TWI641730B - Material charge auxiliary tool, method of supplying silicon material to a charge tube, and manufacturing method for single silicon - Google Patents

Abstract

It is an object of the present invention to easily supply a crucible raw material to a feed pipe while preventing contamination. The present invention provides a raw material feed aid 1 which is capable of freely loading and unloading a feed pipe for resupply or additionally supplying a raw material to a single crystal pulling device using a CZ method, and supplying the raw material to the feed. The tube is used, including: a main guiding portion 10, at least a portion in contact with the crucible material S is composed of quartz, and constitutes a flow path of the crucible material S, and a front end portion of the main guiding portion 10 is inserted into an opening of the feeding tube, and the main guiding portion 10 is The crucible material S flows into the opening of the feed tube.

Description

Raw material feeding aid, method for supplying bismuth raw material to feeding tube, and system for single crystal crucible Method

The present invention relates to a raw material feeding aid used in the production of a single crystal crucible using a Chalcola method (hereinafter also referred to as CZ method), and a raw material feeding aid used when supplying a niobium raw material into a feeding tube. A method of supplying a raw material using a feed pipe of the auxiliary device, and a method of producing a single crystal crucible.

The multiplication method is generally known as a method for producing a single crystal crucible using the CZ method. In the multiplication method, after the single crystal crucible is pulled up, the raw material is additionally supplied into the same quartz crucible to be melted, and the single crystal crucible is pulled up from the obtained crucible melt, and the raw material supply step and the single crystal pulling step are repeated. Thereby, a plurality of single crystal germaniums are produced from a quartz crucible. According to the multiplication method, the original cost of the quartz crucible of each single crystal germanium can be reduced. Moreover, since the frequency at which the chamber is removed and the quartz crucible can be removed, the work efficiency can be improved.

The additional supply of the ruthenium raw material may also be carried out under a so-called single-drawing method in which one single crystal crucible is produced from one quartz crucible. When the raw material of the solid which is initially supplied to the quartz crucible is melted, the volume is reduced and the empty capacity is generated. However, by additionally supplying the raw material to the quartz crucible, a large amount of the crucible is pulled up. Single crystal, which can grow a single crystal crucible, thereby improving work efficiency.

In the above-described multiplication method, a special raw material supply device called a feed pipe is used in the additional supply step of re-supplying the raw material of the raw material or the raw material filling rate in the quartz crucible (see Patent Document 1). ,2). The feed pipe is a cylindrical vessel made of quartz, and the bottom cover provided at the lower end of the feed pipe is opened to drop the crucible raw material in the feed pipe, thereby supplying the crucible raw material to the quartz crucible in the single crystal pulling device. Inside.

Advanced technical literature

Patent Document 1: Japanese Laid-Open Patent Publication No. 2006-89294

Patent Document 2: Japanese Laid-Open Patent Publication No. 2008-88002

In order to re-feed or additionally supply the niobium raw material into the single crystal pulling device using the feed pipe, it is first necessary to supply the niobium raw material into the feed pipe. However, in the prior art, when the raw material is supplied into the feed pipe without using a metallurgical tool, there is a problem that the raw material is turned over. In particular, since the parts attached to the feed pipe when the raw material is supplied are hindered from the supply of the raw material, the raw material supply port of the feed pipe is narrow, and there is a problem that it is extremely difficult to supply the raw material. Also, it is necessary to prevent contamination when handling the raw materials.

Therefore, an object of the present invention is to provide a raw material feeding aid, a method of supplying a raw material to a feeding pipe using the auxiliary device, and a method for producing a single crystal crucible, which can easily supply a raw material while preventing contamination of the raw material. Into the feed tube.

In order to solve the above problems, the present invention provides a raw material feeding aid for resupplying or additionally supplying bismuth raw materials into a single crystal pulling device. The feed pipe is capable of being freely loaded and unloaded, and supplies the crucible raw material to the feed pipe, comprising: a main guiding portion, at least a portion in contact with the crucible material is composed of quartz, and a flow path constituting the crucible material, the main guiding portion The front end portion is inserted into the opening of the feed tube, and the crucible material on the main guide portion flows into the opening.

