TWI723256B - Workpiece carrier and manufacturing method of workpiece carrier - Google Patents

Abstract

Provided is a workpiece carrier capable of preventing falling out of a resin insert portion in the radial direction and dropout in the front and back direction even when a carrier substrate is thin. The workpiece carrier has a resin insert portion (3) which is provided along an inner peripheral surface of a workpiece holding hole (2) formed in a metallic carrier substrate (1). The carrier substrate serving as an outer edge portion (13) of the workpiece holding hole is formed with front side recessed portions (4A) and backside recessed portions (4B) which are recessed in the front and back direction alternately in the circumferential direction, and is provided with a through hole portion (8) penetrating in the front and back direction continuous with the front side recessed portions and the backside recessed portions. Further, a synthetic resin material serving as the resin insert portion is filled in a portion along the inner peripheral surface of the front side recessed portion, the back side recessed portion, the through hole portion and the workpiece holding hole.

Description

Workpiece star wheel and manufacturing method of workpiece star wheel

The invention relates to a method for manufacturing a workpiece star wheel and a workpiece star wheel for holding the workpiece when a thin plate-shaped workpiece such as oxide wafer, silicon wafer, glass, sapphire, ceramic, crystal, etc. is polished by a grinding device.

It is known that when both sides or one side of a workpiece such as a silicon wafer is polished by a polishing device, the workpiece is held by a workpiece pinion wheel having a workpiece holding hole (see Patent Documents 1 to 4, etc.).

Since the planetary wheel substrate that becomes the body of the workpiece planetary wheel is formed of hard metal materials such as SK steel or stainless steel, when the workpiece is directly held in the workpiece holding hole drilled on the planetary wheel substrate, the workpiece touches during the grinding process. The inner peripheral surface of the workpiece holding hole may be damaged by cracks or defects.

Here, as disclosed in Patent Documents 1 to 4, a soft insert made of synthetic resin is installed along the inner peripheral surface of the workpiece holding hole to prevent damage to the workpiece during grinding.

Patent Document 1 describes that the inner peripheral surface of the workpiece holding hole is provided with protrusions at intervals in the circumferential direction, and the resin part is also filled between the protrusions by injection molding to integrate the resin part and the metal plate. Furthermore, by forming the chamfered part on the upper part and the lower part of the protruding part, it becomes a structure which can prevent the resin part from falling in the up-and-down direction and falling off.

In addition, Patent Document 2 describes that by providing a groove along the inner peripheral surface of the workpiece holding hole of the planetary wheel substrate, injection molding is performed by sliding a synthetic resin material into the groove, and a soft ring-shaped insertion portion is provided.

On the other hand, Patent Document 3 describes that by making the inner wall surface of the planetary wheel body forming the workpiece holding hole into a concave shape in the radial direction, the length of the upper and lower surfaces of the insertion portion in the radial direction is shortened, and the insertion portion is reduced. The worn or deformed structure.

Furthermore, Patent Document 4 discloses a metal star wheel used for grinding and processing thin workpieces. Although the resin coating holding part (insertion part) is also provided in the workpiece holding hole of this metal star wheel, the metal star wheel is provided with a small diameter hole so that the resin coating holding part will not peel off. Fill with the resin that becomes a part of the resin coating holding portion.

[Prior Technical Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2002-18708

[Patent Document 2] Japanese Patent Laid-Open No. 2009-12086

[Patent Document 3] Japanese Patent Laid-Open No. 2010-179375

[Patent Document 4] Japanese Utility Model Registration No. 3086591 Bulletin

However, the workpiece planetary gear trains disclosed in Patent Documents 1 and 2 process the inner peripheral surface of the workpiece holding hole of the planetary gear substrate in a concave and convex plan view. Since the upper or lower surface of the protruding part is chamfered to reduce the thickness, And make the protrusion easy to deform. Therefore, it is difficult to apply this kind of processing to the workpiece star wheel for thin objects as disclosed in Patent Document 4.

Therefore, the object of the present invention is to provide a workpiece planetary wheel and a method of manufacturing a workpiece planetary wheel that can prevent the resin insertion part from being detached in the radial direction or falling off in the front and back direction even when the planetary wheel substrate is thin.

In order to achieve the foregoing object, the workpiece planetary gear system of the present invention is provided with a resin insertion portion along the inner peripheral surface of the workpiece holding hole formed on the metal planetary planetary plate, wherein the outer edge portion of the workpiece holding hole becomes the aforementioned The planetary wheel substrate is alternately formed in the circumferential direction with front side recesses and back side recesses respectively recessed in the front and back direction, and the through holes are provided to be continuous with the front side recesses and the back side recesses and penetrate the front and back directions, And the part along the inner peripheral surface of the said front side recessed part, back side recessed part, and through-hole part, and the said workpiece|work holding hole is filled with the synthetic resin material which becomes a resin insertion part.

Here, it is preferable that the said front side recessed part and the said back side recessed part are provided with the space|interval in the circumferential direction. Furthermore, it may be a structure in which the said through-hole part is provided between each of the said front side recessed part and the said back side recessed part.

