JP2017113813A - Method for manufacturing cutting blade and cutting blade - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a cutting blade capable of easily manufacturing a cutting blade which has a resin phase formed from a thermocompression bonding resin, can prevent projection of abrasive grains from a side face of a blade body, can reduce warpage and flatness of the blade body, and has cutting accuracy enhanced by the reduced warpage and flatness, and to provide a cutting blade.SOLUTION: A method for manufacturing a cutting blade includes: a mixing step of adding a liquid dispersion medium DM to mixed powder MP containing resin powder of a thermocompression bonding resin and abrasive grains; a compression step of cold-pressing the mixed powder MP to which the dispersion medium DM is added in a molding die to form an original plate 11 of the blade body 1; and a sintering step of sintering the original plate 11 by hot-pressing.SELECTED DRAWING: Figure 6

Description

  The present invention relates to a method for manufacturing a cutting blade for cutting a material to be cut such as an electronic material part used in a semiconductor product or the like, and a cutting blade.

  High precision is required for processing (hereinafter, abbreviated as cutting processing) in which a material to be cut such as an electronic material part used in a semiconductor product or the like is subjected to grooving or cut into pieces (hereinafter, abbreviated as cutting). In such a cutting process, a disc-shaped cutting blade (thin blade grindstone) is used.

  The cutting blade includes a disk-shaped blade body and a cutting blade formed on the outer peripheral edge of the blade body. The blade body is formed by dispersing abrasive grains such as diamond and cBN and filler in a binder phase (binder) such as a resin phase (resin solid phase) or a metal phase (metal solid phase). The cutting blade in which the blade body is formed of a resin phase is called a resin bond blade (resin bond grindstone).

In manufacturing this kind of cutting blade, the following method has been conventionally used.
In the conventional manufacturing method shown in FIGS. 9 (a) to 9 (c), first, in FIG. 9 (a), the mixed powder MP in which the resin powder, the abrasive grains, and the filler, which are the raw materials of the resin phase, are filled into the mold To do. Next, in FIG.9 (b), the surface of mixed powder MP with which the metal mold | die was filled is planarized by manual work, a machine, etc. Next, in FIG. 9C, the mixed powder MP is hot-pressed and sintered. Although not specifically shown, after hot pressing, the outer and inner peripheries are processed, and in some cases, lapping (blade surface (both sides) flattening) is performed to shape the blade body. A cutting blade to be a product is formed.

  Moreover, in the manufacturing method of the cutting blade of the following patent documents 1 and 2, a slurry of a binder is prepared, this slurry is formed into a plate shape by a doctor blade method, die-cut, and degreased (the slurry is added at the time of preparation) Binder removal) and sintering. In the case of a resin bond blade, a binder is not used, but alcohol or the like used as a solvent for the resin as a binder is volatilized to obtain a plate-shaped molded product.

Japanese Patent Laid-Open No. 10-193267 Japanese Patent Laid-Open No. 10-193268

However, the conventional method for manufacturing a cutting blade has the following problems.
9A to 9C, even if the surface of the mixed powder MP in the mold is habituated and apparently flattened in FIG. 9B, the filling density of the mixed powder MP varies. Has occurred. For this reason, the blade body obtained by sintering is warped or the desired flatness cannot be obtained.

  Specifically, in the conventional cutting blade, the flatness of the side surface of the blade body obtained after sintering was as large as around 100 μm due to the variation in the packing density inside the mixed powder MP in the mold. For this reason, in the field of use in which high quality cutting accuracy is particularly required, both sides of the blade body are lapped to achieve flattening. However, even if the resin phase is removed by the lapping treatment, the abrasive grains having high hardness tend to remain in a state of protruding from the side face, and it is difficult to satisfy the expected flatness.

In addition, since the flatness cannot be kept small as described above, especially when the thickness of the blade body is to be reduced to 1.1 mm or less, the thickness of the blade body is previously set in the pre-process of the lapping process. It was necessary to reduce the thickness of the blade body to a desired thickness while flattening the blade surface by lapping treatment.
That is, since it is essential to perform the lapping process, it is not possible to prevent the abrasive grains from protruding from the side surface of the blade body, which affects the cutting accuracy.

  Moreover, when manufacturing a resin bond blade using the doctor blade method like patent document 1, 2, compared with the conventional manufacturing method shown to Fig.9 (a)-(c), the curvature and flatness of a blade main body are small. It becomes easy to suppress. However, for thermocompression bonding resins such as polyimide resins, a good solvent (that is, a solvent having high solubility in the resin) does not exist, so a film (plate-shaped molded product) cannot be produced from the slurry, and the doctor blade Manufacturing by the method itself was difficult.

  The present invention has been made in view of such circumstances, and can prevent protrusion of abrasive grains from the side surface of the blade body while having a resin phase made of a thermocompression bonding resin. It is an object of the present invention to provide a cutting blade manufacturing method and a cutting blade capable of easily manufacturing a cutting blade that can be reduced in size and thereby improved in cutting accuracy.

The method for manufacturing a cutting blade according to one aspect of the present invention includes a mixing step of adding a liquid dispersion medium to a mixed powder containing resin powder and abrasive grains of a thermocompression bonding resin, and the mixed powder including the dispersion medium. Are cold-pressed in a mold to form an original plate of a blade body, and a sintering step of hot-pressing and sintering the original plate.
Another aspect of the present invention is a cutting blade comprising a disk-shaped blade body and a cutting blade formed on an outer peripheral edge of the blade body, the blade body having a thermocompression bonding property. A resin phase formed of resin, and abrasive grains dispersed in the resin phase, the blade body has a thickness of 1.1 mm or less, and more than the side surface facing the thickness direction of the blade body The abrasive grains are arranged on the inner side in the thickness direction.

In the method for producing a cutting blade of the present invention, a mixture obtained by adding a liquid dispersion medium to a mixed powder containing a resin powder of thermocompression bonding resin and abrasive grains is cold-pressed in a mold such as a mold. . Therefore, at the time of this cold press, the dispersion medium enters the gaps between the powders of the mixed powder, and the powder flow utilizing the liquid flow can be promoted.
The “thermocompression-bonding resin” as used in the present invention is included in the thermosetting resin, and the resin powder that is the raw material of the resin phase is formed in a state in which the polymerization reaction is almost finished. In addition, it refers to a type of resin that is integrated by thermocompression bonding during the sintering process to form a resin phase. Examples of such a thermocompression-bonding resin include a polyimide resin, a specific phenol resin, and polybenzimidazole (PBI (registered trademark)).
In addition, as the “dispersion medium”, for example, alternative chlorofluorocarbons such as a fluorine-based inert liquid can be used.

  In other words, by applying pressure in the mold to the mixed powder mixed with the dispersion medium, the dispersion medium acts like a lubricant and the resin powder and abrasive grains are uniformly diffused into the mold. . For this reason, the density variation of the original plate of the blade body to be manufactured can be remarkably suppressed. In this compression step, since cold pressing (cold compression) is performed, the thermocompression bonding of the resin powder does not proceed, and the fluidity of the resin powder is stably secured. The In addition, most of the used dispersion medium flows out from the original plate of the blade body during cold pressing and is removed.

  Then, the original plate of the blade body is hot-pressed and sintered. As mentioned above, since the density variation of the original plate is kept small, it is possible to prevent the blade body from being damaged during sintering, and as a result, a blade body with reduced warpage and flatness is produced. can do.

