TWI645966B - Polyimide release film, laminated board equipped with polyimide release film with adhesive layer, laminated board, single-layer or multilayer circuit board equipped with polyimide release film with adhesive layer And manufacturing method of multilayer wiring board - Google Patents

Polyimide release film, laminated board equipped with polyimide release film with adhesive layer, laminated board, single-layer or multilayer circuit board equipped with polyimide release film with adhesive layer And manufacturing method of multilayer wiring board Download PDF

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TWI645966B
TWI645966B TW103142930A TW103142930A TWI645966B TW I645966 B TWI645966 B TW I645966B TW 103142930 A TW103142930 A TW 103142930A TW 103142930 A TW103142930 A TW 103142930A TW I645966 B TWI645966 B TW I645966B
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polyimide
release film
resin
adhesive layer
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TW201532822A (en
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山田薰平
藤本大輔
岩倉哲郎
金子陽一
村井曜
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日商日立化成股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/06Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/38Layered products comprising a layer of synthetic resin comprising epoxy resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J163/00Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/40Adhesives in the form of films or foils characterised by release liners
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/206Insulating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/30Properties of the layers or laminate having particular thermal properties
    • B32B2307/306Resistant to heat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties
    • B32B2307/538Roughness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/70Other properties
    • B32B2307/748Releasability
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2461/00Presence of condensation polymers of aldehydes or ketones
    • C09J2461/005Presence of condensation polymers of aldehydes or ketones in the release coating
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2479/00Presence of polyamine or polyimide
    • C09J2479/08Presence of polyamine or polyimide polyimide
    • C09J2479/086Presence of polyamine or polyimide polyimide in the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0137Materials
    • H05K2201/0154Polyimide
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0014Shaping of the substrate, e.g. by moulding

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Laminated Bodies (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

本發明提供一種聚醯亞胺脫模薄膜,其是作為一種材料,該材料在熱壓步驟後不需要蝕刻,可得到表面粗糙度適合半加成法之絕緣層,並進一步可製造平坦性良好之單層或多層線路板。具體而言,本發明提供一種聚醯亞胺脫模薄膜,其在聚醯亞胺薄膜的至少一方的面上具有脫模層,該脫模層是含有醇酸樹脂(A)及胺基樹脂(B)而成。又,本發明提供一種多層線路板的製造方法,該方法包含下述步驟:藉由將在前述脫模層的未設置聚醯亞胺薄膜之面上附有黏著層的聚醯亞胺脫模薄膜積層於單層或多層線路板,來製造配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板的步驟;由配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板去除聚醯亞胺脫模薄膜的步驟;及,進行電路加工的步驟。 The invention provides a polyimide release film, which is used as a material. The material does not need to be etched after the hot-pressing step, an insulating layer having a surface roughness suitable for the semi-additive method can be obtained, and further, good flatness can be manufactured. Single-layer or multilayer circuit boards. Specifically, the present invention provides a polyimide release film having a release layer on at least one side of the polyimide film, the release layer containing an alkyd resin (A) and an amine-based resin (B). In addition, the present invention provides a method for manufacturing a multilayer wiring board. The method includes the steps of demolding a polyimide having an adhesive layer on a surface of the release layer that is not provided with a polyimide film. The film is laminated on a single-layer or multi-layer circuit board to produce a single-layer or multi-layer circuit board provided with a polyimide release film with an adhesive layer; the polyimide is provided with an adhesive layer and is released from the mold A step of removing a polyimide release film from a single-layer or multi-layer circuit board of the film; and a step of performing circuit processing.

Description

聚醯亞胺脫模薄膜、配置了附有黏著層的聚醯亞胺脫模薄膜之積層板、積層板、配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板、以及多層線路板的製造方法 Polyimide release film, laminated board equipped with polyimide release film with adhesive layer, laminated board, single-layer or multilayer circuit board equipped with polyimide release film with adhesive layer And manufacturing method of multilayer wiring board

本發明是關於一種聚醯亞胺脫模薄膜、配置了附有黏著層的聚醯亞胺脫模薄膜之積層板、積層板、配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板、以及多層線路板的製造方法。 The invention relates to a polyimide mold release film, a laminated board configured with a polyimide release film with an adhesive layer, a laminated board, and a single sheet equipped with a polyimide release film with an adhesive layer. A multilayer or multilayer wiring board, and a method for manufacturing a multilayer wiring board.

以往,多層線路板是經由熱壓步驟來製造。此熱壓步驟,是藉由下述方式進行:將預浸體或樹脂薄膜和銅箔,積層於單面或雙面具有內層電路之電路基板上,該預浸體是將樹脂組成物含浸、塗佈於纖維基材而得到,該樹脂薄膜不包含纖維基材。又,熱壓步驟因生產性高而被廣泛使用。 Conventionally, a multilayer wiring board is manufactured through a hot pressing step. This hot-pressing step is performed by laminating a prepreg or a resin film and a copper foil on a single or double-sided circuit board having an inner layer circuit. The prepreg is impregnated with a resin composition, It is obtained by coating on a fiber substrate, and the resin film does not include a fiber substrate. The hot pressing step is widely used because of its high productivity.

而且,隨著近年來電子機器的小型化、高積體化,亦要求多層線路板材料的微細線路化。作為形成微細線路的方法,適合使用半加成法(semi-additive method),該方法是在對要形成電路之面實施無電解鍍銅後,僅在需要的部分進行電解鍍銅,並藉由蝕刻來將不需要的部分之鍍銅層去除,而形成線路。藉由此方法,藉由使要蝕刻去除之銅層的 厚度越薄,亦即,在表面粗糙度更小的要形成電路之面上形成較薄的鍍銅層後去除,可進一步微細線路化。 In addition, in recent years, with the miniaturization and high integration of electronic equipment, fine wiring of multilayer wiring board materials is also required. As a method for forming a fine circuit, a semi-additive method is suitably used. After electroless copper plating is performed on the surface where a circuit is to be formed, electrolytic copper plating is performed only on a required portion, and by Etching removes the copper plating layer of the unnecessary part and forms a circuit. In this way, by making the copper layer to be removed by etching The thinner the thickness, that is, the thinner the copper plating layer is formed on the surface where the surface roughness is to be formed, and the thinner the copper plating layer is removed, the finer the wiring can be.

然而,使用熱壓步驟之多層線路板的製造,因在進行熱壓步驟時將銅箔積層於要形成電路之面與加壓板之間,故為了進行半加成法,需要銅箔的蝕刻步驟(參照例如專利文獻1)。又,因銅箔的表面粗糙度會轉印至要形成多層化電路之面上,故要形成電路之面的表面粗糙度較大,為0.3μm左右。 However, in the manufacture of a multilayer wiring board using a hot-pressing step, copper foil is required to be etched in order to perform a semi-additive method because a copper foil is laminated between a circuit-forming surface and a pressure plate during the hot-pressing step. Procedure (see, for example, Patent Document 1). In addition, since the surface roughness of the copper foil is transferred to the surface on which the multilayer circuit is to be formed, the surface roughness of the surface on which the circuit is to be formed is large and is about 0.3 μm.

為了解決此問題,亦正在研究使用表面粗糙度小的聚對苯二甲酸乙二酯(PET)等薄膜材料取代銅箔(參照例如專利文獻2),但樹脂薄膜的硬化物即絕緣層會受到低耐熱性或熱變形影響,因此尚有進一步改善的空間。 In order to solve this problem, the use of thin film materials such as polyethylene terephthalate (PET) with a small surface roughness in place of copper foil is also being studied (see, for example, Patent Document 2). Low heat resistance or thermal deformation, so there is still room for further improvement.

又,作為這樣的薄膜材料的脫模劑,廣泛使用剝離性優異的聚矽氧系脫模劑。 Moreover, as a mold release agent of such a film material, the silicone release agent which is excellent in peelability is widely used.

[先前技術文獻] [Prior technical literature] (專利文獻) (Patent Literature)

專利文獻1:日本特開2003-251739號公報 Patent Document 1: Japanese Patent Application Laid-Open No. 2003-251739

專利文獻2:日本特許第5212578號公報 Patent Document 2: Japanese Patent No. 5212578

然而,使用聚矽氧系脫模劑的情況,會有聚矽氧組成物中的低分子量成分轉移至絕緣層而造成可靠性降低等這樣的問題。 However, in the case of using a polysiloxane-based release agent, there is a problem that a low-molecular-weight component in the polysiloxane composition is transferred to an insulating layer and the reliability is lowered.

本發明之目的是鑒於這種現狀,提供一種聚醯亞胺脫模薄膜,其是作為一種材料,該材料不需要先前在使用銅箔的情況中需要的熱壓步驟後的蝕刻,可得到表面粗糙度適合半加成法之絕緣層,且脫模劑成分較少轉移至絕緣層,並進一步可製造平坦性良好之多層線路板。 In view of this situation, an object of the present invention is to provide a polyimide release film as a material that does not require etching after the hot pressing step previously required in the case of using copper foil, and can obtain a surface The roughness is suitable for the semi-additive insulation layer, and the release agent component is less transferred to the insulation layer, and further, a multilayer circuit board with good flatness can be manufactured.

本發明人為了達到前述目的而反覆致力研究的結果,發現以下表示的具有脫模層之聚醯亞胺薄膜也就是聚醯亞胺脫模薄膜,可配合上述目的,而完成本發明。 The inventors have repeatedly researched in order to achieve the foregoing object, and found that the polyimide film having a release layer shown below, which is also a polyimide release film, can meet the above-mentioned purpose to complete the present invention.

亦即,本發明是提供以下材料。 That is, the present invention provides the following materials.

〔1〕一種聚醯亞胺脫模薄膜,其在聚醯亞胺薄膜的至少一方的面上具有脫模層,該脫模層是含有醇酸樹脂(A)及胺基樹脂(B)而成。 [1] A polyimide release film having a release layer on at least one side of the polyimide film, the release layer containing an alkyd resin (A) and an amine resin (B). to make.

〔2〕如〔1〕所述之聚醯亞胺脫模薄膜,其中,前述脫模層的厚度為0.01~10μm。 [2] The polyimide release film according to [1], wherein a thickness of the release layer is 0.01 to 10 μm.

〔3〕如〔1〕或〔2〕所述之聚醯亞胺脫模薄膜,其中,前述聚醯亞胺薄膜的厚度為10~100μm。 [3] The polyimide release film according to [1] or [2], wherein the thickness of the polyimide film is 10 to 100 μm.

〔4〕如〔1〕至〔3〕中任一項所述之聚醯亞胺脫模薄膜,其中,前述聚醯亞胺薄膜的要形成前述脫模層之一側的面的表面粗糙度(Ra)為0.2μm以下。 [4] The polyimide release film according to any one of [1] to [3], wherein the surface roughness of the surface of the polyimide film to be formed on one side of the release layer is (Ra) is 0.2 μm or less.

〔5〕如〔1〕至〔4〕中任一項所述之聚醯亞胺脫模薄膜,其中,在前述脫模層的未設置聚醯亞胺薄膜之面上具有黏著層。 [5] The polyimide release film according to any one of [1] to [4], wherein an adhesive layer is provided on a surface of the release layer on which the polyimide film is not provided.

〔6〕如〔5〕所述之聚醯亞胺脫模薄膜,其中,前述黏 著層是使用包含環氧樹脂和環氧樹脂硬化劑之樹脂組成物而成。 [6] The polyimide release film according to [5], wherein the adhesive The landing layer is made of a resin composition containing an epoxy resin and an epoxy resin hardener.

〔7〕一種配置了附有黏著層的聚醯亞胺脫模薄膜之積層板,是將〔5〕或〔6〕所述之聚醯亞胺脫模薄膜的黏著層側,積層並成形於預浸體或絕緣層的至少一方的面上而成。 [7] A laminated board in which a polyimide release film with an adhesive layer is arranged, wherein the polyimide release film according to [5] or [6] is laminated on the adhesive layer side and formed on the It is formed on at least one surface of a prepreg or an insulating layer.

〔8〕一種積層板,是將〔7〕所述之積層板的聚醯亞胺脫模薄膜剝離而成。 [8] A laminated sheet obtained by peeling the polyimide release film of the laminated sheet according to [7].

〔9〕一種配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板,是將〔5〕或〔6〕所述之聚醯亞胺脫模薄膜的黏著層側,積層於預浸體或絕緣層的一方的面上,並將預浸體或絕緣層的另一方的面,積層於要被電路加工而成的單層或多層線路板上而成。 [9] A single-layer or multilayer circuit board provided with a polyimide release film with an adhesive layer, which is an adhesive layer side of the polyimide release film according to [5] or [6], It is laminated on one side of the prepreg or insulation layer, and the other side of the prepreg or insulation layer is laminated on a single-layer or multilayer circuit board to be processed by a circuit.

〔10〕一種多層線路板的製造方法,該方法包含下述步驟:藉由將〔5〕或〔6〕所述之聚醯亞胺脫模薄膜積層於單層或多層線路板上,來製造配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板的步驟;由配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板去除聚醯亞胺脫模薄膜的步驟;及,進行電路加工的步驟。 [10] A method for manufacturing a multilayer wiring board, the method comprising the steps of manufacturing by laminating the polyimide release film described in [5] or [6] on a single-layer or multilayer wiring board A step of disposing a single-layer or multilayer circuit board with a polyimide release film with an adhesive layer; and removing a poly-imide film by a single-layer or multilayer circuit board with a polyimide release film with an adhesive layer A step of releasing the amine film; and a step of performing circuit processing.

根據本發明,可提供一種聚醯亞胺脫模薄膜、及使用其之多層線路板的製造方法,該聚醯亞胺脫模薄膜在以例如使用熱板加壓、輥層合機、雙加壓(double press)機等之成形方法來製造多層線路板時,與絕緣層的剝離性優異,且進一步兼具即使在例如200℃以上等高溫使用時薄膜亦不會 熔斷的耐熱強度,並且脫模劑成分較少轉移至絕緣層,且表面粗糙度小,而可得到表面的平坦性優異之絕緣層及多層線路板。 According to the present invention, it is possible to provide a polyimide release film and a method for manufacturing a multilayer wiring board using the same. The polyimide release film is subjected to, for example, pressing using a hot plate, a roll laminator, and When forming a multilayer wiring board by a molding method such as a double press, it has excellent peelability from the insulating layer, and furthermore, it also has a film that will not be used even at high temperatures such as 200 ° C or higher. The heat resistance of fusing, the release agent component is less transferred to the insulating layer, and the surface roughness is small, and an insulating layer and a multilayer wiring board having excellent surface flatness can be obtained.