Further, it is possible to provide protrusions or holes on the bottom surfaces of the front and back recesses, and fill a part of the resin insertion portion around the protrusions or inside the holes. Furthermore, it may be a structure in which a narrow part is provided in the center side of the said workpiece|work holding hole of the said front side recessed part and a back side recessed part.

Furthermore, the invention of the manufacturing method of the workpiece planetary wheel includes: a mask forming process for forming a mask on the surface and back of the planetary wheel substrate with a predetermined drawing pattern; and an attaching process for attaching an etching solution to the forming mask On the planetary wheel substrate; and a setting process for setting the resin insertion portion on the planetary wheel substrate processed by the etching solution.

The workpiece planetary wheel of the present invention with such a structure is arranged alternately in the circumferential direction of the outer edge of the workpiece holding hole with front side recesses and back side recesses respectively recessed in the front and back direction. Therefore, the synthetic resin material filled in the front-side recesses and the back-side recesses can prevent the resin insertion portion from falling in the front-back direction.

In addition, since the through hole is provided to be continuous with the front and back recesses and penetrates the front and back directions and is filled with synthetic resin material, in addition to preventing the resin insertion part from detaching in the radial direction, the resin insertion part can also be made It is difficult to peel off.

Furthermore, since the front-side concave portion and the back-side concave portion do not protrude in the radial direction toward the center of the workpiece holding hole, it can be applied even when the planetary wheel substrate is thin. In particular, by providing the front side recesses and the back side recesses at intervals in the circumferential direction, it becomes the cruise star board with the entire thickness remaining on both sides of the front side recesses and the back side recesses, making it more difficult to deform the cruise ship board.

In addition, by providing a through hole between each of the front side recesses and the back side recesses, all the front side recesses and the back side recesses passing through the through hole are continuously integrated in the circumferential direction, so that the resin insertion part can be made more difficult to peel off.

Furthermore, by providing protrusions or holes on the bottom surfaces of the front and back recesses, and filling a part of the resin insertion portion around or inside the holes, the radial movement of the resin insertion portion can be reliably suppressed, and the A physical nature of the base plate of the cruiser.

In addition, by providing a narrow part on the center side of the workpiece holding hole of the front side recess and the back side recess, the radial movement of the resin insertion part can be reliably suppressed, and the integration with the planetary wheel substrate can be improved.

Furthermore, with the invention of the manufacturing method of the workpiece planetary wheel, the etching solution can be applied to the planetary wheel substrate with the mask formed in a predetermined drawing pattern, and then the etching process is carried out, and the resin insertion part can be provided, which can be effectively manufactured. The planetary wheel base plate and the resin insert part is a high-integrity workpiece planetary wheel.

1. 1A, 1B, 1C: base plate of cruise ship

2: Workpiece holding hole

3. 3A, 3B, 3C: resin insert

4A, 4C, 6A, 7A: surface side recess

4B, 4D, 6B, 7B: dorsal recess

5A, 5B: Mask part

8, 8A: Through hole

10: Workpiece star wheel

11: Appearance Department

13: Outer edge

31: Ring part

32, 34, 36: filling part

33, 33A: Hole filling part

35: columnar part

41, 61: Bottom

42: Cylindrical part (protruding part)

62: Cylinder part (hole part)

71: side

In order to make the description of the present invention and other objectives, features, advantages and embodiments more comprehensible, the description of the accompanying drawings is as follows: Fig. 1A is a plan view showing the vicinity of the outer edge of the workpiece holding hole of the workpiece planetary wheel of this embodiment enlarged for explanation; Fig. 1B is an enlarged view of the vicinity of the outer edge of the workpiece holding hole of the workpiece planetary wheel of this embodiment for explanation 3D view; Figure 2 is a plan view illustrating the general structure of the workpiece star wheel; Figure 3A is a plan view of the surface of the star wheel substrate used to illustrate the steps of the manufacturing method of the workpiece star wheel of this embodiment; Figure 3B is used to illustrate this embodiment Figure 4A is a cross-sectional view from the direction of arrow AA in Figure 3A; Figure 4B is a cross-sectional view from the direction of arrow BB in Figure 3B; Figure 4A is a cross-sectional view from the direction of arrow AA in Figure 3A; Figure 4B is a cross-sectional view from the direction of arrow BB in Figure 3B; 5 is a perspective view showing the state where the planetary wheel base plate and the resin insertion part are integrated; FIG. 6 is a perspective view showing the vicinity of the outer edge of the workpiece holding hole of the workpiece planetary wheel of Example 1 enlarged for explanation; FIG. 7A is from FIG. 6 Fig. 7B is a cross-sectional view from the direction of the DD arrow in Fig. 6; Fig. 8 is an enlarged perspective view of the vicinity of the outer edge of the workpiece holding hole of the workpiece planetary wheel of Example 2 for explanation; 9A is a cross-sectional view illustrating a structure in which a resin insertion portion is provided on the inner peripheral surface of the workpiece holding hole of Example 2 in the position of the EE arrow in FIG. 8; FIG. 9B is a sectional view illustrating the position in the FF arrow direction of FIG. 8 The cross-sectional view of the structure in which the resin insertion portion is provided on the inner peripheral surface of the workpiece holding hole of Example 2; and FIG. 10 is a plan view illustrating the vicinity of the outer edge of the workpiece holding hole of the workpiece planetary wheel of Example 3 in an enlarged manner.

