TWI662872B - 陶瓷電路板及其製法 - Google Patents

陶瓷電路板及其製法 Download PDF

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TWI662872B
TWI662872B TW107103007A TW107103007A TWI662872B TW I662872 B TWI662872 B TW I662872B TW 107103007 A TW107103007 A TW 107103007A TW 107103007 A TW107103007 A TW 107103007A TW I662872 B TWI662872 B TW I662872B
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layer
composite material
ceramic
material layer
circuit board
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謝孟修
Meng-Hsiu Hsieh
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謝孟修
Meng-Hsiu Hsieh
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Priority to TW107103007A priority Critical patent/TWI662872B/zh
Priority to JP2018041726A priority patent/JP6793674B2/ja
Priority to CN201810220379.5A priority patent/CN110087400B/zh
Priority to US15/934,494 priority patent/US10506711B2/en
Priority to EP18164898.1A priority patent/EP3518279A1/en
Priority to KR1020180064789A priority patent/KR102161340B1/ko
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Publication of TW201933962A publication Critical patent/TW201933962A/zh
Priority to US16/685,396 priority patent/US10757806B2/en

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    • H05K3/105Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam
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Abstract

本發明關於一種陶瓷電路板及其製法,該陶瓷電路板包括一基板及一複合材料層。該複合材料層係形成於該基板上,且成分包含金屬氧化物粉體及陶瓷粉體。其中,該複合材料層的表面還顯露一上界面層,該上界面層包含從該金屬氧化物粉體還原的金屬、低價金屬氧化物及其共晶結構

