TWI649904B - 超音波裝置及其製造方法以及電子機器及超音波圖像裝置 - Google Patents
超音波裝置及其製造方法以及電子機器及超音波圖像裝置 Download PDFInfo
- Publication number
- TWI649904B TWI649904B TW103139818A TW103139818A TWI649904B TW I649904 B TWI649904 B TW I649904B TW 103139818 A TW103139818 A TW 103139818A TW 103139818 A TW103139818 A TW 103139818A TW I649904 B TWI649904 B TW I649904B
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- TW
- Taiwan
- Prior art keywords
- opening
- ultrasonic device
- ultrasonic
- substrate
- matching layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/13—Tomography
- A61B8/14—Echotomography
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4427—Device being portable or laptop-like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4488—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer the transducer being a phased array
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/46—Ultrasonic, sonic or infrasonic diagnostic devices with special arrangements for interfacing with the operator or the patient
- A61B8/461—Displaying means of special interest
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/064—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface with multiple active layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Heart & Thoracic Surgery (AREA)
- Molecular Biology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Veterinary Medicine (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Gynecology & Obstetrics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-240276 | 2013-11-20 | ||
| JP2013240276A JP2015097733A (ja) | 2013-11-20 | 2013-11-20 | 超音波デバイスおよびその製造方法並びに電子機器および超音波画像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201521248A TW201521248A (zh) | 2015-06-01 |
| TWI649904B true TWI649904B (zh) | 2019-02-01 |
Family
ID=53173990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103139818A TWI649904B (zh) | 2013-11-20 | 2014-11-17 | 超音波裝置及其製造方法以及電子機器及超音波圖像裝置 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US9818929B2 (enExample) |
| JP (1) | JP2015097733A (enExample) |
| CN (1) | CN104644211B (enExample) |
| TW (1) | TWI649904B (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015097733A (ja) * | 2013-11-20 | 2015-05-28 | セイコーエプソン株式会社 | 超音波デバイスおよびその製造方法並びに電子機器および超音波画像装置 |
| US9772314B2 (en) | 2013-12-18 | 2017-09-26 | Seiko Epson Corporation | Ultrasonic sensor and measuring method using the same, and method of manufacturing ultrasonic sensor |
| CA2952312C (en) | 2014-07-11 | 2020-04-14 | Microtech Medical Technologies Ltd. | Multi-cell electroacoustic transducer |
| JP2016033970A (ja) * | 2014-07-31 | 2016-03-10 | セイコーエプソン株式会社 | 超音波デバイスおよびその製造方法並びにプローブおよび電子機器 |
| KR101958134B1 (ko) * | 2015-03-27 | 2019-03-13 | 가부시키가이샤 무라타 세이사쿠쇼 | 전자 부품 |
| WO2016170961A1 (ja) * | 2015-04-21 | 2016-10-27 | オリンパス株式会社 | 超音波振動子、超音波プローブおよび超音波振動子の製造方法 |
| JP6610058B2 (ja) * | 2015-07-29 | 2019-11-27 | セイコーエプソン株式会社 | 超音波デバイス、及び電子機器 |
| US10422772B1 (en) * | 2015-10-20 | 2019-09-24 | Sonavation, Inc. | Acoustic sensing through a barrier |
| JP6693154B2 (ja) * | 2016-02-04 | 2020-05-13 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波プローブ、超音波装置、超音波トランスデューサーの製造方法、及び振動装置 |
| JP2017163331A (ja) * | 2016-03-09 | 2017-09-14 | セイコーエプソン株式会社 | 超音波デバイス、超音波モジュール、及び超音波測定装置 |
| JP2017163330A (ja) * | 2016-03-09 | 2017-09-14 | セイコーエプソン株式会社 | 超音波デバイス、超音波モジュール、及び超音波測定装置 |
| JP6852366B2 (ja) * | 2016-11-29 | 2021-03-31 | セイコーエプソン株式会社 | 超音波デバイス、及び超音波装置 |
| JP6753293B2 (ja) * | 2016-12-09 | 2020-09-09 | セイコーエプソン株式会社 | 超音波デバイス及び超音波装置 |
| JP6900730B2 (ja) * | 2017-03-29 | 2021-07-07 | ブラザー工業株式会社 | アクチュエータ |
| JP7127554B2 (ja) * | 2019-01-18 | 2022-08-30 | コニカミノルタ株式会社 | 超音波プローブ、及び超音波診断装置 |
| JP2020155919A (ja) * | 2019-03-20 | 2020-09-24 | ヤマハ株式会社 | 超音波センサ |
| JP7190028B2 (ja) * | 2019-03-29 | 2022-12-14 | 京セラ株式会社 | 超音波放射器具及び超音波装置 |
| JP7249924B2 (ja) * | 2019-10-23 | 2023-03-31 | 株式会社東芝 | センサ及び検査装置 |
| JP7327122B2 (ja) * | 2019-11-29 | 2023-08-16 | セイコーエプソン株式会社 | 超音波デバイス |