Hereinafter, the embodiments of the present invention will be described with reference to the drawings. 1A, 1B and FIG. 2 are diagrams illustrating the structure of the workpiece planetary wheel 10 of this embodiment. FIG. 2 shows the general structure of the whole, and FIG. 1A and FIG. 1B show the vicinity of the outer edge portion 13 of the workpiece holding hole 2 in an enlarged manner.

The workpiece planetary wheel 10 is used by being installed on a double-sided or single-sided flat grinding device for grinding and processing a thin-plate-shaped workpiece. For example, a flat surface grinding device for grinding both sides of a workpiece includes: upper and lower fixed plates, sun gears arranged in the center of the upper and lower fixed plates, and arranged on the upper and lower fixed plates Internal gear on the outer peripheral side. The upper fixing plate, the lower fixing plate, the sun gear and the internal gear rotate freely respectively.

In addition, the workpiece planetary wheel 10 as shown in FIG. 2 is arranged between the upper and lower plates of the flat grinding device. The workpiece planetary wheel 10 is formed into a disc-shaped body by a metal planetary wheel base plate 1. In this planetary wheel base plate 1, for example, plural circular workpiece holding holes 2, ‧ ‧ are drilled. In addition, a resin insertion portion 3 is provided along the inner peripheral surface of the workpiece holding hole 2.

In the workpiece planetary wheel 10, the outer shape portion 11 is provided with a tooth portion (illustration omitted) that meshes with the sun gear and the internal gear, and rotates and revolves by the rotation of the sun gear and the internal gear. In addition, by the rotation and revolution of the workpiece planetary wheel 10, both sides of the workpiece arranged in the workpiece holding hole 2 of the workpiece planetary wheel 10 are ground by the upper and lower platens.

The star wheel base plate 1 is cut out from a metal plate in a circular plate shape. Stainless steel (SUS), high-carbon chromium bearing steel, carbon tool steel (SK steel), high-speed tool steel, alloy tool steel, high-tensile steel, titanium, etc. can be used as the metal plate.

In particular, when polishing a thin-plate-shaped workpiece, a thin planetary wheel substrate 1 is used. For example, a planetary wheel substrate 1 with a thickness (height in the front and back direction) of about 0.1 mm to 1.0 mm is used. In addition, According to the thickness of the workpiece, 0.7mm or less is used, and a thin planetary wheel substrate 1 with a thickness of 0.5mm or less is further used.

On the other hand, the resin insertion part 3 is molded by a synthetic resin material. As a synthetic resin material, polyamide (PA), polyacetal (POM), polyimid (PI), polyvinyl chloride (PVC), polyamide (PAI), polycarbonate ( PC), epoxy (EP) and other resins or glass epoxy, cloth-inserted bakelite and other fiber-reinforced plastics.

When the resin insertion part 3 is provided by injection molding as described later, a thermoplastic resin is used. In addition, when the resin insertion portion 3 is provided by thermocompression bonding, a thermosetting resin is used.

In the star wheel base plate 1 that becomes the outer edge portion 13 of the workpiece holding hole 2 of the present embodiment, in order to improve the integration with the resin insertion portion 3, as shown in FIGS. 1A and 1B, they are alternately formed in the circumferential direction. The front side recessed portion 4A and the back side recessed portion 4B are recessed in the front and back direction.

When viewed in a plan view recessed from the front side to the back side of the planetary base plate 1, the front side recessed portion 4A is formed in a rectangular shape. The depth of the front-back direction of the front-side recess 4A becomes about half of the thickness of the planetary wheel base plate 1.

On the other hand, the back side recesses 4B are provided at intervals in the circumferential direction of the workpiece holding hole 2 from the front side recesses 4A. When viewed in a plan view recessed from the back side of the planetary base plate 1 to the front side, the back side recesses 4B are formed in a rectangular shape. of. The depth of the back side recess 4B in the front and back direction becomes about half the thickness of the planetary wheel base plate 1.

Here, since the front side recessed portion 4A and the back side recessed portion 4B are separated from each other when viewed in a plan view, the main body of the planetary wheel substrate 1 of the entire thickness remains therebetween. That is, although the front side recessed portion 4A and the back side recessed portion 4B are open on the center side of the workpiece holding hole 2, except for the corners described later, the two sides in the circumferential direction and the deep side in the radial direction are the sides of the planetary wheel substrate 1 Status supported by the ontology.

In addition, a through hole 8 is provided between each of the front side recessed portion 4A and the back side recessed portion 4B. This through-hole part 8 is a hole which penetrates the front-back direction, and the front side recessed part 4A and the back side recessed part 4B respectively form a continuous space.

