CN107891378A - The manufacture method of discoideus rotating sword, topping machanism and discoideus rotating sword - Google Patents
The manufacture method of discoideus rotating sword, topping machanism and discoideus rotating sword Download PDFInfo
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- CN107891378A CN107891378A CN201710888393.8A CN201710888393A CN107891378A CN 107891378 A CN107891378 A CN 107891378A CN 201710888393 A CN201710888393 A CN 201710888393A CN 107891378 A CN107891378 A CN 107891378A
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- Prior art keywords
- discoideus
- rotating sword
- sword
- fibrous member
- resin
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
- B26D2001/002—Materials or surface treatments therefor, e.g. composite materials
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Forests & Forestry (AREA)
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- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Dicing (AREA)
Abstract
The present invention provides the manufacture method of discoideus rotating sword, topping machanism and discoideus rotating sword.The long lifetime of discoideus rotating sword can be realized when being cut using discoideus rotating sword cutting object.Resin portion (5) that discoideus rotating sword (1A, 1B) includes being formed by the hardening resin for hardening and being molded through resin material, abrasive particle (6), from biological fibrous member (7) and aggregate (8).Fibrous member (7) from biology is, for example, to have hydrophilic vegetative fiber shape part.Vegetative fiber shape part (7) preferably comprises cellulose.Fibrous member (7) is more preferably cellulose nano-fibrous (the Cellulose nanofiber with high-hydrophilic：CNF).
Description
Technical field
The present invention relates to a kind of by being cut the discoideus rotation used during manufacturing multiple products to cutting object
The manufacture method of sword, topping machanism and discoideus rotating sword.
Background technology
When manufacturing electronic unit, implementation uses the blade as discoideus rotating sword to as workpiece (cutting object)
Wafer (semiconductor crystal wafer：Semiconductor wafer) method cut is (for example, referring to the of documents 1
[0054] section and Fig. 1~Fig. 3).By cutting wafer, multiple electronic units through singualtion are manufactured.In this case,
Semiconductor chip through singualtion is electronic unit (product).Semiconductor crystal wafer is by the group such as silicon (Si) or carborundum (SiC)
Into composite of the top of mother metal formed with impurity diffusion layer, insulating barrier and wiring layer etc..Semiconductor crystal wafer is plate-like portion
Part.
As the other forms of cutting object, encapsulation metacoxal plate can be enumerated.Encapsulation metacoxal plate has：Substrate；Multiple chips
Shape part, installed in possessed by substrate on multiple regions；And potting resin, be formed as in a manner of covering multiple regions in the lump
Tabular.Metacoxal plate is encapsulated to be provided with the composite wood that the substrate of multiple shaped like chips parts and potting resin form by lamination
Material.Encapsulation metacoxal plate is plate-shaped member.
Patent document 1：Japanese Patent Publication 2013-084811 publications
When the blade using rotation at a high speed implements cutting cutting to workpiece, blade and work can be produced in machining
Friction between part.Frictional heat can also promote the abrasion of blade itself caused by friction when processing, and produce the blade longevity
The problem of life shortens is (for example, referring to [0002] section of patent document 1).On the problem, to as discoideus rotating sword
The requirement of the long lifetime of blade itself is constantly strengthened.In present specification, " life-span ", this term referred to situations below：Circle
Tabular rotating sword reach due to the diameter of discoideus rotating sword diminishes and in the workpiece (cutting object) carried out using the rotating sword
Cut the stage being obstructed.The diameter of discoideus rotating sword diminishes, and is produced because wearing or being lost etc..
The content of the invention
In order to solve the above problems, it is an object of the invention to provide a kind of discoideus rotating sword, topping machanism and plectane
The manufacture method of shape rotating sword, it can realize the long lifetime of discoideus rotating sword when cutting plate-shaped member.
The discoideus rotating sword of one embodiment of the invention is used to cut cutting object, the discoideus rotating sword bag
Include：
Hardening resin, harden and be molded through resin material；
Abrasive particle, it is dispersed in the hardening resin；With
From the fibrous member of biology, it is dispersed in the hardening resin,
The hardening resin is by the state that is dispersed in the abrasive particle and the fibrous member in the resin material
Under resin material hardening and the hardening resin that is molded is formed.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, included in the plectane
The ratio of the fibrous member in shape rotating sword is more than 0.5 volume % and below 30 volume %.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, included in the plectane
The ratio of the fibrous member in shape rotating sword is more than 30 volume % and is below 80 volume %.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, the fibrous member
From plant.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, the fibrous member
Include cellulose.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, the fibrous member
From animal.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, the fibrous member
Include chitin or chitosan.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, the cutting object is
Formed with having the plate-shaped member in the multiple regions of functional respectively.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, the cutting object is
Circuit board formed with the multiple regions for including circuit respectively.
Discoideus rotating sword according to an embodiment of the invention, in above-mentioned discoideus rotating sword, the cutting object is
The circuit board of resin-encapsulated is carried out formed with the multiple regions for including circuit respectively and using potting resin.
The topping machanism of one embodiment of the invention includes：
Rotary shaft, for fixed disc shape rotating sword；
Rotating mechanism, for rotating the rotary shaft；
Fixed mechanism, object is cut for fixed；With
Travel mechanism, for relatively moving the rotating mechanism and the fixed mechanism.
In the topping machanism, the discoideus rotating sword is any rotating sword in above-mentioned discoideus rotating sword.
Topping machanism according to an embodiment of the invention, there are two rotating mechanisms, and there are multiple shiftings
Motivation structure.
Topping machanism according to an embodiment of the invention, there are two fixed mechanisms, and there are multiple shiftings
Motivation structure.
Topping machanism according to an embodiment of the invention, including：
Module is cut, at least with the rotary shaft, the rotating mechanism, the fixed mechanism and the travel mechanism；
With
Control unit, the operation of the cutting module is at least controlled,
The cutting module can load and unload relative to other functional modules with specific function,
The specific function includes at least one function in cutting, clean, dry, measure, check and grinding.
The manufacture method of the discoideus rotating sword of one embodiment of the invention is to be used to manufacture to be used to cut cutting object
The method for the discoideus rotating sword cut, the manufacture method include following process：
Prepare abrasive particle；
Prepare the fibrous member from biology；
Prepare resin material；
By the way that at least the abrasive particle and the fibrous member are distributed in the resin material to make mixing material；
It is described mixed by rolling in the state of the abrasive particle and the fibrous member are distributed in the resin material
Condensation material and make tabular mixing material；
Discoideus mixing material is made by tabular mixing material described in punching press；
The discoideus mixing material is fitted into shaping mould；
Heated while by being pressurizeed to the discoideus mixing material being fitted into the shaping mould, so that described
Resin material hardens and is molded hardening resin, is thus molded discoideus products formed；
The discoideus products formed is cooled down；With
The discoideus rotating sword being made up of the discoideus products formed is taken out from the shaping mould.
The manufacture method of discoideus rotating sword according to an embodiment of the invention, described in the making in above-mentioned manufacture method
In the process of mixing material, the ratio of the fibrous member that will be contained in the mixing material be set to 0.5 volume % with
Upper and below 30 volume %.
The manufacture method of the discoideus rotating sword of one embodiment of the invention is to be used to manufacture to be used to cut cutting object
The method for the discoideus rotating sword cut, the manufacture method include following process：
Prepare abrasive particle；
Prepare the fibrous member from biology；
Prepare the resin material with mobility；
By the way that at least the abrasive particle and the fibrous member are distributed in solvent to make dispersion；
In the state of the abrasive particle and the fibrous member are distributed in the solvent, be ferreted out the dispersion and
Make discoideus dispersion；
Dry the discoideus dispersion；
By making the resin material be impregnated into the dried discoideus dispersion to make discoideus mixing
Material；
The discoideus mixing material is fitted into shaping mould；
Heated while by being pressurizeed to the discoideus mixing material being fitted into the shaping mould, so that described
Resin material hardens and is molded hardening resin, is thus molded discoideus products formed；
The discoideus products formed is cooled down；With
The discoideus rotating sword being made up of the discoideus products formed is taken out from the shaping mould.
The manufacture method of discoideus rotating sword according to an embodiment of the invention, described in the making in above-mentioned manufacture method
In the process of discoideus mixing material, the ratio for the fibrous member that will be contained in the discoideus mixing material is set to
More than 30 volume % and it is below 80 volume %.
The manufacture method of discoideus rotating sword according to an embodiment of the invention, above-mentioned manufacture method further comprise following
Process：The discoideus rotating sword taken out from the shaping mould is placed in set point of temperature atmosphere, with to described discoideus
Rotating sword is heat-treated.
The manufacture method of discoideus rotating sword according to an embodiment of the invention, in above-mentioned manufacture method, the regulation
Temperature atmosphere is any of air atmosphere, inert atmosphere and hypoxic atmosphere atmosphere.
It is dispersed to according to the present invention, abrasive particle and from the fibrous member of biology in hardening resin.Due to from
The fibrous member of biology has high-affinity to water, therefore is easy to absorb moisture.Thus, the surface of discoideus rotating sword is reduced
With the friction between cutting subject surface.Therefore, it is possible to reduce using rotating sword to cutting object cut caused by rub
Chafing, therefore the life-span of rotating sword can be extended.
Brief description of the drawings
Fig. 1 (a) is the front view and side view of discoideus rotating sword involved in the present invention, and (b) and (c) has respectively
Close the enlarged diagram of the part A shown in other embodiment, (a).
Fig. 2 is the schematic diagram for the manufacture method that discoideus rotating sword involved in the present invention is represented by process sequence.
Fig. 3 (a) is the schematic plan for representing topping machanism involved in the present invention, and (b) and (c) is to represent to cut
The schematic plan of the example of functional module beyond module.
Embodiment
(embodiment 1)
Reference picture 1, to discoideus rotating sword 1A (following, the suitable referred to as " rotations involved by embodiments of the invention 1
Sword ") possessed by general structure illustrate.Fig. 1 (a) is front view and the side of discoideus rotating sword involved in the present invention
View.Discoideus rotating sword 1B is the rotating sword involved by the other embodiment (aftermentioned) of the present invention, is had with rotating sword 1A not
Same composition.
All accompanying drawings in present specification for the purpose of it should be readily appreciated that suitably omit or exaggerate schematically to paint
System.Identical reference is used to identical structural element, and suitably omitted the description.
As shown in Fig. 1 (a), discoideus rotating sword 1A has the rotary shaft for topping machanism in rotating sword 1A central part
Embedded circular hole 2 (not shown).As shown in the left side of Fig. 1 (a), rotating sword 1A has circular profile and is concentric with the circle
The circular hole 2 of round shape.Rotating sword 1A has the side surface part 3 and peripheral part 4 of both sides.Rotating sword 1A is embedded in circular hole 2 in rotary shaft
Under state, the Outboard Sections of the circular hole 2 in the side surface part 3 of both sides are clamped by two relative fixtures.It is screwed
Two relative fixtures, rotating sword 1A are fixed in the rotary shaft of topping machanism.
Rotating sword 1A imaginary centres C is consistent with the center line of the rotary shaft of topping machanism.The rotary shaft of topping machanism with
Such as the rotational shaft of the motor such as servomotor (not shown).Rotated by the rotary shaft of motor, topping machanism
Rotary shaft rotates.Thus, be fixed on rotating sword 1A in the rotary shaft of topping machanism with defined revolution (for example, 15000~
30000rpm) rotate.By the rotating sword 1A of the rotation incision cutting object of peripheral part 4, so as to cut cutting object.
In present specification, " cutting cutting object " this term refers to " to one of the thickness direction in cutting object
Point cut " (hemisection) and " (cutting cutting pair completely is cut to all parts of the thickness direction in cutting object
As) " (cutting entirely) the two implications.
(b) of reference picture 1, to fine structure possessed by the discoideus rotating sword 1A involved by embodiments of the invention 1
Illustrate.As shown in Fig. 1 (b), discoideus rotating sword 1A includes resin portion 5, abrasive particle 6 and the source formed by hardening resin
In the fibrous member 7 of biology.In other words, abrasive particle 6 and the fibrous member 7 from biology are disperseed and are included in by hardening
In the resin portion 5 that resin is formed.
Resin portion 5 is synthetic resin, such as the heat by being made up of phenolic resin, epoxy resin or polyimide resin etc.
Hardening resin constructs.Abrasive particle 6 is such as the construction as diamond or cBN (cubic boron nitride).
Discoideus rotating sword 1A can include aggregate 8.As aggregate 8, tungsten carbide (WC), aluminum oxide (Al can be used2O3) or carbon
The materials such as SiClx (SiC).Discoideus rotating sword 1A can also include other additives.As other additives, carbon black can be used
Or the material of silane coupler material etc..
Fibrous member 7 from biology is, for example, to have hydrophilic vegetative fiber shape part.Vegetative fiber
Shape part 7 preferably comprises cellulose.Fibrous member 7 is more preferably cellulose nano-fibrous with high-hydrophilic
(Cellulose nanofiber：CNF).It is cellulose nano-fibrous to refer to " using the cellulose included in string as original
(" Japan largely produces first and sale biomass nano fiber for material, the nanofiber prepared by mechanical lysis "！", it is [online
(online)], Shan Ye Machinery Co., Ltd.s (Co., Ltd.'s ス ギ ノ マ シ Application), [September is retrieved on the 16th within 2016], internet<
URL:http://www.sugino.com/site/biomass-nanofiber/guidance.html>)。
Used in embodiment 1 it is cellulose nano-fibrous for example with following diameter (section vertical with length direction
Diameter) value and length value.Cellulose nano-fibrous diameter value φ is number 10 (tens of)~200nm or so, and length value is 1~10
μm or so or its more than.Therefore, used cellulose nano-fibrous aspect ratio (length value/diameter value) is number 10 (tens of)
~number 100 (hundreds of) or 10~number of number more than 100.
Fig. 1 (b), (c) are represented in using rotating sword 1A, 1B after (dressing, the straight of mesh) is preceding repaired, fine
Tie up the state that a part for the front end of shape part 7 protrudes from the surface of resin portion 5.In the inside of resin portion 5, presence wrapped around one another
From the part that each fibrous member 7 of the surface protrusion by resin portion 5 extends.In the inside of resin portion 5, deposited wrapped around one another
Multiple fibrous members 7 between abrasive particle 6 and aggregate 8 be present.Pass through these structures, the mechanical strength example of increase rotating sword 1
Such as modulus of elasticity, bending strength and tensile strength.
