TWI737615B - 含氫廢氣處理裝置 - Google Patents
含氫廢氣處理裝置 Download PDFInfo
- Publication number
- TWI737615B TWI737615B TW105118177A TW105118177A TWI737615B TW I737615 B TWI737615 B TW I737615B TW 105118177 A TW105118177 A TW 105118177A TW 105118177 A TW105118177 A TW 105118177A TW I737615 B TWI737615 B TW I737615B
- Authority
- TW
- Taiwan
- Prior art keywords
- hydrogen
- exhaust gas
- treatment device
- treatment
- containing exhaust
- Prior art date
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/869—Multiple step processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/38—Removing components of undefined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/88—Handling or mounting catalysts
- B01D53/885—Devices in general for catalytic purification of waste gases
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
- B01D2255/102—Platinum group metals
- B01D2255/1021—Platinum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
- B01D2255/102—Platinum group metals
- B01D2255/1025—Rhodium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
- B01D2255/102—Platinum group metals
- B01D2255/1026—Ruthenium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
- B01D2255/102—Platinum group metals
- B01D2255/1028—Iridium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20761—Copper
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20784—Chromium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/209—Other metals
- B01D2255/2092—Aluminium
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Catalysts (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Exhaust Gas After Treatment (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2015-0082469 | 2015-06-11 | ||
KR1020150082469A KR101670461B1 (ko) | 2015-06-11 | 2015-06-11 | 수소 포함 배기가스 처리장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201707771A TW201707771A (zh) | 2017-03-01 |
TWI737615B true TWI737615B (zh) | 2021-09-01 |
Family
ID=57484946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105118177A TWI737615B (zh) | 2015-06-11 | 2016-06-08 | 含氫廢氣處理裝置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6740007B2 (ja) |
KR (1) | KR101670461B1 (ja) |
CN (1) | CN106237838B (ja) |
TW (1) | TWI737615B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102450632B1 (ko) * | 2022-03-17 | 2022-10-06 | (주)진솔루션 | 반도체 제조 수소 공정의 배기 수소 처리장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11192429A (ja) * | 1998-01-06 | 1999-07-21 | Hitachi Ltd | 水素含有排ガス処理装置 |
JP2007021433A (ja) * | 2005-07-20 | 2007-02-01 | Ube Ind Ltd | 排ガスの酸化的処理方法及びその装置 |
TW200940159A (en) * | 2008-02-05 | 2009-10-01 | Applied Materials Inc | Systems and methods for treating flammable effluent gases from manufacturing processes |
JP2009241001A (ja) * | 2008-03-31 | 2009-10-22 | Okayama Prefecture Industrial Promotion Foundation | マイクロミキサ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100777672B1 (ko) * | 2005-12-20 | 2007-11-28 | 코아텍주식회사 | 수소가스 처리용 스크러버 시스템 |
KR100654922B1 (ko) * | 2006-01-26 | 2006-12-06 | 주식회사 코캣 | 반도체 제조공정으로부터 발생하는 배가스 처리장치 및방법 |
JP2009202114A (ja) * | 2008-02-28 | 2009-09-10 | Hiroshi Matsuoka | メタルハニカム担体構造 |
KR20090121943A (ko) * | 2008-05-23 | 2009-11-26 | 방재원 | 연소촉매와 광촉매를 이용한 폐 가스 처리방법 및 그처리장치 |
CN204329030U (zh) * | 2014-11-18 | 2015-05-13 | 程礼华 | 太阳能无烟囱固废发电联产碳油装置 |
-
2015
- 2015-06-11 KR KR1020150082469A patent/KR101670461B1/ko active IP Right Grant
-
2016
- 2016-06-01 JP JP2016110389A patent/JP6740007B2/ja active Active
- 2016-06-08 TW TW105118177A patent/TWI737615B/zh active
- 2016-06-08 CN CN201610402916.9A patent/CN106237838B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11192429A (ja) * | 1998-01-06 | 1999-07-21 | Hitachi Ltd | 水素含有排ガス処理装置 |
JP2007021433A (ja) * | 2005-07-20 | 2007-02-01 | Ube Ind Ltd | 排ガスの酸化的処理方法及びその装置 |
TW200940159A (en) * | 2008-02-05 | 2009-10-01 | Applied Materials Inc | Systems and methods for treating flammable effluent gases from manufacturing processes |
JP2009241001A (ja) * | 2008-03-31 | 2009-10-22 | Okayama Prefecture Industrial Promotion Foundation | マイクロミキサ |
Also Published As
Publication number | Publication date |
---|---|
JP2017001024A (ja) | 2017-01-05 |
JP6740007B2 (ja) | 2020-08-12 |
CN106237838A (zh) | 2016-12-21 |
CN106237838B (zh) | 2020-10-30 |
TW201707771A (zh) | 2017-03-01 |
KR101670461B1 (ko) | 2016-11-01 |
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