CN107457689B - A star wheel that moves for single face is polished - Google Patents
A star wheel that moves for single face is polished Download PDFInfo
- Publication number
- CN107457689B CN107457689B CN201710925247.8A CN201710925247A CN107457689B CN 107457689 B CN107457689 B CN 107457689B CN 201710925247 A CN201710925247 A CN 201710925247A CN 107457689 B CN107457689 B CN 107457689B
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- CN
- China
- Prior art keywords
- concave
- wheel
- unit
- polishing
- convex part
- Prior art date
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Links
- 238000005498 polishing Methods 0.000 claims abstract description 26
- 230000007704 transition Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 10
- 238000000034 method Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention relates to a planetary wheel for single-sided polishing, which has the structure as follows: the planetary wheel consists of at least one unit wheel, a grinding hole is formed in the unit wheel, at least one of the upper surface or the lower surface of the unit wheel is provided with continuous concave-convex parts, the concave-convex parts are distributed on the surface of the unit wheel, and the concave parts are matched with the convex parts in shape; the height difference between the concave part and the convex part is in the range of 0.2-0.5 cm. The invention is suitable for grinding optical devices with different thicknesses, and can finish grinding work on one side and the other side.
Description
Technical Field
The invention relates to a grinding device, in particular to a planetary wheel capable of being used for single-sided grinding.
Background
Most of the existing star wheels are designed for double-sided polishing of optical devices, that is, the thickness of the star wheel is smaller than that of the optical device, in some cases, if only one surface needs to be polished, a user will generally select the star wheel with a thicker thickness so as to ensure that the other surface of the optical device is not polished, but the efficiency of the manner is low, and the double-sided polishing disc of the polishing device cannot be effectively utilized. Chinese patent publication CN103158054B discloses two single-sided polishing methods implemented on a double-sided polisher, in which two optical devices to be polished are bonded by means of an adhesive, so that only one side of each of the two optical devices is polished, which also has a certain requirement for the thickness selection of the star wheel, and in which the polishing process is not completed in one step because the other side of the optical device, which does not need to be polished, still needs to be subjected to a polishing process.
Disclosure of Invention
The invention aims to solve the technical problem of providing a planetary wheel for single-sided polishing, which can be suitable for polishing optical devices with different thicknesses, and can finish polishing work on one side while polishing the other side.
The technical proposal adopted by the invention for solving the technical problems is that
A star wheel that moves for single face is polished, its structure is: the planetary wheel consists of at least one unit wheel, a grinding hole is formed in the unit wheel, at least one of the upper surface or the lower surface of the unit wheel is provided with continuous concave-convex parts, the concave-convex parts are distributed on the surface of the unit wheel, and the concave parts are matched with the convex parts in shape; the height difference between the concave part and the convex part is in the range of 0.2-0.5 cm.
Further, the planetary wheel at least comprises a first unit wheel and a second unit wheel, and the concave-convex part on the upper surface of the first unit wheel is mutually attached to the concave-convex part on the lower surface of the second unit wheel.
Further, the concave-convex part is in smooth transition, and the vertex of the concave-convex part is in a circular arc shape.
Preferably, the planet comprises a transverse relief and a longitudinal relief.
Further, a sanding layer is provided in the sanding hole between the first unit wheel and the second unit wheel.
Preferably, at least one of the upper surface or the lower surface of the unit wheel is provided with a fixing hole, the fixing hole is concavely arranged around the polishing hole, the polishing layer area is larger than the polishing hole, and the part of the polishing layer extending out of the polishing hole is fixed by the fixing hole.
Compared with the prior art, the invention has the following advantages and effects: the thickness of the free adjustment of the star wheel is realized through the arrangement of the concave-convex part structure, the height difference of the concave-convex part ensures that the connection strength between the unit wheels can be ensured under the condition that the processing of the star wheel is not influenced, the smooth arrangement of the concave-convex part ensures that the abrasion between the unit wheels in the rotation process is smaller, and the arrangement of the transverse and longitudinal concave-convex parts ensures the positioning between the unit wheels in four directions. When the number of the unit wheels is more than or equal to two, a space for storing the polishing layer can be formed between the unit wheels for the polishing work of the non-abrasive surface.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained according to these drawings without inventive faculty for a person skilled in the art.