In the discoideus rotating sword 1A involved by embodiment 1, abrasive particle 6 and the (example of fibrous member 7 from biology
Such as, it is cellulose nano-fibrous) it is dispersed in the resin portion 5 being made up of hardening resin.Resin portion 5 is together distributed to abrasive particle 6
In the fibrous member 7 from biology reduce rubbing between rotating sword 1A peripheral part 4 and side surface part 3 and cutting object
Wipe.Thereby, it is possible to reduce that cutting object is carried out cutting caused frictional heat using rotating sword.Therefore, it is possible to extend rotation
The life-span of sword.
In the discoideus rotating sword 1A involved by embodiment 1, the ratio (fit rate) of fibrous member 7 is preferably 0.5
More than volume %.Because by including fibrous member 7 with 0.5 volume % or so fit rate, so as to start to produce drop
The effect of friction between low discoideus rotating sword 1A peripheral part 4 and side surface part 3 and cutting object.Infer the effect due to
Being included in rotating sword 1A has hydrophilic fibrous member.The content inferred in present specification will not be to interest field
Explanation brings influence.
In the discoideus rotating sword 1A involved by embodiment 1, the fit rate of fibrous member 7 is more preferably 3 volume %
More than.Because by including fibrous member 7 with 3 volume % or so fit rate, so as to start significantly to produce increase
This effect of discoideus rotating sword 1A mechanical strength.Cellulose nano-fibrous composite is included by forming, so as to carry
High mechanical properties.
In the discoideus rotating sword 1A involved by embodiment 1, the fit rate of fibrous member 7 be preferably 30 volume % with
Under.Because according to discoideus rotating sword 1A manufacture method (aftermentioned), it is more than 30 bodies in the fit rate of fibrous member 7
In the case of product %, it is difficult to which stirring is kneaded abrasive particle 6, fibrous member 7 and resin material from biology.Above-mentioned resin material
To construct the raw material of the hardening resin of resin portion 5.The resin material is at normal temperatures in powdery, granular or liquid." at normal temperatures
In liquid " this term refers to there is mobility at normal temperatures, it is unrelated with the height of viscosity.
Discoideus rotating sword 1A according to involved by embodiment 1, can obtain following effect.First, together disperse with abrasive particle 6
It is into resin portion 5, attached from biological and with peripheral part 4 of the hydrophilic fibrous member 7 in rotating sword 1A surface
Near and side surface part 3 near surface is easy to keep moisture.The outer of rotating sword 1A is reduced in the moisture that these near surfaces are kept
Friction between the surface in all portions 4 and the surface of side surface part 3 and cutting object.Thereby, it is possible to extend rotating sword 1A life-span.This
Outside, due to rotating sword 1A revolution can be increased, therefore the efficiency cut cutting object is improved.In addition, using rotation
In the case that sword 1A is cut cutting object, good cutting grade can be kept.By using the plant with high-hydrophilic
Physical property fibrous member 7 (for example, cellulose nano-fibrous), these effects are more notable.
Second, by including the fibrous member 7 from biology in discoideus rotating sword 1A, increase rotating sword 1A's
Mechanical strength is such as modulus of elasticity, bending strength and tensile strength.Thus, plate-shaped member is cut using rotating sword 1A
In the case of cutting, the vibrating of rotating sword 1A, tortuous (snake) can be reduced and deformed etc., therefore rotating sword 1A life-span can be extended.
Further, since the vibrating of rotating sword 1A, tortuous and deformation etc. can be suppressed, therefore good cutting grade can be kept.
Mechanical strength due to rotating sword 1A increases, and can reduce rotating sword 1A thickness.Thus, it is possible to reduce as cutting
The width of the joint-cutting (kerf) of the otch of object.Therefore the product quantity produced from a cutting object can be increased (to obtain
Number).
Due to rotating sword 1A mechanical strength increase, increasing rotating sword 1A external diameter, so as to obtain following effect.It is first
First, rotating sword 1A life-span can be extended.Then, due to rotating sword 1A peripheral speed increase, therefore 1A pairs of rotating sword can be improved
The efficiency that cutting object is cut.Then, can through-thickness cut completely (cutting) have larger thickness cutting
Object.As the cutting object with larger thickness, can enumerate resin-encapsulated has Electric control semiconductor element (IC, crystalline substance
Body pipe etc.), the internal combustion engine control using conveying equipment as object controlled with IC's etc. with IC, Motor Control IC or brakes
Encapsulate metacoxal plate.
3rd, by including the fibrous member 7 from biology with high-hydrophilic in discoideus rotating sword 1A,
So as to increase the moisture included in rotating sword 1A peripheral part 4 and side surface part 3.Accordingly, it is capable to reduce in rotating sword 1A periphery
Caused frictional heat between the surface in portion 4 and the surface of side surface part 3 and cutting object.Revolved further, since being improved by the moisture
Turn sword 1A and cut the cooling effect of object, therefore the heat accumulation caused by processing can be reduced.Due to these effects, using
In the case that rotating sword 1A is cut plate-shaped member, rotating sword 1A life-span can be extended.In addition, good cutting can be kept
Grade.
4th, by including fibrous member 7 in discoideus rotating sword 1A, so as to which accompanying rotation sword 1A is to cutting object
Cut and from the surface on the surface of rotating sword 1A peripheral part 4 and side surface part 3 come off successively multiple fibrous members 7 (bag
A part for fibrousness part 7).In the case where using the vegetative fiber shape part 7 with high-hydrophilic, deduction also has
It there may be the situation that the bulk portion comprising multiple fibrous members 7 and resin portion 5 wrapped around one another comes off.Thus, outside
It is easy to new abrasive particle 6 occur on the surface in all portions 4 and the surface of side surface part 3.Therefore, because new abrasive particle 6 easily replaces having ground
The abrasive particle 6 of damage and cutting is made contributions, therefore improve to the efficiency cut of cutting object.In addition, using rotating sword
In the case that 1A is cut plate-shaped member, good cutting grade can be kept.
(embodiment 2)
(b) and Fig. 2 of reference picture 1, to the discoideus rotating sword 1A, plectane involved by manufacture embodiments of the invention 1
The manufacture method of shape rotating sword illustrates.Manufacturing condition described in present specification is an example.Discoideus rotating sword
Manufacture method in manufacturing condition be not limited to manufacturing condition described in present specification.
First, prepare abrasive particle 6 shown in Fig. 1 (b), from biology fibrous member (for example, cellulose Nanowire
Dimension) 7 and resin material.Prepare other additives for including the grade of aggregate 8 as needed.Resin material is preferably in powder at normal temperatures
Shape, granular or liquid.Resin material is synthetic resin, for example, makees phenolic resin, epoxy resin or polyimide resin etc.
The thermosetting resin included for main material.