第1圖是表示在實施例1中利用高精度三維表面形狀粗糙度測定系統觀察加壓後將聚醯亞胺脫模薄膜剝離後之絕緣層的表面狀態的結果。 FIG. 1 shows the results of observing the surface state of the insulating layer after the polyfluorene imide release film was peeled off under pressure using a high-precision three-dimensional surface shape roughness measurement system in Example 1. FIG.

第2圖是表示在比較例3中利用高精度三維表面形狀粗糙度測定系統觀察藉由蝕刻來去除表面的電解銅箔後之絕緣層的表面狀態的結果。 FIG. 2 shows the results of observing the surface state of the insulating layer after removing the surface of the electrolytic copper foil by etching using a high-precision three-dimensional surface shape roughness measurement system in Comparative Example 3. FIG.

〔聚醯亞胺脫模薄膜〕 [Polyimide release film]

首先說明本發明之聚醯亞胺脫模薄膜。本發明之聚醯亞胺脫模薄膜,其在聚醯亞胺薄膜的至少一方的面上具有脫模層,該脫模層是含有醇酸樹脂(A)及胺基樹脂(B)而成。 First, the polyimide release film of the present invention will be described. The polyimide release film of the present invention has a release layer on at least one side of the polyimide film, and the release layer is formed by containing an alkyd resin (A) and an amine-based resin (B). .

又,本說明書中,「含有~而成」的意義是指可以是下述任一狀態:所含有的物質不進行反應而以維持原樣的狀態來被含有之狀態;及,所含有的物質以一部分經進行反應之狀態來被含有之狀態。 In addition, in the present specification, the meaning of "contained to" means any of the following states: the contained substance is contained in a state where it is not reacted, and the contained substance is A part is contained in a state where the reaction proceeds.

作為本發明之聚醯亞胺脫模薄膜的基材來使用的聚醯亞胺薄膜,適合使用具有適當強度而在剝離時不會造成破裂等之薄膜。例如,由薄膜強度的觀點而言,較佳為芳香族化合物以醯亞胺鍵直接連結而成之芳香族聚醯亞胺,更佳為具有 以下述式(I)表示的結構單元之芳香族聚醯亞胺。 As the polyimide film used as the base material of the polyimide release film of the present invention, a film having an appropriate strength without causing cracks or the like when peeled is suitable. For example, from the viewpoint of film strength, an aromatic polyfluorene imide in which an aromatic compound is directly bonded by a fluorene imine bond is preferable, and it is more preferable to have Aromatic polyfluorene imine having a structural unit represented by the following formula (I).

(式(I)中,Z1為碳數6~18的4價芳香族烴基,Z2為碳數6~18的2價芳香族烴基)。 (In formula (I), Z 1 is a tetravalent aromatic hydrocarbon group having 6 to 18 carbon atoms, and Z 2 is a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms).

作為Z1所表示的碳數6~18的4價芳香族烴基,較佳為碳數6~12的4價芳香族烴基。 The tetravalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by Z 1 is preferably a tetravalent aromatic hydrocarbon group having 6 to 12 carbon atoms.

作為Z1所表示的碳數6~18的4價芳香族烴基,較佳可舉例如下述芳香族烴基。 Preferred examples of the tetravalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by Z 1 include the following aromatic hydrocarbon groups.

又,作為Z2所表示的碳數6~18的2價芳香族烴基,較佳為碳數6~12的2價芳香族烴基。 The divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by Z 2 is preferably a divalent aromatic hydrocarbon group having 6 to 12 carbon atoms.

作為Z2所表示的碳數6~18的2價芳香族烴基,較佳可舉例如下述芳香族烴基。 As the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by Z 2 , the following aromatic hydrocarbon group is preferred, for example.

作為市售的聚醯亞胺薄膜,可舉例如宇部興產股份 有限公司製造的商品名Upilex R、Upilex S、Upilex SGA;Toray DuPont股份有限公司製造的商品名Kapton H、Kapton V、Kapton E、Kapton EN、Kapton ENZT;鐘淵化學工業股份有限公司製造的商品名Apical AH、Apical NPI等。為了提升與脫模層的密合性,可在該等市售薄膜的表面,實施例如電漿處理、電暈放電處理等。 As a commercially available polyimide film, for example, Ube Kosan Ltd. trade names Upilex R, Upilex S, Upilex SGA; Toray DuPont Co., Ltd. trade names Kapton H, Kapton V, Kapton E, Kapton EN, Kapton ENZT; trade names manufactured by Zhong Yuan Chemical Industry Co., Ltd. Apical AH, Apical NPI, etc. In order to improve the adhesion with the release layer, the surface of these commercially available films may be subjected to, for example, a plasma treatment or a corona discharge treatment.

作為本發明之聚醯亞胺脫模薄膜的基材來使用的聚醯亞胺薄膜的厚度,可依照目的及用途選擇。由聚醯亞胺薄膜的追隨性與剝離性的觀點而言,聚醯亞胺薄膜的厚度例如較佳為10~100μm,更佳為20~50μm,又更佳為25~50μm。 The thickness of the polyimide film used as the base material of the polyimide release film of the present invention can be selected according to the purpose and application. From the viewpoint of the followability and peelability of the polyimide film, the thickness of the polyimide film is, for example, preferably from 10 to 100 μm, more preferably from 20 to 50 μm, and even more preferably from 25 to 50 μm.

作為本發明之聚醯亞胺脫模薄膜的基材來使用的聚醯亞胺薄膜的表面粗糙度(Ra),由使剝離後之絕緣層的平坦性良好的觀點而言,較佳為例如0.2μm以下,更佳為0.1μm以下,進一步較佳為0.05μm以下。又,此處所謂的「聚醯亞胺薄膜的表面粗糙度」,是表示至少要形成脫模層之一側的面的表面粗糙度。 The surface roughness (Ra) of the polyimide film used as the base material of the polyimide release film of the present invention is preferably, for example, from the viewpoint of making the flatness of the insulating layer after peeling good. 0.2 μm or less, more preferably 0.1 μm or less, and still more preferably 0.05 μm or less. In addition, the "surface roughness of a polyimide film" here means the surface roughness of the surface on which at least one side of a mold release layer is to be formed.

本發明之聚醯亞胺薄膜,因具有在高溫區不會熱熔融的強度,因此較佳於150~300℃使用,更佳為在該範圍不會顯示明顯的玻璃轉移溫度,且儲藏彈性模數(10Hz)超過1GPa。 The polyimide film of the present invention has a strength that will not be melted in a high-temperature region, so it is preferably used at 150 to 300 ° C, and more preferably, it does not show a significant glass transition temperature in this range, and it stores the elastic mold. The number (10Hz) exceeds 1GPa.

(脫模層) (Release layer)

用來形成本發明之聚醯亞胺脫模薄膜的脫模層之樹脂組成物(以下亦稱為脫模層用樹脂組成物),含有醇酸樹脂(A) 及胺基樹脂(B)。該脫模層用樹脂組成物的固體成分中,醇酸樹脂(A)及胺基樹脂(B)的合計含量(惟,含有有機溶劑的情況為固體成分的合計含量)較佳為50質量%以上,更佳為60質量%以上,進一步較佳為70質量%以上,特佳為80質量%以上。 A resin composition (hereinafter also referred to as a resin composition for a release layer) for forming a release layer of a polyimide release film of the present invention, which contains an alkyd resin (A) And amine-based resin (B). In the solid content of the resin composition for a release layer, the total content of the alkyd resin (A) and the amine resin (B) (however, the total content of the solid content when an organic solvent is contained) is preferably 50% by mass. Above, more preferably 60% by mass or more, still more preferably 70% by mass or more, particularly preferably 80% by mass or more.

藉由將脫模層設為含有醇酸樹脂(A)及胺基樹脂(B)而成之層,在脫模層中可得到交聯結構,與聚矽氧系脫模劑相較之下,更可抑制脫模層用樹脂組成物成分轉移至絕緣層,且顯示更良好的剝離性。藉由抑制脫模層用樹脂組成物成分轉移至絕緣層,可抑制絕緣層的耐熱性等降低。 By setting the release layer as a layer containing an alkyd resin (A) and an amine resin (B), a crosslinked structure can be obtained in the release layer, as compared with a polysiloxane release agent. In addition, the resin composition component for the release layer can be suppressed from being transferred to the insulating layer, and more favorable peelability can be exhibited. By suppressing the transfer of the resin composition component for the release layer to the insulating layer, it is possible to suppress a decrease in heat resistance and the like of the insulating layer.

脫模層的厚度,較佳為例如0.01~10μm,更佳為0.05~5μm,進一步較佳為0.05~2μm。藉由使脫模層的厚度為0.01~10μm,則有提升剝離性的傾向。 The thickness of the release layer is preferably, for example, 0.01 to 10 μm, more preferably 0.05 to 5 μm, and still more preferably 0.05 to 2 μm. When the thickness of the release layer is 0.01 to 10 μm, the peelability tends to be improved.

前述成分(A)相對於前述成分(B)的比率(A/B),以固體成分質量比計,較佳為例如95/5~10/90,更佳為90/10~40/60。 The ratio (A / B) of the component (A) to the component (B) is preferably 95/5 to 10/90, and more preferably 90/10 to 40/60, based on the solid content ratio.

醇酸樹脂(A)的比率若為95質量%以下(亦即胺基樹脂(B)的比率為5質量%以上),則有在脫模層中可得到充分的交聯結構而抑制剝離性降低的傾向。又,醇酸樹脂(A)的比率若為10質量%以上(亦即胺基樹脂(B)的比率為90質量%以下),則有脫模層不會變得太硬而可得到良好剝離性的傾向。 When the ratio of the alkyd resin (A) is 95% by mass or less (that is, the ratio of the amine-based resin (B) is 5% by mass or more), a sufficient crosslinked structure can be obtained in the release layer, and peelability can be suppressed. Reduced tendency. When the ratio of the alkyd resin (A) is 10% by mass or more (that is, the ratio of the amine-based resin (B) is 90% by mass or less), the mold release layer does not become too hard and good peeling can be obtained. Sexual orientation.

本發明中,醇酸樹脂(A),是指藉由多元醇與多元酸之縮合反應而得到的合成樹脂。作為醇酸樹脂(A),可 使用下述任一種:二元酸與二元醇之縮合物或以非乾性油脂肪酸改質而成的非轉化性醇酸;及二元酸與三元以上的醇之縮合物即轉化性醇酸。 In the present invention, the alkyd resin (A) refers to a synthetic resin obtained by a condensation reaction between a polyhydric alcohol and a polybasic acid. As the alkyd resin (A), Use any of the following: a condensate of a dibasic acid and a diol or a non-converting alkyd modified with a non-drying oil fatty acid; and a condensate of a dibasic acid and a trihydric or higher alcohol that is a converting alcohol acid.

又,本發明使用之醇酸樹脂(A),可使用各種市售品,亦可依照公知方法合成。 In addition, the alkyd resin (A) used in the present invention may be various commercially available products, or may be synthesized according to a known method.

作為醇酸樹脂(A)的合成方法,可舉例如多元醇與多元酸或在該等中添加改質劑進行加熱縮合之方法等。 As a method of synthesizing the alkyd resin (A), for example, a method of heating and condensing a polyhydric alcohol and a polybasic acid, or adding a modifier to these, can be mentioned.

作為多元醇,可使用例如乙二醇、二乙二醇、三乙二醇、1,2-丙二醇、1,3-丙二醇、1,4-丁二醇、新戊二醇等二元醇;甘油、三羥甲基乙烷、三羥甲基丙烷等之三元醇;二甘油、三甘油、季戊四醇、單季戊四醇、二季戊四醇、甘露醇、山梨糖醇等多元醇。 As the polyhydric alcohol, for example, glycols such as ethylene glycol, diethylene glycol, triethylene glycol, 1,2-propylene glycol, 1,3-propylene glycol, 1,4-butanediol, and neopentyl glycol; Glycerol, trimethylolethane, trimethylolpropane and other triols; diglycerol, triglycerol, pentaerythritol, monopentaerythritol, dipentaerythritol, mannitol, sorbitol and other polyols.

又,作為多元酸,可使用例如鄰苯二甲酸酐、對苯二甲酸、琥珀酸、己二酸、癸二酸等飽和多元酸;順丁烯二酸、順丁烯二酸酐、反丁烯二酸、衣康酸、甲基順丁烯二酸酐、間苯二甲酸、偏苯三甲酸酐等不飽和多元酸;環戊二烯-順丁烯二酸酐加成物、萜烯-順丁烯二酸酐加成物、松香-順丁烯二酸酐加成物等藉由狄爾斯-亞德反應(Diels-Alder reaction)生成之多元酸等。又,亦可併用安息香酸。 As the polybasic acid, for example, saturated polybasic acids such as phthalic anhydride, terephthalic acid, succinic acid, adipic acid, and sebacic acid; maleic acid, maleic anhydride, and fumaric acid can be used. Unsaturated polybasic acids such as diacid, itaconic acid, methyl maleic anhydride, isophthalic acid, trimellitic anhydride; cyclopentadiene-maleic anhydride adduct, terpene-maleic anhydride Diacid anhydride adducts, rosin-maleic anhydride adducts, and the like are polybasic acids produced by the Diels-Alder reaction. Also, benzoic acid may be used in combination.

又,作為改質劑,可使用例如椰子油、亞麻仁油、桐油、蓖麻子油、脫水蓖麻子油、及該等之脂肪酸、辛酸、月桂酸、棕櫚酸、硬脂酸、油酸、亞油酸、亞麻酸、桐酸、蓖麻油酸、脫水蓖麻油酸等。 As the modifier, for example, coconut oil, linseed oil, tung oil, castor oil, dehydrated castor oil, and the like, fatty acids, caprylic acid, lauric acid, palmitic acid, stearic acid, oleic acid, sub- Oleic acid, linolenic acid, paulownic acid, ricinoleic acid, dehydrated ricinoleic acid, etc.

醇酸樹脂(A)的油長(脂肪酸的含有質量比率), 較佳為例如0~60%,更佳為20~40%。 Oil length (content ratio of fatty acid) of alkyd resin (A), It is preferably, for example, 0 to 60%, and more preferably 20 to 40%.

醇酸樹脂(A)的酸價,較佳為例如1~30mgKOH/g,更佳為5~25mgKOH/g。 The acid value of the alkyd resin (A) is preferably, for example, 1 to 30 mgKOH / g, and more preferably 5 to 25 mgKOH / g.

