TWI657895B - Disc-shaped rotary blade, cutting device, and method for manufacturing disc-shaped rotary blade - Google Patents
Disc-shaped rotary blade, cutting device, and method for manufacturing disc-shaped rotary blade Download PDFInfo
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- TWI657895B TWI657895B TW106133926A TW106133926A TWI657895B TW I657895 B TWI657895 B TW I657895B TW 106133926 A TW106133926 A TW 106133926A TW 106133926 A TW106133926 A TW 106133926A TW I657895 B TWI657895 B TW I657895B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
- B26D2001/002—Materials or surface treatments therefor, e.g. composite materials
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Abstract
本發明提供圓板狀旋轉刃、切削裝置及圓板狀旋轉刃的製造方法。在使用圓板狀旋轉刃對切削對象進行切削時能夠實現圓板狀旋轉刃的長壽命化。圓板狀旋轉刃(1A、1B)包括由經樹脂材料硬化而成型的硬化樹脂形成的樹脂部(5)、磨粒(6)、來源於生物的纖維狀部件(7)和骨料(8)。來源於生物的纖維狀部件(7)例如為具有親水性的植物性纖維狀部件。植物性纖維狀部件(7)較佳包含纖維素。纖維狀部件(7)更較佳為具有高親水性的纖維素納米纖維(Cellulose nanofiber:CNF)。 The present invention provides a disc-shaped rotary blade, a cutting device, and a method for manufacturing a disc-shaped rotary blade. When a cutting object is cut using a disc-shaped rotary blade, the life of the disc-shaped rotary blade can be extended. The disc-shaped rotating blade (1A, 1B) includes a resin portion (5) formed by a hardened resin hardened and molded by a resin material, abrasive particles (6), a fibrous component (7) derived from a living body, and an aggregate (8). ). The bio-derived fibrous member (7) is, for example, a plant-based fibrous member having hydrophilic properties. The plant-based fibrous member (7) preferably contains cellulose. The fibrous member (7) is more preferably a cellulose nanofiber (Cellulose nanofiber: CNF) having high hydrophilicity.
Description
本發明有關於一種通過對切削對象進行切削而製造多個產品時使用的圓板狀旋轉刃、切削裝置及圓板狀旋轉刃的製造方法。 The present invention relates to a disc-shaped rotary blade, a cutting device, and a method for manufacturing a disc-shaped rotary blade for use in manufacturing a plurality of products by cutting a cutting object.
在製造電子部件時,實施使用作為圓板狀旋轉刃的刀片對作為工件(切削對象)的晶圓(半導體晶圓:semiconductor wafer)進行切削的方法(例如,參照對比文件1的第[0054]段及圖1~圖3)。通過對晶圓進行切削,製造經單片化的多個電子部件。在該情況下,經單片化的半導體晶片為電子部件(產品)。半導體晶圓為在由矽(Si)或碳化矽(SiC)等組成的母材的上部形成有雜質擴散層、絕緣層和佈線層等的複合材料。半導體晶圓為板狀部件。 In the manufacture of electronic components, a method of cutting a wafer (semiconductor wafer) as a workpiece (cutting object) using a blade that is a disk-shaped rotary blade is implemented (for example, refer to [0054] of Reference Document 1). Paragraph and Figure 1 ~ Figure 3). The wafer is cut to manufacture a plurality of singulated electronic components. In this case, the singulated semiconductor wafer is an electronic component (product). A semiconductor wafer is a composite material in which an impurity diffusion layer, an insulating layer, a wiring layer, and the like are formed on a base material composed of silicon (Si), silicon carbide (SiC), or the like. The semiconductor wafer is a plate-shaped member.
作為切削對象的其他形式,可列舉封裝後基板。封裝後基板具有:基板;多個晶片狀部件,安裝在基板所具有的多個區域上;和封裝樹脂,以一併覆蓋多個區域的方式形成為平板狀。封裝後基板為通過層壓安裝有多個晶片狀部件的基板和封裝樹脂而成的複合材料。封裝後基板為板狀部件。 As another form of the cutting target, a packaged substrate is mentioned. The packaged substrate includes: a substrate; a plurality of wafer-shaped components mounted on a plurality of regions of the substrate; and a sealing resin formed into a flat plate shape so as to cover a plurality of regions together. The packaged substrate is a composite material obtained by laminating a substrate on which a plurality of wafer-shaped members are mounted and a packaging resin. The packaged substrate is a plate-shaped member.
專利文獻1:日本專利公開2013-084811號公報 Patent Document 1: Japanese Patent Publication No. 2013-084811
當利用高速旋轉的刀片對工件實施切割用切削時,在切削加工中會產生刀片與工件之間的摩擦。因加工時的摩擦引起的摩擦熱也會促進刀片自身的磨損,並且產生刀片壽命縮短的問題(例如,參照專利文獻1的第[0002]段)。關於該問題,對作為圓板狀旋轉刃的刀片自身的長壽命化的要求不斷加強。在本發明文書中,“壽命”這一用語是指以下情況:圓板狀旋轉刃達到由於圓板 狀旋轉刃的直徑變小而在使用該旋轉刃進行的工件(切削對象)切削受阻的階段。圓板狀旋轉刃的直徑變小則因磨損或損耗等而產生。 When cutting is performed on a workpiece using a high-speed rotating blade, friction between the blade and the workpiece is generated during the cutting process. Friction heat due to friction during processing also promotes wear of the insert itself, and causes a problem that the life of the insert is shortened (for example, refer to paragraph [0002] of Patent Document 1). Regarding this problem, there is an increasing demand for a longer life of the blade itself, which is a disk-shaped rotary blade. In the document of the present invention, the term "life" refers to a situation in which a disc-shaped rotating blade reaches The diameter of the rotating blade is reduced, and cutting of a workpiece (cutting object) using the rotating blade is blocked. The smaller the diameter of the disc-shaped rotary blade, the more likely it is caused by abrasion or wear.
為瞭解決上述問題,本發明的目的在於提供一種圓板狀旋轉刃、切削裝置及圓板狀旋轉刃的製造方法,其在對板狀部件進行切削時能夠實現圓板狀旋轉刃的長壽命化。 In order to solve the above problems, an object of the present invention is to provide a disc-shaped rotary blade, a cutting device, and a method for manufacturing a disc-shaped rotary blade, which can realize a long life of the disc-shaped rotary blade when cutting a plate-shaped member. Into.
本發明一實施例的圓板狀旋轉刃用於對切削對象進行切削,圓板狀旋轉刃包括:硬化樹脂,經樹脂材料硬化而成型;磨粒,被分散到硬化樹脂內;和來源於生物的纖維狀部件,被分散到硬化樹脂內,硬化樹脂由在磨粒和纖維狀部件被分散到樹脂材料中的狀態下樹脂材料硬化而成型的硬化樹脂構成。 A disc-shaped rotary blade according to an embodiment of the present invention is used for cutting a cutting object. The disc-shaped rotary blade includes: a hardened resin formed by hardening a resin material; abrasive particles are dispersed in the hardened resin; The fibrous member is dispersed in a hardening resin, and the hardening resin is made of a hardened resin formed by hardening the resin material in a state where the abrasive particles and the fibrous member are dispersed in the resin material.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,包含在圓板狀旋轉刃中的纖維狀部件的比率為0.5體積%以上且30體積%以下。 According to the disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, a ratio of the fibrous member included in the disc-shaped rotary blade is 0.5% by volume or more and 30% by volume or less.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,包含在圓板狀旋轉刃中的纖維狀部件的比率大於30體積%且為80體積%以下。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, a ratio of the fibrous member included in the disc-shaped rotary blade is greater than 30% by volume and 80% by volume or less.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,纖維狀部件來源於植物。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, the fibrous member is derived from a plant.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,纖維狀部件包含纖維素。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, the fibrous member includes cellulose.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,纖維狀部件來源於動物。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, the fibrous member is derived from an animal.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,纖維狀部件包含甲殼素或殼聚糖。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, the fibrous member includes chitin or chitosan.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,切削對象為形成有分別具有功能的多個區域的板狀部件。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, a cutting object is a plate-shaped member formed with a plurality of regions each having a function.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,切削對象為形成有分別內含電路的多個區域的電路板。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, a cutting object is a circuit board formed with a plurality of regions each containing a circuit.
根據本發明一實施例的圓板狀旋轉刃,在上述圓板狀旋轉刃中,切削對象為形成有分別內含電路的多個區域且利用封裝樹脂來進行樹脂封裝的電路板。 According to a disc-shaped rotary blade according to an embodiment of the present invention, in the disc-shaped rotary blade, a cutting object is a circuit board in which a plurality of regions each containing a circuit are formed and resin-encapsulated by using a sealing resin.
本發明一實施例的切削裝置包括:旋轉軸,用於固定圓板狀旋轉刃;旋轉機構,用於使旋轉軸旋轉;固定機構,用於固定切削對象;和移動機構,用於使旋轉機構和固定機構相對移動。 A cutting device according to an embodiment of the present invention includes: a rotating shaft for fixing a disc-shaped rotating blade; a rotating mechanism for rotating the rotating shaft; a fixing mechanism for fixing a cutting object; and a moving mechanism for rotating the mechanism Relative to the fixed mechanism.
在該切削裝置中,圓板狀旋轉刃為上述圓板狀旋轉刃中的任一旋轉刃。 In this cutting device, the disc-shaped rotary blade is any of the disc-shaped rotary blades.
根據本發明一實施例的切削裝置,具有兩個旋轉機構,並且具有多個移動機構。 A cutting device according to an embodiment of the present invention has two rotating mechanisms and multiple moving mechanisms.
根據本發明一實施例的切削裝置,具有兩個固定機構,並且具有多個移動機構。 A cutting device according to an embodiment of the present invention has two fixing mechanisms and a plurality of moving mechanisms.
根據本發明一實施例的切削裝置,包括:切削模組,至少具有旋轉軸、旋轉機構、固定機構和移動機構;和控制部,至少控制切削模組的操作,切削模組相對於具有特定功能的其他功能模組能夠裝卸,特定功能包含切削、清洗、乾燥、測量、檢查和研磨中的至少一個功能。 A cutting device according to an embodiment of the present invention includes: a cutting module having at least a rotating shaft, a rotating mechanism, a fixed mechanism, and a moving mechanism; and a control unit that controls at least the operation of the cutting module. The cutting module has a specific function. Other function modules can be attached and detached, and the specific functions include at least one of cutting, cleaning, drying, measuring, checking and grinding.
本發明一實施例的圓板狀旋轉刃的製造方法是用於製造用於對切削對象進行切削的圓板狀旋轉刃的方法,該製造方法包括以下工序:準備磨粒;準備來源於生物的纖維狀部件;準備樹脂材料;通過至少將磨粒和纖維狀部件分散到樹脂材料中而製作混合材料;在磨粒和纖維狀部件分散到樹脂材料中的狀態下,通過軋製混合材料而製作板狀混合材料;通過衝壓板狀混合材料而製作圓板狀混合材料;將圓板狀混合材料裝入成型模中;通過對裝入成型模中的圓板狀混合材料進行加壓的同時加熱,以使樹脂材料硬化而成型硬化樹脂,由此成型圓板狀成型品;對圓板狀成型品進行冷卻;和從成型模中取出由圓板狀成型品構成的圓板狀旋轉刃。 A method for manufacturing a disc-shaped rotary blade according to an embodiment of the present invention is a method for manufacturing a disc-shaped rotary blade for cutting a cutting object. The manufacturing method includes the following steps: preparing abrasive particles; preparing biologically-derived Fibrous parts; preparation of resin materials; production of mixed materials by dispersing at least abrasive grains and fibrous parts in the resin material; production of rolled mixed materials with the abrasive grains and fibrous parts dispersed in the resin material Plate-shaped mixed material; plate-shaped mixed material is produced by punching plate-shaped mixed material; disk-shaped mixed material is charged into a molding die; disk-shaped mixed material loaded into the molding die is heated while being pressed To harden the resin material to form a hardened resin, thereby forming a disk-shaped molded product; cooling the disk-shaped molded product; and taking out a disk-shaped rotating blade composed of the disk-shaped molded product from the molding die.
