TWI679436B - Handler for testing electronic devices - Google Patents

Abstract

The invention relates to a processor for testing electronic components. In the processor for testing electronic components according to the present invention, the conveying channel of the test tray transferred from the test chamber to the heat removal chamber is divided into a first region and a second region shorter than the first region. Before the area, the holding part of the holding member provided in the second conveying device can be moved to the test room through the second area in advance to wait for the test. According to the present invention, since the test tray can be transferred from the test to the heat removal chamber at the end of the test, the cycle time of the test tray can be shortened and the operating rate of the processor can be finally improved.

Description

Processor for testing electronic components

FIELD OF THE INVENTION The present invention relates to a processor for testing electronic components.

BACKGROUND OF THE INVENTION The electronic components of a semiconductor device, such as produced, are tested by a tester, and then divided into qualified and unqualified products, and only qualified products are shipped.

In order to test an electronic component, the electronic component needs to be electrically connected to a tester, and the electrical connection between the tester and the electronic component is performed by a processor (hereinafter referred to as a “processor”) for testing the electronic component.

The processor may be manufactured in various forms according to test conditions for electronic components, types of electronic components, and the like. Among these various types, the present invention relates to a processor having a test chamber that can establish a test environment for electronic components.

The main structure of the processor with a test chamber includes: a loading device, a constant temperature room, a test room, a first conveying device, a pressurizing device, a heat removing room, a second conveying device, an unloading device, and an opening and closing device.

The loading device loads the electronic component to be tested contained in the customer tray into a test tray located at the loading position.

A thermostatic chamber is provided to apply thermal stimulation to the electronic components loaded on the test tray from the loading position. Although there are cases where electronic components are tested at room temperature, due to the need to consider the extremely harsh environment, testing is mainly performed at high or low temperatures. For this reason, a constant temperature chamber is provided for applying thermal stimulation to the electronic components to be tested in advance.

The test chamber provides a space and temperature environment for testing electronic components on a temperature test tray that passes through the constant temperature chamber to the test location. A test board with a tester incorporated in such a test chamber. For reference, a test socket electrically connected to an electronic component is provided on the test board.

A first conveying device is provided for transferring the test tray in the thermostatic chamber to the test chamber. Such a first conveying device may be configured as a “pallet conveying device” disclosed in Korean Patent Publication No. 10-2008-0082591.

The pressurizing device presses the electronic components on the test tray located in the test position in the test room to the test socket side of the tester, so that the electronic components can be electrically connected to the test socket.

A heat removal chamber is provided for recovering the electronic components as close to room temperature as possible by removing the thermal stimulus applied to the electronic components from the test tray of the test chamber in the thermostatic chamber and the test chamber.

A second conveying device is provided for transferring the test tray in the test chamber to the heat removal chamber. Similarly, the second conveying device may have the same structure as the “pallet conveying device” disclosed in Korean Patent Publication No. 10-2008-0082591.

The unloading device unloads the electronic components in the finished temperature test tray transferred from the heat removal chamber to the unloading position, and sorts them based on the test results to move them to the empty customer tray.

The opening and closing device is used to open and close the second conveying passage through which the test tray transferred from the test chamber to the heat removal chamber passes, and the present invention relates to this case.

As is well known, the test tray in the processor having the above structure passes the loading position, the inside of the constant temperature chamber, the test position in the test chamber, and the heat removal through a plurality of conveying devices including a first conveying device and a second conveying device. The inside of the chamber and the closed loop path connected to the unloading position and the loading position are transferred.

Generally, a constant temperature chamber has a temperature environment for preheating / precooling electronic components according to test temperature conditions, and this temperature environment is similar to the temperature environment in the test room. Therefore, the temperature environment in the constant temperature room has little effect on the temperature environment in the test room. Thereby, the first conveyance passage through which the test tray transferred from the thermostatic chamber to the test chamber can be opened.

