TWI643692B - Galvano scanner and mirror unit - Google Patents

Abstract

The galvanometer scanner (1) includes: a lens (2) that reflects and deflects the laser light; a shaft portion (14) that rotates around the rotation axis (6); a mount portion (3) to fix the lens (2 ), And a first hole (3b) for insertion of one end of the shaft (14) is formed and fixed to the shaft (14); the first bearing (12) supports the shaft (14) to be able to rotate The shaft (6) rotates as the center; and the second bearing (13) is provided on the opposite side of the lens (2) with the first bearing (12) therebetween, and supports the shaft portion (14) to be able to rotate the shaft (6) ) Rotates around the center. A mounting seat (3) is fitted inside the inner ring (12a) of the first bearing (12).

Description

   Galvanometer scanner and mirror unit   

The invention relates to a galvanometer scanner and a mirror unit for laser scanning by changing the angle of the lens by a motor.

In the conventional technology, for laser drilling, a galvano scanner (Galvano scanner) is used for laser scanning. As shown in Patent Document 1, an galvanometer scanner includes a lens also called an galvanometer lens and a motor that rotates the lens.

The lens is then attached to a mirror mount. The lens mount is detachably fixed to the shaft part belonging to the motor shaft using a fixing member and a fixing screw. That is, the lens is fixed to the shaft of the motor by the lens mount. Furthermore, the motor has a bearing that rotatably supports the shaft. The bearing rotatably supports the shaft portion at a distance from the lens mount.

The lens can be driven in rotation by being fixed to the shaft of the motor. By rotating the drive, the angle of the lens is changed, thereby changing the reflection angle of the laser light. By changing the reflection angle of the laser light, the laser light is scanned.

Prior technical literature Patent Literature

[Patent Document 1] Japanese Patent Application Publication No. 2002-6255

In the galvanometer scanner configured as above, when the center of gravity of the lens and the center of the lens mount deviate from the rotation axis of the shaft portion, the lens may vibrate in a direction perpendicular to the rotation axis of the shaft portion, resulting in a so-called The situation of surface toppling vibration. When the amplitude of the surface toppling vibration increases, the scanning accuracy of the laser light will decrease.

The surface tilting vibration system is a vibration generated by using a bearing supporting the shaft portion as a fulcrum at a position closest to the lens. Therefore, the greater the distance from the bearing supporting the shaft portion to the tip of the lens, the easier the amplitude of the surface tilt vibration increases. In addition, the heavier the portion of the portion closer to the lens side than the bearing that is not directly supported by the bearing, the easier the amplitude of the surface tilt vibration increases. In addition, in the galvanometer scanner configured as described above, the portion that is not directly supported by the bearing among the portion closer to the lens side than the bearing includes a lens mount and a lens.

The present invention was developed in view of the above circumstances, and its object is to obtain an galvanometer scanner that can suppress the amplitude of the surface tilting vibration.

In order to solve the above-mentioned problems and achieve the objective, the galvanometer scanner of the present invention includes: a lens that reflects and deflects the laser light; a shaft portion that rotates around the rotation axis; The first hole into which one end of the shaft is inserted and fixed to the shaft; the first bearing supports the shaft so that it can rotate around the rotating shaft; and the second bearing is located opposite the lens with the first bearing Side, and the shaft is supported so as to be rotatable about the rotation axis. The mounting seat is fitted inside the inner ring of the first bearing.

According to the galvanometer scanner of the present invention, the effect of suppressing the amplitude of the surface toppling vibration can be achieved.