根據本發明一實施例的圓板狀旋轉刃的製造方法,在上述製造方法中的製作混合材料的工序中,將包含在混合材料中的纖維狀部件的比率設為0.5體積%以上且30體積%以下。 According to the method for manufacturing a disc-shaped rotating blade according to an embodiment of the present invention, in the step of manufacturing the mixed material in the manufacturing method, a ratio of the fibrous member included in the mixed material is 0.5% by volume or more and 30% by volume. %the following.
本發明一實施例的圓板狀旋轉刃的製造方法是用於製造用於對切削對象進行切削的圓板狀旋轉刃的方法,該製造方法包括以下工序:準備磨粒;準備來源於生物的纖維狀部件;準備具有流動性的樹脂材料;通過至少將磨粒和纖維狀部件分散到溶劑中而製作分散材料;在磨粒和纖維狀部件分散到溶劑中的狀態下,抄出分散材料而製作圓板狀分散材料;使圓板狀分散材料乾燥;通過使樹脂材料浸漬到乾燥後的圓板狀分散材料中而製作圓板狀混合材料;將圓板狀混合材料裝入成型模中;通過對裝入成型模中的圓板狀混合材料進行加壓的同時加熱,以使樹脂材料硬化而成型硬化樹脂,由此成型圓板狀成型品;對圓板狀成型品進行冷卻;和從成型模中取出由圓板狀成型品構成的圓板狀旋轉刃。 A method for manufacturing a disc-shaped rotary blade according to an embodiment of the present invention is a method for manufacturing a disc-shaped rotary blade for cutting a cutting object. The manufacturing method includes the following steps: preparing abrasive particles; preparing biologically-derived Fibrous parts; preparing resin materials with fluidity; preparing dispersion materials by dispersing at least abrasive grains and fibrous parts in a solvent; and preparing the dispersion materials with the abrasive grains and fibrous parts dispersed in a solvent Disc-shaped dispersing material; drying disc-shaped dispersing material; making a disc-shaped mixed material by immersing a resin material in the disc-shaped dispersing material after drying; loading the disc-shaped mixed material into a molding die; The disc-shaped mixed material loaded in the molding die is heated while being pressurized to harden the resin material to form a hardened resin, thereby molding the disc-shaped molded product; cooling the disc-shaped molded product; and A disc-shaped rotating blade made of a disc-shaped molded product was taken out of the mold.
根據本發明一實施例的圓板狀旋轉刃的製造方法,在上述製造方法中的製作圓板狀混合材料的工序中,將包含在圓板狀混合材料中的纖維狀部件的比率設為大於30體積%且為80體積%以下。 According to the method for manufacturing a disc-shaped rotating blade according to an embodiment of the present invention, in the step of manufacturing the disc-shaped mixed material in the manufacturing method, a ratio of the fibrous member included in the disc-shaped mixed material is greater than 30% by volume to 80% by volume.
根據本發明一實施例的圓板狀旋轉刃的製造方法,上述製造方法進一步包括以下工序:將從成型模中取出的圓板狀旋轉刃置於規定溫度氣氛中,以對圓板狀旋轉刃進行熱處理。 According to a method for manufacturing a disc-shaped rotary blade according to an embodiment of the present invention, the manufacturing method further includes the following steps: placing the disc-shaped rotary blade taken out from the molding die in a predetermined temperature atmosphere to Perform heat treatment.
根據本發明一實施例的圓板狀旋轉刃的製造方法,在上述製造方法中,規定溫度氣氛為大氣氣氛、惰性氣氛和低氧氣氛中的任一種氣氛。 According to the method for manufacturing a disc-shaped rotating blade according to an embodiment of the present invention, in the above-mentioned manufacturing method, the predetermined temperature atmosphere is any one of an atmospheric atmosphere, an inert atmosphere, and a low-oxygen atmosphere.
根據本發明,磨粒和來源於生物的纖維狀部件被分散到硬化樹脂中。由於來源於生物的纖維狀部件對水具有高親和性,因此易於吸收水分。由此,降低圓板狀旋轉刃的表面與切削對象表面之間的摩擦。因此,能夠降低使用旋轉刃對切削對象進行切削時產生的摩擦熱,故能延長旋轉刃的壽命。 According to the present invention, abrasive particles and bio-derived fibrous parts are dispersed in a hardened resin. Since the fibrous member derived from a living body has a high affinity for water, it easily absorbs water. This reduces friction between the surface of the disc-shaped rotary blade and the surface of the cutting target. Therefore, it is possible to reduce the frictional heat generated when cutting the cutting object using the rotary blade, and thus to extend the life of the rotary blade.
10‧‧‧成型模 10‧‧‧Forming Mould
11‧‧‧下模 11‧‧‧ lower mold
12‧‧‧上模 12‧‧‧ Upper mold
13‧‧‧凹部 13‧‧‧ recess
14‧‧‧朝上的凸部 14‧‧‧ upward convex
15‧‧‧朝下的凸部 15‧‧‧ downward convex
16‧‧‧加熱爐 16‧‧‧Heating furnace
17‧‧‧週邊部 17‧‧‧ Peripheral
18‧‧‧加熱部 18‧‧‧ heating section
19‧‧‧台 19‧‧‧ units
1A、1B‧‧‧圓板狀旋轉刃 1A, 1B‧‧‧‧Rotary blade
2‧‧‧圓孔 2‧‧‧ round hole
20‧‧‧支撐部 20‧‧‧ support
21‧‧‧升降部 21‧‧‧ Lifting Department
22‧‧‧加熱器 22‧‧‧heater
23‧‧‧開口 23‧‧‧ opening
24‧‧‧上部部件 24‧‧‧ Upper Parts
25‧‧‧切削裝置 25‧‧‧Cutting device
26‧‧‧接收模組 26‧‧‧Receiving module
27‧‧‧切削模組 27‧‧‧Cutting Module
28‧‧‧送出模組 28‧‧‧ Submit Module
29‧‧‧切削對象 29‧‧‧ cutting object
3‧‧‧側面部 3‧‧‧ side
30‧‧‧產品組 30‧‧‧ Product Group
31‧‧‧托盤 31‧‧‧tray
32‧‧‧照相機 32‧‧‧ Camera
33‧‧‧心軸 33‧‧‧ mandrel
34‧‧‧旋轉軸 34‧‧‧rotation axis
35、39‧‧‧伺服電動機 35, 39‧‧‧Servo motor
36‧‧‧工作臺 36‧‧‧Workbench
37‧‧‧旋轉部 37‧‧‧Rotating part
38‧‧‧移動機構 38‧‧‧ Mobile agency
4‧‧‧外周部 4‧‧‧ Peripheral
40‧‧‧滾珠絲杠 40‧‧‧ball screw
41、45‧‧‧功能模組 41, 45‧‧‧ Function Module
42‧‧‧清洗乾燥機構 42‧‧‧Cleaning and drying mechanism
43‧‧‧清洗部 43‧‧‧Cleaning Department
44‧‧‧乾燥部 44‧‧‧ Drying section
46‧‧‧磨削機構 46‧‧‧Grinding mechanism
47‧‧‧磨削砂輪 47‧‧‧Grinding wheel
48‧‧‧厚度測量機構 48‧‧‧thickness measuring mechanism
49‧‧‧變位感測器 49‧‧‧ displacement sensor
5‧‧‧樹脂部 5‧‧‧Resin Department
6‧‧‧磨粒 6‧‧‧ abrasive grain
7‧‧‧纖維狀部件 7‧‧‧ Fibrous parts
8‧‧‧骨料 8‧‧‧ aggregate
9A、9B‧‧‧圓板狀混合材料 9A, 9B ‧‧‧ Disc-shaped hybrid material
C‧‧‧中心 C‧‧‧ Center
CTL‧‧‧控制部 CTL‧‧‧Control Department
P‧‧‧產品 P‧‧‧ Products
第1圖的(a)是本發明所涉及的圓板狀旋轉刃的主視圖及側視圖,(b)及(c)分別是有關其他實施例的、(a)所示的A部分的放大示意圖。 (A) of FIG. 1 is a front view and a side view of a disc-shaped rotary blade according to the present invention, and (b) and (c) are enlarged views of part A shown in (a) in other embodiments, respectively. schematic diagram.
第2圖是按工序順序表示本發明所涉及的圓板狀旋轉刃的製造方法的示意圖。 Fig. 2 is a schematic diagram showing a method for manufacturing a disc-shaped rotary blade according to the present invention in the order of steps.
第3圖的(a)是表示本發明所涉及的切削裝置的示意性俯視圖,(b)及(c)是表示切削模組以外的功能模組的例的示意性俯視圖。 (A) of FIG. 3 is a schematic plan view showing a cutting device according to the present invention, and (b) and (c) are schematic plan views showing examples of functional modules other than the cutting module.
(實施例1) (Example 1)
參照第1圖,對本發明的實施例1所涉及的圓板狀旋轉刃1A(以下,適宜稱作“旋轉刃”)所具有的總體結構進行說明。第1圖的(a)是本發明所涉及的 圓板狀旋轉刃的主視圖及側視圖。圓板狀旋轉刃1B為本發明的其他實施例(後述)所涉及的旋轉刃,具有與旋轉刃1A不同的成分。 The overall structure of a disc-shaped rotary blade 1A (hereinafter, referred to as a “rotary blade”) according to Embodiment 1 of the present invention will be described with reference to FIG. 1. (A) of FIG. 1 relates to the present invention. Front and side views of a disc-shaped rotating blade. The disc-shaped rotary blade 1B is a rotary blade according to another embodiment (described later) of the present invention, and has a composition different from that of the rotary blade 1A.
本發明文書中的所有圖式以易於理解為目的,進行適當省略或誇張以示意性地繪製。對相同的結構要素使用相同的圖式標記,並適當省略說明。 All the drawings in the present document are for ease of understanding, and are appropriately omitted or exaggerated for schematic drawing. The same structural elements are marked with the same symbols, and descriptions thereof are appropriately omitted.
如第1圖的(a)所示,圓板狀旋轉刃1A在旋轉刃1A的中心部具有供切削裝置的旋轉軸(未圖示)嵌入的圓孔2。如第1圖的(a)的左側所示,旋轉刃1A具有圓形外形和與該圓形為同心圓狀的圓孔2。旋轉刃1A具有兩側的側面部3和外周部4。旋轉刃1A在旋轉軸嵌入圓孔2中的狀態下,通過兩個相對的夾具來夾住兩側的側面部3中的圓孔2的外側部分。通過螺絲固定兩個相對的夾具,旋轉刃1A被固定在切削裝置的旋轉軸上。 As shown in (a) of FIG. 1, the disc-shaped rotary blade 1A has a circular hole 2 at the center of the rotary blade 1A, in which a rotary shaft (not shown) of a cutting device is fitted. As shown on the left side of (a) of FIG. 1, the rotary blade 1A has a circular outer shape and a circular hole 2 that is concentric with the circular shape. The rotary blade 1A includes a side surface portion 3 and an outer peripheral portion 4 on both sides. In a state where the rotary blade 1A is embedded in the circular hole 2, the outer edge of the circular hole 2 in the side surface portions 3 on both sides is clamped by two opposing clamps. The two opposing clamps are fixed by screws, and the rotary blade 1A is fixed on the rotary shaft of the cutting device.