Description

陶瓷電路板及其製法
本發明係關於一種陶瓷電路板及其製法。
陶瓷電路板所採用的陶瓷基板具高散熱性和大電流負載能力、耐高溫高壓等惡劣工作環境,因此滿足了產品在各種場合的應用需求,例如大功率的電力模組、大功率的發光二極體(light-emitting diode,LED)照明等產品。
習知陶瓷散熱基板之製程概包括底下幾種:低溫共燒多層陶瓷(Low-Temperature Co-fired Ceramic,LTCC)、高溫共燒多層陶瓷(High-Temperature Co-fired Ceramic,HTCC)、直接接合銅基板(Direct Bonded Ceramic,DBC)與直接鍍銅基板(Direct Plated Ceramic,DPC)等,其中高溫共燒多層陶瓷(HTCC)屬於較早期發展之技術,但由於其較高的製程溫度(1300~1600℃),使其材料選擇受限且製作成本昂貴。隨後的低溫共燒多層陶瓷(LTCC)因於材料中加入了玻璃材料,使得其共燒溫度降至約 850℃,但也因此使整體的熱傳導率降低至2~3W/mK之間,比其他陶瓷基板都還要低。直接接合銅基板(DBC)技術乃利用1065~1085℃高溫加熱將氧化鋁與銅板直接結合,製造費用較高,且存在氧化鋁與銅板間微氣孔產生之問題不易解決。
目前業界普遍採用的是直接鍍銅基板(DPC)技術,其乃是利用真空濺鍍技術(Sputtering)及曝光顯影方式在陶瓷基板上刻劃出電路圖形,具體製程可參見美國公開第20110079418號專利。
本發明提供一種陶瓷電路板的製法,包括:提供一基板;在該基板上形成一複合材料層,該複合材料層的成分包含金屬氧化物粉體及陶瓷粉體; 及以雷射光照射該複合材料層,使得該複合材料層被該雷射光照射到的區域中的金屬氧化物粉體還原形成一界面層,且該界面層係顯露於該複合材料層的表面。其中,該界面層包含還原自該金屬氧化物粉體的金屬,或是包含還原自該金屬氧化物粉體的金屬、低價金屬氧化物及其共晶結構。
在一實施例中,本發明上述基板的製作步驟包括:提供一底板,該底板係為一金屬板;及於該底板上形成一陶瓷層;其中,該複合材料層係形成於該陶瓷層上。
在一實施例中,本發明上述製法包括:在該界面層上形成一導電金屬層。
本發明還提供一種陶瓷電路板,包括一基板及一複合材料層,該複合材料層係形成於該基板上,且成分包含金屬氧化物粉體及陶瓷粉體。其中,該複合材料層的表面還顯露一界面層,該界面層係由該複合材料層的金屬氧化物粉體還原形成。其中,該界面層可包含還原自該金屬氧化物粉體的金屬,或是包含還原自該金屬氧化物粉體的金屬、低價金屬氧化物及其共晶結構。
在一實施例中,本發明之陶瓷電路板的上述基板包括一底板及一陶瓷層,該底板係為一金屬板;該陶瓷層形成於該底板上;其中,該複合材料層係形成於該陶瓷層上。
在一實施例中,本發明之陶瓷電路板包括形成於該界面層上的一導電金屬層。
在一實施例中,本發明上述複合材料層的金屬氧化物粉體係選自氧化銀、氧化銅或氧化鎳其中一者或多者。
相對於先前技術,利用本發明上述製法可快速製作出上述陶瓷電路板,且其製作過程僅使用雷射光照射上述複合材料層就能獲得可供電鍍導電金屬的界面層,不需使用設備成本昂貴且製作速度緩慢的真空濺鍍技術。
圖1之部分斷面示意圖係用於說明本發明陶瓷電路板100的製法的一個實施例,該製法包括底下步驟:
首先,如圖1(A)所示,提供一基板10。基板10材料不限,例如基板10可為一金屬板、一非金屬板、一陶瓷板、或一多層板。在本實施例中,基板10包括一底板1及形成在底板1上的一陶瓷層2,但不以此為限。其中,底板1的厚度較佳約在0.3 mm ~ 1.5 mm,其可為一金屬板、一鋁板、一鋁合金板、一銅板、一銅合金板、一塑膠板、一電木板、一聚脂纖維板(Polyester, PET)、一聚醯亞胺板(Polyimide, PI)⋯⋯等等。陶瓷層2之材料可選自氮化硼、氮化鋁、氧化鋁及碳化矽的其中一者或多者,其厚度約在10μm至30μm之間,並可視需要添加有無機導熱粉體(例如:石墨炭),以提其高其散熱性。在本實施例中,是將陶瓷粉體與液態樹脂(例如:矽氧樹脂、矽基樹脂或環氧樹脂)均勻混合之後,再噴塗或淋塗於底板1的表面(例如頂面),然後加熱(大約200°C),以形成前述的陶瓷層2,此陶瓷層2具有耐高電壓、電絕緣、及散熱等特性。
接著,如圖1(B)所示,於基板10上形成一複合材料層3a,複合材料層3a的成分包含金屬氧化物粉體及陶瓷粉體。在本實施例中,是將金屬氧化物粉體與陶瓷粉體混合後,經過噴霧乾燥製成奈米級混合粉體,然後將該奈米級混合粉體與液態樹脂(例如:矽氧樹脂、矽基樹脂或環氧樹脂)均勻混合之後,再噴塗或淋塗於陶瓷層2的表面(例如頂面),然後加熱(大約200°C),以形成前述複合材料層3a。其中,金屬氧化物可選自氧化銀、氧化銅或氧化鎳其中一者或多者,但不以此為限,至於複合材料層3a所使用的陶瓷粉體則可相同或近似於上述陶瓷層2所使用陶瓷粉體。