1, 50, 52, 60, 100 ‧‧‧ galvanometer scanner

2, 102‧‧‧ lens

3.103‧‧‧Install seat

3a‧‧‧Ditch 1

3b, 3f, 14c‧‧‧ hole

3c‧‧‧Ditch 2

3d‧‧‧ one end

3e‧‧‧The other end

5, 105‧‧‧ motor

6‧‧‧rotation axis

7‧‧‧ opening

11‧‧‧Frame

12‧‧‧First bearing

12a, 13a‧‧‧Inner ring

12b, 13b ‧‧‧ steel ball

12c, 13c‧‧‧Outer ring

13‧‧‧ 2nd bearing

14, 114‧‧‧Shaft

14a‧‧‧One end

14b‧‧‧The other end

15, 105‧‧‧ magnet

16‧‧‧coil

17‧‧‧Angle sensor

17a‧‧‧coding disk

17b‧‧‧Encoder head

17c‧‧‧Encoder cover

18‧‧‧ cover

20, 120‧‧‧ Fixture

21, 55‧‧‧ screw

40‧‧‧Through member

40a‧‧‧The first component

40b‧‧‧The second component

40c‧‧‧Through hole

40d‧‧‧screw hole

41‧‧‧Through port

51‧‧‧Wire

51a‧‧‧ Stranding Department

56‧‧‧Nut

112‧‧‧bearing

L1‧‧‧Distance

L2‧‧‧Distance

Fig. 1 is a front view showing the appearance of the galvanometer scanner according to Embodiment 1 of the present invention.

Fig. 2 is a plan view showing the appearance of the galvanometer scanner of the first embodiment.

FIG. 3 is a cross-sectional view taken along the line III-III shown in FIG. 2.

FIG. 4 is a cross-sectional view taken along the line IV-IV shown in FIG. 1.

Fig. 5 is a front view of the mounting base of the first embodiment.

Fig. 6 is a plan view of the mounting base of the first embodiment.

Fig. 7 is a side view of the mounting base of the first embodiment.

Fig. 8 is a front view of the fixture of the first embodiment.

Fig. 9 is a plan view of the fixture of the first embodiment.

Fig. 10 is a side view of the fixture of the first embodiment.

Fig. 11 is a cross-sectional view of an ammeter scanner disclosed as a comparative example.

Fig. 12 is an explanatory diagram of the procedure of assembling the lens in the motor of the first embodiment.

Fig. 13 is an explanatory diagram of the procedure of assembling the lens in the motor of the first embodiment.

Fig. 14 is an explanatory diagram of the procedure of assembling the lens in the motor of the first embodiment.

Fig. 15 is an explanatory diagram of the procedure of assembling the lens in the motor of the first embodiment.

Fig. 16 is an explanatory diagram of the procedure of assembling the lens in the motor of the first embodiment.

Fig. 17 is an explanatory diagram of the procedure of assembling the lens in the motor of the first embodiment.

Fig. 18 is a plan view showing the appearance of the galvanometer scanner according to Embodiment 2 of the present invention.

FIG. 19 is a cross-sectional view taken along the line XIX-XIX shown in FIG. 18.

FIG. 20 is a cross-sectional view taken along the line XX-XX shown in FIG. 19.

FIG. 21 is a cross-sectional view of the galvanometer scanner according to Embodiment 3 of the present invention, and corresponds to FIG. 3.

FIG. 22 is a cross-sectional view taken along the line XXII-XXII of FIG. 21.

Fig. 23 is a front view of the mounting base of the third embodiment.

Fig. 24 is a plan view of the mounting base of the third embodiment.

Fig. 25 is a side view of the mounting base of the third embodiment.

Fig. 26 is a cross-sectional view of an ammeter scanner according to Embodiment 4 of the present invention, and corresponds to Fig. 3.

FIG. 27 is a cross-sectional view taken along line XXVII-XXVII of FIG. 26. FIG.

Fig. 28 is a front view of the mounting base of the fourth embodiment.

Fig. 29 is a plan view of the mounting base of the fourth embodiment.

Fig. 30 is a side view of the mounting base of the fourth embodiment.

    [Embodiment of the invention]    

Hereinafter, the galvanometer scanner and mirror unit according to the embodiment of the present invention will be described in detail based on the drawings. In addition, the present invention is not limited by this embodiment.

    [Embodiment 1]    

Fig. 1 is a front view showing the appearance of the galvanometer scanner according to Embodiment 1 of the present invention. Fig. 2 is a plan view showing the appearance of the galvanometer scanner of the first embodiment. FIG. 3 is a cross-sectional view taken along the line III-III shown in FIG. 2. FIG. 4 is a cross-sectional view taken along the line IV-IV shown in FIG. 1. The galvanometer scanner 1 includes a lens 2 that reflects laser light, and a motor 5 that rotates and drives the lens 2. In the following description, regarding the motor 5, the side where the lens 2 is provided is referred to as the load side, and the opposite side is referred to as the counter-load side.

The lens 2 shown in FIG. 1 is an example of an elliptical reflection surface for reflecting laser light. In the case of reflecting the CO ₂ laser, an ellipse with a long diameter of 30 mm to 60 mm is generally used. In addition, the shape of the reflecting surface of the lens 2 is not limited to an ellipse, and various shapes such as a quadrangular shape or an octagonal shape may be used.