However, the temperature environment of the test chamber and the heat removal chamber is very different. Therefore, the second conveying path through which the test tray transferred from the test chamber to the heat removal chamber must be openable and closable. That is, the second conveyance path should be opened when the test tray is conveyed, and the second conveyance path should be closed when the test of the electronic components in the test chamber is performed.

There are two ways to transfer the test tray from the test chamber to the heat removal chamber. The first method is that the first conveying device moves the rear-end test tray to the inside of the test chamber, and the rear-end test tray pushes the front-end test tray to the heat-removing chamber side, and the front-end test tray is uploaded to the heat-removing chamber side , And then the second conveying device further transfers the second test tray to the rest. In addition, the second method is that the second conveying device conveys the test tray in the test chamber to the inside of the heat removal chamber before the first conveying device transmits the rear-end test tray to the inside of the test chamber.

In the first method or the second method described above, in order to transfer the test tray from the test chamber to the heat removal chamber, the second conveyance channel must be opened.

However, after the test of the electronic components is ended, since the second conveying device is operated only after the second conveying channel is opened, the second conveying device takes more time to transport the test tray, which increases the test tray's The cycle time and ultimately the processor's operating rate decreases. In addition, since the time for opening the second conveying channel becomes longer, the time for the temperature environment in the test chamber to recover to the test environment is also prolonged proportionally, which also causes the operating rate of the processor to decrease.

However, if the second conveying channel is always opened, the temperature environment of the heat removal chamber will disturb the temperature environment of the test chamber and reduce the reliability of the test.

SUMMARY OF THE INVENTION Problems to be Solved The object of the present invention is to provide a technique for ensuring the reliability of a test while the second conveyance device performs a preparation work for conveying a test tray in advance. Means of solving the problem

The processor for testing electronic components according to the present invention includes: a loading device for loading an electronic component to be tested loaded on a customer tray onto a test tray in a loading position; and a thermostatic chamber for loading the The electronic components on the test tray apply thermal stimulus; the test room provides space and temperature environment to test the electronic components on the temperature test tray passing through the constant temperature room to the test position; the first conveying device connects the constant temperature room The test tray in the test chamber is transferred to the test chamber; the pressurizing device presses the electronic component on the test tray located at the test position in the test chamber to the test socket side of the tester to electrically connect the electronic component to the test socket. A heat removal chamber for removing thermal stimuli applied to the electronic components of the test tray from the test chamber in the constant temperature chamber and the test chamber; a second conveying device for removing the heat in the test chamber The test tray is transferred to the heat removal chamber; the unloading device unloads the electronic components from the heat removal chamber to the test tray at the unloading position and performs the test according to the test result. Class to move the tray to the client; a first opening and closing means for opening and closing the test chamber from said first region to a portion of the conveying path in addition to the test tray in the heat chamber as. The second conveying device includes: a holding member for holding or releasing the test tray; an actuator for executing the holding member to release or hold the test tray; and a driver for causing the holding member to move along the test tray. Moving in the conveying direction, the holding portion of the holding member constitutes a second region capable of passing through another part of the conveying path, the length of the second region is shorter than the length of the first region, and the first opening and closing The device is provided with a first door and a first driver that provides power for opening or closing the first door. When a test tray is moved from the test chamber to the heat removal chamber, the first door is opened. When closed, at least the first area is blocked and the test tray is prevented from moving from the test chamber to the heat removal chamber to help prevent heat exchange between the test chamber and the heat removal chamber. When the first area is opened, the conveying channel allows the test tray to move from the inside of the test chamber to the inside of the heat removal chamber.

The processor for testing electronic components according to the invention may further include a second opening and closing device for opening and closing the second area, the second opening and closing device being provided with a second door and provided for opening or closing the second door A second drive of the power, the second door opens the second area, so that the holding portion of the holding member can pass from the second area through the second area even when the first door is closed. The heat removal chamber moves toward the test chamber, and when closed, closes the second region to help further prevent heat exchange between the test chamber and the heat removal chamber, and when the first region and When the second area is fully opened, the conveying channel allows the test tray to move from the inside of the test chamber to the inside of the heat removal chamber.

