TWI731481B - Producing device of mask integrated frame - Google Patents

Abstract

The invention relates to a manufacturing device of a frame-integrated mask. The manufacturing device of the frame-integrated mask according to the present invention includes: a worktable part, which is used to place and support a frame; a clamp part, which is used to clamp a template that is bonded and supported by a mask; Move the jig part in at least any one of the X, Y, Z, and θ axes; a head for irradiating the welding part of the mask with laser, and for sensing the alignment state of the mask; and a head moving part, which The head is moved in at least any one of the X, Y, and Z axes, and the workbench includes a heating unit for raising the temperature of the process area including the frame to the first temperature.

Description

Manufacturing device for frame-integrated mask

Field of invention The invention relates to a manufacturing device of a frame-integrated mask. More specifically, it relates to a mask that does not deform and can be stably supported and moved, and the mask and the frame are integrally formed, and the masks can be accurately aligned (align) on the frame. A frame-integrated mask manufacturing device that can prevent deformation of the frame during the process of separating and replacing the mask.

Background of the invention As a technology for forming pixels in the OLED (organic light-emitting diode) manufacturing process, the FMM (Fine Metal Mask) method is mainly used, which tightens a thin-film metal mask (Shadow Mask). Stick to the substrate and deposit organics on the desired location.

In the existing OLED manufacturing process, after the mask is manufactured into a strip shape, a plate shape, etc., the mask is welded and fixed to the OLED pixel deposition frame and used. One mask may have a plurality of cells corresponding to one display. In addition, in order to manufacture a large-area OLED, multiple masks can be fixed to the OLED pixel deposition frame, and during the process of fixing to the frame, each mask is stretched to make it flat. It is very difficult to adjust the stretching force to flatten the entire part of the mask. In particular, in order to make each unit flat while aligning a mask pattern with a size of only a few μm to several tens of μm, it is necessary to fine-tune the tensile force applied to each side of the mask and confirm the alignment status immediately. .

Nevertheless, in the process of fixing multiple masks to one frame, there is still a problem of poor alignment between the masks and between the mask units. In addition, in the process of welding and fixing the mask to the frame, the thickness of the mask film is too thin and the area is large, so there is a problem of the mask sagging or twisting due to the load; due to wrinkles and burrs generated in the welding part during the welding process (burr) and so on, causing the problem of inaccurate alignment of the mask unit.

In ultra-high-definition OLED, the existing QHD image quality is 500-600PPI (pixelperinch, pixels per inch), and the pixel size reaches about 30-50μm, while 4KUHD and 8KUHD HD have higher than that of ~860PPI, ~1600PPI And other resolutions. In this way, considering the pixel size of the ultra-high-definition OLED, the alignment error between the units needs to be reduced to a few μm. Exceeding this error will lead to product failure, so the yield may be extremely low. Therefore, it is necessary to develop a technology that can prevent deformation such as sagging or twisting of the mask and make the alignment accurate, and a technology that fixes the mask to the frame.

In addition, when part of the mask is not accurately aligned and fixed or when a defect occurs in the mask, the mask needs to be separated. However, in the process of separating and replacing the soldered mask, there is a problem of disrupting the alignment of other masks.

Summary of the invention Therefore, the present invention is proposed in order to solve the various problems of the prior art as described above, and its object is to provide a frame-integrated mask manufacturing apparatus capable of forming an integrated structure of the mask and the frame.

In addition, an object of the present invention is to provide an apparatus for manufacturing a frame-integrated mask that can prevent deformation such as sagging or twisting of the mask and can accurately align the mask.

In addition, an object of the present invention is to provide a frame-integrated mask manufacturing apparatus that can significantly reduce the manufacturing time and can significantly improve the yield.

In addition, an object of the present invention is to provide an apparatus for manufacturing a frame-integrated mask that can stably support and move the mask without deformation.

In addition, an object of the present invention is to provide a frame-integrated mask manufacturing device that can separate and replace the mask in a frame-integrated mask in which the mask and the frame have an integrated structure to prevent distortion such as distortion of the frame. , And accurately align the mask. [Solution]

The object of the present invention is achieved by the following frame-integrated mask manufacturing device. The frame of the frame-integrated mask manufacturing device frame includes: a table portion for positioning and supporting the frame; a clamp portion, which Used to clamp the template that is bonded and supported by the mask; the jig moving part, which moves the jig part in at least any one of the X, Y, Z, and θ axes; the head, which is used to irradiate the welding part of the mask Laser, and used to sense the alignment state of the mask; and a head moving part that moves the head in at least any one of the X, Y, and Z axes, and the workbench part includes a temperature for the process area including the frame Raise the heating unit to the first temperature.

It may further include a preheating part which provides a space for preheating the template which is bonded and supported with the mask before the template is clamped by the clamp part.

The clamp part can be clamped by sucking at least a part of the upper surface of the template.

The table part may include a frame alignment unit for aligning the position of the frame.

The clamp part includes: a clamp unit for clamping the template; a clamp moving unit for moving the clamp unit in at least any one of the X, Y, Z, and θ axes; and a connecting unit for connecting the clamp moving unit To the moving part of the fixture.

The clamp part may further include a clamp heating unit for applying heat to the clamped template.

A plurality of adsorption units that apply adsorption pressure to the template may be formed on the clamp unit at intervals.

A plurality of suction units may be arranged without overlapping on the welding part of the mask and the area on the Z axis.

The head may include a laser unit that welds the mask and the frame by irradiating a laser onto the mask, or performs laser trimming by irradiating a laser onto the mask.

A pair of laser units can be arranged at intervals, and each laser unit irradiates the welding part on one side and the other side of the mask with laser respectively.

The frame may include: an edge frame part, which includes a hollow area; and a mask unit sheet part, which has a plurality of mask unit areas and is connected to the edge frame part.

A plurality of suction holes may be formed in a portion separated by a predetermined distance from the corners of the mask unit sheet portion where the mask unit area exists, and the table portion further includes a lower support unit that generates suction pressure to the lower part of the frame.

A heating unit may be arranged at the lower part of the lower supporting unit.

The first temperature is greater than or equal to the OLED pixel deposition process temperature. After the mask is attached to the frame, the temperature of the process area including the frame is lowered to a second temperature lower than the first temperature. The first temperature is 25°C to 60°C The second temperature is any temperature from 20°C to 30°C that is less than the first temperature, and the OLED pixel deposition process temperature can be any temperature from 25°C to 45°C. [Effects of the invention]

According to the present invention having the structure as described above, there is an effect that the mask and the frame can form an integrated structure.

In addition, according to the present invention, it is possible to prevent deformation such as sagging or twisting of the mask and to make the alignment accurate.

In addition, according to the present invention, there is an effect that the manufacturing time can be significantly shortened and the yield can be significantly improved.

In addition, according to the present invention, there is an effect that the mask can be stably supported and moved without being deformed.

In addition, according to the present invention, the mask can be separated and replaced in the frame-integrated mask in which the mask and the frame have an integrated structure to prevent distortion such as distortion of the frame, and has the effect of accurately aligning the mask.

Detailed description of the preferred embodiment The detailed description of the present invention described later will refer to the accompanying drawings, which illustrate specific embodiments capable of implementing the present invention as examples. These embodiments are explained in sufficient detail to enable those skilled in the art to implement the present invention. It should be understood that although the various embodiments of the present invention are different from each other, they are not necessarily mutually exclusive. For example, the specific shapes, structures, and characteristics described herein are related to one embodiment, and can be implemented in other embodiments without departing from the spirit and scope of the present invention. In addition, it should be understood that the position or arrangement of the individual constituent elements in each disclosed embodiment can be changed without departing from the spirit and scope of the present invention. Therefore, the following detailed description should not be regarded as having a restrictive meaning, and the scope of the present invention is limited only by the appended claims and all equivalent ranges thereof as long as they are appropriately described. Similar reference numerals in the figures represent the same or similar functions from many aspects. For convenience, the length, area, thickness and shape thereof may be exaggerated.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily implement the present invention.

1 and 2 are schematic diagrams showing a process of attaching the mask 1 to the frame 2 in the prior art. FIG. 3 is a schematic diagram showing that the alignment error between the cells C1 to C3 occurs in the process of stretching the F1 to F2 mask 1 in the prior art.

1, the existing mask 1 can be made into a stick-type or a plate-type. The mask 1 illustrated in FIG. 1 is used as a strip mask, and both sides of the strip can be welded and fixed on the OLED pixel deposition frame 2 and used.

In the main body (body, or mask film 1a) of the mask 1, a plurality of display units C are provided. One cell C corresponds to one display of a smart phone or the like. A pixel pattern P is formed in the cell C so as to correspond to each pixel of the display. When the unit C is enlarged, a plurality of pixel patterns P corresponding to R, G, and B are displayed. As an example, the pixel pattern P is formed in the cell C so as to have a resolution of 70×140. That is, a large number of pixel patterns P form a set to constitute one cell C, and a plurality of cells C may be formed on the mask 10. Hereinafter, the strip mask 1 with 6 cells C (C1 to C6) is taken as an example for description.

Referring to Fig. 1(a), Fig. 2(a), and Fig. 2(b), first, the strip mask 1 is spread out flat. The frame 2 is placed in the middle and a pair of clamps 3 facing each other clamps both sides of the mask 1, and pulls the mask 1 with the tensile force F1~F2 applied to the long axis direction of the mask 1. , Thereby unfolding the mask 1. Then, the gripper 3 is moved to a position corresponding to the frame 2 along the y-axis moving rail 4 occupying the outside of the frame 2. The cells C1 to C6 of the mask 1 will be located in the blank area inside the frame of the frame 2. The frame 2 has a size that allows the cells C1 to C6 of one strip mask 1 to be located in a blank area inside the frame, and may also have a size that allows the cells C1 to C6 of a plurality of strip mask 1 to be located in a blank area inside the frame.

Then, referring to FIG. 2( c ), a pair of grippers 3 descend along the Z-axis moving rail 5, and the mask 1 is loaded on the quadrilateral frame-shaped frame 2 in a state of stretching the mask 1. The cells C1 to C6 of the mask 1 will be located in the blank area inside the frame of the frame 2. The frame 2 has a size that allows the cells C1 to C6 of one mask 1 to be located in a blank area inside the frame, and may also have a size that allows the cells C1 to C6 of a plurality of masks 1 to be located in a blank area inside the frame.

Then, referring to Fig. 1(b) and Fig. 2(d), the tensile forces F1 to F2 applied to each side of the mask 1 are fine-tuned while aligning, and then the laser L or the like is used to weld the W mask. A part of the side of the mold 1 so that the mask 1 and the frame 2 are connected to each other. Then, the clamper 3 releases the clamp of the mask 1. FIG. 1(c) shows a side section of the mask 1 and the frame 2 connected to each other.

Referring to FIG. 3, although the tensile forces F1 to F2 applied to each side of the strip mask 1 are fine-tuned, the problem of poor alignment of the mask units C1 to C3 with each other is shown. For example, the distances D1 to D1" and D2 to D2" between the patterns P of the cells C1 to C3 are different from each other, or the patterns P are skewed. Since the stripe mask 1 has a large area including a plurality of (for example, six) cells C1 to C6 and has a very thin thickness of several tens of μm, it is likely to sag or twist due to a load. In addition, it is very difficult to adjust the stretching forces F1 to F2 so that all the units C1 to C6 become flat, and to check the alignment state of the units C1 to C6 in real time through a microscope.