  The dispersion medium remaining on the original plate of the blade body after cold pressing can be removed from the blade body by volatilizing, for example, before hot pressing in the sintering process. At this time, since the dispersion medium exists in a slight gap between the powders, the blade body is prevented from being formed into a porous shape due to volatilization of the dispersion medium. In this case, since the dispersion medium is not left in the blade body manufactured through the sintering process, the performance of the blade body is not affected by the dispersion medium.

  More specifically, the timing at which the dispersion medium is volatilized in the sintering step is preferably before the resin powder starts thermocompression bonding by hot pressing. That is, it is preferable that all the dispersion medium is volatilized before the hot pressing is performed. As a result, the space in which the dispersion medium was present between the powders is blocked (replaced) by the resin phase, and no trace of the dispersion medium is left in the sintered blade body. Therefore, the dispersion medium and its traces do not affect the performance of the blade body.

  Specifically, in the cutting blade manufactured according to the present invention, the blade main body is divided into a plurality of regions (for example, eight regions divided into eight equally around the central axis) around the central axis of the blade main body. The average value of the density measured in each region is defined as an average density, and the density measured in each region is suppressed to 90 to 110% with respect to this average density. That is, the density difference (density variation) is kept small throughout the blade body. This is because, as described above, the density difference is already suppressed to be small in the blade main plate that has undergone the compression process by the cold press. Therefore, the produced blade body is suppressed in warping and flatness.

More specifically, in the cutting blade manufactured according to the present invention, for example, the amount of warpage of the blade body can be suppressed to 300 μm or less. Further, the flatness of the blade body can be suppressed to 10 μm or less.
In addition, since the flatness of the blade surface obtained after sintering is kept small as described above, both sides of the blade body are flattened by lapping even in fields of use where particularly high-grade cutting accuracy is required. The desired flatness can be satisfied without doing so.

As shown in FIGS. 5A and 5B, the warping amount of the blade body is determined by placing the cutting blade 10 on the surface plate S and rotating the surface plate S with respect to the cutting blade 10. The laser light L of the laser interferometer is irradiated to measure the height of the entire circumference of the cutting blade 10 (height from the surface plate S), and the highest value (the farthest from the surface plate S) among the measured values. This is the value obtained by subtracting the blade thickness from the position height). This measurement is performed on both surfaces of the blade body (both side surfaces facing the thickness direction), and the larger value is adopted.
Further, the flatness of the blade body means that the blade body is divided into a plurality of regions (e.g., eight regions divided into eight equally around the central axis) at the same angle around the central axis of the blade body. It is the maximum difference (difference between the maximum thickness and the minimum thickness) in the dispersion of measured values when the thickness of the blade body is measured with a micrometer or the like.

As described above, since the warpage and flatness of the blade body are suppressed to be small, the following effects can be obtained when the material to be cut is cut with the cutting blade.
In other words, since the deflection of the cutting blade in the thickness direction is suppressed, the cutting width can be suppressed small, and the product yield of the material to be cut can be improved. In addition, a force in the cutting width direction is less likely to act on the material to be cut from the cutting blade. For this reason, the cutting blade smoothly cuts into the material to be cut, and the occurrence of burrs and chipping on the cut surface is prevented. Accordingly, the quality of electronic material parts (products) formed by dividing the material to be cut into pieces can be stably improved.

  Furthermore, since it is not necessary to perform a lapping process on the blade surface, the lapping process does not cause abrasive grains to protrude from the resin phase. That is, in the present invention, the blade body obtained through the sintering step has abrasive grains arranged on the inner side in the thickness direction than the side surface of the blade body, and the abrasive grains protruding from the side surface to the outer side in the thickness direction. not exist. For this reason, at the time of a cutting process, the problem that the abrasive grain which protrudes from the side surface of a braid | blade body roughens the cut surface of a to-be-cut material and reduces a process quality (causing a burr | flash, chipping, etc.) can be suppressed notably. Therefore, combined with the effect of reducing the flatness described above, the cutting accuracy can be remarkably increased.

Specifically, in the past, particularly when the thickness of the blade body was reduced to 1.1 mm or less, in order to keep the blade surface flatness small, and the thickness of the blade body was expected to be small. It was indispensable to perform the lap process in order to keep going. For this reason, it was not possible to prevent the abrasive grains from protruding from the side surface of the blade body.
On the other hand, according to the present invention, even if the thickness of the blade body is reduced to 1.1 mm or less, the flatness is already suppressed to a low level after sintering, so that the lapping process is unnecessary. For this reason, it can prevent reliably that an abrasive grain protrudes from the side surface of a braid | blade main body. That is, since both sides of the blade body after the sintering process are formed flat by pressing and there is no protrusion of abrasive grains, the lapping process is omitted, so that the abrasive grains from the blade surface are removed. Can be zero.
Furthermore, since it is not necessary to apply a lapping process, the manufacturing process is facilitated, and it is not necessary to increase the thickness of the blade body in advance in view of the lapping process as in the prior art. Is reduced.

  In addition, since the warpage and flatness of the blade body are suppressed to a small level, the reaction force received when the cutting blade cuts the material to be cut may be biased against a portion with a large amount of warping as in the past. It is prevented. In other words, according to the present invention, the reaction force is likely to act evenly over the entire circumference in the circumferential direction of the cutting blade, and a large load is prevented from being applied to a predetermined location. Extends tool life.

  And in manufacturing the cutting blade with such a high cutting accuracy, the present invention does not use a particularly complicated manufacturing process as compared with the conventional manufacturing method. Specifically, in the present invention, the above-described excellent operational effects can be obtained by suppressing the density variation of the blade body (original plate) through a simple process of cold pressing the mixed powder to which the dispersion medium is added in the mold. Therefore, it is easy to manufacture a cutting blade.

As described above, according to the method for manufacturing a cutting blade of the present invention, it is possible to prevent protrusion of abrasive grains from the side surface of the blade body while providing a resin phase made of a thermocompression-bonding resin, thereby reducing warpage and flatness of the blade body. It is possible to easily manufacture a cutting blade that can be suppressed to a small size and that has improved cutting accuracy.
Further, according to the cutting blade of the present invention, the cutting accuracy can be remarkably improved while thinning the blade body.

  In the cutting blade manufacturing method, the mixing step includes a step of filling a mold with mixed powder containing resin powder and abrasive grains of a thermocompression bonding resin, and flattening the surface of the mixed powder. It is preferable to include a step and a step of dropping a liquid dispersion medium onto the mixed powder.

  In this case, since the mixing step includes a step of flattening the surface of the mixed powder filled in the mold, the mixed powder diffuses evenly in the molding die in the compression step subsequent to the mixing step. The flow amount up to can be kept small. For this reason, the effect that the density variation of the original plate of the blade main body described above can be suppressed to a small extent can be achieved more stably.

  Moreover, since the mixing step includes a step of dropping the dispersion medium onto the mixed powder whose surface is flattened, the dispersion medium is easily mixed evenly with the mixed powder. In other words, since the dispersion medium spreads over the entire mixed powder and becomes easy to become familiar with, the powder flow of the mixed powder using the liquid flow of the dispersion medium is uniformly distributed throughout the molding die in the compression process after the mixing process. Done. Therefore, the effect that the density variation of the original plate of the blade body described above can be suppressed to a small extent can be achieved more stably.