The mounting base 3, also known as the lens mounting base, is attached to the lens 2. Fig. 5 is a front view of the mounting base 3 of the first embodiment. Fig. 6 is a plan view of the mounting base 3 of the first embodiment. Fig. 7 is a side view of the mounting base 3 of the first embodiment. A first groove 3 a into which the outer edge of the lens 2 is fitted is formed at one end 3 d of the mounting base 3. The other end portion 3e of the mounting seat portion 3 is formed with a hole 3b as a first hole into which a shaft portion of a motor 5 described later is inserted. In addition, a plurality of second grooves 3c are formed on the wall surface surrounding the hole 3b from the other end portion 3e side in a direction parallel to the rotation axis of the shaft portion of the motor 5 to be described later, so that it can be configured by external force The inner diameter of the hole 3b is reduced and deformed. As shown in FIGS. 2 and 4, the lens 2 is inserted into and adhered to the first groove 3 a of the mounting seat 3.

Next, the motor 5 will be described. As shown in FIGS. 3 and 4, the motor 5 includes a frame 11 which is a cylindrical motor frame. A shaft portion 14 as a shaft is housed inside the frame 11. The shaft portion 14 is formed in a cylindrical shape, and the central axis of the shaft portion 14 is accommodated in the frame 11 in a state that coincides with the rotation shaft 6. In the frame 11, the end surface of the frame 11 on the load side is sealed by an annular cover 18.

At one end portion 14 a of the shaft portion 14 on the load side, the mounting seat portion 3 is installed. Specifically, by inserting one end portion 14a of the shaft portion 14 into the hole 3b formed in the other end portion 3e of the mounting seat portion 3, the mounting seat portion 3 is mounted on the shaft portion 14. The mounting base 3 is fixed to the shaft 14 using a fixture 20. Fig. 8 is a front view of the fixture 20 of the first embodiment. Fig. 9 is a plan view of the fixture 20 of the first embodiment. Fig. 10 is a side view of the fixture 20 of the first embodiment.

The fixture 20 has a penetration member 40 formed with a penetration hole 41 through which the other end portion 3e side of the mounting seat portion 3 is formed, and a screw 21 to reduce the area of the penetration hole 41. The penetrating member 40 includes a first member 40a and a second member 40b having an arc surface, and a through hole 41 is formed between the first member 40a and the second member 40b by facing the arc surfaces to each other.

The first member 40a and the second member 40b are formed with a through hole 40c through which the screw 21 penetrates; By screwing the screw 21 that has penetrated the through hole 40c into the screw hole 40d, the first member 40a and the second member 40b can be brought close to reduce the area of the through hole 41.

The fixture 20 is in a state where the other end portion 3e side of the mounting portion 3 into which the shaft portion 14 has been inserted into the hole 3b is inserted into the through hole 41, and the area of the through hole 41 is reduced by locking the screw 21 in, To lock the mounting seat 3. Since the second groove 3c is formed on the other end 3e side of the mount 3, the area of the through hole 41 is reduced, and the portion on the other end 3e side of the mount 3 will be deformed to make the hole 3b The cross-sectional area has also been reduced. As a result, the wall surface of the hole 3b is in close contact with the shaft portion 14 and the mounting seat portion 3 is fixed to the shaft portion 14. The portion that becomes the other end 3e side of the mount portion 3 and the portion that becomes one end 14a side of the shaft portion 14 pass through the opening of the annular cover 18 that closes the load side of the frame 11.

The fixture 20 is housed inside the frame 11. An opening 7 is formed in the frame 11, and the opening 7 is set so that the screw 21 of the fixture 20 can be operated from outside the frame 11. The screw 21 can be screwed in or loosened by inserting a screwdriver or other tool into the inside of the frame 11 through the opening 7 formed on the side of the frame 11. In addition, a cover for closing the opening 7 may be provided. In addition, as long as the opening 7 is formed at a position where the screw 21 can be operated, a plurality of openings may be formed.

A magnet 15 as a rotor is fixed around the shaft portion 14. The magnet 15 is also housed inside the frame 11 like the shaft portion 14. A coil 16 as a stator is provided around the magnet 15. A gap is provided between the coil 16 and the magnet 15. The coil 16 is also housed inside the frame 11.