The opening and closing operation of the first area by the first opening and closing device and the opening and closing operation of the second area by the second opening and closing device can be performed independently of each other, the second driver and the first driver Set up separately.

The second door has a driving protrusion, the second driver includes a driving member and a driving source for rotating the driving member in a forward and reverse direction, and the driving member pushes the driving protrusion through forward rotation to be driven by the driving member. A second door closes the second area, or pulls the driving protrusion by a reverse rotation to open the second area, and has a function for converting forward and reverse rotation movements of the driving member into the driving protrusion. The conversion groove of the forward and backward movement is inserted into the conversion groove.

The second door has a driving protrusion, the second driver includes a driving member and a driving source for advancing and retreating the driving member in a first direction, and the driving member makes The driving protrusion advances and retreats in a second direction different from the first direction to open and close the second area through the second door, and has a mechanism for converting the forward and backward movement in the first direction into the driving protrusion. The driving groove for moving forward and backward in the second direction is inserted into the switching groove.

In order to prevent the air in the heat removal chamber from moving into the test chamber through the second area, the method further includes making the pressure in the test chamber higher than the pressure in the heat removal chamber by supplying gas to the inside of the test chamber. A gas supply device through which the gas supplied to the inside of the test chamber has a temperature capable of maintaining the temperature environment in the test chamber.

The width of the first region is narrower than the width of the second region. Invention effect

According to the present invention, since the opening and closing of the second area formed by the second opening and closing device has nothing to do with the first opening and closing device, the reliability of the test is maintained and the time required from the end of the test of the electronic product to the completion of the transfer of the test tray, Finally, there is an effect that the operating rate of the processor can be increased.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described with reference to the accompanying drawings, but for the sake of brevity of description, descriptions of repetitive or substantially identical structures are omitted or compressed as much as possible. ＜ General description of processor structure ＞

FIG. 1 is a conceptual top view of a processor 100 according to an embodiment of the present invention, and FIG. 2 is a feature of the processor 100 of FIG. 1 having a test tray TT passing through a test path TW between a test chamber TC and a heat removal chamber DC A perspective view of the part P. 1 and 2, the processor 100 according to this embodiment includes a loading device 110, a constant temperature chamber SC, a test chamber TC, a first conveying device 120, a pressurizing device 130, a heat removing chamber DC, and a second conveying device. 140. An unloading device 150, a first opening and closing device 160 (see FIG. 2), a second opening and closing device 170 (see FIG. 2), and an air supply device 180.

The loading device 110, the thermostatic chamber SC, the test chamber TC, the first conveying device 120, the pressurizing device 130, the heat removing chamber DC, and the unloading device 150 are the same as those described in the background art, and therefore descriptions thereof are omitted. Hereinafter, description The second conveying device 140, the first opening and closing device 160, the second opening and closing device 170, and the air supply device 180 related to the present invention.

The second conveying device 140 transfers the test tray TT located at the test position TP in the test chamber TC to the heat removal chamber DC. To this end, as shown in FIG. 3, the second conveying device 140 includes a gripping member 141, an actuator 142, and a driver 143.

The gripping member 141 has a gripping pin 141a at the gripping position GP. Since the gripping pin 141a can advance and retreat forward and backward, the gripping pin 141a is inserted into or withdrawn from the holding hole GH of the test tray TT through the advancement and retraction, thereby gripping or releasing the gripping of the test tray TT.

The actuator 142 moves the holding member 141 forward and backward so that the holding member 141 holds or releases the holding of the test tray TT.

The driver 143 moves the holding member 141 left and right, so that the holding portion GP of the holding member 141 is located inside the heat removal chamber DC or inside the test chamber TC. Of course, the holding member 141 can perform the transfer of the test tray TT by the operation of the driver 143 in a state of holding the test tray TT. Such a driver 143 may be configured by applying a motor M and a conveyor belt B, but is not limited to this configuration.

The first opening and closing device 160 opens and closes the first area TW1 as a part of the conveyance path TW, and includes a first door 161 and a first driver 162.