The raw material feed aid of the present invention is installed in the opening of the feed pipe, and guides the raw material into the feed pipe, so that the front width of the feed pipe can be expanded, and the raw material can be more easily supplied to the feed pipe.

As a raw material feeding aid, an organic material is also considered. Since the raw material feeding aid is an article that is used at the normal temperature, when the resin raw material feeding aid is used, the handling convenience and safety when the raw material is supplied to the feeding tube can be improved. However, in the method of supplying the raw material feeding aid by the resin raw material feeding aid, the powder rubbed by the resin and the niobium raw material is mixed into the feeding tube, and the problem of an increase in the carbon concentration in the niobium raw material occurs. In this regard, the raw material feed aid of the present invention is composed of at least a portion in contact with the tantalum raw material, so that the above problem is not caused, and contamination of the tantalum raw material can be prevented.

The raw material feeding aid of the present invention further comprises: a wing portion integrally provided with the main guiding portion, wherein at least a portion in contact with the crucible material is composed of quartz, wherein the main guiding portion is composed of an elongated plate-like member having a curved surface The wing portion is provided on at least one side in a width direction perpendicular to the longitudinal direction of the main guide portion, and has an inclined surface that faces downward toward the main guide portion. In this way, even in the raw material feeding aid which is a plate-shaped member, the front width of the feeding tube can be expanded, and the supply of the raw material can be facilitated.

In the present invention, the wing portion includes a first wing portion and a second wing that extend toward one side and the other side in the width direction perpendicular to the longitudinal direction of the main guide portion. The first wing portion is larger than the second wing portion. In this way, by increasing the size of the wing portion on one side, it is possible to prevent the raw material feed pipe from being excessively enlarged, and the handling becomes easy.

In the present invention, the main guide portion is composed of a cylindrical member, and a rear end portion of the main guide portion is provided with a slanted cut portion for unwinding the material feed port. In this way, even in the cylindrical raw material feeding aid, the front width of the feeding tube can be expanded, and the supply of the raw material can be facilitated.

In the present invention, an upper portion of the main guide portion is provided with an opening that connects the suction port of the vacuum mechanism. In this way, an opening is provided above the main guide portion, and it is possible to prevent the deterioration of the indoor environment caused by the flying dust.

The raw material feeding aid of the present invention further includes a handle integrally formed with the main guiding portion. According to this configuration, it is possible to easily use the quartz which is easily damaged by weight as a raw material feeding aid.

Further, the present invention provides a method of supplying a crucible material to a feed pipe, and supplying a crucible material to a feed pipe for resupplying or additionally supplying the crucible material into the single crystal pulling device, comprising: preparing for the feed pipe Freely loading and unloading, at least a portion of the raw material feeding aid is in contact with the raw material; and inserting the front end portion of the raw material feeding aid into the opening of the feeding tube The raw material of the flow path of the raw material feeds the main guide of the auxiliary aid, and the raw material flows into the opening.

According to the present invention, it is possible to prevent a situation in which the feed tube is broken due to the falling impact when the raw material is supplied. Further, when the feed pipe is tilted, it is difficult for the raw material to enter the opening. However, by using the raw material feed aid, the raw material can be easily introduced into the feed pipe, and the raw material can be prevented from being spilled. Moreover, the portion of the raw material feeding aid that is in contact with at least the raw material of the crucible is composed of quartz, so there is no upper portion. The problem can prevent the contamination of the raw materials.

In the method of supplying a crucible material according to the present invention, the suction port of the vacuum mechanism is disposed above the main guide portion, and the crucible dust which is floated when the crucible material is supplied is sucked, and the crucible material is supplied into the feed tube. According to this method, it is possible to prevent the deterioration of the indoor environment caused by the flying dust.

A method of supplying a crucible raw material according to the present invention, wherein a resin cap is coated on a metal pivot which protrudes upward from the opening of the feed pipe, and the crucible material is supplied to the feed pipe . According to this method, contamination of the raw material of the crucible can be prevented.