Inside the frame 11 are provided a first bearing 12 and a second bearing 13 that support the shaft portion 14 so as to be rotatable about the rotating shaft 6. The shaft portion 14 has a cylindrical shape, and in a state supported by the first bearing 12 and the second bearing 13, the central shaft system of the shaft portion 14 coincides with the rotating shaft 6. By the rotation of the shaft portion 14, the mount portion 3 and the lens 2 fixed to the shaft portion 14 also rotate about the rotation shaft 6.

The first bearing 12 is provided closer to the load side than the magnet 15, and the second bearing 13 is provided closer to the counter load side than the magnet. That is, the first bearing 12 and the second bearing 13 are provided so as to face each other so as to sandwich the magnet 15 as a rotor. It can also be said that the second bearing 13 is provided on the opposite side of the lens 2 with the first bearing 12 interposed therebetween.

The first bearing 12 includes an inner ring 12a, a steel ball 12b, and an outer ring 12c. The outer ring 12c of the first bearing 12 is in contact with the inner surface of the frame 11. The inner ring 12a of the first bearing 12 is fixed to the mounting seat 3 on the load side of the fixture 20. That is, the first bearing 12 supports the shaft portion 14 through the mount portion 3. The cover 18 described above has a function of preloading the first bearing 12 in the direction of the rotating shaft 6 with a spring (not shown) sandwiched from the load side.

The second bearing 13 includes an inner ring 13a, a steel ball 13b, and an outer ring 13c. The outer ring 13c of the second bearing 13 is in contact with the inner surface of the frame 11 and is fixed to the frame 11. The inner ring 13a of the second bearing 13 is fixed to the shaft portion 14 on the counter-load side of the magnet 15. That is, the second bearing 13 directly supports the shaft portion 14.

An angle sensor 17 for detecting the rotation angle of the shaft portion 14 is installed on the anti-load side of the frame 11. The angle sensor 17 may be, for example, a rotary encoder, which is configured to include: an encoder disk 17a fixed to the other end portion 14b of the shaft portion 14; an encoder head 17b fixed to the frame 11; and a cover The encoder cover 17c of these components.

In the galvanometer scanner 1 described above, by passing current to the coil 16 of the motor 5, a rotational torque is applied to the magnet 15 by electromagnetic force to rotate the shaft portion 14. The rotation of the shaft 14 can rotate the lens 2 to change the angle of the reflecting surface of the lens 2. In this way, the laser light can be scanned by changing the reflection angle of the laser light reflected by the reflection surface.

FIG. 11 is a cross-sectional view of an ammeter scanner 100 disclosed as a comparative example. In the galvanometer scanner 100 disclosed as a comparative example, inside the motor 105, a bearing 112 provided on the load side of the magnet 115 directly supports the shaft portion 114. Further, the mounting seat 103 on which the lens 102 is mounted is fixed to the shaft portion 114 on the load side of the bearing 112. In addition, the fixture 120 that fixes the mounting seat portion 103 to the shaft portion 114 is also provided closer to the load side than the bearing 112.

The distance L2 from the bearing 112 to the front end on the load side of the galvanometer scanner 100 disclosed as such a comparative example is compared to the galvanometer scanner 1 of the first embodiment shown in FIG. 4 The distance L1 from the first bearing 12 to the front end on the load side of the lens 2 is longer. Furthermore, the galvano-scanner 1 of the first embodiment can achieve an increase in the suppression of surface toppling vibration more than the galvano-scanner 100 disclosed as a comparative example.

In addition, in the galvanometer scanner 100 disclosed as a comparative example, a portion of the portion closer to the load side than the bearing 112 that is not directly supported by the bearing 112 includes the mounting seat portion 103. On the other hand, in the galvano-scanner 1 of the first embodiment, the portion that is not directly supported by the first bearing 12 in the portion closer to the load side than the first bearing 12 does not include the mounting seat 3. Therefore, the weight of the portion not directly supported by the first bearing 12 in the portion closer to the load side than the first bearing 12 can be made lighter than the galvanometer scanner 100 disclosed as a comparative example. With this, it is possible to further suppress the amplitude of the surface toppling vibration.

Next, the procedure for assembling the lens 2 to the motor 5 will be described. FIGS. 12 to 17 are explanatory diagrams about the procedure of assembling the lens 2 in the motor 5 of the first embodiment. First, as shown in FIG. 12, the cover 18 and the first bearing 12 are removed from the frame 11 of the motor 5.

