CN104759983A - Travelling starwheel - Google Patents

Travelling starwheel Download PDF

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Publication number
CN104759983A
CN104759983A CN201510070422.0A CN201510070422A CN104759983A CN 104759983 A CN104759983 A CN 104759983A CN 201510070422 A CN201510070422 A CN 201510070422A CN 104759983 A CN104759983 A CN 104759983A
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CN
China
Prior art keywords
planetary gear
base body
travelling
starwheel
base
Prior art date
Application number
CN201510070422.0A
Other languages
Chinese (zh)
Inventor
夏秋良
Original Assignee
苏州新美光纳米科技有限公司
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Publication date
Application filed by 苏州新美光纳米科技有限公司 filed Critical 苏州新美光纳米科技有限公司
Priority to CN201510070422.0A priority Critical patent/CN104759983A/en
Publication of CN104759983A publication Critical patent/CN104759983A/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies

Abstract

The invention relates to a travelling starwheel. The travelling starwheel comprises a bas body with an inner ring hole, and a core part which is mounted on the base body and manufactured from resin material, wherein the core part is positioned in the inner ring hole of the base body; the base body comprises a metal wheel body, and a wearable and pressure-resistant coating which coats the gear wheel body; two side surfaces of the base body protrude from the two side surfaces of the core part in the thickness direction of the travelling starwheel. The travelling starwheel is formed by the combination of the base body and the core part; the base body is that the metal wheel body is coated with the wearable and pressure-resistant coating; the two side surfaces of the base body protrude from the two side surfaces of the core part in the thickness direction of the travelling starwheel; therefore, the buffering stress can be provided during working, the reject rate of the products can be reduced, the friction coefficients can be increased, and as a result, the service life of the travelling starwheel can be prolonged, and the cost can be reduced; compared with the prior art, the travelling starwheel can be thinned under the same pressure resistance.

Description

游星轮 Planetary gear

技术领域 FIELD

[0001] 本发明涉及一种游星轮。 [0001] The present invention relates to a planetary gear.

背景技术 Background technique

[0002] 游星轮是应用在玻璃,镜片,硅片,硬盘等各种平面抛光工序的夹具,又被称为抛光治具或抛光垫等。 [0002] The planetary gear is used in the surface polishing step jig various glass lenses, silicon wafers, hard disk, also called a polishing pad or a polishing jig and the like. 目前游星轮一般由玻纤板制成或由金属钢制成,但在具体使用过程中,玻纤板制成的游星轮耐磨性不够,强度小,机器工作时会对游星轮施压,继而使用寿命短,质量不稳定,本身造价成本也高;金属钢制成的游星轮工作过程中,其边缘易撞击工件,导致产品不良率提升,且易损机器。 Currently planetary gear is generally made of glass or made of a metal steel plate, but the specific use, the planetary gear wear plate made of glass insufficient strength and a planetary gear have the machine work pressure, followed by short life, unstable quality itself is also high construction cost; planetary gear made of a metal working process of the steel, which is easy to strike an edge of the workpiece, resulting in defective product rate increase, and vulnerable machines.

[0003] 有鉴于上述的缺陷,本设计人,积极加以研宄创新,以期创设一种新型结构的游星轮,使其更具有产业上的利用价值。 [0003] In view of the above drawbacks, the design people, actively pursued study based on innovation, with a view to the creation of a new type of planetary gear structure to make it more utility value of the industry.

发明内容 SUMMARY

[0004] 本发明的目的是提供一种游星轮,其可降低摩擦系数、降低产品不良率、提高使用寿命和降低成本,且该游星轮在保证耐压力的情况下,厚度能够更薄。 [0004] The object of the present invention is to provide a planetary gear, which may reduce the friction coefficient, reduced the rate of defective products, reduce costs and improve service life, and the planetary gear in the case of guaranteed pressure resistance, the thickness can be thinner .

