TWI821580B - 雷射加工方法以及雷射加工裝置 - Google Patents
雷射加工方法以及雷射加工裝置 Download PDFInfo
- Publication number
- TWI821580B TWI821580B TW109122848A TW109122848A TWI821580B TW I821580 B TWI821580 B TW I821580B TW 109122848 A TW109122848 A TW 109122848A TW 109122848 A TW109122848 A TW 109122848A TW I821580 B TWI821580 B TW I821580B
- Authority
- TW
- Taiwan
- Prior art keywords
- laser
- hole
- substrate
- penetrated
- level
- Prior art date
Links
- 238000003672 processing method Methods 0.000 title claims description 6
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 238000001514 detection method Methods 0.000 claims abstract description 10
- 230000035515 penetration Effects 0.000 claims description 32
- 230000001678 irradiating effect Effects 0.000 claims description 9
- 239000011521 glass Substances 0.000 abstract description 25
- 238000000034 method Methods 0.000 description 13
- 230000003287 optical effect Effects 0.000 description 12
- 238000005553 drilling Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 238000004080 punching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/54—Glass
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019126915A JP7251904B2 (ja) | 2019-07-08 | 2019-07-08 | レーザ加工方法及レーザ加工装置 |
JP2019-126915 | 2019-07-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202103831A TW202103831A (zh) | 2021-02-01 |
TWI821580B true TWI821580B (zh) | 2023-11-11 |
Family
ID=74006034
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW109122848A TWI821580B (zh) | 2019-07-08 | 2020-07-07 | 雷射加工方法以及雷射加工裝置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7251904B2 (ko) |
KR (1) | KR20210006294A (ko) |
CN (1) | CN112192055A (ko) |
TW (1) | TWI821580B (ko) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08103879A (ja) * | 1994-10-04 | 1996-04-23 | Matsushita Electric Ind Co Ltd | レーザ加工機 |
JPH10263873A (ja) * | 1997-03-27 | 1998-10-06 | Sumitomo Heavy Ind Ltd | レーザ加工装置及び加工方法 |
CN104002051A (zh) * | 2014-06-03 | 2014-08-27 | 湖南大学 | 一种用于激光焊接的垂直检测装置和检测方法 |
CN106735944A (zh) * | 2016-12-16 | 2017-05-31 | 江苏大学 | 一种基于穿透检测技术的改进型激光微孔制造实验方法 |
JP6443251B2 (ja) * | 2015-07-17 | 2018-12-26 | トヨタ自動車株式会社 | レーザ穴あけ装置 |
JP2018202449A (ja) * | 2017-06-02 | 2018-12-27 | 日本電気硝子株式会社 | レーザー加工方法 |
JP6482740B1 (ja) * | 2018-05-07 | 2019-03-13 | 三菱電機株式会社 | レーザ加工機、制御装置および判定方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2864005B2 (ja) | 1996-05-17 | 1999-03-03 | 住友重機械工業株式会社 | トータルパルスエネルギー積算量検出によるレーザ加工補償システム |
DE19949501A1 (de) * | 1999-10-14 | 2001-04-19 | Volkswagen Ag | Verfahren zum Einbringen von Vertiefungen in Kunststoffteilen |
JP3920710B2 (ja) | 2002-06-04 | 2007-05-30 | 日立ビアメカニクス株式会社 | レーザ加工方法 |
JP5964604B2 (ja) * | 2012-02-09 | 2016-08-03 | 株式会社ディスコ | レーザー加工装置 |
CN105328350A (zh) * | 2015-10-09 | 2016-02-17 | 江苏大金激光科技有限公司 | 自动检测穿孔的激光切割头 |
CN107824989B (zh) * | 2017-10-26 | 2019-11-12 | 大族激光科技产业集团股份有限公司 | 一种激光穿孔的检测方法及系统 |
-
2019
- 2019-07-08 JP JP2019126915A patent/JP7251904B2/ja active Active
-
2020
- 2020-07-07 TW TW109122848A patent/TWI821580B/zh active
- 2020-07-07 KR KR1020200083586A patent/KR20210006294A/ko unknown
- 2020-07-08 CN CN202010649379.4A patent/CN112192055A/zh active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08103879A (ja) * | 1994-10-04 | 1996-04-23 | Matsushita Electric Ind Co Ltd | レーザ加工機 |
JPH10263873A (ja) * | 1997-03-27 | 1998-10-06 | Sumitomo Heavy Ind Ltd | レーザ加工装置及び加工方法 |
CN104002051A (zh) * | 2014-06-03 | 2014-08-27 | 湖南大学 | 一种用于激光焊接的垂直检测装置和检测方法 |
JP6443251B2 (ja) * | 2015-07-17 | 2018-12-26 | トヨタ自動車株式会社 | レーザ穴あけ装置 |
CN106735944A (zh) * | 2016-12-16 | 2017-05-31 | 江苏大学 | 一种基于穿透检测技术的改进型激光微孔制造实验方法 |
JP2018202449A (ja) * | 2017-06-02 | 2018-12-27 | 日本電気硝子株式会社 | レーザー加工方法 |
JP6482740B1 (ja) * | 2018-05-07 | 2019-03-13 | 三菱電機株式会社 | レーザ加工機、制御装置および判定方法 |
Also Published As
Publication number | Publication date |
---|---|
JP7251904B2 (ja) | 2023-04-04 |
TW202103831A (zh) | 2021-02-01 |
JP2021011410A (ja) | 2021-02-04 |
KR20210006294A (ko) | 2021-01-18 |
CN112192055A (zh) | 2021-01-08 |
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