CN104097027A - Manufacturing method of OLED (Organic Light Emitting Diode) metal mask plate - Google Patents
Manufacturing method of OLED (Organic Light Emitting Diode) metal mask plate Download PDFInfo
- Publication number
- CN104097027A CN104097027A CN201310123638.XA CN201310123638A CN104097027A CN 104097027 A CN104097027 A CN 104097027A CN 201310123638 A CN201310123638 A CN 201310123638A CN 104097027 A CN104097027 A CN 104097027A
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- China
- Prior art keywords
- laser
- frame
- mask plate
- prefab
- metal mask
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Abstract
The invention provides a manufacturing method of an OLED (Organic Light Emitting Diode) metal mask plate. The manufacturing method comprises the following steps: carrying out pattern transfer and chemical etching on a metal sheet by photochemical etching to manufacture a prefabricated template; machining the metal sheet by using a numerically controlled machine tool to manufacture a frame; further machining the prefabricated template and the frame by using a laser welding machine, wherein the laser welding machine is provided with a laser welding head and a laser cutting head, and the frame is fixed on a welding platform of the laser welding machine; putting the prefabricated template on the frame, tightly pressing by a pressing device, and welding and cutting the prefabricated template and the frame by using the laser welding head and the laser cutting head. In addition, a control file is edited according to motion paths of the laser welding head and the laser cutting head to automatically finish welding and cutting. According to the manufacturing method of the OLED metal mask plate, the metal mask plate is manufactured by laser welding and cutting, so that the quality of a product is well ensured, the problems of burrs, trimmings and the like are avoided, and convenience is provided for use of a subsequent evaporation process.
Description
Technical field
The present invention relates to a kind of preparation method of OLED metal mask plate.
Background technology
OLED(Organic Light Emitting Diode) be a kind of Display Technique with self-luminous characteristic, with the LCD(liquid crystal display being widely used) compared with Display Technique, there is angle of visibility large, beautiful in colour, the advantage such as low in energy consumption, therefore it can substitute the lcd technology of current main flow gradually.In OLED display screen manufacturing process, there is organic luminorphor evaporation process one, need to use high-precision OLED Metal Mask(Organic Light Emitting Diode high-precision metal mask plate) as vaporization coating template, quality, the yield rate of the quality of OLED Metal Mask on display screen has very big impact, in OLED display screen industry, OLED Metal Mask is the key factor of restriction OLED screen development.
The typical structure of OLED Metal Mask comprises 2 parts: a part is that frame, another part of metal is the template of being made up of metal sheet with precision graphic.Frame provides support structure, and the precision graphic in template is the benchmark of evaporation graph transfer printing.
After precision graphic in template completes, adopt method for laser welding to weld.After having welded, unnecessary sheet material part needs to remove.The method adopting is at present: the unnecessary sheet material part of removing at needs is made half groove, utilizes chemical etching process to complete the making of half groove; After welding, the method for tearing by hand, tears it down the sheet material of redundance along half groove.
This method has some shortcomings part in the time of practical operation:
1. adopt the method for tearing, conventionally can produce burr or overlap, cause mask plate surface smooth not, affect the use of postchannel process, reduce the yield of evaporate process.
2. due to the existence of half groove, stretch tight in the flat process of tension at metal sheet, thereby may occur that half groove is torn causes scrapping.
Summary of the invention
The technical problem to be solved in the present invention is to provide that a kind of process is good, production efficiency is high, there is no the preparation method of the phenomenon such as overlap, burr Organic Light Emitting Diode high-precision metal mask plate that occur, that be convenient to following process, to overcome the above-mentioned defect of prior art.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme:
A preparation method for OLED metal mask plate, comprises the following steps:
1) by photoetching process, metal sheet is carried out to graph transfer printing, then adopt the method for chemical etching to corrode described metal sheet, obtain the prefab-form with default figure;
2) with Digit Control Machine Tool, sheet metal is processed, the material of sheet metal middle part is removed, obtain frame;
3) described prefab-form and frame are done to further processing on laser-beam welding machine, described laser-beam welding machine comprises that a jig and is arranged on the operate portions on crossbeam, described operate portions is provided with a laser welding system and a laser cutting head, laser welding system and laser cutting head all can move up and down along Z axis guide rail, described crossbeam can seesaw along Y-axis guide rail, described operate portions can be along the X-axis guide rail side-to-side movement on crossbeam, frame is fixed on jig, then described prefab-form is placed on above frame and compresses with hold down gag, the welding region of prefab-form and frame inner ring is welded together with laser welding system,
4) keep the position of frame on jig to maintain static, by being positioned at the redundance excision of welding region periphery on prefab-form, form OLED metal mask plate with laser cutting head.
