TWI675479B - 半導體積體電路裝置及其製造方法 - Google Patents
半導體積體電路裝置及其製造方法 Download PDFInfo
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- TWI675479B TWI675479B TW105104138A TW105104138A TWI675479B TW I675479 B TWI675479 B TW I675479B TW 105104138 A TW105104138 A TW 105104138A TW 105104138 A TW105104138 A TW 105104138A TW I675479 B TWI675479 B TW I675479B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 122
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 239000012535 impurity Substances 0.000 claims abstract description 256
- 238000000034 method Methods 0.000 claims abstract description 104
- 239000000758 substrate Substances 0.000 claims abstract description 67
- 229910052785 arsenic Inorganic materials 0.000 claims abstract description 18
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims abstract description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 44
- 238000009792 diffusion process Methods 0.000 claims description 43
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 37
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 37
- 230000008569 process Effects 0.000 claims description 35
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 32
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 32
- 238000005468 ion implantation Methods 0.000 claims description 31
- 229910052698 phosphorus Inorganic materials 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 19
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 18
- 239000011574 phosphorus Substances 0.000 claims description 18
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 16
- 229910052796 boron Inorganic materials 0.000 claims description 16
- 230000005684 electric field Effects 0.000 claims description 14
- 239000013078 crystal Substances 0.000 claims description 10
- 238000009413 insulation Methods 0.000 claims description 10
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000002513 implantation Methods 0.000 claims description 2
- 108091006146 Channels Proteins 0.000 claims 15
- 239000007943 implant Substances 0.000 claims 3
- 238000003475 lamination Methods 0.000 claims 2
- 102000004129 N-Type Calcium Channels Human genes 0.000 claims 1
- 108090000699 N-Type Calcium Channels Proteins 0.000 claims 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000012545 processing Methods 0.000 description 21
- 230000000694 effects Effects 0.000 description 12
- 230000006378 damage Effects 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 238000000926 separation method Methods 0.000 description 7
- 238000010276 construction Methods 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 238000011282 treatment Methods 0.000 description 6
- 230000005641 tunneling Effects 0.000 description 6
- 230000007774 longterm Effects 0.000 description 5
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000011866 long-term treatment Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
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- Engineering & Computer Science (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015035501 | 2015-02-25 | ||
JP2015-035501 | 2015-02-25 | ||
JP2015037330 | 2015-02-26 | ||
JP2015-037330 | 2015-02-26 | ||
JP2015194572A JP6595872B2 (ja) | 2015-02-25 | 2015-09-30 | 半導体集積回路装置およびその製造方法 |
JP2015-194572 | 2015-09-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201705477A TW201705477A (zh) | 2017-02-01 |
TWI675479B true TWI675479B (zh) | 2019-10-21 |
Family
ID=56876760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105104138A TWI675479B (zh) | 2015-02-25 | 2016-02-05 | 半導體積體電路裝置及其製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6595872B2 (enrdf_load_stackoverflow) |
KR (1) | KR20160103937A (enrdf_load_stackoverflow) |
TW (1) | TWI675479B (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6775369B2 (ja) * | 2016-09-28 | 2020-10-28 | エイブリック株式会社 | 半導体装置 |
CN115547931B (zh) * | 2022-12-05 | 2023-02-14 | 合肥晶合集成电路股份有限公司 | 半导体器件的制作方法、半导体器件以及晶体管 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100032754A1 (en) * | 2008-08-11 | 2010-02-11 | Nec Electronics Corporation | Semiconductor device and method of manufacturing the semiconductor device |
US8541279B2 (en) * | 2009-09-24 | 2013-09-24 | Seiko Instruments Inc. | Method for manufacturing a semiconductor device having high-voltage and low-voltage transistors |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5080032B2 (ja) | 2006-06-27 | 2012-11-21 | セイコーインスツル株式会社 | 半導体集積回路装置 |
-
2015
- 2015-09-30 JP JP2015194572A patent/JP6595872B2/ja not_active Expired - Fee Related
-
2016
- 2016-02-05 TW TW105104138A patent/TWI675479B/zh not_active IP Right Cessation
- 2016-02-22 KR KR1020160020778A patent/KR20160103937A/ko not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100032754A1 (en) * | 2008-08-11 | 2010-02-11 | Nec Electronics Corporation | Semiconductor device and method of manufacturing the semiconductor device |
US8541279B2 (en) * | 2009-09-24 | 2013-09-24 | Seiko Instruments Inc. | Method for manufacturing a semiconductor device having high-voltage and low-voltage transistors |
Also Published As
Publication number | Publication date |
---|---|
TW201705477A (zh) | 2017-02-01 |
JP6595872B2 (ja) | 2019-10-23 |
JP2016164967A (ja) | 2016-09-08 |
KR20160103937A (ko) | 2016-09-02 |
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MM4A | Annulment or lapse of patent due to non-payment of fees |