[0005] 为了达到上述目的,本发明采用如下技术方案:一种游星轮,包括具有内圈孔的基体和安装在所述基体上且由树脂材料所制成的核部,所述核部位于基体的内圈孔内,所述基体包括金属轮体和涂覆在所述金属轮体上的耐磨耐压涂层,于所述游星轮的厚度方向上,所述基体的两侧面凸出所述核部的两侧面。 [0005] To achieve the above object, the present invention adopts the following technical solutions: A planetary gear, comprising a base body having a bore and an inner ring mounted on said base and a core portion made of a resin material, the core portion the inner bore of the base body, the base body comprises a metal ring coated with wear-resistant and pressure-resistant coating on the metal wheel body, in a thickness direction of the planetary gear, and both side surfaces of the base body projecting both sides of the core portion.

[0006] 进一步的,所述核部的外缘壁上设置有若干呈T型状的嵌合块,所述基体的内圈孔的内缘壁上凹陷形成有呈T型状的嵌合孔,所述嵌合块嵌入至所述嵌合孔内。 [0006] Further, an outer edge portion of the wall of the core is provided with a plurality of T-shaped block shaped fitting, the inner edge of the inner wall of the hole of the base body is formed with a T-shaped recess shaped fitting hole was the fitting block fitted to the fitting hole.

[0007] 进一步的,所述嵌合块和嵌合孔之间通过激光焊接。 [0007] Further, the fitting between the fitting hole and the block by laser welding.

[0008] 进一步的,所述核部与基体的内圈孔之间通过粘胶剂粘结。 [0008] Further, the core portion between the inner hole of the base body by adhesive bonding agent.

[0009] 进一步的,所述核部卡扣固定在所述基体上。 [0009] Further, the core portion of the snap-fastening on the base.

[0010] 进一步的,所述树脂材料为高强度环氧树脂、酰胺基树脂、丙烯酸类树脂、聚酯树脂中的一种。 [0010] Further, the material for high-strength epoxy resin, an amide-based resin, an acrylic resin, a polyester resin.

[0011] 进一步的,所述耐磨耐压涂层为类金刚石涂层或氮化钛涂层。 [0011] Further, the wear resistant coating is a diamond-coated pressure or titanium nitride coating.

[0012] 借由上述方案,本发明至少具有以下优点:由于本发明的游星轮通过基体和核部组合而成,基体为涂覆有耐磨耐压涂层的金属轮体,又于游星轮的厚度方向上,基体的两侧面凸出核部的两侧面,从而在工作时,可提供缓冲应力,降低产品不良率,降低了摩擦系数,提高了游星轮的使用寿命核,降低了成本;另外,与现有技术相比,在相同的耐压力的情况下,本发明的游星轮的厚度可以更薄。 [0012] by means of the above-described embodiment, the present invention has at least the following advantages: Since the planetary gear of the present invention through the matrix and a combination of the core portion, a metal substrate is coated with a pressure wheel wear resistant coating, and in the tour in the thickness direction of the star wheel, both sides of both side surfaces of the base body of the protruded portion of the core, so that work can be provided stress buffer, decrease the rate of defective products, reduce the coefficient of friction and improve the life of the planetary gear core, reducing cost; in addition, compared with the prior art, in the case where the same pressure resistance, the thickness of the planetary gear of the present invention may be thinner.

[0013] 上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,并可依照说明书的内容予以实施,以下以本发明的较佳实施例并配合附图详细说明如后。 [0013] The above description is only an overview of the technical solution of the present invention, in order to more fully understood from the present disclosure, may be implemented in accordance with the contents of the specification, the following preferred embodiments of the present invention to the detailed description and the accompanying drawings as Rear.

附图说明 BRIEF DESCRIPTION

[0014] 图1是本发明游星轮的结构示意图; [0014] FIG. 1 is a schematic view of the planetary gear of the present invention;

[0015] 图2是图1中圆圈A的放大图。 [0015] FIG. 2 is a view in an enlarged circle A of FIG.