In the method for manufacturing a cutting blade, it is preferable to use a liquid having a kinematic viscosity of 2.3 mm ² / s or less as the dispersion medium.

In this case, since the kinematic viscosity of the dispersion medium is 2.3 mm ² / s or less (2.3 cSt or less), the dispersion medium is well-adapted between the powders of the mixed powder, and the liquid powder easily flows in a wide range. It functions effectively as a lubricant that promotes powder flow. Thereby, in a compression process, the effect that a mixed powder can be spread | diffused uniformly within a shaping | molding die becomes a more remarkable thing.
Specifically, when the kinematic viscosity of the dispersion medium is 2.3 mm ² / s or less, warpage and flatness of the blade body obtained after sintering can be significantly reduced.
The “kinematic viscosity” is a kinematic viscosity necessary at the time of cold pressing in the compression process, and refers to, for example, the kinematic viscosity of a liquid at 25 ° C.

In the cutting blade, the blade body is partitioned into a plurality of regions at equal angles around the central axis of the blade body, and the average density measured in each region is defined as the average density. On the other hand, the density measured in each region is preferably 90 to 110%.
In the cutting blade, it is preferable that a warpage amount of the blade body is 300 μm or less.
In the cutting blade, the flatness of the blade body is preferably 10 μm or less.

In this cutting blade, since the variation in density of the blade body is suppressed, the amount of warpage of the blade body can be suppressed to 300 μm or less. In addition, the flatness of the blade body can be reduced to 10 μm or less. For this reason, it is possible to reduce a lapping process or the like for flattening the blade surface (both side surfaces) when manufacturing the cutting blade.
Therefore, it is possible to remarkably increase the cutting accuracy of the cutting blade while improving the manufacturability of the cutting blade.

According to the method for manufacturing a cutting blade of the present invention, it is possible to prevent protrusion of abrasive grains from the side surface of the blade main body and to suppress warpage and flatness of the blade main body while having a resin phase made of a thermocompression bonding resin. Thus, a cutting blade with improved cutting accuracy can be easily manufactured.
Further, according to the cutting blade of the present invention, the cutting accuracy can be remarkably improved while thinning the blade body.

It is a side view (plan view) showing a blade for cutting concerning one embodiment of the present invention. It is a figure which shows the AA cross section of FIG. It is a figure which expands and shows the B section of FIG. It is a figure for demonstrating the density difference (density variation) and flatness of a blade main body. It is a figure explaining the measuring method of the curvature amount of a blade main body. It is a figure explaining the manufacturing method of the blade for cutting concerning one embodiment of the present invention. It is a figure explaining the burr | flash produced when a to-be-cut material is cut | disconnected. It is a graph which compares the burr size of Example 11 of this invention, and the burr size of the conventional comparative examples 15 and 16. FIG. It is a figure explaining the manufacturing method of the conventional cutting blade.

  Hereinafter, a cutting blade 10 and a manufacturing method thereof according to an embodiment of the present invention will be described with reference to the drawings.

As an electronic material component cut and manufactured by the cutting blade 10 of the present embodiment, after being cut and divided from a semiconductor wafer like a semiconductor element, it is mounted on a lead frame and resin molded, for example, The following are listed.
(A) Like a so-called QFN (quad flat non-leaded package), a large number of elements are packaged on the lead frame, molded together, and then cut into pieces. Electronic material parts to be manufactured.
(B) Like an IrDA (Infrared Data Communication Association) standard optical transmission module (hereinafter simply abbreviated as IrDA), Ni, Au, Cu are formed on the inner peripheral surface of a through hole formed in a substrate made of glass epoxy resin. An electronic material component that has a substrate plated with the above and is separated into pieces by cutting.
The cutting blade 10 of this embodiment is used for precisely cutting a material to be cut such as an electronic material part.

As shown in FIGS. 1 and 2, the cutting blade 10 includes a blade body 1 having a disk shape and a cutting edge 1 </ b> A formed on the outer peripheral edge of the blade body 1.
Although not shown in particular, the cutting blade 10 has a blade body 1 attached to a main shaft of a cutting device via a flange, and is rotated about the central axis O of the blade body 1 in a direction perpendicular to the central axis O. By being sent out, the material to be cut is cut at the outer peripheral edge portion (cutting edge 1A) that protrudes radially outward from the flange in the blade body 1.

In the present embodiment, the direction along the central axis O of the blade body 1 (the direction in which the central axis O extends) is referred to as the thickness direction of the blade body 1 or simply the central axis O direction. Further, this thickness direction may be referred to as a cutting width direction of the cutting blade 10 (corresponding to a width direction of a cutting line formed on a workpiece by cutting).
A direction orthogonal to the central axis O is referred to as a radial direction, and a direction around the central axis O is referred to as a circumferential direction.

  The size (that is, the thickness) along the thickness direction of the blade body 1 is, for example, 0.1 mm or more and 1.1 mm or less. Therefore, the blade body 1 has an extremely thin disk shape. In FIG. 2, in order to make the shape of the cutting blade 10 easier to understand, the thickness of the blade body 1 is displayed thicker than the actual thickness.

  In addition, a mounting hole 4 having a circular hole shape centering on the central axis O and penetrating through the blade body 1 in the thickness direction is formed at a central portion (on the central axis O) in the radial direction of the blade body 1. ing. For this reason, the blade body 1 specifically has an annular plate shape. The “blade body 1 having a disc shape” in the present embodiment includes the blade body 1 having a ring shape.

  As shown in FIG. 3, the cutting edge 1 </ b> A of the blade body 1 includes an outer peripheral surface of the blade body 1 having a very small width equal to the thickness of the blade body 1, and both side surfaces facing the thickness direction of the blade body 1. Each of the outer peripheral edge portions in 1B and 1B and a pair of edge portions forming an intersecting ridge line between these outer peripheral edge portions and the outer peripheral surface are formed.

The blade body 1 includes a resin phase 2 formed of a thermocompression bonding resin, an abrasive 3 dispersed in the resin phase 2 and made of a material harder than the resin phase 2, and dispersed in the resin phase 2. And a filler 5 made of a softer material.
The resin phase 2 is, for example, a resin binder phase (resin bond matrix) mainly composed of a synthetic resin such as polyimide resin, some phenol resin (specific phenol resin), and polybenzimidazole (PBI (registered trademark)). Material).
The “thermocompression-bonding resin” referred to in the present embodiment is included in the thermosetting resin, and the resin powder that is the raw material of the resin phase 2 is formed after the polymerization reaction is almost completed. In addition, it refers to a type of resin that is integrated by thermocompression bonding during the sintering process to form the resin phase 2.

The abrasive grains 3 include either diamond abrasive grains or cBN abrasive grains. In the present embodiment, diamond abrasive grains are used as the abrasive grains 3.
The filler 5 is smaller than the abrasive grains 3 and is made of, for example, silicon carbide, tungsten carbide, zinc oxide or the like.
The abrasive grains 3 and the filler 5 are both made of a material harder than the resin phase 2. The abrasive grains 3 mainly contribute to improvement of workability, and the filler 5 mainly contributes to improvement of the rigidity of the blade body 1. In addition, the material of the abrasive grain 3 and the filler 5 is not limited to what was demonstrated by this embodiment.

  In FIG. 3, the abrasive grains 3 are not projected from both side surfaces 1 </ b> B and 1 </ b> B that face the thickness direction of the blade body 1. Further, the filler 5 is not protruded from both side surfaces 1B and 1B facing the thickness direction of the blade body 1. In other words, the abrasive grains 3 and the fillers 5 are all arranged on the inner side in the thickness direction than the side surface 1B of the blade body 1.