Preferably, after step 4), also comprise a step of OLED metal mask plate being measured to inspection.。
Further, make prefab-form in step 1) time, half groove is not established at the edge of prefab-form.
Further, according to the motion path of laser welding system and laser cutting head, make welding cutting control documents, import in advance laser-beam welding machine, in step 3) and step 4), automatically complete welding and the cutting action to prefab-form by laser-beam welding machine.
As mentioned above, the preparation method of a kind of OLED metal mask plate of the present invention, there is following beneficial effect: the preparation method of OLED metal mask plate of the present invention, the making that adopts laser to weld and cut metal mask plate, and well ensure the quality of product, there is no the problem such as burr and overlap, ensure the yield of evaporation process process, and because laser welding system and laser cutting head are all mounted on same laser-beam welding machine, welding and cutting two procedures complete on same jig, without the location of clamping again, save the time, improve the precision of template welding and cutting, in this method, on metal sheet, do not make half groove simultaneously, stretching tight while drawing, can not cause tearing of template and scrap, greatly reduce loss.
Brief description of the drawings
Fig. 1 is manufacturing process steps block diagram of the present invention.
Fig. 2 is machining state schematic diagram of the present invention.
Fig. 3 is pre-cut mask plate schematic diagram of the present invention.
In figure: 11 prefab-forms
12 frames
13 welding regions
2 laser-beam welding machines
21 operate portions
22 laser welding systems
23 laser cutting heads
24 jigs
4 crossbeams
41 X-axis guide rails
42 Y-axis guide rails
43 Z axis guide rails
Detailed description of the invention
Structure that Figure of description illustrates, ratio, size etc., all contents in order to coordinate description to disclose only, understand and read for person skilled in the art scholar, not in order to limit the enforceable qualifications of the present invention, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, not affecting under effect that the present invention can produce and the object that can reach, all should still drop on disclosed technology contents and obtain in the scope that can contain.Simultaneously, in this description, quote as " on ", the term such as D score, 'fornt', 'back', " centre ", also only for ease of understanding of narrating, but not in order to limit the enforceable scope of the present invention, the change of its relativeness or adjustment, changing under technology contents, when being also considered as the enforceable category of the present invention without essence.
Be illustrated in figure 1 the concrete steps block diagram of the preparation method of OLED metal mask plate of the present invention.
Step 1 is, by photoetching process, metal sheet is carried out to graph transfer printing and chemical etching, photoetching is also referred to as photochemical etching, it is the process that a kind of figure shifts, the main body of photoetching technique is litho machine (comprising exposure machine and alignment machine), it is in the figure on mask plate and preceding working procedure, to be engraved in after the pattern alignment on film, again the photoresist of silicon chip surface is exposed and realizes the equipment of graph copying, its figure determined by actual needs, and in the present embodiment, silicon chip is exactly metal sheet.The main technique of photoetching comprises gluing, exposure, development.Gluing is exactly resist coating on metal sheet; In exposure process, first mask plate and the metal sheet that scribbles photoresist are aimed at, then by the exposure of mask plate and metal sheet, mask plate figure is transferred on the metal sheet of gluing and realized graph copying; Development is with developing solution dissolution part photoresist, and the figure on mask is transferred on photoresist.Metal sheet is implemented, after above three steps, to obtain the prefab-form 11 with default figure.
Because be to use laser to weld and cut in subsequent step, in the time that this step is made prefab-form 11, half groove is not established at the edge of prefab-form 11.
Step 2 is with Digit Control Machine Tool, sheet metal to be processed, and adds and man-hour the material of sheet metal middle part is removed, and obtains frame 12.The Main Function of frame is to support prefab-form 11, prevents that prefab-form 11 is out of shape, and frame 12 sizes, shape are carried out edit routine processing by actual needs, and generally, frame 12 is circular frame.
When making after prefab-form 11 and frame 12, as Fig. 2, shown in Fig. 3, step 3 is that described prefab-form 11 and frame 12 are done to further processing on laser-beam welding machine 2, described laser-beam welding machine 2 comprises that a jig 24 and is arranged on the operate portions 21 on crossbeam 4, described operate portions 21 is provided with a laser welding system 22 and a laser cutting head 23, laser welding system 22 and laser cutting head 23 all can move up and down along Z axis guide rail 43 in operate portions 21, to adjust the distance between jig 24, the left and right sides of laser-beam welding machine 2 is provided with Y-axis guide rail 42, crossbeam 4 can be led 42 along Y-axis and be seesawed, on described crossbeam 4, be also provided with X-axis guide rail 41, described operate portions 21 can be led 41 side-to-side movements along the X-axis on crossbeam 4, so just realized operate portions 21 moves in space coordinates, and then prefab-form 11 is processed and do not needed prefab-form 11 to move.
