CN107425135A - Mask plate fixes bottom plate and mask board fixer - Google Patents
Mask plate fixes bottom plate and mask board fixer Download PDFInfo
- Publication number
- CN107425135A CN107425135A CN201710310929.8A CN201710310929A CN107425135A CN 107425135 A CN107425135 A CN 107425135A CN 201710310929 A CN201710310929 A CN 201710310929A CN 107425135 A CN107425135 A CN 107425135A
- Authority
- CN
- China
- Prior art keywords
- mask plate
- plate
- mask
- bottom plate
- concave surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/846—Passivation; Containers; Encapsulations comprising getter material or desiccants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
Abstract
The present invention provides a kind of mask plate and fixes bottom plate and mask board fixer, belongs to mask plate technique for fixing field.The mask plate of the present invention fixes bottom plate, and the mask plate, which fixes bottom plate, to be included being used for the first side of permanent mask plate, and the first side includes concave surface, and the vacuum absorption holes that the mask plate fixes bottom plate are provided through in the neighboring area of the concave surface.The neighboring area that the concave surface of bottom plate is fixed due to the mask plate in the present invention is provided with vacuum absorption holes, therefore mask plate is placed on above concave surface, the space between concave surface and mask plate is evacuated by vacuum absorption holes using air extractor, fixed so that the negative pressure between concave surface and mask plate can firmly adsorb mask plate in mask plate on bottom plate.It can be seen that the replacement of mask plate, it is only necessary to can be achieved by the extraction gas of vacuum absorption holes.
Description
Technical field
The invention belongs to mask plate technique for fixing field, and in particular to a kind of mask plate fixes bottom plate and mask plate fixes dress
Put.
Background technology
In numerous oled panel method for packing, frame adds central filler glue material, and (neighboring area of oled panel is using envelope
Frame glue seal, intermediate region is sealed using fluid sealant) by the way of be to large scale oled panel encapsulation main method, seal
The solidification for filling glue material is general by the way of ultraviolet light and heat cure are combined.By packaging adhesive material characteristic, OLED knot
The multiple requirements such as structure, packaging technology flow and sealed in unit, generally require frame adhesive and central filler glue uses different purples
Outer light irradiation condition, this just needs to realize the differentiation for irradiating packaging adhesive material ultraviolet light using ultraviolet optical mask plate.
To ensure to the high transmittance of ultraviolet light, make that ultraviolet optical mask plate deformation is small, ultraviolet light is saturating using quartz glass
Cross rate height, do not need reticle base, but it is expensive, while change cumbersome.Using quartz glass as reticle base,
Pasted on bottom plate or edge absorption simple glass is as mask plate, mask plate deformation quantity is big, and easily damage needs what is exposed below
Glue material, concurrent deformation influence big on exposure accuracy.
The content of the invention
It is contemplated that at least solves one of technical problem present in prior art, there is provided a kind of cost is low, applicability
Strong mask plate fixes bottom plate and mask board fixer.
Technical scheme is that a kind of mask plate fixes bottom plate used by solving present invention problem, and the mask plate is fixed
Bottom plate includes the first side for permanent mask plate, and the first side includes concave surface, and in the neighboring area of the concave surface
It is provided through the vacuum absorption holes that the mask plate fixes bottom plate.
Preferably, groove is additionally provided with the neighboring area of the concave surface, the vacuum absorption holes are arranged on described recessed
In groove.
Preferably, the bottom of the concave surface is plane.
Preferably, the depth of the concave surface is less than 0.1mm.
Preferably, the vacuum absorption holes are uniformly arranged in the neighboring area of the concave surface.
Preferably, the material that the mask plate fixes bottom plate is quartz.
Preferably, the first side also includes the plane around the concave surface.
Preferably, the mask plate, which fixes bottom plate, includes the second side relative with the first side, and described second
Side is plane, and the position of the plane of the first side is to the vertical range between the second side in 4mm-10mm.
Technical scheme is a kind of mask board fixer used by solving present invention problem, and it includes above-mentioned cover
Diaphragm plate fixes bottom plate.
Preferably, the fixing device also includes air suction module；The air suction module and the vacuum absorption holes gas circuit
Connection.
