TWI837172B - 溫度控制系統及溫度控制方法 - Google Patents

溫度控制系統及溫度控制方法 Download PDF

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Publication number
TWI837172B
TWI837172B TW108131831A TW108131831A TWI837172B TW I837172 B TWI837172 B TW I837172B TW 108131831 A TW108131831 A TW 108131831A TW 108131831 A TW108131831 A TW 108131831A TW I837172 B TWI837172 B TW I837172B
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TW
Taiwan
Prior art keywords
flow path
valve
temperature
component
heat medium
Prior art date
Application number
TW108131831A
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English (en)
Chinese (zh)
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TW202032306A (zh
Inventor
小林啓
有田毅彥
Original Assignee
日商東京威力科創股份有限公司
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Publication of TW202032306A publication Critical patent/TW202032306A/zh
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0602—Temperature monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater
    • F24F5/0007—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning
    • F24F5/0017—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning using cold storage bodies, e.g. ice
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F5/00—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater
    • F24F5/0007—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning
    • F24F5/0017—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning using cold storage bodies, e.g. ice
    • F24F2005/0025—Air-conditioning systems or apparatus not covered by F24F1/00 or F24F3/00, e.g. using solar heat or combined with household units such as an oven or water heater cooling apparatus specially adapted for use in air-conditioning using cold storage bodies, e.g. ice using heat exchange fluid storage tanks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2600/00—Control issues
    • F25B2600/25—Control of valves
    • F25B2600/2501—Bypass valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2700/00—Sensing or detecting of parameters; Sensors therefor
    • F25B2700/21—Temperatures
    • F25B2700/2101—Temperatures in a bypass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/14—Thermal energy storage

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Thermal Sciences (AREA)
  • Sustainable Development (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Control Of Temperature (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Air Conditioning Control Device (AREA)
TW108131831A 2018-10-15 2019-09-04 溫度控制系統及溫度控制方法 TWI837172B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018194627A JP7129877B2 (ja) 2018-10-15 2018-10-15 温度制御システム及び温度制御方法
JP2018-194627 2018-10-15

Publications (2)

Publication Number Publication Date
TW202032306A TW202032306A (zh) 2020-09-01
TWI837172B true TWI837172B (zh) 2024-04-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW108131831A TWI837172B (zh) 2018-10-15 2019-09-04 溫度控制系統及溫度控制方法

Country Status (5)

Country Link
US (1) US11237577B2 (enExample)
JP (1) JP7129877B2 (enExample)
KR (1) KR102786699B1 (enExample)
CN (1) CN111048437B (enExample)
TW (1) TWI837172B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230110251A1 (en) 2020-03-31 2023-04-13 Mitsui Chemicals, Inc. Non-aqueous electrolyte for battery, precursor for lithium secondary battery, method for manufacturing lithium secondary battery, lithium secondary battery, phosphazene compound, and additive for battery
US12278094B2 (en) * 2020-05-08 2025-04-15 Applied Materials, Inc. Methods and apparatus for processing a substrate
CN111457669A (zh) * 2020-06-02 2020-07-28 吉林华微电子股份有限公司 制冷控温方法、装置及湿法刻蚀系统
JP7473401B2 (ja) * 2020-06-03 2024-04-23 株式会社ディスコ 加工水供給システム
JP7725328B2 (ja) * 2021-10-14 2025-08-19 東京エレクトロン株式会社 支持装置、検査システム及び支持装置の制御方法
TWI849660B (zh) * 2022-12-29 2024-07-21 鴻揚半導體股份有限公司 電漿蝕刻機台
KR102898045B1 (ko) * 2023-08-09 2025-12-09 피에스케이 주식회사 기판 처리 장치 및 기판 처리 방법
WO2025174847A1 (en) * 2024-02-16 2025-08-21 Lam Research Corporation Apparatus and system for flow control and tuning in semiconductor processing
WO2025253916A1 (ja) * 2024-06-05 2025-12-11 東京エレクトロン株式会社 基板処理装置および制御方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040187787A1 (en) * 2003-03-31 2004-09-30 Dawson Keith E. Substrate support having temperature controlled substrate support surface
US7730935B1 (en) * 1999-12-27 2010-06-08 Carrier Corporation Hydronic system control for heating and cooling
US8482152B1 (en) * 2009-06-29 2013-07-09 Lightsail Energy, Inc. Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange
JP2014021828A (ja) * 2012-07-20 2014-02-03 Tokyo Electron Ltd 温度制御システムへの温調流体供給方法及び記憶媒体
US20140165596A1 (en) * 2012-12-18 2014-06-19 Dr. Ing. H.C.F. Porsche Aktiengesellschaft Thermoelectric arrangement for use in a cooling system of a motor vehicle and cooling system having such a thermoelectric arrangement
US20150377571A1 (en) * 2014-06-27 2015-12-31 Tokyo Electron Limited System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method
US20170092472A1 (en) * 2015-09-25 2017-03-30 Tokyo Electron Limited Mounting table and plasma processing apparatus