In detail, the through-hole portion 8 connects the far side corner portion of the front side recess 4A (opposite to the center of the workpiece holding hole 2) and the far side corner portion of the back side recessed portion 4B, for example, forming a plan view Oval. Therefore, at the position where the front side recessed portion 4A (or back side recessed portion 4B) and the through-hole portion 8 overlap, the recess from the front side to the back side (or from the back side to the front side of the cruise base board 1) of the planetary wheel base plate 1 is missing and becomes penetrating Of the hole. In addition, a through hole portion may be provided so as to be in contact with the front side recessed portion 4A (or the back side recessed portion 4B). In this case, the depression from the front side to the back side of the planetary wheel base plate 1 (or from the back side to the front side of the planetary wheel base plate 1) is not defective.

As shown in FIG. 5, in this through-hole portion 8, a synthetic resin material is filled so as to become a part of the resin insertion portion 3 to form a hole filling portion 33, which serves as a resisting portion that prevents the resin insertion portion 3 from moving in the radial direction. . Since the hole filling portion 33 and the planetary wheel substrate 1 have the same thickness, they can be used as a strong locking portion.

That is, the resin insertion portion 3 is formed of an annular ring portion 31 having a diameter approximately the same as the diameter of the workpiece holding hole 2, and a plurality of rectangular parallelepiped shapes formed in the cavities of the front side recessed portion 4A and the back side recessed portion 4B Filling parts 32, ‧‧‧ and a plurality of hole filling parts 33, ‧‧‧ formed in the inner space of the through-hole part 8. The annular part 31, the plural filling parts 32, ‧‧‧ and the plural hole filling parts 33, ‧‧‧ are integrally molded by synthetic resin materials.

Next, referring to FIGS. 3A and 3B and FIGS. 4A and 4B, the method of manufacturing the workpiece planetary wheel 10 of this embodiment will be described. First, mask formation is performed with a predetermined drawing pattern on the front and back surfaces of the planetary wheel substrate 1. Specifically, using data created with CAD/CAM systems, etc., a high-precision drawing pattern master is created from a laser plotter, etc.

In addition, the front and back surfaces of the planetary wheel substrate 1 are subjected to pretreatments such as acid treatment or electrolytic polishing to remove the oxide film. Then, the photoresist is respectively coated on the entire surface and the back surface of the planetary wheel substrate 1.

And, using the original plate with the drawing pattern, the surface and the back surface of the planetary wheel substrate 1 coated with the photoresist are exposed and baked. The mask parts 5A and 5B shown in the figure show the photoresist layer remaining after baking and development.

In short, as shown in FIGS. 3A and 4A, on the surface of the planetary wheel base plate 1, the plurality of front-side concave portions 4A, ‧‧‧ and the plurality of through-hole portions 8, ‧‧‧ become the mask portion 5A. In addition, as shown in FIG. 3B and FIG. 4B, on the back surface of the planetary wheel base plate 1, the plural back side recesses 4B, ‧‧‧ and the through-hole portion 8 are the masking portion 5B.

Furthermore, the etching liquid is sprayed and adhered to the surface and the back surface of the planetary wheel substrate 1 forming the mask. By the adhesion of the etching solution, the exposed surface of the planetary wheel substrate 1 other than the mask portions 5A and 5B is removed, forming a front-side concave portion 4A and a back-side concave portion 4B that are recessed in the front-back direction, and a pass through the front-back direction孔部8。 Hole 8.

The front side recessed portion 4A and the back side recessed portion 4B are dissolved to a desired depth, and the mask portions 5A and 5B are penetrated and removed at the stage where the through-hole portion 8 penetrates, and washed and dried. As shown in FIG. 1B, in the steps up to this point, the outer edge portion 13 of the workpiece holding hole 2 of the planetary wheel substrate 1 is formed with a front side recessed portion 4A, a back side recessed portion 4B, and a through hole portion 8.

For the plural workpiece holding holes 2 of the planetary wheel substrate 1 processed by etching in this way, a resin insertion portion 3 is provided on the inner peripheral surface of ‧‧‧. The resin insertion portion 3 is provided by injection molding of a synthetic resin material or thermocompression bonding.

During injection molding, a template is set at the position that becomes the inner surface of the workpiece holding hole 2, and the heated and melted synthetic resin material is injected into the space between the template and the outer edge portion 13 of the planetary wheel base plate 1, and cooled by cooling. Make it solidify. Since the through hole portion 8 is formed to be continuous with the front side recessed portion 4A and the back side recessed portion 4B, the synthetic resin material can flow in. On the other hand, in the case of thermocompression bonding, the resin insertion portion 3 can be provided by forming a prepreg layer into a desired shape and pressing it under heating and pressure.

Hereinafter, the function of the manufacturing method of the workpiece planetary wheel 10 and the workpiece planetary wheel 10 of this embodiment will be described. In the workpiece planetary wheel 10 of the present embodiment with such a structure, the front side recesses 4A and the back side recesses 4B respectively recessed in the front and back direction are alternately provided in the circumferential direction of the outer edge portion 13 of the workpiece holding hole 2. Furthermore, the through-hole part 8 is provided which continues with the front side recessed part 4A and the back side recessed part 4B, and penetrates the front-back direction.