具体实施方式 Detailed ways

[0016] 下面结合附图和实施例,对本发明的具体实施方式作进一步详细描述。 [0016] The following embodiments and the accompanying drawings, specific embodiments of the present invention will be further described in detail. 以下实施例用于说明本发明,但不用来限制本发明的范围。 The following examples serve to illustrate the present invention but are not intended to limit the scope of the present invention.

[0017] 参见图1和图2,本发明一较佳实施例所述的一种游星轮10包括具有基体I和安装在所述基体I上的核部2,所述基体I内形成有内圈孔11,基体I的外缘周上形成有轮齿12,所述核部2位于基体I的内圈孔11内,所述基体I包括金属轮体(未图示)和涂覆在所述金属轮体上的耐磨耐压涂层(未图示)。 [0017] Referring to Figures 1 and 2, a preferred embodiment of the present invention, one kind of the embodiment comprises a planetary gear 10 having a core portion I and a base mounted on the base I 2, I formed in the base body the inner ring aperture 11, the base body is formed with gear teeth 12, 11, the base body 2 is located in the inner bore of the base body I I comprises a metal core part the wheel (not shown) and coated on the outer periphery of I pressure wear resistant coating (not shown) on the metal wheel. 于所述游星轮10的厚度方向上,所述基体I的两侧面凸出所述核部2的两侧面,即基体I的厚度大于核部2的厚度。 To the thickness direction of the planetary gear 10, both side surfaces of the base portion I of both side surfaces of the core projections 2, i.e., thickness of the substrate I is greater than the thickness of the core portion 2. 该核部2由树脂材料所制成,在本实施例中,所述树脂材料为高强度环氧树脂,耐磨耐压涂层为类金刚石涂层,当然,在其他实施方式中,所述树脂材料还可以为酰胺基树脂、丙烯酸类树脂、聚酯树脂中的一种,耐磨耐压涂层可以为氮化钛涂层。 The core portion 2 made of resin material, in the present embodiment, the epoxy resin material is a high strength, wear resistant coating is a diamond-coated pressure, of course, in other embodiments, the the resin material may also be an amide-based resin, an acrylic resin, a polyester resin, abrasion resistant coating may be a pressure-resistant coating of titanium nitride.

[0018] 在本实施例中,所述核部2的外缘壁上设置有若干呈T型状的嵌合块21,所述基体I的内圈孔11的内缘壁上凹陷形成有呈T型状的嵌合孔13,所述嵌合块21嵌入至所述嵌合孔13内,且两者之间通过激光焊接。 [0018] In the present embodiment, the outer edge of the wall of the core portion 2 is provided with a plurality of T-shaped block shaped fitting 21, the inner hole of the base wall of the inner edge I of the recess 11 is formed with a shape T-shaped fitting holes 13, the fitting block 21 fitted to the fitting hole 13, and by laser welding therebetween. 通过此种结构,可以使得核部2和基体I连接更紧密,避免工作时,工件频繁撞击等事故而容易脱落。 By such structure, so that the core portion 2 and the base I more closely connected, while avoiding the workpiece frequent collision accident, etc. easily. 当然,在其他实施方式中,所述核部2和基体I还可以通过其他方式结合,如,所述核部2与基体I的内圈孔11之间通过粘胶剂粘结;或者所述核部2通过卡扣结构固定在所述基体I上。 Of course, in other embodiments, the core portion 2 and base I may also be bonded by other means, e.g., the core portion 2 and the base between the inner hole 11 through the I bonding adhesives; or the nuclear structure portion 2 by snap-fixed to the base body I.