In addition, about the edge (outer peripheral edge) of the radial direction outer side of the braid | blade main body 1, either the abrasive grain 3 or the filler 5 is outer periphery among the side surfaces 1B by performing the sharpening process etc. of the cutting blade 1A. You may make it protrude from the resin phase 2 in the range which does not protrude outside the thickness direction with respect to parts other than an edge.
In the example shown in FIG. 3, either the abrasive grains 3 or the fillers 5 are projected from the outer peripheral surface facing the radially outer side of the blade body 1.

  Further, in the cutting blade 10 of the present embodiment, the blade body 1 is partitioned into a plurality of regions at equal angles around the central axis O of the blade body 1, and the average density measured in each region is the average density. As for the average density, the density measured in each region is 90 to 110%.

Specifically, as shown in FIG. 4, the blade body 1 is divided into eight regions around the central axis O of the blade body 1 and divided into eight regions. And let the average value of the density measured in each of the eight regions be the average density. With respect to this average density, all the densities measured in the eight regions are all included in the range of 90 to 110% (within ± 10%, where the average density is 100%).
More specifically, in the cutting blade 10 of the present embodiment, the density measured in each region is within a range of 95 to 105% with respect to the average density (within ± 5% when the average density is 100%). included.

  In the present embodiment, the blade body 1 is divided into 8 regions by dividing the blade body 1 around the central axis O of the blade body 1, and the density is measured in each region. However, the present invention is not limited to this. is not. That is, the blade body 1 may be divided into a plurality of regions at equal angles around the central axis O of the blade body 1 and the density may be measured in each region, so the number of equally divided regions is eight. It is not limited. However, in order to ensure measurement accuracy, the number of equally divided regions is preferably at least four.

  In the cutting blade 10, the warping amount of the blade body 1 is 300 μm or less. In the present embodiment, for example, when the thickness of the blade body 1 is larger than 0.3 mm, the amount of warping of the blade body 1 is set to 200 μm or less. The amount of warping of the blade body 1 is obtained as follows.

  As shown in FIGS. 5A and 5B, the cutting blade 10 is placed on the surface plate S, and the laser of the laser interferometer is applied to the cutting blade 10 while rotating the surface plate S about the central axis. By irradiating the light L, the height of the entire circumference of the cutting blade 10 (height from the surface plate S) is measured. Then, a value obtained by subtracting the thickness of the blade body 1 from the maximum value (the height at the position farthest from the surface plate S) among the values obtained by the measurement is defined as a warpage amount. This measurement is performed on both surfaces (both side surfaces 1B and 1B facing the thickness direction) of the blade body 1, and the larger value is adopted.

  In the cutting blade 10, the flatness of the blade body 1 is 10 μm or less. In the present embodiment, the flatness of the blade body 1 is 5 μm or less. The flatness of the blade body 1 is obtained as follows.

  As shown in FIG. 4, the blade body 1 is partitioned into a plurality of regions (eight regions divided equally into eight around the central axis O in the illustrated example) around the central axis O of the blade body 1 at equal angles. . Then, when the thickness of the blade body 1 in each region is measured with a micrometer or the like, the maximum difference in measurement value variation (difference between the maximum value and the minimum value) is defined as flatness.

  In the present embodiment, the blade body 1 is divided into eight regions by dividing the blade body 1 around the central axis O of the blade body 1, and the thickness of the blade body 1 is measured in each region. It is not limited to. That is, the blade body 1 may be partitioned into a plurality of regions at equal angles around the central axis O of the blade body 1, and the thickness may be measured in each region. Therefore, the number of equally divided regions is eight. It is not limited to. However, in order to ensure measurement accuracy, the number of equally divided regions is preferably at least four.

Next, the manufacturing method of the cutting blade 10 described above will be described with reference to FIG.
The manufacturing method of the cutting blade 10 of the present embodiment includes a mixing step of adding a liquid dispersion medium DM to a mixed powder MP containing resin powder of thermocompression-bonding resin and abrasive grains 3, and mixing by adding the dispersion medium DM The powder MP is obtained by cold pressing in a mold to form the original plate 11 of the blade body 1, a sintering step in which the original plate 11 is hot-pressed and sintered, and the original plate 11 is sintered. And a finishing step for adjusting the shape of the outer periphery and inner periphery of the blade body 1.

As shown in FIG. 6A, the mixing step includes a step of filling a mold with mixed powder MP containing resin powder of thermocompression bonding resin and abrasive grains 3, and as shown in FIG. 6B. The step of flattening the surface of the mixed powder MP filled in the mold, and the step of dripping the liquid dispersion medium DM into the mixed powder MP having a flattened surface as shown in FIG. Contains.
In the step of flattening the surface of the mixed powder MP, the entire surface (upper surface) of the mixed powder MP is leveled by a manual operation or a machine so as to have a uniform height. Further, in the step of dropping the dispersion medium DM onto the mixed powder MP, the dispersion medium DM is dropped evenly over the entire surface of the mixed powder MP.

In addition, as the “dispersion medium DM” in the present embodiment, for example, alternative fluorocarbons such as a fluorine-based inert liquid can be used. As the dispersion medium DM, it is preferable to use a liquid having a kinematic viscosity of 2.3 mm ² / s or less (2.3 cSt or less).
The “kinematic viscosity” as used in the present embodiment is a kinematic viscosity necessary at the time of cold pressing in the compression step described later, and refers to the kinematic viscosity of a liquid at 25 ° C., for example.

Specifically, examples of the substance name used for the dispersion medium DM include decahexafluorohexane and perfluorocarbide (C5 to C9).
More specifically, products shown below can be used as the dispersion medium DM.
3M: FLUORINERT (registered trademark) FC72: Kinematic viscosity 0.4 cSt
3M: FLUORINERT (registered trademark) FC84: Kinematic viscosity 0.55 cSt
3M: FLUORINERT (registered trademark) FC 3283: Kinematic viscosity 0.82 cSt
3M: FLUORINERT (registered trademark) FC40: Kinematic viscosity 2.2 cSt
3M: FLUORINERT (registered trademark) FC43 (kinematic viscosity 2.8) 74.7% + FC3283 (kinematic viscosity 0.82) 25.3%: kinematic viscosity 2.3 cSt
Note that “cSt”, which is a unit of the kinematic viscosity, has a relationship of 1 cSt = 1 mm ² / s as described in JIS Z8803: 2011.

  Further, the mixed powder MP is prepared by previously mixing the resin powder made of a thermocompression-bonding resin and the abrasive grains 3 in a premixing process preceding the mixing process. In this embodiment, the mixed powder MP contains a filler 5 in addition to the resin powder and the abrasive grains 3. That is, in the pre-mixing step, the resin powder of the thermocompression bonding resin, the abrasive grains 3 and the filler 5 are mixed in advance to form a mixed powder MP. A liquid dispersion medium DM is mixed.

In the compression step, as shown in FIG. 6 (d), the mixed powder MP to which the dispersion medium DM has been added through the mixing step is subjected to compression processing (cold press) in a cold mold.
The “cold press” in the present embodiment is, for example, compression processing at room temperature, and more specifically indicates compression processing at a temperature lower than the temperature at which thermocompression bonding of resin powder occurs. This cold press causes most of the dispersion medium DM contained in the mixed powder MP to flow out of the mixed powder MP.
In the present embodiment, a mold is used as the mold. However, a mold made of a material other than a metal material may be used as the mold at least in the process before the compression process.