The frame 12 of making is fixed on jig 24, then described prefab-form 11 is placed on to frame 12 and compress with hold down gag above, described hold down gag is that one is located prefab-form 11 and frame 12, in order to the device of welding, can realize with multiple device, for example, can use the disclosed a kind of device that mask plate and solder mask frame are adjacent to of Chinese utility model patent 201220016236.0.Fix after prefab-form 11 and frame 12, start laser-beam welding machine 2, the welding region 13 of the periphery of prefab-form 11 and frame 12 inner rings is welded together with laser welding system 21.
Step 4, the position of maintenance frame 12 on jig 24 maintains static, then will on prefab-form 11, be positioned at the excess metal sheet material excision of welding region 13 peripheries with laser cutting head 23, forms OLED metal mask plate.
Make after OLED metal mask plate, can measure inspection to OLED metal mask plate.
In the present embodiment, welding and cutting all complete with laser, can be that manual operation machine completes, also can be that computer operation completes, in order to ensure that machining accuracy reduces error, according to the motion path of laser welding system 22 and laser cutting head 23, make welding cutting control documents, import in advance laser-beam welding machine 2, in step 3 and step 4, automatically complete welding and the cutting action to prefab-form 11 by laser-beam welding machine 2.
The problems such as in sum, the preparation method of a kind of OLED metal mask plate of the present invention, can solve machining accuracy not high, jagged or overlap, this method is simple and reliable simultaneously, without dropping into too much human resources.So, having very high value and using meaning aspect making OLED metal mask plate thereby the present invention has effectively overcome practical problems more of the prior art.
Above-mentioned embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.The present invention also many aspects can also improve under the prerequisite without prejudice to overall thought.Therefore, all can, under spirit of the present invention and category, can above-described embodiment be modified or be changed for person skilled in the art scholar.Therefore, such as in affiliated technical field, have and conventionally know that the knowledgeable, not departing from all equivalence modifications that complete under disclosed spirit and technological thought or changing, must be contained by claim of the present invention.
Claims (4)
1. a preparation method for OLED metal mask plate, is characterized in that, comprises the following steps:
1) by photoetching process, metal sheet is carried out to graph transfer printing, then adopt the method for chemical etching to corrode described metal sheet, obtain the prefab-form (11) with default figure;
2) with Digit Control Machine Tool, sheet metal is processed, the material of sheet metal middle part is removed, obtain frame (12);
3) described prefab-form (11) and frame (12) are done to further processing on laser-beam welding machine (2), described laser-beam welding machine (2) comprises that a jig (24) and is arranged on the operate portions (21) on crossbeam (4), described operate portions (21) is provided with a laser welding system (22) and a laser cutting head (23), laser welding system (22) and laser cutting head (23) all can move up and down along Z axis guide rail (43), described crossbeam (4) can seesaw along Y-axis guide rail (42), described operate portions (21) can be along X-axis guide rail (41) side-to-side movement on crossbeam (4), frame (12) is fixed on jig (24), then described prefab-form (11) be placed on to frame (12) above and compress with hold down gag, the welding region (13) of prefab-form (11) and frame (12) inner ring is welded together with laser welding system (21),
4) keep the position of frame (12) on jig (24) to maintain static, by being positioned at the peripheral redundance excision of welding region (13) on prefab-form (11), form OLED metal mask plate with laser cutting head (23).
2. the preparation method of a kind of OLED metal mask plate according to claim 1, is characterized in that: after step 4), also comprise a step of OLED metal mask plate being measured to inspection.
3. the preparation method of a kind of OLED metal mask plate according to claim 1, is characterized in that: make prefab-form (11) in step 1) time, half groove is not established at the edge of prefab-form (11).