Next, as shown in FIG. 13, the lens 2 is inserted into the first groove 3a of the mount 3, and the lens 2 is fixed to the mount 3 with an adhesive or the like. Next, as shown in FIG. 14, the mount portion 3 is inserted into the cover 18. Next, as shown in FIG. 15, the mount portion 3 is inserted into the first bearing 12. Next, as shown in FIG. 16, the mounting seat 3 is inserted into the through hole 40 c of the fixture 20. At this time, as shown in FIG. 8, the fixture 20 is in a state where the first member 40 a and the second member 40 b are assembled with screws 21 in advance. Furthermore, the screwing of the screw 21 is adjusted so that the through-hole 40c has a size into which the mounting seat 3 can be inserted.

Next, with respect to the motor 5 with the first bearing 12 and the cover 18 removed as shown in FIG. 12, one end 14 a (see FIG. 3 etc.) of the shaft portion 14 of the motor 5 is inserted into the mounting seat 3 The hole 3b of FIG. 16 is attached to the frame 11 while assembling the lens 2, the mount 3, the cover 18, the first bearing 12, and the fixture 20 as shown in FIG. At this time, the first bearing 12 is fitted inside the frame 11. Furthermore, the cover 18 is fixed to the frame 11 with screws (not shown). Next, the mounting part 3 is fixed to the shaft part 14 through the screw 21 formed in the opening 7 of the frame 11 to lock the fixture 20. FIG. 17 is an external view of the galvano scanner 1 when the fixing of the mounting base 3 is completed.

In addition, since the screw 21 of the fixture 20 can be loosened through the opening 7 formed in the frame 11 to thereby remove the mounting seat 3 from the shaft portion 14, when the lens 2 is damaged, the lens 2 and the mounting seat can be removed 3 Remove together to replace lens 2.

In addition, if a member composed of the lens 2, the mounting seat 3, the cover 18, and the first bearing 12 shown in FIG. 15 or the lens 2, the mounting seat 3 shown in FIG. 16 are prepared in advance, The assembly of the cover 18, the first bearing 12 and the fixture 20 as a mirror unit can omit the operation of inserting the first bearing 12 into the mount 3 when the lens 2 is replaced, so the lens 2 can be sought Easy replacement work.

In addition, as long as the fixture 20 can be operated through the opening 7 formed in the frame 11, the mounting seat portion 3 can be fixed to the shaft portion 14. For example, the penetration member 40 of the fixture 20 may not be composed of two members, but may be composed of one or more than three members. In addition, although the galvanometer scanner 1 of the first embodiment is described with respect to a moving magnet type motor 5, it may be a moving coil type motor, which may be a moving coil type motor. The motor 5 system fixes the magnet 15 to the shaft portion 14 and the coil 16 to the frame 11, and allows current to flow through the coil 16 to thereby rotate the shaft portion 14. The movable coil type motor system fixes the coil to the shaft portion 14 The magnet is fixed to the frame 11 and a current flows through the coil to thereby rotate the shaft 14. In addition, although the mounting seat portion 3 is described with respect to a structure having two grooves of the first groove 3a and the second groove 3c, it may be a structure having three or more grooves.

    [Embodiment 2]    

FIG. 18 is a plan view showing the appearance of an galvano scanner 50 according to Embodiment 2 of the present invention. Regarding the same configuration as that of the first embodiment described above, the same reference numerals are given and detailed descriptions thereof are omitted. In the first embodiment described above, the screw 21 of the fixture 20 is locked to reduce the cross-sectional area of the hole 3b of the mounting seat 3, thereby fixing the mounting seat 3 to the shaft portion 14. In the example shown in the second embodiment, the fixing tool for fixing the mounting portion 3 to the shaft portion 14 uses a wire 51 instead of the fixing tool 20. The wire 51 is wound around the wall surface surrounding the hole 3b of the mounting seat portion 3, and tightens the wall surface of the mounting seat portion 3, thereby reducing the cross-sectional area of the hole 3b of the mounting seat portion 3, and the mounting seat portion 3 固定 到 轴 部 14。 3 fixed to the shaft 14.