Therefore, the slight error of the stretching force F1~F2 may cause the error of the stretching or unfolding degree of each unit C1~C3 of the strip mask 1, thereby resulting in the distance D1~D1'' between the mask patterns P. D2~D2'' are different. Although it is very difficult to align perfectly so that the error is zero, in order to avoid the mask pattern P with a size of several μm to tens of μm from adversely affecting the pixel process of the ultra-high-definition OLED, it is preferable that the alignment error is not more than 3 μm. The alignment error between such adjacent units is referred to as pixel position accuracy (PPA).

In addition, approximately 6-20 strip masks 1 are connected to a frame 2, and the alignment between the strip masks 1 and the cells C-C6 of the strip mask 1 Accurate state is a very difficult task, and it can only increase the process time based on alignment, which becomes an important reason for reducing productivity.

On the other hand, after the strip mask 1 is connected and fixed to the frame 2, the tensile forces F1 to F2 applied to the strip mask 1 will act on the frame 2 in reverse. That is, after the strip mask 1 stretched tightly by the stretching forces F1 to F2 is connected to the frame 2, tension can be applied to the frame 2. Normally, this tension is not large and does not have a large impact on the frame 2. However, when the size of the frame 2 is reduced and the strength becomes low, this tension may slightly deform the frame 2. In this way, a problem of destroying the alignment state between the plurality of cells C to C6 may occur.

In view of this, the present invention proposes a frame-integrated mask capable of forming an integrated structure of the mask 100 and the frame 200 and a manufacturing device thereof. The mask 100 integrated with the frame 200 can prevent deformation such as sagging or twisting, and is accurately aligned with the frame 200. When the mask 100 is connected to the frame 200, no stretching force is applied to the mask 100, so after the mask 100 is connected to the frame 200, no tension that causes deformation is applied to the mask 200. Also, the manufacturing time for integrally connecting the mask 100 to the frame 200 can be significantly shortened, and the yield can be significantly improved.

4 is a front view (FIG. 4(a)) and a side cross-sectional view (FIG. 4(b)) of a frame-integrated mask according to an embodiment of the present invention, and FIG. 5 is a view showing an aspect of the present invention The front view (FIG. 5( a )) and the side sectional view (FIG. 5 b) of the frame according to the embodiment.

4 and 5, the frame-integrated mask may include a plurality of masks 100 and one frame 200. In other words, a form in which a plurality of masks 100 are attached to the frame 200, respectively. Hereinafter, for the convenience of description, a rectangular mask 100 is used as an example for description. However, before the mask 100 is attached to the frame 200, it may be in the shape of a stripe mask with protrusions for clamping on both sides, and attached to After the frame 200, the protrusions can be removed.

A plurality of mask patterns P are formed on each mask 100, and one cell C may be formed on one mask 100. One mask unit C can correspond to one display of a smartphone, etc.

The mask 100 may be an invar material with a thermal expansion coefficient of about 1.0×10 ^-6 /°C, and a super invar material with an expansion coefficient of about 1.0×10 ^-7 /°C. The mask 100 of this material has a very low coefficient of thermal expansion, so there is little concern about the pattern deformation of the mask due to thermal energy, and can be used as FMM (Fine Metal Mask) and shadow mask (Shadow Mask) in high-resolution OLED manufacturing. use. In addition, considering the recently developed technology for performing the pixel deposition process within the range of small temperature changes, the mask 100 may also be made of nickel (Ni) or nickel-cobalt (Ni-Co) with a slightly larger thermal expansion coefficient. ) And other materials. The mask 100 may use a metal sheet produced by a rolling process or electroforming.

The frame 200 may be formed in a form in which a plurality of masks 100 are attached. Including the outermost periphery, the frame 200 may include a plurality of edges and corners formed along a first direction (for example, a lateral direction) and a second direction (for example, a vertical direction). Such multiple edges and corners may divide the area for attaching the mask 100 on the frame 200.

The frame 200 may include an edge frame part 210 roughly in a square shape and a box shape. The inside of the edge frame part 210 may be a hollow shape. That is, the edge frame part 210 may include the hollow region R. The frame 200 may be formed of metal materials such as Invar, Super Invar, aluminum, and titanium. Considering thermal deformation, it is preferably made of Invar, Super Invar, nickel, and nickel-cobalt having the same thermal expansion coefficient as the mask. These materials can be applied to all the edge frame parts 210 and the mask unit sheet part 220 that are the constituent elements of the frame 200.

In addition, the frame 200 is provided with a plurality of mask cell regions CR, and may include a mask cell sheet part 220 connected to the edge frame part 210. The mask unit sheet part 220 may be formed by calendering like the mask 100, or may also be formed by using another film forming process such as electroforming. In addition, the mask unit sheet portion 220 may be connected to the edge frame portion 210 after forming a plurality of mask unit regions CR on a planar sheet by laser scribing, etching, or the like. Alternatively, the mask unit sheet portion 220 may connect a planar sheet to the edge frame portion 210, and then form a plurality of mask unit regions CR by laser scribing, etching, or the like. In this specification, the case where a plurality of mask cell regions CR are first formed in the mask cell sheet section 220 and then connected to the edge frame section 210 will be mainly described.

The mask unit sheet part 220 may include an edge sheet part 221 and at least one of a first grid sheet part 223 and a second grid sheet part 225. The edge sheet portion 221, the first grid sheet portion 223, and the second grid sheet portion 225 refer to the respective portions divided on the same sheet, and they are integrated with each other.

The edge sheet part 221 may be substantially connected to the edge frame part 210. Therefore, the edge sheet part 221 may have a substantially square shape or a box shape corresponding to the edge frame part 210.

In addition, the first grid sheet portion 223 may be formed to extend along the first direction (lateral direction). The first grid sheet portion 223 is formed in a linear form, and both ends of the first grid sheet portion 223 may be connected to the edge sheet portion 221. When the mask unit sheet part 220 includes a plurality of first grid sheet parts 223, each of the first grid sheet parts 223 preferably has the same pitch.

In addition, further, the second grid sheet portion 225 may be formed to extend along the second direction (vertical direction), and the second grid sheet portion 225 may be formed in a linear form, and both ends of the second grid sheet portion 225 may be connected to the edge sheet portion 221 . The first grid sheet part 223 and the second grid sheet part 225 may perpendicularly cross each other. When the mask unit sheet part 220 includes a plurality of second grid sheet parts 225, each of the second grid sheet parts 225 preferably has the same pitch.

On the other hand, the spacing between the first grid sheet portions 223 and the spacing between the second grid sheet portions 225 may be the same or different according to the size of the mask unit C.

Although the first grid sheet portion 223 and the second grid sheet portion 225 have a thin thickness in the form of a film, the shape of the cross section perpendicular to the length direction may be a rectangle, a quadrangular shape such as a trapezoid, a triangular shape, etc., Part of the sides and corners can be rounded. The cross-sectional shape can be adjusted during laser scribing, etching, etc.

The thickness of the edge frame part 210 may be greater than the thickness of the mask unit sheet part 220. Since the edge frame part 210 is responsible for the overall rigidity of the frame 200, it can be formed with a thickness of several mm to several tens of cm.

Regarding the mask unit sheet portion 220, the process of manufacturing a thick sheet is actually difficult. If it is too thick, the organic source 600 (refer to FIG. 25) may block the path through the mask 100 during the OLED pixel deposition process. On the contrary, if it is too thin, it may be difficult to ensure sufficient rigidity to support the mask 100. Thus, the mask unit sheet portion 220 is preferably thinner than the thickness of the edge frame portion 210, but thicker than the mask 100. The thickness of the mask unit sheet part 220 may be about 0.1 mm to 1 mm. In addition, the width of the first grid sheet portion 223 and the second grid sheet portion 225 may be about 1 to 5 mm.

In the planar sheet, in addition to the area occupied by the edge sheet portion 221, the first grid sheet portion 223, and the second grid sheet portion 225, a plurality of mask unit regions CR (CR11 to CR56) may be provided . From another perspective, the mask unit area CR may refer to the hollow area R of the edge frame portion 210, except for the edge sheet portion 221, the first grid sheet portion 223, and the second grid sheet portion 225. Blank area outside of the occupied area.

As the cell C of the mask 100 corresponds to the mask cell region CR, it can actually be used as a channel for depositing pixels of the OLED through the mask pattern P. As described above, one mask unit C corresponds to one display of a smartphone or the like. A mask pattern P for constituting one cell C may be formed in one mask 100. Alternatively, one mask 100 has multiple cells C and each cell C can correspond to each cell area CR of the frame 200. However, in order to accurately align the mask 100, a large area mask 100 needs to be avoided, and one cell C is preferred. The small area mask 100. Alternatively, one mask 100 having a plurality of cells C may correspond to one cell region CR of the mask 200. At this time, in order to accurately align, it can be considered that the mask 100 having 2-3 cells C corresponds to one cell region CR of the mask 200.

The mask 200 includes a plurality of mask cell regions CR, and each mask 100 can be attached so that each mask cell C corresponds to each mask cell region CR. Each mask 100 may include a mask unit C in which a plurality of mask patterns P are formed, and a dummy portion around the mask unit C (equivalent to a portion of the mask film 110 other than the unit C). The dummy part may include only the mask film 110, or may include the mask film 110 formed with a predetermined dummy pattern in a similar form to the mask pattern P. The mask unit C corresponds to the mask unit region CR of the frame 200, and a part or all of the dummy part may be attached to the frame 200 (mask unit sheet part 220). Thus, the mask 100 and the frame 200 may form an integrated structure.

On the other hand, according to another embodiment, the frame is not manufactured by attaching the mask unit sheet part 220 to the edge frame part 210, but can be used in the hollow area R part of the edge frame part 210 to be directly formed with the edge frame The part 210 becomes a frame of an integrated grid frame (equivalent to the grid sheet parts 223 and 225). The frame of this form also includes at least one mask unit region CR, and the mask 100 can be made to correspond to the mask unit region CR to manufacture a frame-integrated mask.

Hereinafter, the manufacturing process of the frame-integrated mask will be described.

First, the frame 200 described in FIG. 4 and FIG. 5 may be provided. FIG. 6 is a schematic diagram showing the manufacturing process of the frame 200 according to an embodiment of the present invention.

Referring to FIG. 6(a), an edge frame part 210 is provided. The edge frame part 210 may be a box shape including a hollow area R.

Next, referring to FIG. 6(b), the mask unit sheet portion 220 is manufactured. The mask unit sheet portion 220 uses rolling, electroforming, or other film forming processes to manufacture a planar sheet, and then removes the mask unit region CR by laser scribing, etching, etc., so that it can be manufactured. In this specification, description is given by taking the formation of 6×5 mask cell regions CR (CR11 to CR56) as an example. There may be five first grid sheet parts 223 and four second grid sheet parts 225.

Then, the mask unit sheet part 220 may correspond to the edge frame part 210. In the corresponding process, the edge sheet part 221 and the edge frame part 210 may be stretched on all sides of the F1~F4 mask unit sheet part 220 to make the mask unit sheet part 220 stretched flat. correspond. It is also possible to sandwich and stretch the mask unit sheet portion 220 at a plurality of points (as an example of FIG. 6(b), 1 to 3 points) on one side. On the other hand, the F1 and F2 mask unit sheet parts 220 may be stretched along the direction of a part of the sides instead of all sides.

