TWI683716B - 包括角度控制光學系統的雷射加工裝置 - Google Patents

包括角度控制光學系統的雷射加工裝置 Download PDF

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Publication number
TWI683716B
TWI683716B TW107127509A TW107127509A TWI683716B TW I683716 B TWI683716 B TW I683716B TW 107127509 A TW107127509 A TW 107127509A TW 107127509 A TW107127509 A TW 107127509A TW I683716 B TWI683716 B TW I683716B
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TW
Taiwan
Prior art keywords
laser processing
focal length
optical system
modulator
item
Prior art date
Application number
TW107127509A
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English (en)
Chinese (zh)
Other versions
TW201924837A (zh
Inventor
鄭雄熙
趙成龍
Original Assignee
南韓商Ｅｏ科技股份有限公司
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Publication of TW201924837A publication Critical patent/TW201924837A/zh
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Publication of TWI683716B publication Critical patent/TWI683716B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009—Materials therefor
    • G02F1/0072—Mechanical, acoustic, electro-elastic, magneto-elastic properties

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Laser Beam Processing (AREA)
TW107127509A 2017-11-24 2018-08-07 包括角度控制光學系統的雷射加工裝置 TWI683716B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2017-0158567 2017-11-24
KR1020170158567A KR102148929B1 (ko) 2017-11-24 2017-11-24 4f 앵글제어 광학계를 포함하는 레이저 가공 장치
??10-2017-0158567 2017-11-24

Publications (2)

Publication Number Publication Date
TW201924837A TW201924837A (zh) 2019-07-01
TWI683716B true TWI683716B (zh) 2020-02-01

Family

ID=66631598

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107127509A TWI683716B (zh) 2017-11-24 2018-08-07 包括角度控制光學系統的雷射加工裝置

Country Status (3)

Country Link
KR (1) KR102148929B1 (ko)
TW (1) TWI683716B (ko)
WO (1) WO2019103277A1 (ko)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068762A (ja) * 2004-08-31 2006-03-16 Univ Of Tokushima レーザー加工方法およびレーザー加工装置
JP2010082672A (ja) * 2008-10-01 2010-04-15 Hamamatsu Photonics Kk レーザ加工装置およびレーザ加工方法
KR20170097425A (ko) * 2016-02-18 2017-08-28 주식회사 이오테크닉스 레이저 가공 장치 및 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037967A (en) * 1996-12-18 2000-03-14 Etec Systems, Inc. Short wavelength pulsed laser scanner
JP2000263269A (ja) * 1999-03-17 2000-09-26 Sumitomo Heavy Ind Ltd レーザ加工方法及びレーザ加工装置用のマルチ光学系
WO2012054927A2 (en) * 2010-10-22 2012-04-26 Electro Scientific Industries, Inc. Laser processing systems and methods for beam dithering and skiving
KR101742132B1 (ko) * 2015-08-10 2017-05-31 주식회사 이오테크닉스 레이저 가공장치
WO2017155104A1 (ja) * 2016-03-10 2017-09-14 浜松ホトニクス株式会社 レーザ光照射装置及びレーザ光照射方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006068762A (ja) * 2004-08-31 2006-03-16 Univ Of Tokushima レーザー加工方法およびレーザー加工装置
JP2010082672A (ja) * 2008-10-01 2010-04-15 Hamamatsu Photonics Kk レーザ加工装置およびレーザ加工方法
KR20170097425A (ko) * 2016-02-18 2017-08-28 주식회사 이오테크닉스 레이저 가공 장치 및 방법

Also Published As

Publication number Publication date
TW201924837A (zh) 2019-07-01
KR102148929B1 (ko) 2020-08-28
KR20190060407A (ko) 2019-06-03
WO2019103277A1 (ko) 2019-05-31

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