The front view of the galvano-scanner 50 of the second embodiment is the same as the front view of the galvano-scanner 1 of the first embodiment shown in FIG. 1, so it is omitted. As shown in FIG. 18, in the galvanometer scanner 50 of the second embodiment and the galvanometer scanner 1 of the first embodiment shown in FIG. 2, the position of the opening 7 is different.

FIG. 19 is a cross-sectional view of the galvano scanner 50 taken along the line XIX-XIX shown in FIG. 18. FIG. 20 is a cross-sectional view taken along line XX-XX shown in FIG. 19.

The wire 51 is wound around the wall surface surrounding the hole 3 b of the mounting seat 3 so as to cover the second groove 3 c of the mounting seat 3. The wire 51 tightens the wall surface around the hole 3b in a direction orthogonal to the rotation shaft 6, thereby reducing the cross-sectional area of the hole 3b, and fixing the mounting portion 3 to the shaft portion 14 of the inserted hole 3b.

In addition, as shown in FIGS. 18 and 19, by twisting the end portion of the wire 51 that starts winding and the end portion that ends the winding, the wall surface surrounding the hole 3b can be bundled by the wire 51 tight. A portion where the wire 51 is twisted is formed as a twisted portion 51a.

By inserting tools such as needle-nose pliers from the opening 7 of the frame 11 and rotating the twisted portion 51a, the force by which the wire 51 tightens the mounting portion 3 can be adjusted. That is, the opening 7 is formed at a position where the twisted portion 51a can be operated through the opening 7. After adjusting the force for tightening the mounting portion 3, by inserting a cutter or the like through the opening 7, the stranded portion 51a is cut to an appropriate length to prevent interference with other members. Furthermore, by fixing the stranded portion 51a with an adhesive, the stranded portion 51a can be prevented from loosening.

In addition, when the mounting seat 3 is detached from the shaft 14, the tool can be inserted into the opening 7 through the opening 7 formed in the frame 11 and the twisted portion 51 a is cut to thereby remove the mounting seat 3. 2 In the case of damage, the lens 2 and the mounting base 3 can be removed together to replace the lens 2, so that an galvanometer scanner capable of replacing the lens 2 and at the same time seeking to suppress the amplitude of the surface tilting vibration can be obtained.

In addition, as in the first embodiment described above, if the lens 2, the mount 3, the cover 18, the first bearing 12, and the wire 51 as a fixture are assembled as a mirror unit, the lens 2 is replaced. In this case, the operation of inserting the first bearing 12 into the mount 3 can be omitted, so that the replacement operation of the lens 2 can be facilitated. In addition, although the material of the wire 51 is usually metal, carbon fiber or synthetic fiber exemplified by nylon may be used.

    [Embodiment 3]    

FIG. 21 is a cross-sectional view of the galvanometer scanner according to Embodiment 3 of the present invention, and corresponds to FIG. 3. FIG. 22 is a cross-sectional view taken along the line XXII-XXII of FIG. 21. In addition, the same configurations as those in the above-mentioned Embodiments 1 and 2 are given the same symbols and their detailed descriptions are omitted.

The galvanometer scanner 52 of the third embodiment uses screws 55 to fix the mounting portion 3 to the shaft portion 14 instead of the fixture 20 used in the galvanometer scanner 1 of the first embodiment. Specifically, a hole 14c as a second hole is formed in the shaft portion 14 along a direction orthogonal to the rotating shaft 6. Moreover, in the mounting seat 3, a hole 3f as a third hole is formed in a wall surface surrounding the periphery of the hole 3b. In a state where the shaft portion 14 is inserted into the hole 3b of the mounting seat portion 3, the hole 14c communicates with the hole 3f. The screw 55 is inserted into the communicating hole 14 c and the hole 3 f, and the nut 56 is screwed into the screw 55 that has penetrated, thereby fixing the mounting seat portion 3 to the shaft portion 14. That is, in the galvanometer scanner 52 of the third embodiment, the fixture system includes the screw 55 and the nut 56.

In the galvanometer scanner 52 of the third embodiment, an opening 7 is formed in the wall 11 of the frame 11 at a position facing the sandwiching rotation shaft 6. That is, two openings 7 are formed in the frame 11. In addition, a hole 14 c is formed in the shaft portion 14 along a direction orthogonal to the rotation axis 6 of the shaft portion 14. The galvano-scanner 52 of the third embodiment is the same as the galvano-scanner 1 of the first embodiment except for the number of openings 7, so its illustration is omitted.

