CN107607138B - 具有两端支臂结构的超高速重复检测装置 - Google Patents

具有两端支臂结构的超高速重复检测装置 Download PDF

Info

Publication number
CN107607138B
CN107607138B CN201710271835.4A CN201710271835A CN107607138B CN 107607138 B CN107607138 B CN 107607138B CN 201710271835 A CN201710271835 A CN 201710271835A CN 107607138 B CN107607138 B CN 107607138B
Authority
CN
China
Prior art keywords
axis
small
driving part
rod
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710271835.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN107607138A (zh
Inventor
安德相
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hb Technology Co ltd
Original Assignee
Hb Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hb Technology Co ltd filed Critical Hb Technology Co ltd
Publication of CN107607138A publication Critical patent/CN107607138A/zh
Application granted granted Critical
Publication of CN107607138B publication Critical patent/CN107607138B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8867—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
    • G01N2021/887—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing the measurements made in two or more directions, angles, positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1042—X, Y scan, i.e. object moving in X, beam in Y

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Multimedia (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CN201710271835.4A 2016-07-12 2017-04-24 具有两端支臂结构的超高速重复检测装置 Active CN107607138B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020160088106A KR101846385B1 (ko) 2016-07-12 2016-07-12 양단지지보 구조의 초고속 리뷰 검사장치
KR10-2016-0088106 2016-07-12

Publications (2)

Publication Number Publication Date
CN107607138A CN107607138A (zh) 2018-01-19
CN107607138B true CN107607138B (zh) 2020-07-10

Family

ID=61059699

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710271835.4A Active CN107607138B (zh) 2016-07-12 2017-04-24 具有两端支臂结构的超高速重复检测装置

Country Status (3)

Country Link
KR (1) KR101846385B1 (ko)
CN (1) CN107607138B (ko)
TW (1) TWI642066B (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102308226B1 (ko) * 2020-11-24 2021-11-04 디아이티 주식회사 기판표면 결함 리뷰장치
KR102631655B1 (ko) * 2020-12-17 2024-02-01 (주)메티스 공정효율성을 높인 비전검사장치
CN116609336A (zh) * 2023-04-26 2023-08-18 晶诺微(上海)科技有限公司 缺陷检测设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101852744A (zh) * 2009-03-30 2010-10-06 松下电器产业株式会社 拍摄检查装置及拍摄检查方法
CN102393293A (zh) * 2011-08-29 2012-03-28 阮立山 菲涅尔太阳能透镜检测仪
CN102494704A (zh) * 2011-11-22 2012-06-13 吴江市博众精工科技有限公司 一种运动模组
CN102564337A (zh) * 2010-12-31 2012-07-11 鸿富锦精密工业（深圳）有限公司 影像测量机

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2889083B2 (ja) * 1993-06-25 1999-05-10 株式会社ソキア 二次元座標測定機
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US6798088B2 (en) * 2002-11-07 2004-09-28 Industrial Technology Research Institute Structure for symmetrically disposed linear motor operated tool machine
DE602006011792D1 (de) * 2006-04-18 2010-03-04 Hexagon Metrology Spa Horizontalarm-koordinatenmessmaschine
JP4210692B2 (ja) * 2006-05-30 2009-01-21 セイコープレシジョン株式会社 穿孔装置
JP2008014767A (ja) * 2006-07-05 2008-01-24 Olympus Corp 基板検査装置
JP4762351B2 (ja) * 2009-03-30 2011-08-31 パナソニック株式会社 撮像検査装置および撮像検査方法
JP2011007647A (ja) * 2009-06-26 2011-01-13 Shimadzu Corp Ｔｆｔ基板検査装置用プローバフレームの検査装置
KR101540179B1 (ko) * 2014-05-02 2015-07-28 주식회사 에이치비테크놀러지 경로 알고리즘을 이용한 리뷰(Review) 측정방법
US9707584B2 (en) * 2014-07-09 2017-07-18 Nordson Corporation Dual applicator fluid dispensing methods and systems

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101852744A (zh) * 2009-03-30 2010-10-06 松下电器产业株式会社 拍摄检查装置及拍摄检查方法
CN102564337A (zh) * 2010-12-31 2012-07-11 鸿富锦精密工业（深圳）有限公司 影像测量机
CN102393293A (zh) * 2011-08-29 2012-03-28 阮立山 菲涅尔太阳能透镜检测仪
CN102494704A (zh) * 2011-11-22 2012-06-13 吴江市博众精工科技有限公司 一种运动模组

Also Published As

Publication number Publication date
KR101846385B1 (ko) 2018-04-06
CN107607138A (zh) 2018-01-19
TWI642066B (zh) 2018-11-21
KR20180007194A (ko) 2018-01-22
TW201802824A (zh) 2018-01-16

Similar Documents

Publication Publication Date Title
CN107607138B (zh) 具有两端支臂结构的超高速重复检测装置
TWI326746B (ko)
CN105711103A (zh) 一种基于型材搭建的3d打印装置
JP5388664B2 (ja) 位置決めステージ
CN102620651B (zh) 影像测量仪
CN102288143A (zh) 高通过性三坐标测量装置
CN109238171A (zh) 全自动圆柱玻璃棒视觉检测设备
CN210734805U (zh) 一种自动定位装置及含有该自动定位装置的自动检测线
JP2006317437A5 (ko)
CN105547184A (zh) 一种平面度误差测量装置及其二维扫描工作台
CN107685978B (zh) 输送装置
CN203772755U (zh) 一种光伏组件外观缺陷自动检测装置
CN105115466A (zh) 玻璃瓶检测装置
CN102530600A (zh) 用于扫描器托架的摇杆轮系统
CN101710083A (zh) 用于x射线材料无损检测的检测设备
CN104165616A (zh) 一种圆棒光泽度检测装置
CN208916035U (zh) 圆柱玻璃棒上料输送装置
CN103292702B (zh) 一种硅棒几何尺寸测量仪
CN115900584A (zh) 一种用于蒙皮轮廓度测量的装置
CN212963253U (zh) 一种平面度测量设备
CN209615416U (zh) 一种龙门双驱结构
CN210625998U (zh) 一种镜片检测装置
CN105278070A (zh) 光学元件夹持装置
CN208459293U (zh) 一种精密器件的3d视觉检测装置
JP2010281982A (ja) 位置決めステージ

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant