TWI737615B - 含氫廢氣處理裝置 - Google Patents

含氫廢氣處理裝置 Download PDF

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Publication number
TWI737615B
TWI737615B TW105118177A TW105118177A TWI737615B TW I737615 B TWI737615 B TW I737615B TW 105118177 A TW105118177 A TW 105118177A TW 105118177 A TW105118177 A TW 105118177A TW I737615 B TWI737615 B TW I737615B
Authority
TW
Taiwan
Prior art keywords
hydrogen
exhaust gas
treatment device
treatment
containing exhaust
Prior art date
Application number
TW105118177A
Other languages
English (en)
Chinese (zh)
Other versions
TW201707771A (zh
Inventor
朴商權
Original Assignee
南韓商圓益Ｉｐｓ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 南韓商圓益Ｉｐｓ股份有限公司 filed Critical 南韓商圓益Ｉｐｓ股份有限公司
Publication of TW201707771A publication Critical patent/TW201707771A/zh
Application granted granted Critical
Publication of TWI737615B publication Critical patent/TWI737615B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/869—Multiple step processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/38—Removing components of undefined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/88—Handling or mounting catalysts
    • B01D53/885—Devices in general for catalytic purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/10—Noble metals or compounds thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/10—Noble metals or compounds thereof
    • B01D2255/102—Platinum group metals
    • B01D2255/1021—Platinum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/10—Noble metals or compounds thereof
    • B01D2255/102—Platinum group metals
    • B01D2255/1025—Rhodium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/10—Noble metals or compounds thereof
    • B01D2255/102—Platinum group metals
    • B01D2255/1026—Ruthenium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/10—Noble metals or compounds thereof
    • B01D2255/102—Platinum group metals
    • B01D2255/1028—Iridium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20761—Copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20784—Chromium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/209—Other metals
    • B01D2255/2092—Aluminium

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • Catalysts (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Exhaust Gas After Treatment (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
TW105118177A 2015-06-11 2016-06-08 含氫廢氣處理裝置 TWI737615B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2015-0082469 2015-06-11
KR1020150082469A KR101670461B1 (ko) 2015-06-11 2015-06-11 수소 포함 배기가스 처리장치

Publications (2)

Publication Number Publication Date
TW201707771A TW201707771A (zh) 2017-03-01
TWI737615B true TWI737615B (zh) 2021-09-01

Family

ID=57484946

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105118177A TWI737615B (zh) 2015-06-11 2016-06-08 含氫廢氣處理裝置

Country Status (4)

Country Link
JP (1) JP6740007B2 (ja)
KR (1) KR101670461B1 (ja)
CN (1) CN106237838B (ja)
TW (1) TWI737615B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102450632B1 (ko) * 2022-03-17 2022-10-06 (주)진솔루션 반도체 제조 수소 공정의 배기 수소 처리장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11192429A (ja) * 1998-01-06 1999-07-21 Hitachi Ltd 水素含有排ガス処理装置
JP2007021433A (ja) * 2005-07-20 2007-02-01 Ube Ind Ltd 排ガスの酸化的処理方法及びその装置
TW200940159A (en) * 2008-02-05 2009-10-01 Applied Materials Inc Systems and methods for treating flammable effluent gases from manufacturing processes
JP2009241001A (ja) * 2008-03-31 2009-10-22 Okayama Prefecture Industrial Promotion Foundation マイクロミキサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100777672B1 (ko) * 2005-12-20 2007-11-28 코아텍주식회사 수소가스 처리용 스크러버 시스템
KR100654922B1 (ko) * 2006-01-26 2006-12-06 주식회사 코캣 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법
JP2009202114A (ja) * 2008-02-28 2009-09-10 Hiroshi Matsuoka メタルハニカム担体構造
KR20090121943A (ko) * 2008-05-23 2009-11-26 방재원 연소촉매와 광촉매를 이용한 폐 가스 처리방법 및 그처리장치
CN204329030U (zh) * 2014-11-18 2015-05-13 程礼华 太阳能无烟囱固废发电联产碳油装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11192429A (ja) * 1998-01-06 1999-07-21 Hitachi Ltd 水素含有排ガス処理装置
JP2007021433A (ja) * 2005-07-20 2007-02-01 Ube Ind Ltd 排ガスの酸化的処理方法及びその装置
TW200940159A (en) * 2008-02-05 2009-10-01 Applied Materials Inc Systems and methods for treating flammable effluent gases from manufacturing processes
JP2009241001A (ja) * 2008-03-31 2009-10-22 Okayama Prefecture Industrial Promotion Foundation マイクロミキサ

Also Published As

Publication number Publication date
JP2017001024A (ja) 2017-01-05
CN106237838A (zh) 2016-12-21
TW201707771A (zh) 2017-03-01
JP6740007B2 (ja) 2020-08-12
CN106237838B (zh) 2020-10-30
KR101670461B1 (ko) 2016-11-01

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