Fig. 23 is a front view of the mounting base of the third embodiment. Fig. 24 is a plan view of the mounting base of the third embodiment. Fig. 25 is a side view of the mounting base 3 of the third embodiment. In the mounting seat portion 3, a hole 3f is formed in a wall surface surrounding the periphery of the hole 3b at a position facing the sandwiching rotation shaft 6. That is, two holes 3f are formed in the wall surface surrounding the periphery of the hole 3b. The hole 3f of the mounting seat 3 is formed with a diameter that allows the screw 55 to be inserted into the wall surface surrounding the periphery of the hole 3b. As shown in FIG. 21, the hole 3f is formed at a position between the first bearing 12 and the magnet 15 when the mount portion 3 is inserted into the shaft portion 14.

In addition, as shown in FIG. 21, the screw 55 penetrates the hole 14 c of the shaft portion 14 and the two holes 3 f of the mounting seat portion 3. A nut 56 is fitted into the front end of the screw 55 that has penetrated. The force for tightening the mounting portion 3 and the shaft portion 14 in the direction orthogonal to the rotating shaft 6 is generated by rotating the screw 55 and screwing into the nut 56. By rotating the screw 55, the distance between the head of the screw 55 and the nut 56 is shortened, and the wall surface around the periphery of the hole 3b is deformed, so that the inner diameter of the hole 3b of the mounting seat 3 is reduced. By deforming the wall surface surrounding the periphery of the hole 3b, the mounting seat portion 3 and the shaft portion 14 are fixed. That is, in the third embodiment, the fixture corresponding to the fixture 20 of the first embodiment is a screw 55.

In addition, regarding the screw 55, after inserting the shaft portion 14 into the hole 3b of the mounting seat portion 3 and aligning the hole 3f of the mounting seat portion 3 with the hole 14c of the shaft portion 14, a tool such as a pincette is used It is inserted through the opening 7 formed in the frame 11 and penetrates the hole 3f and the hole 14c. Next, the nut 56 is fitted to the front end portion of the screw 55 from the opening 7 formed on the side opposite to the opening 7 into which the screw 55 has been inserted using pliers or the like, and the screw 55 is clamped with the nut 56 Hold hole 3f and hole 14c. Then, a screwdriver or the like inserted through the opening 7 is used to rotate the screw 55 to fix the mount portion 3 and the shaft portion 14.

Furthermore, when the mounting base 3 is detached from the shaft 14, the screw 55 can be loosened and pulled out through the opening 7 formed in the frame 11 to thereby detach the mounting base 3, so the lens 2 is damaged At this time, the lens 2 and the mounting base 3 can be removed together to replace the lens 2. In addition, instead of the nut 56, the hole 14c of the shaft portion 14 may be regarded as a screw hole into which the screw 55 is screwed (that is, a hole formed with a screw thread), by which the screw 55 may be screwed into the hole 14c The inner diameter of the hole 3b of the mount portion 3 is reduced and deformed. In this case, the frame 7 may not be formed with the opening 7 into which the nut 56 is inserted.

In this way, by mounting the hole 14c formed in the shaft portion 14 and the hole 3f formed in the mounting seat portion 3 and inserting the screw 55 into the hole 14c and the hole 3f, the mounting seat portion 3 and the shaft portion 14 can be simply fixed. Thereby, a galvanometer scanner that can exchange the lens 2 and can suppress the amplitude of the surface tilting vibration can be obtained.

In addition, as in the first embodiment described above, if a member composed of the lens 2, the mount 3, the cover 18, and the first bearing 12 is prepared in advance as a mirror unit, the lens 2 can be replaced when the lens 2 is replaced. 1 The operation of inserting the bearing 12 into the mounting base 3 is omitted, so that the replacement operation of the lens 2 can be facilitated.

    [Embodiment 4]    

Fig. 26 is a cross-sectional view of an ammeter scanner according to Embodiment 4 of the present invention, and corresponds to Fig. 3. FIG. 27 is a cross-sectional view taken along line XXVII-XXVII of FIG. 26. FIG. In addition, the same configurations as those in the above-mentioned Embodiments 1, 2, and 3 are given the same symbols and their detailed descriptions are omitted. The galvanometer scanner 60 of the fourth embodiment does not use fixtures such as the fixture 20 of the first embodiment, the wire 51 of the second embodiment, and the screw 55 of the third embodiment to fix the mounting base 3 and the shaft 14 . The galvano-scanner 60 of the fourth embodiment is the same as the galvano-scanner 1 of the first embodiment except that the opening 7 is not formed in the frame 11, so the illustration is omitted.