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a cross-sectional view of the present invention.
Description of the reference numerals:
fixing hole 3 of grinding hole 2 of planetary wheel 1
Transverse relief 4 longitudinal relief 5 optics 6
Polishing layer 7
Detailed Description
The present invention will be described in further detail with reference to the following examples, which are illustrative of the present invention and are not intended to limit the present invention thereto.
Example 1:
as shown in fig. 1 to 2, the present star wheel 1 is composed of a first unit wheel 1A and a second unit wheel 1B, each unit wheel is provided with a grinding hole 2 at the same position for accommodating an optical device 6, and an indent fixing hole 3 is provided around the grinding hole 2, the upper and lower surfaces of each unit wheel are provided with a mating transverse concave-convex portion 4 and a longitudinal concave-convex portion 5, the two sets of the transverse concave-convex portion 4 and the longitudinal concave-convex portion 5 are respectively diagonally arranged and fully distributed on the surfaces of the unit wheels, wherein the height difference between the concave-convex portions and the concave-convex portions can be set to any value of 0.2-0.5 cm, the concave-convex portions have smooth transition, the peaks of the concave-convex portions are arc-shaped, the concave-convex portions on the upper surface of the first unit wheel 1B and the concave-convex portions on the lower surface of the second unit wheel 1B are mutually attached, thereby realizing that the 1A drives the 1B to rotate simultaneously, and the grinding holes 3A and 3B of the two 1A and 1B are butted, so that the grinding layer 7 can be accommodated in the upper surface and the position of the unit wheel is relatively fixed, and the surface of the optical device 6 is not required to be ground.
In addition, the specific embodiments described in the present specification may differ in terms of parts, shapes of components, names, and the like. All equivalent or simple changes of the structure, characteristics and principle according to the inventive concept are included in the protection scope of the present invention. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions in a similar manner without departing from the scope of the invention as defined in the accompanying claims.
Claims (3)
1. A star wheel that moves for single face is polished which characterized in that: the planetary wheel consists of at least two unit wheels, wherein a grinding hole is formed in each unit wheel, at least one of the upper surface or the lower surface of each unit wheel is provided with a continuous concave-convex part, the concave-convex parts are distributed on the surface of each unit wheel, and the concave parts are matched with the convex parts in shape; the height difference between the concave part and the convex part is in the range of 0.2-0.5 cm;
the planetary wheel at least comprises a first unit wheel and a second unit wheel, wherein the concave-convex part on the upper surface of the first unit wheel is mutually attached to the concave-convex part on the lower surface of the second unit wheel;
the concave-convex part is in smooth transition, and the vertex of the concave-convex part is in a circular arc shape;
the polishing device further comprises a polishing layer, wherein the polishing layer is arranged in a polishing hole between the first unit wheel and the second unit wheel.
2. The star wheel for single sided lapping of claim 1, wherein: the planet wheel comprises a transverse concave-convex part and a longitudinal concave-convex part.