又,醇酸樹脂(A)的羥基價,較佳為例如50~300mgKOH/g,更佳為100~250mgKOH/g。 The hydroxyl value of the alkyd resin (A) is preferably, for example, 50 to 300 mgKOH / g, and more preferably 100 to 250 mgKOH / g.

又,該等醇酸樹脂(A)中,可將例如丙烯酸系樹脂、聚酯樹脂、環氧樹脂、酚樹脂等進行改質或混合使用。 Among these alkyd resins (A), for example, acrylic resins, polyester resins, epoxy resins, phenol resins, etc. can be modified or used in combination.

本發明之胺基樹脂(B),是藉由包含胺基之化合物與醛之縮合反應而得到的樹脂,可舉例如三聚氰胺樹脂、苯胺醛樹脂、尿素甲醛樹脂、苯胍胺樹脂等。 The amine-based resin (B) of the present invention is a resin obtained by a condensation reaction of an amine-containing compound and an aldehyde, and examples thereof include a melamine resin, an aniline resin, a urea formaldehyde resin, and a benzoguanamine resin.

本發明使用之胺基樹脂,可使用各種市售胺基樹脂,亦可依照公知方法合成。 As the amine-based resin used in the present invention, various commercially available amine-based resins can be used, or they can be synthesized according to a known method.

作為合成方法,例如可使用以一種預聚物作為原料樹脂來合成之各種胺基樹脂,該預聚物包含羥甲基或其醚之預聚物。 As the synthesis method, for example, various amine-based resins synthesized using a prepolymer as a raw resin can be used, and the prepolymer contains a prepolymer of methylol or an ether thereof.

更具體而言,可使用例如甲基化三聚氰胺樹脂、丁基化三聚氰胺樹脂、甲基化尿素甲醛樹脂、丁基化尿素甲醛樹脂、甲基化苯胍胺樹脂、丁基化苯胍胺樹脂等各種公知物。由重複使用性的觀點而言,較佳為以甲基化三聚氰胺樹脂作為主成分,該甲基化三聚氰胺樹脂特佳為每個三嗪核含有一個以上羥甲基之甲基化三聚氰胺樹脂。 More specifically, for example, methylated melamine resin, butylated melamine resin, methylated urea formaldehyde resin, butylated urea formaldehyde resin, methylated benzoguanamine resin, butylated benzoguanamine resin, and the like can be used. Various well-known. From the viewpoint of reusability, a methylated melamine resin is preferably used as a main component, and the methylated melamine resin is particularly preferably a methylated melamine resin containing one or more methylol groups per triazine core.

本發明中,作為胺基樹脂特佳使用的甲基化三聚氰胺樹脂,通常是藉由下述方式來得到:在鹼性環境下始福馬林與三聚氰胺進行加成反應,進一步在酸性環境下使甲醇進行醚 化反應。藉由福馬林的加成量或甲醇的醚化量之差異,可控制胺基樹脂的官能基即醯亞胺基、羥甲基、甲醚基的量。 In the present invention, the methylated melamine resin that is particularly preferably used as an amine-based resin is generally obtained by starting an addition reaction between formalin and melamine in an alkaline environment, and further making methanol in an acidic environment. Ether 化 反应。 Reaction. Based on the difference in the amount of formalin addition or the etherification amount of methanol, the amount of fluorenimine, methylol, and methyl ether groups that are functional groups of the amine resin can be controlled.

又,每個三嗪核之羥甲基量,可藉由滴定分析及機器分析算出,例如,可藉由利用核磁共振裝置或元素分析裝置等進行測定來算出。 The amount of methylol groups in each triazine nucleus can be calculated by titration analysis and machine analysis. For example, it can be calculated by measurement using a nuclear magnetic resonance device or an elemental analysis device.

又,本發明中,在抑制脫模層用樹脂組成物成分轉移至絕緣層的範圍內,由剝離性的觀點而言,可使脫模層用樹脂組成物含有聚矽氧樹脂(C)。 Moreover, in this invention, within the range which suppresses the resin composition component for a release layer from being transferred to an insulating layer, from the standpoint of peelability, the resin composition for a release layer can be made to contain a silicone resin (C).

該情況,聚矽氧樹脂的含有比率,即聚矽氧樹脂(C)相對於醇酸樹脂(A)與胺基樹脂(B)之合計含量的含有比率(C/(A+B)),較佳為以固體成分質量比計為20/100以下,更佳為10/100以下。相對於前述成分(A)與前述成分(B)的合計100質量份,成分(C)若為20質量份以下,則可得到良好的硬化性,有難以發生聚矽氧樹脂(C)轉移的傾向。 In this case, the content ratio of the silicone resin, that is, the content ratio of the silicone resin (C) to the total content of the alkyd resin (A) and the amine resin (B) (C / (A + B)), The mass ratio of solid content is preferably 20/100 or less, and more preferably 10/100 or less. With respect to 100 parts by mass of the total of the component (A) and the component (B), if the component (C) is 20 parts by mass or less, good hardenability can be obtained, and silicone resin (C) transfer is difficult to occur. tendency.

又,本發明之聚矽氧樹脂(C),意指以二甲基聚矽氧烷作為主成分之具有三維網狀結構的有機聚矽氧烷、聚矽氧橡膠、聚矽氧油。本發明使用之聚矽氧樹脂(C)可使用各種市售品,亦可依照公知方法合成。 In addition, the silicone resin (C) of the present invention means an organic polysiloxane, a silicone rubber, and a silicone oil having a three-dimensional network structure using dimethylpolysiloxane as a main component. The polysiloxane resin (C) used in the present invention can be produced using various commercially available products or can be synthesized according to a known method.

作為聚矽氧樹脂(C),較佳為有機聚矽氧烷,只要能得到耐熱性、光澤、剝離性、表面狀態優異之脫模層,則直鏈狀、支鏈狀的任一種結構均可,而本發明之脫模層用樹脂組成物適合使用與前述醇酸樹脂(A)及胺基樹脂(B)之相溶性優異者。 As the polysiloxane resin (C), an organic polysiloxane is preferred. As long as a release layer having excellent heat resistance, gloss, peelability, and surface state can be obtained, any of linear and branched structures can be used. Yes, the resin composition for a release layer of the present invention is preferably one which has excellent compatibility with the alkyd resin (A) and the amine resin (B).

又,有機聚矽氧烷,可藉由改變有機基與矽原子的莫耳比來改變樹脂的柔軟性、彈性等性質。作為這樣的有機聚矽氧烷,可具體舉出以下述式(1)表示之有機聚矽氧烷: In addition, the organic polysiloxane can change the properties of the resin such as flexibility and elasticity by changing the molar ratio of the organic group to the silicon atom. Specific examples of such an organopolysiloxane include an organopolysiloxane represented by the following formula (1):

(式中,R1的至少1個是與醇酸樹脂及胺基樹脂中的至少一方(但包含醇酸樹脂與胺基樹脂之反應物)具有反應性之取代基,其餘為碳數1~12之非取代或取代烷基,X為15~500,較佳為25~100,Y為15~500,較佳為25~100,X+Y為30~1000,較佳為50~200,且0.15≦Y/(X+Y)≦0.5)。 (In the formula, at least one of R 1 is a substituent having reactivity with at least one of the alkyd resin and the amine-based resin (but including a reactant of the alkyd resin and the amine-based resin), and the rest are carbon numbers 1 to Unsubstituted or substituted alkyl of 12, X is 15 to 500, preferably 25 to 100, Y is 15 to 500, preferably 25 to 100, X + Y is 30 to 1000, preferably 50 to 200, And 0.15 ≦ Y / (X + Y) ≦ 0.5).

有機聚矽氧烷1分子中,與矽原子鍵結之有機基,較佳為15~50mol%苯基,更佳為15~40mol%。苯基量若為15mol%以上,則有與醇酸樹脂(A)及胺基樹脂(B)之相溶性良好的傾向。又,苯基量若為50mol%以下,則有抑制剝離性降低的傾向。 In one molecule of the organic polysiloxane, the organic group bonded to the silicon atom is preferably 15 to 50 mol% of phenyl group, and more preferably 15 to 40 mol%. When the amount of the phenyl group is 15 mol% or more, the compatibility with the alkyd resin (A) and the amino resin (B) tends to be good. Moreover, if the amount of phenyl group is 50 mol% or less, there exists a tendency for suppressing a fall of peelability.

為了使脫模層具有充分的剝離性能,較佳為前述苯基以外的其餘有機基中之至少一個為與醇酸樹脂及胺基樹脂中的至少一方具有反應性之官能基。作為與醇酸樹脂及胺基樹脂中的至少一方具有反應性之官能基,可舉出經羥基取代的有機基、經胺基取代的有機基、經羧基取代的有機基、經 環氧丙基取代的有機基等。該等之中,由導入胺基醇酸樹脂中之方法較容易的觀點而言,較佳為經羥基取代的有機基。 In order for the release layer to have sufficient release properties, it is preferred that at least one of the remaining organic groups other than the aforementioned phenyl group is a functional group that is reactive with at least one of the alkyd resin and the amine-based resin. Examples of the functional group reactive with at least one of the alkyd resin and the amine-based resin include an organic group substituted with a hydroxyl group, an organic group substituted with an amine group, an organic group substituted with a carboxyl group, and an organic group substituted with a carboxyl group. Glycidyl substituted organic groups and the like. Among these, a hydroxyl-substituted organic group is preferred from the viewpoint that the method for introducing the amino alkyd resin is easier.

使用經羥基取代的有機基的情況,該經羥基取代的有機基,較佳為使每1分子的聚矽氧樹脂含有1~20個,更佳為含有1~10個。作為經羥基取代的有機基,可舉例如以下述式(2)表示之經羥基取代的有機基和以下述式(3)表示之經羥基取代的有機基等:-CH2CH2CH2-O(C2H4O)nH (2) When a hydroxy-substituted organic group is used, the hydroxy-substituted organic group preferably contains 1 to 20 polysiloxane resins per molecule, and more preferably contains 1 to 10 polysiloxane resins. Examples of the hydroxy-substituted organic group include a hydroxy-substituted organic group represented by the following formula (2) and a hydroxy-substituted organic group represented by the following formula (3): -CH 2 CH 2 CH 2- O (C 2 H 4 O) n H (2)

(式中,n為1~3的平均值);-R-(S)a-R2-OH (3) (Where n is an average of 1 to 3); -R- (S) a -R 2 -OH (3)

(式中,R及R2為碳數1~10的2價烴基,a為0或1)。 (In the formula, R and R 2 are divalent hydrocarbon groups having 1 to 10 carbon atoms, and a is 0 or 1).

藉由具有這樣的與醇酸樹脂及胺基樹脂中的至少一方具有反應性之取代基,醇酸樹脂及胺基樹脂中的至少一方與聚矽氧樹脂進行反應,在脫模層中形成化學鍵結而成之結構,可提升剝離性並且抑制聚矽氧轉移至絕緣層。 By having such a substituent having reactivity with at least one of the alkyd resin and the amine-based resin, at least one of the alkyd resin and the amine-based resin reacts with the silicone resin to form a chemical bond in the release layer. The resulting structure can improve peelability and inhibit the transfer of polysilicon to the insulating layer.

作為上述有機基以外的其餘非取代或取代烷基,可舉出碳數1~12、較佳為1~8、更佳為1~5的直鏈烷基或支鏈烷基。作為該烷基,可舉例如甲基、乙基、丙基、異丙基、丁基、第二丁基、第三丁基、辛基等非取代烷基;或與該等基的碳原子鍵結之一部分或全部的氫原子經氟、氯、溴、碘等鹵素原子、氰基等取代之氯甲基、三氟丙基、氰乙基等取 代烷基等。又,由得到更高剝離性的觀點而言,較佳為甲基。 Examples of the remaining unsubstituted or substituted alkyl group other than the above-mentioned organic group include a linear alkyl group or a branched alkyl group having 1 to 12 carbon atoms, preferably 1 to 8 carbon atoms, and more preferably 1 to 5 carbon atoms. Examples of the alkyl group include an unsubstituted alkyl group such as methyl, ethyl, propyl, isopropyl, butyl, second butyl, third butyl, and octyl; or a carbon atom with such a group One or all of the hydrogen atoms of the bond are replaced by halogen atoms such as fluorine, chlorine, bromine and iodine, chloromethyl, trifluoropropyl, cyanoethyl, etc. Alkyl and the like. From the viewpoint of obtaining higher releasability, a methyl group is preferred.

本發明使用之脫模層用樹脂組成物,可調配界面活性劑。 The resin composition for a release layer used in the present invention can be formulated with a surfactant.

本發明中的界面活性劑,意指使用於調節界面現象且即使低濃度也能展現表面活性的物質。作為界面活性劑,有活性劑的主體為陰離子之陰離子系界面活性劑、活性劑的主體為陽離子之陽離子系界面活性劑、活性劑的主體為兩性之兩性界面活性劑、不解離之非離子系界面活性劑,由功效的觀點而言,較佳為具有抗靜電性的陽離子系界面活性劑。 The surfactant in the present invention means a substance which is used to adjust an interface phenomenon and exhibits surface activity even at a low concentration. As the surfactant, an anionic anionic surfactant having a main agent as an anion, a cationic surfactant having a main body of a cation, an amphoteric amphoteric surfactant having a main body, and a nonionic non-dissociating agent The surfactant is preferably a cationic surfactant having antistatic properties from the viewpoint of efficacy.

作為陽離子系界面活性劑,可舉例如4級銨鹽、3級銨鹽、醯胺4級銨鹽等。為了更提升抗靜電效果,較佳為4級銨鹽。作為4級銨鹽,可舉例如烷基三甲基銨鹽、二烷基二甲基銨鹽、四烷基銨鹽、烷基二甲基苯甲基銨鹽、烷基吡啶鎓鹽、烷基嗎啉鎓鹽、烷基咪唑啉鎓鹽、醯胺銨鹽、氯化5,5,7,7-四甲基-2-辛烯基甲基銨、聚伸乙亞胺的4級銨鹽、氯化苯甲基三(二甲基胺基)鏻、氯化十六烷基三(二甲基胺基)鏻。 Examples of the cationic surfactant include fourth-order ammonium salts, third-order ammonium salts, and ammonium quaternary ammonium salts. In order to further improve the antistatic effect, a grade 4 ammonium salt is preferred. Examples of the fourth-order ammonium salt include an alkyltrimethylammonium salt, a dialkyldimethylammonium salt, a tetraalkylammonium salt, an alkyldimethylbenzylammonium salt, an alkylpyridinium salt, and an alkane Morpholinium salt, alkylimidazolinium salt, ammonium ammonium salt, 5,5,7,7-tetramethyl-2-octenylmethylammonium chloride, quaternary ammonium of polyethyleneimine Salt, benzyltris (dimethylamino) phosphonium chloride, cetyltris (dimethylamino) phosphonium chloride.

