TWI786221B - 具有用於工具夾具及工件夾具間之三維對齊的光學測量裝置的工具機 - Google Patents

具有用於工具夾具及工件夾具間之三維對齊的光學測量裝置的工具機 Download PDF

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Publication number
TWI786221B
TWI786221B TW107140440A TW107140440A TWI786221B TW I786221 B TWI786221 B TW I786221B TW 107140440 A TW107140440 A TW 107140440A TW 107140440 A TW107140440 A TW 107140440A TW I786221 B TWI786221 B TW I786221B
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TW
Taiwan
Prior art keywords
exposure system
optical
exposure
target
machine tool
Prior art date
Application number
TW107140440A
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English (en)
Chinese (zh)
Other versions
TW201927465A (zh
Inventor
飛利浦 加寇特
賽巴斯汀 拉波堤
Original Assignee
瑞士商謹觀股份公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH01602/17A external-priority patent/CH714502A1/fr
Priority claimed from CH001603/2017A external-priority patent/CH714503B1/fr
Application filed by 瑞士商謹觀股份公司 filed Critical 瑞士商謹觀股份公司
Publication of TW201927465A publication Critical patent/TW201927465A/zh
Application granted granted Critical
Publication of TWI786221B publication Critical patent/TWI786221B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/14—Control or regulation of the orientation of the tool with respect to the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B23Q17/2233—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2428—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring existing positions of tools or workpieces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication
    • G01C3/08—Use of electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/32—Measuring distances in line of sight; Optical rangefinders by focusing the object, e.g. on a ground glass screen

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Turning (AREA)
TW107140440A 2017-12-22 2018-11-14 具有用於工具夾具及工件夾具間之三維對齊的光學測量裝置的工具機 TWI786221B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CH01602/17 2017-12-22
CH01602/17A CH714502A1 (fr) 2017-12-22 2017-12-22 Système optique pour la mesure tridimensionnelle, dispositif et procédé de mesure avec un tel système optique.
CH001603/2017A CH714503B1 (fr) 2017-12-22 2017-12-22 Machine-outil comprenant un dispositif optique et procédé de mesure optique tridimensionnelle
CH01603/17 2017-12-22

Publications (2)

Publication Number Publication Date
TW201927465A TW201927465A (zh) 2019-07-16
TWI786221B true TWI786221B (zh) 2022-12-11

Family

ID=64949351

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107140440A TWI786221B (zh) 2017-12-22 2018-11-14 具有用於工具夾具及工件夾具間之三維對齊的光學測量裝置的工具機

Country Status (8)

Country Link
US (1) US11642749B2 (https=)
EP (1) EP3728991B1 (https=)
JP (1) JP7368662B2 (https=)
KR (1) KR102683478B1 (https=)
CN (1) CN112105887B (https=)
ES (1) ES2912959T3 (https=)
TW (1) TWI786221B (https=)
WO (1) WO2019123058A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
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CN113263355B (zh) * 2021-05-07 2025-01-17 深圳快造科技有限公司 对刀测量装置
JP6991382B1 (ja) * 2021-06-07 2022-01-12 Dmg森精機株式会社 工作機械
JP7747048B2 (ja) * 2021-08-31 2025-10-01 株式会社ニコン 移動誤差算出システム、工作機械、算出装置、較正方法、光計測装置
CN117206974B (zh) * 2023-09-07 2025-09-09 中数复新智能科技(上海)有限公司 一种工件的分中方法、系统及存储介质

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JPH07246547A (ja) * 1994-03-14 1995-09-26 Agency Of Ind Science & Technol 自動工作機械
TW200419133A (en) * 2003-03-27 2004-10-01 Nat Huwei Inst Of Technology Ring grating type rotational axis measurement system with 5 degrees of freedom
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Also Published As

Publication number Publication date
US20210016407A1 (en) 2021-01-21
JP2021507820A (ja) 2021-02-25
US11642749B2 (en) 2023-05-09
TW201927465A (zh) 2019-07-16
WO2019123058A1 (fr) 2019-06-27
EP3728991A1 (fr) 2020-10-28
KR102683478B1 (ko) 2024-07-11
KR20200098672A (ko) 2020-08-20
RU2020122231A (ru) 2022-01-24
ES2912959T3 (es) 2022-05-30
CN112105887B (zh) 2022-06-24
JP7368662B2 (ja) 2023-10-25
EP3728991B1 (fr) 2022-03-02
CN112105887A (zh) 2020-12-18

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