TWI494194B - Cutting blade - Google Patents
Cutting blade Download PDFInfo
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- TWI494194B TWI494194B TW100110937A TW100110937A TWI494194B TW I494194 B TWI494194 B TW I494194B TW 100110937 A TW100110937 A TW 100110937A TW 100110937 A TW100110937 A TW 100110937A TW I494194 B TWI494194 B TW I494194B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
- B24D5/12—Cut-off wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Nonmetal Cutting Devices (AREA)
Description
本發明係關於一種在切斷半導體裝置等的各種電子材料構件時所使用之切斷用刀刃。The present invention relates to a cutting blade used when cutting various electronic material members such as semiconductor devices.
本申請案係主張關於2011年2月28日在日本所申請的日本特願2011-041573號的優先權，並在此援用其內容。The present application claims priority to Japanese Patent Application No. 2011-041573, filed on Jan.
就利用切斷用刀刃所切斷而被製造的電子材料構件而言，除了如半導體元件般從半導體晶圓被切斷並分割後被安裝於引線框架(lead frame)並受樹脂模封(molding)者以外，還例如下文所記者也為人所知。The electronic material member manufactured by the cutting blade is cut and divided from the semiconductor wafer as a semiconductor element, and then mounted on a lead frame and molded by a resin (molding) In addition to, for example, the reporters below are also known.
(a)如被稱為QFN(quad flat non-leaded package；四方形扁平無引腳封裝)，成批地安裝多數個元件於引線框架上並將該等元件一起模封後藉由切斷被分離為單個而製造的電子材料構件。(a) If it is called a QFN (quad flat non-leaded package), a plurality of components are mounted in batches on the lead frame and the components are molded together and then cut by Separate into individual fabricated electronic material components.
(b)如IrDA(Infrared Data Association；紅外線資料通訊協會)規格的光線傳輸模組(以下，僅略稱作IrDa)，具有在形成於玻璃環氧(glass epoxy)樹脂製的基體的通孔(through-hole)的內周表面施加有鎳(Ni)、金(Au)、銅(Cu)等的鍍膜之基板而藉由切斷被分離為單個的電子材料構件。(b) A light transmission module (hereinafter, abbreviated as IrDa) of the IrDA (Infrared Data Association) specification, having a through hole formed in a base made of glass epoxy resin ( A plated film of nickel (Ni), gold (Au), copper (Cu) or the like is applied to the inner peripheral surface of the through-hole, and is separated into individual electronic material members by cutting.
在如此的電子材料構件的切斷中，例如在QFN中係將在模封樹脂中留有間隔所配置的銅等的高延展性的金屬引線框架予以切斷，故在階斷之際的薄刃磨石的進給方向及/或旋轉方向，有容易產生該引線框架等的金屬毛邊(burr)的問題。In the cutting of the electronic material member, for example, in the QFN, a highly ductile metal lead frame in which copper or the like is disposed in a gap in the mold resin is cut, so that the thin blade at the time of the step is cut. The feeding direction and/or the direction of rotation of the grindstone have a problem that metal burrs such as the lead frame are likely to be generated.
就抑制金屬毛邊的產生之切斷用刀刃而言，於下述專利文獻1係提案有在硬化樹脂中添加晶鬚(wisker)者，或者是於專利文獻2係提案有在硬化樹脂中添加預定量之碳化鎢粉末者。In the following Patent Document 1, it is proposed to add a whisker to a cured resin, or Patent Document 2 proposes to add a predetermined amount to a hardened resin. The amount of tungsten carbide powder.
(專利文獻)(Patent Literature)
專利文獻1：日本特開平1-115574號公報Patent Document 1: Japanese Patent Laid-Open No. Hei 1-115574
專利文獻2：日本特開2006-62009號公報Patent Document 2: JP-A-2006-62009
然而，在前文所述之在硬化樹脂中添加了晶鬚之切斷用刀刃及/或添加碳化鎢(WC)粉末之切斷用刀刃中，在硬化樹脂中所添加的晶鬚等係以具有方向性的方式配置，故對於某方向係具有相對較強的耐磨耗性，然對於其他的方向係無法獲得較強的耐磨耗性，就整體而言無法獲得良好的耐磨耗性。However, in the cutting blade in which the whisker is added to the hardened resin and the cutting blade to which the tungsten carbide (WC) powder is added, the whisker added to the cured resin has It is arranged in a directional manner, so it has relatively high wear resistance for a certain direction, but it cannot obtain strong wear resistance for other directions, and overall wear resistance cannot be obtained as a whole.
尤其是在使用刮刀(doctor blade)法所成形之切斷用刀刃中，硬化樹脂中的晶鬚等的排列方向係固定為一方向，異方性會顯著地顯現。In particular, in the cutting blade formed by the doctor blade method, the arrangement direction of whiskers or the like in the cured resin is fixed in one direction, and the anisotropy is remarkably exhibited.
再者，於前文所述之切斷用刀刃中，因為在成形後樹脂的收縮率係朝特定方向變得較大，故就製品而言的尺寸精度會降低，而無法獲得希望的切斷性能。Further, in the cutting blade described above, since the shrinkage ratio of the resin becomes large in a specific direction after the molding, the dimensional accuracy of the product is lowered, and the desired cutting performance cannot be obtained. .
本發明係在如此的背景下所研創者，目的為提供一種謀求緩和在結合部中所添加之填充物(filler)的異方性，並提升耐磨耗性及切斷能性，並且能抑制金屬毛邊的產生之切斷用刀刃。The present invention has been made in view of the circumstances, and an object of the present invention is to provide an agent for alleviating the anisotropy of a filler added in a joint portion, and improving wear resistance and cutting energy, and suppressing A cutting edge for the generation of metal burrs.
本發明之切斷用刀刃，係為呈至少一層以上的層狀之切斷用刀刃，並具備有：結合部；分散配置於前述結合部中的磨粒；以及分散配置於前述結合部中的填充物；並且前述填充物係包含：針狀部從四面體的中心朝各頂點往四方延伸的三維結晶構造之填充物。亦即，前述填充物係包含具有朝四方延伸之複數個針狀部的三維構造的結晶，此三維構造的結晶在將針狀部的各頂點以假想線相互地連結時係成為四面體。The cutting blade according to the present invention is a layer-shaped cutting blade having at least one layer or more, and includes a joint portion, abrasive grains dispersedly disposed in the joint portion, and dispersedly disposed in the joint portion a filler; and the filler includes a filler of a three-dimensional crystal structure in which the needle-like portion extends from the center of the tetrahedron toward the apexes in four directions. In other words, the filler includes a three-dimensional structure having a plurality of needle-like portions extending in a square shape, and the crystals of the three-dimensional structure are tetrahedrons when the apexes of the needle-shaped portion are connected to each other by a virtual line.
依據前文所述構成之切斷用刀刃，係具有針狀部從四面體的中心朝各頂點朝四方延伸之近似於所謂的消波塊(tetrapod)的三維結晶構造之填充物，而這樣的構造之填充物係沒有方向性，不論從哪個方向看去全體的長度及寬度都不會改變。The cutting blade according to the above-described configuration is a filler having a three-dimensional crystal structure in which a needle-like portion extends from the center of the tetrahedron toward each of the vertices and is similar to a so-called tetrapod. The filler has no directionality, and the length and width of the whole are not changed from any direction.
因此，添加有此種填充物之結合部之異方性係經緩和，不管對哪個方向都可以確保大約相同的耐磨耗性，結果係成為耐磨耗性優異者。另外，在成形後的結合部中係可避免朝特定方向的收縮率變高的事態，可謀求就製品而言的尺寸精度的提升。伴隨於此，可提升切斷性能，並且能抑制毛邊的產生。Therefore, the anisotropy of the joint portion to which such a filler is added is alleviated, and it is possible to ensure approximately the same wear resistance in any direction, and as a result, it is excellent in abrasion resistance. Further, in the joint portion after the molding, it is possible to avoid a situation in which the shrinkage ratio in a specific direction is increased, and it is possible to improve the dimensional accuracy of the product. Along with this, the cutting performance can be improved, and the generation of burrs can be suppressed.
