TWI641730B - 原料進料補助具、向進料管供給矽原料的方法以及單晶矽之製造方法 - Google Patents

原料進料補助具、向進料管供給矽原料的方法以及單晶矽之製造方法 Download PDF

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TWI641730B
TWI641730B TW106112736A TW106112736A TWI641730B TW I641730 B TWI641730 B TW I641730B TW 106112736 A TW106112736 A TW 106112736A TW 106112736 A TW106112736 A TW 106112736A TW I641730 B TWI641730 B TW I641730B
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Taiwan
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raw material
crucible
feeding
feed pipe
supplying
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TW106112736A
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Chinese (zh)
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TW201809376A (zh
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中尾年幸
江口靖彦
松隈伸
田口幸樹
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日商Ｓｕｍｃｏ股份有限公司
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  • Crystals, And After-Treatments Of Crystals (AREA)
TW106112736A 2016-05-09 2017-04-17 原料進料補助具、向進料管供給矽原料的方法以及單晶矽之製造方法 TWI641730B (zh)

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Application Number Priority Date Filing Date Title
JP2016-093870 2016-05-09
JP2016093870A JP6540592B2 (ja) 2016-05-09 2016-05-09 原料チャージ補助具及びこれを用いたチャージ管へのシリコン原料のチャージ方法並びにシリコン単結晶の製造方法

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TW201809376A TW201809376A (zh) 2018-03-16
TWI641730B true TWI641730B (zh) 2018-11-21

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TW106112736A TWI641730B (zh) 2016-05-09 2017-04-17 原料進料補助具、向進料管供給矽原料的方法以及單晶矽之製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210115589A (ko) * 2020-03-13 2021-09-27 에스케이실트론 주식회사 단결정 성장용 원료공급장치
KR102460012B1 (ko) 2021-01-19 2022-10-28 에스케이실트론 주식회사 원료 공급 호퍼

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242531A (en) * 1991-03-01 1993-09-07 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe M.B.H. Continuous liquid silicon recharging process in czochralski crucible pulling
US20050279275A1 (en) * 2004-06-18 2005-12-22 Memc Electronic Materials, Inc. Melter assembly and method for charging a crystal forming apparatus with molten source material

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009263178A (ja) * 2008-04-25 2009-11-12 Sumco Corp 単結晶育成装置および原料供給方法
DE112013006156T5 (de) * 2012-12-21 2015-09-03 Sunedison Semiconductor Limited Dotiermitteltrichter zum Einfüllen und Ausgeben von Dotiermittel

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5242531A (en) * 1991-03-01 1993-09-07 Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe M.B.H. Continuous liquid silicon recharging process in czochralski crucible pulling
US20050279275A1 (en) * 2004-06-18 2005-12-22 Memc Electronic Materials, Inc. Melter assembly and method for charging a crystal forming apparatus with molten source material

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JP6540592B2 (ja) 2019-07-10
JP2017202947A (ja) 2017-11-16
TW201809376A (zh) 2018-03-16

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