The front side recessed portion 4A, the back side recessed portion 4B, and the through hole portion 8 are provided with the filling portions 32, 32 and the hole filling portion 33, which are part of the resin insertion portion 3, to prevent the resin insertion portion 3 from moving (displacement) in the circumferential direction .

Furthermore, since the front side recesses 4A and the back side recesses 4B are alternately formed in the circumferential direction on both the front side and the back side of the planetary planetary substrate 1, the filling parts 32 and 32 are respectively provided in the inner space, and the planetary planetary substrate 1 It is sandwiched by the filling parts 32 and 32, and therefore, it is possible to prevent the resin insertion part 3 from falling off in either direction of the front surface and the back surface of the planetary wheel substrate 1. For example, in the case where the resin insertion portion 3 is provided by injection molding or thermocompression bonding, although it shrinks when it is cooled and solidified, as long as it is provided on both sides of the planetary wheel substrate 1 by the front side recessed portion 4A and the back The filling portions 32 and 32 of the undercut portion 4B can prevent falling off even if the resin insertion portion 3 is slightly shrunk.

In addition, the hole filling portion 33 provided in the through hole portion 8 penetrating the front and back direction serves as a resistance portion that prevents the resin insertion portion 3 from moving in the radial direction. In other words, even if the resin insertion portion 3 shrinks, etc., which may cause a radial displacement to the center of the workpiece holding hole 2, the hole filling portion 33 may be a locking portion to prevent falling (peeling).

Furthermore, since the front side recessed portion 4A and the back side recessed portion 4B do not protrude in the radial direction toward the center of the workpiece holding hole 2 such as a convex tooth, it can be applied even when the planetary wheel substrate 1 is thin. For example, it can be applied to a planetary wheel substrate 1 of 1.0 mm or less used for grinding a thin-plate-shaped workpiece. In addition, it can be applied to the case where it is used for the grinding of thinner workpieces of 0.7 mm or less, and it can also be applied to the thin planetary wheel substrate 1 having a thickness of 0.5 mm or less.

In the workpiece planetary wheel 10 of this embodiment, since the front side recesses 4A and the back side recesses 4B are arranged at intervals in the circumferential direction, the entire thickness of the planetary wheel substrate 1 remains on both sides of the front side recesses 4A and the back side recesses 4B. Therefore, the front side recessed portion 4A and the back side recessed portion 4B, which have a thinner thickness, are supported by both sides and the three sides of the far side (except near the corners) and are hardly deformed.

In addition, by providing the through hole portion 8 between each of the front side recessed portion 4A and the back side recessed portion 4B, the resin insertion portion 3 can be made more difficult to peel off. That is, although the resin insertion portion 3 exposed on the polishing surface is more likely to be worn or deformed during the polishing process than the planetary wheel substrate 1, as long as the hole filling portion 33 formed in the through hole portion 8 and the planetary wheel substrate 1 are The same thickness can make it difficult to cause peeling of the resin insertion portion 3 even if it is repeatedly used for polishing.

Furthermore, as long as the hole filling portion 33 is penetrated, all the front side recesses 4A and back side recesses 4B are also continuous and integrated in the circumferential direction on the inner side of the planetary wheel base plate 1 (the side opposite to the center of the workpiece holding hole 2) It is possible to make the resin insertion part 3 more difficult to peel off.

In addition, with the method of manufacturing the workpiece planetary wheel 10 of this embodiment, the etching solution is applied to the planetary wheel substrate 1 that forms a mask with a predetermined drawing pattern, and etching is performed. The process of installing the resin insertion portion 3 can effectively manufacture the workpiece planetary wheel 10 with a high integration between the planetary wheel substrate 1 and the resin insertion portion 3.

[Example 1]

Hereinafter, while referring to FIGS. 6, 7A, and 7B, the first embodiment in which the workpiece planetary wheel 10 described in the foregoing embodiment is another aspect will be described. In addition, the same terms or the same symbols are used to describe the same or equivalent parts as those described in the foregoing embodiment.

In the foregoing embodiment, the hole filling portion 33 formed in the through hole portion 8 is described as the resisting portion. In the first embodiment, a description will be given of a case in which a cylindrical portion 42 serving as a resisting portion is additionally provided on the bottom surface 41 of the front side recessed portion 4C and the back side recessed portion 4D.

As shown in FIG. 6, in the star wheel substrate 1A of the first embodiment, the front side recess 4C and the back side recess 4D are provided with a cylindrical portion 42 in the approximate center of the plan view. The cylindrical portion 42 is a protrusion extending upward (or downward) from the bottom surface 41 of the front side recess 4C (or the back side recess 4D). The height of this columnar portion 42 is equal to the depth of the front side recessed portion 4C (or the back side recessed portion 4D), which is about half of the planetary wheel base plate 1A.