Then, abrasive particle 6, fibrous member 7, aggregate 8, other additives and resin material are measured respectively.Use mixing and kneading machine
Mixed while grinding the abrasive particle 6 measured respectively, fibrous member 7, aggregate 8, other additives and resin material.It
Afterwards, while applying shearing force to abrasive particle 6, fibrous member 7, other additives and resin material using kneading machine, it is kneaded this
A little materials.Thus, abrasive particle 6, fibrous member 7 and other additives are distributed in resin material and manufacture mixing material.
Dry the mixing material under normal temperature.Afterwards, tabular mixing material is made by rolling mixing material.It is appropriate in order to carry out
Rolling, ethanol equal solvent can also be suitably added in the material (mixture) through mixing, and further passed through after mixing
Suitably dry and adjust the hardness of mixture.
Then, by punching press tabular mixing material, make (a) such as Fig. 2, there is the discoideus mixed of circular hole 2 shown in (b)
Condensation material 9A.Fig. 2 (a), (b) represent discoideus mixing material 9A top view and front view respectively.Discoideus mixing material
9A has circular hole 2, side surface part 3 and peripheral part 4.The other embodiment (aftermentioned) that discoideus mixing material 9B is the present invention is involved
Discoideus rotating sword 1B raw material, there is the composition different from mixing material 9A.
Then, as shown in Fig. 2 (c), a composition pattern 10 is prepared.Shaping mould 10 has lower mould 11 and upper mould 12.Construction
The material of shaping mould 10 can be the metal group material or ceramic-like materials being made up of tool steel etc..Can by by
Coating includes yittrium oxide (Y on the mother metal that metal group material or ceramic-like materials are formed2O3) ceramic-like materials and construct shaping mould
10。
The recess 13 for housing discoideus mixing material 9A is provided with lower mould 11.The recess 13 of mould 11 under construction
Bottom surface lower mould 11 inner bottom surface on be provided with convex portion 14 upward corresponding with mixing material 9A circular hole 2.In upper mould 12
Bottom surface (lower surface) on be provided with convex portion 15 directed downwardly corresponding with mixing material 9A flat shape.
Then, as shown in Fig. 2 (c), discoideus mixing material 9A is housed in shaping mould 10.Fig. 2 (c) is represented will
Two discoideus mixing material 9A are housed in the example in shaping mould 10.Can also be contained along drawing depth direction it is multiple (for example,
Three are contained in each example along drawing depth direction) discoideus mixing material 9A.In this case, can be by using one
Form pattern 10 and manufacture the individual discoideus rotating sword 1A in six (=2 × 3) in the lump via one-shot forming process.Can also can be through
The quantity set manufactured in the lump by one-shot forming process is more.
Then, in the state of shown in Fig. 2 (c), matched moulds is carried out to lower mould 11 and upper mould 12.Under in recess 13
The lower surface of upper mould 12 in the convex portion directed downwardly 15 of the inner bottom surface of mould 11 and upper mould 12 clamps discoideus mixing material 9A.
Then, the heating furnace 16 shown in Fig. 2 (d) is prepared.Hereinafter, the structure of heating furnace 16 is illustrated.
Heating furnace 16 has outer part 17 and heating part 18.In addition, heating furnace 16 has：Platform 19, for placing shaping mould
10；Supporting part 20, for supporting table 19；With lifting unit 21, for lifting supporting part 20.Platform 19 is preferably by with high-termal conductivity
Material (for example, metal group material) construction.Supporting part 20 is preferably by the material (for example, cement class material) with low heat conductivity
Construction.Multiple heaters 22 are provided with heating part 18.In Fig. 2 (d), multiple heaters of tubular are shown with as an illustration
22.As heater 22, the heater using electromagnetic induction heating can be used.
Heating part 18 has lid-like shape, and the lid-like shape has opening 23 in lower section.It is preferred that set in heating furnace 16
There is the baffle plate (not shown) for being opened and closed opening 23.By the lifting of lifting unit 21, the platform 19 supported by supporting part 20 is via adding
The opening 23 in hot portion 18 is retreated relative to the inner space of heating part 18.
Then, in the heating furnace 16 shown in (d) in Fig. 2, by the decline of lifting unit 21, platform 19 and supporting part 20 are located at
The lower section of opening 23.By the way that to multiple supply electric powers of heater 22, the inner space of heating part 18 is heated into defined temperature
(for example, 150 DEG C~160 DEG C).
Then, as shown in Fig. 2 (d), the shaping mould 10 for containing two discoideus mixing material 9A is housed in heating
In stove 16.Specifically, placed first on the platform 19 supported by supporting part 20 and contain two discoideus mixing material 9A's
Shaping mould 10.
Then, as shown in Fig. 2 (d), shaping mould 10 is made into the inner space of heating part 18 using lifting unit 21, and then
Shaping mould 10 is pressed into the upper member 24 of heating part 18.Shaping mould 10 is pressed into constant pressure using lifting unit 21
The upper member 24 of heating part 18, and keep the state.The heat generated by heating part 18 is delivered to two via shaping mould 10
In discoideus mixing material 9A.In this condition, using defined pressure (for example, 800kgf/cm2) to two discoideus mixing
While material 9A is pressurizeed, this two discoideus mixing material 9A are heated using defined temperature (for example, 155 DEG C).
In series of processes, platform 19 plays function as conducting-heat elements, and supporting part 20 plays function as heat insulating member.
Then, time (example as defined in the state shown in Fig. 2 (d) is kept at defined temperature (for example, 155 DEG C)
Such as, 3~5 minutes).Thus, the resin material hardening included in two discoideus mixing material 9A, is molded by hardening resin structure
Into resin portion 5 ((b) of reference picture 1).
Then, it is using lifting unit 21 that shaping mould 10 is empty from the inside of heating part 18 in the state of shown in Fig. 2 (d)
Between be fetched into the lower section of heating part 18.Shaping mould 10 after taking-up is transferred to process chamber (not shown).Process chamber can be set
In the inside of heating furnace 16, the outside of heating furnace 16 can also be arranged on.
Then, will to contain two discoideus mixing material 9A shaping mould 10 appropriate at 200 DEG C or less than 200 DEG C
Time as defined in being placed under treatment temperature and defined atmosphere.For example, shaping mould 10 is placed two hours at a temperature of 180 DEG C
Afterwards, placed one hour at a temperature of 200 DEG C.By being so heat-treated (after-hardening), so as to be fully included in
The sclerous reaction of resin material hardening in discoideus mixing material 9A.Pass through the resin included in discoideus mixing material 9A
Material hardening is to be molded hardening resin, so as to make discoideus rotating sword 1A ((e) of reference picture 2).
As the atmosphere in heat treatment, following atmosphere can be used.Construction resin portion (hardening tree is included in treatment temperature
Fat) 5 ((b) of reference picture 1) resin material be deteriorated within the temperature range of in the case of, can use inert gas (for example, nitrogen
Gas) atmosphere (inert atmosphere).In this case, hypoxic atmosphere (reduced atmosphere) can also be used.It is not included in treatment temperature
In the case of constructing within the temperature range of the resin material variation of resin portion 5, air atmosphere can be used.