旋轉刃1A的假想中心C與切削裝置的旋轉軸的中心線一致。切削裝置的旋轉軸與例如伺服電動機等電動機(未圖示)的旋轉軸聯結。通過電動機的旋轉軸旋轉,切削裝置的旋轉軸旋轉。由此,固定在切削裝置的旋轉軸上的旋轉刃1A以規定的轉數(例如,15000~30000rpm)旋轉。通過旋轉的旋轉刃1A的外周部4切入切削對象,從而對切削對象進行切削。在本發明文書中,“對切削對象進行切削”這一用語是指“對切削對象中的厚度方向的一部分進行切削”(半切)以及“對切削對象中的厚度方向的所有部分進行切削(完全切割切削對象)”(全切)這兩個含義。 The imaginary center C of the rotary blade 1A coincides with the center line of the rotary shaft of the cutting device. The rotating shaft of the cutting device is coupled to a rotating shaft of a motor (not shown) such as a servo motor. The rotation axis of the motor rotates the rotation axis of the cutting device. As a result, the rotary blade 1A fixed to the rotary shaft of the cutting device is rotated at a predetermined number of revolutions (for example, 15,000 to 30,000 rpm). The cutting target is cut by cutting the outer peripheral portion 4 of the rotating rotary blade 1A. In the present invention, the term "cutting the cutting object" means "cutting a part of the thickness direction in the cutting object" (half cutting) and "cutting all of the thickness direction in the cutting object (completely Cutting the cutting object) "(full cut).
參照第1圖的(b),對本發明的實施例1所涉及的圓板狀旋轉刃1A所具有的微細結構進行說明。如第1圖的(b)所示,圓板狀旋轉刃1A包括由硬化樹脂形成的樹脂部5、磨粒6和來源於生物的纖維狀部件7。換言之,磨粒6和來源於生物的纖維狀部件7被分散而包含在由硬化樹脂形成的樹脂部5中。 The fine structure of the disc-shaped rotary blade 1A according to the first embodiment of the present invention will be described with reference to FIG. 1 (b). As shown in FIG. 1 (b), the disc-shaped rotary blade 1A includes a resin portion 5 made of a hardened resin, abrasive particles 6, and a fibrous member 7 derived from a living body. In other words, the abrasive particles 6 and the bio-derived fibrous member 7 are dispersed and contained in the resin portion 5 formed of a hardened resin.
樹脂部5為合成樹脂,例如通過由苯酚樹脂、環氧樹脂或聚醯亞胺樹脂等構成的熱硬化性樹脂來構造。磨粒6例如由金剛石或cBN(立方氮化硼)等構造。 The resin portion 5 is a synthetic resin, and is configured by a thermosetting resin made of, for example, a phenol resin, an epoxy resin, or a polyimide resin. The abrasive grains 6 are made of, for example, diamond or cBN (cubic boron nitride).
圓板狀旋轉刃1A可包含骨料8。作為骨料8,可使用碳化鎢(WC)、氧化鋁(Al2O3)或碳化矽(SiC)等材料。圓板狀旋轉刃1A也可以包含其他添加劑。作為其他添加劑,可使用碳黑或矽烷偶聯劑材等的材料。 The disc-shaped rotating blade 1A may include aggregate 8. As the aggregate 8, materials such as tungsten carbide (WC), alumina (Al2O3), or silicon carbide (SiC) can be used. The disc-shaped rotary blade 1A may contain other additives. As other additives, materials such as carbon black or a silane coupling agent can be used.
來源於生物的纖維狀部件7例如為具有親水性的植物性纖維狀部件。植物性纖維狀部件7較佳包含纖維素。纖維狀部件7更較佳為具有高親水性的纖維素納米纖維(Cellulose nanofiber:CNF)。纖維素納米纖維是指“以包含在植物纖維中的纖維素為原料,通過機械裂解製備的納米纖維”(“日本首次大量生產及銷售生物質納米纖維!”、[線上(online)]、杉野機械有限公司(株式會社 )、[2016年9月16日檢索]、互聯網<URL:http://www.sugino.com/site/biomass-nanofiber/guidance.html>)。 The bio-derived fibrous member 7 is, for example, a plant-based fibrous member having hydrophilic properties. The plant-based fibrous member 7 preferably contains cellulose. The fibrous member 7 is more preferably a cellulose nanofiber (CNF) having high hydrophilicity. Cellulose nanofibers are "nanofibers prepared by mechanical cracking using cellulose contained in plant fibers as a raw material"("Japan's first mass production and sale of biomass nanofibers!", [Online], Sugino Machinery Co., Ltd. ), [Retrieved on September 16, 2016], Internet <URL: http://www.sugino.com/site/biomass-nanofiber/guidance.html>).
實施例1中使用的纖維素納米纖維例如具有以下直徑(與長度方向垂直的剖面的直徑)值和長度值。纖維素納米纖維的直徑值φ為數10(數十)~200nm左右,長度值為1~10μm左右或其以上。因此,所使用的纖維素納米纖維的縱橫比(長度值/直徑值)為數10(數十)~數100(數百)或數10~數100以上。 The cellulose nanofibers used in Example 1 have, for example, the following diameter (diameter of a cross section perpendicular to the longitudinal direction) value and length value. The diameter value φ of the cellulose nanofibers is about several tens (tens) to 200 nm, and the length value is about 1 to 10 μm or more. Therefore, the aspect ratio (length value / diameter value) of the cellulose nanofibers used is several tens (tens) to several hundreds (hundreds) or several tens to several hundreds.
第1圖的(b)、(c)表示在使用前進行修整(dressing,目直)後的旋轉刃1A、1B中,纖維狀部件7的前端的一部分從樹脂部5的表面突出的狀態。在樹脂部5的內部,彼此纏繞存在從由樹脂部5的表面突出的各個纖維狀部件7伸長的部分。在樹脂部5的內部,在彼此纏繞存在的多個纖維狀部件7之間存在磨粒6和 骨料8。通過這些結構,增加旋轉刃1的機械強度例如彈性模量、彎曲強度和拉伸強度等。 (B) and (c) of Fig. 1 indicate that dressing is performed before use. In the following rotary blades 1A and 1B, a part of the tip of the fibrous member 7 protrudes from the surface of the resin portion 5. Inside the resin portion 5, portions extending from the respective fibrous members 7 protruding from the surface of the resin portion 5 are wound around each other. Inside the resin portion 5, there are abrasive grains 6 and aggregates 8 between a plurality of fibrous members 7 that are entangled with each other. With these structures, mechanical strength such as elastic modulus, bending strength, tensile strength, and the like of the rotary blade 1 are increased.
在實施例1所涉及的圓板狀旋轉刃1A中,磨粒6和來源於生物的纖維狀部件7(例如,纖維素納米纖維)被分散到由硬化樹脂構成的樹脂部5中。與磨粒6一同分散到樹脂部5中的來源於生物的纖維狀部件7降低旋轉刃1A的外周部4及側面部3與切削對象之間的摩擦。由此,能夠降低使用旋轉刃對切削對象進行切削時產生的摩擦熱。因此,能夠延長旋轉刃的壽命。 In the disc-shaped rotary blade 1A according to Example 1, the abrasive particles 6 and the bio-derived fibrous member 7 (for example, cellulose nanofibers) are dispersed in a resin portion 5 made of a hardened resin. The bio-derived fibrous member 7 dispersed in the resin portion 5 together with the abrasive particles 6 reduces friction between the outer peripheral portion 4 and the side surface portion 3 of the rotary blade 1A and the cutting object. This makes it possible to reduce frictional heat generated when a cutting object is cut using a rotary blade. Therefore, the life of the rotary blade can be extended.
在實施例1所涉及的圓板狀旋轉刃1A中,纖維狀部件7的比率(配合率)較佳為0.5體積%以上。這是因為,通過以0.5體積%左右的配合率包含纖維狀部件7,從而開始產生降低圓板狀旋轉刃1A的外周部4及側面部3與切削對象之間的摩擦的效果。推斷該效果起因於旋轉刃1A中包含具有親水性的纖維狀部件。在本發明文書中推斷的內容不會對申請專利範圍的解釋帶來影響。 In the disc-shaped rotary blade 1A according to Example 1, the ratio (blending ratio) of the fibrous member 7 is preferably 0.5% by volume or more. This is because, by including the fibrous member 7 at a compounding ratio of about 0.5% by volume, the effect of reducing the friction between the outer peripheral portion 4 and the side surface portion 3 of the disc-shaped rotary blade 1A and the cutting object is started. It is presumed that this effect is caused by the inclusion of a fibrous member having hydrophilic properties in the rotary blade 1A. The content inferred in the present invention will not affect the interpretation of the scope of patent application.
在實施例1所涉及的圓板狀旋轉刃1A中,纖維狀部件7的配合率更較佳為3體積%以上。這是因為,通過以3體積%左右的配合率包含纖維狀部件7,從而開始顯著地產生增加圓板狀旋轉刃1A的機械強度這一效果。通過構成包含纖維素納米纖維的複合材料,從而提高機械強度。 In the disc-shaped rotary blade 1A according to Example 1, the blending ratio of the fibrous member 7 is more preferably 3% by volume or more. This is because, by including the fibrous member 7 at a mixing ratio of about 3% by volume, the effect of increasing the mechanical strength of the disc-shaped rotary blade 1A begins to occur significantly. By forming a composite material containing cellulose nanofibers, mechanical strength is improved.
在實施例1所涉及的圓板狀旋轉刃1A中,纖維狀部件7的配合率較佳為30體積%以下。這是因為,根據圓板狀旋轉刃1A的製造方法(後述),在纖維狀部件7的配合率大於30體積%的情況下,難以攪拌混煉磨粒6、來源於生物的纖維狀部件7和樹脂材料。上述樹脂材料為構造樹脂部5的硬化樹脂的原材料。該樹脂材料在常溫下呈粉狀、粒狀或液狀。“在常溫下呈液狀”這一用語是指在常溫下具有流動性,與粘度的高低無關。 In the disc-shaped rotary blade 1A according to Example 1, the blending ratio of the fibrous member 7 is preferably 30% by volume or less. This is because, according to the manufacturing method (described later) of the disc-shaped rotary blade 1A, when the blending ratio of the fibrous member 7 is more than 30% by volume, it is difficult to stir and knead the abrasive particles 6 and the fibrous member 7 derived from the living body And resin materials. The resin material is a raw material of a hardened resin constituting the resin portion 5. The resin material is powdery, granular, or liquid at normal temperature. The term "liquid at normal temperature" means fluidity at normal temperature, regardless of the viscosity.
根據實施例1所涉及的圓板狀旋轉刃1A,能得到以下效果。第一,與磨粒6一同分散到樹脂部5中的、來源於生物且具有親水性的纖維狀部件7在旋轉刃1A的外周部4的表面附近以及側面部3的表面附近易於保持水分。在這些表面附近保持的水分降低旋轉刃1A的外周部4的表面及側面部3的表面與切削對象之間的摩擦。由此,能夠延長旋轉刃1A的壽命。此外,由於能增加旋轉刃1A的轉數,因此提高對切削對象進行切削的效率。此外,在使用旋轉刃1A對切削對象進行切削的情況下,能保持良好的切削品位。通過使用具有高親水性的植物性纖維狀部件7(例如,纖維素納米纖維),這些效果更顯著。 According to the disc-shaped rotary blade 1A according to Example 1, the following effects can be obtained. First, the bio-derived and hydrophilic fibrous member 7 dispersed in the resin portion 5 together with the abrasive grains 6 tends to retain moisture near the surface of the outer peripheral portion 4 of the rotary blade 1A and the surface of the side portion 3. The moisture retained near these surfaces reduces the friction between the surface of the outer peripheral portion 4 and the side surface portion 3 of the rotary blade 1A and the cutting target. This can extend the life of the rotary blade 1A. In addition, since the number of revolutions of the rotary blade 1A can be increased, the efficiency of cutting the cutting object is improved. In addition, when the cutting target is cut using the rotary blade 1A, a good cutting quality can be maintained. By using a plant-like fibrous member 7 having high hydrophilicity (for example, cellulose nanofibers), these effects are more remarkable.
第二,通過在圓板狀旋轉刃1A中包含來源於生物的纖維狀部件7,增加旋轉刃1A的機械強度例如彈性模量、彎曲強度和拉伸強度等。由此,在使用旋轉刃1A對板狀部件進行切削的情況下,能降低旋轉刃1A的振動、曲折(蛇行)和變形等,因此能延長旋轉刃1A的壽命。此外,由於能抑制旋轉刃1A的振動、曲折和變形等,因此能保持良好的切削品位。 Second, by including the bio-derived fibrous member 7 in the disc-shaped rotary blade 1A, mechanical strength such as elastic modulus, flexural strength, and tensile strength of the rotary blade 1A is increased. Accordingly, when the plate-shaped member is cut using the rotary blade 1A, vibration, tortuosity, and deformation of the rotary blade 1A can be reduced, so that the life of the rotary blade 1A can be extended. In addition, since it is possible to suppress vibration, tortuosity, and deformation of the rotary blade 1A, it is possible to maintain a good cutting quality.
起因於旋轉刃1A的機械強度增加,能降低旋轉刃1A的厚度。由此能縮減作為切削對象的切口的切縫(kerf)的寬度。因此能增加從一個切削對象生產出的產品數量(獲取數)。 The increase in mechanical strength of the rotary blade 1A can reduce the thickness of the rotary blade 1A. This makes it possible to reduce the width of a kerf which is a notch to be cut. Therefore, the number of products (acquisition number) produced from one cutting object can be increased.
起因於旋轉刃1A的機械強度增加,加大旋轉刃1A的外徑,從而能得到以下效果。首先,能延長旋轉刃1A的壽命。接著,由於旋轉刃1A的圓周速度增加,因此能提高旋轉刃1A對切削對象進行切削的效率。接著,能夠沿厚度方向完全切削(切割)具有較大的厚度的切削對象。作為具有較大的厚度的切削對象,可列舉樹脂封裝有電力控制用半導體元件(IC、電晶體等)、以輸送設備為對象的內燃機控制用IC、電動機控制用IC或制動系統控制用IC等的封裝後基板。 Since the mechanical strength of the rotary blade 1A is increased and the outer diameter of the rotary blade 1A is increased, the following effects can be obtained. First, the life of the rotary blade 1A can be extended. Next, since the peripheral speed of the rotary blade 1A increases, the efficiency of the rotary blade 1A in cutting the cutting object can be improved. Then, a cutting object having a large thickness can be completely cut (cut) in the thickness direction. Examples of cutting objects having a large thickness include resin-encapsulated semiconductor elements for power control (ICs, transistors, etc.), ICs for internal combustion engine control, ICs for motor control, and ICs for brake system control, which are targeted at transportation equipment. Packaged substrate.
第三,通過在圓板狀旋轉刃1A中包含具有高親水性的來源於生物的纖維狀部件7,從而增加旋轉刃1A的外周部4及側面部3中所包含的水分。因此,能減少在旋轉刃1A的外周部4的表面及側面部3的表面與切削對象之間產生的摩擦熱。此外,由於通過該水分提高旋轉刃1A和切削對象的冷卻效果,因此能減少因加工導致的熱積存。起因於這些效果,在使用旋轉刃1A對板狀部件進行切削的情況下,能延長旋轉刃1A的壽命。此外,能保持良好的切削品位。 Third, the disk-shaped rotary blade 1A includes a bio-derived fibrous member 7 having high hydrophilicity, thereby increasing the moisture contained in the outer peripheral portion 4 and the side surface portion 3 of the rotary blade 1A. Therefore, the frictional heat generated between the surface of the outer peripheral portion 4 and the surface of the side surface portion 3 of the rotary blade 1A and the cutting object can be reduced. In addition, since the cooling effect of the rotary blade 1A and the cutting object is improved by this moisture, heat accumulation due to processing can be reduced. Due to these effects, when the plate-shaped member is cut using the rotary blade 1A, the life of the rotary blade 1A can be extended. In addition, good cutting quality can be maintained.
第四,通過在圓板狀旋轉刃1A中包含纖維狀部件7,從而伴隨旋轉刃1A對切削對象進行切削而從旋轉刃1A的外周部4的表面及側面部3的表面依次脫落多個纖維狀部件7(包含纖維狀部件7的一部分)。在使用具有高親水性的植物性纖維狀部件7的情況下,推斷還有可能存在包含彼此纏繞的多個纖維狀部件7和樹脂部5的塊狀部分脫落的情況。由此,在外周部4的表面及側面部3的表面上易於出現新的磨粒6。因此,由於新的磨粒6容易代替已磨損的磨粒6而對切削作出貢獻,因此提高對切削對象進行切削的效率。此外,在使用旋轉刃1A對板狀部件進行切削的情況下,能保持良好的切削品位。 Fourth, by including the fibrous member 7 in the disc-shaped rotary blade 1A, a plurality of fibers are sequentially detached from the surface of the outer peripheral portion 4 and the side surface 3 of the rotary blade 1A as the rotary blade 1A cuts a cutting object. Shaped member 7 (including a part of the fibrous member 7). When the plant-like fibrous member 7 having high hydrophilicity is used, it is presumed that the block-like portion including the plurality of fibrous members 7 and the resin portion 5 which are entangled with each other may fall off. As a result, new abrasive grains 6 tend to appear on the surface of the outer peripheral portion 4 and the surface of the side surface portion 3. Therefore, since the new abrasive grains 6 can easily replace the worn abrasive grains 6 and contribute to cutting, the efficiency of cutting the cutting object is improved. Moreover, when cutting a plate-shaped member using the rotary blade 1A, a favorable cutting grade can be maintained.
(實施例2) (Example 2)
參照第1圖的(b)及第2圖,對製造本發明的實施例1所涉及的圓板狀旋轉刃1A的、圓板狀旋轉刃的製造方法進行說明。本發明文書中記載的製造條件為一個示例。圓板狀旋轉刃的製造方法中的製造條件並不限定於本發明文書中記載的製造條件。 A manufacturing method of the disc-shaped rotary blade for manufacturing the disc-shaped rotary blade 1A according to the first embodiment of the present invention will be described with reference to FIGS. 1 (b) and 2. The manufacturing conditions described in the present document are examples. The manufacturing conditions in the manufacturing method of a disk-shaped rotary blade are not limited to the manufacturing conditions described in the document of this invention.
首先,準備第1圖的(b)所示的磨粒6、來源於生物的纖維狀部件(例如,纖維素納米纖維)7和樹脂材料。根據需要準備包含骨料8等的其他添加劑。 樹脂材料較佳在常溫下呈粉狀、粒狀或液狀。樹脂材料為合成樹脂,例如為將苯酚樹脂、環氧樹脂或聚醯亞胺樹脂等作為主材料包含的熱硬化性樹脂。 First, the abrasive grains 6, fibrous members (for example, cellulose nanofibers) 7 derived from a living body, and a resin material are prepared as shown in FIG. 1 (b). If necessary, other additives including aggregate 8 are prepared. The resin material is preferably powdery, granular, or liquid at normal temperature. The resin material is a synthetic resin, for example, a thermosetting resin containing a phenol resin, an epoxy resin, or a polyimide resin as a main material.
接著,分別計量磨粒6、纖維狀部件7、骨料8、其它添加劑和樹脂材料。使用擂潰機磨碎分別計量出的磨粒6、纖維狀部件7、骨料8、其它添加劑和樹脂材料的同時進行混合。之後,使用混煉機對磨粒6、纖維狀部件7、其它添加劑和樹脂材料施加剪切力的同時,混煉這些材料。由此,將磨粒6、纖維狀部件7和其它添加劑分散到樹脂材料中而製造混合材料。在常溫下使該混合材料乾燥。之後,通過軋製混合材料而製作板狀混合材料。為了進行適當的軋製,也可以在經混煉的材料(混煉物)中適當加入乙醇等溶劑,並且進一步混煉之後,通過進行適當乾燥而調整混煉物的硬度。 Next, the abrasive grains 6, the fibrous member 7, the aggregate 8, other additives, and the resin material were measured, respectively. The grit 6, the fibrous member 7, the aggregate 8, the other additives, and the resin material, which were measured separately, were pulverized with a mash crusher and mixed at the same time. Thereafter, these materials are kneaded while applying a shearing force to the abrasive grains 6, the fibrous member 7, other additives, and the resin material using a kneader. Thereby, the abrasive grains 6, the fibrous member 7, and other additives are dispersed in the resin material to produce a mixed material. This mixed material is dried at normal temperature. Thereafter, a plate-shaped mixed material is produced by rolling the mixed material. In order to perform appropriate rolling, a solvent such as ethanol may be appropriately added to the kneaded material (kneaded product), and after further kneading, the hardness of the kneaded product may be adjusted by appropriate drying.
接著,通過衝壓板狀混合材料,製作如第2圖的(a)、(b)所示的具有圓孔2的圓板狀混合材料9A。第2圖的(a)、(b)分別表示圓板狀混合材料9A的俯視圖及主視圖。圓板狀混合材料9A具有圓孔2、側面部3和外周部4。圓板狀混合材料9B為本發明的其他實施例(後述)所涉及的圓板狀旋轉刃1B的原材料,具有與混合材料9A不同的成分。 Next, a plate-shaped mixed material 9A having a circular hole 2 as shown in (a) and (b) of FIG. 2 is produced by punching the plate-shaped mixed material. (A) and (b) of FIG. 2 respectively show a top view and a front view of the disc-shaped mixed material 9A. The disc-shaped mixed material 9A includes a circular hole 2, a side surface portion 3, and an outer peripheral portion 4. The disc-shaped mixed material 9B is a raw material of the disc-shaped rotating blade 1B according to another embodiment (described later) of the present invention, and has a component different from that of the mixed material 9A.
接著,如第2圖的(c)所示,準備一組成型模10。成型模10具有下模11和上模12。構造成型模10的材料可以是由工具鋼等構成的金屬類材料,也可以是陶瓷類材料。可通過在由金屬類材料或陶瓷類材料構成的母材上塗覆包含氧化釔(Y2O3)的陶瓷類材料而構造成型模10。 Next, as shown in FIG. 2 (c), a set of molding dies 10 is prepared. The molding die 10 includes a lower die 11 and an upper die 12. The material for forming the mold 10 may be a metal material made of tool steel or the like, or may be a ceramic material. The molding die 10 may be constructed by coating a base material composed of a metal-based material or a ceramic-based material with a ceramic-based material containing yttrium oxide (Y2O3).
在下模11中設置有用於收容圓板狀混合材料9A的凹部13。在構造下模11的凹部13的底面的下模11的內底面上設置有與混合材料9A的圓孔2對應 的朝上的凸部14。在上模12的底面(下表面)上設置有與混合材料9A的平面形狀對應的朝下的凸部15。 The lower mold 11 is provided with a recessed portion 13 for accommodating a disc-shaped mixed material 9A. On the inner bottom surface of the lower mold 11 constituting the bottom surface of the recessed portion 13 of the lower mold 11, a circular hole 2 corresponding to the mixed material 9A is provided. Of upward convex portion 14. A lower surface (lower surface) of the upper mold 12 is provided with a downward-facing convex portion 15 corresponding to the planar shape of the mixed material 9A.
接著,如第2圖的(c)所示,將圓板狀混合材料9A收容在成型模10中。第2圖的(c)表示將兩個圓板狀混合材料9A收容在成型模10中的例。也可以沿圖面縱深方向收容有多個(例如,在沿圖面縱深方向的每一例上收容有三個)圓板狀混合材料9A。在該情況下,可通過使用一組成型模10且經由一次成型工序一併製造六(=2×3)個圓板狀旋轉刃1A。也可以將能夠經由一次成型工序一併製造的數量設定為更多。 Next, as shown in FIG. 2 (c), the disc-shaped mixed material 9A is accommodated in the molding die 10. (C) of FIG. 2 shows an example in which two disk-shaped mixed materials 9A are housed in a mold 10. A plurality of disc-shaped mixed materials 9A may be accommodated in the depth direction of the drawing (for example, three in each case in the depth direction of the drawing). In this case, six (= 2 × 3) disk-shaped rotary blades 1A can be manufactured together by using a set of molding dies 10 through a single molding process. The number which can be manufactured together through one molding step may be set to be larger.
