红外光谱的磨煤机气体分析仪
KR20180027331A (ko) 2016-09-06 2018-03-14 (주)링크옵틱스 유체포커싱채널부를 구비하는 세포 계수 및 세포 크기 측정시스템
US20180364152A1 (en) * 2017-06-20 2018-12-20 Ci Systems (Israel) Ltd. Flow cell and optical system for analyzing fluid
US20190195784A1 (en) * 2017-12-27 2019-06-27 Fuji Electric Co., Ltd. Gas analyzing apparatus
CN113358604A (zh) * 2021-06-02 2021-09-07 天津大学 一种斜入射式光谱型反射差分测量装置及方法
CN113659220A (zh) * 2021-08-05 2021-11-16 中国民航大学 基于腔衰荡光谱技术的锂电池热失控早期预警系统及方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1128361A (en) * 1964-10-08 1968-09-25 Ceskoslovenska Akademie Ved A through-flow measuring cell for photometers
DE1598269A1 (de) * 1965-05-27 1971-12-23 Ceskoslovenska Akademie Ved Kuevette fuer Durchflussphotometer
US3514210A (en) * 1968-01-15 1970-05-26 Jiri Hrdina Device for programmed drawing off of gas bubbles from a measuring cell separator and the liquid from the extinction cell space
JP2622567B2 (ja) * 1986-11-26 1997-06-18 リシュブルーク・ジョン 高感度光学的イメージ装置
JPH02212742A (ja) * 1989-02-13 1990-08-23 Kowa Co 液中微粒子測定装置
US5242586A (en) * 1990-12-17 1993-09-07 Biotage Inc. Column protection system for liquid chromatography system
KR100196198B1 (ko) * 1995-09-30 1999-06-15 가시마 쥰이치로 코리오리 유량계
JPH10300671A (ja) * 1997-04-22 1998-11-13 Yokogawa Electric Corp 微粒子計測装置
US6082205A (en) * 1998-02-06 2000-07-04 Ohio State University System and device for determining particle characteristics
US6854522B2 (en) * 2002-09-23 2005-02-15 Halliburton Energy Services, Inc. Annular isolators for expandable tubulars in wellbores
US20060182664A1 (en) * 2005-02-14 2006-08-17 Peck Bill J Flow cell devices, systems and methods of using the same
CN100419406C (zh) * 2006-03-31 2008-09-17 洪陵成 流动光度分析流通池
JP4964647B2 (ja) * 2007-03-30 2012-07-04 ジーエルサイエンス株式会社 蛍光検出装置
JP2009002806A (ja) * 2007-06-21 2009-01-08 Hitachi Ltd 化学発光計測装置
US20090139311A1 (en) * 2007-10-05 2009-06-04 Applied Biosystems Inc. Biological Analysis Systems, Devices, and Methods
JP2009162592A (ja) * 2007-12-28 2009-07-23 Nippon Applied Technology Inc 微弱発光分析装置
JP2010217031A (ja) * 2009-03-17 2010-09-30 Shimadzu Corp 光学式ガス分析システム及びガスフローセル
CN101634748A (zh) * 2009-08-27 2010-01-27 上海交通大学 微弱发光及荧光光学成像装置及其成像方法
DE102009059684A1 (de) * 2009-12-19 2011-06-22 J. Eberspächer GmbH & Co. KG, 73730 Abgasbehandlungseinrichtung
KR101213059B1 (ko) * 2011-02-23 2012-12-18 광운대학교 산학협력단 태양전지 측정시스템과 그 제어방법
US8817259B2 (en) * 2011-03-25 2014-08-26 Parker-Hannifin Corporation Optical sensors for monitoring biopharmaceutical solutions in single-use containers
CN202994641U (zh) * 2012-11-13 2013-06-12 北京瑞升特科技有限公司 一种连续流动分析用气泡脱离装置
CN104103546A (zh) * 2013-04-02 2014-10-15 盛美半导体设备（上海）有限公司 化学液供应与回收装置
CN112326557A (zh) * 2015-03-24 2021-02-05 伊鲁米那股份有限公司 对样品成像用于生物或化学分析的方法、载体组件和系统
WO2016170681A1 (ja) * 2015-04-24 2016-10-27 株式会社島津製作所 光学測定装置
JP6103008B2 (ja) * 2015-09-09 2017-03-29 ソニー株式会社 非線形ラマン分光装置、顕微分光装置及び顕微分光イメージング装置
CN205235481U (zh) * 2015-12-24 2016-05-18 福建中烟工业有限责任公司 显色池气泡脱除装置以及连续流动分析设备
RU172097U1 (ru) * 2016-04-27 2017-06-28 Общество с ограниченной ответственностью "Производственно-технологический центр "УралАлмазИнвест" Фотометрическое устройство распознавания многокомпонентных примесей нефтепродуктов в воде
CN107339522A (zh) * 2016-05-03 2017-11-10 扬中市宏彬冷暖设备有限公司 一种抗冻弹性管道
KR102025667B1 (ko) * 2016-06-17 2019-09-30 주식회사 제우스 솔더링장치
JP6688514B2 (ja) * 2016-12-27 2020-04-28 国立研究開発法人産業技術総合研究所 光学測定用フローセル
US10677767B2 (en) * 2018-06-12 2020-06-09 Vuv Analytics, Inc. Vacuum ultraviolet absorption spectroscopy system and method
CN208651968U (zh) * 2018-07-23 2019-03-26 临沂红阳管业有限公司 城镇供热预制直埋蒸汽保温管