The present invention further provides a method for producing a single crystal crucible, comprising: feeding a crucible raw material into a feeding tube by using a raw material feeding aid of the above characteristics; and feeding the crucible raw material into the single crystal pulling device by using the feeding tube; The single crystal germanium is produced from the germanium raw material in the single crystal pulling device. According to the present invention, when the niobium raw material is re-supplied or additionally supplied into the single crystal pulling device by using the feed pipe, the niobium raw material can be easily supplied to the feed pipe, and contamination of the niobium raw material can be prevented.

According to the method for producing a single crystal crucible of the present invention, it is possible to provide a raw material feeding aid, a method of supplying a raw material to a feeding tube using the auxiliary device, and a method for producing a single crystal crucible, which can prevent organic powder from being mixed therein. The feed pipe or the like causes contamination of the raw material of the crucible, and it is easy to supply the crucible raw material into the feed pipe.

1, 2‧‧‧ Raw material feeding aids

10‧‧‧Main Guide

10a‧‧‧ oblique cut section

10d‧‧‧ opening of the main guide

11‧‧‧Insert Department

11a‧‧‧ zenith

11b‧‧‧ openings

11c‧‧‧slit

12‧‧‧wings (1st wing)

13‧‧‧wings (2nd wing)

14‧‧‧Hands

15‧‧‧Card tablets

100‧‧‧ Feeding tube

100a‧‧‧ opening of the feed tube

101‧‧‧feed tube body

101a‧‧‧ Opening of the upper end side of the feed tube body

101b‧‧‧ openings on the lower end side of the feed tube body

102‧‧‧Flange members

102a‧‧‧ screw holes

102b‧‧‧Support tablets

102c‧‧‧through hole

103‧‧‧ bottom cover

104‧‧‧ pivot

105‧‧‧ Guide tube

107‧‧‧Resin caps

110‧‧‧ Carrying box

200‧‧‧vacuum mechanism

201‧‧‧Inhalation

S‧‧‧矽 Raw materials

Fig. 1 (a) to (d) are schematic cross-sectional views showing the structure of a feed pipe of an embodiment of the present invention. (a) shows that the bottom cover is closed and there is no state in which the raw material is contained; (b) the bottom cover is closed and the raw material is contained; (c) the bottom cover is displayed The state in which the raw material of the crucible is opened is not opened; (d) the state in which the bottom cover is opened and the internal crucible material is discharged.

Fig. 2 is a schematic plan view showing the configuration of the opening on the upper end side of the feed pipe.

Fig. 3 is a schematic perspective view showing the structure of a raw material feeding aid according to a first embodiment of the present invention.

Fig. 4 is a side view of the raw material feeding aid of Fig. 3, Fig. 4(a) is a side view seen from the X direction of Fig. 3, and Fig. 4(b) is a Y direction of Fig. 3 Side view of the view.

Fig. 5 is a schematic side view for explaining a method of supplying a raw material to a feed pipe using the raw material feed aid 1.

Fig. 6 is a schematic perspective view showing the structure of a raw material feeding aid according to a second embodiment of the present invention.

Fig. 7 is a side view of the raw material feeding aid of Fig. 6, Fig. 7(a) is a side view seen from the X direction of Fig. 6, and Fig. 7(b) is a Y direction of Fig. 3 Side view of the view.

Fig. 8 is a schematic side view for explaining a method of supplying a raw material to a feed pipe using the raw material feed aid 2.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the drawings used in the following description, in order to make the features of the present invention easy to understand, it is necessary to emphasize the main portion for the sake of convenience, and the dimensional ratios of the respective constituent elements are not necessarily the same as the actual ones.

First, a feed pipe used when re-supplying or additionally supplying a raw material to a single crystal pulling device will be described.

Fig. 1 (a) to (d) are schematic cross-sectional views showing the structure of a feed pipe of an embodiment of the present invention. (a) shows that the bottom cover is closed and there is no state in which the raw material is contained; (b) the bottom cover is closed and the raw material is contained; (c) the bottom cover is opened and the raw material is not contained; (d) The state in which the bottom cover is opened and the internal crucible material is discharged.

As shown in Fig. 1 (a) to (d), the feed pipe 100 is provided with a metal pipe body 101 for accommodating a block-shaped crucible raw material S, and an opening 101a provided at an upper end of the feed pipe main body 101. The flange member 102, the bottom cover 103 that opens and closes the opening 101b at the lower end of the feed tube body 101, the pivot 104 that supports the bottom cover 103, and the guide tube 105 into which the pivot 104 is inserted.