接著,在第2圖的(c)所示的狀態下,對下模11和上模12進行合模。通過凹部13中的下模11的內底面和上模12的朝下的凸部15中的上模12的下表面來夾持圓板狀混合材料9A。 Next, in the state shown in FIG. 2 (c), the lower mold 11 and the upper mold 12 are clamped. The disc-shaped mixed material 9A is sandwiched by the inner bottom surface of the lower mold 11 in the recessed portion 13 and the lower surface of the upper mold 12 in the downwardly protruding portion 15 of the upper mold 12.
接著,準備第2圖的(d)所示的加熱爐16。以下,對加熱爐16的結構進行說明。 Next, the heating furnace 16 shown in FIG. 2 (d) is prepared. Hereinafter, the structure of the heating furnace 16 is demonstrated.
加熱爐16具有週邊部17和加熱部18。此外,加熱爐16具有:台19,用於放置成型模10;支撐部20,用於支撐台19;和升降部21,用於使支撐部20升降。台19較佳由具有高導熱性的材料(例如,金屬類材料)構造。支撐部20較佳由具有低導熱性的材料(例如,水泥類材料)構造。在加熱部18設置有多個加熱器22。在第2圖的(d)中,作為一例圖示有筒狀的多個加熱器22。作為加熱器22,可使用利用電磁感應加熱的加熱器。 The heating furnace 16 includes a peripheral portion 17 and a heating portion 18. In addition, the heating furnace 16 includes a table 19 for placing the molding die 10, a support section 20 for supporting the table 19, and a lifting section 21 for lifting and lowering the support section 20. The stage 19 is preferably constructed of a material having high thermal conductivity (for example, a metal-based material). The support portion 20 is preferably made of a material having low thermal conductivity (for example, a cement-based material). The heater 18 is provided with a plurality of heaters 22. In FIG. 2 (d), a plurality of tubular heaters 22 are shown as an example. As the heater 22, a heater heated by electromagnetic induction can be used.
加熱部18具有蓋狀形狀,該蓋狀形狀在下方具有開口23。較佳在加熱爐16中設置有用於開閉開口23的擋板(未圖示)。通過升降部21的升降,由支撐部20支撐的台19經由加熱部18的開口23相對於加熱部18的內部空間進退。 The heating portion 18 has a lid-like shape having an opening 23 at the lower side. A baffle (not shown) for opening and closing the opening 23 is preferably provided in the heating furnace 16. As the lifting portion 21 rises and lowers, the stage 19 supported by the support portion 20 advances and retreats with respect to the internal space of the heating portion 18 through the opening 23 of the heating portion 18.
接著,在第2圖的(d)所示的加熱爐16中,通過升降部21的下降,台19和支撐部20位於開口23的下方。通過向多個加熱器22供給電力,將加熱部18的內部空間加熱至規定的溫度(例如,150℃~160℃)。 Next, in the heating furnace 16 shown in FIG. 2 (d), the table 19 and the support portion 20 are positioned below the opening 23 by the lowering of the lifting portion 21. By supplying electric power to the plurality of heaters 22, the internal space of the heating section 18 is heated to a predetermined temperature (for example, 150 ° C. to 160 ° C.).
接著,如第2圖的(d)所示,將收容有兩個圓板狀混合材料9A的成型模10收容在加熱爐16中。具體而言,首先在由支撐部20支撐的台19上放置收容有兩個圓板狀混合材料9A的成型模10。 Next, as shown in FIG. 2 (d), the molding die 10 containing the two disk-shaped mixed materials 9A is stored in the heating furnace 16. Specifically, first, a molding die 10 containing two disc-shaped mixed materials 9A is placed on a table 19 supported by a support portion 20.
接著,如第2圖的(d)所示,使用升降部21使成型模10進入加熱部18的內部空間,進而將成型模10按壓到加熱部18的上部部件24。使用升降部21以恒定的壓力將成型模10按壓到加熱部18的上部部件24,並且保持該狀態。由加熱部18生成的熱經由成型模10傳遞到兩個圓板狀混合材料9A中。在該狀態下,利用規定的壓力(例如,800kgf/cm2)對兩個圓板狀混合材料9A進行加壓的同時,利用規定的溫度(例如,155℃)來加熱該兩個圓板狀混合材料9A。在一系列工序中,台19作為導熱部件來發揮功能,支撐部20作為絕熱部件來發揮功能。 Next, as shown in (d) of FIG. 2, the molding die 10 is caused to enter the internal space of the heating section 18 using the lifting section 21, and the molding die 10 is pressed against the upper member 24 of the heating section 18. The lifting die 21 is used to press the molding die 10 against the upper member 24 of the heating section 18 at a constant pressure, and this state is maintained. The heat generated by the heating portion 18 is transmitted to the two disc-shaped mixed materials 9A through the molding die 10. In this state, while pressing the two disc-shaped mixed materials 9A by a predetermined pressure (for example, 800 kgf / cm2), the two disc-shaped mixed materials are heated at a predetermined temperature (for example, 155 ° C). Material 9A. In a series of processes, the stage 19 functions as a heat-conductive member, and the support part 20 functions as a heat-insulating member.
接著,將第2圖的(d)所示的狀態在規定的溫度(例如,155℃)下保持規定的時間(例如,3~5分鐘)。由此,包含在兩個圓板狀混合材料9A中的樹脂材料硬化,成型由硬化樹脂構成的樹脂部5(參照第1圖的(b))。 Next, the state shown in (d) of FIG. 2 is maintained at a predetermined temperature (for example, 155 ° C.) for a predetermined time (for example, 3 to 5 minutes). Thereby, the resin material contained in the two disk-shaped mixed materials 9A is hardened, and a resin portion 5 made of a hardened resin is molded (see (b) of FIG. 1).
接著,在第2圖的(d)所示的狀態下,使用升降部21將成型模10從加熱部18的內部空間取出到加熱部18的下方。將取出後的成型模10轉移到處理室(未圖示)。處理室可以設置在加熱爐16的內部,也可以設置在加熱爐16的外部。 Next, in the state shown in (d) of FIG. 2, the molding die 10 is taken out from the inner space of the heating section 18 using the lifting section 21 and below the heating section 18. The removed mold 10 is transferred to a processing chamber (not shown). The processing chamber may be provided inside the heating furnace 16 or may be provided outside the heating furnace 16.
接著,將收容有兩個圓板狀混合材料9A的成型模10在200℃或200℃以下的適當的處理溫度且規定的氣氛下放置規定的時間。例如,將成型模10在180℃的溫度下放置兩小時之後,在200℃的溫度下放置一小時。通過如此進行 熱處理(後硬化),從而充分進行包含在圓板狀混合材料9A中的樹脂材料硬化的硬化反應。通過包含在圓板狀混合材料9A中的樹脂材料硬化以成型硬化樹脂,從而製作圓板狀旋轉刃1A(參照第2圖的(e))。 Next, the molding die 10 containing the two disk-shaped mixed materials 9A is left at a proper processing temperature of 200 ° C. or lower and a predetermined atmosphere for a predetermined time. For example, after the molding die 10 is left at a temperature of 180 ° C. for two hours, it is left at a temperature of 200 ° C. for one hour. By doing The heat treatment (post-hardening) sufficiently advances the hardening reaction of hardening the resin material contained in the disc-shaped mixed material 9A. The resin material contained in the disk-shaped mixed material 9A is hardened to form a hardened resin to produce a disk-shaped rotating blade 1A (see (e) in FIG. 2).
作為熱處理中的氣氛,可採用以下氣氛。在處理溫度包含在構造樹脂部5(硬化樹脂)(參照第1圖的(b))的樹脂材料變差的溫度範圍內的情況下,可採用惰性氣體(例如,氮氣)氣氛(惰性氣氛)。在該情況下,也可以採用低氧氣氛(減壓氣氛)。在處理溫度未包含在構造樹脂部5的樹脂材料變差的溫度範圍內的情況下,可採用大氣氣氛。 As the atmosphere during the heat treatment, the following atmospheres can be used. When the processing temperature is within a temperature range in which the resin material of the structural resin portion 5 (hardened resin) (see (b) in FIG. 1) deteriorates, an inert gas (for example, nitrogen) atmosphere (inert atmosphere) may be used . In this case, a low-oxygen atmosphere (a reduced-pressure atmosphere) may be used. When the processing temperature is not included in the temperature range in which the resin material of the structural resin portion 5 is deteriorated, an atmospheric atmosphere may be used.
接著,從處理室取出並放置收容有兩個圓板狀旋轉刃1A的成型模10。由此,自然冷卻成型模10和收容在成型模10的內部的兩個圓板狀旋轉刃1A。也可以在處理室的外部向成型模10噴射冷卻用低溫氣體。由此,能夠強製冷卻成型模10和收容在成型模10的內部的兩個圓板狀旋轉刃1A。因此,能夠縮短圓板狀旋轉刃1A的製造時間。 Next, the molding die 10 in which the two disk-shaped rotary blades 1A are housed is taken out and placed from the processing chamber. Thereby, the molding die 10 and the two disc-shaped rotary blades 1A accommodated inside the molding die 10 are naturally cooled. The low-temperature gas for cooling may be sprayed on the molding die 10 outside the processing chamber. This makes it possible to forcibly cool the molding die 10 and the two disk-shaped rotary blades 1A accommodated inside the molding die 10. Therefore, the manufacturing time of the disc-shaped rotary blade 1A can be shortened.
接著,如第2圖的(e)所示,對下模11和上模12進行開模。從設置於下模11的兩個凹部13中取出兩個圓板狀旋轉刃1A。也可以根據需要對各個圓板狀旋轉刃1A實施精加工(研磨或磨削等機械加工)。例如,使用車床或磨床等對第2圖的(e)所示的圓板狀旋轉刃1A的外周部4及內周部(圓孔2的外側部分)進行機械加工。通過目前為止的工序,最終完成兩個圓板狀旋轉刃1A。 Next, as shown in (e) of FIG. 2, the lower mold 11 and the upper mold 12 are opened. The two disk-shaped rotary blades 1A are taken out of the two recessed portions 13 provided in the lower die 11. Finishing (mechanical processing such as grinding or grinding) may be performed on each of the disc-shaped rotary blades 1A as necessary. For example, the outer peripheral portion 4 and the inner peripheral portion (outer portion of the circular hole 2) of the disc-shaped rotary blade 1A shown in FIG. 2 (e) are machined using a lathe or a grinder. Through the processes so far, the two disk-shaped rotary blades 1A are finally completed.
根據實施例2所涉及的圓板狀旋轉刃的製造方法,能製造實施例1所涉及的圓板狀旋轉刃1A。通過將成型模10設為多腔(多數個取)結構,能夠經由一次成型工序一併製造多個圓板狀旋轉刃1A。 According to the manufacturing method of the disc-shaped rotary blade according to the second embodiment, the disc-shaped rotary blade 1A according to the first embodiment can be manufactured. By setting the mold 10 as a multi-cavity ) Structure, a plurality of disc-shaped rotary blades 1A can be manufactured together through a single molding process.
此外,在加熱爐16中設置有升降部21,該升降部21經由加熱部18的開口23相對於加熱部18的內部空間進退。由此,能夠實現在製造圓板狀旋轉刃1A時的加壓的同時加熱的工序的自動化。關於這些效果。在與圓板狀旋轉刃的製造方法有關的其他實施例中也同樣。 In addition, the heating furnace 16 is provided with a lifting portion 21 that advances and retreats with respect to the internal space of the heating portion 18 through the opening 23 of the heating portion 18. This makes it possible to automate the process of heating while applying pressure when manufacturing the disc-shaped rotary blade 1A. About these effects. The same applies to other embodiments related to a method for manufacturing a disc-shaped rotary blade.
