CN116113725B - 用于锗种子层的组合物及其使用方法 - Google Patents

用于锗种子层的组合物及其使用方法

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Publication number
CN116113725B
CN116113725B CN202180062806.1A CN202180062806A CN116113725B CN 116113725 B CN116113725 B CN 116113725B CN 202180062806 A CN202180062806 A CN 202180062806A CN 116113725 B CN116113725 B CN 116113725B
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China
Prior art keywords
silane
bis
organoamino
tris
butylamino
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CN202180062806.1A
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Chinese (zh)
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CN116113725A (zh
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M·R·麦克唐纳
萧满超
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Versum Materials US LLC
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Versum Materials US LLC
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    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
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    • C07F7/02—Silicon compounds
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    • C07F7/18—Compounds having one or more C—Si linkages as well as one or more C—O—Si linkages
    • C07F7/1804—Compounds having Si-O-C linkages
    • C07F7/1872—Preparation; Treatments not provided for in C07F7/20
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