Patent Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4368047A (en) * 1981-04-27 1983-01-11 University Of Utah Research Foundation Process for conducting fluorescence immunoassays without added labels and employing attenuated internal reflection
US4771629A (en) * 1985-09-17 1988-09-20 Westinghouse Electric Corp. System for chemical analysis
CN1339610A (zh) 2001-10-09 2002-03-13 张添 基因芯片时间分辨荧光检测方法及检测装置
CN1717581A (zh) 2002-10-28 2006-01-04 华盛顿大学 波长可调谐表面等离子体激元谐振传感器
WO2007062800A1 (en) 2005-11-29 2007-06-07 Ge Healthcare Bio-Sciences Ab Methods and apparatus for measuring the concentration of a substance in a solution
US20070146704A1 (en) * 2005-12-22 2007-06-28 Palo Alto Research Center Incorporated Sensing photon energies emanating from channels or moving objects
US20100009458A1 (en) * 2008-07-14 2010-01-14 Fujifilm Corporation Detection method, detection apparatus, and sample cell and kit for detection
US20110284768A1 (en) * 2009-01-30 2011-11-24 Satoshi Takahashi Fluorescence analyzing device and fluorescence analyzing method
US20140070101A1 (en) * 2011-04-11 2014-03-13 Panasonic Corporation Gas component detection device
US20120262711A1 (en) * 2011-04-14 2012-10-18 Shimadzu Corporation Spectrometric measurement device and program
TW201307620A (zh) 2011-07-28 2013-02-16 Dongjin Semichem Co Ltd 銅膜蝕刻工序控制方法及銅膜蝕刻液組合物的再生方法
KR20140118864A (ko) 2013-03-29 2014-10-08 시스멕스 가부시키가이샤 입자측정장치
CN104280355A (zh) * 2014-10-24 2015-01-14 中国科学院上海光学精密机械研究所 氨气和二氧化硫气体浓度的检测装置和检测方法
WO2016171042A1 (ja) 2015-04-21 2016-10-27 国立大学法人香川大学 分光測定装置
KR20170134742A (ko) 2015-08-18 2017-12-06 토쿠시마 대학 농도 측정 장치
KR101785859B1 (ko) 2016-08-04 2017-10-16 중앙대학교 산학협력단 구리이온 검출용 형광실리콘 나노입자, 이의 제조방법, 및 이를 이용한 검출센서
KR20180027331A (ko) 2016-09-06 2018-03-14 (주)링크옵틱스 유체포커싱채널부를 구비하는 세포 계수 및 세포 크기 측정시스템
CN206906244U (zh) * 2017-04-25 2018-01-19 南京舜唯科技工程有限公司 基于近红外光谱的磨煤机气体分析仪
US20180364152A1 (en) * 2017-06-20 2018-12-20 Ci Systems (Israel) Ltd. Flow cell and optical system for analyzing fluid
US20190195784A1 (en) * 2017-12-27 2019-06-27 Fuji Electric Co., Ltd. Gas analyzing apparatus
CN113358604A (zh) * 2021-06-02 2021-09-07 天津大学 一种斜入射式光谱型反射差分测量装置及方法
CN113659220A (zh) * 2021-08-05 2021-11-16 中国民航大学 基于腔衰荡光谱技术的锂电池热失控早期预警系统及方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
International Search Report, with English translation, for International Application No. PCT/KR2020/003822, dated Jun. 17, 2020.
Written Opinion for International Application No. PCT/KR2020/003822, dated Jun. 17, 2020.