Then, when the mask unit sheet part 220 is made to correspond to the edge frame part 210, the edge sheet part 221 of the mask unit sheet part 220 can be attached by welding W method. Preferably, all sides of W are welded so that the mask unit sheet part 220 is firmly attached to the edge frame part 210, but it is not limited thereto. The welding W should be carried out as close as possible to the corners of the frame portion 210 to minimize the warped space between the edge frame portion 210 and the mask unit sheet portion 220 and improve the adhesion. The welding W part can be generated in a line or spot shape, has the same material as the mask unit sheet part 220, and can be a unit that connects the edge frame part 210 and the mask unit sheet part 220 into one body medium.

Fig. 7 is a schematic diagram showing a manufacturing process of a frame according to another embodiment of the present invention. The embodiment of FIG. 6 first manufactures the mask cell sheet portion 220 with the mask cell region CR, and then attaches it to the edge frame portion 210, while the embodiment of FIG. 7 attaches a flat sheet to the edge frame portion 210, A portion of the mask cell region CR is formed.

First, the edge frame portion 210 including the hollow region R is provided in the same manner as in (a) of FIG. 6.

Then, referring to FIG. 7( a ), a planar sheet (a planar mask unit sheet portion 220 ′) can be made to correspond to the edge frame portion 210. The mask cell sheet portion 220' is in a planar state in which the mask cell region CR has not yet been formed. In the corresponding process, all sides of the F1 to F4 mask unit sheet portion 220 ′ may be stretched to make the mask unit sheet portion 220 ′ flat and stretched to make it correspond to the edge frame portion 210. It is also possible to sandwich the unit sheet portion 220' at a plurality of points (as an example of FIG. 7(a), 1 to 3 points) and stretch the unit sheet portion 220' on one side. On the other hand, the F1 and F2 mask unit sheet portions 220' may be stretched along a part of the side portions instead of all the side portions.

Then, when the mask unit sheet portion 220' corresponds to the edge frame portion 210, the edge portion of the mask unit sheet portion 220' can be attached by welding W. Preferably, all sides of W are welded so that the mask unit sheet part 220' is firmly attached to the edge frame part 220, but it is not limited thereto. The welding W should be carried out as close as possible to the corners of the edge frame portion 210, so as to minimize the warping space between the edge frame portion 210 and the mask unit sheet portion 220' and improve the adhesion. The welding W part can be generated in a line or spot shape, which has the same material as the mask unit sheet part 220', and can be integrated into the edge frame part 210 and the mask unit sheet part 220' Medium.

Then, referring to FIG. 7( b ), the mask cell region CR is formed on the planar sheet (the planar mask cell sheet portion 220 ′). By laser scribing, etching, etc., the sheet material in the portion of the mask cell region CR is removed, so that the mask cell region CR can be formed. In this specification, description is given by taking the formation of 6×5 mask cell regions CR (CR11 to CR56) as an example. When the mask cell region CR is formed, the mask cell sheet portion 220 may be formed, in which the portion welded W to the edge frame portion 210 becomes the edge sheet portion 221, and is provided with five first grid sheet portions 223 and 4 second grid sheet parts 225.

FIG. 8 is a schematic diagram showing a mask used to form an existing high-resolution OLED.

In order to realize a high-resolution OLED, the size of the pattern gradually becomes smaller, and the thickness of the mask metal film used therefor must also become thinner. As shown in FIG. 8(a), if a high-resolution OLED pixel 6 is to be realized, the pixel interval and pixel size, etc. (PD->PD') need to be reduced in the mask 10'. In addition, in order to prevent the OLED pixels 6 from being deposited unevenly due to the shadow effect, it is necessary to form the pattern of the mask 10 ′ at an angle 14. However, in the process of forming the pattern 14 obliquely in a thicker mask 10' having a thickness T1 of about 30-50㎛, it is difficult to form a pattern 13 matching it due to the fine pixel interval PD' and pixel size. , So it becomes a factor that causes the yield to decrease in the processing technology. In other words, in order to have a fine pixel interval PD' and to form the pattern 14 obliquely, it is necessary to use a thinner mask 10'.

In particular, in order to achieve high resolution of the UHD level, as shown in FIG. 8(b), only a thin mask 10' with a thickness T2 of 20 mm or less can be used for fine patterning. In addition, in order to achieve ultra-high resolution above UHD, a thin mask 10' with a thickness T2 of 10㎛ can be considered.

FIG. 9 is a schematic diagram showing a mask 100 according to an embodiment of the present invention.

The mask 100 may include a mask unit C formed with a plurality of mask patterns P and a dummy part DM around the mask unit C. As described above, the mask 100 can be manufactured using a metal sheet produced by electroforming or the like by a calendering process, and a cell C can be formed in the mask 100. The dummy portion DM corresponds to the mask film 110 [mask metal film 110] except for the cell C, and may include only the mask film 110, or include a predetermined dummy portion pattern formed with a form similar to the mask pattern P Mask film 110. The dummy part DM corresponds to the edge of the mask 100 and a part or all of the dummy part DM may be attached to the frame 200 [mask unit sheet part 220].

The width of the mask pattern P may be less than 40㎛, and the thickness of the mask 100 may be about 5-20㎛. Since the frame 200 has a plurality of mask cell regions CR (CR11~CR56), it may also have a plurality of masks 100 which have a mask cell corresponding to each mask cell region CR (CR11~CR56) C(C11~C56).

Since one side 101 of the mask 100 is in contact with and attached to the side of the frame 200, it is preferably a flat surface. The planarization process described below can be used to planarize and mirror-surface one side 101. The other side 102 of the mask 100 may face one side of the template 50 described below.

In the following, the mask metal film 110' will be manufactured and supported on the template 50 to manufacture the mask 100. The frame is manufactured by mounting the template 50 supporting the mask 100 on the frame 200 and attaching the mask 100 to the frame 200. The device of the integrated mask and a series of manufacturing processes will be described.

10 and 11 are a schematic plan view and a schematic front view showing a manufacturing apparatus 10 of a frame-integrated mask according to an embodiment of the present invention. FIG. 12 is a partially enlarged schematic diagram of a manufacturing apparatus 10 for a frame-integrated mask according to an embodiment of the present invention. According to an embodiment, in FIGS. 10 to 12, the frame 200 has a 2×5 mask unit area CR (CR11 to CR52) as an example for description.

10 to 12, the frame-integrated mask manufacturing apparatus 10 includes a table 15, a table section 20, a clamp section 30, a clamp moving section 40, a head 60, a head moving section 70, a vibration absorbing table 80, and the like.

First, a table 15 also called a gantry is installed on a structure, and the structure is firmly installed on the ground to prevent external vibration or impact. In order to make the process performed on the table 15 more trustworthy, the upper surface of the table 15 should form an accurate horizontal plane.

The table 15 is provided with a workbench part 20 for placing and supporting the frame 200. The workbench part 20 may include a loading part 21, a frame alignment unit 23 and a frame support unit 25. Moreover, a heating unit (not shown) and a backlight unit (not shown) may also be included.

The loading portion 21 can correspond to the body of the table portion 20, and has a wide plate shape, so that an area for loading the frame 200 can be provided. The table 15 may further include a table moving part 27, which can move the table part 20 [or the loading part 21] in at least any one of the X, Y, Z, and θ axes. The θ-axis direction can refer to the angle of rotation on the XY plane, YZ plane, and XZ plane. In order to enable the loading part 21 to move in the Y-axis direction, the table moving part 27 is shown in the form of a rail in FIGS. 10 and 11. However, it is not limited to this. In order to move/rotate in various directions, well-known moving/rotating means such as rails, belts, chain rails, engines, gears, etc. can be used.

The frame aligning unit 23 is arranged on each side or each corner of the frame supporting portion 25 or the frame 200 so as to align the position of the frame 200.

In order to place and support the frame 200, the frame support unit 25 may have a quadrangular frame shape similar to the frame 200, and may be arranged on the loading part 21 or the frame aligning part 23. The frame support unit 25 can prevent the edge frame part 210 and the mask unit sheet part 220 from being deformed due to tension in the process of attaching the mask 100 to the frame 200. The frame support unit 25 may be arranged in a form close to the frame 200 at the lower part of the frame 200. The frame support unit 25 may be formed with a plurality of grooves into which the edge frame part 210 and the grid frame part 220 are inserted completely in a consistent manner, and the frame 200 may be arranged in a form of being inserted into the plurality of grooves. Therefore, even in a state where the mask 100 is attached to the frame 200 and tension is applied, the deformation of the frame 200 can be prevented. The frame support unit 25 may also be integrally formed with the lower support unit 90 described later in FIG. 19.

After a mask 100 is attached to the cell C, if the mask 100 is attached to the adjacent cell C, the adjacent mask 100 will exert an opposite force on the frame 200 arranged in the middle, resulting in the application of the mask 100 on the frame 200 The tensions can cancel each other out. Before the above tensions cancel each other out, that is, when only one mask 100 is attached, by mounting and accommodating the frame 200 on the frame supporting unit 25, the frame 200 can be prevented from being deformed during the mask 100 attaching process. Of course, the process of attaching the mask 100 to the frame 200 after raising the temperature of the process area to the first temperature described later can prevent tension from being applied to the frame 200.

The heating unit 29 may control the temperature of a process area in the process of attaching the mask 100 to the frame 200 or may heat the frame 200. The heating unit 29 may be arranged at the lower portion of the frame support unit 25 or the lower support unit 90 described later in FIG. 19. But not limited to this, the arrangement position can be adjusted within the range of controlling the temperature of the process area or heating the frame.

The heating unit 29 can raise the temperature of the process area to a first temperature, and can be controlled to lower the temperature of the process area to a second temperature lower than the first temperature and maintain it.

The backlight unit (not shown) can help the camera unit 65 of the head 60 to confirm the alignment form of the mask pattern P by emitting light in the vertical upper portion (Z axis) direction. As the method of radiating light in the vertical upper direction, a transmission type which directly emits light and a reflection type which radiates light in the vertical lower direction after being reflected and then radiates light in the upper direction can be used.

The clamp part 30 may include a clamp unit 31, a clamp moving unit 35, and a connection unit 37. Moreover, a jig heating unit 34 may also be included. The clamp part 30 can clamp (grip) the template 50 for bonding and supporting the mask 100. At this time, the clamping may be performed by sucking at least a part of the upper surface of the template 50. Alternatively, the clamping may include a form capable of holding a part of the template 50 and performing work within a range that does not affect the mask 100.

The clamp unit 31 can be clamped by sucking the upper surface of the template 50. The clamp unit 31 may be formed in a form horizontal to the XY plane, and a plurality of suction units 32 may be formed on the lower surface.

The suction unit 32 may be separately connected to the lower part of the clamp unit 31, or may be a part of the clamp unit 31 formed in the form of suction holes. As the adsorption pressure is applied to the upper surface of the template 50 by the adsorption unit 32, the template 50 can be adsorbed on the lower surface of the clamp unit 31. Although the layout of the suction unit 32 is not limited, it is preferable that the area on the Z axis does not overlap with the welding part WP (area where laser welding is performed) of the mask 100 [refer to FIG. 9] in order not to hinder the entry path of the laser. .

The jig heating unit 34 can heat the template 50 [and the mask 100] clamped by the jig part 30. The jig heating unit 34 may preheat the template 50 and the mask 100 before the template 50 and the mask 100 are moved to the process area near the frame 200. The jig heating unit 34 is similar to the heating unit 29 and can preheat the template 50 and the mask 100 at the first temperature level. Thus, when the clamp part 30 clamps the template 50 [and the mask 100] and moves to the frame 200, since the attachment process is directly performed in the process area of the first temperature without waiting, it can help the process to proceed quickly.