As shown in FIGS. 7A and 7B, when the cylindrical portion 42 is filled with a synthetic resin material so as to become a part of the resin insertion portion 3A to form the filling portion 32, the cylindrical portion 42 becomes a radial direction preventing the resin insertion portion 3A. Moving resistance.

The height (effect) as the function of this resistance part differs depending on the shape of the protrusion. As shown in FIGS. 7A and 7B, the angle θ formed by the side surface of the distal side of the cylindrical portion 42 (the side opposite to the center of the workpiece holding hole 2) and the bottom surface 41 is about 90°. The larger the angle θ, the higher the function of preventing the movement of the resin insertion portion 3A in the center direction of the workpiece holding hole 2. The angle θ is preferably 70° or more, and more preferably 90° or more. If the angle θ becomes an obtuse angle and inclines to the distal side, it can be used as a stronger locking portion. In addition, the shape of the side surface of the columnar portion 42 is not limited to a linear shape in a side view, and may be a curved shape or a shape with unevenness.

Furthermore, the shape of the protrusions provided in the front side recessed portion 4C and the back side recessed portion 4D is not limited to a cylindrical shape, and can be provided in various shapes such as a rectangular parallelepiped shape and a polygonal column shape. Regardless of the shape of the protruding portion, it can exert a movement suppression function that prevents the movement of the resin insertion portion 3A in the radial direction.

In the mask forming step, mask formation is performed at the place where the cylindrical portion 42 in the front side recess 4C is formed, and mask formation is performed at the place where the cylindrical portion 42 in the back side recess 4D is formed, to form this cylindrical portion. 42.

During injection molding, a template is set at a position that becomes the inner side of the workpiece holding hole 2, and the heated and melted synthetic resin material is injected and injected into the space between the template and the outer edge portion 13 of the planetary wheel base plate 1A. It cures. As long as it is the protruding cylindrical portion 42, the synthetic resin material can be surrounded without a gap.

In addition, if the cylindrical portion 42 is additionally provided on the front side recessed portion 4C and the back side recessed portion 4D as a resistance portion that prevents the resin insertion portion 3A from moving in the radial direction, even if the resin insertion portion 3A shrinks, it may cause retention of the workpiece. In the case of displacement in the radial direction of the center of the hole 2, the columnar portion 42 may serve as a locking portion to prevent separation (peeling). In short, the effect of the cylindrical portion 42 is added to the detachment prevention function of the hole filling portion 33.

Furthermore, since the cylindrical portion 42 is the planetary wheel substrate 1A itself and is formed of a hard metal material, it can be strongly resisted to the movement of the resin insertion portion 3A, and detachment or peeling can be reliably prevented. In addition, this other structure and effect of Example 1 are substantially the same as those of the foregoing embodiment or other examples, and description thereof will be omitted.

[Example 2]

Hereinafter, referring to Figs. 8, 9A, and 9B, the second embodiment in which the workpiece planetary wheel 10 described in the foregoing embodiment and embodiment 1 is another form will be described. In addition, use the same terms Or the description of the same reference numerals is the same or equal to the contents described in the foregoing embodiment or Example 1.

In the foregoing embodiment 1, a case where the cylindrical portion 42 is added as a resistance portion to the bottom surface 41 of the front side recessed portion 4C and the back side recessed portion 4D is described. In the second embodiment, a case where the bottom surface 61 of the front side recessed portion 6A and the back side recessed portion 6B is provided with a cylindrical portion 62 instead of the cylindrical portion 42 as a hole portion serving as a resistance portion will be described.

In the planetary wheel substrate 1B of the second embodiment, on the front side recessed portion 6A and the back side recessed portion 6B provided on the outer edge portion 13 of the workpiece holding hole 2, as shown in FIG. 8, the cylindrical portion 62 is provided approximately in a plan view. central. This cylindrical part 62 is a hole part penetrated from the bottom surface 61 of the front side recessed part 6A (or back side recessed part 6B) to the downward (or upper) surface. The depth of the cylindrical portion 62 is approximately half of the planetary base 1B.

As shown in FIGS. 9A and 9B, when the cylindrical portion 62 is filled with a synthetic resin material so as to become a part of the resin insertion portion 3B to form the columnar portion 35, the columnar portion 35 serves as a stopper for the resin insertion portion 3B. Resistance to movement in the radial direction.

The resin insertion portion 3B is formed by a circular ring portion 31 formed in a ring shape, a plurality of rectangular parallelepiped filling portions 34 formed in the inner space of the front side recessed portion 6A and the back side recessed portion 6B, ‧‧‧, formed on the plurality of cylindrical portions 62, ‧ ‧ are formed by a plurality of cylindrical columnar portions 35, ‧ ‧ and a plurality of hole filling portions 33, ‧ ‧ formed in the inner space of the through hole portion 8. The annular part 31, the plural filling parts 34, ‧‧‧, the plural columnar parts 35, ‧‧‧, and the plural hole filling parts 33 are integrally molded by synthetic resin materials.

