TWI798765B - 用於鍺種子層的組合物及使用其的方法 - Google Patents

用於鍺種子層的組合物及使用其的方法 Download PDF

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TWI798765B
TWI798765B TW110127119A TW110127119A TWI798765B TW I798765 B TWI798765 B TW I798765B TW 110127119 A TW110127119 A TW 110127119A TW 110127119 A TW110127119 A TW 110127119A TW I798765 B TWI798765 B TW I798765B
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bis
silane
tris
group
butylamino
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TW110127119A
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Chinese (zh)
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TW202219051A (zh
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馬修R 麥當勞
滿超 蕭
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美商慧盛材料美國責任有限公司
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