The jig heating unit 34 can be included in the jig unit 31 in the form of a heating coil, but it is not limited to this, and it can also be a form in which a heating element is arranged on the surface of the jig unit 31, as long as it is preheated by heating the template 50 [and the mask 100] Within the scope of, it does not matter whether the clamp part 30 is arranged at any position.

In addition, in addition to the jig heating unit 34, the manufacturing apparatus 10 of the frame-integrated mask of the present invention may further include a preheating part 5. In FIGS. 10 and 12, although the preheating part 5 is illustrated as being arranged outside the table 15, it can also be arranged inside the table 15 within a range that does not affect the process area where the attaching process of the mask 100 and the frame 200 is performed. . However, the preheating part 5 is preferably arranged at a position where the clamp part 30 can be approached.

The preheating part 5 may provide a space for loading and preheating the template 50 supporting the mask 100 before the clamp part 30 clamps the template 50 [and the mask 100]. A heating element is arranged inside or outside the preheating part 5 so as to be able to heat the template 50 supporting the mask 100. The preheating part 5 is similar to the heating unit 29 and can preheat the template 50 and the mask 100 at the first temperature level. Therefore, before being clamped by the clamp part 30, the template 50 and the mask 100 are maintained at the first temperature level, so that when the clamp part 30 clamps the template 50 [and the mask 100] and moves to the frame 200, the first temperature can be directly The adhesion process is performed in the process area of the temperature level, which has the advantage of further shortening the standby time.

The clamp moving unit 35 can move the clamp unit 31 in at least any one of the X, Y, Z, and θ axes. In the present invention, the movement of the clamp unit 31 in the X-axis and Y-axis directions is performed by the clamp moving part 40 instead, and the description will be made assuming that the clamp moving unit 35 moves in the Z and θ-axis directions. The jig moving unit 35 can use well-known moving/rotating means capable of moving/rotating in various directions without limitation. In addition, an auxiliary unit 33 that functions as an intermediary in connecting the clamp unit 31 and the clamp moving unit 35 may also be included.

The connecting unit 37 may function as an intermediary for connecting the clamp moving unit 35 to the clamp moving part 40 [or the clamp supporting unit 43]. Furthermore, the connecting unit 37 can use a known moving/rotating means capable of moving/rotating the clamp moving unit 35 in the θ-axis direction without limitation. Therefore, the clamp unit 31 can rotate and approach the template 50 on the preheating part 5.

The clamp moving part 40 can move the clamp part 30 in at least any one of the X, Y, Z, and θ axes. Among them, the concept of movement should be understood as not only including fixing the clamp part 30 on the clamp moving part 40 by moving the clamp moving part 40 to at least any one of the X, Y, Z, and θ axes to make the clamp part 30 Moving together, but also includes moving only the clamp part 30 in a state where the clamp moving part 40 is not moving. In the present invention, it is assumed that the clip moving part 40 moves in the X and Y axis directions of the clip part 30, and the clip moving unit 35 or the clip support unit 45 moves in the Z and θ axis directions of the clip part 30.

The clamp moving part 40 may include a base unit 41, a clamp support unit 43 and a clamp rail unit 45.

The base unit 41 is in the form of a wide plate, and the upper part can provide a space for arranging the clamp support unit 43. Moreover, both sides are connected to the clamp rail unit 45 so as to be movable along the forming direction of the clamp rail unit 45.

The clamp support unit 43 may be arranged on the base unit 41 and used to support the clamp part 30. The jig support unit 43 is movable along the formation direction of the base rail unit 44 formed on the base unit 41.

The clamp rail unit 45 may be formed on both sides of the table part 20 along the formation direction of the table part 20 [or the loading part 21 ], and the base unit 41 may move on the clamp rail unit 45.

According to an embodiment, the table portion 20 is formed substantially along the X-axis direction long, and a double clamp rail unit 45 may be formed on the corner portion of the long side of the table portion 20 along the X-axis direction. Furthermore, the base unit 41 is formed to extend along the Y-axis direction, and both ends are respectively connected to a double clamp rail unit 45 so as to be movable in the X-axis direction. Furthermore, a base rail unit 44 may be formed on the base unit 41 along the Y-axis direction, and the clamp support unit 43 is connected to the base rail unit 44 so as to be movable in the Y direction.

The frame 200 is arranged on the left part of the table part 20, and the clamp part 30 and the clamp moving part 40 are arranged on the right part. The base unit 41 and the table portion 20 are arranged spaced apart on the Z axis. Therefore, even if the base unit 41 moves along the X-axis direction by the clamp rail unit 45 toward the area where the frame 200 on the left side is arranged, the frame 200 and the base unit 41 will not interfere with each other. Based on this, the template 50 clamped by the clamp part 30 supported on the base unit 41 can be mapped to the specific unit area CR on the frame 200.

The head 60 may be arranged on the upper part of the table part 20 or the clamp part 30. The head 60 can be provided with a laser unit 61 (61a, 61b), a camera unit 65, a gap sensor, a failure analysis unit 67, and the like.

The laser unit 61 can generate a laser L for welding the mask 100 and the frame 200. Alternatively, the laser unit 61 can also generate a cutting laser for laser trimming by irradiating the mask 100. A pair of laser units 61 (61a, 61b) are spaced apart and arranged in such a way that the positions of the X-axis and the Y-axis can be adjusted. The separation distance may correspond to the distance between the left welding part WP and the right welding part WP of the mask 100. When the laser L is irradiated in order to attach the mask 100 to the frame 200, it is not necessary to irradiate the laser L to the left/right welding parts WP of the mask 100, and the laser L only needs to be irradiated once to perform welding. Therefore, both sides of the mask 100 are attached to the frame 200 as above. Therefore, compared with the process of attaching one side at a time, the process time can be shortened, and the mask 100 can be attached to the frame 200 stably without deformation.

The camera unit 65 can sense by photographing the alignment state of the mask 100 and the mask pattern P. The gap sensor unit can measure the Z-axis displacement of the mask 100, or can sense the distance between the head 60 and the mask 100, the frame 200, and the like. The failure analysis unit can detect the failure state of the mask 100.

The head moving part 70 (71, 75) can move the head 60 in at least any one of the X, Y, and Z axes. The present invention will be described assuming that the head moving part 70 moves the head 60 to the X axis. The first head moving part 71 is connected to the upper part of the head 60 and receives the moving power, and the second head moving part 75 provided at a distance from the lower part of the first head moving part 71 is connected with the main components of the head 60, and the head 60 The X-axis guide 76 is guided to move in the X-axis direction.

In order to prevent the vibration of the table 15, a vibration absorbing table 80 may be provided. When the mask 100 is attached to the frame 200, even in an environment where a very small vibration occurs, the alignment error (PPA) of the mask pattern P will be affected. Therefore, the vibration absorbing table 80 may preferably be provided with a passive isolator (passive isolator) at the lower part of the table 15 to prevent vibration.

13 to 14 are schematic diagrams illustrating a process of manufacturing a mask support template by bonding a mask metal film 110 on a template 50 and forming a mask 100 according to an embodiment of the present invention.

Referring to (a) of FIG. 13, a template 50 (template) may be provided. The template 50 is a medium on which the mask 100 is attached to one surface and the mask 100 is moved while supporting the mask 100. One surface of the template 50 is preferably a flat surface to support and carry the flat mask 100. The central part 50a may correspond to the mask unit C of the mask metal film 110, and the edge part 50b may correspond to the dummy part of the mask metal film 110. In order to be able to support the mask metal film 110 as a whole, the area of the template 50 is larger than that of the mask metal film 110, and may have a flat shape.

The template 50 is preferably a transparent material to facilitate vision observation and the like during the process of aligning and attaching the mask 100 and the frame 200. In addition, when transparent materials are used, lasers can also pass through. As transparent materials, glass, silica, heat-resistant glass, quartz, alumina (Al2O3), borosilicate glass, zirconia, and other materials can be used. As an example, the template 50 may use BOROFLOAT® 33 material that has excellent heat resistance, chemical durability, mechanical strength, transparency, etc. among borosilicate glass. In addition, the thermal expansion coefficient of BOROFLOAT® 33 is about 3.3, and the thermal expansion coefficient is very small from the Invar mask metal film 110, which has the advantage of easy control of the mask metal film 110.

In addition, in order to prevent an air gap from occurring between the boundary with the mask metal film 110 [or the mask 100], the contact surface of the template 50 and the mask metal film 110 may be a mirror surface. Taking this into consideration, the surface roughness Ra of one side of the template 50 may be 100 nm or less. In order to realize the template 50 with a surface roughness Ra of 100 nm or less, the template 50 may use a wafer. The surface roughness Ra of a wafer is about 10 nm. There are many products on the market, and the surface treatment process is widely known, so it can be used as a template 50. Since the surface roughness Ra of the template 50 is on the nm level, it can be at a level with no air gap or almost no air gap, so that the bead WB is easily generated based on laser welding, and the alignment error of the mask pattern P is not affected.

In order for the laser L irradiated from the upper part of the template 50 to reach the welding part WP (area where welding is performed) of the mask 100 [refer to FIG. 9], a laser through hole 51 may be formed in the template 50. The laser through-holes 51 can be formed in the template 50 in a manner corresponding to the positions and the number of the welding parts WP. Since a plurality of welding parts WP are arranged at predetermined intervals on the edge of the mask 100 or the dummy part DM portion, the laser through-holes 51 are also formed in plural at predetermined intervals corresponding thereto. As an example, since a plurality of welding parts WP are arranged at predetermined intervals on both sides (left/right) of the dummy part DM of the mask 100, the laser through-holes 51 may also be arranged on both sides (left/right) of the template 50. A plurality of predetermined intervals may be formed.

The laser through-hole 51 does not necessarily correspond to the position and number of the welding part WP. For example, only a part of the laser through hole 51 may be irradiated with the laser L and welded. In addition, a part of the laser through-hole 51 that does not correspond to the welding part WP may be used instead of the alignment mark when aligning the mask 100 and the template 50. Assuming that the material of the template 50 is transparent to the light of the laser L, the laser through hole 51 may not be formed.

A temporary bonding part 55 may be formed on one side of the template 50. Before the mask 100 is attached to the frame 200, the temporary adhesive part 55 can temporarily attach the mask 100 [or the mask metal film 110] to one side of the template 50 and support it on the template 50.

The temporary adhesive part 55 may use an adhesive or adhesive sheet (thermal release type) that is separable based on heating, or an adhesive or adhesive sheet (UV release type) that is separable based on irradiation with UV.

As an example, liquid wax (liquid wax) can be used for the temporary bonding part 55. The liquid wax can be the same wax used in the polishing step of a semiconductor wafer or the like, and its type is not particularly limited. As a resin component mainly used to control adhesion and impact resistance related to maintaining power, liquid wax may include substances and solvents such as acrylic acid, vinyl acetate, nylon, and various polymers. As an example, the temporary adhesive part 55 may use SKYLIQUIDABR-4016 including Acrylonitrilebutadiene rubber (ABR) as a resin component and n-propanol as a solvent component. A spin coating method is used to form liquid wax on the temporary bonding part 55.