Then, the shaping mould 10 for containing two discoideus rotating sword 1A is taken out and placed from process chamber.Thus, it is naturally cold
But shaping mould 10 and two discoideus rotating sword 1A of the inside for being housed in shaping mould 10.Can also the outside of process chamber into
The spray cooling cryogenic gas of pattern 10.Thereby, it is possible to the two of the inside for forcing to be cooled to pattern 10 and be housed in shaping mould 10
Individual discoideus rotating sword 1A.Therefore, it is possible to shorten discoideus rotating sword 1A manufacturing time.
Then, as shown in Fig. 2 (e), lower mould 11 and upper mould 12 are molded.From two recesses for being arranged at lower mould 11
Two discoideus rotating sword 1A are taken out in 13.Finishing (grinding can also be implemented to each discoideus rotating sword 1A as needed
Or the machining such as grinding).For example, using lathe or grinding machine etc. to the peripheral part of the discoideus rotating sword 1A shown in Fig. 2 (e)
4 and inner peripheral portion (Outboard Sections of circular hole 2) be machined.By process so far, be finally completed two it is discoideus
Rotating sword 1A.
The manufacture method of discoideus rotating sword according to involved by embodiment 2, it can manufacture discoideus involved by embodiment 1
Rotating sword 1A.By the way that shaping mould 10 is set into multi-cavity (most Ge take り) structure, can be manufactured in the lump via one-shot forming process more
Individual discoideus rotating sword 1A.
In addition, be provided with lifting unit 21 in heating furnace 16, the lifting unit 21 via heating part 18 opening 23 relative to
Retreat the inner space of heating part 18.Thereby, it is possible to realize what is heated while the pressurization when manufacturing discoideus rotating sword 1A
The automation of process.On these effects.In the other embodiment relevant with the manufacture method of discoideus rotating sword similarly.
In the manufacture method of the discoideus rotating sword involved by embodiment 2, the discoideus mixing material with circular hole 2 is used
Material 9.Instead of this, the discoideus mixing material without circular hole 2 can also be used.In this case, by via pressurization
The discoideus products formed for heating and hardening simultaneously is machined, so as to form circular hole 2.On this point, in other implementations
In example similarly.
(embodiment 3)
Involved by general structure possessed by discoideus rotating sword 1B involved by embodiments of the invention 3 and embodiment 1
Discoideus rotating sword 1A possessed by general structure it is identical.Therefore, totally tied possessed by omission and discoideus rotating sword 1B
The relevant explanation of structure.
(c) of reference picture 1, fine structure possessed by discoideus rotating sword 1B is illustrated.As shown in Fig. 1 (c),
Discoideus rotating sword 1B include be made up of hardening resin resin portion 5, abrasive particle 6, from biology fibrous member 7 (for example,
It is cellulose nano-fibrous) and aggregate 8.On constructing discoideus rotating sword 1B material category this point, discoideus rotating sword 1B
It is identical with discoideus rotating sword 1A.
In discoideus rotating sword 1B, preferably the ratio (fit rate) of fibrous member 7 is more than 30 volume %.This be because
For in the case where using the mixing material that the fit rate of fibrous member 7 is below 30 volume %, in discoideus rotating sword
In manufacture method (aftermentioned), it is difficult to be distributed to the dispersion in solvent by being ferreted out abrasive particle 6 and fibrous member 7 to make circle
Tabular dispersion.
In discoideus rotating sword 1B, preferably the fit rate of fibrous member 7 is below 80 volume %.Using threadiness
In the case of mixing material of the fit rate of part 7 more than 80 volume %, the cooperation of the abrasive particle 6 included in discoideus rotating sword
Rate reduces.Therefore, the efficiency that rotating sword 1B is cut cutting object reduces, and it is not preferable.
Discoideus rotating sword 1B according to involved by embodiment 3, the effect with being brought by discoideus rotating sword 1A can be obtained
Same effect.In addition, in view of following reason, the various effects obtained by discoideus rotating sword 1B are more than by discoideus rotating sword
The various effects that 1A is obtained.In discoideus rotating sword 1B, the fit rate of fibrous member 7 is more than 30 volume % and is 80 bodies
Product below %.In discoideus rotating sword 1A, the fit rate of fibrous member 7 is more than 0.5 volume % and below 30 volume %.
Compared with rotating sword 1A, rotating sword 1B has the fit rate value of larger fibrous member 7.Therefore, by discoideus rotating sword
The various effects that 1B is obtained are more than the various effects obtained by discoideus rotating sword 1A.
(embodiment 4)
(c) and Fig. 2 of reference picture 1 are to discoideus rotating sword 1B, discoideus involved by manufacture embodiments of the invention 3
The manufacture method of rotating sword illustrates.From preparation abrasive particle 6, from biological fibrous member (for example, cellulose Nanowire
Dimension) 7, the process of the process of aggregate 8 and resin material to metering these materials it is identical with the situation of embodiment 2.
Then, by the way that abrasive particle 6, fibrous member 7 and aggregate 8 are dissolved in solvent to make dispersion.In other words,
By the way that the material beyond resin material is dissolved in solvent to make dispersion.As solvent, water class solvent, alcohol can be used
Class solvent etc..As the material being dissolved in solvent, adhesive and dispersant can be added, can also be added a small amount of powdered
Resin material.In the dispersion produced, preferably the ratio (fit rate) of fibrous member 7 is more than 30 volume % and is 80
Below volume %.In the dispersion produced, fiber possessed by fibrous member 7, which turns into, is wound in abrasive particle 6, aggregate 8
With the state on the material such as adhesive.
Then, it is ferreted out the dispersion produced.In the process, using with the machine with paper machine identical function
Device.Thus, dispersion is shaped to circle.By drying the dispersion for being shaped to circle, discoideus scattered material is made
Material.
Then, liquid resin (resin material with mobility) is made to be impregnated into discoideus disperse using resin impregnator
In material.In the process, the space that the discoideus dispersion of preferred pair is included is depressurized.Thus, by making mobility
Resin is impregnated into discoideus dispersion and makes discoideus mixing material.
Then, as shown in Fig. 2 (c), discoideus mixing material 9B is housed in shaping mould 10.Due to following process with
The process illustrated in embodiment 2 is identical, therefore omits the explanation relevant with these processes.
The manufacture method of discoideus rotating sword according to involved by embodiment 4, can manufacture the plectane involved by embodiment 3
Shape rotating sword 1B.Furthermore it is possible to the effect for obtaining bringing with the manufacture method as the discoideus rotating sword involved by embodiment 2 is same
The effect of sample.
(embodiment 5)
Reference picture 3, the topping machanism involved by embodiments of the invention 5 is illustrated.Topping machanism 25 shown in Fig. 3
At least there is receiving module 26, cutting module 27 and send out module 28.Receiving module 26, cutting module 27 and submitting module 28 edge
X-direction arrangement shown in Fig. 3 (a), and be fixed to one another.
Receiving module 26 and cutting module 27 can load and unload.Cutting module 27 and submitting module 28 can load and unload.Other are cut
Cutting module can load and unload relative to cutting module 27.Therefore, first, it can be loaded and unloaded between receiving module 26 and cutting module 27
Other cutting modules.Second, other cutting modules can be loaded and unloaded between cutting module 27 and submitting module 28.