於此，前述填充物係除了前述三維結晶構造之填充物之外，還可具有較該三維結晶構造之填充物的硬度更高的粉末狀之填充物。亦即，前述填充物除了如上文所述的三維結晶構造之填充物之外，亦可具有較該三維結晶構造之填充物的硬度更高的粉末狀之填充物。於此種切斷用刀刃中，因為結合部會適當磨耗而時常有新的磨粒露出，藉此確保經過長時間仍可進行良好的切斷。假設在結合部僅有三維結晶構造之填充物，而沒有相較起來硬度較高的粉末狀之填充物時，結合部的磨耗會以必要以上之程度進展，而做為工具的壽命會縮短。於此，就填充物而言，係除了三維結晶構造之填充物之外，也具有較該三維結晶構造之填充物硬度更高的粉末狀之填充物，故能適當抑制結合部的磨耗的進展，藉此，能如前文所述提升切斷性能並抑制毛邊的產生，並亦能謀求長壽命化。Here, the filler may have a powdery filler having a higher hardness than the filler of the three-dimensional crystal structure in addition to the filler of the three-dimensional crystal structure. That is, the filler may have a powdery filler having a higher hardness than the filler of the three-dimensional crystal structure, in addition to the filler of the three-dimensional crystal structure as described above. In such a cutting blade, since the joint portion is appropriately worn, new abrasive grains are often exposed, thereby ensuring good cutting over a long period of time. It is assumed that when there is only a filler of a three-dimensional crystal structure in the joint portion, and there is no powdery filler having a relatively high hardness, the wear of the joint portion progresses to the extent necessary, and the life of the tool is shortened. In this case, in addition to the filler of the three-dimensional crystal structure, the filler has a powdery filler having a higher hardness than the filler of the three-dimensional crystal structure, so that the progress of the abrasion of the joint portion can be appropriately suppressed. Thereby, the cutting performance can be improved and the generation of burrs can be suppressed as described above, and the life can be prolonged.
另外，前述三維結晶構造之填充物之前述針狀部的長度亦可被設定在0.1μm至100μm的範圍。亦即，前述三維構造的結晶之針狀部的長度亦可為0.1μm以上100μm以下。假設當針狀部的長度未滿0.1μm時，則無法確保做為填充物的大小，而變得難以得到屬於添加該填充物時的效果之補強機械性強度的功用。另外，當針狀部的長度超過100μm時，針狀部本身會變得易受到損傷，例如添加到結合部之際或者之後在成形時，針狀部會有折斷或者彎曲的疑慮，而變得難以獲得三維結晶構造的優點。Further, the length of the needle-like portion of the filler of the three-dimensional crystal structure may be set in the range of 0.1 μm to 100 μm. That is, the length of the needle-like portion of the crystal of the three-dimensional structure may be 0.1 μm or more and 100 μm or less. When the length of the needle portion is less than 0.1 μm, it is impossible to ensure the size of the filler, and it becomes difficult to obtain the function of the reinforcing mechanical strength belonging to the effect of adding the filler. In addition, when the length of the needle-shaped portion exceeds 100 μm, the needle-shaped portion itself may become susceptible to damage, for example, when added to the joint portion or after the formation, the needle-like portion may be broken or bent, and become It is difficult to obtain the advantages of a three-dimensional crystal structure.
另外，前述三維結晶構造之填充物亦可由金屬氧化物之結晶構造所構成。亦即，前述三維構造之結晶亦可由金屬氧化物構成。當為金屬氧化物的結晶構造體時，能輕易地獲得前述三維結晶構造者。例如，藉由讓鋅在預定環境氣體中進行氧化熱處理，藉此能輕易地獲得針狀部從四面體的中心朝向各頂點往四方延伸的三維結晶構造者。Further, the filler of the three-dimensional crystal structure may be composed of a crystal structure of a metal oxide. That is, the crystal of the three-dimensional structure may also be composed of a metal oxide. When it is a crystal structure of a metal oxide, the above-mentioned three-dimensional crystal structure can be easily obtained. For example, by subjecting zinc to oxidative heat treatment in a predetermined ambient gas, it is possible to easily obtain a three-dimensional crystal structure in which the acicular portion extends from the center of the tetrahedron toward the apexes.
另外，前述金屬氧化物的結晶構造體之填充物，係除了前述三維結晶構造之填充物之外，還具備有不同於三維結晶構造形狀之填充物；並且該等三維結晶構造之填充物與不同於三維結晶構造的形狀之填充物的體積比亦可為10：90至90：10的範圍。亦即，前述三維構造的結晶與和不同於該三維構造的結晶之形狀的結晶之體積比，係亦可包含於從10對90到90對10的範圍。Further, the filler of the crystal structure of the metal oxide is provided with a filler different from the three-dimensional crystal structure in addition to the filler of the three-dimensional crystal structure; and the filler of the three-dimensional crystal structure is different from The volume ratio of the filler in the shape of the three-dimensional crystal structure may also be in the range of 10:90 to 90:10. That is, the volume ratio of the crystal of the three-dimensional structure to the crystal of the shape different from the crystal of the three-dimensional structure may be included in the range from 10 to 90 to 90 to 10.
金屬氧化物的結晶構造體之填充物大多容易受到損傷者，惟即使例如有於針狀部折斷或類似情形而改變其形狀的情形，只要是三維結晶構造之填充物與不同於三維結晶構造之形狀之填充物的體積比設定為10：90至90：10的範圍，則能充分發揮屬於三維結晶構造之填充物的特徵之緩和異方性的功能。The filler of the crystal structure of the metal oxide is often easily damaged, but if it is changed, for example, in the case where the needle portion is broken or the like, the filler is different from the three-dimensional crystal structure. When the volume ratio of the filler of the shape is set to be in the range of 10:90 to 90:10, the function of the relaxation anisotropy of the features of the filler of the three-dimensional crystal structure can be sufficiently exhibited.
於前述結合部可混入有矽烷耦合劑。在結合部中有碳化鎢等之細微粉末狀之填充物時，該等填充物會有局部性地偏存於結合部中的傾向，然若混入矽烷耦合劑，則該矽烷耦合劑會變為處在這些填充物與結合部之間，藉此，細微粉末狀之填充物局部性的偏存的狀況係被消除，而能使這些填充物均勻地分散配置在結合部中。A decane coupling agent may be mixed in the aforementioned bonding portion. When there is a fine powdery filler such as tungsten carbide in the joint portion, the filler tends to be locally biased in the joint portion, and if the decane coupling agent is mixed, the decane coupling agent becomes Between these fillers and the joint portion, the localized unevenness of the fine powdery filler is eliminated, and the fillers can be uniformly dispersed and disposed in the joint portion.
前述三維結晶構造之填充物的表面係亦可以矽烷耦合劑來塗佈。三維結晶構造之填充物的表面會產生有細微的凹凸，而在該凹凸中之凹處的底部，結合部係難以侵入。然而，當三維結晶構造之填充物的表面預先塗佈有矽烷耦合劑時，三維結晶構造之填充物的表面的浸潤性係受到改善，而會與結合部的樹脂充分的融合。因此，結合部之樹脂會侵入至三維結晶構造之填充物之表面的凹處為止。結果，結合部對三維結晶構造之填充物的保持力會提高，而可避免三維結晶構造之填充物從結合部輕易地脫落的情形。The surface of the filler of the three-dimensional crystal structure may also be coated with a decane coupling agent. The surface of the filler of the three-dimensional crystal structure is formed with minute irregularities, and the joint portion is hard to invade at the bottom of the recess in the unevenness. However, when the surface of the filler of the three-dimensional crystal structure is previously coated with a decane coupling agent, the wettability of the surface of the filler of the three-dimensional crystal structure is improved, and it is sufficiently fused with the resin of the joint portion. Therefore, the resin of the joint portion intrudes into the recess of the surface of the filler of the three-dimensional crystal structure. As a result, the holding force of the joint for the filler of the three-dimensional crystal structure is improved, and the case where the filler of the three-dimensional crystal structure is easily detached from the joint portion can be avoided.
除去磨粒的前述結合部中之前述金屬氧化物的結晶構造體之填充物的體積百分比亦可被設定在1%至40%。The volume percentage of the filler of the crystal structure of the aforementioned metal oxide in the aforementioned bonding portion of the abrasive grains may be set to be 1% to 40%.
此時，若金屬氧化物的結晶構造體之填充物4的體積百分比被設定為1%至40%，則具有能充分發揮金屬氧化物的結晶構造體中三維結晶構造者所具有的功能，也就是能發揮將異方性加以緩和的功能，並且，能謀求耐磨耗性以及切斷性能的提升，並且也能抑制金屬毛邊的產生。In this case, when the volume percentage of the filler 4 of the crystal structure of the metal oxide is set to 1% to 40%, the function of the three-dimensional crystal structure in the crystal structure capable of sufficiently exhibiting the metal oxide is also In addition, it is possible to exert a function of alleviating the anisotropy, and it is possible to improve the wear resistance and the cutting performance, and also to suppress the occurrence of metal burrs.
依據本發明之切斷用刀刃，能緩和結合部中所添加之填充物的異方性，並提升耐磨耗性及切斷能性，並且亦能抑制金屬毛邊的產生。According to the cutting blade of the present invention, the anisotropy of the filler added to the joint portion can be alleviated, the wear resistance and the cutting energy can be improved, and the generation of the metal burrs can be suppressed.
第1圖至第3圖係為顯示本發明的一實施型態者，而第1圖係切斷用刀刃的側面圖，第2圖係顯示於第1圖之切斷用刀刃之薄刃磨粒層的外周緣部之擴大剖面圖，第3圖係顯示第1圖所顯示之實施型態之切斷用刀刃中所使用的氧化鋅之結晶構造體的各種形態之透視圖。1 to 3 are views showing an embodiment of the present invention, and Fig. 1 is a side view of a cutting blade, and Fig. 2 is a thin edge abrasive grain of the cutting blade shown in Fig. 1. An enlarged cross-sectional view of the outer peripheral edge portion of the layer, and Fig. 3 is a perspective view showing various forms of the zinc oxide crystal structure used in the cutting blade of the embodiment shown in Fig. 1.
本實施型態之切斷用刀刃係如第1圖所示，呈現以軸線O為中心的圓形環且厚度為0.05至0.5mm左右的薄片板狀，其本身係如第2圖所示藉由薄刃磨粒層1所形成，並使用於如上文所述的QFN及/或IrDA般在樹脂中具有金屬材料的電子構件材料的切斷。As shown in Fig. 1, the cutting blade of the present embodiment has a circular ring centered on the axis O and has a thickness of about 0.05 to 0.5 mm, which is itself as shown in Fig. 2. It is formed of the thin-bladed abrasive grain layer 1 and cuts off the electronic component material having a metal material in the resin like QFN and/or IrDA as described above.
切斷用刀刃的內徑部係安裝於切斷裝置的主軸，並一邊繞著上述軸線O旋轉一邊朝垂直的方向被送出，藉此利用該薄刃磨粒層1的外周緣部，亦即利用與上述厚度相等的極小寬度之外周表面1A、兩側表面1B的外周側、以及該等外周表面1A與兩側表面1B交叉的圓周狀的兩邊緣部1C，將電子構件材料加以切斷。The inner diameter portion of the cutting blade is attached to the main shaft of the cutting device, and is fed in a vertical direction while rotating about the axis O, whereby the outer peripheral edge portion of the thin blade abrasive layer 1 is utilized. The outer peripheral surface 1A of the extremely small width equal to the above-described thickness, the outer peripheral side of the both side surfaces 1B, and the circumferential both edge portions 1C where the outer peripheral surface 1A and the both side surfaces 1B intersect each other cut the electronic component material.
該薄刃磨粒層1係設為下述構成：在由苯酚(phenol)樹脂及/或聚醯亞胺(polyimide)樹脂等的合成樹脂所構成的樹脂結合劑相(結合部)2中，分別略均勻地分散並保持有鑽石及/或cBN等的磨粒3、由氧化鋅的結晶構造體所構成的填充物4、以及較該等氧化鋅的結晶構造之填充物4硬度更高的例如由碳化鎢(WC)所構成的粉末狀之填充物5。The thin-edged abrasive grain layer 1 has a configuration in which a resin binder phase (bonding portion) 2 composed of a synthetic resin such as a phenol resin and/or a polyimide resin is used. The abrasive grains 3 such as diamond and/or cBN, the filler 4 composed of the crystal structure of zinc oxide, and the filler 4 having a crystal structure higher than the zinc oxide are more uniformly dispersed and held, for example, A powdery filler 5 composed of tungsten carbide (WC).
於此，就由氧化鋅結晶構造體所構成的填充物4而言，係如第3圖(a)至第3圖(d)所示，有各種形狀。亦即，填充物4係包含形狀相異的數個種類的氧化鋅的結晶。Here, the filler 4 composed of the zinc oxide crystal structure has various shapes as shown in FIGS. 3(a) to 3(d). That is, the filler 4 is a crystal containing a plurality of types of zinc oxide having different shapes.
於第3圖(a)中係顯示針狀部4aa從正四面體或單純的四面體的中心朝向各頂點朝四方延伸的三維結晶構造之填充物4a。亦即，顯示於第3圖(a)之填充物4a的結晶係具有朝四方延伸的四根針狀部4aa，並具有當將針狀部4aa的各頂點以假想線相互地連結時呈四面體的三維構造。於第3圖(b)中係顯示在前述三維結晶構造之填充物4a中，四根針狀部4aa之中的一根從根部折斷的形狀之填充物4b。亦即，顯示於第3圖(b)之填充物4b的結晶係具有缺少了朝四方延伸的針狀部4aa之中的一根的三維構造。於第3圖(c)中係顯示在前述三維結晶構造之填充物4a中，四根針狀部4aa之中的兩根從根部折斷的形狀之填充物4c。亦即，顯示於第3圖(c)之填充物4c的結晶係具有缺少了朝四方延伸的針狀部4aa之中的兩根的三維構造。於第3圖(d)中，係顯示形成為板狀之填充物4d。亦即，顯示於第3圖(d)之填充物4d的結晶係具有非以針狀而是以板狀成長的構造。In the third diagram (a), the filler 4a of the three-dimensional crystal structure in which the acicular portion 4aa extends in a square direction from the center of the regular tetrahedron or the simple tetrahedron toward the apexes is shown. In other words, the crystals of the filler 4a shown in Fig. 3(a) have four needle-like portions 4aa extending in four directions, and have four sides when the apexes of the needle-like portions 4aa are connected to each other by an imaginary line. The three-dimensional structure of the body. In the filler (4) of the three-dimensional crystal structure, a filler 4b having a shape in which one of the four needle-like portions 4aa is broken from the root portion is shown in Fig. 3(b). That is, the crystal structure of the filler 4b shown in Fig. 3(b) has a three-dimensional structure in which one of the needle-like portions 4aa extending in a square direction is absent. In the filler (4) of the three-dimensional crystal structure, the filler 4c of the shape in which the two needle-like portions 4aa are broken from the root portion is shown in Fig. 3(c). That is, the crystal system of the filler 4c shown in Fig. 3(c) has a three-dimensional structure in which two of the needle-like portions 4aa extending in a square shape are absent. In Fig. 3(d), the filler 4d formed into a plate shape is shown. In other words, the crystal structure of the filler 4d shown in Fig. 3(d) has a structure in which it grows in a plate shape instead of a needle shape.
此外，亦有前述三維結晶構造之填充物4a之針狀部4aa的尖端部分折斷，而僅為針狀部形狀之填充物。亦即，從填充物4a掉落的針狀部做為結晶而存在。Further, the tip end portion of the needle-like portion 4aa of the filler 4a of the three-dimensional crystal structure is also broken, and is only a filler of a needle-like shape. That is, the needle-shaped portion dropped from the filler 4a exists as crystals.
針狀部從前述正四面體或僅是四面體的中心朝向各頂點朝四方延伸的三維結晶構造之填充物4a，係為鋅在預定環境氣體中進行氧化熱處理藉以獲得的單結晶體。另外，該填充物4a係具有下述性質：針狀部4aa的平均纖維長為10μm、比重為5.78、容積比重為0.1、溶點為200℃、昇華點為1720℃、以及熱膨脹係數為3.18×10-6 ℃。The filler 4a of the three-dimensional crystal structure in which the acicular portion extends from the center of the regular tetrahedron or only the tetrahedron toward the apexes in a four-dimensional crystal structure is a single crystal body obtained by oxidizing heat treatment of zinc in a predetermined ambient gas. Further, the filler 4a has the following properties: the needle portion 4aa has an average fiber length of 10 μm, a specific gravity of 5.78, a specific gravity of 0.1, a melting point of 200 ° C, a sublimation point of 1720 ° C, and a thermal expansion coefficient of 3.18 × 10 -6 °C.
於此，前述三維結晶構造之填充物4a之針狀部4aa的長度係被設為0.1μm至100μm的範圍。Here, the length of the needle-like portion 4aa of the filler 4a of the three-dimensional crystal structure is set to be in the range of 0.1 μm to 100 μm.
另外，由前述氧化鋅的結晶構造體所構成之填充物4之中，前述三維結晶構造之填充物4a與由氧化鋅的結晶構造體所構成的其他形狀之填充物(4b、4c、4d)之體積比係被設定在10：90到90：10的範圍。Further, among the filler 4 composed of the crystal structure of the zinc oxide, the filler 4a of the three-dimensional crystal structure and the filler of other shapes (4b, 4c, 4d) composed of the crystal structure of zinc oxide. The volume ratio is set in the range of 10:90 to 90:10.
另外，於前述切斷用刀刃中，除去磨粒3的樹脂結合劑相2中之前述金屬氧化物的結晶構造體之填充物4的體積比率係被設定在1%至40%，較佳係設定於10%至20%。Further, in the cutting blade, the volume ratio of the filler 4 of the crystal structure of the metal oxide in the resin binder phase 2 of the abrasive grains 3 is set to be 1% to 40%, preferably Set at 10% to 20%.
另外，由前述碳化鎢所構成的粉末狀之填充物5，平均粒徑為0.1μm至5μm左右，莫氏硬度為大約8，與莫氏硬度為5至6左右之前述三維結晶構造之填充物4a相比係有更高的硬度。Further, the powdery filler 5 composed of the above-mentioned tungsten carbide has a mean particle diameter of about 0.1 μm to 5 μm, a Mohs hardness of about 8, and a filler having a Mohs hardness of about 5 to 6 in the above-described three-dimensional crystal structure. 4a has a higher hardness than the system.
上述構成之切斷用刀刃係以下文所述的方式製作。The cutting blade having the above configuration is produced in the following manner.
首先，例如秤量預定量之苯酚樹脂，並加入IPA溶劑以使苯酚樹脂溶解。接著，添加所溶解的樹脂溶液、矽烷耦合(silane coupling)劑、以及由氧化鋅的結晶構造體所構成之填充物4及/或較由三維結晶構造所構成之填充物4硬度更高的例如由碳化鎢所構成的粉末狀之填充物5，並藉由刮刀法成形例如厚度0.3mm的薄片。First, for example, a predetermined amount of a phenol resin is weighed, and an IPA solvent is added to dissolve the phenol resin. Next, the dissolved resin solution, the silane coupling agent, and the filler 4 composed of the crystal structure of zinc oxide and/or the filler 4 composed of the three-dimensional crystal structure are added with higher hardness, for example. A powdery filler 5 composed of tungsten carbide is formed into a sheet having a thickness of, for example, 0.3 mm by a doctor blade method.
接著，使該薄片乾燥後，從該薄片削出直徑70mm之刀刃圓板狀，並將該圓板狀刀刃以熱壓(hot press)壓縮成形。成形條件係為熱板200℃、180℃×30分鐘、壓力12.7MPa。亦即，使用加熱至200℃的熱板，並對放入模具的刀刃在180℃的溫度下讓12.7MPa的壓力作用30分鐘。Next, after the sheet was dried, a blade having a diameter of 70 mm was cut out from the sheet, and the disk-shaped blade was compression-molded by hot press. The molding conditions were 200 ° C, 180 ° C × 30 minutes, and a pressure of 12.7 MPa. That is, a hot plate heated to 200 ° C was used, and the blade placed in the mold was allowed to apply a pressure of 12.7 MPa at a temperature of 180 ° C for 30 minutes.
對如此所獲得的圓板狀刀刃，藉由將外周部及內周部加以切斷或研削加工使其成為預定的尺寸，以能獲得期望形狀之切斷用刀刃。The disk-shaped blade thus obtained is cut into a predetermined size by cutting or grinding the outer peripheral portion and the inner peripheral portion, so that a cutting blade having a desired shape can be obtained.
在如此構成之切斷用刀刃中，係具有填充物4，而該填充物係含有針狀部從四面體的中心朝各頂點朝四方延伸之近似所謂消波塊的三維結晶構造之填充物4a，這樣的構造之填充物4a係沒有方向性，不論從哪個方向看去全體的長度及寬度都不會改變。In the cutting blade configured as described above, the filler 4 includes a filler 4a having a three-dimensional crystal structure of a so-called chopper block extending from the center of the tetrahedron toward the apexes toward the apexes. The filler 4a of such a structure has no directivity, and the length and width of the entire body are not changed regardless of the direction.
因此，添加有此種填充物4a之樹脂結合劑相2係具有經緩和之異方性，不管對哪個方向都可以確保大約相同的耐磨耗性，結果成為耐磨耗性優異者。另外，在成形後的樹脂結合劑相2中係可避免朝某個方向的收縮率變高的情形，可謀求就製品而言的尺寸精度的提升。伴隨於此，可提升切斷性能，並且能抑制毛邊的產生。Therefore, the resin binder phase 2 to which the filler 4a is added has an attenuated anisotropy, and it is possible to ensure approximately the same abrasion resistance in any direction, and as a result, it is excellent in abrasion resistance. Further, in the resin binder phase 2 after molding, it is possible to avoid a case where the shrinkage ratio in a certain direction is increased, and it is possible to improve the dimensional accuracy of the product. Along with this, the cutting performance can be improved, and the generation of burrs can be suppressed.
於此，前述填充物係除了氧化鋅的結晶構造之填充物4以外，也可使用較該結晶構造之填充物硬度更高的粉末狀之填充物5。於此種切斷用刀刃中，因為樹脂結合劑相2的適當磨耗而時常有新的磨粒3露出，藉此確保經過長時間仍可進行良好的切斷。Here, the filler may be a powdery filler 5 having a hardness higher than that of the filler of the crystal structure, in addition to the filler 4 of the crystal structure of zinc oxide. In such a cutting blade, since the resin binder phase 2 is properly worn, new abrasive grains 3 are often exposed, thereby ensuring good cutting over a long period of time.
假設在樹脂結合劑相2僅有氧化鋅的結晶構造之填充物4，而沒有由相較起來硬度較高的碳化鎢所構成的粉末狀之填充物5時，樹脂結合劑相2的磨耗會以必要以上之程度進展，做為切斷用刀刃的壽命則會縮短。於此，就填充物而言，係除了氧化鋅的結晶構造之填充物4之外，也使用較該結晶構造之填充物4硬度更高的粉末狀之填充物碳化鎢，故能適當抑制樹脂結合劑相2的磨耗的進展，藉此，能如前文所述提升切斷性能並抑制毛邊的產生，而能謀求長壽命化。Assuming that the resin binder phase 2 has only the filler 4 of the crystal structure of zinc oxide, and there is no powdery filler 5 composed of tungsten carbide having a relatively high hardness, the resin binder phase 2 is abraded. If it progresses more than necessary, the life of the cutting blade will be shortened. Here, in the case of the filler, in addition to the filler 4 of the crystal structure of zinc oxide, a powdery filler tungsten carbide having a higher hardness than the filler 4 of the crystal structure is used, so that the resin can be appropriately suppressed. By the progress of the abrasion of the binder phase 2, the cutting performance can be improved and the generation of burrs can be suppressed as described above, and the life can be extended.