The workpiece planetary wheel 10 of the second embodiment of this structure is arranged alternately in the circumferential direction of the outer edge portion 13 of the workpiece holding hole 2 with front side recesses 6A and back side recesses 6B respectively recessed in the front and back direction, and in the front side recesses The cylindrical part 62 of 6A and the back side recessed part 6B is provided with the columnar part 35 which is a part of the resin insertion part 3B.

Even if the resin insertion portion 3B shrinks, etc., it is likely to cause a displacement in the radial direction of the center of the workpiece holding hole 2, the columnar portion 35 extending inside the cylindrical portion 62 can also serve as a locking portion. Become the resistance department to prevent detachment. In short, the effect of the columnar portion 35 is added to the detachment prevention function of the hole filling portion 33.

Here, the shape of the hole provided in the front side recessed portion 6A and the back side recessed portion 6B is not limited to a cylindrical shape, and may be provided in various shapes such as a rectangular cylindrical shape and a polygonal cylindrical shape. Regardless of the shape of the hole, it can exert a movement suppression function that prevents the movement of the resin insertion portion 3B in the radial direction.

Moreover, in the workpiece planetary wheel 10 of the second embodiment, due to the plural filling portions 34 provided in the front concave portion 6A and the back concave portion 6B, the function of stopping the rotation in the circumferential direction and the drop in the front and back direction are exerted by the plurality of filling portions 34 provided in the front-side concave portion 6A and the back-side concave portion 6B. Fall prevention function, and the plural hole filling parts 33, ‧ ‧ provided in the through hole part 8 and the plural cylindrical parts 35, ‧ ‧ provided in the plural cylindrical parts 62, ‧ ‧ play the circumference The rotation stop function in the direction and the movement suppression function in the radial direction can ensure high integration with the planetary wheel substrate 1B and the resin insertion portion 3B. In addition, this other structure and effect of Example 2 are substantially the same as those of the foregoing embodiment or other examples, and the description is omitted.

[Example 3]

Hereinafter, referring to FIG. 10, it will be described that the workpiece planetary wheel 10 described in the foregoing embodiment and the first and second embodiments is another embodiment of the third embodiment. In addition, the same terms or the same symbols are used to describe the same or equivalent parts as those described in the foregoing embodiment or Examples 1 and 2.

In the foregoing embodiment and Examples 1 and 2, it will be described that the cylindrical portion 42 or the cylindrical portion 62 is provided on the bottom surfaces 41, 61 of the hole filling portion 33 of the through hole portion 8 and the front side recessed portions 4C, 6A and the back side recessed portions 4D, 6B. As the case of the Ministry of Resistance. In the third embodiment, a case where the resisting portion is formed by the shape of the front side recessed portion 7A and the back side recessed portion 7B in plan view will be described.

As shown in FIG. 10, the resistance part of this Example 3 is a narrow part formed by the side surfaces 71 and 71 which become the inclined surface of the front side recessed part 7A and the back side recessed part 7B. That is, the side surface 71 is inclined in the widening direction from the center side of the workpiece holding hole 2 to the outside. As a result, the front side recessed portion 7A and the back side recessed portion 7B become narrow portions having a narrowed open side (the center side of the workpiece holding hole 2) in plan view, and are formed in a wide trapezoid (wedge shape) on the distal side as a whole.

Here, since the front side recessed portion 7A and the back side recessed portion 7B are formed with narrow portions narrowing the center side of the workpiece holding hole 2 in plan view as a resistance portion. Therefore, the side surface 71 is not limited to a straight inclined surface, and may be Is the slope of the curve. For example, by forming the front side recessed portion 7A and the back side recessed portion 7B in a T shape, a Y shape, or a flask shape in a plan view, a narrow portion may be provided on the center side of the workpiece holding hole 2.

In addition, the through-hole portion 8A connects the apex portion on the far side of the front side recess 7A (on the opposite side to the center of the workpiece holding hole 2) and the far side apex portion of the back side recessed portion 7B, for example, is formed as a plan view ellipse shape. Therefore, at the position where the front side recessed portion 7A (or back side recessed portion 7B) and the through hole portion 8A overlap, the recess formed from the front side to the back side (or from the back side to the front side of the cruise base board 1C) of the cruise ship board 1C is lacking, And become a through hole.

When the through-hole portion 8A is filled with a synthetic resin material so as to become a part of the resin insertion portion 3C to form the hole filling portion 33A, it becomes a resistance portion that prevents the resin insertion portion 3C from moving in the radial direction. Since the hole filling portion 33A has the same thickness as the thickness of the planetary wheel substrate 1, it can be used as a strong locking portion.

Furthermore, when the inner space of the trapezoidal front side recess 7A and the back side recess 7B is filled with a synthetic resin material so as to become a part of the resin insertion portion 3C to form the filling part 36, the wedge-shaped filling part 36 is not easy to face the workpiece in the narrow part. The state where the center side of the hole 2 moves is maintained, and becomes a resistance portion that prevents the resin insertion portion 3C from moving in the radial direction.