The present invention has the advantages that：
The neighboring area that the concave surface of bottom plate is fixed due to the mask plate in the present invention is provided with vacuum absorption holes, therefore will cover
Template is placed on above concave surface, and the space between concave surface and mask plate is taken out by vacuum absorption holes using air extractor
Gas, so that mask plate can firmly be adsorbed and fixed in mask plate on bottom plate by the negative pressure between concave surface and mask plate.It can see
Go out, the replacement of mask plate, it is only necessary to can be achieved by the extraction gas of vacuum absorption holes.Mask plate in the present invention is fixed
Bottom plate especially suitable for ultraviolet optical mask plate (such as：The mask plate solidified to UV glue) it is fixed, choose glass material
The mask plate of matter solidifies to UV glue, therefore its cost is relatively low compared with for prior art, and easily realizes.
Brief description of the drawings
Fig. 1 is that the mask plate of embodiments of the invention 1 fixes the top view of bottom plate；
Fig. 2 is that the mask plate of embodiments of the invention 1 fixes the sectional view of bottom plate；
Fig. 3 is that the mask plate of embodiments of the invention 1 fixes the sectional view of bottom plate permanent mask plate.
Wherein reference is：1st, mask plate fixes bottom plate；10th, concave surface；11st, vacuum absorption holes；12nd, groove；2nd, mask
Plate.
Embodiment
To make those skilled in the art more fully understand technical scheme, below in conjunction with the accompanying drawings and specific embodiment party
Formula is described in further detail to the present invention.
Embodiment 1：
With reference to shown in Fig. 1-3, the present embodiment provides a kind of mask plate and fixes bottom plate 1, and it includes first side and with first
The relative second side in side, concave surface 10 is included in the first side.And it is provided through institute in the neighboring area of concave surface 10
State the vacuum absorption holes 11 that mask plate fixes bottom plate 1.
At this it should be noted that the concave surface 10 that mask plate is fixed in the first side of bottom plate 1 in the present embodiment refers to：Will
Mask plate is arranged on mask plate and fixed in the first side of bottom plate 1, the position in gap between first side and mask plate be present
Structure；Namely there is difference in height in the concave bottom of first side and the periphery of first side；And for the edge of concave surface 10
Shape can be circle, ellipse, rectangle, hexagon etc., herein without limiting.
The neighboring area that the concave surface 10 of bottom plate 1 is fixed due to the mask plate in the present embodiment is provided with vacuum absorption holes 11,
Therefore mask plate 2 is placed on the top of concave surface 10, using air extractor by vacuum absorption holes 11 to concave surface 10 and mask plate 2 it
Between space be evacuated so that the negative pressure between concave surface 10 and mask plate 2 can firmly adsorb mask plate 2 in mask plate
On fixed bottom plate 1.It can be seen that the replacement of mask plate 2, it is only necessary to can be real by the extraction gas of vacuum absorption holes 11
It is existing.Mask plate in the present embodiment fix bottom plate 1 especially suitable for ultraviolet optical mask plate 2 (such as：UV glue is solidified
Mask plate 2) be fixed, the mask plate 2 for choosing glass material solidifies to UV glue, thus its cost compared with prior art and
Say it is relatively low, and easily realize.
Wherein, the setting fluted 12 in the neighboring area of concave surface 10 further preferably, vacuum absorption holes 11 are arranged on groove 12
In.It can be seen that the width of groove 12 is more than the empty width of vacuum suction, and the groove 12 is circumferentially positioned at concave surface 10
On neighboring area, namely compared with adsorption hole adsorb mask plate 2 for, adsorption area is increased, so as to effectively avoid
To in the adsorption process of mask plate 2, the problem of mask plate 2 deforms, simultaneously as the increase of adsorption area, mask plate 2 can be with
Mask plate is firmly fixed on to fix on bottom plate.
Wherein, above-mentioned vacuum absorption holes 11 are uniformly arranged in the neighboring area of concave surface 10, can now ensure to be adsorbed
The absorption affinity that is subject to of the diverse location of mask plate 2 be uniform, further prevent from adsorbing the mask plate 2 on mask plate bottom plate
The problem of neighboring area deforms.