另外，前述三維結晶構造之填充物4a係被設定為前述針狀部4aa的長度為0.1μm至100μm的範圍。藉此，可充分發揮屬於該填充物的特有的效果之緩和異方性的效果。假設當針狀部4aa的長度未滿0.1μm時，則無法確保做為填充物的大小，並無法獲得屬於添加該填充物時的效果之補強機械性強度的功用。另外，當針狀部4aa的長度超過100μm時，針狀部4aa本身會變得易受到損傷，例如添加到樹脂結合劑相2之際或者在成形時，針狀部4aa會有折斷或者彎曲的疑慮，而變得無法獲得三維結晶構造的優點。Further, the filler 4a of the three-dimensional crystal structure is set such that the length of the needle-like portion 4aa is in the range of 0.1 μm to 100 μm. Thereby, the effect of alleviating the anisotropy of the specific effect of the filler can be fully utilized. When the length of the needle portion 4aa is less than 0.1 μm, the size of the filler cannot be ensured, and the function of the reinforcing mechanical strength belonging to the effect of adding the filler cannot be obtained. Further, when the length of the needle-like portion 4aa exceeds 100 μm, the needle-like portion 4aa itself becomes susceptible to damage, for example, when added to the resin binder phase 2 or at the time of molding, the needle-like portion 4aa may be broken or bent. Doubt, and become unable to obtain the advantages of three-dimensional crystal structure.
另外，前述三維結晶構造之填充物4a係由金屬氧化物的結晶構造體所構成。當前述三維構造的結晶為金屬氧化物的結晶構造體時，能輕易地獲得前述三維結晶構造者。例如，如前文所述，藉由讓鋅在預定環境氣體中進行氧化熱處理，藉此能輕易地獲得針狀部從四面體的中心朝向各頂點往四方延伸的三維結晶構造者。Further, the filler 4a of the three-dimensional crystal structure is composed of a crystal structure of a metal oxide. When the crystal of the three-dimensional structure is a crystal structure of a metal oxide, the three-dimensional crystal structure can be easily obtained. For example, as described above, by subjecting zinc to oxidative heat treatment in a predetermined ambient gas, it is possible to easily obtain a three-dimensional crystal structure in which the acicular portion extends from the center of the tetrahedron toward the apexes.
於此，金屬氧化物的結晶構造體之填充物4多為容易受到損傷者，例如有相當於針狀部折斷之其整體形狀改變的情形。然而，於此係設定為三維結晶構造之填充物4a與由金屬氧化物的結晶構造體所構成的其他形狀之填充物的體積比為10：90至90：10的範圍，而若在該範圍內，則能充分發揮屬於三維結晶構造之填充物4a的特徵之緩和異方性的功能。Here, the filler 4 of the crystal structure of the metal oxide is often susceptible to damage, and for example, the overall shape of the needle-shaped portion is broken. However, the volume ratio of the filler 4a set to the three-dimensional crystal structure and the other shape of the crystal structure composed of the metal oxide is in the range of 10:90 to 90:10, and if it is in the range In the inside, the function of mitigating anisotropy of the features of the filler 4a belonging to the three-dimensional crystal structure can be fully utilized.
另外，雖然在樹脂結合劑相2中分散配置有WC之細微粉末狀填充物5，然這些細微粉末狀之填充物5通常係有偏存於樹脂結合劑相2的局部區域的傾向。然而，於此，在樹脂結合劑相2中混入矽烷耦合劑，而該矽烷耦合劑會處在這些細微粉末狀填充物5與樹脂結合劑相2之間，藉此將細微粉末狀填充物5的局部性偏存的狀況消除，而能使這些細微粉末狀填充物5均勻地分散配置在樹脂結合劑相2中。In addition, although the fine powdery filler 5 of WC is dispersed and disposed in the resin binder phase 2, the fine powdery filler 5 tends to be partially localized in the resin binder phase 2. However, here, a decane coupling agent is mixed in the resin binder phase 2, and the decane coupling agent is placed between the fine powdery filler 5 and the resin binder phase 2, whereby the fine powdery filler 5 is obtained. The state of partial localization is eliminated, and these fine powdery fillers 5 can be uniformly dispersed and disposed in the resin binder phase 2.
另外，前述三維結晶構造之填充物4a的表面較佳係以矽烷耦合劑預先做塗覆處理。這是因為以下的理由。Further, the surface of the filler 4a of the above-described three-dimensional crystal structure is preferably subjected to a coating treatment in advance with a decane coupling agent. This is because of the following reasons.
在三維結晶構造之填充物4a的表面產生有細微的凹凸，而在該凹凸中之凹處的底部，樹脂結合劑相2係難以侵入。然而，當三維結晶構造之填充物4a的表面預先塗佈有矽烷耦合劑時，三維結晶構造之填充物4a的表面的浸潤性係受到改善，而會變得與樹脂結合劑相2充分的融合，因此，樹脂結合劑相2會侵入到三維結晶構造之填充物4a的表面的凹處的底部為止。結果，對樹脂結合劑相2的三維結晶構造之填充物4a的保持力會提高，而可避免三維結晶構造之填充物4a從樹脂結合劑相2輕易地脫落的情形。Fine irregularities are formed on the surface of the filler 4a having a three-dimensional crystal structure, and the resin binder phase 2 is hard to enter at the bottom of the recess in the unevenness. However, when the surface of the filler 4a of the three-dimensional crystal structure is previously coated with a decane coupling agent, the wettability of the surface of the filler 4a of the three-dimensional crystal structure is improved, and the fusion with the resin binder phase 2 is obtained. Therefore, the resin binder phase 2 intrudes into the bottom of the recess of the surface of the filler 4a of the three-dimensional crystal structure. As a result, the holding force of the filler 4a of the three-dimensional crystal structure of the resin binder phase 2 is improved, and the case where the filler 4a of the three-dimensional crystal structure is easily detached from the resin binder phase 2 can be avoided.
此外，就以矽烷耦合劑預先進行塗佈三維結晶構造之填充物4a的表面的方法而言，係採用為人所知的乾式處理法或漿液(slurry)法。Further, a method of applying a surface of the filler 4a of a three-dimensional crystal structure in advance with a decane coupling agent is a dry treatment method or a slurry method known in the art.
另外，於本實施形態中，不含磨粒的樹脂結合劑相2中，前述金屬氧化物的結晶構造體之填充物4的體積比率係被設定為1%至40%。若如此地將金屬氧化物的結晶構造體之填充物4的體積比率設定為1%至40%，則能充分發揮金屬氧化物的結晶構造體中之三維結晶構造者所具有的功能，也就是將異方性加以緩和的功能，且能謀求耐磨耗性以及切斷性能的提升，並且也能抑制金屬毛邊的產生。Further, in the present embodiment, in the resin binder phase 2 containing no abrasive grains, the volume ratio of the filler 4 of the crystal structure of the metal oxide is set to be 1% to 40%. When the volume ratio of the filler 4 of the crystal structure of the metal oxide is set to 1% to 40%, the function of the three-dimensional crystal structure in the crystal structure of the metal oxide can be sufficiently exhibited, that is, The function of alleviating the anisotropy can be improved, and the wear resistance and the cutting performance can be improved, and the generation of metal burrs can also be suppressed.
此外，本發明係不限定於前文所述的實施形態，而能配合需要適當變更設計。Further, the present invention is not limited to the above-described embodiments, and the design can be appropriately changed in accordance with the need.
例如，雖然在顯示於第1圖之切斷用刀刃中薄刃磨粒層1為一層，然並不限於此。這樣的薄刃磨粒層1有複數層者亦能適用於本發明。For example, although the thin blade abrasive layer 1 is one layer in the cutting blade shown in Fig. 1, it is not limited thereto. Such a thin-edged abrasive layer 1 having a plurality of layers can also be applied to the present invention.
另外，前述實施形態係舉藉由苯酚樹脂所成的樹脂結合劑相2當作結合部的例子進行說明，然並不限於此，即使是使用陶瓷質料的結合劑相的玻璃化燒結(vitrified bond)亦能適用於本發明。Further, in the above embodiment, the resin binder phase 2 formed of a phenol resin is used as an example of a bonding portion. However, the present invention is not limited thereto, and even a vitrified bond of a binder phase using a ceramic material is used. It can also be applied to the present invention.