陽離子系界面活性劑的添加量,相對於由醇酸樹脂(A)、胺基樹脂(B)、及聚矽氧樹脂(C)所構成的組成物100質量份,為0.05~10質量份,較佳為0.1~5質量份。若添加量為0.05質量份以上,則有得到良好抗靜電性能的傾向。又,若添加量為10質量份,則可得到良好的塗膜硬化性,有抑制剝離性降低的傾向。又,本發明中,在展現本發明之功效的範圍內,除了陽離子系界面活性劑以外,亦可併用陰 離子系界面活性劑、非離子系界面活性劑、兩性系界面活性劑。作為陰離子系界面活性劑,可舉例如烷基磷酸鹽、烷基磺酸鹽、烷基苯磺酸鹽等。作為非離子系界面活性劑,可舉例如甘油脂肪酸酯、山梨糖醇酐脂肪酸酯、聚氧乙烯烷基胺、聚氧乙烯烷基胺脂肪酸酯、N-羥乙基-N-2-羥基烷基胺、烷基二乙醇醯胺等。又,作為兩性系界面活性劑,可舉例如烷基甜菜鹼、烷基咪唑啉鎓鹽甜菜鹼等。又,作為前述陽離子系界面活性劑、非離子系界面活性劑、陰離子系界面活性劑、兩性系界面活性劑,可使用各種市售品。 The amount of the cationic surfactant is 0.05 to 10 parts by mass based on 100 parts by mass of the composition composed of the alkyd resin (A), the amine resin (B), and the polysiloxane resin (C). It is preferably 0.1 to 5 parts by mass. When the addition amount is 0.05 parts by mass or more, there is a tendency that good antistatic performance is obtained. Moreover, when the addition amount is 10 parts by mass, good coating film hardenability can be obtained, and there is a tendency that the decrease in peelability is suppressed. In addition, in the present invention, in addition to the cationic surfactant within the range exhibiting the effects of the present invention, anions can also be used in combination. Ionic surfactants, non-ionic surfactants, amphoteric surfactants. Examples of the anionic surfactant include alkyl phosphates, alkyl sulfonates, and alkylbenzene sulfonates. Examples of the nonionic surfactant include glycerin fatty acid ester, sorbitan fatty acid ester, polyoxyethylene alkylamine, polyoxyethylene alkylamine fatty acid ester, and N-hydroxyethyl-N-2. -Hydroxyalkylamine, alkyldiethanolamine and the like. Examples of the amphoteric surfactant include alkyl betaine, alkyl imidazolinium salt betaine, and the like. Various commercially available products can be used as the cationic surfactant, nonionic surfactant, anionic surfactant, and amphoteric surfactant.

又,本發明中,可使脫模層用樹脂組成物含有酸性觸媒。該酸性觸媒是作為上述醇酸樹脂(A)與胺基樹脂(B)進行反應的觸媒來作用。藉由使用酸性觸媒,則可低溫塗佈,提高生產性。作為酸性觸媒,可舉例如對甲苯磺酸、草酸、磷酸等。 In the present invention, the resin composition for a release layer may contain an acid catalyst. This acidic catalyst functions as a catalyst which reacts the said alkyd resin (A) and an amine resin (B). By using an acidic catalyst, low-temperature coating is possible, and productivity is improved. Examples of the acidic catalyst include p-toluenesulfonic acid, oxalic acid, and phosphoric acid.

在脫模層用樹脂組成物中導入含有與上述醇酸樹脂(A)及胺基樹脂(B)中的至少一方具有反應性之官能基的聚矽氧樹脂(C),是為了調整剝離性。又,不導入聚矽氧樹脂的情況,在脫模層上形成黏著層時的塗佈性良好。 The purpose of introducing a silicone resin (C) containing a functional group reactive with at least one of the alkyd resin (A) and the amine resin (B) into the resin composition for a release layer is to adjust the releasability. . Moreover, when a silicone resin is not introduced, the coating property when forming an adhesive layer on a release layer is good.

又,包含聚矽氧樹脂的樹脂組成物可由市場購入,該聚矽氧樹脂具有與醇酸樹脂(A)、胺基樹脂(B)及使醇酸樹脂與胺基樹脂進行反應而成之化合物具有反應性之官能基(以下亦將該樹脂組成物稱為含有聚矽氧之胺基醇酸樹脂)。可舉例如日立化成Polymer股份有限公司製造的商品名:Tesfine 319、TA31-209E等。 Further, a resin composition containing a polysiloxane resin is commercially available, and the polysiloxane resin has a compound obtained by reacting the alkyd resin (A), the amine-based resin (B), and the alkyd resin with the amine-based resin. A reactive functional group (hereinafter, this resin composition is also referred to as a polysiloxane-containing amino alkyd resin). For example, trade names: Tesfine 319, TA31-209E, etc. manufactured by Hitachi Chemical Polymer Co., Ltd. may be mentioned.

又,包含醇酸樹脂與胺基樹脂之樹脂組成物(以下亦稱為非聚矽氧系胺基醇酸樹脂)亦可由市場購入。可舉例如日立化成Polymer股份有限公司製造的商品名:Tesfine 303、Tesfine 305等。 In addition, a resin composition containing an alkyd resin and an amine-based resin (hereinafter also referred to as a non-polysiloxane-based amine-based alkyd resin) is also commercially available. For example, trade names of Tesfine 303 and Tesfine 305 manufactured by Hitachi Chemical Polymer Co., Ltd. may be mentioned.

脫模層用樹脂組成物,較佳為最後形成為各成分溶解或分散於有機溶劑中而成之清漆(以下亦稱為脫模層用樹脂清漆)的狀態。 The resin composition for a release layer is preferably in a state finally formed into a varnish (hereinafter also referred to as a resin varnish for a release layer) in which each component is dissolved or dispersed in an organic solvent.

作為製作成清漆時使用的有機溶劑,可舉例如甲醇、乙醇、丙醇、丁醇、甲基溶纖劑、丁基溶纖劑、丙二醇單甲醚等醇系溶劑;丙酮、甲乙酮、甲基異丁酮、環己酮等酮系;乙酸丁酯、丙二醇單甲醚乙酸酯等酯系溶劑;四氫呋喃等醚系溶劑;甲苯、二甲苯、均三甲苯等芳香族系溶劑;二甲基甲醯胺、N,N-二甲基甲醯胺、N-甲基吡咯啶酮等含有氮原子之溶劑;二甲基亞碸等含有硫原子之溶劑等。該等可單獨使用1種亦可混合2種以上使用。 Examples of the organic solvent used in the production of varnish include alcohol-based solvents such as methanol, ethanol, propanol, butanol, methyl cellosolve, butyl cellosolve, and propylene glycol monomethyl ether; acetone, methyl ethyl ketone, and methyl isobutyl Ketones such as ketones and cyclohexanone; ester solvents such as butyl acetate, propylene glycol monomethyl ether acetate; ether solvents such as tetrahydrofuran; aromatic solvents such as toluene, xylene, mesitylene; dimethylformamidine Solvents containing nitrogen atoms, such as amines, N, N-dimethylformamidine, and N-methylpyrrolidone; Solvents containing sulfur atoms, such as dimethylsulfinium. These can be used alone or in combination of two or more.

該等之中,例如,由溶解性與塗佈時之外觀的觀點而言,較佳為芳香族系溶劑、酮系溶劑,進一步較佳為甲苯與甲乙酮(MEK)之混合溶劑。 Among these, for example, from the viewpoints of solubility and appearance at the time of coating, an aromatic solvent and a ketone solvent are preferred, and a mixed solvent of toluene and methyl ethyl ketone (MEK) is more preferred.

最後得到之清漆中的樹脂組成物的含量(固體成分濃度),可舉例如清漆全體的1~40質量%,更佳為5~30質量%。將清漆中的樹脂組成物的含量(固體成分濃度)設為1~40質量%,可容易地控制塗佈時的膜厚。 The content (solid content concentration) of the resin composition in the varnish finally obtained may be, for example, 1 to 40% by mass of the entire varnish, and more preferably 5 to 30% by mass. By setting the content (solid content concentration) of the resin composition in the varnish to 1 to 40% by mass, the film thickness at the time of coating can be easily controlled.

又,亦可依照需要,在脫模層中,亦即在脫模層用樹脂組成物中,添加易滑劑、抗靜電劑等。在熱壓步驟因常 常產生靜電,故較佳為添加抗靜電劑,除此之外亦可藉由在未形成脫模層之面上塗佈來形成抗靜電層。 Moreover, a slip agent, an antistatic agent, etc. may be added to the mold release layer, that is, to the resin composition for a mold release layer as needed. Normally during the hot pressing step Static electricity is often generated, so it is preferable to add an antistatic agent. In addition, an antistatic layer can also be formed by coating on the surface on which the release layer is not formed.

作為在聚醯亞胺薄膜的至少一方的面上形成所希望之厚度的脫模層之方法,可舉出下述方法:在聚醯亞胺薄膜上,使用逆輥塗佈機(reverse roll coater)、凹版塗佈機(gravure coater)、棒塗佈機(rod coater)、空氣刮刀塗佈機(air doctor blade coater)等進行塗佈,然後例如在50℃~200℃乾燥10秒~600秒。 Examples of a method for forming a release layer having a desired thickness on at least one side of the polyimide film include a method of using a reverse roll coater on the polyimide film. ), Gravure coater, rod coater, air doctor blade coater, etc., and then, for example, drying at 50 ° C to 200 ° C for 10 seconds to 600 seconds .

(黏著層) (Adhesive layer)

本發明之聚醯亞胺脫模薄膜,可在該脫模層的未設置聚醯亞胺薄膜之面上具有黏著層。 The polyimide release film of the present invention may have an adhesive layer on the side of the release layer on which the polyimide film is not provided.

前述黏著層,較佳為使用含有環氧樹脂和環氧樹脂硬化劑而成之樹脂組成物(以下亦稱為黏著層用樹脂組成物),在脫模層面上形成而成。環氧樹脂因耐熱性、耐鹼性等優異,故較佳。又,「含有環氧樹脂和環氧樹脂硬化劑而成」的樹脂組成物,可含有未反應狀態的環氧樹脂與環氧樹脂硬化劑,亦可以經反應之狀態來含有環氧樹脂與環氧樹脂硬化劑。 The adhesive layer is preferably formed on a release layer by using a resin composition (hereinafter also referred to as a resin composition for an adhesive layer) containing an epoxy resin and an epoxy resin hardener. Epoxy resins are preferred because they are excellent in heat resistance and alkali resistance. The resin composition "containing epoxy resin and epoxy resin hardener" may contain epoxy resin and epoxy resin hardener in an unreacted state, and may also contain epoxy resin and ring in a reaction state. Oxygen resin hardener.

黏著層的厚度較佳為0.01~10μm,更佳為0.05~8μm。藉由設為此範圍,則在熱板加壓後,可更容易在黏著層與脫模層的界面去除聚醯亞胺脫模薄膜。 The thickness of the adhesive layer is preferably 0.01 to 10 μm, and more preferably 0.05 to 8 μm. By setting it as this range, a polyimide release film can be removed more easily at the interface of an adhesive layer and a release layer after a hot plate is pressurized.

此處,「環氧樹脂」是分子中具有2個以上環氧基之環氧樹脂。作為分子中具有2個環氧基之樹脂,可舉例如雙酚A型環氧樹脂或雙酚F型環氧樹脂等。又,亦可使用分子中具有平均大於2個的環氧基之多官能環氧樹脂。 Here, an "epoxy resin" is an epoxy resin which has two or more epoxy groups in a molecule. Examples of the resin having two epoxy groups in the molecule include a bisphenol A epoxy resin and a bisphenol F epoxy resin. In addition, a polyfunctional epoxy resin having an average of more than two epoxy groups in a molecule may be used.

作為多官能環氧樹脂,可舉例如聯苯芳烷基型環氧樹脂、或苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、芳烷基型環氧樹脂、萘型環氧樹脂、萘酚醛清漆型環氧樹脂等。其中,作為多官能型環氧樹脂,較佳為例如芳烷基酚醛清漆型環氧樹脂、萘酚醛清漆型環氧樹脂。又,由與銅鍍層之黏著力的觀點而言,黏著層的多官能型環氧樹脂,較佳為例如具有聯苯結構者。 Examples of the polyfunctional epoxy resin include a biphenylaralkyl epoxy resin, a phenol novolac epoxy resin, a cresol novolac epoxy resin, an aralkyl epoxy resin, and a naphthalene epoxy resin. Resin, naphthol novolak-type epoxy resin, etc. Among them, the polyfunctional epoxy resin is preferably, for example, an aralkyl novolac epoxy resin or a naphthol novolac epoxy resin. From the viewpoint of adhesion with the copper plating layer, the polyfunctional epoxy resin of the adhesive layer is preferably, for example, one having a biphenyl structure.

這些可單獨使用或混合2種以上使用。 These can be used individually or in mixture of 2 or more types.

該等之中,較佳為例如具有聯苯結構之芳烷基酚醛清漆型環氧樹脂(聯苯芳烷基型環氧樹脂)。作為具有聯苯結構之芳烷基酚醛清漆型環氧樹脂的市售品,可舉例如日本化藥股份有限公司製造的商品名NC-3000、NC-3000-H等。 Among these, for example, an aralkyl novolak type epoxy resin (biphenylaralkyl type epoxy resin) having a biphenyl structure is preferred. As a commercial item of the aralkyl novolak-type epoxy resin which has a biphenyl structure, the trade names NC-3000 and NC-3000-H manufactured by Nippon Kayaku Co., Ltd. are mentioned, for example.

又,作為環氧樹脂硬化劑,可舉例如苯酚酚醛清漆、甲酚酚醛清漆等多官能酚系化合物;雙氰胺(dicyandiamide)、二胺基二苯基甲烷、二胺基二苯基碸等胺化合物;鄰苯二甲酸酐、均苯四甲酸酐、順丁烯二酸酐、順丁烯二酸酐共聚體等酸酐。該等可使用1種或混合2種以上來使用。 Examples of the epoxy resin hardener include polyfunctional phenolic compounds such as phenol novolac and cresol novolac; dicyandiamide, diaminodiphenylmethane, and diaminodiphenylphosphonium. Amine compounds; acid anhydrides such as phthalic anhydride, pyromellitic anhydride, maleic anhydride, and maleic anhydride copolymers. These can be used individually by 1 type or in mixture of 2 or more types.