在實施例2所涉及的圓板狀旋轉刃的製造方法中,使用具有圓孔2的圓板狀混合材料。代替此,也可以使用不具有圓孔2的圓板狀混合材料。在該情況下,通過對經由加壓的同時加熱而硬化的圓板狀成型品進行機械加工,從而形成圓孔2。關於這一點,在其它實施例中也同樣。 In the method for manufacturing a disc-shaped rotary blade according to Example 2, a disc-shaped mixed material having a circular hole 2 was used. Instead of this, a disc-shaped hybrid material having no circular hole 2 may be used. In this case, the circular hole 2 is formed by machining a disk-shaped molded product that is hardened by heating while pressing. This point is the same in the other embodiments.
(實施例3) (Example 3)
本發明的實施例3所涉及的圓板狀旋轉刃1B所具有的總體結構與實施例1所涉及的圓板狀旋轉刃1A所具有的總體結構相同。因此,省略與圓板狀旋轉刃1B所具有的總體結構有關的說明。 The overall structure of the disc-shaped rotary blade 1B according to the third embodiment of the present invention is the same as that of the disc-shaped rotary blade 1A according to the first embodiment. Therefore, the description about the overall structure which the disk-shaped rotary blade 1B has is abbreviate | omitted.
參照第1圖的(c),對圓板狀旋轉刃1B所具有的微細結構進行說明。如第1圖的(c)所示,圓板狀旋轉刃1B包括由硬化樹脂構成的樹脂部5、磨粒6、來源於生物的纖維狀部件7(例如,纖維素納米纖維)和骨料8。關於構造圓板狀旋轉刃1B的材料種類這一點,圓板狀旋轉刃1B與圓板狀旋轉刃1A相同。 The fine structure of the disc-shaped rotary blade 1B will be described with reference to (c) of FIG. 1. As shown in FIG. 1 (c), the disc-shaped rotating blade 1B includes a resin portion 5 made of hardened resin, abrasive particles 6, a fibrous member 7 (for example, cellulose nanofiber) derived from a living body, and an aggregate. 8. Regarding the material type of the disc-shaped rotary blade 1B, the disc-shaped rotary blade 1B is the same as the disc-shaped rotary blade 1A.
在圓板狀旋轉刃1B中,較佳纖維狀部件7的比率(配合率)大於30體積%。這是因為,在使用纖維狀部件7的配合率為30體積%以下的混合材料的情況下,在圓板狀旋轉刃的製造方法(後述)中,難以通過抄出磨粒6和纖維狀部件7分散到溶劑中的分散材料而製作圓板狀分散材料。 In the disc-shaped rotary blade 1B, the ratio (combination ratio) of the fibrous member 7 is preferably greater than 30% by volume. This is because when a mixed material having a blending ratio of the fibrous member 7 of 30% by volume or less is used, it is difficult to cut out the abrasive grains 6 and the fibrous member 7 in the method for manufacturing a disc-shaped rotary blade (described later). A disc-shaped dispersion material was prepared by dispersing the dispersion material in a solvent.
在圓板狀旋轉刃1B中,較佳纖維狀部件7的配合率為80體積%以下。在使用纖維狀部件7的配合率大於80體積%的混合材料的情況下,包含在圓 板狀旋轉刃中的磨粒6的配合率降低。因此,旋轉刃1B對切削對象進行切削的效率降低,故非較佳。 In the disc-shaped rotary blade 1B, the blending ratio of the fibrous member 7 is preferably 80% by volume or less. In the case of using a mixed material in which the blending ratio of the fibrous member 7 is more than 80% by volume, The blending ratio of the abrasive particles 6 in the plate-shaped rotary blade is reduced. Therefore, the cutting efficiency of the cutting edge 1B with respect to the cutting target is reduced, which is not preferable.
根據實施例3所涉及的圓板狀旋轉刃1B,能得到與由圓板狀旋轉刃1A帶來的效果同樣的效果。此外,鑒於以下理由,由圓板狀旋轉刃1B得到的各種效果大於由圓板狀旋轉刃1A得到的各種效果。在圓板狀旋轉刃1B中,纖維狀部件7的配合率大於30體積%且為80體積%以下。在圓板狀旋轉刃1A中,纖維狀部件7的配合率為0.5體積%以上且30體積%以下。與旋轉刃1A相比較,旋轉刃1B具有較大的纖維狀部件7的配合率值。因此,由圓板狀旋轉刃1B得到的各種效果大於由圓板狀旋轉刃1A得到的各種效果。 According to the disc-shaped rotary blade 1B according to Example 3, the same effect as that obtained by the disc-shaped rotary blade 1A can be obtained. In addition, various effects obtained by the disk-shaped rotary blade 1B are larger than various effects obtained by the disk-shaped rotary blade 1A for the following reasons. In the disc-shaped rotary blade 1B, the blending ratio of the fibrous member 7 is more than 30% by volume and 80% by volume or less. In the disc-shaped rotary blade 1A, the blending ratio of the fibrous member 7 is 0.5% by volume or more and 30% by volume or less. Compared with the rotary blade 1A, the rotary blade 1B has a larger fitting ratio value of the fibrous member 7. Therefore, the various effects obtained by the disc-shaped rotary blade 1B are larger than the various effects obtained by the disc-shaped rotary blade 1A.
(實施例4) (Example 4)
參照第1圖的(c)及第2圖對製造本發明的實施例3所涉及的圓板狀旋轉刃1B的、圓板狀旋轉刃的製造方法進行說明。從準備磨粒6、來源於生物的纖維狀部件(例如,纖維素納米纖維)7、骨料8和樹脂材料的工序到計量這些材料的工序與實施例2的情況相同。 A manufacturing method of the disc-shaped rotary blade for manufacturing the disc-shaped rotary blade 1B according to the third embodiment of the present invention will be described with reference to FIGS. 1 (c) and 2. The steps from the preparation of abrasive grains 6, bio-derived fibrous components (for example, cellulose nanofibers) 7, aggregates 8 and resin materials to the measurement of these materials are the same as in the case of Example 2.
接著,通過將磨粒6、纖維狀部件7和骨料8溶解於溶劑中而製作分散材料。換言之,通過將樹脂材料以外的材料溶解於溶劑中而製作分散材料。作為溶劑,可使用水類溶劑、醇類溶劑等。作為溶解於溶劑中的材料,可以加入粘合劑和分散劑,也可以加入少量的粉末狀樹脂材料。在製作出的分散材料中,較佳纖維狀部件7的比率(配合率)大於30體積%且為80體積%以下。在製作出的分散材料中,纖維狀部件7所具有的纖維成為纏繞於磨粒6、骨料8和粘合劑等材料上的狀態。 Next, a dispersion material is prepared by dissolving the abrasive grains 6, the fibrous member 7, and the aggregate 8 in a solvent. In other words, a material other than the resin material is dissolved in a solvent to prepare a dispersion material. As the solvent, an aqueous solvent, an alcohol solvent, or the like can be used. As the material dissolved in the solvent, a binder and a dispersant may be added, and a small amount of a powdery resin material may be added. In the produced dispersion material, it is preferable that the ratio (blending ratio) of the fibrous member 7 is more than 30% by volume and 80% by volume or less. In the produced dispersion material, the fibers of the fibrous member 7 are in a state of being entangled with materials such as the abrasive grains 6, the aggregate 8, and the binder.
接著,抄出製作出的分散材料。在該工序中,使用具有與抄紙機相同的功能的機器。由此,將分散材料成型為圓形。通過使成型為圓形的分散材料乾燥,製作圓板狀分散材料。 Next, the produced dispersion material was copied. In this step, a machine having the same function as a papermaking machine is used. Thereby, the dispersion material is molded into a circular shape. A disc-shaped dispersion material is produced by drying the dispersion material molded into a circular shape.
接著,使用樹脂浸漬機使流動性樹脂(具有流動性的樹脂材料)浸漬到圓板狀分散材料中。在該工序中,較佳對圓板狀分散材料所包含的空間進行減壓。由此,通過使流動性樹脂浸漬到圓板狀分散材料中而製作圓板狀混合材料。 Next, a resin impregnating machine was used to impregnate a fluid resin (resin material having fluidity) into a disc-shaped dispersion material. In this step, the space contained in the disc-shaped dispersion material is preferably decompressed. Thus, a disc-shaped mixed material is produced by immersing a fluid resin in the disc-shaped dispersion material.
接著,如第2圖的(c)所示,將圓板狀混合材料9B收容在成型模10中。由於以下工序與實施例2中說明的工序相同,因此省略與這些工序有關的說明。 Next, as shown in FIG. 2 (c), the disc-shaped mixed material 9B is housed in the molding die 10. Since the following steps are the same as the steps described in Example 2, the description about these steps is omitted.
根據實施例4所涉及的圓板狀旋轉刃的製造方法,能夠製造實施例3所涉及的圓板狀旋轉刃1B。此外,能夠得到與由實施例2所涉及的圓板狀旋轉刃的製造方法帶來的效果同樣的效果。 According to the manufacturing method of the disc-shaped rotary blade according to the fourth embodiment, the disc-shaped rotary blade 1B according to the third embodiment can be manufactured. In addition, the same effects as those obtained by the method for manufacturing a disc-shaped rotary blade according to Example 2 can be obtained.
(實施例5) (Example 5)
參照第3圖,對本發明的實施例5所涉及的切削裝置進行說明。第3圖所示的切削裝置25至少具有接收模組26、切削模組27和送出模組28。接收模組26、切削模組27和送出模組28沿第3圖的(a)所示的X方向排列,並且彼此固定。 A cutting device according to a fifth embodiment of the present invention will be described with reference to FIG. 3. The cutting device 25 shown in FIG. 3 includes at least a receiving module 26, a cutting module 27, and a sending module 28. The receiving module 26, the cutting module 27, and the sending module 28 are arranged in the X direction shown in (a) of FIG. 3 and are fixed to each other.
接收模組26和切削模組27能夠裝卸。切削模組27和送出模組28能夠裝卸。其他切削模組相對於切削模組27能夠裝卸。因此,第一,在接收模組26與切削模組27之間能夠裝卸其他切削模組。第二,在切削模組27與送出模組28之間能夠裝卸其他切削模組。 The receiving module 26 and the cutting module 27 are attachable and detachable. The cutting module 27 and the sending-out module 28 are attachable and detachable. The other cutting modules can be attached to and detached from the cutting module 27. Therefore, first, other cutting modules can be attached and detached between the receiving module 26 and the cutting module 27. Second, other cutting modules can be attached and detached between the cutting module 27 and the sending module 28.
接收模組26從切削裝置25的外部接收切削對象29。切削模組27對由接收模組26接收到的切削對象29進行切削。切削模組27能夠執行沿厚度方向對切削對象29進行的局部切削(半切)和沿厚度方向對切削對象29進行的完全切削(全切)這兩個切削。 The receiving module 26 receives a cutting object 29 from the outside of the cutting device 25. The cutting module 27 cuts the cutting object 29 received by the receiving module 26. The cutting module 27 is capable of performing two cuttings: partial cutting (half cutting) of the cutting object 29 in the thickness direction and full cutting (full cutting) of the cutting object 29 in the thickness direction.
送出模組28從切削模組27接收產品組30,該產品組30為對切削對象29進行單片化而製作的產品P的集合體。產品組30被收納在托盤31中。收納有產品組30的托盤31被送出到切削裝置25的外部。也可以在送出模組28中設置用於對各產品P進行光學檢查的照相機32。 The delivery module 28 receives a product group 30 from the cutting module 27, and the product group 30 is an assembly of the product P produced by singulating the cutting object 29. The product group 30 is stored in a tray 31. The tray 31 containing the product group 30 is sent out to the outside of the cutting device 25. A camera 32 for optically inspecting each product P may be provided in the delivery module 28.