The feed tube body 101 is a cylindrical member made of quartz glass, and its diameter is set to be equal to or slightly smaller than the diameter of the pulled single crystal crucible. A through hole is provided in a central portion of the flange member 102 that partially closes the opening 101a of the upper end of the feed pipe body 101. The pivot 104 and the guide tube 105 are inserted into the feed tube body 101 through the through holes, and pass through the inside of the feed tube body 101 to reach the upper end of the bottom cover 103.

The bottom cover 103 is a conical member having a heat insulating property, and has an inclined surface that smoothly drops the raw material in the feed pipe main body 101 when the bottom cover 103 is opened.

The pivot 104 is a member for lifting the bottom cover 103, and is extended in the vertical direction by the guide tube 105 to be coupled to the upper end of the bottom cover 103. The upper end portion of the pivot shaft 104 protrudes upward from the upper end opening of the feed tube body 101.

The guide tube 105 is provided to prevent the pivot 104 from contacting the crucible material S in the feed tube body 101. The guiding tube 105 is the same as the feeding tube body 101. The glazing unit has a lower end connected to the upper end portion of the bottom cover 103, and the guide tube 105 is integrated with the bottom cover 103. Further, the upper end portion of the guide tube 105 passes through the through hole at the center of the flange member 102, and protrudes upward from the flange member 102, and the amount of protrusion thereof can maintain the protruding state even when the bottom cover 103 is lowered to the lowest position. degree.

Fig. 2 is a schematic plan view showing the configuration of the opening 101a side of the upper end of the feed pipe 100.

As shown in Fig. 2, a screw hole 102a is provided in an appropriate portion of the flange member 102 provided on the upper end side of the feed pipe body 101. Further, the flange member 102 has a support piece 102b that extends long toward the center of the feed tube 100, and a distal end of the support piece 102b is provided with a pivot 104 and a through hole 102c through which the guide tube 105 passes. Thereby, the pivot 104 and the guiding tube 105 are disposed on the central axis of the feeding tube 100. As described above, the opening 101a of the feed pipe 100 as the raw material supply port is not completely opened, and is partially closed by the parts belonging to the feed pipe 100, so that it is difficult to supply the crucible raw material S.

The feed pipe 100 like this is coupled to the front end of the pull-up shaft (wire) of the single crystal pulling device and is disposed in the device. In detail, the upper end of the rotating shaft 104 of the feeding pipe 100 is connected to the front end of the wire, whereby the feeding pipe 100 is disposed above the quartz crucible of the single crystal pulling device. Thereafter, after the winding is released to lower the feeding tube, the bottom cover 103 is opened, whereby the crucible material S is dropped into the quartz crucible.

Next, a raw material feed aid used when the niobium raw material S is supplied to the feed pipe 100 will be described.

Fig. 3 is a schematic perspective view showing the structure of a raw material feeding aid according to a first embodiment of the present invention. In addition, Figure 4 is the raw material feeding subsidy of Figure 3 Fig. 4(a) is a side view seen from the X direction of Fig. 3, and Fig. 4(b) is a side view as seen from the Y direction of Fig. 3.

As shown in Fig. 3 and Fig. 4 (a) and (b), the raw material feeding aid 1 is composed of a member made of quartz glass which can be detachably attached to the feeding tube, and has a receiving tray which becomes the raw material S. The main guide portion 10 that constitutes the flow path for the feedstock S to flow into the feed pipe 100, the insertion portion 11 that is inserted into the opening of the feed pipe 100 at the front end portion of the main guide portion 10, and the rear of the main guide portion 10 The handles 14 provided on the left and right wings 12 and 13 and the back of the main guide 10 are seen.

The main guide portion 10 is a plate-shaped member elongated in the Y direction in the drawing, and has a curved curved surface in a direction (X direction) perpendicular to the longitudinal direction. The curvature of the curved surface is preferably the same as the curvature of the feed tube 100. The length of the main guide portion 10 is preferably longer than the length of the upper end protruding portion of the pivot of the feed tube 100.