In the sintering step, compression processing (hot pressing) is performed while heating the original plate 11 of the blade body 1 in the mold.
The “hot press” in the present embodiment refers to compression processing in a temperature range in which thermocompression bonding of resin powder is performed. Specifically, for example, in the case of polyimide resin, the original plate 11 is hot-pressed at a mold hot plate of 330 ° C. and a mold temperature of 320 ° C. or higher for 30 minutes under a pressure of 10 tons.
Moreover, after hot pressing, it is preferable to complete the sintering of the blade body 1 by performing heat treatment for 8 hours or more in a heating furnace at 320 to 350 ° C.

In the finishing step, the blade body 1 obtained by thermosetting the original plate 11 in the sintering step is cut or ground on the outer periphery and the inner periphery so as to have a predetermined outer diameter and inner diameter size, and finish processing is performed. To do. In the finishing step, the edge of the cutting edge 1 </ b> A may be sharpened on the outer peripheral edge of the blade body 1.
Thereby, the cutting blade 10 of this embodiment is obtained.

  In the manufacturing method of the cutting blade 10 of the present embodiment described above, a mixture obtained by adding the liquid dispersion medium DM to the mixed powder MP including the resin powder of the thermocompression bonding resin and the abrasive grains 3 is used as a mold or the like. Cold press in the mold. Therefore, during the cold pressing, the dispersion medium DM enters the gaps between the powders of the mixed powder MP, and the powder flow utilizing the liquid flow can be promoted.

  That is, by applying pressure in the molding die to the mixed powder MP mixed with the dispersion medium DM, the dispersion medium DM acts like a lubricant, and the resin powder and the abrasive grains 3 are uniformly molded. Diffuses in. For this reason, the density dispersion | variation in the original plate 11 of the blade main body 1 produced is restrained remarkably small. In this compression step, since cold pressing (cold compression) is performed, the thermocompression bonding of the resin powder does not proceed, and the fluidity of the resin powder is stably secured. The In addition, most of the used dispersion medium DM flows out from the original plate 11 of the blade body 1 during cold pressing and is removed.

  Then, the original plate 11 of the blade body 1 is hot pressed and sintered. As described above, since the density variation of the original plate 11 is suppressed to be small, it is possible to prevent the blade main body 1 from being contracted during the sintering, and as a result, the blade main body in which warpage and flatness are suppressed to be small. 1 can be produced.

  The dispersion medium DM remaining on the original plate 11 of the blade body 1 after the cold pressing can be removed from the blade body 1 by evaporating, for example, before hot pressing in the sintering process. At this time, since the dispersion medium DM exists in a slight gap between the powders, the blade body 1 is prevented from being formed into a porous shape due to volatilization of the dispersion medium DM. In this case, since the dispersion medium DM is not left in the blade body 1 manufactured through the sintering process, the performance of the blade body 1 is not affected by the dispersion medium DM.

  More specifically, the timing at which the dispersion medium DM is volatilized in the sintering step is preferably before the resin powder starts thermocompression bonding by hot pressing. That is, it is preferable that all of the dispersion medium DM is volatilized before the hot pressing. As a result, the space in which the dispersion medium DM was present between the powders is closed (replaced) by the resin phase 2, and no trace of the dispersion medium DM is left in the sintered blade body 1. . Therefore, the dispersion medium DM and its traces do not affect the performance of the blade body 1.

  Specifically, in the cutting blade 10 manufactured according to the present embodiment, the blade main body 1 is divided into a plurality of regions (in the example of the present embodiment, the central axis in the same angle around the central axis O of the blade main body 1). 8 regions divided into 8 equal parts around O), and the average value of the density measured in each region is defined as the average density, and the density measured in each region is suppressed to 90 to 110% with respect to this average density. It is done. That is, the density difference (density variation) is suppressed to be small throughout the entire blade body 1. This is because, as described above, the density difference is already suppressed to be small in the original plate 11 of the blade body 1 that has undergone the compression process by cold pressing. Therefore, the produced blade body 1 is suppressed in warpage and flatness.

More specifically, in the cutting blade 10 manufactured according to this embodiment, the amount of warping of the blade body 1 can be suppressed to 300 μm or less. Further, the flatness of the blade body 1 can be suppressed to 10 μm or less.
In addition, since the flatness of the blade surface obtained after sintering is kept small as described above, both side surfaces 1B and 1B of the blade body 1 are wrapped even in a field of use where particularly high-grade cutting accuracy is required. The desired flatness can be satisfied without flattening by processing.

As described above, since the warpage and flatness of the blade body 1 are suppressed to be small, the following effects can be obtained when the material to be cut is cut by the cutting blade 10.
That is, since the deflection of the cutting blade 10 in the thickness direction is suppressed, the cutting width can be suppressed small and the product yield of the material to be cut can be improved. Further, the force in the cutting width direction is less likely to act on the material to be cut from the cutting blade 10. For this reason, the cutting blade 10 cuts smoothly into the material to be cut, and the occurrence of burrs and chipping on the cut surface is prevented. Accordingly, the quality of electronic material parts (products) formed by dividing the material to be cut into pieces can be stably improved.

  Further, since it is not necessary to perform a lapping process on the blade surface, the lapping process does not cause the abrasive grains 3 to protrude from the resin phase 2. That is, in the present embodiment, the blade body 1 obtained through the sintering step has the abrasive grains 3 disposed on the inner side in the thickness direction than the side surface 1B of the blade body 1, and the blade body 1 in the thickness direction from the side surface 1B. There are no abrasive grains 3 protruding outward. For this reason, at the time of cutting processing, the abrasive grains 3 protruding from the side surface 1B of the blade body 1 cause a problem that the cutting surface of the material to be cut is roughened and the processing quality is deteriorated (causing burr, chipping, etc.). Can be suppressed. Therefore, combined with the effect of reducing the flatness described above, the cutting accuracy can be remarkably increased.

Specifically, in the past, particularly when the thickness of the blade body was reduced to 1.1 mm or less, in order to keep the blade surface flatness small, and the thickness of the blade body was expected to be small. It was indispensable to perform the lap process in order to keep going. For this reason, it was not possible to prevent the abrasive grains from protruding from the side surface of the blade body.
On the other hand, according to the present embodiment, even if the thickness of the blade body 1 is reduced to 1.1 mm or less, the flatness is already suppressed to a low level after sintering, so that lapping is not necessary. For this reason, it can prevent reliably that the abrasive grain 3 protrudes from the side surface 1B of the blade main body 1. FIG. That is, since both surfaces 1B and 1B of the blade body 1 that has undergone the sintering process are formed flat by pressing and have no protrusion of the abrasive grains 3, the lapping process is omitted. It is possible to make the protrusion of the abrasive grains 3 from the surface zero.
Furthermore, since it is not necessary to apply a lapping process, the manufacturing process is facilitated, and it is not necessary to increase the thickness of the blade body in advance in view of the lapping process as in the prior art. Is reduced.

  Further, since the warpage and flatness of the blade body 1 are suppressed to be small, the reaction force received when the cutting blade 10 cuts the material to be cut acts biased on a portion having a large amount of warping as in the prior art. This is prevented. That is, according to the present embodiment, the reaction force is likely to act equally over the entire circumference of the cutting blade 10, and a large load is prevented from being applied to a predetermined location. The tool life of the blade 10 is extended.