Temporary adhesive part 55, which is a liquid wax, decreases in viscosity at a temperature higher than 85°C to 100°C, and increases in viscosity at a temperature lower than 85°C. A part of it can be solidified as a solid, so that the mask metal film 110 can be combined with The template 50 is fixedly bonded.

The mask metal film 110 may be prepared before or after the template 50 is prepared.

As an example, the mask metal film 110 may be prepared by calendering. The metal sheet manufactured by the calendering process may have a thickness of tens to hundreds of ㎛ based on the manufacturing process. As described above in Figure 8, in order to obtain UHD-level high resolution, only a thin mask metal film 110 with a thickness of 20㎛ or less can be used for fine patterning. In order to obtain ultra-high resolution above UHD, it is necessary to use A thin mask metal film 110 having a thickness of 10㎛. However, the mask metal film 110' generated by the rolling process has a thickness of about 25 to 500 mm, so it is necessary to reduce the thickness.

Therefore, a process of planarizing one side of the masking metal film 110' of the PS [refer to FIG. 13(b)] can be further performed. Among them, the planarization PS means that one side (upper surface) of the mask metal film 110' is mirror-finished, and the upper part of the mask metal film 110' is partially removed to make the thickness thinner. The planarization PS can be performed by the CMP (Chemical Mechanical Polishing) method, and it can be used without limitation as long as it is a well-known CMP method. In addition, the thickness of the mask metal film 110' can be reduced by using a chemical wet etching or dry etching method. In addition to this, a planarization process that thins the thickness of the mask metal film 110' can be used without limitation.

In the process of performing the planarization PS, as an example, during the CMP process, the surface roughness Ra of the upper surface of the mask metal film 110' can be controlled. Preferably, mirroring for further reducing the surface roughness can be performed. Or, as another example, after the PS is planarized through a chemical wet etching or dry etching process, an additional polishing process such as a CMP process may be additionally performed to reduce the surface roughness Ra.

In this way, the mask metal film 110' can be made into a thinner thickness of about 50 mm or less. Therefore, the thickness of the mask metal film 110 is preferably about 2 ㎛ to 50 ㎛, and more preferably about 5 ㎛ to 20 ㎛. But it is not necessarily limited to this.

As another example, the mask metal film 110 may be prepared by electroforming.

In order to be able to perform electroforming, the base material of the motherboard may be a conductive material. The mother board can be used as a cathode electrode in electroforming.

As a conductive material, for metals, metal oxides may be formed on the surface, and impurities may be doped in the metal manufacturing process. For polysilicon substrates, there may be inclusions or grain boundaries (GrainBoundary). For conductive polymer substrates, There may be a high possibility of impurities, and may be weak in strength and acid resistance. Elements such as metal oxides, impurities, inclusions, and grain boundaries that hinder the uniform formation of electromagnetic fields on the surface of the mother board (or cathode) are called "Defects". Due to the defect (Defect), a uniform electromagnetic field cannot be introduced into the cathode of the above-mentioned material, so that a part of the plating film 110 [or the mask metal film 110] can be formed unevenly.

In the process of realizing ultra-high image quality pixels above the UHD level, the unevenness of the coating film and the coating pattern [mask pattern P] will adversely affect the formation of the pixel. For example, the current QHD image quality is 500~600PPI (pixel per inch), and the pixel size is about 30~50㎛, while 4K UHD and 8K UHD have higher resolutions of ~860PPI, ~1600PPI. In addition, the micro-display directly applied to the VR machine or the micro-display inserted into the VR machine aims at ultra-high image quality above about 2000PPI, and the pixel size is about 5-10μm. The pattern width of the FMM and shadow mask used here can be several μm to several tens of μm, preferably less than 30 μm. Therefore, even defects of several μm occupy a large proportion in the pattern size of the mask. Moreover, in order to remove the defects in the cathode of the above-mentioned materials, an additional process for removing metal oxides, impurities, etc. may be performed, and other defects such as etching of the cathode material may also be caused in this process.

Therefore, the present invention can use a mother board (or cathode) of a single crystal material. In particular, it is preferably a single crystal silicon material. In order to have conductivity, a high-concentration doping of ^{10 19} /cm ³ or more can be performed in the mother board of monocrystalline silicon material. The doping can be performed on the entire motherboard or only on the surface of the motherboard.

In addition, as single crystal materials, metals such as Ti, Cu, Ag, semiconductors such as GaN, SiC, GaAs, GaP, AlN, InN, InP, Ge, and carbon-based materials such as graphite and graphene can be used, including _{CH 3 NH 3 PbCl 3, CH} 3 NH 3 PbBr 3, CH 3 NH 3 PbI 3, SrTiO 3 perovskite-like (Transition of perovskite) crystal structure of the ceramic superconductor, aircraft parts and the like with the single crystal superalloy. Metals and carbon-based materials are basically conductive materials. For semiconductor materials, doping at a high concentration of ^{10 19} /cm ³ or more can be performed in order to have conductivity. For other materials, conductivity can be formed by doping or forming oxygen vacancy. The doping can be performed on the entire motherboard or only on the surface of the motherboard.

For the single crystal material, since it does not have defects, it has the advantage of uniformly forming an electromagnetic field on the entire surface during electroforming, so that the plating film 110 can be uniformly formed. The frame-integrated masks 100 and 200 manufactured by uniform coating can further improve the image quality level of OLED pixels. In addition, since there is no need to perform additional processes for removing and resolving defects, it has the advantages of reducing process costs and improving production efficiency.

By using a conductive substrate as a mother board [cathode (Cathode Body)] and arranging anodes (not shown) apart, electroforming can be used to form a plating film 110 [or a mask metal film 110 on the conductive substrate ].

Then, the plating film 110 may be separated from the conductive substrate.

In addition, before separating the plating film 110 from the conductive substrate, heat treatment H may be performed. In order to reduce the thermal expansion coefficient of the mask 100 and to prevent deformation of the mask 100 and the mask pattern P due to heat, heat treatment is performed before the plating film 110 is separated from the conductive base material [or mother board, cathode]. The heat treatment can be performed at a temperature of 300°C to 800°C.

Generally, the thermal expansion coefficient of Invar alloy sheet produced by electroforming is higher than that of Invar alloy sheet produced by rolling. Therefore, the thermal expansion coefficient of the Invar alloy sheet can be reduced by heat treatment, but the Invar alloy sheet may be deformed during the heat treatment process. Therefore, if the plating film 110 is formed on a part of the upper surface, side surface, and lower surface of the conductive substrate in the state of being bonded to the conductive substrate, even if heat treatment is performed, peeling, deformation, etc. will not occur, so that it can be The heat treatment is performed stably.

The thickness of the mask metal film 110 generated by the electroforming process may be thinner than that of the mask metal film 110 generated by the calendering process. Therefore, although the planarization PS process for reducing the thickness can also be omitted, the composition, crystal structure/fine structure of the surface layer of the gold-plated mask metal film 110 may have different etching characteristics, so it is necessary to planarize the PS. Control surface characteristics and thickness.

Then, referring to (b) of FIG. 13, the mask metal film 110 ′ may be bonded on the template 50. The liquid wax is heated to 85° C. or higher, and after the mask metal film 110' is in contact with the template 50, the mask metal film 110' and the template 50 are passed between the rollers to perform bonding.

According to one embodiment, after baking on the template 50 at about 120° C. for 60 seconds, and vaporizing the solvent of the temporary bonding portion 55, the mask metal film lamination process can be performed immediately. The lamination is performed by loading the mask metal film 110' on the template 50 with the temporary bonding part 55 formed on one surface and passing it between the upper roll of about 100°C and the lower roll of about 0°C. As a result, the mask metal film 110 ′ can be in contact with the template 50 with a temporary adhesive part 55 interposed therebetween.

FIG. 15 is an enlarged schematic cross-sectional view showing the temporary bonding part 55 according to an embodiment of the present invention. As another example, thermal release tape may be used for the temporary bonding part 55. A core film 56 (core film) such as a PET film is arranged in the middle of the thermal release tape, and thermal release adhesive layers 57a, 57b (thermal release adhesive) are arranged on both sides of the core film 56. The outer contours of the adhesive layers 57a, 57b can be It is a form in which release films/release films 58a and 58b are arranged. Among them, the mutual peeling temperature of the adhesive layers 57a, 57b arranged on both sides of the core film 56 may be different from each other.

According to one embodiment, with the release film/release film 58a, 58b removed, the lower surface of the thermal peeling tape [the second adhesive layer 57b] is adhered to the template 50, and the upper surface of the thermal peeling tape [the first adhesive layer] 57a] can be bonded to the mask metal film 110'. Since the first adhesive layer 57a and the second adhesive layer 57b have different peeling temperatures, when the template 50 is separated from the mask 100 in FIG. 20 described later, by applying heat to peel off the first adhesive layer 57a, the mask 100 can be separated from the template 50 and the temporary bonding part 55.

Next, referring to FIG. 13(b) again, one side of the PS mask metal film 110' can be planarized. As described above, the mask metal film 110' manufactured by the calendering process can be reduced in thickness (110'->110) by the planarization PS process. In addition, in order to control the surface characteristics and thickness of the mask metal film 110 manufactured by the electroforming process, a planarization PS process may also be performed.

Thus, as shown in (c) of FIG. 13, as the thickness of the mask metal film 110 ′ decreases (110 ′->110 ), the thickness of the mask metal film 110 may be about 5 ㎛ to 20 ㎛.

Then, referring to (d) of FIG. 14, the patterned insulating portion 25 may be formed on the mask metal film 110. The insulating portion 25 may be formed of a photoresist material using a printing method or the like.

Next, the mask metal film 110 may be etched. At this time, methods such as dry etching, wet etching, etc. can be used without limitation, and as a result of the etching, the portion of the mask metal film 110 exposed from the blank space 26 between the insulating portions 25 can be etched. The etched portion of the mask metal film 110 constitutes the mask pattern P, so that the mask 100 formed with a plurality of mask patterns P can be manufactured.

Then, referring to (e) of FIG. 14, the manufacturing of the template 50 for supporting the mask 100 can be completed by removing the insulating portion 25.

Since the frame 200 has a plurality of mask unit regions CR, it may also have a plurality of masks 100 having a mask unit C corresponding to each mask unit region CR. In addition, there may be a plurality of templates 50 for supporting the plurality of masks 100 respectively.

FIG. 16 is a schematic diagram showing a process of loading a mask support template on a frame according to an embodiment of the present invention.

Referring to FIG. 16, the template 50 may be transferred through the clamp part 30. The suction unit 32 of the jig part 30 can perform simultaneous transfer by suctioning the back surface of the template 50 to which the mask 100 is adhered. The clamp part 30 is transferred by absorbing the template 50, and the mask 100 is adhered and supported on the template 50 by the temporary bonding part 55. Therefore, the process of transferring the template 50 to the frame 200 will not affect the adhesive state of the mask 100. And the alignment status has an impact.

FIG. 17 is a schematic diagram showing a state in which the template 50 is loaded on the frame 200 after the temperature of the process area is increased, and the mask 100 is corresponding to the cell area CR (CR11 to CR52) of the frame 200 according to an embodiment of the present invention. The following takes the frame 200 with 2×5 mask cell regions CR (CR11 to CR52) as an example for description. Although FIG. 17 exemplifies an example of corresponding/attaching one mask 100 to the cell region CR, it can also be performed by attaching a plurality of masks 100 to all the cell regions CR at the same time to attach the mask 100 to the frame 200. On the process. In this case, there may be multiple templates 50 for supporting multiple masks 100 respectively.

