TWI780002B - 用於處理基板的方法及系統和非暫時性電腦可讀取媒體 - Google Patents

用於處理基板的方法及系統和非暫時性電腦可讀取媒體 Download PDF

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TWI780002B
TWI780002B TW111104931A TW111104931A TWI780002B TW I780002 B TWI780002 B TW I780002B TW 111104931 A TW111104931 A TW 111104931A TW 111104931 A TW111104931 A TW 111104931A TW I780002 B TWI780002 B TW I780002B
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Taiwan
Prior art keywords
substrate
processing system
matrices
parallel
substrate processing
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TW111104931A
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English (en)
Chinese (zh)
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TW202223566A (zh
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尚恩尚德 伊瑪尼
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美商應用材料股份有限公司
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T1/00—General purpose image data processing
    • G06T1/20—Processor architectures; Processor configuration, e.g. pipelining
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34417—Multiprocessor scheduling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35499—Model of process, machine and parameters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00—Indexing scheme for image data processing or generation, in general
    • G06T2200/28—Indexing scheme for image data processing or generation, in general involving image processing hardware
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Theoretical Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Factory Administration (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Drying Of Semiconductors (AREA)
TW111104931A 2018-06-22 2019-06-21 用於處理基板的方法及系統和非暫時性電腦可讀取媒體 TWI780002B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/015,302 2018-06-22
US16/015,302 US10698392B2 (en) 2018-06-22 2018-06-22 Using graphics processing unit for substrate routing and throughput modeling

Publications (2)

Publication Number Publication Date
TW202223566A TW202223566A (zh) 2022-06-16
TWI780002B true TWI780002B (zh) 2022-10-01

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Family Applications (2)

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TW111104931A TWI780002B (zh) 2018-06-22 2019-06-21 用於處理基板的方法及系統和非暫時性電腦可讀取媒體
TW108121693A TWI758613B (zh) 2018-06-22 2019-06-21 在積體基板處理系統中排程半導體基板處理序列的方法及系統和非暫時性電腦可讀取媒體

Family Applications After (1)

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TW108121693A TWI758613B (zh) 2018-06-22 2019-06-21 在積體基板處理系統中排程半導體基板處理序列的方法及系統和非暫時性電腦可讀取媒體

Country Status (6)

Country Link
US (2) US10698392B2 (https=)
JP (2) JP6923766B1 (https=)
KR (2) KR102482316B1 (https=)
CN (2) CN112292748B (https=)
TW (2) TWI780002B (https=)
WO (1) WO2019246588A1 (https=)

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Also Published As

Publication number Publication date
CN114895638A (zh) 2022-08-12
JP2022000891A (ja) 2022-01-04
US20190391569A1 (en) 2019-12-26
US20200326691A1 (en) 2020-10-15
KR102482316B1 (ko) 2022-12-27
KR20210112421A (ko) 2021-09-14
TWI758613B (zh) 2022-03-21
TW202001634A (zh) 2020-01-01
KR102302724B1 (ko) 2021-09-14
CN112292748A (zh) 2021-01-29
WO2019246588A1 (en) 2019-12-26
TW202223566A (zh) 2022-06-16
JP2021522695A (ja) 2021-08-30
CN112292748B (zh) 2022-05-24
US11275360B2 (en) 2022-03-15
JP7136977B2 (ja) 2022-09-13
CN114895638B (zh) 2023-04-07
JP6923766B1 (ja) 2021-08-25
US10698392B2 (en) 2020-06-30
KR20210021564A (ko) 2021-02-26

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