  Then, in manufacturing the cutting blade 10 with significantly improved cutting accuracy in this way, compared with the conventional manufacturing method shown in FIGS. 9A to 9C, the present embodiment has a particularly complicated manufacturing process. It is not used. Specifically, in the present embodiment, the above-described excellent performance can be achieved by suppressing the density variation of the blade body 1 (original plate 11) by performing a simple process of cold-pressing the mixed powder MP added with the dispersion medium DM in the mold. Therefore, the cutting blade 10 can be easily manufactured.

As described above, according to the method for manufacturing the cutting blade 10 of the present embodiment, it is possible to prevent the abrasive grains 3 from protruding from the side surface 1B of the blade body 1 while including the resin phase 2 made of the thermocompression bonding resin. Therefore, the cutting blade 10 can be easily manufactured with the cutting accuracy and cutting accuracy improved.
Further, according to the cutting blade 10 of the present embodiment, the cutting accuracy can be remarkably improved while the blade body 1 is thinned.

  Moreover, in the manufacturing method of the cutting blade 10 according to the present embodiment, the mixing step includes a step of filling the mold with the mixed powder MP including the resin powder of the thermocompression bonding resin and the abrasive grains 3, and the mixed powder MP. Are provided with the step of flattening the surface and the step of dripping the liquid dispersion medium DM onto the mixed powder MP, and therefore the following effects are obtained.

  That is, in this case, since the mixing step includes a step of flattening the surface of the mixed powder MP filled in the mold, the mixed powder MP is evenly distributed in the mold in the compression step after the mixing step. The amount of flow until it diffuses into the surface can be kept small. For this reason, the effect that the density variation of the original plate 11 of the blade body 1 described above can be suppressed to a small extent can be achieved more stably.

  In addition, since the mixing step includes a step of dropping the dispersion medium DM onto the mixed powder MP having a flattened surface, the dispersion medium DM is easily mixed evenly with the mixed powder MP. That is, since the dispersion medium DM spreads over the entire mixed powder MP and becomes easy to become familiar with, the powder flow of the mixed powder MP using the liquid flow of the dispersion medium DM in the compression process of the subsequent process of the mixing process is within the mold. Done evenly throughout. Therefore, the effect that the density variation of the original plate 11 of the blade body 1 described above can be suppressed to a small extent can be achieved more stably.

Moreover, in the manufacturing method of the cutting blade 10 of the present embodiment, since the liquid having a kinematic viscosity of 2.3 mm ² / s or less is used as the dispersion medium DM, the dispersion medium DM is between the powders of the mixed powder MP. It is well adapted and easily fluidized in a wide range, and effectively functions as a lubricant that promotes powder flow of the mixed powder MP. Thereby, in a compression process, the effect that the mixed powder MP can be spread | diffused uniformly in a shaping | molding die becomes a more remarkable thing.
Specifically, when the kinematic viscosity of the dispersion medium DM is 2.3 mm ² / s or less, warpage and flatness of the blade body 1 obtained after sintering can be remarkably suppressed.

Further, in the cutting blade 10 of the present embodiment, the blade body 1 is partitioned into a plurality of regions at equal angles around the central axis O of the blade body 1, and the average density measured in each region is the average density. As for the said average density, the density measured in each area | region is 90 to 110%.
Further, the amount of warping of the blade body 1 is 300 μm or less, and the flatness of the blade body 1 is 10 μm or less.

The cutting blade 10 has a density measured in each region of 90 to 110% (within ± 10% within an average density of 100%) with respect to the average density, and density variation of the blade body 1 can be kept small. Therefore, the amount of warping of the blade body 1 can be reduced to 300 μm or less. In addition, the flatness of the blade body 1 can be reduced to 10 μm or less. For this reason, at the time of manufacturing the cutting blade 10, it is possible to reduce a lapping process for flattening the blade surface (both side surfaces 1B, 1B).
Therefore, it is possible to remarkably increase the cutting accuracy by the cutting blade 10 while improving the manufacturability of the cutting blade 10.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

  For example, in the cutting blade 10 of the above-described embodiment, one layer of the resin phase 2 in which the abrasive grains 3 and the filler 5 are dispersed is provided to form the blade body 1. However, such a resin phase 2 is thick. The blade body 1 may be formed by laminating a plurality in the vertical direction. In this case, a plurality of the original plates 11 of the blade body 1 obtained through the compression process are stacked in the thickness direction in the sintering process and hot-pressed and sintered.

  Moreover, in the above-mentioned embodiment, the mixing process of the manufacturing method of the cutting blade 10 fills the mold with the mixed powder MP containing the resin powder and the abrasive grains 3 and flattens the surface of the mixed powder MP. Although the process and the process of dropping the dispersion medium DM onto the mixed powder MP are provided, the present invention is not limited to this. That is, in the mixing step, for example, the dispersion medium DM may be dropped without flattening the surface of the mixed powder MP, or the dispersion medium DM may be dropped onto the mixed powder MP and then filled in the mold. However, as described in the above-described embodiment, when the mixing process includes the above three processes, the density variation is small in the original plate 11 of the blade body 1 that has undergone the compression process subsequent to the mixing process. It is preferable because the effect of being suppressed becomes more remarkable.

In the above-described embodiment, the abrasive grains 3 made of either diamond or cBN are dispersed in the resin phase 2. However, the present invention is not limited to this. That is, as the abrasive grains 3, particles made of a hard material other than diamond and cBN may be dispersed in the resin phase 2 as the abrasive grains 3.
Further, although the abrasive grains 3 and the filler 5 are dispersed in the resin phase 2 of the blade body 1, the filler 5 may not be dispersed in the resin phase 2 (that is, the filler 5 may not be used). ).

In the above-described embodiment, as the thermocompression bonding resin for forming the resin phase 2, for example, polyimide resin, specific phenol resin, polybenzimidazole (PBI (registered trademark)) or the like is used. Other than that, a thermocompression bonding resin may be used.
Further, the blade body 1 is partitioned into a plurality of regions at equal angles around the central axis O of the blade body 1, and the average density measured in each region is defined as the average density, The density measured in the region was described as 90-110%. This was measured, for example, in a plurality of regions equally divided around the central axis O with respect to the average density even when the type of the resin powder as the raw material of the resin phase 2 changed and the average density changed. It means that each density is included in the range of 90 to 110%. However, the present invention is not limited to the case where the density measured in each region with respect to the average density is included in the range of 90 to 110%.

  Further, in the above-described embodiment, as the dispersion medium DM, for example, an alternative fluorocarbon such as a fluorine-based inert liquid is used, but the present invention is not limited thereto. That is, the dispersion medium DM may be an alternative chlorofluorocarbon other than the fluorine-based inert liquid or a liquid other than the alternative chlorofluorocarbon.

  In the above-described embodiment, it has been described that the cutting blade 10 is used for cutting an electronic material component that is a composite material having a metal material in a resin such as QFN or IrDA as a material to be cut. However, the present invention is not limited to this. That is, the cutting blade 10 may precisely cut a workpiece to be cut made of a brittle material (hard brittle material) such as glass, ceramics, or quartz used for a semiconductor device (electronic material component).