另外，於前述實施形態中，就添加到樹脂結合劑相2之填充物而言，係並不一定限定於由氧化鋅的結晶構造體所構成之填充物4，而亦可添加氧化鋅以外的金屬氧化物的結晶構造體。另外，就金屬氧化物的結晶構造體以外之填充物而言，亦不限定於由碳化鎢所構成的粉末狀填充物5，而可添加由鈦(Ti)及/或氮化鈦(TiN)、或者是由碳所構成的具有導電性的粉狀體，及或進一步添加晶鬚或玻璃纖維(glass fiber)等。Further, in the above embodiment, the filler added to the resin binder phase 2 is not necessarily limited to the filler 4 composed of the crystal structure of zinc oxide, and may be added other than zinc oxide. A crystalline structure of a metal oxide. Further, the filler other than the crystal structure of the metal oxide is not limited to the powdery filler 5 composed of tungsten carbide, and titanium (Ti) and/or titanium nitride (TiN) may be added. Or a powdery powder composed of carbon, or further added whiskers, glass fibers, or the like.
以下，舉出更具體的實施例來說明關於本發明的效果。Hereinafter, more specific examples will be given to explain the effects of the present invention.
於本實施例中係準備有：將屬於粉末狀碳化鎢之填充物5的含有量設為固定(25%)、且將屬於氧化鋅的結晶構造體之填充物4的添加比例進行各種變更的八種；在樹脂結合劑相2中不混入矽烷耦合劑而將氧化鋅的結晶構造體填充物4的添加比例設為10%者；以及不在樹脂結合劑相2中混入矽烷耦合劑而將氧化鋅的結晶構造體之填充物4的添加比率設為35%，且未含有碳化鎢之粉末狀填充物5者的合計十種的本發明之切斷用刀刃。該切斷用刀刃係為外徑58mm、內徑40mm、厚度0.3mm。另外，樹脂結合劑相2係苯酚樹脂、磨粒3係粒度＃230的鑽石磨粒而集中度為75。藉由該切斷用刀刃來對修整器平板(dresser plate)實施挖溝加工，而進行了磨耗試驗。In the present embodiment, the content of the filler 5 belonging to the powdered tungsten carbide is fixed (25%), and the addition ratio of the filler 4 of the crystal structure belonging to zinc oxide is variously changed. Eight kinds; in the resin binder phase 2, the ceramide coupling agent is not mixed, and the addition ratio of the crystal structure filler 4 of zinc oxide is set to 10%; and the decane coupling agent is not mixed in the resin binder phase 2 to oxidize In the zinc crystal structure, the addition ratio of the filler 4 is set to 35%, and a total of ten kinds of cutting blades of the present invention which do not contain the powdery filler 5 of tungsten carbide are included. The cutting blade has an outer diameter of 58 mm, an inner diameter of 40 mm, and a thickness of 0.3 mm. Further, the resin binder phase 2 was a diamond abrasive grain of a phenol resin or an abrasive grain 3 size of #230, and the degree of concentration was 75. The dresser plate was grooved by the cutting blade to perform an abrasion test.
另外，將分別添加碳化矽晶鬚或玻璃纖維10%體積而代替氧化鋅的結晶構造體4與上述實施例1至實施例10為相同形狀的切斷用刀刃當作比較例1及比較例2，並使用該等比較例1及比較例2之切斷用刀刃進行了與實施例1至實施例10相同的磨耗試驗。Further, the cutting structure in which the crystal structure 4 in which the niobium carbide whisker or the glass fiber was added in 10% by volume instead of the zinc oxide and the same shape as in the above-described first to tenth embodiments was used as the comparative example 1 and the comparative example 2 The same abrasion tests as in Examples 1 to 10 were carried out using the cutting blades of Comparative Examples 1 and 2.
將此時的實施例1至實施例10、比較例1及比較例2之切斷用刀刃的組成表示在下述的表1中。The compositions of the cutting blades of Examples 1 to 10, Comparative Example 1, and Comparative Example 2 at this time are shown in Table 1 below.
試驗條件係同下文所述。The test conditions are as described below.
所使用之切片機東京精密製/A-WD-10ASlicer used in Tokyo Precision / A-WD-10A
所使用之修整片體WA＃200The trimming sheet used WA#200
心軸(spindle)旋轉速度15000min-1 Spindle rotation speed 15000min -1
進給速度100mm/sFeed rate 100mm/s
冷卻水：圓周方向1.2L/min、兩側面0.8L/minCooling water: 1.2L/min in the circumferential direction and 0.8L/min on both sides
另外，對每一組(set)施以30條的挖溝加工，並進行五組，而進行了合計150條的挖溝加工。將磨耗試驗結果顯示於下述的表2、表3。In addition, 30 sets of trenching were applied to each set, and five sets were performed, and a total of 150 trenching processes were performed. The results of the abrasion test are shown in Tables 2 and 3 below.
表2係將進行了五組的結果之平均磨耗加以表示，而表3係將進行了五組時的累計磨耗加以表示。Table 2 shows the average wear of the results of the five groups, and Table 3 shows the cumulative wear of the five groups.
另外，將這些磨耗量在下述的表4、表5中分別表示於圖表。In addition, these abrasion amounts are shown in the following Tables 4 and 5, respectively.
如從這些表可明瞭，於添加了氧化鋅的結晶構造體之填充物4的實施例1至實施例10之切斷用刀刃，其摩耗量較少，尤其是將前述填充物以10體積%或者20體積%的範圍添加的實施例2、3之切斷用刀刃的磨耗量較少。As is apparent from these tables, the cutting blades of Examples 1 to 10 in which the filler 4 of the crystal structure in which zinc oxide is added have a small amount of wear, in particular, the filler is 10% by volume. Alternatively, the cutting blades of Examples 2 and 3 which were added in the range of 20% by volume were less worn.
這推測是因為氧化鋅的結晶構造體之填充物之中，三維結晶構造之填充物的異方性緩和功能係充分發揮之緣故。此外，可知當氧化鋅的結晶構造體的填充物的添加比率成為30體積%以上時，苯酚樹脂的結合力會變弱，相反地磨耗量會增加。This is presumably because the heterogeneous relaxation function of the filler of the three-dimensional crystal structure is sufficiently exhibited in the filler of the crystal structure of zinc oxide. In addition, when the addition ratio of the filler of the crystal structure of zinc oxide is 30% by volume or more, the binding force of the phenol resin is weakened, and the amount of abrasion is increased.
另外，可知不具有氧化鋅的結晶構造體的填充物，取而代之添加了碳化矽晶鬚或玻璃纖維之比較例1及比較例2之切斷用刀刃的磨耗量較大。In addition, it is understood that the filler of the crystal structure having no zinc oxide, and the cutting blade of Comparative Example 1 and Comparative Example 2 in which the cerium carbide whisker or the glass fiber is added, is large in abrasion amount.
另外，從採用刮刀法所成形的薄片挖出直徑70mm的圓板狀刀刃，並將該圓板狀刀刃以熱壓壓縮成形並使燒結，並測定了該燒結體的翹彎曲。Further, a disk-shaped blade having a diameter of 70 mm was cut out from a sheet formed by a doctor blade method, and the disk-shaped blade was compression-molded by hot pressing and sintered, and the warpage of the sintered body was measured.
將該結果顯示於下述的表6。The results are shown in Table 6 below.
如從該結果可明瞭，雖然於實施例1至實施例6中，101μm至150μm或者是151μm至200μm左右的翹曲量為最多者，但相對於此，比較例1及比較例2中係300μm以上的翹曲量為最多。這理由推測是在如比較例1及比較例2般不具有氧化鋅的結晶構造體的填充物的切斷用刀刃中，不具有三維結晶構造之填充物的異方性緩和功能之故。As apparent from the results, in Examples 1 to 6, the amount of warpage of 101 μm to 150 μm or 151 μm to 200 μm was the most, but in contrast, in Comparative Example 1 and Comparative Example 2, 300 μm. The above warpage amount is the most. This reason is presumed to be that the cutting blade for the filler of the crystal structure having no zinc oxide as in Comparative Example 1 and Comparative Example 2 does not have the anisotropic mitigation function of the filler of the three-dimensional crystal structure.
