TWI794408B - 基板處理裝置、基板處理方法及記錄媒體 - Google Patents

基板處理裝置、基板處理方法及記錄媒體 Download PDF

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Publication number
TWI794408B
TWI794408B TW108104685A TW108104685A TWI794408B TW I794408 B TWI794408 B TW I794408B TW 108104685 A TW108104685 A TW 108104685A TW 108104685 A TW108104685 A TW 108104685A TW I794408 B TWI794408 B TW I794408B
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TW
Taiwan
Prior art keywords
moving body
control command
unit
substrate
nozzle
Prior art date
Application number
TW108104685A
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English (en)
Chinese (zh)
Other versions
TW201937307A (zh
Inventor
稻田博一
梶原英樹
永金拓
水篠真一
Original Assignee
日商東京威力科創股份有限公司
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Publication of TW201937307A publication Critical patent/TW201937307A/zh
Application granted granted Critical
Publication of TWI794408B publication Critical patent/TWI794408B/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B05D1/005—Spin coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/40—Distributing applied liquids or other fluent materials by members moving relatively to surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW108104685A 2018-02-13 2019-02-13 基板處理裝置、基板處理方法及記錄媒體 TWI794408B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018023147 2018-02-13
JP2018-023147 2018-02-13

Publications (2)

Publication Number Publication Date
TW201937307A TW201937307A (zh) 2019-09-16
TWI794408B true TWI794408B (zh) 2023-03-01

Family

ID=67619367

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108104685A TWI794408B (zh) 2018-02-13 2019-02-13 基板處理裝置、基板處理方法及記錄媒體

Country Status (5)

Country Link
JP (1) JP6910526B2 (ja)
KR (1) KR102690577B1 (ja)
CN (1) CN111684569B (ja)
TW (1) TWI794408B (ja)
WO (1) WO2019159742A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7286456B2 (ja) * 2019-07-19 2023-06-05 株式会社ディスコ 加工装置の制御方法
WO2022138167A1 (ja) * 2020-12-24 2022-06-30 パナソニックＩｐマネジメント株式会社 モータ制御装置
US20240235449A9 (en) * 2020-12-24 2024-07-11 Panasonic Intellectual Property Management Co., Ltd. Motor control device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015173204A (ja) * 2014-03-12 2015-10-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
TW201801168A (zh) * 2016-03-30 2018-01-01 東京威力科創股份有限公司 基板處理裝置、基板處理裝置之控制方法及基板處理系統

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3093523B2 (ja) 1993-06-29 2000-10-03 広島日本電気株式会社 半導体装置の製造装置
JP2001102287A (ja) * 1999-09-29 2001-04-13 Semiconductor Leading Edge Technologies Inc レジスト塗布現像装置、および下層反射防止膜のエッジカット方法
JP2008060302A (ja) * 2006-08-31 2008-03-13 Sokudo:Kk 基板処理装置
JP5683259B2 (ja) * 2010-12-28 2015-03-11 ラピスセミコンダクタ株式会社 基板処理装置及び基板処理方法
JP6267141B2 (ja) * 2014-06-04 2018-01-24 東京エレクトロン株式会社 液塗布方法、液塗布装置、及びコンピュータ読み取り可能な記録媒体
TWI661479B (zh) * 2015-02-12 2019-06-01 日商思可林集團股份有限公司 基板處理裝置、基板處理系統以及基板處理方法
JP6475071B2 (ja) * 2015-04-24 2019-02-27 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6404189B2 (ja) * 2015-08-07 2018-10-10 東京エレクトロン株式会社 基板液処理装置、基板液処理方法及び記憶媒体
JP6531831B2 (ja) * 2015-10-06 2019-06-19 東京エレクトロン株式会社 液処理装置、液処理方法及び記憶媒体
JP6352230B2 (ja) * 2015-10-09 2018-07-04 東京エレクトロン株式会社 基板処理方法、基板処理装置及び記録媒体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015173204A (ja) * 2014-03-12 2015-10-01 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
TW201801168A (zh) * 2016-03-30 2018-01-01 東京威力科創股份有限公司 基板處理裝置、基板處理裝置之控制方法及基板處理系統

Also Published As

Publication number Publication date
TW201937307A (zh) 2019-09-16
KR102690577B1 (ko) 2024-07-31
CN111684569B (zh) 2024-04-05
KR20200119312A (ko) 2020-10-19
CN111684569A (zh) 2020-09-18
JP6910526B2 (ja) 2021-07-28
JPWO2019159742A1 (ja) 2021-01-28
WO2019159742A1 (ja) 2019-08-22

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