黏著層用樹脂組成物,亦可含有硬化促進劑而成。作為硬化促進劑,可使用例如潛在性熱硬化劑之各種咪唑類、BF3胺錯合物、及磷系硬化促進劑等。 The resin composition for an adhesive layer may be made by containing a hardening accelerator. As the hardening accelerator, for example, various imidazoles, BF 3 amine complexes, and phosphorus-based hardening accelerators that are latent thermal hardeners can be used.

硬化促進劑的調配量,相對於環氧樹脂的調配量,較佳為0.1~5質量%。 The blending amount of the hardening accelerator is preferably 0.1 to 5% by mass relative to the blending amount of the epoxy resin.

由黏著層用樹脂組成物的保存安定性或B階段狀(半硬化狀)之黏著層用樹脂組成物的處理性及焊接耐熱性的觀點 而言,較佳為咪唑類、磷系硬化促進劑。 From the viewpoints of storage stability of the resin composition for an adhesive layer or the handleability and soldering heat resistance of the resin composition for an B-stage (semi-hardened) adhesive layer In particular, imidazoles and phosphorus-based hardening accelerators are preferred.

作為咪唑類,可舉出2-甲基咪唑、2-乙基咪唑、2-十一烷基咪唑、2-十七烷基咪唑、2-苯基咪唑、1,2-二甲基咪唑、2-乙基-1-甲基咪唑、1,2-二乙基咪唑、1-乙基-2-甲基咪唑、2-乙基-4-甲基咪唑、4-乙基-2-甲基咪唑、2-苯基-4-甲基咪唑、1-苯甲基-2-甲基咪唑、1-苯甲基-2-苯基咪唑、1-氰基乙基-2-甲基咪唑、1-氰基乙基-2-乙基咪唑、1-氰基乙基-2-苯基咪唑、1-氰基乙基-2-乙基-4-甲基咪唑、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑、2,3-二氫-1H-吡咯〔1,2-a〕苯并咪唑、2,4-二胺基-6-〔2'-甲基咪唑基-(1')〕乙基-s-三嗪、2,4-二胺基-6-〔2'-十一烷基咪唑基-(1')〕乙基-s-三嗪、2,4-二胺基-6-〔2'-乙基-4'-甲基咪唑基-(1')〕乙基-s-三嗪等咪唑化合物;前述咪唑化合物與偏苯三甲酸的加成反應物;前述咪唑化合物與異三聚氰酸的加成反應物;前述咪唑化合物與氫溴酸的加成反應物;前述咪唑化合物與環氧樹脂的加成反應物;前述咪唑化合物與氰酸酯樹脂的加成反應物等。該等之中,較佳為2-苯基咪唑、2-乙基-4-甲基咪唑。 Examples of imidazoles include 2-methylimidazole, 2-ethylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-phenylimidazole, 1,2-dimethylimidazole, 2-ethyl-1-methylimidazole, 1,2-diethylimidazole, 1-ethyl-2-methylimidazole, 2-ethyl-4-methylimidazole, 4-ethyl-2-methyl Imidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole , 1-cyanoethyl-2-ethylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 2-phenyl- 4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5-hydroxymethylimidazole, 2,3-dihydro-1H-pyrrole [1,2-a] benzimidazole, 2, 4-diamino-6- [2'-methylimidazolyl- (1 ')] ethyl-s-triazine, 2,4-diamino-6- [2'-undecylimidazolyl -(1 ')] ethyl-s-triazine, 2,4-diamino-6- [2'-ethyl-4'-methylimidazolyl- (1')] ethyl-s-tri Addition reactants of the aforementioned imidazole compounds and trimellitic acid; Addition reactants of the aforementioned imidazole compounds and isotricyanic acid; Addition of the aforementioned imidazole compounds and hydrobromic acid The reaction was; the addition reaction of an imidazole compound with an epoxy resin; the imidazole compound and an addition reaction of the cyanate resin and the like. Among these, 2-phenylimidazole and 2-ethyl-4-methylimidazole are preferable.

作為磷系硬化促進劑,較佳為含有磷原子且可促進環氧樹脂之硬化反應的硬化促進劑。例如可單獨使用磷系硬化促進劑,亦可併用1種或2種以上其他硬化促進劑。作為磷系硬化促進劑,可舉例如三苯基膦、二苯基(烷基苯基)膦、參(烷基苯基)膦、參(烷氧基苯基)膦、參(烷基- 烷氧基苯基)膦、參(二烷基苯基)膦、參(三烷基苯基)膦、參(四烷基苯基)膦、參(二烷氧基苯基)膦、參(三烷氧基苯基)膦、參(四烷氧基苯基)膦、三烷基膦、二烷基芳基膦、烷基二芳基膦等有機膦類;該等有機膦類與有機硼類之錯合物;三級膦與醌類的加成物等。 The phosphorus-based hardening accelerator is preferably a hardening accelerator that contains a phosphorus atom and can accelerate the hardening reaction of the epoxy resin. For example, a phosphorus-based hardening accelerator may be used alone, or one or two or more other hardening accelerators may be used in combination. Examples of the phosphorus-based hardening accelerator include triphenylphosphine, diphenyl (alkylphenyl) phosphine, gins (alkylphenyl) phosphine, gins (alkoxyphenyl) phosphine, and gins (alkyl- (Alkoxyphenyl) phosphine, gins (dialkylphenyl) phosphine, gins (trialkylphenyl) phosphine, gins (tetraalkylphenyl) phosphine, gins (dialkoxyphenyl) phosphine, ginseng (Trialkoxyphenyl) phosphines, gins (tetraalkoxyphenyl) phosphines, trialkylphosphines, dialkylarylphosphines, alkyldiarylphosphines and other organic phosphines; these organic phosphines Organic boron complexes; tertiary phosphine and quinone adducts.

進一步,本發明之黏著層用樹脂組成物,可配合目的來任意的使用公知的無機填充材料、有機填充劑、熱塑性樹脂、難燃劑、紫外線吸收劑、抗氧化劑、光聚合起始劑、螢光增白劑及黏著性提升劑等。 Furthermore, the resin composition for an adhesive layer of the present invention can be used in accordance with the purpose to use any known inorganic filler, organic filler, thermoplastic resin, flame retardant, ultraviolet absorber, antioxidant, photopolymerization initiator, fluorescent Light whitening agents and adhesion promoters.

作為無機填充材料,可舉例如二氧化矽、氧化鋁、滑石、雲母、高嶺土、氫氧化鋁、水鋁石(Boehmite)、氫氧化鎂、硼酸鋅、錫酸鋅、氧化鋅、氧化鈦、氮化硼、碳酸鈣、硫酸鋇、硼酸鋁、鈦酸鉀;以及E玻璃、T玻璃、D玻璃等之玻璃粉或中空玻璃珠等。這些可單獨使用或混合2種以上使用。 Examples of the inorganic filler include silicon dioxide, alumina, talc, mica, kaolin, aluminum hydroxide, boehmite, magnesium hydroxide, zinc borate, zinc stannate, zinc oxide, titanium oxide, nitrogen Boron, calcium carbonate, barium sulfate, aluminum borate, potassium titanate; and glass powder or hollow glass beads of E glass, T glass, D glass, etc. These can be used individually or in mixture of 2 or more types.

作為無機填充材料的含量,較佳為黏著層用樹脂組成物中佔10質量%以下。調配量若為10質量%以下,則進行粗糙化處理後可維持良好的表面形狀,可防止鍍覆特性及層間的絕緣可靠性降低。 The content of the inorganic filler is preferably 10% by mass or less in the resin composition for an adhesive layer. When the blending amount is 10% by mass or less, a good surface shape can be maintained after the roughening treatment, and reduction in plating characteristics and insulation reliability between layers can be prevented.

作為有機填充材料,可舉例如:均一結構的樹脂粒子,其是由聚乙烯、聚丙烯、聚苯乙烯、聚苯醚樹脂、聚矽氧樹脂、四氟乙烯樹脂等所構成;核殼結構之樹脂粒子,其具有橡膠狀態的核層及玻璃狀態的殼層,該核層是由丙烯酸酯系樹脂、甲基丙烯酸酯系樹脂、共軛二烯系樹脂等所構成, 該殼層是由丙烯酸酯系樹脂、甲基丙烯酸酯系樹脂、芳香族乙烯系樹脂、氰化乙烯系樹脂等所構成。 As the organic filling material, for example: resin particles of a uniform structure, which are composed of polyethylene, polypropylene, polystyrene, polyphenylene ether resin, polysiloxane resin, tetrafluoroethylene resin, etc .; Resin particles having a core layer in a rubber state and a shell layer in a glass state. The core layer is composed of an acrylate resin, a methacrylate resin, a conjugated diene resin, and the like. The shell layer is made of an acrylate resin, a methacrylate resin, an aromatic vinyl resin, a vinyl cyanide resin, or the like.

有機填充材料的含量,舉例而言,相對於樹脂成分的總和100質量份,較佳為0.5~300質量份,更佳為1~250質量份。 The content of the organic filler is, for example, preferably 0.5 to 300 parts by mass, and more preferably 1 to 250 parts by mass with respect to 100 parts by mass of the total of the resin components.

作為熱塑性樹脂,可舉例如聚苯醚樹脂、苯氧樹脂、聚碳酸酯樹脂、聚酯樹脂、聚醯胺樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、二甲苯樹脂、石油樹脂及聚矽氧樹脂等。 Examples of the thermoplastic resin include polyphenylene ether resin, phenoxy resin, polycarbonate resin, polyester resin, polyamide resin, polyimide resin, polyimide resin, xylene resin, and petroleum resin. And polysiloxane resin.

作為難燃劑,可舉例如含有溴或氯之含鹵素系難燃劑;磷酸三苯酯、磷酸三甲苯酯、磷酸參(二氯丙)酯、磷酸酯系化合物、紅磷等磷系難燃劑;胺磺酸胍、硫酸三聚氰胺、聚磷酸三聚氰胺、三聚氰胺三聚氰酸酯等氮系難燃劑;環磷腈(cyclophosphazene)、聚磷腈(polyphosphazene)等磷腈(phosphazene)系難燃劑;三氧化銻等無機系難燃劑。 Examples of the flame retardant include halogen-containing flame retardants containing bromine or chlorine; triphenyl phosphate, tricresyl phosphate, ginseng (dichloropropyl) phosphate, phosphate compounds, and red phosphorus Combustion agents; nitrogen-based flame retardants such as guanidine sulfamate, melamine sulfate, melamine polyphosphate, and melamine melamine; flame retardants such as cyclophosphazene and polyphosphazene Agent; inorganic flame retardants such as antimony trioxide.

作為其他紫外線吸收劑,可舉例如苯并三唑系紫外線吸收劑等。作為抗氧化劑,可舉例如受阻酚系或受阻胺系的抗氧化劑等。作為光聚合起始劑,可舉例如二苯甲酮類、苯甲基縮酮類、硫雜蒽酮系之光聚合起始劑等。作為螢光增白劑,可舉例如二苯乙烯衍生物等。作為黏著性提升劑,可舉例如脲矽烷等脲化合物;矽烷系、鈦酸酯系、鋁酸酯系等之偶合劑等。 As another ultraviolet absorber, a benzotriazole-type ultraviolet absorber etc. are mentioned, for example. Examples of the antioxidant include hindered phenol-based or hindered amine-based antioxidants. Examples of the photopolymerization initiator include benzophenones, benzyl ketals, and anthracene-based photopolymerization initiators. Examples of the fluorescent whitening agent include stilbene derivatives. Examples of the adhesiveness-improving agent include urea compounds such as urea-silane; coupling agents such as silane-based, titanate-based, and aluminate-based compounds.

黏著層用樹脂組成物,較佳為最後形成為各成分溶解或分散於有機溶劑中而成之清漆(以下亦稱為黏著層用樹脂清漆)的狀態。 The resin composition for an adhesive layer is preferably in a state finally formed into a varnish (hereinafter also referred to as a resin varnish for an adhesive layer) in which each component is dissolved or dispersed in an organic solvent.

作為製作成清漆時使用的有機溶劑,可舉例如甲醇、乙醇、丙醇、丁醇、甲基溶纖劑、丁基溶纖劑、丙二醇單甲醚等醇系溶劑;丙酮、甲乙酮、甲基異丁酮、環己酮等酮系溶劑;乙酸丁酯、丙二醇單甲醚乙酸酯等酯系溶劑;四氫呋喃等醚系溶劑;甲苯、二甲苯、均三甲苯等芳香族系溶劑;二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮等含氮原子的溶劑;二甲基亞碸等含硫原子的溶劑等,可單獨使用1種或2種以上混合使用。 Examples of the organic solvent used in the production of varnish include alcohol-based solvents such as methanol, ethanol, propanol, butanol, methyl cellosolve, butyl cellosolve, and propylene glycol monomethyl ether; acetone, methyl ethyl ketone, and methyl isobutyl Ketone solvents such as ketones and cyclohexanone; ester solvents such as butyl acetate, propylene glycol monomethyl ether acetate; ether solvents such as tetrahydrofuran; aromatic solvents such as toluene, xylene, and mesitylene; dimethylformamide Nitrogen, N, N-dimethylacetamide, N-methylpyrrolidone and other nitrogen atom-containing solvents; dimethylsulfinium and other sulfur atom-containing solvents, etc., can be used alone or in combination of two or more Mixed use.

該等有機溶劑,是由樹脂的溶解性及塗佈後之外觀的觀點來適當選擇。 These organic solvents are appropriately selected from the viewpoint of the solubility of the resin and the appearance after coating.

該等之中,由樹脂的溶解性及塗佈後之外觀的觀點而言,較佳為丙酮、甲乙酮、甲基異丁酮、環己酮等酮系溶劑;二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮等含氮原子的溶劑;酮系溶劑與含氮原子的溶劑之混合系溶劑。 Among these, from the viewpoint of the solubility of the resin and the appearance after coating, ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone, and cyclohexanone are preferred; dimethylformamide, N , N-dimethylacetamide, N-methylpyrrolidone and other nitrogen atom-containing solvents; ketone solvents and nitrogen atom-containing solvents are mixed solvents.

最後得到的清漆中的樹脂組成物,較佳為佔清漆全體的1~60質量%,更佳為2~50質量%。由塗佈時的膜厚精度及外觀的觀點而言,清漆中的樹脂組成物的含量較佳設為1~60質量%。 The resin composition in the finally obtained varnish is preferably 1 to 60% by mass, and more preferably 2 to 50% by mass. From the viewpoint of film thickness accuracy and appearance at the time of coating, the content of the resin composition in the varnish is preferably 1 to 60% by mass.