於本實施例中，係使用在第一實施例所說明過之填充物的組成分別相異的實施例1至實施例10以及比較例1及比較例2之切斷用刀刃，首先進行了如第4圖所示在模封樹脂11中銅引線框架12留有間隔而配置的QFN的切斷。接著，在其切斷初期與500m切斷時，測量切斷阻力與10m切斷中的薄刃磨粒層的磨耗量，並且觀察切斷面以測定從銅引線框架12延伸的毛邊的大小(如第4圖所示，將往橫方向(進給方向)延伸的毛邊的大小設為X，將往上方延伸的毛邊的大小設為Y)。分別將這些結果中之關於切斷初期者表示於表7，關於在500m切斷時者表示於表8。此外，切斷阻力係就使安裝了該切斷用刀刃的切斷裝置的主軸旋轉的馬達的負載電流(A)來測量，而在無負載時係為2.6A。In the present embodiment, the cutting blades of Examples 1 to 10 and Comparative Examples 1 and 2, which have different compositions of the fillers described in the first embodiment, were used. In Fig. 4, the cutting of the QFN in which the copper lead frame 12 is left with a gap in the mold resin 11 is shown. Next, at the initial stage of cutting and cutting at 500 m, the cutting resistance and the abrasion amount of the thin-bladed abrasive layer in the 10 m cutting were measured, and the cut surface was observed to measure the size of the burr extending from the copper lead frame 12 (for example). As shown in Fig. 4, the size of the burr extending in the lateral direction (feed direction) is X, and the size of the burr extending upward is Y). Among these results, those in the initial stage of cutting are shown in Table 7, and those in the case of cutting at 500 m are shown in Table 8. Further, the cutting resistance is measured by the load current (A) of the motor that rotates the main shaft of the cutting device to which the cutting blade is attached, and is 2.6 A when there is no load.
試驗條件係同下文所述。The test conditions are as described below.
使用之切片機 東京精密製/A-WD-10ASlicer used Tokyo Precision / A-WD-10A
使用之修整片體WA＃200Used trimming sheet WA#200
心軸(spindle)旋轉速度21000min-1 Spindle rotation speed 21000min -1
進給速度80mm/sFeed rate 80mm/s
冷卻水：圓周方向1.2L/min、兩側面0.8L/minCooling water: 1.2L/min in the circumferential direction and 0.8L/min on both sides
此外，上述銅引線框架12的外徑d係0.3mm，鄰接的銅引線框架12間的間距P係為0.35mm。Further, the outer diameter d of the copper lead frame 12 is 0.3 mm, and the pitch P between the adjacent copper lead frames 12 is 0.35 mm.
分別將這些結果中之關於切斷初期者表示於表7，關於在500m切斷時者係表示於表8。Among the results, those in the initial stage of cutting are shown in Table 7, and those in the case of cutting at 500 m are shown in Table 8.
接著，藉由與實施例1至實施例10、以及比較例1及比較例2相同形狀、相同尺寸、相同樹脂結合劑之切斷用刀刃，對第5圖所示的IrDA基板進行切斷，其中，該IrDA基板係在由玻璃環氧樹脂構成的基材13中留有間隔所形成的通孔之內周面，以在兩端具有凸緣狀部14A的方式施加有鎳一鉻一金(Ni-Cr-Au)的金屬鍍膜14。接著，與上述QFN切斷之情形相同地在切斷初期與500m切斷時測定了切斷阻力、磨耗量、以及從上述金屬鍍膜14延伸的毛邊的大小(如第5圖所示，將在通孔內往橫方向(進給方向)延伸的毛邊的大小設為X，將從基板底部往下方延伸的毛邊的大小設為Y)。分別將這些結果中關於切斷初期者表示於表9，關於在500m切斷時者表示於表10。Then, the IrDA substrate shown in FIG. 5 was cut by the cutting blades of the same shape, the same size, and the same resin bonding agent as those of Examples 1 to 10 and Comparative Examples 1 and 2. In the IrDA substrate, the inner peripheral surface of the through hole formed by the gap is formed in the base material 13 made of glass epoxy resin, and nickel-chromium-gold is applied so as to have the flange-like portion 14A at both ends. Metal plating film 14 of (Ni-Cr-Au). Then, similarly to the case where the QFN was cut, the cutting resistance, the amount of abrasion, and the size of the burrs extending from the metal plating film 14 were measured at the initial cutting and cutting at 500 m (as shown in Fig. 5, The size of the burr extending in the lateral direction (feed direction) in the through hole is X, and the size of the burr extending downward from the bottom of the substrate is Y). Among these results, those in the initial stage of cutting are shown in Table 9, and those in the case of cutting at 500 m are shown in Table 10.
然而，使用了此等實施例1至實施例10、比較例1及比較例2之切斷用刀刃的試驗條件係如同前文所述。However, the test conditions using the cutting blades of Examples 1 to 10, Comparative Example 1, and Comparative Example 2 were as described above.
另外，通孔的長度L係0.18mm，通孔的內徑A係0.17mm，施於通孔的內周表面的金屬鍍膜14的內徑B係0.04mm，凸緣狀部14A的外徑C係0.7mm，鄰接的通孔間的間距P係為2.0mm。Further, the length L of the through hole is 0.18 mm, the inner diameter A of the through hole is 0.17 mm, and the inner diameter B of the metal plating film 14 applied to the inner circumferential surface of the through hole is 0.04 mm, and the outer diameter C of the flange portion 14A. It is 0.7 mm, and the pitch P between adjacent through holes is 2.0 mm.
根據該等表7至表10的結果，不論在QFN及IrDA基板的切斷的任一者中，首先於未在樹脂結合劑相添加氧化鋅的結晶構造體的填充物之比較例1、比較例2之切斷用刀刃中，相較於添加了氧化鋅的結晶構造體的填充物的實施例1至實施例10之切斷用刀刃，切斷阻力、毛邊、以及磨耗量全部皆從切斷初期開始變大，此傾向係在500m切斷時變得更加顯著。相對於此，在樹脂結合劑相分散了氧化鋅的結晶構造體的填充物的實施例1至實施例10之切斷用刀刃，尤其是將氧化鋅的結晶構造體的填充物以10體積%至20體積%的範圍內加以添加的實施例2及實施例3之切斷用刀刃中，從切斷初期開始切斷阻力、毛邊、以及磨耗量係一起被抑制為較低者。接著，進一步於500m切斷時，於實施例8、實施例10中磨耗量係變大，尤其是在IrDA基板的切斷中毛邊的大小也變得有增加的傾向，相對於此，於本發明之其他實施例1至實施例7、實施例9之切斷用刀刃中，切斷阻力係沒有變化，另外磨耗量和毛邊的大小都被控制在非常地小的範圍內。另外，可知在實施例1至實施例10之中，將氧化鋅的結晶構造體的填充物的含有量設為10體積%、20體積%的實施例2及實施例3中磨耗量係特別低。According to the results of Tables 7 to 10, in the case of the cutting of the QFN and the IrDA substrate, first, the comparison of the filler of the crystal structure in which the zinc oxide was not added to the resin binder phase was compared. In the cutting blade of Example 2, the cutting resistances, the burrs, and the abrasion amount were all cut from the cutting blades of Examples 1 to 10 in comparison with the filler of the crystal structure to which zinc oxide was added. The initial stage of the break began to become larger, and this tendency became more pronounced at the time of cutting at 500 m. On the other hand, in the cutting blades of Examples 1 to 10 in which the filler of the zinc oxide crystal structure was dispersed in the resin binder phase, in particular, the filler of the crystal structure of zinc oxide was 10% by volume. In the cutting blades of Examples 2 and 3 which were added in the range of 20% by volume, the cutting resistance, the burrs, and the abrasion amount were suppressed to be lower from the initial stage of cutting. Then, when the thickness is further cut at 500 m, the amount of wear in the eighth embodiment and the tenth embodiment is increased, and in particular, the size of the burr tends to increase during the cutting of the IrDA substrate. In the cutting blades of the other embodiments 1 to 7 and 9 of the invention, the cutting resistance was not changed, and the amount of wear and the size of the burrs were controlled to be extremely small. In addition, in Example 1 to Example 10, the wear amount of Example 2 and Example 3 in which the content of the filler of the crystal structure of zinc oxide was 10% by volume and 20% by volume was particularly low. .