The first door 161 opens and closes the first area TW1, that is, if the first door 161 is opened, the first area TW1 is opened, and if the first door 161 is closed, the first area TW1 is closed, thereby preventing the test tray TT from moving from the test chamber TC To the heat removal chamber DC. In addition, the first door 161 prevents the heat exchange between the test chamber TC and the heat removal chamber DC correspondingly according to the degree of closing the first area TW1 in the closed state.

The first driver 162 provides power for opening or closing the first door 161, so that the first door 161 opens and closes the first area TW1. The first driver 162 in this embodiment is an air cylinder, but a motor or other driving device may be applied.

The second opening / closing device 170 opens and closes the second region TW2 which is another part of the conveyance path TW. That is, the second area TW2 forms a conveyance path TW together with the first area TW1, and is a portion different from the first area TW1. The second opening and closing device 170 includes a second door 171 and a second driver 172.

In order to move the holding portion GP of the holding member 141 from the heat removal chamber DC to the test chamber TC through the second region TW2 even when the first door 161 is closed, the second door 171 opens the second region TW2. The second region TW2 is closed to further prevent heat exchange between the test chamber TC and the heat removal chamber DC. Of course, the second region TW2 has a length L2 that allows the grip portion GP of the grip member 141 to pass but does not allow the test tray TT to pass, and is shorter than the length L1 of the first region TW1. In this description, the lengths L1 and L2 refer to the lengths in the vertical direction as the first direction of the first region TW1 or the second region TW2, and more specifically, to the test tray TT conveyed perpendicularly through the second conveying device 140 And also perpendicular to the direction in which the electronic component is pressed by the pressing device 130.

In addition, according to this embodiment, the width W1 of the first region TW1 may be shorter than the width W2 of the second region TW2 in the front-rear direction as the second direction. That is, in the prior art, a conveying channel is constituted without a distinction between a first area and a second area. The width of the conveying channel is the same in all parts. The width of this conveying channel needs to ensure the holding position and test of the holding member. The extent to which the trays move together. Therefore, if the area of the conveying channel is large, the loss of hot or cold air in the test chamber will increase correspondingly when the test tray is moved. However, according to the present invention, since it is not necessary to increase the width of the first region TW1 irrespective of the holding portion GP of the holding member 141, it can be considered that the width of the first region TW1 has a minimum width W1 to ensure that the test tray TT can pass through, And correspondingly reduce the loss of hot or cold air in the test chamber TC when the test tray TT moves. Thereby, the second region TW2 has a width W2 for ensuring that the gripping portion GP of the gripping member 141 and the test tray TT pass together, but the first region TW1 has a width W1 for passing only the test tray TT. Here, the widths W1 and W2 refer to the pressing direction of the electronic components by the pressing device 130 and are the lengths in the advancing and retreating directions of the holding member 141 for holding or releasing the holding of the test tray TT.

For reference, although the vertical processor 100 for testing the loaded electronic components in the test tray TT in a vertical state is shown in this embodiment, the present invention can also be applied to test the loaded electronics in a horizontal state in the test tray TT. Horizontal processor with components. Therefore, in the horizontal processor, the test tray TT is transferred in a horizontal state, and the lengths L1 and L2 of the first region TW1 or the second region TW2 in the horizontal processor refer to the front-back direction (or horizontal direction). length.

The second driver 172 provides power for opening or closing the second door 171. A cylinder is used in this embodiment, but a motor or the like may be used. Through the operation of the second driver 172 as described above, as shown in FIG. 4 (a), the second area TW2 is closed by the second door 171, or as shown in FIG. 4 (b), even when passing through the first door 161 The second region TW2 can be opened even when the first region TW1 is closed. Of course, as shown in FIG. 4 (b), when the second region TW2 is opened, the holding portion GP of the grasping member 171 can be moved from the heat removal chamber DC to the test chamber TC through the second region TW2.

According to the present invention as described above, as shown in FIG. 2, the conveying path TW allows the test tray TT to be moved from the test chamber TC to the heat removal chamber DC only when the first and second regions TW1 and TW2 are all opened.