本發明的黏著層,是將黏著層用樹脂組成物(或含有其之清漆)利用逆輥塗佈機、凹版塗佈機、空氣刮刀塗佈機、模具塗佈機(die coater)、唇口式塗佈機(lip coater)等塗佈裝置塗佈於聚醯亞胺脫模薄膜的脫模層上,例如在80~230℃乾燥30秒~600秒來得到。 The adhesive layer of the present invention is a resin composition (or a varnish containing the same) for the adhesive layer using a reverse roll coater, a gravure coater, an air blade coater, a die coater, and a lip. A coating device such as a lip coater is applied to the release layer of the polyimide release film, and is obtained by, for example, drying at 80 to 230 ° C. for 30 seconds to 600 seconds.

又,本發明中,聚醯亞胺脫模薄膜未設置脫模層之 面上可具有黏著層,亦可在此狀態下在熱板加壓步驟中使用。 In the present invention, the polyimide release film is not provided with a release layer. There may be an adhesive layer on the surface, or it may be used in the hot plate pressing step in this state.

藉由使用本發明之聚醯亞胺脫模薄膜,可提升熱壓步驟後之絕緣層的表面平坦性。此表面平坦性,是如第1圖及第2圖的利用高精度3維表面形狀粗糙度測定系統觀察絕緣層的表面狀態的結果所示,使用如第2圖所示之銅箔的情況,表面會產生起伏,但使用本發明之聚醯亞胺脫模薄膜的情況,如第1圖所示,幾乎看不到起伏。此起伏推測是熱膨張率較低的絕緣層與熱膨張率較高的銅箔在熱壓步驟時因其熱膨張率差而產生。 By using the polyimide release film of the present invention, the surface flatness of the insulating layer after the hot pressing step can be improved. This surface flatness is the result of observing the surface state of the insulating layer using a high-precision 3-dimensional surface shape roughness measurement system as shown in Figs. 1 and 2 when the copper foil shown in Fig. 2 is used. There are undulations on the surface, but when using the polyfluorene imide release film of the present invention, as shown in FIG. 1, there is almost no undulation. This fluctuation is presumably caused by the difference in thermal expansion rate between the insulating layer with a lower thermal expansion rate and the copper foil with a higher thermal expansion rate during the hot pressing step.

〔配置了附有黏著層的聚醯亞胺脫模薄膜之積層板、將積層板的聚醯亞胺脫模薄膜剝離而成的積層板、配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板、以及多層線路板的製造方法〕 [Laminated boards with polyimide release film with adhesive layer, laminated boards with polyimide release film from laminated board peeled, and polyimide with release layer Thin film single-layer or multilayer wiring board, and manufacturing method of multilayer wiring board]

本發明之配置了附有黏著層的聚醯亞胺脫模薄膜之積層板,是將附有黏著層的聚醯亞胺脫模薄膜的黏著層側,積層並成形於預浸體或絕緣層的至少一方的面上而形成。 In the present invention, a laminated board provided with a polyimide release film with an adhesive layer is formed by laminating and forming the polyimide release film with an adhesive layer on the prepreg or insulation layer. Formed on at least one of the faces.

本發明之配置了附有黏著層的聚醯亞胺脫模薄膜之積層板,可將附有黏著層的聚醯亞胺脫模薄膜,以黏著層成為內側之方式重疊於預浸體或絕緣層的單面或兩面,進一步在外側重疊端板(end plate)並加壓成型來製造。 The laminated board provided with a polyimide release film with an adhesive layer according to the present invention can superimpose the polyimide release film with an adhesive layer on the prepreg or insulation so that the adhesive layer becomes the inner side One or both sides of the layer are manufactured by laminating an end plate on the outside and press molding.

又,本發明之配置了附有黏著層的聚醯亞胺脫模薄膜之積層板,例如可將附有黏著層的聚醯亞胺脫模薄膜,以黏著層成為內側之方式重疊於預浸體或絕緣層的單面或兩面,利用設有耐熱性橡膠薄片的層合機加熱及加壓來積層,並在積 層後加熱使其硬化來製造。 In addition, in the laminated board provided with a polyimide release film with an adhesive layer, for example, the polyimide release film with an adhesive layer can be superimposed on the prepreg so that the adhesive layer becomes the inner side. One or both sides of the body or insulation layer are laminated by heating and pressing with a laminator equipped with a heat-resistant rubber sheet, and It is manufactured by heating and hardening the layer.

上述加壓成型之加熱溫度(熱板的溫度)較佳設為150~260℃。加壓時的壓力較佳設為0.5~10MPa。又,設有耐熱性橡膠薄片的層合機之加熱溫度,較佳設為80~150℃。加壓時的壓力較佳設為0.3~10MPa。 The heating temperature (temperature of the hot plate) of the pressure molding is preferably set to 150 to 260 ° C. The pressure during pressurization is preferably 0.5 to 10 MPa. The heating temperature of the laminator provided with the heat-resistant rubber sheet is preferably set to 80 to 150 ° C. The pressure during pressurization is preferably 0.3 to 10 MPa.

無論任一種方法,積層並成形後可適當地將聚醯亞胺脫模薄膜剝離,得到積層板。 Either method, after laminating and forming, the polyimide release film can be appropriately peeled to obtain a laminated board.

本發明之前述配置了聚醯亞胺脫模薄膜(附有黏著層的聚醯亞胺脫模薄膜)之單層或多層線路板,是將附有黏著層的聚醯亞胺脫模薄膜的黏著層側,積層於預浸體或絕緣層的一方的面上,並將預浸體或絕緣層的另一方的面,積層於要被電路加工而成的單層或多層線路板上而成。該預浸體可為硬化前的預浸體,亦可為至少一部分硬化後之預浸體。 The aforementioned single-layer or multi-layer circuit board configured with a polyimide release film (polyimide release film with an adhesive layer) is a polyimide release film with an adhesive layer. Adhesive layer side, laminated on one side of the prepreg or insulation layer, and laminated on the other side of the prepreg or insulation layer on the single-layer or multilayer circuit board to be processed by the circuit . The prepreg may be a prepreg before hardening, or may be at least a part of the prepreg after hardening.

此處,「要被電路加工而成」是指包含在進行電路加工後在製造線路板時實施通常能夠進行之處理的情況,具體而言,包含在電路加工後實施鍍覆處理等的情況。又,單層線路板,在預浸體或絕緣層僅積層於單面的情況中是指具有1層電路層之線路板,在預浸體或絕緣層積層於兩面的情況中是指對於各自的面具有1層電路層(即是合計2層電路層)之線路板。另一方面,多層線路板是指下述兩者:至少一方的面經電路加工之核;及在該經電路加工之核的面上積層至少1層的預浸體或絕緣層並在積層之預浸體或絕緣層上經進行電路加工之線路板。 Here, "to be processed by a circuit" means a case where a process that can normally be performed when a circuit board is manufactured after circuit processing is performed, and specifically includes a case where a plating process is performed after circuit processing and the like. In addition, a single-layer circuit board refers to a circuit board having one circuit layer when a prepreg or an insulating layer is laminated on only one side, and a case where a prepreg or an insulating layer is laminated on both sides. The surface of the circuit board has one circuit layer (that is, a total of two circuit layers). On the other hand, a multilayer wiring board refers to the following: at least one side of which is processed by a core; and at least one layer of prepreg or insulation layer is laminated on the surface of the core which has been processed by the circuit. Circuit board for circuit processing on prepreg or insulation.

本發明之多層線路板的製造方法,包含下述步驟: 藉由將前述附有黏著層的聚醯亞胺脫模薄膜積層於單層或多層線路板上,來製造配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板的步驟;由配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板去除聚醯亞胺脫模薄膜的步驟;及,進行電路加工的步驟。此處,作為附有黏著層的聚醯亞胺脫模薄膜的製造方法,較佳為包含下述步驟:在聚醯亞胺薄膜的一方的面上塗佈包含醇酸樹脂(A)及胺基樹脂(B)之脫模劑組成物,來形成脫模層之步驟(聚醯亞胺脫模薄膜製造步驟);在前述脫模層的未設置聚醯亞胺薄膜之面上形成黏著層,來製造附有黏著層的聚醯亞胺脫模薄膜的步驟(附有黏著層的聚醯亞胺脫模薄膜製造步驟)。 The method for manufacturing a multilayer wiring board of the present invention includes the following steps: By laminating the aforementioned polyfluorene imide release film with an adhesive layer on a single-layer or multi-layer circuit board, a single-layer or multi-layer circuit board equipped with the polyfluorine-imide release film with an adhesive layer is manufactured. A step of removing the polyimide release film from a single-layer or multi-layer circuit board provided with a polyimide release film with an adhesive layer; and a step of performing circuit processing. Here, as a method for producing a polyimide release film with an adhesive layer, it is preferable to include the step of applying an alkyd resin (A) and an amine to one surface of the polyimide film. A step of forming a release layer (polyimide release film manufacturing step) of the release agent composition of the base resin (B); forming an adhesive layer on the surface of the release layer that is not provided with a polyimide film To produce a polyimide release film with an adhesive layer (step of producing a polyimide release film with an adhesive layer).

上述步驟中,聚醯亞胺脫模薄膜製造步驟、附有黏著層的聚醯亞胺脫模薄膜製造步驟,是如上所述。 In the above steps, the manufacturing process of the polyimide release film and the manufacturing process of the polyimide release film with an adhesive layer are as described above.

以下說明配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板製造步驟及聚醯亞胺脫模薄膜去除步驟。 The following describes the manufacturing steps of a single-layer or multi-layer circuit board equipped with a polyimide release film with an adhesive layer and a polyimide release film removal step.

又,由配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板去除聚醯亞胺脫模薄膜後,該黏著層作為多層線路板的絕緣層來產生作用。 In addition, after the polyimide release film is removed from a single-layer or multilayer wiring board provided with a polyimide release film with an adhesive layer, the adhesive layer functions as an insulating layer of the multilayer circuit board.

在配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板製造步驟中,舉例而言,首先,將形成有黏著層的本發明之聚醯亞胺脫模薄膜,以黏著層成為內側的方式重疊於預浸體或絕緣層,再將此重疊於要被電路加工而成之線路板的單面或兩面。進一步在外側重疊端板並加壓成型。藉由取下端板,製造單面或兩面上配置了本發明之聚醯亞胺脫 模薄膜之單層或多層線路板。之後,將本發明之聚醯亞胺脫模薄膜剝離去除(聚醯亞胺脫模薄膜去除步驟),經過進行電路加工的步驟來得到多層線路板。 In the manufacturing process of a single-layer or multi-layer circuit board equipped with a polyimide release film with an adhesive layer, for example, first, a polyimide release film of the present invention with an adhesive layer formed is used to The adhesive layer is superposed on the prepreg or the insulating layer in such a way that it becomes the inner side, and then this is superposed on one or both sides of the circuit board to be processed by the circuit. An end plate is further stacked on the outside and press-molded. By removing the end plate, one side or both sides are provided with the polyimide removal of the present invention. Single-layer or multi-layer circuit board of mold film. After that, the polyimide release film of the present invention is peeled and removed (polyimide release film removal step), and a multilayer circuit board is obtained through a step of performing circuit processing.

上述加壓成型之加熱溫度(熱板的溫度),較佳設為例如180~300℃,更佳設為200~250℃。加壓時的壓力較佳設為1~4MPa。 The heating temperature (temperature of the hot plate) of the pressure molding is preferably set to, for example, 180 to 300 ° C, and more preferably 200 to 250 ° C. The pressure at the time of pressurization is preferably 1 to 4 MPa.

又,亦可依照需要,在剝離(聚醯亞胺脫模薄膜去除步驟)前,從聚醯亞胺薄膜的上面實施鑽孔加工及雷射加工後去除聚醯亞胺脫模薄膜。藉由從聚醯亞胺薄膜的上面進行開孔加工,可防止加工時的樹脂飛散等,明顯提升良率。 In addition, if necessary, the polyimide release film may be removed by performing a drilling process and laser processing from the upper surface of the polyimide film before peeling (polyimide release film removal step). By performing a hole-cutting process from the top surface of the polyimide film, the resin scattering during processing can be prevented, and the yield can be significantly improved.

此處,作為本發明之多層線路板的製造方法中使用的預浸體及絕緣層的材料,並無特別限定而可適用一般使用的材料。例如可以將多官能環氧樹脂、環氧樹脂硬化劑、硬化促進劑、溶劑及依照需要之無機填充劑混合而成之混合物作為絕緣層的材料,亦可使用進一步將該材料含浸或塗佈於積層板用玻璃布而得到的預浸體。作為預浸體,亦可使用市售品,作為市售品,可舉例如日立化成股份有限公司製的商品名:GEA-67N、GEA-679F、GEA-679GT、GEA-700G等。 Here, the materials for the prepreg and the insulating layer used in the method for manufacturing the multilayer wiring board of the present invention are not particularly limited, and generally used materials can be applied. For example, a mixture of a polyfunctional epoxy resin, an epoxy resin hardener, a hardening accelerator, a solvent, and an inorganic filler as required may be used as a material for the insulating layer, and the material may be further impregnated or coated with the material. A prepreg obtained by laminating glass cloth. As the prepreg, a commercially available product may be used. As the commercially available product, for example, trade names manufactured by Hitachi Chemical Co., Ltd .: GEA-67N, GEA-679F, GEA-679GT, GEA-700G, and the like.

要被電路加工而成的單層線路板或多層線路板中的內層電路板,是例如表面形成有第一電路層(內層線路)之內層基板,作為內層基板,可使用一般線路板所使用的公知的積層板,例如玻璃布-環氧樹脂、紙-酚樹脂、紙-環氧樹脂、玻璃布或玻璃紙-環氧樹脂等,並無特別限制。又, 亦可使用:含浸有雙順丁烯二醯亞胺-三嗪樹脂之BT基板;以及使用聚醯亞胺薄膜作為基材而得之聚醯亞胺薄膜基板等。 The inner-layer circuit board in the single-layer circuit board or the multilayer circuit board to be processed by the circuit is, for example, an inner-layer substrate having a first circuit layer (inner-layer circuit) formed on the surface. As the inner-layer substrate, a general circuit can be used. There are no particular restrictions on the known laminated boards used for the board, such as glass cloth-epoxy, paper-phenol resin, paper-epoxy, glass cloth, or cellophane-epoxy. also, Can also be used: BT substrates impregnated with bis-cis- butene diimide-triazine resin; and polyimide film substrates obtained using polyimide films as substrates.