Then, referring to FIG. 17, after the temperature of the process area is increased by ET, the mask 100 can be mapped to one mask cell area CR of the frame 200. The present invention is characterized in that in the process of mapping the mask 100 to the mask unit area CR of the frame 200, no stretching force is applied to the mask 100.

Since the mask unit sheet portion 220 of the frame 200 has a very thin thickness, if the mask 100 is attached to the mask unit sheet portion 220 in a state where a stretching force is applied, the remaining stretch on the mask 100 Force may act on the mask unit sheet portion 220 and the mask unit area CR and deform them. Therefore, the mask 100 should be attached to the mask unit sheet portion 220 in a state where no tensile force is applied to the mask 100. Therefore, it is possible to prevent the tensile force applied to the mask 100 from acting on the frame 200 in the form of tension to deform the frame 200 [or the mask unit sheet portion 220].

However, the mask 100 is attached to the frame 200 [or the mask unit sheet portion 220] without applying tensile force to manufacture a frame-integrated mask, and the frame-integrated mask can be used in a pixel deposition process. A problem occurred. When the pixel deposition process is performed at a temperature of about 25 to 45° C., the mask 100 expands by a predetermined length. Even for the mask 100 made of Invar alloy material, its length will vary by about 1 to 3 ppm based on a temperature rise of about 10° C. for forming the atmosphere of the pixel deposition process. For example, when the total length of the mask 100 is 500 mm, its length can be increased by about 5 to 15 mm. As a result, the mask 100 sags due to its own weight, or the mask 100 is stretched while being fixed to the frame 200 and deformed such as twisting, and at the same time, a problem in which the alignment error between the patterns P increases.

Therefore, the present invention is characterized in that it corresponds to and adheres to the mask unit area CR of the frame 200 in a state where no tensile force is applied to the mask 100 at an extraordinary temperature higher than normal temperature. In this specification, it is described that the mask 100 is correspondingly attached to the frame 200 after the temperature of the process area is raised to the first temperature ET.

The "process area" may refer to a space for placing constituent elements such as the mask 100 and the frame 200, and for performing an attaching process of the mask 100 and the like. The process area can also be a space in a closed chamber or an open space. Moreover, the “first temperature” may refer to a temperature equal to or higher than the temperature of the pixel deposition process when the frame-integrated mask is used in the OLED pixel deposition process. Considering that the temperature of the pixel deposition process is about 25°C to 45°C, the first temperature may be about 25°C to 60°C. The temperature increase of the process area can be performed by driving the heating unit 29 or installing heating means in the chamber, or installing heating means around the process area, or the like.

17 again, after the temperature of the process area including the frame 200 is increased to the first temperature ET, the mask 100 may be mapped to the mask cell area CR. Alternatively, after the mask 100 is mapped to the mask cell area CR, the temperature of the process area including the frame 200 may be increased to the first temperature ET.

By loading the template 50 on the frame 200 [or the mask unit sheet part 220], the mask 100 can be mapped to the mask unit area CR. While controlling the position of the jig section 30, it is possible to observe through the camera unit 65 of the head 60 whether the mask 100 corresponds to the mask unit area CR. Since the template 50 presses the mask 100, the mask 100 can be closely attached to the frame 200. Since the mask 100 can be mapped to the mask unit region CR by controlling the position of the template 50, it is not necessary to directly apply any stretching force to the mask 100.

In addition, the lower support unit 90 [refer to FIG. 19] may also be arranged at the lower portion of the frame 200. The lower support unit 90 may be integrally formed with the frame support unit 26. The lower supporting unit 90 may have a size just to fit into the hollow area of the frame edge portion 210 and have a flat plate shape. Furthermore, a predetermined support groove (not shown) corresponding to the shape of the mask unit sheet portion 220 may be formed on the upper surface of the lower support unit 90. In this case, since the edge sheet portion 221, the first grid sheet portion 223, and the second grid sheet portion 225 are inserted in the supporting groove, the mask unit sheet portion 220 is more firmly fixed.

The lower support unit 90 may press the reverse surface of the mask unit region CR with which the mask 100 contacts. That is, the lower support unit 90 supports the mask unit sheet portion 220 in the upward direction, thereby preventing the mask unit sheet portion 220 from sagging in the downward direction during the attaching process of the mask 100. At the same time, by making the lower support unit 90 and the template 50 squeeze the edges of the mask 100 and the frame 200 [or the mask unit sheet portion 220] in opposite directions, the mask 100 can be maintained in an aligned state. Was disrupted.

In this way, only by attaching the mask 100 to the template 50 and loading the template 50 on the frame 200, the process of mapping the mask 100 to the mask unit area CR of the frame 200 can be ended, and the process can be corrected. The mask 100 does not apply any tensile force.

FIG. 18 is a schematic diagram showing a process of attaching the mask 100 to the frame 200 according to an embodiment of the present invention.

Then, the mask 100 may be irradiated with laser L and attached to the frame 200 based on laser welding. A welding bead WB is generated on the welding part WP of the mask welded by the laser, and the welding bead WB may have the same material as the mask 100/frame 200 and be integrally connected with them. A pair of laser units 61a and 61b arranged apart can be welded by irradiating the laser L to the left welding part WP and the right welding part WP of the mask 100 at the same time.

FIG. 19 is a schematic diagram showing a state in which suction force is applied to the mask 100 through the suction holes 229 according to an embodiment of the present invention.

In addition, according to another embodiment, a plurality of suction holes 229 may be formed near the corners of the frame 200 where the mask unit region CR exists. Specifically, a plurality of suction holes 229 may be formed at a portion separated by a predetermined distance from the corners of the mask unit sheet portion 220, and more specifically, may be formed at a portion separated by a predetermined distance from the inner corners of the edge sheet portion 221 and In the part separated by a predetermined distance from the corners of the first grid sheet portion 223 and the second grid sheet portion 225.

The shape, size, etc. of the plurality of adsorption holes 229 are not limited in any way within the range capable of serving the purpose of the vacuum adsorption pressure. However, it is preferable that the positions of the plurality of suction holes 229 do not overlap with the welding part WP of the mask 100. If the welding part WP overlaps with the suction hole 229, the mask 100 and the frame 200 [or the mask unit sheet part 220] are not in close contact, and therefore the bead WB cannot be generated by laser welding as required. Preferably, a plurality of suction holes 229 are formed in a part close to the welding part WP so that the welding part WP part of the mask 100 can be more closely attached to the frame 200 [or the mask unit sheet part 220].

As shown in FIG. 19, if the template 50 is loaded on the frame 200 [or the mask unit sheet portion 220], a part of the lower surface of the mask 100 abuts against the upper portion of the frame 200 [or the mask unit sheet portion 220] . The upper part of the suction hole 229 formed in the frame 200 [or the mask unit sheet portion 220] corresponds to the lower surface of the mask 100, and the suction force (suction pressure) applying means corresponding to the lower part of the suction hole 229 will be sucked through the suction hole 229 The force VS [or suction pressure VS] is applied to the mask 100 so that the part of the mask 100 corresponding to the suction hole 229 can be pulled. As a result, the mask 100 can be more closely attached to the frame 200, and the bead WB can be generated more stably when laser welding is performed.

The upper part of the lower support unit 90 may be formed with a suction part 95. The suction part 95 is preferably arranged at a position corresponding to the suction hole 229 formed on the frame 200 [or the mask unit sheet part 220]. In other words, the adsorption part 95 may be arranged at a position where the adsorption force VS [or the adsorption pressure VS] can be collectively applied to the adsorption hole 229 on the lower support unit 90. The adsorption part 95 can use a well-known vacuum adsorption device, and can be connected to an external adsorption pressure generating means. As an example, a vacuum pipe 96 is formed inside the lower support unit 90, the other end is connected to an external suction pressure generating means (not shown) such as a pump, and one end can be connected to the suction part 95. A plurality of holes, slits, etc. are formed on the upper surface of the suction part 95 connected to the vacuum pipe 96, so that it can be used as a passage for applying suction pressure. The external suction pressure generating means is connected to the plurality of vacuum pipes 96 of the lower support unit 90, so that the suction pressure of each vacuum pipe 96 can be controlled individually, or the suction pressure of all vacuum pipes 96 can be controlled at the same time.

The suction portion 95 of the lower support unit 90 provides suction force VS [or suction pressure VS], and the suction force VS is applied to the mask 100 through the suction holes 229, whereby the mask 100 can be received to the suction portion 95 side (lower side) ) Of the pull. At the same time, the interface of the mask 100 and the frame 200 [or the main unit sheet portion 220] can be in close contact with each other.

Since the suction part 95 strongly pulls the mask 100, there is no fine air gap between the interface of the mask 100 and the frame 200. As a result, since the mask 100 and the frame 200 [the enlarged view of FIG. 19, the first grid sheet portion 223] are in close contact, even if the laser L is irradiated to any position of the welding part WP, the welding bead WB can be hidden. The mold 100 and the frame 200 are well generated. The solder ball WB connects the mask 100 and the frame 200 integrally, and thus has an advantage that the soldering can be performed stably.

As described in FIG. 10, the lower support unit 90 may also be integrally formed with the frame support unit 25. 19 again, a heating unit 29 is arranged at the lower portion of the lower support unit 90 [frame support unit 25] so that the temperature of the process area can be controlled to the first temperature, the second temperature, etc. by heating.

FIG. 20 is a schematic diagram showing a process of separating the mask 100 from the template 50 after attaching the mask 100 to the frame 200 according to an embodiment of the present invention.

Referring to FIG. 20, after the mask 100 is attached to the frame 200, the mask 100 and the template 50 may be debonded. The separation of the mask 100 and the template 50 can be performed by heating EP, chemical treatment CM, applying ultrasonic waves US, and applying ultraviolet UV to the temporary bonding part 55 by at least any one of them. Since the mask 100 remains attached to the frame 200, only the template 50 can be lifted. As an example, if heat EP at a temperature higher than 85° C. to 100° C. is applied, the viscosity of the temporary bonding portion 55 decreases, and the adhesive force between the mask 100 and the template 50 is weakened, so that the mask 100 and the template 50 can be separated. As another example, the mask 100 and the template 50 can be separated by immersing the temporary bonding part 55 in a chemical substance such as IPA, acetone, ethanol, etc. to dissolve or remove the temporary bonding part 55. As another example, the adhesive force between the mask 100 and the template 50 is weakened by applying ultrasonic waves US or applying ultraviolet rays, so that the mask 100 and the template 50 can be separated.

Furthermore, the temporary bonding part 55 as a medium for bonding the mask 100 and the template 50 is a TBDB bonding material (temporary bonding & debonding adhesive), so that various debonding methods can be used.

As an example, a solvent separation (Solvent Debonding) method based on chemical treatment of CM can be used. The temporary bonding part 55 can be dissolved and separated based on the penetration of a solvent. At this time, the pattern P is already formed on the mask 100, so the solvent can penetrate through the mask pattern P and the boundary between the mask 100 and the template 50. Solvent separation can be carried out at room temperature. Since no additional complicated separation equipment is required, it has the advantage of being relatively inexpensive compared to other separation methods.

As another example, a heat debonding method based on heating EP can be used. By using high-temperature heat to induce the decomposition of the temporary adhesive part 55, if the adhesive force between the mask 100 and the template 50 is weakened, the separation can be carried out in the up and down direction or the left and right direction.

