TWI709458B - 平面研磨裝置 - Google Patents

平面研磨裝置 Download PDF

Info

Publication number
TWI709458B
TWI709458B TW106104278A TW106104278A TWI709458B TW I709458 B TWI709458 B TW I709458B TW 106104278 A TW106104278 A TW 106104278A TW 106104278 A TW106104278 A TW 106104278A TW I709458 B TWI709458 B TW I709458B
Authority
TW
Taiwan
Prior art keywords
cable
rotary joint
fixed plate
rotating
workpiece
Prior art date
Application number
TW106104278A
Other languages
English (en)
Chinese (zh)
Other versions
TW201728410A (zh
Inventor
小田桐茂
井上裕介
小池喜雄
吉原秀明
Original Assignee
日商快遞股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商快遞股份有限公司 filed Critical 日商快遞股份有限公司
Publication of TW201728410A publication Critical patent/TW201728410A/zh
Application granted granted Critical
Publication of TWI709458B publication Critical patent/TWI709458B/zh

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/402—Chemomechanical polishing [CMP] of semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0428—Apparatus for mechanical treatment or grinding or cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW106104278A 2016-02-10 2017-02-09 平面研磨裝置 TWI709458B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016023536A JP6622105B2 (ja) 2016-02-10 2016-02-10 平面研磨装置
JP2016-023536 2016-02-10

Publications (2)

Publication Number Publication Date
TW201728410A TW201728410A (zh) 2017-08-16
TWI709458B true TWI709458B (zh) 2020-11-11

Family

ID=59599179

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106104278A TWI709458B (zh) 2016-02-10 2017-02-09 平面研磨裝置

Country Status (4)

Country Link
JP (1) JP6622105B2 (https=)
KR (1) KR102561433B1 (https=)
CN (1) CN107052985B (https=)
TW (1) TWI709458B (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102037749B1 (ko) * 2018-03-16 2019-10-29 에스케이실트론 주식회사 웨이퍼 랩핑 장치
JP7035748B2 (ja) * 2018-04-11 2022-03-15 株式会社Sumco ワークの両面研磨装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10202514A (ja) * 1997-01-20 1998-08-04 Speedfam Co Ltd 自動定寸装置
JP2004342602A (ja) * 2003-04-16 2004-12-02 Furukawa Electric Co Ltd:The 確認可能な中立位置を有するロータリコネクタ
TW200934610A (en) * 2008-02-08 2009-08-16 Tsudakoma Ind Co Ltd Spindle head for machine tool

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547350Y2 (https=) * 1988-05-18 1993-12-13
US5429517A (en) * 1994-02-14 1995-07-04 Methode Electronics, Inc. Two-piece clockspring with lock and wire harness assembly
CN2574263Y (zh) * 2002-10-24 2003-09-17 王军珲 一种滑动式轴装导电旋转接头
JP2008227393A (ja) 2007-03-15 2008-09-25 Fujikoshi Mach Corp ウェーハの両面研磨装置
JP6101621B2 (ja) * 2013-11-28 2017-03-22 株式会社荏原製作所 研磨装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10202514A (ja) * 1997-01-20 1998-08-04 Speedfam Co Ltd 自動定寸装置
JP2004342602A (ja) * 2003-04-16 2004-12-02 Furukawa Electric Co Ltd:The 確認可能な中立位置を有するロータリコネクタ
TW200934610A (en) * 2008-02-08 2009-08-16 Tsudakoma Ind Co Ltd Spindle head for machine tool

Also Published As

Publication number Publication date
CN107052985B (zh) 2020-09-04
KR102561433B1 (ko) 2023-07-31
CN107052985A (zh) 2017-08-18
TW201728410A (zh) 2017-08-16
JP6622105B2 (ja) 2019-12-18
JP2017140671A (ja) 2017-08-17
KR20170094490A (ko) 2017-08-18

Similar Documents

Publication Publication Date Title
CN101264585B (zh) 双面研磨装置
KR102315142B1 (ko) 평면 연마 장치
CN108700405B (zh) 晶圆载体厚度测量装置
JP3197435U (ja) ネジ応力感知装置
TWI534427B (zh) 旋轉扭力測試機
TWI709458B (zh) 平面研磨裝置
CN209617372U (zh) 单边力矩传感器及电动自行车
TW201731633A (zh) 平面研磨裝置及遊星輪
CN104971647A (zh) 试剂混匀装置、试剂混匀组件和分析仪
TW201521960A (zh) 研磨裝置、研磨墊之配置方法、及研磨墊
JP3795185B2 (ja) ポリッシング装置
CN108955454A (zh) 一种飞机轮毂径向跳动检测装置及方法
CN109443294B (zh) 角度传感器测试装置及角度传感器测试工位
JP2011017651A (ja) 回転確認機構
US7137867B2 (en) Thickness control method and double side polisher
CN111721519A (zh) 内窥镜插入部测试装置
CN213517184U (zh) 一种新型的晶圆转速测量装置
CN213396825U (zh) 一种壳体圆跳动检测装置
CN218673923U (zh) 一种多方位红外测温装置
CN107914212A (zh) 平面研磨装置
JP2012255719A (ja) 引き摺り試験装置
CN219320134U (zh) 一种检测平台及镜片检测装置
CN209117198U (zh) 一种适用于无线传输的抗干扰旋转测温装置
JPH10244463A (ja) 研磨装置の研磨熱測定方法および研磨熱測定装置付き研磨装置
JP5546001B2 (ja) 回転計