TWI872140B - 光學測定裝置、波長校正方法及標準試料 - Google Patents

光學測定裝置、波長校正方法及標準試料 Download PDF

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Publication number
TWI872140B
TWI872140B TW109136443A TW109136443A TWI872140B TW I872140 B TWI872140 B TW I872140B TW 109136443 A TW109136443 A TW 109136443A TW 109136443 A TW109136443 A TW 109136443A TW I872140 B TWI872140 B TW I872140B
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Taiwan
Prior art keywords
interference spectrum
wavelength
light
theoretical
measured
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TW109136443A
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English (en)
Chinese (zh)
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TW202138747A (zh
Inventor
新家俊輝
井上展幸
大川内真
岡本宗大
川口史朗
水口勉
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日商大塚電子股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/283—Investigating the spectrum computer-interfaced
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2859—Peak detecting in spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G01J2003/323—Comparing line:background

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
TW109136443A 2019-10-25 2020-10-21 光學測定裝置、波長校正方法及標準試料 TWI872140B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019194654A JP7382629B2 (ja) 2019-10-25 2019-10-25 光学測定装置および波長校正方法
JP2019-194654 2019-10-25

Publications (2)

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TW202138747A TW202138747A (zh) 2021-10-16
TWI872140B true TWI872140B (zh) 2025-02-11

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JP (1) JP7382629B2 (enrdf_load_stackoverflow)
CN (1) CN112710393B (enrdf_load_stackoverflow)
TW (1) TWI872140B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115372270A (zh) * 2021-05-20 2022-11-22 智谱科技有限公司 光谱整合校正方法及多光谱光谱仪
CN113514425B (zh) * 2021-09-14 2021-12-14 苏州高视半导体技术有限公司 一种平面等厚介质折射率的校准装置及校准方法
CN117990211A (zh) * 2022-11-02 2024-05-07 华为技术有限公司 光谱仪和电子设备
CN117249773B (zh) * 2023-11-08 2024-02-06 南通元激发科技有限公司 一种近退相干厚膜的膜层厚度及其折射率的测量方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10122824A (ja) * 1996-10-24 1998-05-15 Dainippon Screen Mfg Co Ltd 膜厚測定方法
JP2011117777A (ja) * 2009-12-01 2011-06-16 Canon Inc 校正手段、校正方法、及びプログラム
JP2019020419A (ja) * 2017-07-20 2019-02-07 Ｊｆｅテクノリサーチ株式会社 膜厚計算方法、膜厚計算プログラム及び膜厚計算装置
TW201923305A (zh) * 2017-10-25 2019-06-16 德商聯合半導體股份有限公司 藉由干涉距離測量手段來偵測物體表面輪廓之組件
CN110062952A (zh) * 2016-06-11 2019-07-26 科磊股份有限公司 同时多重角度光谱
US20190302083A1 (en) * 2018-03-27 2019-10-03 Gybe, LLC Hyperspectral sensing system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001356050A (ja) 2000-06-14 2001-12-26 Toray Ind Inc 分光方法及びフィルムの製造方法
EP1998155A1 (de) 2007-05-30 2008-12-03 Roche Diagnostics GmbH Verfahren zur Wellenlängenkalibration eines Spektrometers
JP5328437B2 (ja) * 2009-03-25 2013-10-30 キヤノン株式会社 透過波面測定方法、屈折率分布測定方法、光学素子の製造方法、及び透過波面測定装置
JP5947502B2 (ja) 2011-08-11 2016-07-06 キヤノン株式会社 分光測色器、および画像形成装置
JP5721586B2 (ja) * 2011-08-12 2015-05-20 大塚電子株式会社 光学特性測定装置および光学特性測定方法
JP2014228281A (ja) 2013-05-17 2014-12-08 コニカミノルタ株式会社 フーリエ変換型分光計およびフーリエ変換型分光計の校正方法
JP6285597B1 (ja) * 2017-06-05 2018-02-28 大塚電子株式会社 光学測定装置および光学測定方法
JP6402273B1 (ja) * 2018-05-18 2018-10-10 大塚電子株式会社 光学測定装置及び光学測定方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10122824A (ja) * 1996-10-24 1998-05-15 Dainippon Screen Mfg Co Ltd 膜厚測定方法
JP2011117777A (ja) * 2009-12-01 2011-06-16 Canon Inc 校正手段、校正方法、及びプログラム
CN110062952A (zh) * 2016-06-11 2019-07-26 科磊股份有限公司 同时多重角度光谱
JP2019020419A (ja) * 2017-07-20 2019-02-07 Ｊｆｅテクノリサーチ株式会社 膜厚計算方法、膜厚計算プログラム及び膜厚計算装置
TW201923305A (zh) * 2017-10-25 2019-06-16 德商聯合半導體股份有限公司 藉由干涉距離測量手段來偵測物體表面輪廓之組件
US20190302083A1 (en) * 2018-03-27 2019-10-03 Gybe, LLC Hyperspectral sensing system

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CN112710393B (zh) 2025-07-01
JP7382629B2 (ja) 2023-11-17
TW202138747A (zh) 2021-10-16
KR20210049679A (ko) 2021-05-06
CN112710393A (zh) 2021-04-27
JP2021067611A (ja) 2021-04-30

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