[0019] 综上所述,上述游星轮10具有如下优点: [0019] In summary, the above-mentioned planetary gear 10 has the following advantages:

[0020] 1、由于游星轮10由基体I和由树脂材料所制成的核部2组合而成,基体I为涂覆有耐磨耐压涂层的金属轮体,所以,相对现有技术来说,其可降低成本; [0020] 1, since the planetary gear 10 from the base portion I and a resin core material made of a combination of 2, the matrix I is coated with a metal coating wear pressure wheel, so that, compared with the prior technology, its cost can be reduced;

[0021] 2、由于内部为由树脂材料所制成的核部2,所以,在工作的时候,可以缓冲应力的撞击,有助于降低产品的不良率,且还可以提高该游星轮10的使用寿命; [0021] 2, since the inside by the core portion 2 made of resin material, so that, at work, can absorb the shock stresses, helps to reduce the defect rate of products, and can also improve the planetary gear 10 life;

[0022] 3、由于在游星轮10的厚度方向上,基体I的两侧面凸出核部2的两侧面,所以,避免工作时,工件对核部2的摩擦和施压,有助于提高游星轮10的使用寿命; [0022] 3, since the thickness direction of the planetary gear 10, both side surfaces of the base portion I both side surfaces of the projections 2 of the core, so avoiding work, pressing the workpiece to friction and the core portion 2, help improve the life of the planetary gear 10;

[0023] 4、由于基体I为涂覆有耐磨耐压涂层的金属轮体,所以,增加了游星轮10的耐磨性,增加了耐压力优点,且还可以隔离金属轮体本身的腐锈,从而提高该游星轮的耐腐蚀,使得在研磨、降低了抛光工作时与上下压力盘之间的摩擦系数;另外,在相同的耐压力的情况下,该游星轮10的厚度可以更薄; [0023] 4, since the base I wheel wear pressure metal coating is applied, therefore, increase the wear resistance of the planetary gear 10, the advantage of increased resistance to pressure, and may also be a barrier metal wheel itself the coefficient of friction between the pressure plate and the upper and lower rot rust, thereby enhancing the corrosion resistance of the planetary gear, so that the polishing, the polishing work is reduced; Further, in the case of the same pressure resistance, the planetary gear 10 The thickness may be thinner;

[0024] 5、通过核部2的嵌合块21和基体I的嵌合孔13的配合,可以使得核部2和基体I连接更紧密,避免工作时,工件频繁撞击等事故而容易脱落。 [0024] 5, by fitting the core portion fitted block 2 21 and the fitting hole matrix I, 13 may be such that the core portion 2 and the base I more closely connected, while avoiding the workpiece frequent impact or the like accident easily.

[0025] 以上所述仅是本发明的优选实施方式,并不用于限制本发明,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明技术原理的前提下,还可以做出若干改进和变型,这些改进和变型也应视为本发明的保护范围。 [0025] The above are only preferred embodiments of the present invention is not intended to limit the present invention, it should be noted that those of ordinary skill in the art, in the art without departing from the principles of the present invention is provided, may also be made a number of improvements and modifications, such modifications and variations shall also be considered in the scope of the invention.

Claims (7)

