TWI769722B - 狀態判斷裝置、狀態判斷方法以及狀態判斷程式 - Google Patents

狀態判斷裝置、狀態判斷方法以及狀態判斷程式 Download PDF

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TWI769722B
TWI769722B TW110107484A TW110107484A TWI769722B TW I769722 B TWI769722 B TW I769722B TW 110107484 A TW110107484 A TW 110107484A TW 110107484 A TW110107484 A TW 110107484A TW I769722 B TWI769722 B TW I769722B
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TW110107484A
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TW202147052A (zh
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山本亮介
水田匡彦
木原誉之
牧尾直明
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日商Ｓｕｍｃｏ股份有限公司
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • General Factory Administration (AREA)
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TW110107484A 2020-03-31 2021-03-03 狀態判斷裝置、狀態判斷方法以及狀態判斷程式 TWI769722B (zh)

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JP2020-062561 2020-03-31
JP2020062561A JP6973544B2 (ja) 2020-03-31 2020-03-31 状態判定装置、状態判定方法、及び状態判定プログラム

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TW202147052A TW202147052A (zh) 2021-12-16
TWI769722B true TWI769722B (zh) 2022-07-01

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Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
JP7509117B2 (ja) * 2021-10-29 2024-07-02 株式会社Sumco 監視方法、監視プログラム、監視装置、ウェーハの製造方法、及びウェーハ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008004559A1 (fr) * 2006-07-06 2008-01-10 Asahi Glass Company, Limited système de groupage, et dispositif d'évaluation de type de défaut
US20150370886A1 (en) * 2012-12-17 2015-12-24 Nec Corporation Information processing device which carries out risk analysis and risk analysis method
TW201615844A (zh) * 2014-10-22 2016-05-01 財團法人工業技術研究院 異因分析與校正方法與系統
TW201719788A (zh) * 2015-11-20 2017-06-01 財團法人工業技術研究院 設備的故障評估方法與故障評估裝置
US20170298759A1 (en) * 2014-09-01 2017-10-19 Ihi Corporation Failure detection device
US20170323096A1 (en) * 2006-09-18 2017-11-09 The Trustees Of Columbia University In The City Of New York Methods, media, and systems for detecting attack on a digital processing device
WO2018174262A1 (ja) * 2017-03-24 2018-09-27 三菱重工業株式会社 監視システム、処理装置および監視装置
TW201908900A (zh) * 2017-07-14 2019-03-01 日商東芝股份有限公司 異常檢測裝置、異常檢測方法以及電腦可讀取記錄媒體

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4878085B2 (ja) * 2001-04-20 2012-02-15 ラピスセミコンダクタ株式会社 製造工程のための管理方法
JP2019178625A (ja) * 2018-03-30 2019-10-17 三菱重工業株式会社 ポンプ設備の異常診断システム、及び、ポンプ設備の異常診断方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008004559A1 (fr) * 2006-07-06 2008-01-10 Asahi Glass Company, Limited système de groupage, et dispositif d'évaluation de type de défaut
US20170323096A1 (en) * 2006-09-18 2017-11-09 The Trustees Of Columbia University In The City Of New York Methods, media, and systems for detecting attack on a digital processing device
US20150370886A1 (en) * 2012-12-17 2015-12-24 Nec Corporation Information processing device which carries out risk analysis and risk analysis method
US20170298759A1 (en) * 2014-09-01 2017-10-19 Ihi Corporation Failure detection device
TW201615844A (zh) * 2014-10-22 2016-05-01 財團法人工業技術研究院 異因分析與校正方法與系統
TW201719788A (zh) * 2015-11-20 2017-06-01 財團法人工業技術研究院 設備的故障評估方法與故障評估裝置
WO2018174262A1 (ja) * 2017-03-24 2018-09-27 三菱重工業株式会社 監視システム、処理装置および監視装置
TW201908900A (zh) * 2017-07-14 2019-03-01 日商東芝股份有限公司 異常檢測裝置、異常檢測方法以及電腦可讀取記錄媒體
TWI678602B (zh) * 2017-07-14 2019-12-01 日商東芝股份有限公司 異常檢測裝置、異常檢測方法以及電腦可讀取記錄媒體

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JP6973544B2 (ja) 2021-12-01
JP2021163054A (ja) 2021-10-11

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