In addition, according to the present embodiment, since the first opening and closing device 160 and the second opening and closing device 170 operate independently of each other, the opening and closing operation according to the first area TW1 of the first door 161 and the second area TW2 according to the second door 171 The opening and closing actions are performed independently of each other. For this reason, in this embodiment, the second driver 172 and the first driver 162 are provided separately and separately.

On the other hand, the gas supply device 180 supplies gas to the inside of the test chamber TC, so that the pressure in the test chamber TC is higher than that in the heat removal chamber DC. At this time, the gas supplied through the gas supply device 180 may vary according to the test temperature conditions. For example, if it is a high-temperature test, high-temperature air is supplied, and if it is a low-temperature test, low-temperature gas is supplied. That is, the gas supplied into the test chamber TC by the gas supply device 18 preferably has a temperature capable of maintaining the temperature environment in the test chamber TC. The gas supply device 180 supplies gas to the test chamber TC, so that the pressure inside the test chamber TC becomes higher than that of the heat removal chamber DC. In particular, even when the second region TW2 is open, it can help prevent The air in the hot room DC moves into the test room TC. Of course, when the second region TW2 is opened, the amount of gas supplied is preferably larger than when the second region TW2 is closed, so as to control the pressure difference between the inside of the test chamber TC and the inside of the heat removal chamber DC to keep it at a certain level Or higher.

Next, operations of main parts in the processor 100 having the above-mentioned structure will be described.

When the test tray TT and the electronic components in the test chamber TC are pushed toward the test board TB side of the tester TESTER by the pressurizing device 130 to electrically connect the electronic components to the test socket, the electronic component test is performed. It is preferable to start the test in a state where the first region TW1 and the second region TW2 are all closed. Before the test is about to end or at least the first area TW1 is opened, the second opening and closing device 170 is operated in advance to open the second area TW2, and as shown in FIG. 5, the second conveying device 140 is operated so that the holding portion GP of the holding member 141 is located at the test The interior of the room TC. In the state of FIG. 5, when the test of the electronic component is completed, the pressing of the test tray TT by the pressurizing device 130 is released, and the test tray TT that has been pushed to the rear is returned forward. At this time, as shown in FIG. 6, the holding pin 141 a of the holding portion GP waiting forward in the test chamber TC while the test tray TT returns forward is inserted into the holding hole GH of the test tray TT, and at the same time, passes through the first opening and closing device. 160 causes the first region TW1 to also be opened. Next, the operation of the driver 143 of the second conveying device 140 moves the holding member 141 to the right, and the test tray TT is transferred from the inside of the test chamber TC to the inside of the heat removal chamber DC. When the transfer test tray TT is completed, the first area TW1 and the second area TW2 are closed to perform an appropriate test on the electronic components loaded on the test tray TT at the rear end.

For reference, when the second region TW2 is opened and closed, when the holding portion GP of the holding member 141 is moved to the inside of the test chamber TC in advance, or when the second region TW2 has been opened, the amount of supplied gas can be based on the processor The specific specifications of 100 or test temperature conditions are determined in a variety of ways. <First Modification of Characteristic Part>

FIG. 7 is a right side view of a first modification of a characteristic portion of the processor 100 according to FIG. 1.

Referring to the aforementioned second door 171 of FIG. 2 has a flat door type structure, and the second door 171A of the second opening and closing device 170A according to this modification has a sliding door type structure. To this end, a driving projection DP is provided on the second door 171A. The second driver 172A includes a driving unit DE and a driving source DS.

The driving part DE pushes the driving protrusion DP to the rear through forward rotation to close the second region TW2 through the second door 171A, and pulls the driving protrusion DP to the front through the reverse rotation to open the second region TW2. To this end, the driving part DE has a conversion groove TG that converts its forward and reverse rotational movement into a forward and backward movement of the driving protrusion DP, and the driving protrusion DP is inserted into the conversion groove TG.