The insertion portion 11 forms a passage surrounded by the entire circumference by providing the zenith surface 11a, and the opening 11b at the front end of the insertion portion 11 forms a discharge port of the bismuth raw material S. As shown in FIGS. 4(a) and 4(b), the back surface of the main guide portion 10 is provided with a locking piece 15, which is restrained by the locking piece 15 abutting against the flange member 102 at the upper end of the peripheral edge of the feeding tube 100. The insertion portion 11 is further inserted deeper.

When the wing portions 12 and 13 are expanded only by the main guide portion 10, the range of the receiving tray of the wide crucible material S (feeding range) cannot be called, and the pivoting from the opening 100a of the feeding tube 100 is avoided. 104 is provided while supplying the raw material S. The wings 12, 13 form an inclined surface that faces downward from the front end toward the base end. Therefore, the crucible material S supplied to the wings 12, 13 will slide down the wing portion 12, The inclined faces of 13 are concentrated to the main guide 10. In the present embodiment, the size of the wing portion 12 (first wing portion) on one side is larger than the wing portion 13 (second wing portion) on the other side, but only increases as the supply direction of the raw material S. In the size of the wing portion 12 on the one side, the size of the raw material feeding aid 1 is prevented from being excessively large and large.

The wings 12, 13 are particularly advantageous when supplying the crucible material S to the large feed tube 100. Since the large-sized feed pipe 100 has to supply a large amount of the raw material S, the raw material feed aid 1 must also be increased, and the processing of the raw material feed aid 1 becomes troublesome. Therefore, when the weir material S is additionally supplied to the single crystal pulling device of the single crystal crucible having a diameter of 300 mm or more, the wing portions 12 and 13 are provided in the raw material feed for supplying the crucible raw material S to the feed pipe 100. The subsidy is better.

Large quartz glass articles are heavy and easily broken, and the special shape in which the wings 12, 13 are mounted is very difficult to handle. However, by providing the handle 14 to the raw material feeding aid 1, the handling can be simplified and the safety can be improved. The installation position of the handle 14 can be any position, and can be provided at a position where the raw material feeding aid 1 can be easily handled.

Fig. 5 is a schematic side view for explaining a method of supplying a crucible raw material to a feed pipe 100 using a raw material feed aid 1.

As shown in Fig. 5, in the supply of the feed pipe 100 to the crucible material S, the feed pipe 100 is first tilted together with the entire carrier case 110, and the upper end is inclined downward toward the lower end. The inclination angle θ of the feed pipe 100 is preferably 30 to 60 degrees. When the crucible raw material S is supplied in a state where the feed pipe 100 is erected, the impact at the time of dropping may cause the feed pipe 100 to be broken, but in the case where the feed pipe 100 is tilted in this manner, the damage of the feed pipe 100 can be prevented.

Next, the raw material support 1 is placed by the handle 14 to the opening 100a of the upper end of the feed pipe 100. The insertion portion 11 of the raw material feeding aid 1 is inserted into the opening 100a of the feeding tube 100, and the locking piece 15 is brought into contact with the end surface of the flange member 102 of the feeding tube 100.

Next, the suction port 201 of the vacuum mechanism 200 is provided above the raw material feeding aid 1 . By doing so, it is possible to absorb the dust which flutters in the supply of the raw material S, and it is possible to maintain the indoor environment in consideration of the health of the worker.

Next, a resin cover 107 is placed on the pivot 104 that protrudes upward from the opening 100a of the feed pipe 100. By doing so, it is possible to prevent contamination of the crucible raw material S due to contact with the metal pivot 104. In the feed pipe 100, the pivot 104 is covered by the quartz guide tube 105, so that the crucible material S in the feed pipe 100 does not come into contact with the metal pivot 104. Further, the cover 107 may be placed on the pivot 104 of the feed pipe 100, and then the raw material feeding aid 1 may be placed in the feed pipe 100.