Receiving module 26 cuts object 29 from the external reception of topping machanism 25.Module 27 is cut to being connect by receiving module 26
The cutting object 29 received is cut.Cutting module 27 is able to carry out the part that through-thickness is carried out to cutting object 29 and cut
Cut the complete cutting that (hemisection) and through-thickness are carried out to cutting object 29 and (cut) the two cuttings entirely.
Send out module 28 and receive product group 30 from cutting module 27, the product group 30 is to carry out singualtion to cutting object 29
And the product P made aggregate.Product group 30 is incorporated in pallet 31.The pallet 31 for being accommodated with product group 30 is sent to
The outside of topping machanism 25.The camera 32 being optically inspected to each product P can also be provided in module 28 is sent out.
Cutting module 27 has mandrel (rotating mechanism) 33.Mandrel 33 has the servomotor 35 for holding rotary shaft 34.
Any rotating sword being provided with rotary shaft 34 in discoideus rotating sword 1A or discoideus rotating swords 1B.Rotating sword 1A, 1B exists
Face internal rotation comprising the Y-direction in figure and Z-direction.
Cutting module 27 has the workbench (fixed mechanism) 36 of the platform as fixed cutting object 29.As temporary transient fixed
Cut the mechanism of object 29 one, the bonding sheet being pasted onto on the upper surface of workbench 36 can be used.
Cutting module 27, which has, to be used to make workbench 36 and mandrel 33 relatively move the rotating part 37 of (rotation).Workbench 36
It is installed on rotating part 37.The motor being for example made up of servomotor is provided with the lower section of rotating part 37 (not scheme
Show).Rotating part 37 is fixed in the rotary shaft of servomotor.By the rotation of servomotor, installed in rotating part 37
On workbench 36 rotated along θ directions.
Cutting module 27 has the travel mechanism 38 for being used for making workbench 36 and the relative movement of mandrel 33.Cut module 27
Such as there is servomotor 39, the ball-screw 40 being connected in the rotary shaft of servomotor and be engaged in ball-screw 40
Ball nut (not shown).Travel mechanism 38 is installed on ball nut.By driving servomotor, the edge of workbench 36
Y-direction moves.By setting and same travel mechanism of travel mechanism 34 (not shown), workbench 36 and the edge of mandrel 33 can be made
X-direction and Z-direction relative movement.
Topping machanism 25 has control unit CTL.Control unit CTL is arranged in receiving module 26.Can also be in other modules
Middle setting control unit CTL.Control unit CTL at least controls discoideus rotating sword 1A or discoideus rotating swords 1B direction of rotation and turned
Number and the relative movement between workbench 36 and mandrel 33 and translational speed (include rotation when mobile.It is same as below).
It can be loaded and unloaded between receiving module 26 and cutting module 27 or between cutting module 27 and submitting module 28
Functional module with specific function.Specific function is clear to be that object is carried out in addition to above-mentioned cutting with product group 30
Wash, dry, product P measurement or inspection etc..Specific function can also be with cutting after the cutting object 29 before cutting or cutting
Cut the grinding (grinding) that object (product group 30 as product P aggregate) is object.It is multiple that functional module can perform these
At least one function in function.Receiving module 26, cutting module 27 and submitting module 28 can also be included in functional module.
Specific function can also be the cutting function carried out using mechanism beyond discoideus rotating sword 1A, 1B.By using
Cutting mechanism with these cutting functions, it can carry out for example using the cutting of water jet, utilize the sandblasting using abrasive particle
Cutting, the cutting using fret saw, cutting using laser etc..By combine these cutting mechanisms and discoideus rotating sword 1A,
1B, cutting object 29 can be cut along by the line that line segment and curve combination form.This cutting is deposited in manufacture such as SD
Card storage etc. have formed by line segment and curve combination shape product when it is useful.
Fig. 3 (b) represents the functional module 41 with cleaning function and functions/drying.Functional module 41 is preferably inserted into simultaneously
Between cutting module 27 and submitting module 28.
Functional module 41, which has, is cleaned and dried mechanism 42.Being cleaned and dried mechanism 42 has cleaning part 43 and drying section 44.
The cleaning fluid injection equipment for jet cleaning liquid is provided with cleaning part 43.Swaging machine can also be provided with cleaning part 43
Structure, the scrubbing mechanism come the upper surface of wipe product group using the sponge containing cleaning fluid.Can also be parallel in cleaning part 43
Injection equipment and scrubbing mechanism are set.The gas injection mechanism for spraying clean gas is provided with drying section 44.Fig. 3's
(b) functional module 41 shown in also has photograph on the basis of the cleaning function of cleaning part 43 and the functions/drying of drying section 44
The audit function of machine 32.
Fig. 3 (c) represents the functional module 45 with grinding (grinding) function.Functional module 45 is inserted into and is arranged on and connects
Receive between module 26 and cutting module 27 or between cutting module 27 and submitting module 28.In order to shorten in cutting module 27
Cutting time, preferably inserted between receiving module 26 and cutting module 27 and functional module 45 is installed.According to the structure, cut
Object 29 is cut after the grinding in via functional module 45 is thinned, the singualtion via the cutting in cutting module 27.
Grinding mechanism 46 is provided with functional module 45.Grinding mechanism 46 has the abrasive grinding wheel 47 that can be rotated.It is logical
Cross using the abrasive grinding wheel 47 that can be rotated possessed by grinding mechanism 46, can be to potting resin possessed by encapsulation metacoxal plate
Upper surface and the upper surface of semiconductor chip etc. be ground.Thereby, it is possible to the product P being made up of electronic unit etc. is thinned.
Thickness measure mechanism 48 can also be provided with functional module 45., can in cutting process or after machining
The upper surface of potting resin to be ground or semiconductor are measured using shift sensor 49 possessed by thickness measure mechanism 48
The position of the short transverse (Z-direction) of the upper surface of chip etc..Functional module 45 has grinding function and the change of abrasive grinding wheel 47 concurrently
The thickness-measuring function of level sensor 49.
Topping machanism 25 involved by embodiment 5 uses any rotation in discoideus rotating sword 1A or discoideus rotating swords 1B
Turn sword to cut cutting object 29.Accordingly, it is capable to access the effect same with the effect illustrated in embodiment 1.
In addition, the topping machanism 25 according to involved by embodiment 5, can obtain following effect.First, in manufacture cutting dress
After putting 25 or after topping machanism 25 is installed to user factory, tool can be set up afterwards in topping machanism 25 as needed
There is the functional module of cutting function.It can also increase afterwards in topping machanism 25 after user begins to use topping machanism 25
Setting tool has the functional module of cutting function.Therefore, it is possible to increase cutting cutting object 29 in topping machanism 25 afterwards
Ability.
Second, can be according to need after topping machanism 25 is manufactured or after topping machanism 25 is installed to user factory
To increase the functional module with function beyond cutting afterwards in topping machanism 25.In user cutting can also be begun to use to fill
After putting 25, increase has the functional module of function beyond cutting afterwards in topping machanism 25.Therefore, it is possible in topping machanism
Increase the function beyond the cutting in topping machanism 25 in 25 afterwards.
In addition, the cutting object 29 described in embodiment described 1~5 includes circuit board, the circuit board so far
In multiple regions formed with the clathrate for including circuit respectively.Circuit board can be the semiconductor being made up of silicon or carborundum etc.