  In addition, in the range which does not deviate from the meaning of this invention, you may combine each structure (component) demonstrated by the above-mentioned embodiment, a modification, and a remark etc., addition of a structure, omission, substitution, others It can be changed. Further, the present invention is not limited by the above-described embodiments, and is limited only by the scope of the claims.

  Hereinafter, the present invention will be specifically described by way of examples. However, the present invention is not limited to this embodiment.

<Measurement of warpage and flatness>
The cutting blade 10 manufactured by the manufacturing method of the cutting blade 10 described in the above embodiment is referred to as Example 1, and the cutting blade manufactured by the conventional manufacturing method shown in FIGS. As a result, 100 cutting blades were prepared. As Comparative Example 2, an attempt was made to produce a cutting blade by the doctor blade method.

  Each blade for cutting has a blade body formed of a resin phase, and the same material (raw material) is used for the resin powder as a raw material of the resin phase. Specifically, a polyimide resin, which is a thermocompression bonding resin, was used as the resin powder. Moreover, the same material was used also about the abrasive grain and filler disperse | distributed to a resin phase, and the content rate of the abrasive grain and filler in a braid | blade main body was also mutually set equally.

In the manufacture of the cutting blade 10 of Example 1, 3M: FLUORINERT (registered trademark) FC72: kinematic viscosity 0.4 cSt was used as the dispersion medium DM.
In addition, surface processing (blade surface lapping) was not performed on all cutting blades.

The dimensions and composition of the blade body of each cutting blade were as follows.
・ Outer diameter: φ58mm
・ Inner diameter: φ40mm
・ Thickness: 1.1mm
Composition: 48.75% polyimide, 25% diamond abrasive grains, 26.25% filler
(The above composition represents volume%)

The warpage amount (blade warpage amount) and flatness (blade flatness) were measured for all the various cutting blades (100 blades each). The method for measuring the amount of warpage and flatness is as described in the above embodiment.
The measurement results are shown in Tables 1 and 2 below.
The numerical values in the table represent the number of blades for cutting corresponding to each numerical range of the warpage amount and flatness. The warpage amount is 301 μm or more and cannot be used as a product, and the flatness is 21 μm. As a result, it could not be used as a product.

A cutting blade 10 manufactured in the same manner as in Example 1 described above was used in Example 2 except that the thickness of the blade body was 1.0 mm. A cutting blade manufactured in the same manner as in Comparative Example 1 described above was used as Comparative Example 3 except that the thickness of the blade body was 1.0 mm. A cutting blade manufactured in the same manner as in Comparative Example 2 described above was used as Comparative Example 4 except that the thickness of the blade body was 1.0 mm.
Then, the amount of warpage and the flatness were measured for all of the various cutting blades (100 sheets each).
The measurement results are shown in Tables 3 and 4 below.

Further, a cutting blade 10 manufactured in the same manner as in Example 1 described above was used in Example 3 except that the thickness of the blade body was set to 0.3 mm. A cutting blade manufactured in the same manner as in Comparative Example 1 described above was used as Comparative Example 5 except that the thickness of the blade body was 0.3 mm. Further, a cutting blade manufactured in the same manner as in Comparative Example 2 described above was used as Comparative Example 6 except that the thickness of the blade body was set to 0.3 mm.
Then, the amount of warpage and the flatness were measured for all of the various cutting blades (100 sheets each).
The measurement results are shown in Tables 5 and 6 below.

Further, a cutting blade 10 manufactured in the same manner as in Example 1 described above was used in Example 4 except that the thickness of the blade body was 0.1 mm. A cutting blade manufactured in the same manner as in Comparative Example 1 described above was used as Comparative Example 7 except that the thickness of the blade body was 0.1 mm. A cutting blade manufactured in the same manner as in Comparative Example 2 described above was used as Comparative Example 8, except that the thickness of the blade body was 0.1 mm.
Then, the amount of warpage and the flatness were measured for all of the various cutting blades (100 sheets each).
The measurement results are shown in Table 7 and Table 8 below.

  From the results of Tables 1 to 8, in Examples 1 to 4, the warpage amount of the blade body 1 was suppressed to 300 μm or less, and the flatness of the blade body 1 was suppressed to 10 μm or less. Among them, in Examples 1 to 3 in which the thickness of the blade body 1 is 0.3 to 1.1 mm, the warpage amount of the blade body 1 is suppressed to 200 μm or less. Further, in Example 1 in which the thickness of the blade body 1 is 1.1 mm and Example 2 in which the thickness of the blade body 1 is 1.0 mm, the warping amount of the blade body 1 is 100 μm or less in total. The flatness of the blade body 1 was suppressed to a total number of 5 μm or less.

  On the other hand, among Comparative Examples 1 to 8, Comparative Examples 2, 4, 6, and 8 that were attempted to be produced by the doctor blade method could not be formed into a sheet, and a cutting blade could not be produced. Further, in Comparative Examples 1, 3, 5, and 7 manufactured by the conventional manufacturing method shown in FIGS. 9A to 9C, a large number of blade body 1 warping amounts exceeding 300 μm are observed. Many flatnesses exceeding 10 μm were observed.

<Measurement of density variation, warpage and flatness>
Each of the cutting blades 10 manufactured by the method for manufacturing the cutting blade 10 described in the above-described embodiment and having a blade body 1 having a thickness of 1.1 mm, 1.0 mm, 0.3 mm, and 0.1 mm is used. In this order, Examples 5 to 8 were used. Further, each cutting blade manufactured by a conventional manufacturing method shown in FIGS. 9A to 9C and having a blade body 1 having a thickness of 1.1 mm, 1.0 mm, 0.3 mm, and 0.1 mm is used. In this order, Comparative Examples 9 to 12 were used. The material of the resin phase of each cutting blade is a polyimide resin. Then, 100 blades for each of Examples 5 to 8 and Comparative Examples 9 to 12 were prepared.

In each cutting blade, as shown in FIG. 4, the blade body was divided into eight regions divided into eight equal parts around the central axis O of the blade body, and the density was measured in each region. The average value of the densities measured in the eight regions of the blade body is defined as the average density, and the average density is defined as 100%, and each density measured in the eight regions is within a range of plus or minus several percent with respect to 100%. I confirmed that it was fit. The average density is almost as designed (target value).
Further, the warpage amount and flatness of each cutting blade were measured in the same manner as in the above <Measurement of warpage amount and flatness>.
The measurement results are shown in Table 9 below.

  From the results of Table 9, in the cutting blades 10 of Examples 5 to 8, all the measured densities are included in a range of ± 10% with respect to the average density of 100% (that is, 90 to 110%). Specifically, it was within the range of ± 5% with respect to the average density of 100% (that is, 95 to 105%). The cutting blade 10 in which the density variation (density difference) is suppressed in this way has a total warpage amount of 300 μm or less, specifically, a total warpage amount of 100 μm or less. Further, the flatness was a total of 10 μm or less.

  On the other hand, in the cutting blades of Comparative Examples 9 to 12, some of the measured densities are outside the range of ± 10% with respect to the average density of 100% (that is, less than 90% or more than 110%). The density variation was large. In Comparative Examples 10 to 12, it was found that the amount of warpage reached more than 300 μm and that the flatness reached more than 20 μm.

<Rotation test>
The cutting blade 10 manufactured by the method for manufacturing the cutting blade 10 described in the above embodiment was taken as Example 9. Moreover, the cutting blade manufactured by the conventional manufacturing method shown in FIGS. The material of the resin phase of each cutting blade is a polyimide resin. Then, 100 cutting blades of Example 9 and Comparative Example 13 were prepared.