| CN114786591A (zh) * | 2019-12-24 | 2022-07-22 | 京瓷株式会社 | 超声波辐射器具以及超声波装置 |
| EP4099718A4 (en) * | 2020-01-30 | 2024-02-14 | Suncall Corporation | ELECTROSTATIC TRANSDUCER AND METHOD FOR PRODUCING THEREOF |
| JP7388996B2 (ja) | 2020-09-03 | 2023-11-29 | 株式会社東芝 | 検査装置及び検査方法 |
| JP7581795B2 (ja) * | 2020-11-25 | 2024-11-13 | セイコーエプソン株式会社 | 圧電アクチュエーター、超音波素子、超音波探触子、超音波装置、及び電子デバイス |
| TWI816144B (zh) * | 2021-06-22 | 2023-09-21 | 友達光電股份有限公司 | 顯示裝置 |
| CA3232432A1 (en) * | 2021-09-13 | 2023-03-16 | Decision Sciences Medical Company, LLC | Acoustic couplant devices and interface mediums |
| CN117774196B (zh) * | 2023-06-25 | 2026-05-29 | 上海声一电子科技有限公司 | 超声导管的制作方法、超声导管及其成型模具 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030009873A1 (en) * | 2000-12-21 | 2003-01-16 | Ram Hatangadi | Multidimensional array and fabrication thereof |
| US20070040477A1 (en) * | 2004-08-25 | 2007-02-22 | Denso Corporation | Ultrasonic sensor |
| US7449821B2 (en) * | 2005-03-02 | 2008-11-11 | Research Triangle Institute | Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
| US7696672B2 (en) * | 2007-01-29 | 2010-04-13 | Denso Corporation | Ultrasonic sensor having acoustic matching member with conductive layer formed on and extending only along acoustic matching member connecting surface |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6518860B2 (en) | 2001-01-05 | 2003-02-11 | Nokia Mobile Phones Ltd | BAW filters having different center frequencies on a single substrate and a method for providing same |
| CN100583234C (zh) * | 2003-06-09 | 2010-01-20 | 皇家飞利浦电子股份有限公司 | 用于设计具有声激励集成电子器件的超声换能器的方法 |
| US8456958B2 (en) * | 2006-02-21 | 2013-06-04 | Vermon S.A. | Capacitive micro-machined ultrasonic transducer for element transducer apertures |
| US8193685B2 (en) | 2007-07-03 | 2012-06-05 | Koninklijke Philips Electronics N.V. | Thin film detector for presence detection |
| JP5261152B2 (ja) * | 2008-11-27 | 2013-08-14 | 日立アロカメディカル株式会社 | 超音波振動子 |
| JP2011071842A (ja) * | 2009-09-28 | 2011-04-07 | Fujifilm Corp | 超音波プローブ、および超音波トランスデューサアレイの製造方法 |
| JP5659564B2 (ja) * | 2010-06-10 | 2015-01-28 | コニカミノルタ株式会社 | 超音波探触子および超音波診断装置 |
| JP5990930B2 (ja) * | 2012-02-24 | 2016-09-14 | セイコーエプソン株式会社 | 超音波トランスデューサー素子チップおよびプローブ並びに電子機器および超音波診断装置 |
| JP6047936B2 (ja) * | 2012-06-14 | 2016-12-21 | セイコーエプソン株式会社 | 超音波トランスデューサー素子パッケージ、プローブ、プローブヘッド、電子機器、超音波診断装置および超音波トランスデューサー素子パッケージの製造方法 |
| JP2015097733A (ja) * | 2013-11-20 | 2015-05-28 | セイコーエプソン株式会社 | 超音波デバイスおよびその製造方法並びに電子機器および超音波画像装置 |
| JP6476633B2 (ja) * | 2014-07-31 | 2019-03-06 | セイコーエプソン株式会社 | 圧電デバイス |
| JP2016033970A (ja) * | 2014-07-31 | 2016-03-10 | セイコーエプソン株式会社 | 超音波デバイスおよびその製造方法並びにプローブおよび電子機器 |
-
2013
- 2013-11-20 JP JP2013240276A patent/JP2015097733A/ja not_active Withdrawn
-
2014
- 2014-11-14 CN CN201410647455.2A patent/CN104644211B/zh active Active
- 2014-11-14 US US14/541,528 patent/US9818929B2/en active Active
- 2014-11-17 TW TW103139818A patent/TWI649904B/zh active
-
2017
- 2017-10-11 US US15/729,951 patent/US10707407B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030009873A1 (en) * | 2000-12-21 | 2003-01-16 | Ram Hatangadi | Multidimensional array and fabrication thereof |
| US20070040477A1 (en) * | 2004-08-25 | 2007-02-22 | Denso Corporation | Ultrasonic sensor |
| US7449821B2 (en) * | 2005-03-02 | 2008-11-11 | Research Triangle Institute | Piezoelectric micromachined ultrasonic transducer with air-backed cavities |
| US7696672B2 (en) * | 2007-01-29 | 2010-04-13 | Denso Corporation | Ultrasonic sensor having acoustic matching member with conductive layer formed on and extending only along acoustic matching member connecting surface |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201521248A (zh) | 2015-06-01 |
| CN104644211A (zh) | 2015-05-27 |
| JP2015097733A (ja) | 2015-05-28 |
| US20180047891A1 (en) | 2018-02-15 |
| US9818929B2 (en) | 2017-11-14 |
| US20150141827A1 (en) | 2015-05-21 |
| US10707407B2 (en) | 2020-07-07 |
| CN104644211B (zh) | 2019-03-15 |
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