Also Published As

Publication number Publication date
US20220349814A1 (en) 2022-11-03
TWI784250B (zh) 2022-11-21
KR102580490B1 (ko) 2023-09-21
CN112654853A (zh) 2021-04-13
CN112654852A (zh) 2021-04-13
KR20210093917A (ko) 2021-07-28
KR102531525B1 (ko) 2023-05-15
KR20210074392A (ko) 2021-06-21
TW202107062A (zh) 2021-02-16
US20220057314A1 (en) 2022-02-24
KR20200034564A (ko) 2020-03-31
TWI741537B (zh) 2021-10-01
KR20200034563A (ko) 2020-03-31
WO2020230995A1 (ko) 2020-11-19
TW202109005A (zh) 2021-03-01
WO2020230996A1 (ko) 2020-11-19

Similar Documents

Publication Publication Date Title
KR101393143B1 (ko) 기판 처리 장치
CN104204739B (zh) 分光测定装置
CA2728203C (en) Thermal cycling reaction block and continuous real-time monitoring apparatus using the same
US7532313B2 (en) Fluorescence detector and liquid chromatograph having the fluorescence detector
JP6286183B2 (ja) 分析装置
US20220244226A1 (en) Method and Apparatus for Identifying Volatile Substances Using Resonator-Amplified Raman Spectroscopy Under Reduced Pressure
US11674875B2 (en) Fluid medium monitoring apparatus
WO2015111443A1 (ja) 核酸分析装置
CN108955889B (zh) 用于低温透射测温的探测器
US10175171B2 (en) Compact multi-UV-LED probe system and methods of use thereof
JP2002296178A (ja) フローセル検出器
JP2010043983A (ja) 光学測定装置
KR20120116778A (ko) 바이오 진단장치
JP2003098091A (ja) 高温高圧溶液反応の高速紫外一可視吸光光度法用反応追跡分析装置
CN110049818B (zh) 用于光学激发反应容器阵列中的多种分析物并用于采集来自分析物的荧光的方法和装置
KR102555556B1 (ko) 흡광도계
KR20240016690A (ko) 광 도파관을 갖는 ndir 센서 및 이를 포함하는 toc 측정 시스템
KR20240016689A (ko) 다중채널을 갖는 ndir 센서 및 이를 포함하는 toc 측정 시스템
JP2016217731A (ja) ガス分析装置
JP2009162556A (ja) 反応処理装置及び反応処理方法

Legal Events

Date Code Title Description
AS Assignment

Owner name: ZEUS ENP CO., LTD., KOREA, REPUBLIC OF

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PARK, HYUN KOOK;CHOI, CHANG HO;PARK, SEONG HWAN;REEL/FRAME:055299/0098

Effective date: 20210208

Owner name: ZEUS CO., LTD., KOREA, REPUBLIC OF

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PARK, HYUN KOOK;CHOI, CHANG HO;PARK, SEONG HWAN;REEL/FRAME:055299/0098

Effective date: 20210208

FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO SMALL (ORIGINAL EVENT CODE: SMAL); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE AFTER FINAL ACTION FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: ADVISORY ACTION MAILED

STCF Information on status: patent grant

Free format text: PATENTED CASE