TWI642970B - 光學裝置、加工裝置及物品製造方法 - Google Patents

光學裝置、加工裝置及物品製造方法 Download PDF

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Publication number
TWI642970B
TWI642970B TW106127414A TW106127414A TWI642970B TW I642970 B TWI642970 B TW I642970B TW 106127414 A TW106127414 A TW 106127414A TW 106127414 A TW106127414 A TW 106127414A TW I642970 B TWI642970 B TW I642970B
Authority
TW
Taiwan
Prior art keywords
light
incident
optical device
optical
reflected
Prior art date
Application number
TW106127414A
Other languages
English (en)
Chinese (zh)
Other versions
TW201807454A (zh
Inventor
久米政治
宏
Original Assignee
日商佳能股份有限公司
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Publication of TW201807454A publication Critical patent/TW201807454A/zh
Application granted granted Critical
Publication of TWI642970B publication Critical patent/TWI642970B/zh

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0019—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having reflective surfaces only (e.g. louvre systems, systems with multiple planar reflectors)
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/18—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical projection, e.g. combination of mirror and condenser and objective
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30—Collimators
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/70108—Off-axis setting using a light-guiding element, e.g. diffractive optical elements [DOEs] or light guides

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mechanical Optical Scanning Systems (AREA)
TW106127414A 2016-08-30 2017-08-14 光學裝置、加工裝置及物品製造方法 TWI642970B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016168612A JP6851751B2 (ja) 2016-08-30 2016-08-30 光学装置、加工装置、および物品製造方法
JP2016-168612 2016-08-30

Publications (2)

Publication Number Publication Date
TW201807454A TW201807454A (zh) 2018-03-01
TWI642970B true TWI642970B (zh) 2018-12-01

Family

ID=59738183

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106127414A TWI642970B (zh) 2016-08-30 2017-08-14 光學裝置、加工裝置及物品製造方法

Country Status (6)

Country Link
US (1) US10845589B2 (https=)
EP (1) EP3290982B1 (https=)
JP (1) JP6851751B2 (https=)
KR (1) KR102165511B1 (https=)
CN (1) CN107797270B (https=)
TW (1) TWI642970B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7274989B2 (ja) * 2019-09-05 2023-05-17 株式会社ディスコ 光軸調整ジグおよびレーザー加工装置の光軸確認方法
JP7278178B2 (ja) * 2019-09-05 2023-05-19 株式会社ディスコ レーザー加工装置の光軸確認方法
CN110824684B (zh) * 2019-10-28 2020-10-30 华中科技大学 一种高速立体三维多模态成像系统和方法
US11662562B2 (en) * 2020-02-09 2023-05-30 Kla Corporation Broadband illumination tuning
EP4144473A4 (en) * 2020-04-30 2024-04-24 Nikon Corporation Processing system
JP7501104B2 (ja) * 2020-05-22 2024-06-18 富士フイルムビジネスイノベーション株式会社 読取装置、出力装置及び画像形成装置
EP4550020A1 (en) * 2023-11-03 2025-05-07 Confocal.nl B.V. Re-scan optical system

Citations (6)

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US6067127A (en) * 1997-07-08 2000-05-23 Sony Corporation Method and apparatus for reducing the rotation rate of mirrors in a high resolution digital projection display
TW200633807A (en) * 2005-03-31 2006-10-01 Hitachi Via Mechanics Ltd Laser machining apparatus
TW200711773A (en) * 2005-06-17 2007-04-01 Olympus Corp Laser beam machining method and apparatus
TW201206603A (en) * 2010-07-20 2012-02-16 Disco Corp Optical device and laser beam machining apparatus having optical device
TWI420146B (zh) * 2008-05-22 2013-12-21 Canon Kk 光束掃描裝置、雷射加工裝置、測試方法及雷射加工方法
TW201617684A (zh) * 2014-11-13 2016-05-16 佳能股份有限公司 光學裝置、處理裝置及物品製造方法

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DE3530189A1 (de) * 1985-08-23 1987-03-05 Zeiss Carl Fa Einrichtung zur lagekorrektur eines ueber eine gelenkoptik gefuehrten laserstrahls
US4840483A (en) * 1987-12-18 1989-06-20 Cincinnati Milacron Inc. Alignment tool for laser beam delivery systems and method of alignment
JPH0518815A (ja) * 1991-07-10 1993-01-26 Nec Corp レーザビーム位置補正装置
US5923418A (en) * 1995-02-21 1999-07-13 Clark-Mxr, Inc. Apparatus for controlling the position and direction of a laser beam
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US6067127A (en) * 1997-07-08 2000-05-23 Sony Corporation Method and apparatus for reducing the rotation rate of mirrors in a high resolution digital projection display
TW200633807A (en) * 2005-03-31 2006-10-01 Hitachi Via Mechanics Ltd Laser machining apparatus
TW200711773A (en) * 2005-06-17 2007-04-01 Olympus Corp Laser beam machining method and apparatus
TWI420146B (zh) * 2008-05-22 2013-12-21 Canon Kk 光束掃描裝置、雷射加工裝置、測試方法及雷射加工方法
TW201206603A (en) * 2010-07-20 2012-02-16 Disco Corp Optical device and laser beam machining apparatus having optical device
TW201617684A (zh) * 2014-11-13 2016-05-16 佳能股份有限公司 光學裝置、處理裝置及物品製造方法

Also Published As

Publication number Publication date
EP3290982A1 (en) 2018-03-07
US10845589B2 (en) 2020-11-24
JP6851751B2 (ja) 2021-03-31
CN107797270A (zh) 2018-03-13
US20180059407A1 (en) 2018-03-01
JP2018036440A (ja) 2018-03-08
EP3290982B1 (en) 2025-04-16
TW201807454A (zh) 2018-03-01
KR102165511B1 (ko) 2020-10-14
KR20180025262A (ko) 2018-03-08
CN107797270B (zh) 2021-04-30

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