形成電路的方法並無特別限制。例如可採用:利用鍍覆製程來形成電路之半加成法、在絕緣基板的需要的部位藉由無電解鍍覆來形成電路之加成法等公知的電路形成方法。 The method of forming the circuit is not particularly limited. For example, a known circuit formation method such as a semi-additive method for forming a circuit by a plating process, and an additive method for forming a circuit by electroless plating at a desired portion of an insulating substrate can be adopted.

在本發明之積層板或是單層或多層線路板的黏著層上利用鍍覆製程進行電路加工的情況,首先進行粗糙化處理。作為此情況的粗糙化液,可使用例如鉻/硫酸粗糙化液、鹼性過錳酸粗糙化液、氟化鈉/鉻/硫酸粗糙化液、氟硼酸粗糙化液等氧化性粗糙化液。作為粗糙化處理,舉例而言有下述方法:首先,將作為膨潤液之二乙二醇單丁醚與NaOH之水溶液加熱至70℃後,將積層板或是單層或多層線路板進行浸漬處理5分鐘。接著,將作為粗糙化液之KMnO4與NaOH之水溶液加熱至80℃後,進行浸漬處理10分鐘。接下來,在中和液中,例如在氯化亞錫(SnCl2)的鹽酸水溶液中,於室溫進行浸漬處理5分鐘來中和。 In the case of using the plating process to perform circuit processing on the laminated layer of the present invention or the adhesive layer of a single-layer or multi-layer circuit board, roughening treatment is performed first. As the roughening solution in this case, for example, an oxidizing roughening solution such as a chromium / sulfuric acid roughening solution, an alkaline permanganic acid roughening solution, a sodium fluoride / chromium / sulfuric acid roughening solution, or a fluoroboric acid roughening solution can be used. As the roughening treatment, for example, there are the following methods: First, an aqueous solution of diethylene glycol monobutyl ether and NaOH as a swelling liquid is heated to 70 ° C, and then the laminated board or a single-layer or multilayer wiring board is impregnated. Process for 5 minutes. Next, an aqueous solution of KMnO 4 and NaOH as a roughening solution was heated to 80 ° C., and then subjected to an immersion treatment for 10 minutes. Next, in a neutralizing solution, for example, in a hydrochloric acid aqueous solution of stannous chloride (SnCl 2 ), immersion treatment is performed at room temperature for 5 minutes to neutralize.

進行粗糙化處理後,進行使鈀附著之鍍覆觸媒供給處理。鍍覆觸媒處理是浸漬於氯化鈀系的鍍覆觸媒液中來進行。接著,浸漬於無電解鍍覆液中進行無電解鍍覆處理,使厚度為0.3~1.5μm之無電解鍍覆層(導體層)在鍍覆製程用底漆層的整個表面析出。 After the roughening treatment is performed, a plating catalyst supply treatment for attaching palladium is performed. The plating catalyst treatment is performed by immersion in a palladium chloride-based plating catalyst liquid. Next, it is immersed in an electroless plating solution to perform an electroless plating treatment, so that an electroless plated layer (conductor layer) having a thickness of 0.3 to 1.5 μm is deposited on the entire surface of the primer layer for the plating process.

接著在形成抗鍍層後,進行電鍍處理來在所需部位形成 所需厚度的電路。無電解鍍覆處理所使用的無電解鍍覆液,可使用公知的無電解鍍覆液,無特別限制。抗鍍層亦可使用公知的抗鍍層,並無特別限制。又,電鍍處理亦可使用公知的方法,無特別限制。該等鍍覆較佳為鍍銅。可進一步將不需要之部位的無電解鍍覆層利用蝕刻去除來形成外層電路。 Next, after forming an anti-plating layer, an electroplating process is performed to form a desired portion. The desired thickness of the circuit. The electroless plating solution used for the electroless plating treatment may be a known electroless plating solution, and is not particularly limited. The plating layer may be a known plating layer and is not particularly limited. Moreover, a well-known method can also be used for electroplating process, and there is no restriction | limiting in particular. These platings are preferably copper plating. The electroless plating layer at an unnecessary portion can be further removed by etching to form an outer layer circuit.

又可依照需要,對電路層的表面進行表面處理使其成為適合黏著性的狀態,此手法亦無特別限制。例如,可使用下述的公知製造方法:藉由次氯酸鈉的鹼性水溶液在電路層1的表面形成氧化銅的針狀結晶,並將形成之氧化銅的針狀結晶浸漬於二甲基胺硼烷水溶液中來還原等。 The surface of the circuit layer may be subjected to surface treatment to make it suitable for adhesiveness as required, and this method is not particularly limited. For example, a known manufacturing method can be used in which needle-shaped crystals of copper oxide are formed on the surface of the circuit layer 1 with an alkaline aqueous solution of sodium hypochlorite, and the needle-shaped crystals of the formed copper oxide are immersed in dimethylamine borane. In aqueous solution.

以下,可進一步重複同樣步驟來製造層數較多的多層線路板。 Hereinafter, the same steps can be repeated to produce a multilayer wiring board with a large number of layers.

[實施例] [Example]

接著藉由實施例說明本發明,但本發明的範圍不限定於該等實施例。 Next, the present invention is described by examples, but the scope of the present invention is not limited to these examples.

〔黏著層用樹脂清漆的製備〕 [Preparation of resin varnish for adhesive layer]

(製備例1) (Preparation Example 1)

在甲酚酚醛清漆型環氧樹脂(新日化環氧製造股份有限公司製造,商品名:YDCN-700-10)27.5g加入苯酚芳烷基樹脂(三井化學股份有限公司製造,商品名:XLC-LL)22.5g,再加入環己酮850g並攪拌揉合。在此加入丙烯酸橡膠(Nagase Chemtex股份有限公司製造,商品名:HTR-860P-3,重量平均分子量80萬,玻璃轉移點:13℃)100g,加入作為硬化促進劑之1-氰基乙基-2-苯基咪唑(四國化成 工業股份有限公司製造,商品名:Curezol 2PZ-CN)0.25g,攪拌來得到黏著層用樹脂清漆A(固體成分濃度約15質量%)。 Add 27.5 g of cresol novolac epoxy resin (manufactured by Shin Nippon Epoxy Co., Ltd., trade name: YDCN-700-10) to a phenol aralkyl resin (manufactured by Mitsui Chemicals Co., Ltd., trade name: XLC -LL) 22.5 g, and then 850 g of cyclohexanone was added and kneaded. Here, 100 g of acrylic rubber (manufactured by Nagase Chemtex Co., Ltd., trade name: HTR-860P-3, weight average molecular weight 800,000, glass transition point: 13 ° C.) was added, and 1-cyanoethyl- 2-phenylimidazole (Shikoku Chemical 0.25 g (trade name: Curezol 2PZ-CN) manufactured by Industrial Co., Ltd., and stirred to obtain a resin varnish A (solid content concentration of about 15% by mass) for the adhesive layer.

(製備例2) (Preparation Example 2)

在聚醯胺(日本化藥股份有限公司製造,商品名:BPAM-155)18g中,調配N,N-二甲基乙醯胺(DMAc)159g後,接著加入聯苯芳烷基型環氧樹脂(日本化藥股份有限公司製造,商品名:NC3000H)50g、雙酚A酚醛清漆型酚樹脂(三菱化學股份有限公司製造,商品名:YLH129)20g,進一步添加作為硬化促進劑之2-苯基咪唑(四國化成工業股份有限公司製造,商品名:2PZ)0.5g,以由DMAc及甲乙酮所構成之混合溶劑稀釋後,加入氧化鋁填充劑(CI化成股份有限公司製造,商品名:NanoTek)5g,使用分散機(吉田機械興業股份有限公司製造,商品名:Nanomizer)得到黏著層用樹脂清漆B(固體成分濃度約25質量%)。 To 18 g of polyammonium (manufactured by Nippon Kayaku Co., Ltd., trade name: BPAM-155), 159 g of N, N-dimethylacetamide (DMAc) was blended, and then a biphenylaralkyl-based epoxy was added. Resin (manufactured by Nippon Kayaku Co., Ltd., trade name: NC3000H) 50 g, bisphenol A novolac phenol resin (manufactured by Mitsubishi Chemical Corporation, trade name: YLH129) 20 g, and 2-benzene as a hardening accelerator is further added. 0.5 g of imidazole (manufactured by Shikoku Chemical Industry Co., Ltd., trade name: 2PZ), diluted with a mixed solvent composed of DMAc and methyl ethyl ketone, and then added an alumina filler (manufactured by CI Kasei Corporation, trade name: NanoTek ) 5 g, using a disperser (manufactured by Yoshida Machinery Industrial Co., Ltd., trade name: Nanomizer) to obtain a resin varnish B (solid content concentration of about 25% by mass) for the adhesive layer.

〔脫模層用樹脂清漆的製備〕 [Preparation of resin varnish for release layer]

(製備例3) (Preparation Example 3)

在非聚矽氧系胺基醇酸樹脂〔商品名Tesfine 303,日立化成Polymer股份有限公司製造,固體成分48.7%〕31.5g中,調配作為酸性觸媒之對甲苯磺酸〔商品名Dryer 900,日立化成Polymer股份有限公司製造,固體成分50%〕1.5g,接著使用甲苯1050g、MEK450g稀釋,得到脫模層用樹脂清漆A。 To 31.5 g of non-silicone amino alkyd resin [trade name Tesfine 303, manufactured by Hitachi Chemical Co., Ltd., solid content 48.7%], p-toluenesulfonic acid [trade name Dryer 900, Manufactured by Hitachi Chemical Polymer Co., Ltd., solid content 50%] 1.5 g, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish A for a release layer.

(製備例4) (Preparation Example 4)

在非聚矽氧系胺基醇酸樹脂〔商品名Tesfine 305,日立化成Polymer股份有限公司製造,固體成分48.7%〕31.5g中, 調配作為酸性觸媒之對甲苯磺酸〔商品名Dryer 900,日立化成Polymer股份有限公司製造,固體成分50%〕1.5g,接著使用甲苯1050g、MEK450g稀釋,得到脫模層用樹脂清漆B。 In 31.5 g of non-silicone amino alkyd resin [trade name Tesfine 305, manufactured by Hitachi Chemical Co., Ltd., solid content 48.7%], 1.5 g of p-toluenesulfonic acid [trade name: Dryer 900, manufactured by Hitachi Chemical Co., Ltd., 50% solid content] was prepared as an acidic catalyst, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish B for a release layer.

(製備例5) (Preparation Example 5)

在含有聚矽氧之胺基醇酸樹脂〔Tesfine 319,日立化成Polymer股份有限公司製造,固體成分48.7%〕31.5g中,調配作為酸性觸媒之對甲苯磺酸〔商品名Dryer 900,日立化成Polymer股份有限公司製造,固體成分50%〕1.5g,接著使用甲苯1050g、MEK450g稀釋,得到脫模層用樹脂清漆C。 To 31.5 g of polysiloxane-containing amino alkyd resin [Tesfine 319, manufactured by Hitachi Chemical Co., Ltd., solid content 48.7%], p-toluenesulfonic acid [trade name: Dryer 900, Hitachi Chemical Co., Ltd.] was prepared as an acid catalyst. Polymer Co., Ltd., solid content 50%] 1.5 g, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish C for a release layer.

(製備例6) (Preparation Example 6)

在含有聚矽氧之胺基醇酸樹脂〔商品名TA31-209E,日立化成Polymer股份有限公司製造,固體成分48.7%〕31.5g中,調配作為酸性觸媒之對甲苯磺酸〔商品名Dryer 900,日立化成Polymer股份有限公司製造,固體成分50%〕1.5g,接著使用甲苯1050g、MEK450g稀釋,得到脫模層用樹脂清漆D。 Polyacrylic acid-containing amino alkyd resin [trade name TA31-209E, manufactured by Hitachi Chemical Co., Ltd., solid content 48.7%], 31.5 g of p-toluenesulfonic acid [trade name Dryer 900 as an acid catalyst] , Manufactured by Hitachi Chemical Co., Ltd., solid content 50%] 1.5 g, and then diluted with 1050 g of toluene and 450 g of MEK to obtain a resin varnish D for a release layer.

(實施例1) (Example 1)

.附有黏著層的聚醯亞胺脫模薄膜: . Polyimide release film with adhesive layer:

作為聚醯亞胺薄膜,使用厚度25μm且表面粗糙度Ra未滿0.05μm的宇部興產股份有限公司製造的Upilex 25SGA(商品名)。在此聚醯亞胺薄膜上,使用模具塗佈機塗佈製備例3所製備之脫模層用樹脂清漆A,並在160℃乾燥40秒,得到厚度0.2μm的脫模層。 As the polyimide film, Upilex 25SGA (trade name) manufactured by Ube Industries Co., Ltd. having a thickness of 25 μm and a surface roughness Ra of less than 0.05 μm was used. On this polyimide film, the resin varnish A for the release layer prepared in Preparation Example 3 was applied using a mold coater, and dried at 160 ° C. for 40 seconds to obtain a release layer having a thickness of 0.2 μm.

在所得到的聚醯亞胺脫模薄膜的脫模層面上塗佈製備例 1所製備之黏著層用樹脂清漆A,並在140℃乾燥5分鐘,形成厚度5μm的黏著層,得到附有黏著層的聚醯亞胺脫模薄膜。 Preparation example of coating on the release layer of the obtained polyimide release film 1. The prepared resin varnish A for the adhesive layer was dried at 140 ° C. for 5 minutes to form an adhesive layer having a thickness of 5 μm, to obtain a polyimide release film with an adhesive layer.

.積層板: . Laminated boards:

重疊4片預浸體(日立化成股份有限公司製造,商品名GEA-700G,0.10mm厚),在其上下重疊上述附有黏著層的聚醯亞胺脫模薄膜,使聚醯亞胺薄膜面成為外側,接著重疊端板、緩衝紙,並使用加壓機,以3.0MPa、240℃的條件加熱硬化1小時來得到積層板。 Four pieces of prepreg (manufactured by Hitachi Chemical Co., Ltd. under the trade name of GEA-700G, 0.10 mm thick) were stacked, and the above polyimide release film with an adhesive layer was superposed on the top and bottom of the polyimide film. It turned to the outer side, and then an end plate and a buffer paper were superimposed, and heat-cured at 3.0 MPa and 240 ° C. for 1 hour using a press to obtain a laminated board.