Substrate (semiconductor wafer).These cutting objects have substantially round flat shape.
Cutting object includes semiconductor crystal wafer (semiconductor wafer), formed with distinguishing in the semiconductor crystal wafer
Multiple regions of the clathrate of circuit are included, and the one side of the semiconductor crystal wafer is by resin-encapsulated.In the semiconductor crystal wafer
Can also be formed with overshooting shape electrode or electric wiring etc. on simultaneously.
Cutting object 29 includes plate-shaped member, formed with having multiple areas of functional clathrate respectively in the plate-shaped member
Domain.Plate-shaped member can also be respectively formed with the plate-shaped member of microlens array in multiple regions.Plate-shaped member can also be
The plate-shaped member of light guide plate is respectively formed with multiple regions.In these cases, the function that multiple regions have respectively is light
Optically focused, diffusion and leaded light etc. optical function.
The encapsulation metacoxal plate of one as cutting object 29 has：Circuit board；Multiple shaped like chips parts, are installed in electricity
In multiple regions of clathrate possessed by the plate of road；And potting resin, be formed as tabular in a manner of covering multiple regions in the lump.
Circuit board include be made up of copper, iron class alloy etc. lead frame (lead frame), glass epoxide laminate, with cover copper polyamides Asia
Amine film etc. is the printed base plate (printed circuit board (PCB) of base material；Printed Wiring Board).Circuit board include with aluminum oxide,
Carborundum or sapphire etc. is the ceramic substrate of base material, using metals such as copper or aluminium as the Metal base substrate of base material, with polyimides
Film is film base substrate of base material etc..
As the overall shape of the encapsulation metacoxal plate of cutting object 29 1, representational is manufacture IC, surface installing type
Tabular (tabular) when transistor or surface-mount capacitor etc..Not limited to this, the overall shape of resin-encapsulated body 1 also may be used
To be that there is shape of multiple projections that function is played as convex lens etc. when manufacturing optical-semiconductor element.
Shaped like chips part includes respectively shaped like chips, semiconductor integrated circuit (semiconductor integrated
circuit；IC), optical-semiconductor element, transistor, diode, quartz crystal, wave filter, capacitor, inductor, resistance,
The electronic unit of thermistor and sensor etc..Shaped like chips part includes microelectromechanical systems (MEMS：Micro Electro
Mechanical Systems) etc. mechanism part.A shaped like chips part can be installed in a region in a substrate,
Multiple shaped like chips parts can be installed.The multiple shaped like chips parts of installation in a region can be identical type, also may be used
To be variety classes.As potting resin, for example, can be used epoxy resin or silicones etc. by thermosetting resin hardening and
Into hardening resin.
In embodiments, workbench 36 is made to be moved along the X-direction in figure, Y-direction and Z-direction.Instead of this, can also make
The mandrel 33 for being provided with discoideus rotating sword 1A, 1B moves along the X-direction in figure, Y-direction and Z-direction.Further, it is also possible to make work
Making platform 36 and mandrel 33, the two are moved along the X-direction in figure, Y-direction and Z-direction.According to these forms, work can also be made
Platform 36 and mandrel 33 in X direction, Y-direction and Z-direction relative movement.
The material of object 29 can also be cut according to construction or the combination of the material of object 29 is cut according to construction, changed
Workbench 36 and mandrel 33 in X direction, the speed of Y-direction and Z-direction relative movement.
As the mode being temporarily fixed to cutting object 29 on workbench 36, cutting object 29 can be adsorbed and worked
On the upper surface of platform 36, and without using adhesive tape.It is heavy with each boundary line as part to be cut off when in this case, to overlook
Folded mode, in groove of the top of workbench 36 formed with the peripheral part 4 for housing discoideus rotating sword 1A, 1B.
In the embodiment illustrated so far, using the fibrous member 7 from plant comprising cellulose, to make
To be distributed to the fibrous member 7 from biology in the resin portion 5 being made up of hardening resin.It can be used from animal
The fibrous member from plant is replaced with hydrophilic fibrous member 7, to be used as the threadiness from biology
Part 7.In other words, in discoideus rotating sword 1A, 1B, fibrous member can also be derived from the fibrous member of animal.
, can as one of the fibrous member 7 from animal being distributed in the resin portion 5 being made up of hardening resin
Enumerate the material comprising chitin or chitosan.Chitin or the organ that chitosan is crust or cuttlefish included in crab or shrimp
Etc. the natural polysaecharides in many biologies (with reference to the webpage of foregoing Shan Ye Machinery Co., Ltd.s).According to what is illustrated so far
Manufacture method, the discoideus rotating sword with illustrating in embodiment 1,3 can be manufactured using the fibrous member 7 from animal
1A, 1B same rotating sword.
The present invention is not limited to above-mentioned each embodiment.Without departing from the scope of the subject in the invention, the present invention can root
Changed according to needing any and appropriately combined or optionally use each structural element.For example, it is also possible to using cutting
The structure of two mandrels (rotating mechanism) 33 is combined in cutting module 27 possessed by device 25 to a workbench 36.Can also
After constructing cutting mechanism to one mandrel (rotating mechanism) 33 of combination of workbench 36, had in a topping machanism 25
Multigroup (for example, two groups) cutting mechanism is set in a cutting module 27 having.
Description of reference numerals
The discoideus rotating sword of 1A, 1B
2 circular holes
3 side surface parts
4 peripheral parts
5 resin portions (hardening resin)
6 abrasive particles
7 fibrous resins
8 aggregates
The discoideus mixing material of 9A, 9B
10 shaping moulds
11 times moulds
Mould on 12
13 recesses
14 convex portion upward
15 convex portions directed downwardly
16 heating furnaces
17 outer parts
18 heating parts
19
20 supporting parts
21 lifting units
22 heaters
23 openings
24 upper members
25 topping machanisms
26 receiving modules
27 cutting modules
28 send out module
29 cutting objects
30 product groups
31 pallets
32 cameras
33 mandrels (rotating mechanism)
34 rotary shafts
35th, 39 servomotor
36 workbench (fixed mechanism)
37 rotating parts
38 travel mechanisms
40 ball-screws
41st, 45 functional module
42 are cleaned and dried mechanism
43 cleaning parts
44 drying sections
46 grinding mechanisms
47 abrasive grinding wheels
48 thickness measure mechanisms
49 shift sensors
C centers
CTL control units
P products
Claims (20)
1. a kind of discoideus rotating sword, for cutting cutting object, the discoideus rotating sword includes：
Hardening resin, harden and be molded through resin material；
Abrasive particle, it is dispersed in the hardening resin；With
From the fibrous member of biology, it is dispersed in the hardening resin,
The hardening resin is by institute in the state of being dispersed in the abrasive particle and the fibrous member in the resin material
The hardening resin stated resin material hardening and be molded is formed.
2. discoideus rotating sword according to claim 1,
The ratio of the fibrous member included in the discoideus rotating sword be more than 0.5 volume % and 30 volume % with
Under.
3. discoideus rotating sword according to claim 1,
The ratio of the fibrous member included in the discoideus rotating sword be more than 30 volume % and for 80 volume % with
Under.