Next, the crucible raw material S is supplied from the side of the wing portion 12. The crucible material S flows from the wing portion 12 to the main guide portion 10, flows from the main guide portion 10, and is supplied into the feed pipe 100. Since the pivot 104 connected to the bottom cover 103 of the feed pipe 100 protrudes from the opening 100a of the feed pipe 100, it is difficult to directly flow the crucible raw material S into the opening 100a, but in the present embodiment, by the opening 100a The main guide portion 10 and the wing portion 12 of the raw material feeding aid 1 that is deployed on the outside side collect the crucible raw material S and then flow into the opening 100a. Therefore, the crucible raw material S can be easily supplied into the feeding tube 100.

During the supply of the raw material S, the raw material feeding aid 1 is set. The upper vacuum mechanism 200 operates to remove dust. By doing so, it is possible to prevent deterioration of the indoor environment caused by the scattering of dust.

Thereafter, the raw material feed aid is removed from the feed pipe 100, and the raw material S is supplied into the feed pipe 100, completing a series of work steps.

As described above, the method of supplying the crucible raw material S to the feed pipe 100 of the present embodiment can supply the crucible raw material S in a state where the feed pipe 100 is inclined, so that the feed pipe 100 can be prevented from being broken. Further, when the feed pipe 100 is tilted, the crucible raw material S becomes difficult to enter from the opening 100a. However, by using the raw material feed aid of the present embodiment, the crucible raw material S can be easily entered into the feed pipe 100. Inside, prevent the raw material S from falling. Moreover, since it is attached to the opening 100a of the feed pipe 100 and the guide material S flows into the feed pipe 100, the front width of the feed pipe 100 can be expanded, and the raw material can be easily supplied. In addition, since the entire raw material feeding aid 1 used for supplying the tantalum raw material S into the feed pipe 100 is composed of a member made of high-purity quartz, contamination of the tantalum raw material S can be prevented.

Fig. 6 is a schematic perspective view showing the structure of a raw material feeding aid according to a second embodiment of the present invention. Further, Fig. 7 is a side view of the raw material feeding aid of Fig. 6, Fig. 7(a) is a side view seen from the X direction of Fig. 6, and Fig. 7(b) is a view from Fig. 6. Side view of the Y direction.

As shown in Fig. 6 and Fig. 7 (a) and (b), the raw material feeding aid 2 is composed of a member made of quartz glass which can be detachably attached to the feeding tube, and has a receiving tray which becomes the raw material S. A cylindrical main guide portion 10 that constitutes a flow path for the crucible material S to flow into the feed pipe 100, an insertion portion 11 that is inserted into an opening of the feed pipe 100 at a front end portion of the main guide portion 10, and a main guide The handle 14 of the bottom surface of the portion 10. Then, the opening of the rear end of the main guide 10 forms a raw material feed port.

A locking piece 15 is provided at a boundary position between the insertion portion 11 of the main guide portion 10 and a portion other than the insertion portion 11. The locking piece 15 is provided to abut against the end surface of the flange member 102 at the upper end of the peripheral edge of the feeding tube 100 to restrict the insertion portion 11 from being inserted further deep. Moreover, in order to avoid interference with the support piece 102b of the flange member 102 of the feed pipe 100, the slit 11c is provided in the upper surface of the insertion part 11.

In the case of the cylindrical main guide portion 10, the length in the longitudinal direction must be longer than the length of the protruding portion of the pivot 104 protruding from the opening 100a of the feed tube 100. If the length of the main guide portion 10 is shorter than the protruding portion of the pivot 104, the front end of the pivot 104 of the feed tube 100 will protrude more than the rear end of the main guide portion 10, and the supply of the raw material S becomes difficult.

The feed port of the crucible material S is provided on the rear end side of the main guide portion 10, and the rear end portion of the cylindrical main guide portion 10 is provided with a chamfered portion 10a for unwinding the material feed port. Further, an opening 10d is provided in the upper portion of the main guide portion 10, and the suction port 201 of the vacuum mechanism 200 is connected to the opening 10d to remove the dust.

Fig. 8 is a schematic side view for explaining a method of supplying a crucible raw material to a feed pipe 100 using a raw material feed aid 2.