續參閱圖1(C),以雷射光的照射複合材料層3a,使得該複合材料層3a被該雷射光照射到的區域中的金屬氧化物粉體還原形成可鍍上導電金屬的一界面層3,且該界面層3係顯露於該複合材料層3a的表面。其中,被該雷射光照射到的區域可涵蓋複合材料層3a的全部表面,也可以只涵蓋部分表面。本實施例中,複合材料層3a只有部分表面被該雷射光照射到而還原成為界面層3,其餘表面則因未被該雷射光照射到而仍為複合材料層3a。此複合材料層3a因仍含有陶瓷成分,故仍具有耐高電壓、電絕緣、及散熱等特性,並能牢固地接合於上述陶瓷層2。
在本實施例中,該雷射光的波長為1064nm,然而,針對其它不同的金屬氧化物材料得選用其他不同波段的光源,例如波長為266nm、532nm、10.6μm的雷射光。另外,該雷射光可採取掃瞄方式來照射複合材料層3a,例如,根據預先設計的一圖案(例如一電路圖案)控制該雷射光去掃瞄複合材料層3a,以獲得形狀相同於該圖案的界面層3,例如兩個具有圖2所示形狀的界面層3。
在被該雷射光照射到的區域中,金屬氧化物會被該雷射光激發而還原形成金屬、低價金屬氧化物及其共晶結構,此即前述的界面層3。其中,所述的金屬還原現象主要乃是利用某些奈米級的金屬原子具有受光激發而脫氧還原的特性。舉例而言,當複合材料層3a中的金屬氧化物係選擇氧化銅(CuO)時,由於奈米銅原子具有受光激發還原的特性,因此,氧化銅受光激發後會脫氧還原成為零價銅(Cu)、氧化亞銅(CuO 2)及其共晶結構。
較佳地,如圖1(D)及圖3所示,本發明製法還包括在上述界面層3上形成一導電金屬層4。其中,導電金屬層4的材料可選自銅、銀、銦、鎳或其合金。在本實施例中,導電金屬層4是以電鍍方式形成的。
在另一實施例中,如圖4(A)及圖5所示,當複合材料層3a的全部表面都被該雷射光照射時,複合材料層3a的表面將全部變成上述的界面層3。接著,如圖4(B)所示,在經過電鍍之後,導電金屬層4將形成於界面層3的全部表面。然後,如圖4(C)及圖6所示,利用現有的印刷電路板製作技術,將導電金屬層4製作成想要的圖案(例如一電路圖案)。
在圖1至6所示的實施例中,本發明製法是實施於底板1的一上表面或一下表面,故所得到的陶瓷電路板100係為一單面電路板,上述導電金屬層4即為該單面電路板上的電路。
然而,如圖7所示,當本發明製法實施於底板1的該上表面及下表面時,則所得到的陶瓷電路板100a係包括上述底板1、一上陶瓷層20及一下陶瓷層21、一上複合材料層30a及一下複合材料層31a(兩者相同於上述複合材料層3a)、一上界面層300及一下界面層301(兩者相同於上述界面層3),較佳還包括一上導電金屬層400及一下導電金屬層401。簡言之,陶瓷電路板100a係為一雙面電路板,上導電金屬層400及下導電金屬層401即分別為該雙面電路板上面及下面的電路。
再者,如圖8所示,當底板1具有至少一個貫穿孔5,且本發明製法實施於底板1的上、下表面及貫穿孔5時,所得到的陶瓷電路板100b不但具有圖7所示的層次構造,還包括該貫穿孔5、形成於貫穿孔5的壁面上的一孔內陶瓷層22、及形成於該孔內陶瓷層22上的孔內複合材料層32a(相同於上述複合材料層3a)。孔內陶瓷層22連接上、下陶瓷層20及21,孔內複合材料層32a連接上、下複合材料層30a及31a。孔內複合材料層32a的表面還顯露一孔內界面層302。孔內界面層302係還原自孔內複合材料層32a的金屬氧化物粉體,且連接該上、下界面層300及301。較佳還包括至少一孔內導電金屬層402,其形成於孔內界面層302上且連接上、下導電金屬層400及401。簡言之,陶瓷電路板100b係為具有導電貫穿孔的一雙面電路板,上導電金屬層400及下導電金屬層401即分別為該雙面電路板上面及下面的電路,該兩電路係藉由孔內導電金屬層402構成電性連接。
另外,可於底板1的底面及/或頂面形成一或多道預切溝槽(V-CUT,圖中未示),可方便後續將所製作的陶瓷電路板100,100a或100b分割成數塊。
從上述說明可知,利用本發明方法可快速製作出一單面或雙面的陶瓷電路板,且其製作過程僅使用雷射光照射上述複合材料層3a就能獲得可供電鍍導電金屬的界面層3,不需使用設備成本昂貴且製作速度緩慢的真空濺鍍技術。
1‧‧‧底板
10‧‧‧基板
100、100a、100b‧‧‧陶瓷電路板
2‧‧‧陶瓷層
20‧‧‧上陶瓷層
21‧‧‧下陶瓷層
22‧‧‧孔內陶瓷層
3‧‧‧界面層
3a‧‧‧複合材料層
30a‧‧‧上複合材料層
31a‧‧‧下複合材料層
32a‧‧‧孔內複合材料層
300‧‧‧上界面層
301‧‧‧下界面層
302‧‧‧孔內界面層
4‧‧‧導電金屬層
400‧‧‧上導電金屬層
401‧‧‧下導電金屬層
402‧‧‧孔內導電金屬層
5‧‧‧貫穿孔
圖1之斷面示意圖係顯示本發明之一種陶瓷電路板100及其製法的一個較佳實施例。 圖2係顯示圖1(C)的俯視圖。 圖3係圖1(D)的俯視圖。 圖4之斷面示意圖係顯示本發明陶瓷電路板製法的另一較佳實施例。 圖5係圖4(A)的俯視圖。 圖6係圖4(C)的俯視圖。 圖7係顯示本發明之另一種陶瓷電路板100a的部分斷面示意圖。 圖8係顯示本發明之再一種陶瓷電路板100b的部分斷面示意圖。