3. The star wheel for single sided lapping of claim 1, wherein: at least one of the upper surface or the lower surface of the unit wheel is provided with a fixing hole, the fixing hole is concavely arranged around the polishing hole, the area of the polishing layer is larger than that of the polishing hole, and the part of the polishing layer, which extends out of the polishing hole, is fixed by the fixing hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710925247.8A CN107457689B (en) | 2017-10-03 | 2017-10-03 | A star wheel that moves for single face is polished |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710925247.8A CN107457689B (en) | 2017-10-03 | 2017-10-03 | A star wheel that moves for single face is polished |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107457689A CN107457689A (en) | 2017-12-12 |
| CN107457689B true CN107457689B (en) | 2024-04-05 |
Family
ID=60553972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710925247.8A Active CN107457689B (en) | 2017-10-03 | 2017-10-03 | A star wheel that moves for single face is polished |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107457689B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6792106B2 (en) * | 2017-03-30 | 2020-11-25 | スピードファム株式会社 | Work carrier and manufacturing method of work carrier |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07231036A (en) * | 1994-02-18 | 1995-08-29 | Sony Corp | Manufacture of semiconductor substrate |
| JPH08274159A (en) * | 1995-03-31 | 1996-10-18 | Sony Corp | Formation of laminated substrate |
| JP2000153454A (en) * | 1998-11-17 | 2000-06-06 | Toraibo:Kk | Polishing carrier |
| CN101491885A (en) * | 2008-01-24 | 2009-07-29 | 中芯国际集成电路制造(上海)有限公司 | Grinding method of wafer control slice |
| JP2011031322A (en) * | 2009-07-30 | 2011-02-17 | Panasonic Corp | Polishing device and polishing method |
| JP2014144500A (en) * | 2013-01-28 | 2014-08-14 | Sumitomo Metal Mining Co Ltd | One-side polishing method for sapphire wafer, and method for producing sapphire wafer |
| JP2015230971A (en) * | 2014-06-05 | 2015-12-21 | 株式会社ディスコ | Method for forming laminated wafer |
| CN103158054B (en) * | 2011-12-19 | 2016-02-03 | 张卫兴 | Two kinds of single-sided polishing methods realized on two-sided lapping and buffing machine |
| CN206464976U (en) * | 2017-01-19 | 2017-09-05 | 吉姆西半导体科技（无锡）有限公司 | The erratic star wheel of chemically mechanical polishing |
| CN207344362U (en) * | 2017-10-03 | 2018-05-11 | 德清晶生光电科技有限公司 | A kind of erratic star wheel for single side polishing |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7588657B2 (en) * | 2003-09-29 | 2009-09-15 | Princeton University | Pattern-free method of making line gratings |
| DE102009038942B4 (en) * | 2008-10-22 | 2022-06-23 | Peter Wolters Gmbh | Device for machining flat workpieces on both sides and method for machining a plurality of semiconductor wafers simultaneously by removing material from both sides |
-
2017
- 2017-10-03 CN CN201710925247.8A patent/CN107457689B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07231036A (en) * | 1994-02-18 | 1995-08-29 | Sony Corp | Manufacture of semiconductor substrate |
| JPH08274159A (en) * | 1995-03-31 | 1996-10-18 | Sony Corp | Formation of laminated substrate |
| JP2000153454A (en) * | 1998-11-17 | 2000-06-06 | Toraibo:Kk | Polishing carrier |
| CN101491885A (en) * | 2008-01-24 | 2009-07-29 | 中芯国际集成电路制造(上海)有限公司 | Grinding method of wafer control slice |
| JP2011031322A (en) * | 2009-07-30 | 2011-02-17 | Panasonic Corp | Polishing device and polishing method |
| CN103158054B (en) * | 2011-12-19 | 2016-02-03 | 张卫兴 | Two kinds of single-sided polishing methods realized on two-sided lapping and buffing machine |
| JP2014144500A (en) * | 2013-01-28 | 2014-08-14 | Sumitomo Metal Mining Co Ltd | One-side polishing method for sapphire wafer, and method for producing sapphire wafer |
| JP2015230971A (en) * | 2014-06-05 | 2015-12-21 | 株式会社ディスコ | Method for forming laminated wafer |
| CN206464976U (en) * | 2017-01-19 | 2017-09-05 | 吉姆西半导体科技（无锡）有限公司 | The erratic star wheel of chemically mechanical polishing |
| CN207344362U (en) * | 2017-10-03 | 2018-05-11 | 德清晶生光电科技有限公司 | A kind of erratic star wheel for single side polishing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107457689A (en) | 2017-12-12 |
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