The driving source DS is provided to rotate the driving member DE in the forward and reverse directions. In the present modification, the air cylinder is used to implement this, but it is not limited thereto, and may be implemented by a motor or the like.

For reference, (a) of FIG. 7 illustrates a state where the second door 171A is opened, and (b) of FIG. 7 illustrates a state where the second door 171A is closed.

As described in the foregoing embodiment of FIG. 2, in this modification, the second opening and closing device 170A is also provided independently of the first opening and closing device 160A. The first opening-closing device 160A is structurally the same as the first opening-closing device 160 with reference to FIG. 2, and therefore description thereof will be omitted. <Second Modification of Characteristic Part>

FIG. 8 is a right side view of a second modification of the characteristic portion of the processor 100 according to FIG. 1.

In this modification, the second door 171B of the second opening and closing device 170B also has a sliding door type structure.

In this modification, the second door 171B is also provided with the driving projection DP, and the second driver 172B is composed of the driving member DE and the driving source DS.

The driving member DE advances and retreats in the vertical direction as the first direction D1, and the driving protrusion DP advances and retreats in the forward and backward direction as the second direction D2 orthogonal to the first direction D1 according to the advance and retreat of the driving member DE, and passes through the second The door 171B opens and closes the second area TW2. For this purpose, the driving member DE has a switching groove TG for converting the forward and backward movement of the driving member DE in the first direction (up and down direction) into the forward and backward movement of the second door 171B in the second direction (forward and backward direction). TG is inclined at predetermined angles θ1 and θ2 with respect to the first direction D1 and the second direction D2, respectively. Then, the driving projection DP is inserted into the conversion groove TG.

The driving source DS is provided so that the driving member DE moves forward and backward. In this modification, the driving source DS is implemented by a cylinder, but is not limited thereto, and may be implemented by a motor or the like.

For reference, (a) of FIG. 8 illustrates a state where the second region TW2 is opened, and (b) of FIG. 8 illustrates a state where the second region TW2 is closed.

On the one hand, in the above-mentioned embodiment, the case where the second conveying device 140 is set to convey one test tray TT, but as disclosed in Patent Publication No. 10-2008-0082591, of course, the second conveying device 140 is applicable in the present invention. Case of transferring two test trays TT together. For example, if two side-by-side test trays are transferred in the test room at the same time, as shown in FIG. 9, two first opening and closing devices with first doors and one with two first doors may be used. The structure of the second opening and closing device of the second door. Referring to the example of FIG. 9, since two test trays can be transported simultaneously by the holding member, only one second opening and closing device can be provided. According to the example of FIG. 9, since two test trays can be simultaneously conveyed by one holding member, the second area can be correspondingly reduced, so that even when the second area is opened, changes in the temperature environment in the test room can be minimized. Relative advantage. That is, as shown in the example of FIG. 9, it can be seen that the present invention can be applied more preferably when a plurality of test trays are conveyed at one time.

Of course, a plurality of test trays can also be respectively transferred to a plurality of second conveying devices. At this time, referring to FIG. 2 to FIG. 8, a plurality of first opening and closing devices and second opening and closing devices according to the illustrated embodiments may be provided respectively. . Here, the plurality of first opening and closing devices and the second opening and closing device may arrange the structures shown in the examples of FIGS. 2 to 8 in a line-symmetrical manner or in parallel.

For reference, if the gas supply amount and temperature are accurately controlled by the gas supply device 180, it can be fully considered that the second opening and closing device is omitted and the second region is always opened.

As described above, the detailed description of the present invention is obtained by referring to the embodiments and modifications of the drawings. However, the above embodiments and modifications are only for explaining preferred examples of the present invention. Therefore, it should be understood that the present invention is not limited to the disclosed embodiments, and the scope of the present invention should be understood to be within the scope of the appended patent applications and their equivalents.

