TWI642066B - 具有兩端支臂結構的超高速重複檢測裝置 - Google Patents

具有兩端支臂結構的超高速重複檢測裝置 Download PDF

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Publication number
TWI642066B
TWI642066B TW106116931A TW106116931A TWI642066B TW I642066 B TWI642066 B TW I642066B TW 106116931 A TW106116931 A TW 106116931A TW 106116931 A TW106116931 A TW 106116931A TW I642066 B TWI642066 B TW I642066B
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TW
Taiwan
Prior art keywords
axis
small
rod
support frame
linear
Prior art date
Application number
TW106116931A
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English (en)
Chinese (zh)
Other versions
TW201802824A (zh
Inventor
安德相
Original Assignee
南韓商Ｈｂ技術有限公司
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Application filed by 南韓商Ｈｂ技術有限公司 filed Critical 南韓商Ｈｂ技術有限公司
Publication of TW201802824A publication Critical patent/TW201802824A/zh
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Publication of TWI642066B publication Critical patent/TWI642066B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8867—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
    • G01N2021/887—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing the measurements made in two or more directions, angles, positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1042—X, Y scan, i.e. object moving in X, beam in Y

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Multimedia (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW106116931A 2016-07-12 2017-05-22 具有兩端支臂結構的超高速重複檢測裝置 TWI642066B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020160088106A KR101846385B1 (ko) 2016-07-12 2016-07-12 양단지지보 구조의 초고속 리뷰 검사장치
??10-2016-0088106 2016-07-12

Publications (2)

Publication Number Publication Date
TW201802824A TW201802824A (zh) 2018-01-16
TWI642066B true TWI642066B (zh) 2018-11-21

Family

ID=61059699

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106116931A TWI642066B (zh) 2016-07-12 2017-05-22 具有兩端支臂結構的超高速重複檢測裝置

Country Status (3)

Country Link
KR (1) KR101846385B1 (ko)
CN (1) CN107607138B (ko)
TW (1) TWI642066B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102308226B1 (ko) * 2020-11-24 2021-11-04 디아이티 주식회사 기판표면 결함 리뷰장치
KR102631655B1 (ko) * 2020-12-17 2024-02-01 (주)메티스 공정효율성을 높인 비전검사장치
CN116609336A (zh) * 2023-04-26 2023-08-18 晶诺微(上海)科技有限公司 缺陷检测设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI323145B (ko) * 2006-05-30 2010-04-01 Seiko Precision Kk
US7779549B2 (en) * 2006-04-18 2010-08-24 Hexagon Metrology S.P.A. Horizontal-arm coordinate measuring machine
JP2011007647A (ja) * 2009-06-26 2011-01-13 Shimadzu Corp Ｔｆｔ基板検査装置用プローバフレームの検査装置
TWI444613B (zh) * 2009-03-30 2014-07-11 Panasonic Corp 攝像檢查裝置及攝像檢查方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2889083B2 (ja) * 1993-06-25 1999-05-10 株式会社ソキア 二次元座標測定機
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US6798088B2 (en) * 2002-11-07 2004-09-28 Industrial Technology Research Institute Structure for symmetrically disposed linear motor operated tool machine
JP2008014767A (ja) * 2006-07-05 2008-01-24 Olympus Corp 基板検査装置
CN101852744B (zh) * 2009-03-30 2012-11-21 松下电器产业株式会社 拍摄检查装置及拍摄检查方法
CN102564337A (zh) * 2010-12-31 2012-07-11 鸿富锦精密工业（深圳）有限公司 影像测量机
CN102393293B (zh) * 2011-08-29 2014-02-05 阮立山 菲涅尔太阳能透镜检测仪
CN102494704A (zh) * 2011-11-22 2012-06-13 吴江市博众精工科技有限公司 一种运动模组
KR101540179B1 (ko) * 2014-05-02 2015-07-28 주식회사 에이치비테크놀러지 경로 알고리즘을 이용한 리뷰(Review) 측정방법
US9707584B2 (en) * 2014-07-09 2017-07-18 Nordson Corporation Dual applicator fluid dispensing methods and systems

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7779549B2 (en) * 2006-04-18 2010-08-24 Hexagon Metrology S.P.A. Horizontal-arm coordinate measuring machine
TWI323145B (ko) * 2006-05-30 2010-04-01 Seiko Precision Kk
TWI444613B (zh) * 2009-03-30 2014-07-11 Panasonic Corp 攝像檢查裝置及攝像檢查方法
JP2011007647A (ja) * 2009-06-26 2011-01-13 Shimadzu Corp Ｔｆｔ基板検査装置用プローバフレームの検査装置

Also Published As

Publication number Publication date
TW201802824A (zh) 2018-01-16
KR20180007194A (ko) 2018-01-22
KR101846385B1 (ko) 2018-04-06
CN107607138B (zh) 2020-07-10
CN107607138A (zh) 2018-01-19

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