TWI643692B - 電流計式掃描器及鏡單元 - Google Patents

電流計式掃描器及鏡單元 Download PDF

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Publication number
TWI643692B
TWI643692B TW106130458A TW106130458A TWI643692B TW I643692 B TWI643692 B TW I643692B TW 106130458 A TW106130458 A TW 106130458A TW 106130458 A TW106130458 A TW 106130458A TW I643692 B TWI643692 B TW I643692B
Authority
TW
Taiwan
Prior art keywords
hole
lens
bearing
mounting seat
shaft portion
Prior art date
Application number
TW106130458A
Other languages
English (en)
Chinese (zh)
Other versions
TW201825219A (zh
Inventor
髙橋悌史
竹田浩之
森剛
髙橋尚弘
鉾館俊之
Original Assignee
日商三菱電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商三菱電機股份有限公司 filed Critical 日商三菱電機股份有限公司
Publication of TW201825219A publication Critical patent/TW201825219A/zh
Application granted granted Critical
Publication of TWI643692B publication Critical patent/TWI643692B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Processing (AREA)
TW106130458A 2016-09-13 2017-09-06 電流計式掃描器及鏡單元 TWI643692B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2016-178906 2016-09-13
JP2016178906 2016-09-13
PCT/JP2017/030329 WO2018051757A1 (ja) 2016-09-13 2017-08-24 ガルバノスキャナおよびミラーユニット
??PCT/JP2017/030329 2017-08-24

Publications (2)

Publication Number Publication Date
TW201825219A TW201825219A (zh) 2018-07-16
TWI643692B true TWI643692B (zh) 2018-12-11

Family

ID=61619944

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106130458A TWI643692B (zh) 2016-09-13 2017-09-06 電流計式掃描器及鏡單元

Country Status (5)

Country Link
JP (1) JP6664502B2 (ko)
KR (2) KR102312469B1 (ko)
CN (1) CN109690383B (ko)
TW (1) TWI643692B (ko)
WO (1) WO2018051757A1 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11927696B2 (en) 2018-02-21 2024-03-12 Innovusion, Inc. LiDAR systems with fiber optic coupling
WO2019165095A1 (en) 2018-02-23 2019-08-29 Innovusion Ireland Limited Distributed lidar systems
US11909291B2 (en) 2018-06-26 2024-02-20 Mitsumi Electric Co., Ltd. Rotary reciprocating drive actuator with movable element and magnets and rotating mirror
US11422267B1 (en) * 2021-02-18 2022-08-23 Innovusion, Inc. Dual shaft axial flux motor for optical scanners

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004029109A (ja) * 2002-06-21 2004-01-29 Hitachi Via Mechanics Ltd スキャナ装置およびスキャナ装置におけるミラーのねじり振動防止方法
US20070183067A1 (en) * 2003-11-24 2007-08-09 Gsi Group Corporation Mirror mounting structures and methods for scanners employing limited rotation motors
JP2012148324A (ja) * 2011-01-20 2012-08-09 Keyence Corp レーザー加工装置
CN103309032A (zh) * 2012-03-12 2013-09-18 住友重机械工业株式会社 电扫描仪

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH068919U (ja) * 1992-06-30 1994-02-04 松下電器産業株式会社 回転多面鏡駆動装置
JP2565837Y2 (ja) * 1993-09-03 1998-03-25 キヤノン株式会社 光ビーム走査装置
WO2001096816A1 (en) * 2000-06-15 2001-12-20 Scanlab Ag A position detector for a scanning device
JP2002006255A (ja) 2000-06-23 2002-01-09 Hitachi Via Mechanics Ltd スキャナおよびレーザ加工機
CN1279483C (zh) * 2004-08-19 2006-10-11 杜瑞 条码扫描器及其条码扫描方法
CN202736074U (zh) * 2012-08-20 2013-02-13 王清辉 一种条形码扫描器的引擎装置
CN105209958B (zh) * 2014-04-23 2016-08-31 三菱电机株式会社 电扫描器以及激光加工装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004029109A (ja) * 2002-06-21 2004-01-29 Hitachi Via Mechanics Ltd スキャナ装置およびスキャナ装置におけるミラーのねじり振動防止方法
US20070183067A1 (en) * 2003-11-24 2007-08-09 Gsi Group Corporation Mirror mounting structures and methods for scanners employing limited rotation motors
JP2012148324A (ja) * 2011-01-20 2012-08-09 Keyence Corp レーザー加工装置
CN103309032A (zh) * 2012-03-12 2013-09-18 住友重机械工业株式会社 电扫描仪

Also Published As

Publication number Publication date
KR102312469B1 (ko) 2021-10-13
CN109690383A (zh) 2019-04-26
TW201825219A (zh) 2018-07-16
KR20200102537A (ko) 2020-08-31
JP6664502B2 (ja) 2020-03-13
CN109690383B (zh) 2021-07-30
KR20190037309A (ko) 2019-04-05
WO2018051757A1 (ja) 2018-03-22
JPWO2018051757A1 (ja) 2019-02-14

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