100‧‧‧ processor for testing electronic components

110‧‧‧Loading device

120‧‧‧The first conveying device

130‧‧‧Pressure device

140‧‧‧second conveyor

141‧‧‧holding component

141a‧‧‧ holding pin

142‧‧‧Actuator

143‧‧‧Drive

150‧‧‧Unloading device

160, 160A‧‧‧The first opening and closing device

161‧‧‧The first door

162‧‧‧First Drive

170, 170A, 170B‧‧‧Second opening and closing device

171, 171A, 171B‧‧‧Second Door

172, 172A, 172B‧‧‧Second Drive

180‧‧‧Air supply device

B‧‧‧ Conveyor

D1‧‧‧ first direction

D2‧‧‧ Second direction

DC‧‧‧De-heating room

DE‧‧‧Driver

DP‧‧‧ drive bump

DS‧‧‧Driver

GH‧‧‧ holding hole

GP‧‧‧ Holding position

L1, L2‧‧‧ length

M‧‧‧Motor

SC‧‧‧ constant temperature room

TB‧‧‧test board

TC‧‧‧Test Room

TG‧‧‧ Conversion tank

TP‧‧‧Test location

TT‧‧‧test tray

TW‧‧‧Conveying channel

TW1‧‧‧ Zone 1

TW2‧‧‧Second Zone

W1, W2‧‧‧Width

θ1, θ2‧‧‧ angle

FIG. 1 is a conceptual top view of a processor 100 according to an embodiment of the present invention. FIG. 2 is a perspective view extracting a feature portion applied to the processor of FIG. 1. FIG. 3 is a perspective view extracting a second conveying device applied to FIG. 1. 4 is a right side view of a characteristic portion applied to the processor of FIG. 1. 5 and 6 are reference views for explaining operations applied to characteristic parts of the processor of FIG. 1. FIG. 7 is a first modified example of a characteristic portion applied to the processor of FIG. 1. FIG. 8 is a second modification of the characteristic portion applied to the processor of FIG. 1. FIG. 9 is a reference view for explaining an example in which the present invention is applied when a plurality of test trays are transferred at a time.

Claims (9)