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7789962B2 (en) * 2005-03-31 2010-09-07 Tokyo Electron Limited Device and method for controlling temperature of a mounting table, a program therefor, and a processing apparatus including same
JP4551256B2 (ja) * 2005-03-31 2010-09-22 東京エレクトロン株式会社 載置台の温度制御装置及び載置台の温度制御方法及び処理装置及び載置台温度制御プログラム
JP5003931B2 (ja) * 2006-05-10 2012-08-22 株式会社ノーリツ 熱回収装置、並びに、コージェネレーションシステム
JP4815295B2 (ja) * 2006-07-26 2011-11-16 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP5032269B2 (ja) * 2007-11-02 2012-09-26 東京エレクトロン株式会社 被処理基板の温度調節装置及び温度調節方法、並びにこれを備えたプラズマ処理装置
JP5496771B2 (ja) * 2010-05-13 2014-05-21 株式会社Ｋｅｌｋ 温度制御装置を用いた温度制御方法
JP2013007523A (ja) * 2011-06-24 2013-01-10 Panasonic Corp 冷温水給湯装置
JP5416748B2 (ja) * 2011-10-11 2014-02-12 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP5912439B2 (ja) * 2011-11-15 2016-04-27 東京エレクトロン株式会社 温度制御システム、半導体製造装置及び温度制御方法
JP5905735B2 (ja) * 2012-02-21 2016-04-20 東京エレクトロン株式会社 基板処理装置、基板処理方法及び基板温度の設定可能帯域の変更方法
KR101921806B1 (ko) * 2014-03-21 2018-11-23 알리스 에코 에이알케이(케이만) 코. 엘티디. 전기자동차의 온도제어 시스템
JP2016044834A (ja) * 2014-08-20 2016-04-04 日本電子株式会社 流体循環装置、荷電粒子線装置、および流体循環方法
JP6473965B2 (ja) * 2015-02-06 2019-02-27 Smc株式会社 安全機構付き冷却液供給装置及び熱負荷の冷却方法
JP6570390B2 (ja) * 2015-09-24 2019-09-04 東京エレクトロン株式会社 温度調整装置及び基板処理装置
JP2018024305A (ja) * 2016-08-09 2018-02-15 株式会社Ｓｏｋｅｎ 温調システム
JP2018125461A (ja) * 2017-02-02 2018-08-09 東京エレクトロン株式会社 被加工物の処理装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7730935B1 (en) * 1999-12-27 2010-06-08 Carrier Corporation Hydronic system control for heating and cooling
US20040187787A1 (en) * 2003-03-31 2004-09-30 Dawson Keith E. Substrate support having temperature controlled substrate support surface
US8482152B1 (en) * 2009-06-29 2013-07-09 Lightsail Energy, Inc. Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange
US20160273529A1 (en) * 2009-06-29 2016-09-22 Lightsail Energy, Inc. Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange
JP2014021828A (ja) * 2012-07-20 2014-02-03 Tokyo Electron Ltd 温度制御システムへの温調流体供給方法及び記憶媒体
US9664460B2 (en) * 2012-07-20 2017-05-30 Tokyo Electron Limited Method of supplying temperature control fluid to temperature control system and storage medium
US20140165596A1 (en) * 2012-12-18 2014-06-19 Dr. Ing. H.C.F. Porsche Aktiengesellschaft Thermoelectric arrangement for use in a cooling system of a motor vehicle and cooling system having such a thermoelectric arrangement
US20150377571A1 (en) * 2014-06-27 2015-12-31 Tokyo Electron Limited System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method
TW201612488A (en) * 2014-06-27 2016-04-01 Tokyo Electron Ltd System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method
US20170092472A1 (en) * 2015-09-25 2017-03-30 Tokyo Electron Limited Mounting table and plasma processing apparatus

Also Published As

Publication number Publication date
CN111048437A (zh) 2020-04-21
KR20200042393A (ko) 2020-04-23
US11237577B2 (en) 2022-02-01
KR102786699B1 (ko) 2025-03-25
JP2020064371A (ja) 2020-04-23
JP7129877B2 (ja) 2022-09-02
CN111048437B (zh) 2024-04-05
TW202032306A (zh) 2020-09-01
US20200117223A1 (en) 2020-04-16

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