TWI698661B - 導光裝置以及雷射加工裝置 - Google Patents
導光裝置以及雷射加工裝置 Download PDFInfo
- Publication number
- TWI698661B TWI698661B TW108121909A TW108121909A TWI698661B TW I698661 B TWI698661 B TW I698661B TW 108121909 A TW108121909 A TW 108121909A TW 108121909 A TW108121909 A TW 108121909A TW I698661 B TWI698661 B TW I698661B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- irradiated
- polygon mirror
- light guide
- laser
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 56
- 230000008859 change Effects 0.000 claims description 6
- 238000005286 illumination Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 13
- 230000010287 polarization Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 230000001678 irradiating effect Effects 0.000 description 6
- 230000032258 transport Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 230000008676 import Effects 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000002679 ablation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 230000010356 wave oscillation Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/121—Mechanical drive devices for polygonal mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/129—Systems in which the scanning light beam is repeatedly reflected from the polygonal mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/12—Scanning systems using multifaceted mirrors
- G02B26/125—Details of the optical system between the polygonal mirror and the image plane
- G02B26/126—Details of the optical system between the polygonal mirror and the image plane including curved mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Paper (AREA)
- Removal Of Insulation Or Armoring From Wires Or Cables (AREA)
- Radiation-Therapy Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018119598A JP7136602B2 (ja) | 2018-06-25 | 2018-06-25 | 導光装置及びレーザ加工装置 |
JP2018-119598 | 2018-06-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202014755A TW202014755A (zh) | 2020-04-16 |
TWI698661B true TWI698661B (zh) | 2020-07-11 |
Family
ID=68985029
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108121909A TWI698661B (zh) | 2018-06-25 | 2019-06-24 | 導光裝置以及雷射加工裝置 |
Country Status (9)
Country | Link |
---|---|
US (1) | US20210260692A1 (ja) |
EP (1) | EP3812825B1 (ja) |
JP (1) | JP7136602B2 (ja) |
KR (1) | KR102497109B1 (ja) |
CN (1) | CN112352187B (ja) |
IL (1) | IL279540B2 (ja) |
RU (1) | RU2754523C1 (ja) |
TW (1) | TWI698661B (ja) |
WO (1) | WO2020004178A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7221345B2 (ja) * | 2021-03-19 | 2023-02-13 | 株式会社東京精密 | ウエハエッジ部の改質装置及び改質方法 |
CN113634873B (zh) * | 2021-08-31 | 2023-07-07 | 西安交通大学 | 基于干涉测量的激光加工后壁组合防护方法及系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6424217A (en) * | 1987-07-20 | 1989-01-26 | Canon Kk | Scanning optical system |
JPH11149052A (ja) * | 1997-11-17 | 1999-06-02 | Matsushita Electric Ind Co Ltd | 走査装置 |
TWI250910B (en) * | 2004-03-05 | 2006-03-11 | Olympus Corp | Apparatus for laser machining |
JP2013116488A (ja) * | 2011-12-04 | 2013-06-13 | Kiyoyuki Kondo | ビーム加工装置及びそれを用いた基板の加工方法 |
TWI620038B (zh) * | 2017-01-11 | 2018-04-01 | 財團法人工業技術研究院 | 曝光方法和系統以及雷射直接成像系統 |
JP6424217B2 (ja) | 2013-06-26 | 2018-11-14 | ベクトン・ディッキンソン・ロワ・ジャーマニー・ゲーエムベーハー | 自動保存システムから医薬品パックを順次供給する排出/投入ステーションを用いて、複数の受承用コンパートメントを有する輸送ボックスを確実に充填するための方法、及び上記方法のための排出/投入ステーション |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541629B2 (ja) | 1973-08-31 | 1979-01-26 | ||