A processor for testing electronic components, comprising: a test chamber that provides a space and a temperature environment for testing electronic components of a test tray; a pressurizing device that places a test tray on the test tray in a test position in the test chamber The electronic component of the tester presses the test socket side of the tester so that the electronic component is electrically connected to the test socket; a heat removal chamber for removing the electronic components from the test tray of the test chamber is in the test chamber Applied heat; a transfer device for transferring a test tray in the test chamber to the heat removal chamber; and a first opening and closing device for opening and closing as a test transferred from the test chamber to the heat removal chamber A first area of a part of a transport path of a tray, the conveying device includes: a holding member for holding or releasing the test tray; an actuator for holding or releasing the test tray by the holding member; a driver for The holding member moves in a conveying direction of the test tray, and the holding portion of the holding member is configured to be able to pass through as a conveying passage. A second region of another part, the length of the second region is shorter than the length of the first region, the first opening and closing device is provided with a first door and provides power for opening and closing the first door The first drive of the first drive, when the test tray is moved from the test chamber to the heat removal chamber, the first door is opened, and when the first door is closed, at least the first area is blocked and the test tray is blocked Moving from the test chamber to the de-heating chamber and preventing heat exchange between the test chamber and the de-heating chamber, when the first area is opened, the conveying channel allows the test tray to be removed from the The inside of the test chamber moves toward the inside of the heat removal chamber. The processor for testing electronic components according to claim 1, further comprising a second opening and closing device for opening and closing the second area, the second opening and closing device having a second door and provided for opening and closing A power-driven second driver that closes the second door, so that the second door can pass the first heat-removing chamber through the first heat-removing chamber through the first door even when the first door is closed. Opening the second area in a way that the two areas move toward the test room, and when the second door is closed, closing the second area to prevent heat exchange between the test room and the heat removal room, When the first area and the second area are all opened, the conveying channel allows the test tray to move from the inside of the test chamber to the inside of the heat removal chamber. The processor for testing an electronic component according to claim 2, wherein the opening and closing operation based on the first area of the first opening and closing device and the opening and closing of the second area based on the second opening and closing device The actions can be realized independently of each other, and the second driver and the first driver are provided separately and separately. The processor for testing an electronic component according to claim 2, wherein the second door has a driving protrusion, and the second driver includes a driving part and a driving source for rotating the driving part forward and backward , The driving member pushes the driving protrusion through a positive rotation so that the second area is closed by the second door, or pulls the driving protrusion through a reverse rotation to open the second area, so The driving member includes a conversion groove for converting a forward and reverse rotation movement of the driving member into a forward and backward movement of the driving protrusion, and the driving protrusion is inserted into the conversion groove. The processor for testing an electronic component according to claim 2, wherein the second door has a driving protrusion, and the second driver includes a driving member and a driving member for advancing and retreating the driving member in a first direction. The driving source of the driving source advances and retreats in the first direction through the driving member, so that the driving protrusion advances and retreats in a second direction different from the first direction, and further causes the driving protrusion through the second door The second region is opened and closed, and the driving member includes a conversion groove for converting the forward and backward movement in the first direction into the forward and backward movement in the second direction of the driving protrusion, and the driving protrusion is inserted in the conversion groove. The processor for testing electronic components according to claim 1, further comprising an air supply device, and by supplying air to the inside of the test chamber, the air pressure in the test chamber is higher than that of the heat removal chamber. Air pressure to prevent the air in the heat removal chamber from moving into the test chamber through the second area, and the gas supplied to the inside of the test chamber through the air supply device has a temperature for maintaining the temperature in the test chamber Ambient temperature. The processor for testing an electronic component according to claim 1, wherein a width of the first region is narrower than a width of the second region. A processor for testing electronic components, comprising: a loading device for loading an electronic component to be tested loaded on a customer tray onto a test tray located at a loading position; a thermostatic chamber for loading a load from a loading position The electronic components on the test tray apply thermal stimulus; the test chamber provides space and temperature environment to test the electronic components on the temperature test tray that has reached the test position through the constant temperature chamber; The test tray in the chamber is transferred to the test chamber; a pressurizing device presses the electronic components on the test tray located in the test position in the test chamber to the test socket side of the tester so that the electronic components are electrically connected to the test On a socket; a heat removal chamber for removing thermal stimuli applied to the electronic components from the test tray of the test chamber in the thermostatic chamber and the test chamber; a second conveying device for transferring the test The test tray in the chamber is transferred to the de-heating chamber; an unloading device, which unloads the electrons from the test tray from the de-heating chamber to the unloading position. And the first opening and closing device for opening and closing the first area as a part of the conveying path of the test tray transferred from the test chamber to the heat removal chamber, as The second area that is different from the first area opened and closed by the first opening and closing device and forms the conveying channel is independent of the first opening and closing device. The second conveying device includes a holding member for An actuator for gripping or releasing the test tray; an actuator for causing the gripping member to grip or release the test tray; and a driver for moving the gripping member in a transfer direction of the test tray, the first opening and closing device includes: A door that is opened when the test tray is moved from the test chamber to the heat removal chamber, and when the first door is closed, at least the first area is closed and the test tray is prevented from moving from the test chamber to the heat removal chamber A hot chamber is moved to prevent heat exchange between the test chamber and the heat removal chamber; a first driver provides power for opening or closing the first door, The second area has a width and a length that allow the holding portion of the holding member to pass through is shorter than the length of the first area. When the first area is opened, the conveying channel allows a test tray to pass from the test chamber. The inside moves toward the inside of the heat removal chamber. The processor for testing an electronic component according to claim 8, further comprising a second opening and closing device for opening and closing the second area, the second opening and closing device having a second door and provided for opening and closing A power-driven second driver for closing the second door, so that the second door can pass the second heat-removing chamber from the heat-removing chamber to the second door so that the holding portion of the holding member is closed. The second area is opened in a manner that the area moves toward the test room. When the second door is closed, the second area is closed to prevent heat exchange between the test room and the heat removal room. When one area and the second area are all opened, the conveying channel allows the test tray to move from the inside of the test chamber to the inside of the heat removal chamber.