As another example, a Peelable Adhesive Debonding method based on heating EP, applying ultraviolet UV, or the like can be used. When the temporary bonding part 55 is a thermal peeling tape, the peeling adhesive separation method can be used for separation. This method does not require high-temperature heat treatment such as the thermal separation method and does not require additional expensive heat treatment equipment, which has the advantage of relatively simple process.

As another example, a room temperature separation (Room Temperature Debonding) method based on chemical treatment of CM, application of ultrasonic waves US, application of ultraviolet rays UV, etc. may be used. If the non-sticky process is performed on a part (central part) of the mask 100 or the template 50, the temporary adhesive part 55 is used to adhere only to the edge part. In addition, during separation, the solvent penetrates to the edge portion to dissolve the temporary adhesive portion 55 to achieve separation. This method has the advantages of no direct loss of the remaining parts except the edge regions of the mask 100 and the template 50 during the bonding and separation process or the defects caused by the residue of the bonding material during the separation. In addition, unlike the thermal separation method, since high-temperature heat treatment is not required during separation, it has the advantage of relatively reducing process costs.

FIG. 21 is a schematic diagram showing a state in which the mask 100 is corresponding to the cell region CR of the adjacent frame 200 according to an embodiment of the present invention.

Referring to FIG. 21, the mask 100 may be corresponded to the mask cell region CR121 adjacent to the mask cell region CR111 to which the mask 100 is attached. The temperature of the process area can maintain the state of rising to the first temperature ET in FIG. 17. As a result, the mask 100 can maintain the volume at the first temperature in a state where no stretching force is applied.

The mask 100 can be mapped to the mask unit area CR121 by loading the template 50 on the frame 200 [or the mask unit sheet part 220]. The method of mapping the mask 100 to the mask unit region CR121 by controlling the position of the template 50 is the same as the process in FIG. 17. In addition, the mask 100 may first correspond to the mask cell region CR other than the mask cell region CR121 adjacent to the mask cell region CR111.

Next, the mask 100 may be attached to the frame 200 by irradiating the laser L to the mask 100 and based on laser welding. Solder beads WB are formed on the welding part of the laser-welded mask, and the solder beads WB may have the same material as the mask 100/frame 200 and be integrally connected with them.

FIG. 22 is a schematic diagram showing the process of separating the mask 100 from the template 50 after attaching the mask 100 to the cell region CR of the adjacent frame 200 according to an embodiment of the present invention.

Referring to FIG. 22, after the mask 100 is attached to the frame 200, the mask 100 and the template 50 may be debonded. The separation of the mask 100 and the template 50 can be performed by at least any one of heating EP, chemical treatment CM, applying ultrasonic waves US, and applying ultraviolet UV to the temporary bonding part 55. Since the mask 100 remains attached to the frame 200, only the template 50 can be lifted. This is the same as described in Figure 20.

FIG. 23 is a schematic diagram showing a state in which the mask 100 is attached to the frame 200 according to an embodiment of the present invention.

Then, referring to FIG. 23, a process of mapping and attaching the mask 100 to the remaining mask cell region CR may be performed. All the masks 100 may be attached on the mask unit area CR of the frame 200.

The existing mask 10 of FIG. 1 includes 6 cells C1 to C6, and therefore has a relatively long length, while the mask 100 of the present invention includes one cell C, and therefore has a relatively short length, and therefore PPA (pixel position accuracy) is distorted. The degree will become smaller. Assuming that the length of the mask 10 including a plurality of cells C1~C6... is 1m, and a PPA error of 10μm occurs in the total length of 1m, the mask 100 of the present invention can be reduced with the relative length (equivalent to cell C The number is reduced) and the above-mentioned error range becomes 1/n. For example, the mask 100 of the present invention has a length of 100 mm, which has a length reduced from 1 m of the existing mask 10 to 1/10. Therefore, a PPA error of 1 μm occurs in a total length of 100 mm, which significantly reduces the alignment error.

On the other hand, the mask 100 includes a plurality of cells C, and even if each cell C corresponds to each cell area CR of the frame 200, the alignment error is still minimized, the mask 100 can also be more than the frame 200. Each mask cell area CR corresponds to each other. Alternatively, the mask 100 having a plurality of cells C may also correspond to one mask cell region CR. In this case, in consideration of the process time and productivity based on alignment, the mask 100 is preferably provided with as few cells C as possible.

In the present invention, since only one cell C of the mask 100 needs to be matched and the alignment state is confirmed, compared with the existing method that simultaneously matches a plurality of cells C (C1 to C6) and needs to confirm all the alignment states, The manufacturing time can be significantly reduced.

That is, the manufacturing method of the frame-integrated mask of the present invention is compared with the conventional method of matching 6 cells C1 to C6 at the same time and confirming the alignment state of the 6 cells C1 to C6 at the same time. Each of the cells C11~C16 corresponds to a cell area CR11~CR16, and the time can be significantly shortened through the 6 processes of confirming the alignment status of each.

In addition, in the manufacturing method of the frame-integrated mask of the present invention, the product yield in the process of aligning 30 masks 100 with 30 cell regions CR (CR11 to CR56) for 30 times can be It is significantly higher than the yield of the existing product in five processes in which five masks 10 (refer to (a) of FIG. 2) each including six cells C1 to C6 correspond to and align with the frame 20. Because the existing method of aligning the 6 cells C1 to C6 in the area corresponding to the 6 cells C at a time is an obviously tedious and difficult operation, and the product yield is low.

FIG. 24 is a schematic diagram showing a process of lowering the temperature of the process area after attaching the mask 100 to the cell area CR of the frame 200 according to an embodiment of the present invention.

Then, referring to FIG. 24, the temperature of the process area is lowered to the second temperature LT. The "second temperature" may refer to a temperature lower than the first temperature. Considering that the first temperature is about 25°C to 60°C, the second temperature is assumed to be lower than the first temperature, and may be about 20°C to 30°C. Preferably, the second temperature may be normal temperature. The temperature drop in the process area can be controlled by the heating unit 29, or performed by a method of installing a cooling means in the chamber or a cooling means around the process area, or a method of natural cooling at room temperature.

If the temperature of the process area drops to the second temperature LT, the mask 100 may be thermally shrunk by a predetermined length. The mask 100 may be thermally shrunk isotropically along all side directions. However, since the mask 100 is fixedly connected to the frame 200 [or the mask unit sheet portion 220] by welding, the thermal shrinkage of the mask 100 itself applies tension TS to the surrounding mask unit sheet portion 220. Based on the tension TS applied by the mask 100 itself, the mask 100 may be more tightly attached to the frame 200.

In addition, after the mask 100 is all attached to the corresponding mask unit area CR, the temperature of the process area will drop to the second temperature LT, and thus all the masks 100 will be thermally contracted at the same time, thus causing the frame 200 to be deformed or patterned. The problem that the alignment error of P becomes large. To further explain, even if the tension TS is applied to the mask unit sheet portion 220, since the plurality of masks 100 apply the tension TS contracting in opposite directions, the tensions TS cancel each other out, and therefore, the mask unit sheet portion 220 does not It will be deformed. For example, in the first grid sheet portion 223 between the mask 100 attached to the CR11 cell area and the mask 100 attached to the CR12 cell area, the mask 100 attached to the CR11 cell area acts on the right side. The tension TS and the tension TS acting in the left direction of the mask 100 attached to the CR12 cell area can cancel each other out. Therefore, by minimizing the deformation of the frame 200 [or the mask unit sheet portion 220] due to the tension TS, there is an advantage that the alignment error of the mask 100 [or the mask pattern P] can be minimized.

FIG. 25 is a schematic diagram showing an OLED pixel deposition apparatus 1000 using frame-integrated masks 100 and 200 according to an embodiment of the present invention.

25, the OLED pixel deposition apparatus 1000 includes a magnetic plate 300 containing a magnet 310 and arranged with cooling water pipes 350, and a deposition source supply part 500 that supplies an organic material 600 from a lower portion of the magnetic plate 300.

A target substrate 900 such as glass for depositing the organic matter source 600 may be inserted between the magnetic plate 300 and the deposition source deposition part 500. The target substrate 900 may be provided with a frame-integrated mask 100, 200 (or FMM) for depositing the organic matter source 600 according to different pixels in a close or very close manner. The magnet 310 can generate a magnetic field and tightly adhere to the target substrate 900 through the magnetic field.

The deposition source supply part 500 can reciprocate left and right paths and supply the organic material source 600. The organic material source 600 supplied by the deposition source supply part 500 can be attached to one side of the target substrate 900 through the pattern P formed on the frame-integrated mask 100, 200. The organic material source 600 deposited after passing through the pattern P of the frame-integrated mask 100 and 200 can be used as the pixel 700 of the OLED.

In order to prevent the uneven deposition of the pixels 700 due to the shadow effect, the pattern of the frame-integrated masks 100, 200 may be formed in an obliquely S (or formed in a tapered S). The organic material source 600 passing through the pattern in the diagonal direction along the inclined surface can also contribute to the formation of the pixel 700, and therefore, the pixel 700 can be deposited with a uniform thickness as a whole.

At a first temperature higher than the temperature of the pixel deposition process, the mask 100 is attached and fixed on the frame 200, so even if it is raised to the temperature used for the pixel deposition process, the position of the mask pattern P is hardly affected. The PPA between 100 and the mask 100 adjacent thereto can be maintained to be no more than 3 μm.

In addition, when defects such as impurities are included in the mask 100 attached to the frame 200 or the mask pattern P is damaged, it is necessary to replace the mask 100. Or, when the mask 100 is attached to the frame 200 but a part of the mask pattern P is incorrectly aligned, it is also necessary to replace the mask 100 to make the alignment accurate.

In this case, when the mask 100 is directly separated from the frame 200 without a temperature change in the process area, due to the tension TS of the mask 100 attached to the remaining cell areas CR12, CR13, CR21, ... except for the cell area CR11 , The frame 200 may be slightly deformed. Such deformation may cause alignment errors of the mask pattern P and the mask unit C to occur sequentially along the PL line (refer to the enlarged part of FIG. 23). That is, as any one of the masks 100 [the mask 100 of the cell area CR111] is separated from the frame 200, the forces that cancel each other by applying tension TS in opposite directions from the multiple masks 100 will act on the frame 200 again, thereby An alignment error has occurred.

Therefore, the present invention is characterized in that after readjusting to a state where this tension TS does not act on the frame 200, the target mask 100 that needs to be separated/replaced due to defects occurs again [As an example, the mask including the mask unit C11 Module 100] for separation/replacement.

First, the temperature of the process area can be raised to the first temperature ET. The first temperature may refer to a temperature equal to or higher than the temperature of the pixel deposition process when the frame-integrated mask is used in the OLED pixel deposition process. Considering that the pixel deposition process temperature may be about 25 to 45°C, the first temperature may be about 25 to 60°C. This is the same as the case of rising to the first temperature ET in FIG. 17.

If the temperature of the process area rises to the first temperature ET, the thermally contracted mask 100 simultaneously generates a predetermined thermal expansion. The degree of thermal expansion corresponds to the degree of release of the tension TS. In other words, if the temperature of the process area rises to the first temperature ET, the tension TS applied to the mask 100 attached to the frame 200 will be released. Therefore, the mask 100 and the frame 200 can be changed to a stree free state.