Claims (12)

  1. 一種陶瓷電路板的製法,包括底下步驟:提供一基板;在該基板上形成一複合材料層,該複合材料層的成分包含混合的金屬氧化物粉體及陶瓷粉體;及以雷射光照射該複合材料層,使得該複合材料層被該雷射光照射到的區域中的金屬氧化物粉體還原形成一界面層,未照射到雷射光的部分仍為該複合材料層,且該界面層係顯露於該複合材料層的表面,並包含還原自該金屬氧化物粉體的金屬。
  2. 如請求項1所述的製法,其中,該基板的製作步驟包括:提供一底板,該底板係為一金屬板;及於該底板上形成一陶瓷層;其中,該複合材料層係形成於該陶瓷層上。
  3. 如請求項1或2所述的製法,包括:在該界面層上形成一導電金屬層。
  4. 如請求項1或2所述的製法,其中該複合材料層的金屬氧化物粉體係選自氧化銀、氧化銅或氧化鎳其中一者或多者。
  5. 如請求項1或2所述的製法,其中該界面層包含還原自該金屬氧化物粉體的低價金屬氧化物及其共晶結構。
  6. 如請求項3所述的製法,其中該複合材料層的金屬氧化物粉體係選自氧化銀、氧化銅或氧化鎳其中一者或多者。
  7. 一種陶瓷電路板,包括:一基板;及一複合材料層,形成於該基板上,且成分包含混合的金屬氧化物粉體及陶瓷粉體,其中,該複合材料層的表面還顯露一界面層,該界面層包含還原自該金屬氧化物粉體的金屬。
  8. 如請求項7所述的陶瓷電路板,其中該基板包括:一底板,係為一金屬板;及一陶瓷層,形成於該底板上;其中,該複合材料層係形成於該陶瓷層上。
  9. 如請求項7或8所述的陶瓷電路板,包括形成於該界面層上的一導電金屬層。
  10. 如請求項7或8所述的陶瓷電路板,其中該複合材料層的金屬氧化物粉體係選自氧化銀、氧化銅或氧化鎳其中一者或多者。
  11. 如請求項7或8所述的陶瓷電路板,其中該界面層包含還原自該金屬氧化物粉體低價金屬氧化物及其共晶結構。
  12. 如請求項9所述的陶瓷電路板,其中該複合材料層的金屬氧化物粉體係選自氧化銀、氧化銅或氧化鎳其中一者或多者。
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CN201810220379.5A CN110087400B (zh) 2018-01-26 2018-03-16 陶瓷电路板及其制法
US15/934,494 US10506711B2 (en) 2018-01-26 2018-03-23 Ceramic circuit plate and method of making same
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