4. discoideus rotating sword according to claim 1,
The fibrous member derives from plant.
5. discoideus rotating sword according to claim 4,
The fibrous member includes cellulose.
6. discoideus rotating sword according to claim 1,
The fibrous member derives from animal.
7. discoideus rotating sword according to claim 6,
The fibrous member includes chitin or chitosan.
8. discoideus rotating sword according to claim 1,
The cutting object is formed with having the plate-shaped member in the multiple regions of functional respectively.
9. discoideus rotating sword according to claim 1,
The cutting object is the circuit board formed with the multiple regions for including circuit respectively.
10. discoideus rotating sword according to claim 1,
The cutting object is to carry out resin-encapsulated formed with the multiple regions for including circuit respectively and using potting resin
Circuit board.
11. a kind of topping machanism, including：
Rotary shaft, for fixed disc shape rotating sword；
Rotating mechanism, for rotating the rotary shaft；
Fixed mechanism, object is cut for fixed；With
Travel mechanism, for relatively moving the rotating mechanism and the fixed mechanism,
The discoideus rotating sword is the discoideus rotating sword described in any one of claim 1 to 10.
12. topping machanism according to claim 11,
With two rotating mechanisms, and there are multiple travel mechanisms.
13. topping machanism according to claim 11,
With two fixed mechanisms, and there are multiple travel mechanisms.
14. topping machanism according to claim 11, including：
Module is cut, at least with the rotary shaft, the rotating mechanism, the fixed mechanism and the travel mechanism；With
Control unit, the operation of the cutting module is at least controlled,
The cutting module can load and unload relative to other functional modules with specific function,
The specific function includes at least one function in cutting, clean, dry, measure, check and grinding.
15. a kind of manufacture method of discoideus rotating sword, the discoideus rotating sword is used to cut cutting object, the system
Making method includes following process：
Prepare abrasive particle；
Prepare the fibrous member from biology；
Prepare resin material；
By the way that at least the abrasive particle and the fibrous member are distributed in the resin material to make mixing material；
In the state of the abrasive particle and the fibrous member are distributed in the resin material, by rolling the mixing material
Expect and make tabular mixing material；
Discoideus mixing material is made by tabular mixing material described in punching press；
The discoideus mixing material is fitted into shaping mould；
Heated while by being pressurizeed to the discoideus mixing material being fitted into the shaping mould, so that the resin
Material hardening and be molded hardening resin, be thus molded discoideus products formed；
The discoideus products formed is cooled down；With
The discoideus rotating sword being made up of the discoideus products formed is taken out from the shaping mould.
16. the manufacture method of discoideus rotating sword according to claim 11,
In the process for making the mixing material, the ratio for the fibrous member that will be contained in the mixing material is set
For more than 0.5 volume % and below 30 volume %.
17. a kind of manufacture method of discoideus rotating sword, the discoideus rotating sword is used to cut cutting object, the system
Making method includes following process：
Prepare abrasive particle；
Prepare the fibrous member from biology；
Prepare the resin material with mobility；
By the way that at least the abrasive particle and the fibrous member are distributed in solvent to make dispersion；
In the state of the abrasive particle and the fibrous member are distributed in the solvent, it is ferreted out the dispersion and makes
Discoideus dispersion；
Dry the discoideus dispersion；
By making the resin material be impregnated into the dried discoideus dispersion to make discoideus mixing material；
The discoideus mixing material is fitted into shaping mould；
Heated while by being pressurizeed to the discoideus mixing material being fitted into the shaping mould, so that the resin
Material hardening and be molded hardening resin, be thus molded discoideus products formed；
The discoideus products formed is cooled down；With
The discoideus rotating sword being made up of the discoideus products formed is taken out from the shaping mould.
18. the manufacture method of discoideus rotating sword according to claim 17,
In the process for making the discoideus mixing material, the threadiness that will be contained in the discoideus mixing material
The ratio of part is set to more than 30 volume % and is below 80 volume %.
19. the manufacture method of the discoideus rotating sword according to claim 15 or 17,
Further comprise following process：
The discoideus rotating sword taken out from the shaping mould is placed in set point of temperature atmosphere, with to the discoideus rotation
Turn sword to be heat-treated.
20. the manufacture method of discoideus rotating sword according to claim 19,
The set point of temperature atmosphere is any of air atmosphere, inert atmosphere and hypoxic atmosphere atmosphere.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-195630 | 2016-10-03 | ||
| JP2016195630A JP2018058130A (en) | 2016-10-03 | 2016-10-03 | Discoid rotary blade, cutting device, and manufacturing method for discoid rotary blade |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107891378A true CN107891378A (en) | 2018-04-10 |
Family
ID=61803522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710888393.8A Pending CN107891378A (en) | 2016-10-03 | 2017-09-25 | The manufacture method of discoideus rotating sword, topping machanism and discoideus rotating sword |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2018058130A (en) |
| KR (1) | KR20180037111A (en) |
| CN (1) | CN107891378A (en) |
| TW (1) | TWI657895B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108655966A (en) * | 2017-03-28 | 2018-10-16 | 东和株式会社 | Resin bond wheel, the manufacturing method of resin bond wheel and processing unit (plant) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US11458645B2 (en) | 2018-12-14 | 2022-10-04 | The Gillette Company Llc | Cutting-edge structures and method of manufacturing cutting-edge structures |
| JP7350436B2 (en) * | 2019-08-21 | 2023-09-26 | 株式会社ディスコ | Cutting blade and processing method |
| CN113858305B (en) * | 2021-09-26 | 2022-12-13 | 浙江工业大学之江学院 | Automatic conveyor for sealing materials of yellow rice wine jars |
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| JP2002137160A (en) * | 2000-08-24 | 2002-05-14 | Toray Ind Inc | Pad for polishing, polishing device, and polishing method |
| JP2002113665A (en) * | 2000-10-05 | 2002-04-16 | Mitsubishi Materials Corp | Resin bond grinding wheel |
| TW200302266A (en) * | 2002-01-30 | 2003-08-01 | Saint Gobain Abrasives Inc | Method for making resin bonded abrasive tools |
| CN1562570A (en) * | 2004-03-31 | 2005-01-12 | 黄焕仪 | Method for polishing wheet from sisal fiber |
| CN101096079A (en) * | 2006-06-29 | 2008-01-02 | 四川省三台县固锐实业有限责任公司 | Resin grinding wheel and production method thereof |
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| JP2010274369A (en) * | 2009-05-28 | 2010-12-09 | Teijin Techno Products Ltd | Fiber reinforcement grinding wheel |
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| CN103551984A (en) * | 2013-11-08 | 2014-02-05 | 谢泽 | Preparation method for polishing and grinding all-in-one wheel containing natural fiber, grinding material and thermal-expansion resin hollow microsphere |
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| CN108655966A (en) * | 2017-03-28 | 2018-10-16 | 东和株式会社 | Resin bond wheel, the manufacturing method of resin bond wheel and processing unit (plant) |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI657895B (en) | 2019-05-01 |
| KR20180037111A (en) | 2018-04-11 |
| TW201813767A (en) | 2018-04-16 |
| JP2018058130A (en) | 2018-04-12 |
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Application publication date: 20180410 |