4. the preparation method of a kind of OLED metal mask plate according to claim 1, it is characterized in that: according to the motion path of laser welding system (22) and laser cutting head (23), make welding cutting control documents, import in advance laser-beam welding machine (2), in step 3) and step 4), automatically complete welding and the cutting action to prefab-form (11) by laser-beam welding machine (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310123638.XA CN104097027A (en) | 2013-04-10 | 2013-04-10 | Manufacturing method of OLED (Organic Light Emitting Diode) metal mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310123638.XA CN104097027A (en) | 2013-04-10 | 2013-04-10 | Manufacturing method of OLED (Organic Light Emitting Diode) metal mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104097027A true CN104097027A (en) | 2014-10-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310123638.XA Pending CN104097027A (en) | 2013-04-10 | 2013-04-10 | Manufacturing method of OLED (Organic Light Emitting Diode) metal mask plate |
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Cited By (9)
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| WO2016155433A1 (en) * | 2015-03-31 | 2016-10-06 | 京东方科技集团股份有限公司 | Mask plate assembly and manufacture method therefor, and evaporation device and method for manufacturing display substrate |
| CN107309768A (en) * | 2017-06-14 | 2017-11-03 | 伯恩光学(惠州)有限公司 | The processing method of ceramic panel hole position |
| CN107414306A (en) * | 2016-05-20 | 2017-12-01 | 上海和辉光电有限公司 | A kind of metal mask preparation method |
| CN108526729A (en) * | 2018-04-13 | 2018-09-14 | 武汉华星光电半导体显示技术有限公司 | Laser cutting device and the preparation method that mask plate is deposited |
| CN109023237A (en) * | 2018-08-21 | 2018-12-18 | 武汉华星光电半导体显示技术有限公司 | Metal mask plate and its manufacturing method |
| CN109848594A (en) * | 2017-11-30 | 2019-06-07 | 株式会社汉松新科技 | Manufacture double tension-type welders of AMOLED movable type solder mask frame component and the manufacturing method using it |
| CN110385527A (en) * | 2018-04-20 | 2019-10-29 | Tgo科技株式会社 | The manufacturing device of the one-piece type mask of frame |
| CN111230295A (en) * | 2018-11-28 | 2020-06-05 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| CN116555764A (en) * | 2023-07-12 | 2023-08-08 | 江苏乐萌精密科技有限公司 | Thin-sheet metal composite wet etching method |
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US10340455B2 (en) | 2015-03-31 | 2019-07-02 | Boe Technology Group Co., Ltd. | Manufacturing method of mask plate assembly with colloid |
| WO2016155433A1 (en) * | 2015-03-31 | 2016-10-06 | 京东方科技集团股份有限公司 | Mask plate assembly and manufacture method therefor, and evaporation device and method for manufacturing display substrate |
| CN107414306A (en) * | 2016-05-20 | 2017-12-01 | 上海和辉光电有限公司 | A kind of metal mask preparation method |
| CN107414306B (en) * | 2016-05-20 | 2019-07-23 | 上海和辉光电有限公司 | A kind of metal mask preparation method |
| CN107309768A (en) * | 2017-06-14 | 2017-11-03 | 伯恩光学(惠州)有限公司 | The processing method of ceramic panel hole position |
| CN107309768B (en) * | 2017-06-14 | 2019-10-18 | 伯恩光学(惠州)有限公司 | The processing method of ceramic panel hole location |
| CN109848594B (en) * | 2017-11-30 | 2021-08-06 | 株式会社汉松新科技 | Dual-tension welding device and manufacturing method using same |
| CN109848594A (en) * | 2017-11-30 | 2019-06-07 | 株式会社汉松新科技 | Manufacture double tension-type welders of AMOLED movable type solder mask frame component and the manufacturing method using it |
| CN108526729A (en) * | 2018-04-13 | 2018-09-14 | 武汉华星光电半导体显示技术有限公司 | Laser cutting device and the preparation method that mask plate is deposited |
| CN110385527A (en) * | 2018-04-20 | 2019-10-29 | Tgo科技株式会社 | The manufacturing device of the one-piece type mask of frame |
| CN110385527B (en) * | 2018-04-20 | 2021-10-29 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| CN109023237A (en) * | 2018-08-21 | 2018-12-18 | 武汉华星光电半导体显示技术有限公司 | Metal mask plate and its manufacturing method |
| CN109023237B (en) * | 2018-08-21 | 2020-11-10 | 武汉华星光电半导体显示技术有限公司 | Metal mask plate and manufacturing method thereof |
| CN111230295A (en) * | 2018-11-28 | 2020-06-05 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| CN111230295B (en) * | 2018-11-28 | 2021-12-24 | Tgo科技株式会社 | Apparatus for manufacturing frame-integrated mask |
| CN116555764A (en) * | 2023-07-12 | 2023-08-08 | 江苏乐萌精密科技有限公司 | Thin-sheet metal composite wet etching method |
| CN116555764B (en) * | 2023-07-12 | 2023-09-12 | 江苏乐萌精密科技有限公司 | Thin-sheet metal composite wet etching method |
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Application publication date: 20141015 |