Fig. 28 is a front view of the mounting base of the fourth embodiment. Fig. 29 is a plan view of the mounting base of the fourth embodiment. Fig. 30 is a side view of the mounting base of the fourth embodiment. Compared to the mounting seat 3 of the first, second, and third embodiments, the mounting seat 3 of the fourth embodiment is different in that the second groove 3c is not formed.

Furthermore, in the galvanometer scanner 60 of the fourth embodiment, instead of using a fixture, an adhesive agent inserted into the hole 3b of the mounting base 3 is used to bond the mounting base 3 and the shaft 14 by This fixes the seat portion 3 and the shaft portion 14.

Since the mounting seat portion 3 and the shaft portion 14 are adhered by an adhesive, although they cannot be removed after the attachment, the mounting seat portion 3 can be simply fixed to the shaft portion 14 without a fixture. Moreover, the structure can be simplified by not using a fixture. By simplifying the structure, the inertia of the shaft portion 14 can also be reduced.

In addition, the method of fixing the mounting seat portion 3 and the shaft portion 14 without using a fixing tool is not limited to bonding using an adhesive. For example, it is also possible to fix the mounting portion 3 and the shaft portion 14 with a shrink fit.

In this way, by fixing the mounting seat portion 3 and the shaft portion 14 without using a fixing tool, it is possible to simplify the fixing operation and to suppress the amplitude of the surface tilting vibration.

In addition, as in the first embodiment described above, if the lens 2, the mounting seat 3, the cover 18, and the first bearing 12 are assembled in advance and the mounting seat 3 and the shaft portion 14 are not fixed using a fixture, As the mirror unit, the operation of inserting the first bearing 12 into the mounting seat 3 and the like can be omitted when the lens 2 is replaced, so that the replacement work of the lens 2 can be facilitated.

The configuration disclosed in the above embodiment is an example showing the content of the present invention, and may be combined with other known technologies, or a part of the configuration may be omitted or changed without departing from the gist of the present invention.

Claims (7)

An galvanometer scanner includes: a lens that reflects and deflects laser light; a shaft portion that rotates about a rotation axis; a mounting portion that fixes the lens and is formed with one end of the shaft portion to be inserted The first hole is fixed to the shaft portion; the first bearing supports the shaft portion to be rotatable about the rotating shaft; and the second bearing is provided on the opposite side of the lens with the first bearing interposed therebetween, And the shaft portion is supported so as to be rotatable around the rotation shaft; and the mounting seat portion is embedded inside the inner ring of the first bearing; and further provided between the first bearing and the second bearing The mounting seat portion is fixed to the fixture of the shaft portion. The galvanometer scanner as described in item 1 of the scope of the patent application further includes a frame that houses the fixture inside; the fixture has: a penetrating member formed with a penetrating hole through which the mount portion penetrates; and a screw To reduce the area of the through hole of the through member; and the frame is formed with an opening for operating the screw. The galvanometer scanner according to item 1 of the patent application scope further includes a frame that houses the fixture inside; the fixture has a wire wound around the mounting seat portion; and an opening is formed in the frame, the The opening is a twisted portion provided by twisting the end of the aforementioned wire for convenient operation. The galvanometer scanner as described in item 1 of the patent application further includes a frame that houses the fixture inside; a second hole is formed in the shaft portion; a third hole is formed in the mounting seat portion; A state where the one end portion of the shaft portion is inserted into the first hole of the mounting seat portion, the second hole communicates with the third hole system; the fixture has a hole penetrating the second hole and the third hole Screws; and the frame is formed with openings for operating the screws. A mirror unit is characterized by comprising: a lens; a mounting seat fixed to the lens; and a bearing, the mounting seat is embedded inside the inner ring; and further provided on the opposite side of the lens with the bearing interposed therebetween Fixtures. According to the mirror unit described in Item 5 of the patent application range, the fixing device includes: a through member formed with a through hole through which the mounting portion penetrates; and a screw to reduce the area of the through hole of the through member. As in the mirror unit described in item 5 of the patent application scope, the fixture has a wire wound around the mounting seat.