切削模組27具有心軸33(旋轉機構)。心軸33具有持有旋轉軸34的伺服電動機35。在旋轉軸34上安裝有圓板狀旋轉刃1A或圓板狀旋轉刃1B中的任一旋轉刃。旋轉刃1A、1B在包含圖中的Y方向和Z方向的面內旋轉。 The cutting module 27 includes a mandrel 33 (rotation mechanism). The mandrel 33 includes a servo motor 35 that holds a rotation shaft 34. The rotary shaft 34 is attached with either a disc-shaped rotary blade 1A or a disc-shaped rotary blade 1B. The rotating blades 1A and 1B rotate in a plane including the Y direction and the Z direction in the figure.
切削模組27具有作為固定切削對象29的台的工作臺36(固定機構)。作為暫時固定切削對象29的機構的一例,可採用粘貼在工作臺36的上表面上的粘合片。 The cutting module 27 includes a table 36 (fixing mechanism) as a table on which the cutting object 29 is fixed. As an example of a mechanism for temporarily fixing the cutting object 29, an adhesive sheet adhered to the upper surface of the table 36 can be used.
切削模組27具有用於使工作臺36和心軸33相對移動(旋轉)的旋轉部37。工作臺36被安裝在旋轉部37上。在旋轉部37的下方設置有例如由伺服電動機構成的電動機(未圖示)。旋轉部37被固定在伺服電動機的旋轉軸上。通過伺服電動機的旋轉,安裝在旋轉部37上的工作臺36沿θ方向旋轉。 The cutting module 27 includes a rotating portion 37 for relatively moving (rotating) the table 36 and the spindle 33. The table 36 is attached to the rotating portion 37. A motor (not shown) made of, for example, a servo motor is provided below the rotating portion 37. The rotating portion 37 is fixed to a rotating shaft of a servo motor. The rotation of the servo motor rotates the table 36 mounted on the rotating portion 37 in the θ direction.
切削模組27具有用於使工作臺36和心軸33相對移動的移動機構38。切削模組27例如具有伺服電動機39、被連接到伺服電動機的旋轉軸上的滾珠絲杠40和嚙合於滾珠絲杠40的滾珠螺母(未圖示)。移動機構38被安裝在滾珠螺母 上。通過驅動伺服電動機,工作臺36沿Y方向移動。通過設置與移動機構38同樣的移動機構(未圖示),能夠使工作臺36和心軸33沿X方向及Z方向相對移動。 The cutting module 27 includes a moving mechanism 38 for relatively moving the table 36 and the spindle 33. The cutting module 27 includes, for example, a servo motor 39, a ball screw 40 connected to a rotation shaft of the servo motor, and a ball nut (not shown) meshed with the ball screw 40. The moving mechanism 38 is mounted on the ball nut on. By driving the servo motor, the table 36 moves in the Y direction. By providing a movement mechanism (not shown) similar to the movement mechanism 38, the table 36 and the spindle 33 can be relatively moved in the X direction and the Z direction.
切削裝置25具有控制部CTL。控制部CTL設置在接收模組26中。也可以在其他模組中設置控制部CTL。控制部CTL至少控制圓板狀旋轉刃1A或圓板狀旋轉刃1B的旋轉方向和轉數、以及工作臺36與心軸33之間的相對移動和移動速度(移動時包含旋轉。以下相同)。 The cutting device 25 includes a control unit CTL. The control unit CTL is provided in the receiving module 26. The control section CTL may be provided in another module. The control unit CTL controls at least the rotation direction and number of rotations of the disc-shaped rotary blade 1A or the disc-shaped rotary blade 1B, and the relative movement and movement speed between the table 36 and the spindle 33 (including rotation during movement. The same applies below) .
在接收模組26與切削模組27之間或者在切削模組27與送出模組28之間能夠裝卸具有特定功能的功能模組。特定功能為除上述的切削之外的以產品組30為對象進行的清洗、乾燥、產品P的測量或檢查等。特定功能也可以是以切削前的切削對象29或切削後的切削對象(作為產品P的集合體的產品組30)為對象的磨削(研磨)。功能模組可執行這些多個功能中的至少一個功能。接收模組26、切削模組27和送出模組28也可以包含在功能模組中。 A function module having a specific function can be detached between the receiving module 26 and the cutting module 27 or between the cutting module 27 and the sending module 28. The specific functions are cleaning, drying, and measurement or inspection of the product P for the product group 30 in addition to the cutting described above. The specific function may be grinding (grinding) targeted at the cutting object 29 before cutting or the cutting object after cutting (product group 30 as an assembly of product P). The function module may perform at least one of these multiple functions. The receiving module 26, the cutting module 27, and the sending module 28 may also be included in a functional module.
特定功能還可以是使用圓板狀旋轉刃1A、1B以外機構進行的切削功能。通過使用具有這些切削功能的切削機構,能夠進行例如利用水射流的切削、利用使用磨粒的噴砂的切削、使用鋼絲鋸的切削、利用鐳射的切削等。通過組合這些切削機構和圓板狀旋轉刃1A、1B,能夠沿由線段和曲線組合而成的線對切削對象29進行切削。這種切削在製造例如SD存儲卡等具有由線段和曲線組合而成的形狀的產品時有用。 The specific function may be a cutting function using a mechanism other than the disc-shaped rotary blades 1A, 1B. By using a cutting mechanism having these cutting functions, for example, cutting by a water jet, cutting by sandblasting using abrasive grains, cutting by a wire saw, cutting by laser, and the like can be performed. By combining these cutting mechanisms and the disk-shaped rotary blades 1A and 1B, the cutting object 29 can be cut along a line formed by combining line segments and curves. Such cutting is useful when manufacturing a product having a shape composed of a line segment and a curve, such as an SD memory card.
第3圖的(b)表示具有清洗功能和乾燥功能的功能模組41。功能模組41較佳被插入並安裝在切削模組27與送出模組28之間。 (B) of FIG. 3 shows a function module 41 having a cleaning function and a drying function. The function module 41 is preferably inserted and installed between the cutting module 27 and the sending module 28.
功能模組41具有清洗乾燥機構42。清洗乾燥機構42具有清洗部43及乾燥部44。在清洗部43中設置有用於噴射清洗液的清洗液噴射機構。在清洗部 43中也可以設置有擦洗機構,該擦洗機構使用含有清洗液的海綿來擦拭產品組的上表面。在清洗部43中還可以並行設置噴射機構和擦洗機構。在乾燥部44中設置有用於噴射清潔氣體的氣體噴射機構。第3圖的(b)所示的功能模組41在清洗部43的清洗功能和乾燥部44的乾燥功能的基礎上還具有照相機32的檢查功能。 The functional module 41 includes a washing and drying mechanism 42. The washing and drying mechanism 42 includes a washing section 43 and a drying section 44. The cleaning unit 43 is provided with a cleaning liquid spraying mechanism for spraying a cleaning liquid. In the cleaning department 43 may also be provided with a scrubbing mechanism that uses a sponge containing a cleaning solution to wipe the upper surface of the product group. The cleaning unit 43 may be provided with a spraying mechanism and a scrubbing mechanism in parallel. The drying unit 44 is provided with a gas injection mechanism for injecting a cleaning gas. The function module 41 shown in FIG. 3 (b) has an inspection function of the camera 32 in addition to the cleaning function of the cleaning section 43 and the drying function of the drying section 44.
第3圖的(c)表示具有磨削(研磨)功能的功能模組45。功能模組45被插入並安裝在接收模組26與切削模組27之間或者切削模組27與送出模組28之間。為了縮短切削模組27中的切削時間,較佳在接收模組26與切削模組27之間插入並安裝有功能模組45。根據該結構,切削對象29在經由功能模組45中的研磨而薄型化之後,經由切削模組27中的切削而單片化。 (C) of FIG. 3 shows a functional module 45 having a grinding (grinding) function. The function module 45 is inserted and installed between the receiving module 26 and the cutting module 27 or between the cutting module 27 and the sending module 28. In order to shorten the cutting time in the cutting module 27, a function module 45 is preferably inserted and installed between the receiving module 26 and the cutting module 27. According to this configuration, the cutting object 29 is thinned by grinding in the function module 45 and then singulated by cutting in the cutting module 27.
在功能模組45中設置有磨削機構46。磨削機構46具有能夠旋轉的磨削砂輪47。通過使用磨削機構46所具有的能夠旋轉的磨削砂輪47,能夠對封裝後基板所具有的封裝樹脂的上表面及半導體晶片等的上表面進行磨削。由此,能夠減薄由電子部件等構成的產品P。在功能模組45中也可以設置有厚度測量機構48。在切削加工過程中或切削加工之後,能夠利用厚度測量機構48所具有的變位感測器49來測量待磨削的封裝樹脂的上表面或半導體晶片的上表面等的高度方向(Z方向)的位置。功能模組45兼具磨削砂輪47的磨削功能和變位感測器49的厚度測量功能。 A grinding mechanism 46 is provided in the function module 45. The grinding mechanism 46 includes a grinding wheel 47 that can rotate. The use of a rotatable grinding wheel 47 included in the grinding mechanism 46 makes it possible to grind the upper surface of the encapsulation resin and the upper surface of the semiconductor wafer and the like of the substrate after encapsulation. Thereby, the product P which consists of an electronic component etc. can be made thin. The function module 45 may be provided with a thickness measurement mechanism 48. During or after the cutting process, the displacement sensor 49 of the thickness measuring mechanism 48 can be used to measure the height direction (Z direction) of the upper surface of the packaging resin to be ground or the upper surface of the semiconductor wafer. s position. The function module 45 has both the grinding function of the grinding wheel 47 and the thickness measurement function of the displacement sensor 49.
實施例5所涉及的切削裝置25使用圓板狀旋轉刃1A或圓板狀旋轉刃1B中的任一旋轉刃對切削對象29進行切削。因此,能夠得到與實施例1中說明的效果同樣的效果。 The cutting device 25 according to the fifth embodiment cuts the cutting object 29 by using any one of the disc-shaped rotary blade 1A or the disc-shaped rotary blade 1B. Therefore, the same effects as those described in the first embodiment can be obtained.
此外,根據實施例5所涉及的切削裝置25,能夠得到以下效果。第一,在製造切削裝置25之後或者在切削裝置25安裝到使用者工廠之後,可根據需 要在切削裝置25中事後增設具有切削功能的功能模組。也可以在使用者開始使用切削裝置25之後,在切削裝置25中事後增設具有切削功能的功能模組。因此,能夠事後增加切削裝置25中的對切削對象29進行切削的能力。 In addition, according to the cutting device 25 according to the fifth embodiment, the following effects can be obtained. First, after manufacturing the cutting device 25 or after the cutting device 25 is installed in a user's factory, A function module having a cutting function is added to the cutting device 25 afterwards. After the user starts using the cutting device 25, a function module having a cutting function may be added to the cutting device 25 afterwards. Therefore, the ability to cut the cutting object 29 in the cutting device 25 can be increased afterwards.
第二,在製造切削裝置25之後或者在切削裝置25安裝到使用者工廠之後,可根據需要在切削裝置25中事後增加具有切削以外功能的功能模組。也可以在使用者開始使用切削裝置25之後,在切削裝置25中事後增加具有切削以外功能的功能模組。因此,能夠在切削裝置25中事後增加切削裝置25中的切削以外的功能。 Second, after the cutting device 25 is manufactured or after the cutting device 25 is installed in a user's factory, functional modules having functions other than cutting can be added to the cutting device 25 afterwards as needed. After the user starts using the cutting device 25, a functional module having functions other than cutting may be added to the cutting device 25 afterwards. Therefore, functions other than cutting in the cutting device 25 can be added to the cutting device 25 afterwards.