1.一种游星轮,其特征在于:包括具有内圈孔的基体和安装在所述基体上且由树脂材料所制成的核部,所述核部位于基体的内圈孔内,所述基体包括金属轮体和涂覆在所述金属轮体上的耐磨耐压涂层,于所述游星轮的厚度方向上,所述基体的两侧面凸出所述核部的两侧面。 A planetary gear, characterized by: a base having apertures and an inner ring mounted on said base and a core portion made of a resin material, the core portion is located in the inner bore of the base body, the said base comprises a metal wheel body and a coating abrasion resistant coating on the metal pressure wheel body, in a thickness direction of the planetary gear, and both side surfaces of the base body protrudes to both sides of the core portion .
2.根据权利要求1所述的游星轮,其特征在于:所述核部的外缘壁上设置有若干呈T型状的嵌合块,所述基体的内圈孔的内缘壁上凹陷形成有呈T型状的嵌合孔,所述嵌合块嵌入至所述嵌合孔内。 The planetary gear according to claim 1, wherein: said outer edge wall of the core portion is provided with a plurality of T-shaped block shaped fitting, the inner edge of the inner wall of the hole of the base body T-shaped recess is formed a fitting hole shape, the fitting block fitted to the fitting hole.
3.根据权利要求2所述的游星轮,其特征在于:所述嵌合块和嵌合孔之间通过激光焊接。 3. A planetary gear according to claim 2, wherein: said fitting block by laser welding between the fitting and the hole.
4.根据权利要求1所述的游星轮,其特征在于:所述核部与基体的内圈孔之间通过粘胶剂粘结。 4. A planetary gear according to claim 1, wherein: the glue bond between the inner race through the hole of the core portion of the base body.
5.根据权利要求1所述的游星轮,其特征在于:所述核部卡扣固定在所述基体上。 5. The planetary gear according to claim 1, wherein: the core portion of the snap-fastening on the base.
6.根据权利要求1所述的游星轮,其特征在于:所述树脂材料为高强度环氧树脂、酰胺基树脂、丙烯酸类树脂、聚酯树脂中的一种。 6. A planetary gear according to claim 1, wherein: said material is a high strength epoxy resin, an amide-based resin, an acrylic resin, a polyester resin.
7.根据权利要求1所述的游星轮,其特征在于:所述耐磨耐压涂层为类金刚石涂层或氮化钛涂层。 7. A planetary gear according to claim 1, wherein: said wear resistant coating is a diamond-coated pressure or titanium nitride coating.
CN201510070422.0A 2015-02-11 2015-02-11 Travelling starwheel CN104759983A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109015334A (en) * 2018-09-17 2018-12-18 杭州中芯晶圆半导体股份有限公司 Rigid material is reduced in a kind of process of lapping because collision leads to the method for rupture

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US4800686A (en) * 1986-04-15 1989-01-31 Kyokuwei Optical Glass Co., Ltd. Fabrication method for chamfered hole
WO1999004931A1 (en) * 1997-07-23 1999-02-04 Speedfam-Ipec Corporation Apparatus for holding workpieces during lapping, honing, and polishing
CN1332060A (en) * 2000-07-10 2002-01-23 住友电木株式会社 Abrading substances holding material and manufacturing method thereof
CN1993206A (en) * 2004-08-02 2007-07-04 昭和电工株式会社 Method of manufacturing polishing carrier and silicon substrate for magnetic recording medium, and silicon substrate for magnetic recording medium
US7244663B2 (en) * 2004-08-31 2007-07-17 Micron Technology, Inc. Wafer reinforcement structure and methods of fabrication
CN202451738U (en) * 2011-12-20 2012-09-26 苏州自立电子有限公司 Free star wheel improved structure
CN204621814U (en) * 2015-02-11 2015-09-09 苏州新美光纳米科技有限公司 Wandering star wheel

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4800686A (en) * 1986-04-15 1989-01-31 Kyokuwei Optical Glass Co., Ltd. Fabrication method for chamfered hole
WO1999004931A1 (en) * 1997-07-23 1999-02-04 Speedfam-Ipec Corporation Apparatus for holding workpieces during lapping, honing, and polishing
CN1332060A (en) * 2000-07-10 2002-01-23 住友电木株式会社 Abrading substances holding material and manufacturing method thereof
CN1993206A (en) * 2004-08-02 2007-07-04 昭和电工株式会社 Method of manufacturing polishing carrier and silicon substrate for magnetic recording medium, and silicon substrate for magnetic recording medium
US7244663B2 (en) * 2004-08-31 2007-07-17 Micron Technology, Inc. Wafer reinforcement structure and methods of fabrication
CN202451738U (en) * 2011-12-20 2012-09-26 苏州自立电子有限公司 Free star wheel improved structure
CN204621814U (en) * 2015-02-11 2015-09-09 苏州新美光纳米科技有限公司 Wandering star wheel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109015334A (en) * 2018-09-17 2018-12-18 杭州中芯晶圆半导体股份有限公司 Rigid material is reduced in a kind of process of lapping because collision leads to the method for rupture

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