本發明係有關於在半導體裝置等的各種電子材料構件等的切斷所使用之切斷用刀刃。依據本發明之切斷用刀刃，係為呈至少一層以上的層狀切斷用刀刃，並具備有：結合部、分散配置於前述結合部中的磨粒、以及分散配置於前述結合部中的填充物，前述填充物係具有針狀部從四面體的中心朝各頂點往四方延伸的三維結晶構造之填充物，藉此緩和在結合部中所添加的填充物的異方性，並謀求耐磨耗性及切斷性能的提升，此外亦可抑制金屬毛邊的產生。The present invention relates to a cutting blade used for cutting various electronic material members and the like in a semiconductor device or the like. The cutting blade according to the present invention is a layer-shaped cutting blade having at least one layer or more, and includes a joint portion, abrasive grains dispersedly disposed in the joint portion, and dispersedly disposed in the joint portion. In the filler, the filler has a filler of a three-dimensional crystal structure in which the needle-like portion extends from the center of the tetrahedron toward each vertex, thereby alleviating the anisotropy of the filler added to the joint portion and seeking resistance. Increased wear and cutting performance, and also inhibits the generation of metal burrs.
1．．．薄刃磨粒層1. . . Thin blade abrasive layer
1A．．．外周表面1A. . . Peripheral surface
1B．．．兩側表面1B. . . Both sides
1C．．．邊緣部1C. . . Edge
2．．．樹脂結合劑相(結合部)2. . . Resin binder phase (bonding part)
3．．．磨粒3. . . Abrasive grain
4．．．填充物4. . . Filler
4a、4b、4c．．．填充物4a, 4b, 4c. . . Filler
4aa．．．針狀部4aa. . . Needle
5．．．填充物5. . . Filler
11．．．模封樹脂11. . . Mold sealing resin
12．．．銅引線框架12. . . Copper lead frame
13．．．基材13. . . Substrate
14．．．金屬鍍膜14. . . Metal coating
14A．．．凸緣狀部14A. . . Flange
A、B．．．內徑A, B. . . the inside diameter of
C、D．．．外徑C, D. . . Outer diameter
O．．．軸線O. . . Axis
P．．．間距P. . . spacing
第1圖為顯示本發明一實施型態之切斷用刀刃之側面圖。Fig. 1 is a side view showing a cutting blade according to an embodiment of the present invention.
第2圖為顯示於第1圖之實施型態之切斷用刀刃之薄刃磨粒層的外周緣部之擴大剖面圖。Fig. 2 is an enlarged cross-sectional view showing the outer peripheral edge portion of the thin-blade abrasive layer of the cutting blade of the embodiment shown in Fig. 1.
第3圖(a)至第3圖(d)為顯示第1圖所示之實施型態之切斷用刀刃中所使用的氧化鋅之結晶構造體的各種形態之透視圖。Figs. 3(a) to 3(d) are perspective views showing various forms of the crystal structure of zinc oxide used in the cutting blade of the embodiment shown in Fig. 1.
第4圖係利用本發明之實施例以及比較例1至比較例2所切斷的QFN之剖面圖。Fig. 4 is a cross-sectional view of the QFN cut by the examples of the present invention and Comparative Examples 1 to 2.
第5圖為利用本發明之實施例以及比較例1至比較例2所切斷的IrDA基板之剖面圖。Fig. 5 is a cross-sectional view showing an IrDA substrate cut by an embodiment of the present invention and Comparative Examples 1 to 2.
1．．．薄刃磨粒層1. . . Thin blade abrasive layer
1A．．．外周表面1A. . . Peripheral surface
1B．．．兩側表面1B. . . Both sides
1C．．．邊緣部1C. . . Edge
2．．．樹脂結合劑相(結合部)2. . . Resin binder phase (bonding part)
3．．．磨粒3. . . Abrasive grain
4．．．填充物4. . . Filler
5．．．填充物5. . . Filler
Claims (10)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011041573A JP5651045B2 (en) | 2011-02-28 | 2011-02-28 | Cutting blade |
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| TW201235156A TW201235156A (en) | 2012-09-01 |
| TWI494194B true TWI494194B (en) | 2015-08-01 |
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| CN (1) | CN103517785B (en) |
| IL (1) | IL228081A0 (en) |
| MY (1) | MY162238A (en) |
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| CN109648486B (en) * | 2018-12-30 | 2020-09-22 | 苏州赛尔科技有限公司 | Low-wear resin knife for lead frame segmentation and application thereof |
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| TW379151B (en) * | 1997-02-14 | 2000-01-11 | Sumitomo Electric Industries | Wire saw and method of manufacturing it |
| JP2001038638A (en) * | 1999-07-26 | 2001-02-13 | Mitsubishi Materials Corp | Resinoid bonded grinding wheel |
| TW425338B (en) * | 1998-09-25 | 2001-03-11 | Mitsubishi Materials Corp | Composite bond wheel and wheel having resin bonding phase |
| TW473415B (en) * | 1999-08-17 | 2002-01-21 | Mitsubishi Materials Corp | Resin bonded abrasive tool |
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|---|---|---|---|---|
| JPH01115574A (en) * | 1987-10-27 | 1989-05-08 | Canon Inc | Extremely thin cutting blade |
| US6458018B1 (en) * | 1999-04-23 | 2002-10-01 | 3M Innovative Properties Company | Abrasive article suitable for abrading glass and glass ceramic workpieces |
| DE60022099T2 (en) * | 2000-04-28 | 2006-06-01 | 3M Innovative Properties Co., Saint Paul | ABRASIVE METHOD AND METHOD FOR GRINDING GLASS |
| JP2002105750A (en) * | 2000-09-25 | 2002-04-10 | Shimadzu Corp | Monofilament for mowing machine and method for producing the same |
| JP2006062009A (en) * | 2004-08-25 | 2006-03-09 | Mitsubishi Materials Corp | Resin-bond thin blade grinding wheel |
| JP2007038337A (en) * | 2005-08-02 | 2007-02-15 | Noritake Super Abrasive:Kk | Resin bond grinding wheel |
| JP4779580B2 (en) * | 2005-11-02 | 2011-09-28 | 三菱マテリアル株式会社 | Electroformed thin blade whetstone |
-
2011
- 2011-02-28 JP JP2011041573A patent/JP5651045B2/en active Active
- 2011-03-29 MY MYPI2013003108A patent/MY162238A/en unknown
- 2011-03-29 CN CN201180068526.8A patent/CN103517785B/en not_active Expired - Fee Related
- 2011-03-29 WO PCT/JP2011/057755 patent/WO2012117571A1/en active Application Filing
- 2011-03-30 TW TW100110937A patent/TWI494194B/en active
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- 2013-08-22 IL IL228081A patent/IL228081A0/en unknown
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW379151B (en) * | 1997-02-14 | 2000-01-11 | Sumitomo Electric Industries | Wire saw and method of manufacturing it |
| TW425338B (en) * | 1998-09-25 | 2001-03-11 | Mitsubishi Materials Corp | Composite bond wheel and wheel having resin bonding phase |
| JP2001038638A (en) * | 1999-07-26 | 2001-02-13 | Mitsubishi Materials Corp | Resinoid bonded grinding wheel |
| TW473415B (en) * | 1999-08-17 | 2002-01-21 | Mitsubishi Materials Corp | Resin bonded abrasive tool |
| JP2005095992A (en) * | 2003-09-22 | 2005-04-14 | Nitolex Honsha:Kk | Laser truing and dressing method and grinding wheel for laser truing and dressing |
| TW200821094A (en) * | 2006-09-15 | 2008-05-16 | Saint Gobain Abrasives Inc | Microfiber reinforcement for abrasive tools |
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| Publication number | Publication date |
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| CN103517785A (en) | 2014-01-15 |
| CN103517785B (en) | 2016-06-29 |
| JP2012176472A (en) | 2012-09-13 |
| WO2012117571A1 (en) | 2012-09-07 |
| IL228081A0 (en) | 2013-09-30 |
| JP5651045B2 (en) | 2015-01-07 |
| TW201235156A (en) | 2012-09-01 |
| MY162238A (en) | 2017-05-31 |
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