Wherein, the bottom that the concave surface 10 of the mask plate fixation bottom plate 1 in the present embodiment includes is preferably plane, is now being exposed
The light direction that light time does not interfere with.Certainly, the bottom that concave surface 10 includes can also be arc, certainly, recessed in the present embodiment
Face is also not limited to both of these case, as long as meet that mask plate is positioned over into mask plate fixes in the first side of bottom plate 1,
Certain gap between the position of concave surface and mask plate be present, it is used during so as to vacuum suction.It should be noted that such as
The bottom that fruit concave surface 10 includes will be handled light, to prevent light from passing through mask using non-planar in exposure
There is the problem of uneven after fixing bottom plate 1 in plate.
Wherein, the mask plate in the present embodiment fixes bottom plate 1 and uses quartz material.This kind of use is transparent and does not allow mutability
Shape, it can effectively ensure the transmitance of the light in exposure technology.Certainly, the material of mask plate fixation bottom plate 1 does not also limit to
In quartz, it can also use other that there is the transparent material of phase same-action.
Wherein, the plane around concave surface 10 is also included in the fixed plate of mask plate 2 of the present embodiment, in first side.It is flat
The setting of face structure can preferably carry and the mask plate 2 of fixed pending exposure.
Wherein, the depth of the concave surface 10 in the present embodiment is less than 0.1mm, certain depth can also as the case may be and
Specific setting.
Wherein, the mask plate in the present embodiment, which fixes bottom plate 1, includes the second side relative with first side, second side
For plane, the position of the plane of first side is to the vertical range between second side in 4mm-10mm.Certainly, in the present embodiment
Mask plate fix bottom plate 1 second side can have with first side identical shape, as long as ensure mask plate fix bottom
Plate 1 has certain thickness.
Embodiment 2：
The present embodiment provides a kind of fixing device of mask plate 2, and its mask plate included in embodiment 1 fixes bottom plate 1, when
So also include being connected air suction module with the gas circuit of vacuum absorption holes 11 that mask plate is fixed on bottom plate.
Include the mask plate in embodiment 1 due to the fixing device of the mask plate 2 in the present embodiment and fix bottom plate 1, and
The neighboring area that the concave surface 10 of bottom plate 1 is fixed in mask plate is provided with vacuum absorption holes 11, therefore mask plate 2 is placed on into concave surface
10 tops, are evacuated using air suction module by vacuum absorption holes 11 to the space between concave surface 10 and mask plate 2, so that recessed
Negative pressure between face 10 and mask plate 2 can firmly adsorb mask plate 2 fixes on bottom plate 1 in mask plate.It can be seen that
It is the replacement of mask plate 2, it is only necessary to can be achieved by the extraction gas of vacuum absorption holes 11.Mask plate in the present embodiment is consolidated
Determine bottom plate 1 especially suitable for ultraviolet optical mask plate 2 (such as：The mask plate 2 solidified to UV glue) it is fixed, choose glass
The mask plate 2 of glass material solidifies to UV glue, therefore its cost is relatively low compared with for prior art, and easily realizes.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, but the invention is not limited in this.For those skilled in the art, the essence of the present invention is not being departed from
In the case of refreshing and essence, various changes and modifications can be made therein, and these variations and modifications are also considered as protection scope of the present invention.
Claims (10)
1. a kind of mask plate fixes bottom plate, it is characterised in that the mask plate fix bottom plate include for permanent mask plate the
One side, the first side include concave surface, and are provided through the mask plate in the neighboring area of the concave surface and fix bottom
The vacuum absorption holes of plate.
2. mask plate according to claim 1 fixes bottom plate, it is characterised in that is also set up in the neighboring area of the concave surface
Fluted, the vacuum absorption holes are arranged in the groove.
3. mask plate according to claim 1 fixes bottom plate, it is characterised in that the bottom of the concave surface is plane.
4. mask plate according to claim 1 fixes bottom plate, it is characterised in that the depth of the concave surface is less than 0.1mm.
5. mask plate according to claim 1 fixes bottom plate, it is characterised in that the vacuum absorption holes are in the concave surface
Uniformly arrange neighboring area.
6. mask plate according to claim 1 fixes bottom plate, it is characterised in that the material that the mask plate fixes bottom plate is
Quartz.
7. mask plate according to claim 1 fixes bottom plate, it is characterised in that the first side is also included around described
The plane of concave surface.