此外,目前為止所說明的實施例1~5中記載的切削對象29包括電路板,該電路板中形成有分別內含電路的格子狀的多個區域。電路板可以是由矽或碳化矽等構成的半導體基板(semiconductor wafer)。這些切削對象具有實質上圓形的平面形狀。 In addition, the cutting object 29 described in the embodiments 1 to 5 described so far includes a circuit board in which a plurality of grid-shaped regions each containing a circuit are formed. The circuit board may be a semiconductor wafer made of silicon, silicon carbide, or the like. These cutting objects have a substantially circular planar shape.
切削對象包括半導體晶圓(semiconductor wafer),該半導體晶圓中形成有分別內含電路的格子狀的多個區域,並且該半導體晶圓的一面被樹脂封裝。在該半導體晶圓的一面上也可以形成有突起狀電極或電氣佈線等。 The cutting target includes a semiconductor wafer in which a plurality of grid-like regions each containing a circuit are formed, and one side of the semiconductor wafer is encapsulated with a resin. Protruded electrodes, electrical wiring, and the like may be formed on one surface of the semiconductor wafer.
切削對象29包括板狀部件,該板狀部件中形成有分別具有功能的格子狀的多個區域。板狀部件也可以是在多個區域分別形成有微透鏡陣列的板狀部件。板狀部件還可以是在多個區域分別形成有導光板的板狀部件。在這些情況下,多個區域分別具有的功能為光的聚光、擴散和導光等的光學功能。 The cutting object 29 includes a plate-shaped member in which a plurality of regions in a grid shape each having a function are formed. The plate-shaped member may be a plate-shaped member in which a microlens array is formed in each of a plurality of regions. The plate-shaped member may be a plate-shaped member in which a light guide plate is formed in each of a plurality of regions. In these cases, the respective regions have functions such as optical functions of condensing, diffusing, and guiding light.
作為切削對象29的一例的封裝後基板具有:電路板;多個晶片狀部件,被安裝在電路板所具有的格子狀的多個區域中;和封裝樹脂,以一併覆蓋多個區域的方式形成為板狀。電路板包含由銅、鐵類合金等構成的引線框(lead frame)、玻璃環氧層壓板、以覆銅聚醯亞胺薄膜等為基材的印刷基板(印刷電路板;Printed Wiring Board)。電路板包含以氧化鋁、碳化矽或藍寶石等為基材的陶瓷基板、以銅或鋁等金屬為基材的金屬基基板、以聚醯亞胺薄膜為基材的膜基基板等。 The packaged substrate, which is an example of the cutting object 29, includes: a circuit board; a plurality of wafer-shaped components mounted in a plurality of grid-shaped areas of the circuit board; and a packaging resin to cover the plurality of areas together. Formed into a plate shape. The circuit board contains a lead frame made of copper, iron-based alloys, etc. frame), glass epoxy laminates, printed wiring boards (printed wiring boards) based on copper-clad polyimide films and the like. The circuit board includes a ceramic substrate based on alumina, silicon carbide or sapphire, a metal-based substrate based on a metal such as copper or aluminum, a film-based substrate based on a polyimide film, and the like.
作為切削對象29一例的封裝後基板的總體形狀,代表性的是製造IC、表面安裝型電晶體或表面安裝型電容器等時的板狀(平板狀)。不限於此,樹脂封裝體1的總體形狀也可以是製造光學半導體元件時的具有作為凸透鏡發揮功能的多個突起的形狀等。 The overall shape of the packaged substrate as an example of the cutting object 29 is typically a plate shape (flat plate shape) when an IC, a surface mount transistor, or a surface mount capacitor is manufactured. Not limited to this, the overall shape of the resin package 1 may be a shape having a plurality of protrusions functioning as a convex lens when the optical semiconductor element is manufactured, or the like.
晶片狀部件包含分別為晶片狀的、半導體積體電路(semiconductor integrated circuit;IC)、光學半導體元件、電晶體、二極體、水晶振子、濾波器、電容器、電感器、電阻、熱敏電阻和感測器等的電子部件。晶片狀部件包含微電子機械系統(MEMS:Micro Electro Mechanical Systems)等機構部件。在基板中的一個區域中可以安裝有一個晶片狀部件,也可以安裝有多個晶片狀部件。安裝在一個區域中的多個晶片狀部件可以是相同種類,也可以是不同種類。作為封裝樹脂,例如可使用環氧樹脂或矽樹脂等的由熱硬化性樹脂硬化而成的硬化樹脂。 Wafer-shaped components include wafer-shaped semiconductor integrated circuits (ICs), optical semiconductor components, transistors, diodes, crystal oscillators, filters, capacitors, inductors, resistors, thermistors, and Electronic components such as sensors. The wafer-shaped component includes a mechanical component such as a micro electro mechanical system (MEMS: Micro Electro Mechanical Systems). One wafer-shaped component may be mounted in one area in the substrate, or a plurality of wafer-shaped components may be mounted. The plurality of wafer-shaped components mounted in one area may be the same type or different types. As the sealing resin, for example, a hardening resin made of a thermosetting resin such as an epoxy resin or a silicone resin can be used.
在各實施例中,使工作臺36沿圖中的X方向、Y方向及Z方向移動。代替此,也可以使安裝有圓板狀旋轉刃1A、1B的心軸33沿圖中的X方向、Y方向及Z方向移動。此外,還可以使工作臺36和心軸33這兩個沿圖中的X方向、Y方向及Z方向移動。根據這些形式,還可以使工作臺36和心軸33沿X方向、Y方向及Z方向相對移動。 In each embodiment, the table 36 is moved in the X, Y, and Z directions in the figure. Instead, the mandrel 33 to which the disk-shaped rotary blades 1A and 1B are attached may be moved in the X direction, the Y direction, and the Z direction in the figure. In addition, both the table 36 and the mandrel 33 can be moved in the X direction, the Y direction, and the Z direction in the figure. According to these forms, the table 36 and the spindle 33 can be relatively moved in the X direction, the Y direction, and the Z direction.
還可以根據構造切削對象29的材料或者根據構造切削對象29的材料的組合,改變工作臺36和心軸33沿X方向、Y方向及Z方向相對移動的速度。 The speed of the relative movement of the table 36 and the mandrel 33 in the X direction, the Y direction, and the Z direction may also be changed according to the material constituting the cutting object 29 or a combination of materials constituting the cutting object 29.
作為將切削對象29暫時固定在工作臺36上的方式,可以將切削對象29吸附在工作臺36的上表面上,而不使用膠帶。在該情況下,以俯視時與作為待切斷的部分的各邊界線重疊的方式,在工作臺36的上部形成有收容圓板狀旋轉刃1A、1B的外周部4的槽。 As a method of temporarily fixing the cutting object 29 on the table 36, the cutting object 29 can be adsorbed on the upper surface of the table 36 without using tape. In this case, a groove for accommodating the outer peripheral portion 4 of the disc-shaped rotary blades 1A, 1B is formed on the upper portion of the table 36 so as to overlap the respective boundary lines of the portion to be cut in a plan view.
在目前為止說明的實施例中,使用包含纖維素的來源於植物的纖維狀部件7,以作為分散到由硬化樹脂構成的樹脂部5內的來源於生物的纖維狀部件7。可使用來源於動物的具有親水性的纖維狀部件7來代替來源於植物的纖維狀部件,以作為來源於生物的纖維狀部件7。換言之,在圓板狀旋轉刃1A、1B中,纖維狀部件也可以是來源於動物的纖維狀部件。 In the embodiments described so far, the plant-derived fibrous member 7 containing cellulose was used as the bio-derived fibrous member 7 dispersed in the resin portion 5 made of hardened resin. An animal-derived fibrous member 7 having hydrophilicity may be used instead of a plant-derived fibrous member as the biologically-derived fibrous member 7. In other words, in the disc-shaped rotary blades 1A and 1B, the fibrous member may be a fibrous member derived from an animal.
作為分散到由硬化樹脂構成的樹脂部5內的來源於動物的纖維狀部件7的一例,可列舉包含甲殼素或殼聚糖的材料。甲殼素或殼聚糖為包含在蟹或蝦的甲殼或者烏賊的器官等諸多生物中的天然多糖類(參照前述的杉野機械有限公司的網頁)。根據目前為止說明的製造方法,能夠使用來源於動物的纖維狀部件7來製造與實施例1、3中說明的圓板狀旋轉刃1A、1B同樣的旋轉刃。 As an example of the animal-derived fibrous member 7 dispersed in the resin portion 5 made of a hardened resin, a material containing chitin or chitosan may be mentioned. Chitin or chitosan is a natural polysaccharide contained in many organisms, such as crab or shrimp crustaceans or squid organs (see the website of Sugiye Machinery Co., Ltd.). According to the manufacturing method explained so far, it is possible to manufacture the rotary blade similar to the disk-shaped rotary blade 1A, 1B demonstrated in Example 1, 3 using the animal-derived fibrous member 7.
本發明並不限定於上述的各實施例。在不脫離本發明主旨的範圍內,本發明可根據需要任意且適當組合而進行變更或選擇性地採用各結構要素。例如,也可以採用在切削裝置25所具有的切削模組27中對一個工作臺36組合兩個心軸33(旋轉機構)的結構。也可以對一個工作臺36組合一個心軸33(旋轉機構)而構造切削機構之後,在一台切削裝置25所具有的一個切削模組27中設置多組(例如,兩組)切削機構。 The invention is not limited to the embodiments described above. Within the scope not departing from the gist of the present invention, the present invention may be arbitrarily and appropriately combined to change or selectively adopt each constituent element as necessary. For example, a configuration in which two spindles 33 (rotation mechanism) are combined with one table 36 in the cutting module 27 of the cutting device 25 may be adopted. After a cutting mechanism is constructed by combining one spindle 33 (rotating mechanism) with one table 36, a plurality of sets (for example, two sets) of cutting mechanisms may be provided in one cutting module 27 of one cutting device 25.
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200302266A (en) * | 2002-01-30 | 2003-08-01 | Saint Gobain Abrasives Inc | Method for making resin bonded abrasive tools |
TWM455592U (en) * | 2013-01-11 | 2013-06-21 | M & S Prec Machinery Co Ltd | Multi-axis grinder having turning function |
CN103551981A (en) * | 2013-11-08 | 2014-02-05 | 谢泽 | Polishing-grinding integrated wheel containing fiber ropes, abrasive and foaming agent |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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JP2002137160A (en) * | 2000-08-24 | 2002-05-14 | Toray Ind Inc | Pad for polishing, polishing device, and polishing method |
JP4415474B2 (en) * | 2000-10-05 | 2010-02-17 | 三菱マテリアル株式会社 | Resin bond grinding wheel |
CN100506491C (en) * | 2004-03-31 | 2009-07-01 | 黄焕仪 | Method for polishing wheel from sisal fiber |
CN101096079A (en) * | 2006-06-29 | 2008-01-02 | 四川省三台县固锐实业有限责任公司 | Resin grinding wheel and production method thereof |
JP5318526B2 (en) * | 2008-10-29 | 2013-10-16 | 大和化成工業株式会社 | Fibrous porous grinding wheel |
JP2010274369A (en) * | 2009-05-28 | 2010-12-09 | Teijin Techno Products Ltd | Fiber reinforcement grinding wheel |
JP5841437B2 (en) * | 2012-01-27 | 2016-01-13 | 株式会社東京精密 | Cutting blade and method for manufacturing the same |
FI126837B (en) * | 2013-09-05 | 2017-06-15 | Upm Kymmene Corp | Composite articles and process for its manufacture |
CN103551984B (en) * | 2013-11-08 | 2016-01-13 | 谢泽 | The preparation method of including natural fibers, abrasive material, thermal expansion resin hollow microspheres rubbing down integrated wheel |
JP6333650B2 (en) * | 2014-07-18 | 2018-05-30 | Towa株式会社 | Cutting apparatus and cutting method |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200302266A (en) * | 2002-01-30 | 2003-08-01 | Saint Gobain Abrasives Inc | Method for making resin bonded abrasive tools |
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