The resin insertion portion 3C is formed by a ring portion 31 formed in a ring shape, a plurality of filling portions 36 formed in the inner space of the front side recessed portion 7A and the back side recessed portion 7B, ‧‧‧, formed in the inner space of the through hole portion 8A It is constituted by a plurality of hole filling portions 33A. The annular part 31, the plural filling parts 36, ‧‧‧, and the plural hole filling parts 33A are integrally molded by synthetic resin materials.

The workpiece planetary wheel 10 of the third embodiment of this structure is arranged alternately in the circumferential direction of the outer edge portion 13 of the workpiece holding hole 2 with approximately wedge-shaped front side recesses 7A and back side recesses 7B respectively recessed in the front and back direction in plan view.

Due to the plurality of filling portions 36 that are substantially wedge-shaped in plan view provided in the front side recesses 7A and back side recesses 7B, the function of stopping the rotation in the circumferential direction and the function of preventing falling toward the front and back is performed as well as the diameter The function of restraining the movement in the direction, therefore, in addition to the function of the hole filling portion 33A formed in the through hole portion 8A, it is possible to ensure high integration of the planetary wheel substrate 1C and the resin insertion portion 3C.

In addition, it is also possible to combine the resistance part by the protrusion part or the hole part in the resistance part by the narrow part. In this case, the movement suppression function of preventing the movement of the resin insertion portion 3C in the radial direction can also be improved. In addition, the other structure and effects of the third embodiment are substantially the same as those of the foregoing embodiment or other embodiments, and the description is omitted.

Above, although the embodiments and embodiments of the present invention are described in detail with reference to the drawings, the specific structure is not limited to these embodiments and embodiments, and design changes within the scope not departing from the gist of the present invention are also included in the present invention .

For example, in the foregoing embodiments and examples, it has been described that the workpiece holding hole 2 is a circular workpiece planetary wheel 10, but it is not limited to this. For example, the present invention can also be applied to a workpiece star wheel having a rectangular (including square) workpiece holding hole. In short, it is possible to alternately form front-side recesses and recesses in the front and back directions in the circumferential direction of the inner peripheral surface of the rectangular workpiece holding hole. The back side recessed portion is formed with a through hole continuous with the front side recessed portion and the back side recessed portion, and a rectangular resin insertion portion is provided along the inner peripheral surface thereof. Furthermore, the workpiece holding hole may have a shape other than a circle and a rectangle.

In addition, although the foregoing embodiments and examples describe the case where the through holes 8, 8A are provided between each of the front side recesses 4A, 4C, 6A, 7A and the back side recesses 4B, 4D, 6B, 7B, it is not limited Here, it can be every 1 or every 2 etc., and it is not necessary to set it at all intervals.

1‧‧‧The base plate of the cruiser

2‧‧‧Workpiece holding hole

3‧‧‧Resin insert

4A‧‧‧Concavity on the front side

4B‧‧‧Back side recess

8‧‧‧Through hole

13‧‧‧Outer edge

41‧‧‧Bottom

Claims (8)

A workpiece planetary wheel is provided with a resin insertion portion along the inner peripheral surface of a workpiece holding hole formed on a metal planetary planetary wheel base plate, wherein: on the planetary wheel base plate that becomes the outer edge of the workpiece holding hole, In the circumferential direction, front side recesses and back side recesses respectively recessed in the front and back direction are alternately formed, and the through holes are provided so as to be continuous with the front side recesses and back side recesses and penetrate the front and back directions along the front side recesses, The back side recessed portion and the through-hole portion and the part of the inner peripheral surface of the aforementioned workpiece holding hole are filled with a synthetic resin material that becomes a resin insertion portion. The workpiece planetary wheel described in the first item of the scope of patent application, wherein the front side recesses and the back side recesses are provided at intervals in the circumferential direction. In the workpiece planetary wheel described in item 2 of the scope of patent application, the through hole is provided between each of the front side recesses and the back side recesses. The workpiece planetary wheel described in the first item of the patent application, wherein protrusions or holes are provided on the bottom surfaces of the front recesses and the back recesses, and the resin insertion portions are filled around the protrusions or inside the holes Part of it. The workpiece planetary wheel described in the second item of the patent application, wherein protrusions or holes are provided on the bottom surfaces of the front recesses and the back recesses, and the resin insertion portions are filled around the protrusions or inside the holes Part of it. The workpiece planetary wheel described in claim 3, wherein protrusions or holes are provided on the bottom surfaces of the front side recesses and the back side recesses, and the resin insertion portions are filled around the protrusions or inside the holes Part of it. The workpiece planetary wheel according to any one of items 1 to 6 in the scope of the patent application, wherein a narrow portion is provided on the center side of the workpiece holding hole of the front side recessed portion and the back side recessed portion. A method for manufacturing a workpiece planetary wheel, which is a method for manufacturing a workpiece planetary wheel as described in any one of items 1 to 7 of the scope of patent application, comprising: a mask forming process for forming a predetermined drawing pattern on the aforementioned planetary wheel A mask is formed on the surface and back of the substrate; an attaching process for attaching the etching solution to the planetary wheel substrate forming the mask; and a setting process for applying the resin to the planetary wheel substrate processed by the etching solution Insertion department.

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