8. mask plate according to claim 1 fixes bottom plate, it is characterised in that the mask plate, which fixes bottom plate, to be included and institute
State the relative second side of first side, the second side is plane, the position of the plane of the first side to described
Vertical range between two side faces is in 4mm-10mm.
9. a kind of mask board fixer, it is characterised in that fix bottom including the mask plate any one of claim 1-8
Plate.
10. mask board fixer according to claim 9, it is characterised in that the fixing device also includes pumping mould
Block；The air suction module is connected with the vacuum absorption holes gas circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710310929.8A CN107425135A (en) | 2017-05-05 | 2017-05-05 | Mask plate fixes bottom plate and mask board fixer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710310929.8A CN107425135A (en) | 2017-05-05 | 2017-05-05 | Mask plate fixes bottom plate and mask board fixer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107425135A true CN107425135A (en) | 2017-12-01 |
Family
ID=60424868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710310929.8A Pending CN107425135A (en) | 2017-05-05 | 2017-05-05 | Mask plate fixes bottom plate and mask board fixer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107425135A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110359011A (en) * | 2019-08-15 | 2019-10-22 | 云谷（固安）科技有限公司 | A kind of production method that exposure mask piece fixes device, mask plate and mask plate |
| CN110385527A (en) * | 2018-04-20 | 2019-10-29 | Tgo科技株式会社 | The manufacturing device of the one-piece type mask of frame |
| CN111230295A (en) * | 2018-11-28 | 2020-06-05 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| CN111538216A (en) * | 2020-05-28 | 2020-08-14 | Tcl华星光电技术有限公司 | Exposure machine |
| CN109309174B (en) * | 2018-12-07 | 2021-11-05 | 合肥鑫晟光电科技有限公司 | Display panel and packaging method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55103727A (en) * | 1979-02-05 | 1980-08-08 | Nec Corp | Semiconductor wafer holding jig |
| CN1824824A (en) * | 2005-01-05 | 2006-08-30 | 三星Sdi株式会社 | Mask frame and method of fixing mask on the mask frame |
| JP2010080843A (en) * | 2008-09-29 | 2010-04-08 | Ushio Inc | Mask hold means of light projector |
| CN104135830A (en) * | 2014-08-08 | 2014-11-05 | 中国电子科技集团公司第二十九研究所 | Method and device for filling raw ceramic through holes with metal paste |
| KR20150103526A (en) * | 2014-03-03 | 2015-09-11 | 최윤기 | Mask centering block of deposition device |
-
2017
- 2017-05-05 CN CN201710310929.8A patent/CN107425135A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55103727A (en) * | 1979-02-05 | 1980-08-08 | Nec Corp | Semiconductor wafer holding jig |
| CN1824824A (en) * | 2005-01-05 | 2006-08-30 | 三星Sdi株式会社 | Mask frame and method of fixing mask on the mask frame |
| JP2010080843A (en) * | 2008-09-29 | 2010-04-08 | Ushio Inc | Mask hold means of light projector |
| KR20150103526A (en) * | 2014-03-03 | 2015-09-11 | 최윤기 | Mask centering block of deposition device |
| CN104135830A (en) * | 2014-08-08 | 2014-11-05 | 中国电子科技集团公司第二十九研究所 | Method and device for filling raw ceramic through holes with metal paste |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110385527A (en) * | 2018-04-20 | 2019-10-29 | Tgo科技株式会社 | The manufacturing device of the one-piece type mask of frame |
| CN110385527B (en) * | 2018-04-20 | 2021-10-29 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| CN111230295A (en) * | 2018-11-28 | 2020-06-05 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| TWI731481B (en) * | 2018-11-28 | 2021-06-21 | 南韓商Tgo科技股份有限公司 | Producing device of mask integrated frame |
| CN111230295B (en) * | 2018-11-28 | 2021-12-24 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| CN109309174B (en) * | 2018-12-07 | 2021-11-05 | 合肥鑫晟光电科技有限公司 | Display panel and packaging method thereof |
| CN110359011A (en) * | 2019-08-15 | 2019-10-22 | 云谷（固安）科技有限公司 | A kind of production method that exposure mask piece fixes device, mask plate and mask plate |
| CN111538216A (en) * | 2020-05-28 | 2020-08-14 | Tcl华星光电技术有限公司 | Exposure machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171201 |