US4160894A (en) * | 1975-05-14 | 1979-07-10 | Winkler & Dunnebier Maschinenfabrik Und Eisengiesserei Kg | Method and apparatus for the focal form cutting of a moving web of material by a laser beam |
US5041831A (en) * | 1988-04-26 | 1991-08-20 | Hewlett-Packard Company | Indirect D/A converter |
JPH0328818A (ja) * | 1988-12-29 | 1991-02-07 | Ricoh Co Ltd | 走査光学装置 |
JP3140558B2 (ja) | 1992-04-28 | 2001-03-05 | 旭光学工業株式会社 | レーザ光の光軸補正装置 |
JPH10166167A (ja) * | 1996-12-03 | 1998-06-23 | Komatsu Ltd | レーザマーキング方法及び装置 |
JP4177051B2 (ja) * | 2002-08-29 | 2008-11-05 | 古河電気工業株式会社 | 可変光減衰器及び光部品 |
EP2486450B1 (en) * | 2008-11-02 | 2021-05-19 | David Chaum | Near to eye display system and appliance |
JP5518612B2 (ja) | 2010-07-20 | 2014-06-11 | 株式会社ディスコ | 光学装置およびこれを備えるレーザー加工装置 |
TWI453461B (zh) * | 2011-03-08 | 2014-09-21 | Kawasaki Heavy Ind Ltd | Optical scanning devices and laser processing devices |
JP5997522B2 (ja) * | 2012-07-06 | 2016-09-28 | 川崎重工業株式会社 | 光走査装置及びレーザ加工装置 |
JP6877951B2 (ja) * | 2016-10-21 | 2021-05-26 | 川崎重工業株式会社 | 光照射装置及び光読取装置 |
JP6785636B2 (ja) * | 2016-12-09 | 2020-11-18 | 川崎重工業株式会社 | ポリゴンミラー回転装置 |
WO2018175193A2 (en) * | 2017-03-22 | 2018-09-27 | Corning Incorporated | Methods of separating a glass web |
-
2018
- 2018-06-25 JP JP2018119598A patent/JP7136602B2/ja active Active
-
2019
- 2019-06-19 US US17/250,247 patent/US20210260692A1/en active Pending
- 2019-06-19 WO PCT/JP2019/024303 patent/WO2020004178A1/ja unknown
- 2019-06-19 CN CN201980042831.6A patent/CN112352187B/zh active Active
- 2019-06-19 RU RU2021101098A patent/RU2754523C1/ru active
- 2019-06-19 IL IL279540A patent/IL279540B2/en unknown
- 2019-06-19 EP EP19824873.4A patent/EP3812825B1/en active Active
- 2019-06-19 KR KR1020207035833A patent/KR102497109B1/ko active IP Right Grant
- 2019-06-24 TW TW108121909A patent/TWI698661B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6424217A (en) * | 1987-07-20 | 1989-01-26 | Canon Kk | Scanning optical system |
JPH11149052A (ja) * | 1997-11-17 | 1999-06-02 | Matsushita Electric Ind Co Ltd | 走査装置 |
TWI250910B (en) * | 2004-03-05 | 2006-03-11 | Olympus Corp | Apparatus for laser machining |
JP2013116488A (ja) * | 2011-12-04 | 2013-06-13 | Kiyoyuki Kondo | ビーム加工装置及びそれを用いた基板の加工方法 |
JP6424217B2 (ja) | 2013-06-26 | 2018-11-14 | ベクトン・ディッキンソン・ロワ・ジャーマニー・ゲーエムベーハー | 自動保存システムから医薬品パックを順次供給する排出/投入ステーションを用いて、複数の受承用コンパートメントを有する輸送ボックスを確実に充填するための方法、及び上記方法のための排出/投入ステーション |
TWI620038B (zh) * | 2017-01-11 | 2018-04-01 | 財團法人工業技術研究院 | 曝光方法和系統以及雷射直接成像系統 |
Also Published As
Publication number | Publication date |
---|---|
IL279540B1 (en) | 2023-05-01 |
US20210260692A1 (en) | 2021-08-26 |
KR20210008094A (ko) | 2021-01-20 |
EP3812825B1 (en) | 2023-08-02 |
EP3812825A1 (en) | 2021-04-28 |
JP7136602B2 (ja) | 2022-09-13 |
TW202014755A (zh) | 2020-04-16 |
JP2020003518A (ja) | 2020-01-09 |
CN112352187A (zh) | 2021-02-09 |
CN112352187B (zh) | 2022-09-16 |
IL279540B2 (en) | 2023-09-01 |
KR102497109B1 (ko) | 2023-02-07 |
RU2754523C1 (ru) | 2021-09-02 |
EP3812825A4 (en) | 2022-04-27 |
IL279540A (en) | 2021-01-31 |
WO2020004178A1 (ja) | 2020-01-02 |
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