As shown in Fig. 8, the raw material feed aid 2 of the present embodiment is also provided in the opening 100a of the feed pipe 100 in the same manner as the raw material feed aid 1 of the first embodiment. At this time, the raw material feed port of the main guide portion 10 is provided, that is, the oblique cut portion 10a faces the upper side, and the handle 14 faces the lower side. Thereafter, the crucible raw material S is supplied from the raw material feed port, and the crucible raw material S slides down the main guide portion 10 and enters Inside the tube 100.

As described above, the raw material feed aid 2 of the present embodiment is also attached to the opening 100a of the feed pipe 100, and the raw material S is introduced into the feed pipe 100, so that the raw material S can be easily supplied. Further, since the entire raw material feeding aid is composed of a member made of quartz, contamination of the raw material S can be prevented. Moreover, according to the present embodiment, the vacuum mechanism 200 disposed above the raw material feeding aid 2 is operated to remove the dust, so that indoor environmental pollution caused by the dust scattering can be prevented.

The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention. It is included in the scope of the invention.

For example, in the above embodiment, the raw material feeding aid is entirely made of quartz, but the present invention is not limited to such a structure, and at least the portion in contact with the tantalum raw material may be made of quartz. Therefore, the quartz plate may be attached to the surface of the resin. For example, in the raw material feeding aid 1 of the first embodiment, the upper side of each of the main guide 10 and the wings 12 and 13 may be made of quartz, and the back side may be Made of resin. Further, in the raw material feeding aid 2 of the second embodiment, the inner surface side of the cylindrical main guide portion 10 may be made of quartz, and the outer surface side may be made of resin.

Claims (9)

A raw material feeding aid capable of freely loading and unloading a feeding pipe for resupplying or additionally supplying a raw material into a single crystal pulling device, and supplying the raw material into the feeding pipe, including: main guiding a portion at least in contact with the crucible material, which is composed of quartz, constitutes a flow path of the crucible material, and a wing portion integrally provided with the main guiding portion, at least a portion in contact with the crucible material is composed of quartz, and the main guiding portion is The front end portion is inserted into the opening of the feeding tube, and the crucible material on the main guiding portion flows into the opening, the main guiding portion is composed of an elongated plate-like member having a curved surface, and the wing portion is disposed at a length longer than the main guiding portion At least one side of the width direction of the vertical direction has an inclined surface facing downward toward the main guide. The raw material feeding aid according to the first aspect of the invention, wherein the wing portion includes a first wing portion and a second portion that extend toward one side and the other side in a width direction perpendicular to a longitudinal direction of the main guide portion. In the wing portion, the first wing portion is larger than the second wing portion. The raw material feeding aid according to the first aspect of the invention, wherein the main guiding portion is a cylindrical member, and a rear end portion of the main guiding portion is provided with an oblique cutting portion for unwinding the raw material feeding port. The raw material feeding aid according to claim 3, wherein an upper portion of the main guiding portion is provided with an opening that connects the suction port of the vacuum mechanism. The raw material feeding aid according to any one of claims 1 to 4, further comprising: A handle is integrally formed with the main guide. A method for supplying a raw material to a feed pipe, and supplying a raw material to a feed pipe for resupplying or additionally supplying a raw material to a single crystal pulling device, comprising: preparing for free loading and unloading of the feeding pipe, at least a raw material feeding aid composed of quartz in contact with the raw material; and a front end portion of the raw material feeding aid inserted into the opening of the feeding tube in a state where the feeding tube is inclined, and the raw material constituting the raw material is formed The raw material of the flow path feeds the main guide of the auxiliary device, and the raw material flows into the opening. The method of supplying a raw material according to the sixth aspect of the invention, wherein the suction port of the vacuum mechanism is disposed above the main guide, and sucks the dust which is floated when the raw material is supplied, and supplies the raw material Up to the feed tube. The method of supplying a crucible raw material according to claim 6 or 7, wherein the resin cover is covered with a metal pivot that protrudes upward from the opening of the feed tube, The crucible material is supplied to the feed tube. A method for producing a single crystal crucible, comprising: using a raw material feeding aid according to any one of claims 1 to 5 to supply a crucible raw material into a feeding pipe; and using the feeding pipe to supply the crucible raw material to In the single crystal pulling device, single crystal germanium is produced from the germanium raw material in the single crystal pulling device.