The dimensions of the blade body of each cutting blade were as follows.
・ Outer diameter: φ58mm
・ Inner diameter: φ40mm
・ Thickness: 0.3mm

The test conditions were as follows.
・ Use cutting machine: Tokyo Seimitsu A-WD100A
・ Spindle speed: 40000m ^-1
・ Evaluation number: 100 each

Then, the cutting blade mounted on the cutting machine was rotated (idling), and the number of blades damaged during the lapse of 1 minute from the start of rotation was confirmed.
The test results are shown in Table 10 below.

  From the results of Table 10, it was found that the blade rigidity of the cutting blade 10 of Example 9 was stably increased as compared with the cutting blade of Comparative Example 13. This is presumably because, in Example 9, the density variation was suppressed to be small and the rigidity variation was also suppressed to be small, so that it was difficult to form a weak portion (a portion where damage started).

<Abrasion test>
The cutting blade 10 manufactured by the manufacturing method of the cutting blade 10 described in the above embodiment is referred to as Example 10, and the cutting blade manufactured by the conventional method shown in FIGS. It was. The material of the resin phase of each cutting blade is a polyimide resin. Then, five cutting blades of Example 10 and Comparative Example 14 were prepared.

The dimensions of the blade body of each cutting blade were as follows.
・ Outer diameter: φ58mm
・ Inner diameter: φ40mm
・ Thickness: 0.3mm
In addition, the blade used was the specification of SDC230-R100 in both Example 10 and Comparative Example 14.

The test conditions were as follows.
・ Use cutting machine: Tokyo Seimitsu A-WD100A
・ Spindle speed: 15000m ^-1
・ Incision: 1.8mm
・ Feeding speed: 100mm / s
・ Cooling water volume: 1.2L + 1.2L
・ Dresser plate: Tokyo Seimitsu A2-2mm
・ Groove number: 30 x 5 sets

Then, the cutting blade mounted on the cutting machine was rotated, and the dresser plate was grooved to check the amount of blade wear.
The test results are shown in Table 11 below.

  From the results shown in Table 11, the average wear amount of each cutting blade 10 of Example 10 (Examples 10-1 to 10-5) is for each cutting of Comparative Example 14 (Comparative Examples 14-1 to 14-5). It was found that the average wear amount of the blade can be reduced to about 1/2 to 1/3. This is because the variation in density is suppressed to be small in Example 10, and the amount of wear that progresses radially inward from the outer periphery of the blade is made uniform in the entire circumferential direction, and as a result, there is no place where wear progresses early. This is probably because the progress of wear as a whole was also suppressed.

<Cutting test>
The cutting blade 10 manufactured by the method for manufacturing the cutting blade 10 described in the above embodiment was taken as Example 11. Moreover, the cutting blades manufactured by the conventional manufacturing method shown in FIGS. The material of the resin phase of each cutting blade of Example 11 and Comparative Example 16 was polyimide resin, and the material of the resin phase of the cutting blade of Comparative Example 15 was phenol resin. Three cutting blades of Example 11, Comparative Example 15 and Comparative Example 16 were prepared.

The dimensions of the blade body of each cutting blade were as follows.
・ Outer diameter: φ58mm
・ Inner diameter: φ40mm
・ Thickness: 0.3mm
In addition, the blade used was the specification of SDC230-R100 for both Example 11, Comparative Example 15 and Comparative Example 16.

The test conditions were as follows.
・ Use cutting machine: Tokyo Seimitsu A-WD100A
・ Spindle speed: 25000m ^-1
・ Feeding speed: 30mm / s
・ Cooling water volume: 1.2L + 1.2L
-Material to be cut: QFN package (resin and copper composite)
・ Number of QFN cuts: 5 per blade

Then, the cutting blade mounted on the cutting machine was rotated to cut the QFN package, and the blade wear rate and the processing quality were confirmed. Regarding the processing quality, as shown in FIG. 7, the material to be cut was cut (diced) into a grid shape, and the length of the burrs 20 of the separated chips was measured. The length of the burr 20 was measured for 10 chips per work.
The test results of the wear rate are shown in Table 12 below, and the test results of the processing quality (variable size comparison) are shown in FIG.

  From the results shown in Table 12, the wear rates of the cutting blades 10 of Example 11 (Examples 11-1 to 11-3) are the cutting blades of Comparative Example 15 (Comparative Examples 15-1 to 15-3). It was found that the wear rate of each cutting blade of Comparative Example 16 (Comparative Examples 16-1 to 16-3) was reduced to about 1/2 to 1/4. This is because the variation in density is suppressed to be small in Example 11, and the amount of wear that progresses radially inward from the outer periphery of the blade is made uniform throughout the entire circumferential direction. This is probably because the overall wear rate was also suppressed.

  Moreover, from the result of FIG. 8, the burr size of the chip | tip cut | disconnected with each cutting blade 10 of Example 11 (Examples 11-1 to 11-3) is Comparative Example 15 (Comparative Examples 15-1 to 15-3). ) And the chip burr size cut by each cutting blade of Comparative Example 16 (Comparative Examples 16-1 to 16-3), and the burr size of the chip cut by each cutting blade of I understood. This is presumably because in Example 11, the variation in density was suppressed to a small level, and the warp and flatness of the blade body 1 were suppressed to a small level. As a result, the resistance acting on the chip cut surface was reduced.

DESCRIPTION OF SYMBOLS 1 Blade body 1A Cutting edge 1B Side surface 2 Resin phase 3 Abrasive grain 10 Cutting blade 11 Blade body original plate DM Dispersion medium MP Mixed powder O Central axis of blade body

Claims (7)

A mixing step of adding a liquid dispersion medium to the mixed powder containing the resin powder and the abrasive grains of the thermocompression bonding resin;
The mixed powder to which the dispersion medium is added is cold-pressed in a mold to form a blade main plate, and a compression step;
And a sintering step of sintering the original plate by hot pressing. It is a manufacturing method of the cutting blade according to claim 1,
The mixing step includes
Filling a mold with a mixed powder containing resin powder and abrasive grains of a thermocompression bonding resin; and
Flattening the surface of the mixed powder;
And a step of dripping a liquid dispersion medium into the mixed powder. It is a manufacturing method of the cutting blade according to claim 1 or 2,
A method for producing a cutting blade, wherein a liquid having a kinematic viscosity of 2.3 mm ² / s or less is used as the dispersion medium. A blade for cutting comprising a disk-shaped blade body, and a cutting blade formed on the outer peripheral edge of the blade body,
The blade body is
A resin phase formed of a thermocompression bonding resin;
Comprising abrasive grains dispersed in the resin phase,
The blade body has a thickness of 1.1 mm or less;
The blade for cutting, wherein the abrasive grains are arranged on the inner side in the thickness direction than the side surface facing the thickness direction of the blade body. The cutting blade according to claim 4,
The blade body is partitioned into a plurality of regions at equal angles around the central axis of the blade body, and the average value of the density measured in each region is taken as the average density,
A cutting blade characterized in that a density measured in each region is 90 to 110% with respect to the average density. The cutting blade according to claim 4 or 5,
A blade for cutting, wherein the amount of warping of the blade body is 300 μm or less. The cutting blade according to any one of claims 4 to 6,
A blade for cutting, wherein the flatness of the blade body is 10 μm or less.

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