Then, the target mask 100 that needs to be separated and replaced may be separated from the frame 200. The mask 100 can be separated from the frame 200 by applying a physical force to the target mask 100. However, in order to prevent deformation caused by the force acting on the frame 200, it is necessary to squeeze the remaining side when one side is peeled off.

After peeling off one side corner (right side corner) of the mask 100 including the mask unit C11 from the frame 200, the other side corner (left side corner) can be peeled off from the frame 200. Specifically, one side corner of the mask 100 may be attached to the first grid sheet portion 223 as the right corner of the mask unit region CR111. Therefore, when an external force is applied to one edge of the mask 100 to remove it, there is the first grid sheet portion 223 due to the adhesion force between the mask 100 and the frame 200 [first grid sheet portion 223] Deformation of the part occurred. Therefore, it is necessary to remove the mask 100 after tightly fixing the frame 200 [the first grid sheet portion 223].

In order to firmly fix the frame 200 against external forces, the outer part of one side corner (right side corner) of the mask 100 that can directly act on the external force is squeezed. That is, the part of the frame 200 [the first grid sheet portion 223] located outside the corner of the attached mask 100 can be pressed. The pressing is preferably performed on both the upper surface and the lower surface of the portion of the frame 200 [first grid sheet portion 223] that is closer to the outside than one side corner. The upper surface can be squeezed using a pressure bar (not shown), and the lower surface can be squeezed using a lower support unit 90 [refer to FIG. 19] for supporting the frame 200. When the other side corner (left side corner) is peeled off from the frame 200, the outer part of the other side corner (left side corner) can also be squeezed in the same way.

Then, the new mask 100 to be replaced can be mapped to the mask unit area CR111. By loading the template 50 on the frame 200 [or, the mask unit sheet part 220], the mask 100 can be mapped to the mask unit area CR111. Next, the mask 100 is attached to the frame 200 by irradiating the laser L to the mask 100 and based on laser welding. This is the same process as in Figure 18.

Then, the temperature of the process zone can be lowered to the second temperature LT. Considering that the first temperature is about 25°C to 60°C, and the second temperature is lower than the first temperature, it may be about 20°C to 30°C. Preferably, the second temperature may be normal temperature. This is the same as the case of dropping to the second temperature LT in FIG. 21.

If the temperature of the process area drops to the second temperature LT, the mask 100 may be thermally shrunk by a predetermined length. The mask 100 may be thermally shrunk in the lateral direction. At the same time, since the plurality of masks 100 apply tension TS in opposite directions to each other, the forces cancel each other out. Therefore, the mask unit sheet portion 220 does not deform.

As described above, when the defective mask 100 is separated/replaced, since the separation/replacement is performed in a stress-free state by raising the temperature of the process area to the first temperature, the deformation of the frame 200 can be prevented, and the deformation of the frame 200 can be prevented. The occurrence of alignment errors of the mask pattern P and the mask unit C has the advantage that the mask 100 can be stably separated/replaced.

As described above, the present invention exemplifies preferred embodiments for illustration and description, but is not limited to the above-mentioned embodiments, and those skilled in the art can make various modifications and changes within the scope not departing from the spirit of the present invention. Such deformations and changes fall within the scope of the present invention and the attached patent application.

1: mask 2: OLED pixel deposition frame 3: gripper 4: y-axis moving track 5: Preheating part, Z-axis moving track 6: OLED pixels 10: Manufacturing device 10': thin mask 13: pattern 14: The pattern is formed obliquely 15: table 19: Rear view 20: Workbench Department 21: Loading department 23: Frame alignment unit 25: Frame support unit 26: Blank space 27: Workbench mobile department 29: heating unit 30: Fixture Department 31: Fixture unit 32: Adsorption unit 33: auxiliary unit 34: Fixture heating unit 35: Fixture moving unit 34: Fixture heating unit 37: Connection unit 40: Fixture moving part 41: base unit 43: Fixture support unit 44: Base rail unit 45: Fixture support unit 50: template 50a: Center 50b: Edge 51: laser through hole 55: Temporary bonding part 56: core membrane 57a, 57b: Adhesive layer 58a, 58b: peeling film, release film 60: head 61, 61a, 61b: laser unit 65: camera unit 67: Bad Analysis Unit 70, 71, 75: head moving part 76: X-axis guide 80: Vibration absorbing table 90: Lower support unit 95: Adsorption part 96: Vacuum pipeline 100: mask 110: Mask film 110': Mask metal film 200: frame 210: edge frame 220, 220': Mask unit sheet part 221: Edge sheet section 223: The first grid sheet part 225: The second grid sheet part 229: Adsorption hole 1000: OLED pixel deposition device C(C1~C6): unit CM: Chemical treatment CR (CR11~CR56), CR111, CR121, CR111: mask unit area D1~D1``、D2~D2'': distance DM: (Mask) Virtual Department ET: Raise the temperature of the process area to the first temperature EP: heating F1~F2: Stretch H: Heat treatment L: Laser LT: Decrease the temperature of the process area to the second temperature P: Mask pattern PL: line PD': pixel interval T1, T2: thickness TS: Tension R: hollow area W: welding WB: Solder bead WP: Welding Department VS: Adsorption (pressure) force US: Apply ultrasound UV: Ultraviolet X, Y, Z, θ: axis

Fig. 1 and Fig. 2 are schematic diagrams showing an existing process of attaching a mask to a frame. FIG. 3 is a schematic diagram showing that an alignment error between units occurs in the process of stretching a mask in the prior art. 4 is a front view and a side cross-sectional view showing a frame-integrated mask according to an embodiment of the present invention. Fig. 5 is a front view and a side sectional view showing a frame according to an embodiment of the present invention. Fig. 6 is a schematic diagram showing a frame manufacturing process related to an embodiment of the present invention. Fig. 7 is a schematic diagram showing a manufacturing process of a frame according to another embodiment of the present invention. FIG. 8 is a schematic diagram showing a conventional mask used to form a high-resolution OLED. Fig. 9 is a schematic diagram showing a mask according to an embodiment of the present invention. 10 and 11 are a schematic plan view and a schematic front view showing a manufacturing apparatus of a frame-integrated mask according to an embodiment of the present invention. FIG. 12 is a partially enlarged schematic diagram of a manufacturing apparatus of a frame-integrated mask according to an embodiment of the present invention. 13 to 14 are schematic diagrams illustrating a process of manufacturing a mask support template by bonding a mask metal film on the template and forming a mask according to an embodiment of the present invention. 15 is an enlarged schematic cross-sectional view showing a temporary bonding part according to an embodiment of the present invention. FIG. 16 is a schematic diagram showing a process of loading a mask support template on a frame according to an embodiment of the present invention. FIG. 17 is a schematic diagram showing a state in which a template is loaded on a frame after the temperature of a process area is increased, and the mask is corresponding to a unit area of the frame according to an embodiment of the present invention. FIG. 18 is a schematic diagram showing a process of attaching a mask to a frame according to an embodiment of the present invention. 19 is a schematic diagram showing a state in which an adsorption force is applied to a mask through an adsorption hole according to an embodiment of the present invention. 20 is a schematic diagram showing a process of separating the mask from the template after attaching the mask to the frame according to an embodiment of the present invention. FIG. 21 is a schematic diagram showing a state in which a mask is associated with a unit area of an adjacent frame according to an embodiment of the present invention. 22 is a schematic diagram showing a process of separating the mask from the template after attaching the mask to the unit area of the adjacent frame according to an embodiment of the present invention. FIG. 23 is a schematic diagram showing a state in which a mask is attached to a frame according to an embodiment of the present invention. FIG. 24 is a schematic diagram showing a process of lowering the temperature of a process area after attaching a mask to a cell area of a frame according to an embodiment of the present invention. FIG. 25 is a schematic diagram showing an OLED pixel deposition apparatus using a frame-integrated mask according to an embodiment of the present invention.

5: Preheating part, Z-axis moving track

10: Manufacturing device

15: table

20: Workbench Department

21: Loading department

23: Frame alignment unit

25: Frame support unit

27: Workbench mobile department

29: heating unit

30: Fixture Department

37: Connection unit

40: Fixture moving part

41: base unit

43, 45: fixture support unit

50: template

60: head

61, 61a, 61b: laser unit

65: camera unit

67: Bad Analysis Unit

100: mask

200: frame

CR: Mask unit area

X, Y, Z: axis

Claims (14)

A manufacturing device for a frame-integrated mask, which is characterized by comprising: a worktable part for placing and supporting the frame; a clamp part for clamping a template that is bonded and supporting the mask; and a clamp moving part that faces Move the jig part in at least any one of the X, Y, Z, and θ axes; a head for irradiating the welding part of the mask with laser, and for sensing the alignment state of the mask; and a head moving part, which The head is moved in at least any one of the X, Y, and Z axes, and the worktable includes a frame alignment unit for aligning the position of the frame. The apparatus for manufacturing a frame-integrated mask according to claim 1, further comprising a preheating part, which is provided for preheating bonding and supporting the mask before the clamping part clamps the template. Space for the template. The apparatus for manufacturing a frame-integrated mask according to claim 1, wherein the clamp portion is clamped by sucking at least a part of the upper surface of the template. The apparatus for manufacturing a frame-integrated mask according to claim 1, wherein the table portion includes a heating unit for increasing the temperature of the process area including the frame to the first temperature. The apparatus for manufacturing a frame-integrated mask according to claim 1, wherein the jig part includes: A clamp unit for clamping the template; a clamp moving unit for moving the clamp unit to at least any one of the X, Y, Z, and θ axes; and a connecting unit for connecting the clamp moving unit to the clamp moving part . The apparatus for manufacturing a frame-integrated mask according to claim 5, wherein the jig section further includes a jig heating unit that applies heat to the clamped template. The apparatus for manufacturing a frame-integrated mask according to claim 5, wherein a plurality of suction units that apply suction pressure to the template are formed on the clamp unit at intervals. The apparatus for manufacturing a frame-integrated mask according to claim 7, wherein the plurality of suction units are arranged so as not to overlap the welding portion of the mask and the Z-axis area. The apparatus for manufacturing a frame-integrated mask according to claim 1, wherein the head includes a laser unit that welds the mask to the frame by irradiating a laser to the mask, or performs laser fine adjustment by irradiating a laser to the mask . The device for manufacturing a frame-integrated mask according to claim 9, characterized in that a pair of laser units are spaced apart, and each laser unit irradiates the welding parts on one side and the other side of the mask with laser. The apparatus for manufacturing a frame-integrated mask according to claim 1, wherein the frame includes: an edge frame portion including a hollow area; The mask unit sheet part has a plurality of mask unit regions and is connected to the edge frame part. The apparatus for manufacturing a frame-integrated mask according to claim 11, wherein a plurality of suction holes are formed in a portion separated by a predetermined distance from the corners of the mask unit sheet portion where the mask unit area exists, and the workbench The part further includes a lower support unit that generates suction pressure to the lower part of the frame. The apparatus for manufacturing a frame-integrated mask according to claim 12, wherein a heating unit is arranged at a lower portion of the lower supporting unit. The apparatus for manufacturing a frame-integrated mask according to claim 1, wherein the first temperature is greater than or equal to the OLED pixel deposition process temperature, and after the mask is attached to the frame, the temperature of the process area including the frame is lowered To a second temperature less than the first temperature, the first temperature is any temperature from 25°C to 60°C, the second temperature is any temperature from 20°C to 30°C less than the first temperature, the OLED pixel deposition process temperature It is any temperature from 25°C to 45°C.

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