(實施例2) (Example 2)

除了使用厚度25μm且表面粗糙度Ra未滿0.05μm的Toray DuPont股份有限公司製造的Kapton 100H(商品名)作為聚醯亞胺薄膜以外,其餘與實施例1同樣地得到附有黏著層的聚醯亞胺脫模薄膜及積層板。 Except that Kapton 100H (trade name) manufactured by Toray DuPont Co., Ltd. having a thickness of 25 μm and a surface roughness Ra of less than 0.05 μm was used as the polyimide film, a polyfluorene with an adhesive layer was obtained in the same manner as in Example 1. Imine release film and laminated board.

(實施例3) (Example 3)

除了使用製備例4所製備之脫模層用樹脂清漆B作為脫模層,使用製備例2所製備之黏著層用樹脂清漆B作為黏著層以外,其餘與實施例1同樣地得到附有黏著層的聚醯亞胺脫模薄膜及積層板。 Except that the resin varnish B for the release layer prepared in Preparation Example 4 was used as the release layer and the resin varnish B for the adhesive layer prepared in Preparation Example 2 was used as the adhesive layer, the rest was obtained in the same manner as in Example 1. Polyimide release film and laminated board.

(實施例4) (Example 4)

除了使用製備例5所製備之脫模層用樹脂清漆C作為脫模層,使用製備例2所製備之黏著層用樹脂清漆B作為黏著層以外,其餘與實施例1同樣地得到附有黏著層的聚醯亞胺脫模薄膜及積層板。 Except that the resin varnish C for the release layer prepared in Preparation Example 5 was used as the release layer, and the resin varnish B for the adhesive layer prepared in Preparation Example 2 was used as the adhesive layer, the rest was obtained in the same manner as in Example 1. Polyimide release film and laminated board.

(實施例5) (Example 5)

除了使用製備例6所製備之脫模層用樹脂清漆D作為脫模層,使用製備例2所製備之黏著層用樹脂清漆B作為黏著層以外,其餘與實施例1同樣地得到附有黏著層的聚醯亞胺脫模薄膜及積層板。 Except that the resin varnish D for the release layer prepared in Preparation Example 6 was used as the release layer, and the resin varnish B for the adhesive layer prepared in Preparation Example 2 was used as the adhesive layer, the rest was obtained in the same manner as in Example 1. Polyimide release film and laminated board.

(比較例1) (Comparative example 1)

除了使用附有脫模層的聚對苯二甲酸乙二酯薄膜(商品名Unipeel TR1,Unitika股份有限公司製造,厚度38μm)代替附有脫模層的聚醯亞胺薄膜以外,其餘與實施例1同樣地得到附有黏著層的脫模薄膜及積層板。 Except for using a polyethylene terephthalate film with a release layer (trade name Unipeel TR1, manufactured by Unitika Co., Ltd., 38 μm thick) instead of the polyimide film with a release layer, the rest are the same as in the examples. 1 Similarly, a release film and a laminated board with an adhesive layer were obtained.

(比較例2) (Comparative example 2)

除了聚醯亞胺薄膜上未形成脫模層以外,其餘與實施例1同樣地,在聚醯亞胺薄膜面上塗佈形成黏著層,得到附有黏著層的脫模薄膜及積層板。 Except that no release layer was formed on the polyimide film, as in Example 1, an adhesive layer was formed on the surface of the polyimide film by coating to obtain a release film and a laminated board with the adhesive layer.

(比較例3) (Comparative example 3)

除了使用電解銅箔(Furukawa Circuit Foil股份有限公司製造,商品名GTS-18,厚度18μm)代替聚醯亞胺脫模薄膜,在光澤面上塗佈形成黏著層以外,其餘與實施例1同樣地得到積層板。 Except for using electrolytic copper foil (manufactured by Furukawa Circuit Foil Co., Ltd., trade name: GTS-18, thickness: 18 μm) instead of the polyimide release film, and applying an adhesive layer on the glossy surface, the procedure was the same as in Example 1. A laminated board was obtained.

(比較例4) (Comparative Example 4)

除了使用聚矽氧系脫模劑(信越化學工業股份有限公司製造,商品名KS-774)代替脫模層用樹脂清漆A以外,其餘與實施例1同樣地得到積層板。 A laminated board was obtained in the same manner as in Example 1 except that a polysiloxane-based mold release agent (manufactured by Shin-Etsu Chemical Co., Ltd., trade name KS-774) was used instead of the resin varnish A for the release layer.

關於如上製作的積層板,對於加壓後的薄膜剝離性 及可容易剝離之剝離後的積層板,以下述方式實施其絕緣層(熱硬化後的黏著層)的表面粗糙度、無轉移性、及表面平坦性的測定。結果如下述表1及表2所示。 Regarding the laminated board produced as described above, the film peelability after pressurization And the peelable laminated board which can be easily peeled off, the surface roughness, non-transferability, and surface flatness of the insulating layer (adhesive layer after heat curing) were measured in the following manner. The results are shown in Tables 1 and 2 below.

〔加壓後的剝離性〕 [Peelability after pressing]

加壓後,確認是否可在不發生脫模薄膜的變形、熔接、破裂之情況下將薄膜單獨剝離。進一步,以肉眼確認在加壓後從積層樣品將脫模薄膜剝離後在與脫模層的界面是否可剝離。 After pressing, it was confirmed whether the film can be peeled independently without deformation, welding, or cracking of the release film. Furthermore, it was visually confirmed whether the release film was peelable at the interface with the release layer after peeling the release film from the laminated sample after pressing.

A:在界面可容易剝離。 A: It can be easily peeled at the interface.

C:在界面無法容易剝離。 C: It cannot be easily peeled at the interface.

「在界面無法容易剝離」,是指無法將薄膜單獨剝離的情況、或剝離後黏著層的樹脂組成物附著在脫模薄膜上的情況。 "Easy peeling at the interface" refers to the case where the film cannot be peeled individually, or the resin composition of the adhesive layer after the peeling is attached to the release film.

〔表面粗糙度〕 〔Surface roughness〕

加壓並將薄膜剝離後之絕緣層的表面粗糙度,是利用表面形狀測定裝置(Veeco公司製造,商品名:Wyko NT9100)於下述測定條件進行測定。 The surface roughness of the insulating layer after pressing and peeling the film was measured using a surface shape measuring device (manufactured by Veeco, trade name: Wyko NT9100) under the following measurement conditions.

-測定條件- -Measurement conditions-

內部鏡片:1倍 Internal lens: 1x

外部鏡片:50倍 External lens: 50 times

測定範圍:0.125×0.095mm Measurement range: 0.125 × 0.095mm

測定深度:10μm Measurement depth: 10μm

測定方式:垂直掃描型干涉方式(VSI方式) Measurement method: vertical scanning type interference method (VSI method)

〔無轉移性〕 [No transferability]

從加壓後的積層板將聚醯亞胺薄膜剝離後,在絕緣層上塗佈寺西化學工業股份有限公司製造的Magic Ink(註冊商標)No.500(黑),觀察該墨水的排斥(repelling)狀況。排斥墨水的現象,是表示脫模層成分轉移至絕緣層,故排斥者評價為「C」,不排斥者評價為「A」。 After the polyimide film was peeled from the pressurized laminated board, Magic Ink (registered trademark) No. 500 (black) manufactured by Sisai Chemical Industry Co., Ltd. was coated on the insulating layer, and repellency of the ink was observed. )situation. The phenomenon of ink repulsion indicates that the components of the release layer are transferred to the insulating layer, so the repellent evaluated it as "C" and the non-repellent evaluated it as "A".

〔表面平坦性〕 〔Surface flatness〕

利用高精度3維表面形狀粗糙度測定系統(Veeco公司製造,商品名WYKO NT9100),觀察加壓後的絕緣層的表面形狀。第1圖及第2圖表示對於X軸:125μm、Y軸:95μm之形狀範圍進行表面觀察的結果。 A high-precision 3-dimensional surface shape and roughness measuring system (manufactured by Veeco, trade name WYKO NT9100) was used to observe the surface shape of the insulating layer after pressing. The first and second figures show the results of surface observation on a shape range of X-axis: 125 μm and Y-axis: 95 μm.

由表1可知,本發明的聚醯亞胺脫模薄膜及附有黏著層的積層板的特性,是如實施例1~5所示,在240℃之高溫的熱板加壓後可容易地將聚醯亞胺脫模薄膜剝離,得到表面平坦的絕緣層。 As can be seen from Table 1, the properties of the polyfluorene imide release film and the laminated board with an adhesive layer of the present invention are as shown in Examples 1 to 5, and it can be easily pressed at a high temperature of 240 ° C on a hot plate. The polyimide release film was peeled to obtain an insulating layer having a flat surface.

另一方面,由表2可知,在比較例1中,因為是使用聚醯亞胺薄膜以外的薄膜,因此聚對苯二甲酸乙二酯薄膜熔接 於端板,而可確認到脫模薄膜無法容易地單獨剝離,無法得到表面狀態良好的絕緣層。進一步,在比較例2中,聚醯亞胺薄膜破裂,而可確認到無法將聚醯亞胺薄膜單獨剝離。在比較例3中,銅箔破裂,而可確認到無法將銅箔單獨剝離。在比較例4中,若在絕緣層上塗佈Magic Ink,則可觀察到墨水被排斥,而可確認到脫模層成分轉移至絕緣層。 On the other hand, as can be seen from Table 2, in Comparative Example 1, since a film other than a polyimide film was used, the polyethylene terephthalate film was welded. In the end plate, it was confirmed that the release film could not be easily peeled individually, and an insulating layer having a good surface condition could not be obtained. Furthermore, in Comparative Example 2, the polyimide film was cracked, and it was confirmed that the polyimide film could not be separated alone. In Comparative Example 3, the copper foil was cracked, and it was confirmed that the copper foil could not be separated individually. In Comparative Example 4, when Magic Ink was applied to the insulating layer, ink repellency was observed, and it was confirmed that the release layer component was transferred to the insulating layer.

又,實施例1的表面平坦性的觀察結果是如第1圖所示,比較例3的表面平坦性的觀察結果是如第2圖所示,由該等圖式,可確認到使用第1圖的本發明之聚醯亞胺脫模薄膜之絕緣層,其表面較平坦。 In addition, the observation results of the surface flatness of Example 1 are shown in FIG. 1, and the observation results of the surface flatness of Comparative Example 3 are shown in FIG. 2. From these drawings, it can be confirmed that the use of the first The insulating layer of the polyimide release film of the present invention has a flat surface.

[產業上的可利用性] [Industrial availability]

本發明之聚醯亞胺脫模薄膜,在以使用熱板加壓、輥層合機、雙加壓機等之成形方法來製造多層線路板時,可有效地作為脫模薄膜來利用。 The polyimide release film of the present invention can be effectively used as a release film when a multilayer wiring board is manufactured by a forming method using a hot plate press, a roll laminator, a double press, or the like.

Claims (10)

一種聚醯亞胺脫模薄膜,其在聚醯亞胺薄膜的至少一方的面上具有脫模層,該脫模層是含有醇酸樹脂(A)及胺基樹脂(B)而成,其中,在前述脫模層的未設置聚醯亞胺薄膜之面上具有黏著層。A polyimide release film having a release layer on at least one side of the polyimide film, the release layer comprising an alkyd resin (A) and an amine-based resin (B), wherein An adhesive layer is provided on the surface of the release layer on which the polyimide film is not provided. 如請求項1所述之聚醯亞胺脫模薄膜,其中,前述脫模層的厚度為0.01~10μm。The polyimide release film according to claim 1, wherein the thickness of the release layer is 0.01 to 10 μm. 如請求項1或2所述之聚醯亞胺脫模薄膜,其中,前述聚醯亞胺薄膜的厚度為10~100μm。The polyimide release film according to claim 1 or 2, wherein the thickness of the polyimide film is 10 to 100 μm. 如請求項1或2所述之聚醯亞胺脫模薄膜,其中,前述聚醯亞胺薄膜的要形成前述脫模層之一側的面的表面粗糙度(Ra)為0.2μm以下。The polyimide release film according to claim 1 or 2, wherein a surface roughness (Ra) of a surface of the polyimide film on one side of the release layer to be formed is 0.2 μm or less. 如請求項1或2所述之聚醯亞胺脫模薄膜,其中,前述醇酸樹脂(A)相對於前述胺基樹脂(B)的比率(A/B),以固體成分質量比計為95/5~10/90。The polyimide release film according to claim 1 or 2, wherein the ratio (A / B) of the alkyd resin (A) to the amine-based resin (B) is calculated as a solid content mass ratio. 95/5 ~ 10/90. 如請求項1所述之聚醯亞胺脫模薄膜,其中,前述黏著層是使用包含環氧樹脂和環氧樹脂硬化劑之樹脂組成物而成。The polyimide release film according to claim 1, wherein the adhesive layer is made of a resin composition containing an epoxy resin and an epoxy resin hardener. 一種配置了附有黏著層的聚醯亞胺脫模薄膜之積層板,是將如請求項1或6所述之聚醯亞胺脫模薄膜的黏著層側,積層並成形於預浸體或絕緣層的至少一方的面上而成。A laminated board provided with a polyimide release film with an adhesive layer is formed by laminating and forming the polyimide release film as described in claim 1 or 6 on a prepreg or The insulating layer is formed on at least one side. 一種積層板,是將如請求項7所述之積層板的聚醯亞胺脫模薄膜剝離而成。A laminated board is obtained by peeling a polyimide release film of the laminated board according to claim 7. 一種配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板,是將如請求項1或6所述之聚醯亞胺脫模薄膜的黏著層側,積層於預浸體或絕緣層的一方的面上,並將預浸體或絕緣層的另一方的面,積層於要被電路加工而成的單層或多層線路板上而成。A single-layer or multi-layer circuit board provided with a polyimide release film with an adhesive layer, which is a layer of a polyimide release film as described in claim 1 or 6 laminated on a pre-impregnated layer. One side of the body or insulating layer, and the other side of the prepreg or the insulating layer are laminated on a single-layer or multi-layer circuit board to be processed by a circuit. 一種多層線路板的製造方法,該方法包含下述步驟:藉由將如請求項1或6所述之聚醯亞胺脫模薄膜積層於單層或多層線路板上,來製造配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板的步驟;由配置了附有黏著層的聚醯亞胺脫模薄膜之單層或多層線路板去除聚醯亞胺脫模薄膜的步驟;及,進行電路加工的步驟。A method for manufacturing a multilayer wiring board, the method comprising the steps of: manufacturing and disposing a laminate by laminating a polyimide release film according to claim 1 or 6 on a single-layer or multilayer wiring board; Step of single-layer or multilayer circuit board of polyimide release film with adhesive layer; removal of polyimide release film by single-layer or multi-layer circuit board equipped with polyimide release film with adhesive layer Steps; and, steps for performing circuit processing.
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