TWI641090B - 電子封裝件 - Google Patents

電子封裝件 Download PDF

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TWI641090B
TWI641090B TW106107386A TW106107386A TWI641090B TW I641090 B TWI641090 B TW I641090B TW 106107386 A TW106107386 A TW 106107386A TW 106107386 A TW106107386 A TW 106107386A TW I641090 B TWI641090 B TW I641090B
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electronic package
conductive layer
conductive
layer
shield
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TW201834160A (zh
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邱品瑞
蔡芳霖
張翊峰
郭啟信
黃彥傑
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矽品精密工業股份有限公司
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Priority to TW106107386A priority Critical patent/TWI641090B/zh
Priority to CN201710156991.6A priority patent/CN108573879B/zh
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
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    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15172Fan-out arrangement of the internal vias
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Abstract

一種電子封裝件,係將位於承載結構表面之導電層設計成非連續之圖形,以減少該導電層之佈設面積,進而減少該導電層用以接合屏蔽件的銲錫量,俾於可靠度測試時,避免該銲錫材因用量過多而沿該屏蔽件流動至該電子封裝件之外表面。

Description

電子封裝件
本發明係關於一種電子封裝件,更詳而言之,係有關於一種防止電磁干擾之電子封裝件。
隨著半導體技術的演進,半導體產品已開發出不同封裝產品型態,而為提升電性品質,多種應用於射頻(Radio frequency,RF)模組之半導體封裝產品係具備有屏蔽之功能,以防止電磁干擾(Electromagnetic Interference,簡稱EMI)產生。
第1A圖係為習知射頻模組之剖面示意圖。如第1A圖所示,該射頻模組1係將複數如射頻及非射頻式晶片之半導體元件11電性連接在一基板10上,且將一如第1C圖所示之屏蔽框架14藉由銲錫材料17結合於該基板10之金屬層12上,並以封裝層13包覆各該半導體元件11與該屏蔽框架14,又於該封裝層13上形成一金屬薄膜15,以藉由該金屬薄膜15與該屏蔽框架14保護該些半導體元件11免受外界EMI影響。
惟,習知射頻模組1中,該金屬層12為配合該屏蔽框架14之結構而需呈連續環狀,如第1B圖所示,因而該銲 錫材料17之使用量極多,故於可靠度測試時,若該封裝層13與該屏蔽框架14之間因應力而發生分層(delamination)、或該封裝層13裂開且裂縫向上延伸至該射頻模組1之上表面時,受熱呈熔融狀態之銲錫材料17因用量極多而會沿分層路徑或裂縫流動,致使該射頻模組1之上表面會形成銲錫材料17之球狀異物17a,如第1D圖所示,導致該金屬薄膜15受損,造成應用該射頻模組1之產品發生異常。
因此,如何克服上述習知技術的問題,實已成目前亟欲解決的課題。
為解決上述習知技術之種種問題,本發明遂揭露一種電子封裝件,係包括:承載結構,其表面具有導電層,且該導電層之佈設路徑之邊緣形成有至少一凹部;電子元件,係設置並電性連接至該承載結構;屏蔽件,係設於該導電層上;包覆層,係形成於該承載結構上以包覆該導電層、該電子元件與該屏蔽件;以及導電件,係設於該包覆層上且電性連接該屏蔽件。
前述之電子封裝件中,該承載結構係定義有置晶區以供接置該電子元件,且該導電層係對應位於該置晶區之周圍。
前述之電子封裝件中,該導電層係呈環形佈設於該承載結構表面。例如,該環形係為單圈或多圈。
前述之電子封裝件中,該導電層包含複數相分離之區 塊。例如,該些區塊之排設係呈直線式或交錯式,且該導電層之排設係呈單排或多排。
前述之電子封裝件中,該導電層係呈現連續彎折之形狀。例如,該導電層之排設係呈單排或多排。
前述之電子封裝件中,該導電層係藉由導電材結合該屏蔽件。該導電材例如為銲錫材或導電膠。
前述之電子封裝件中,該屏蔽件係為框架。
前述之電子封裝件中,該屏蔽件係位於該電子元件周圍。
前述之電子封裝件中,該屏蔽件之部分表面係外露於該包覆層以接觸該導電件。
前述之電子封裝件中,該導電件係為導電層或蓋體。
另外,前述之電子封裝件中,該導電層之佈設寬度係大於該屏蔽件之佈設寬度。
由上可知,本發明之電子封裝件,主要藉由該導電層之佈設路徑之邊緣形成有凹部之設計,以減少該導電層之佈設面積,因而能減少該導電材之使用量,故相較於習知技術,本發明之電子封裝件使用較少的導電材,因而於可靠度測試時,即使該包覆層與該屏蔽件之間發生分層、或該包覆層裂開且延伸至該包覆層之頂面,均可避免該導電材流動至該包覆層之頂面,進而能避免該導電件受損。因此,本發明之電子封裝件能避免應用其之產品發生異常,故能提高產品良率。
1‧‧‧射頻模組
10‧‧‧基板
11‧‧‧半導體元件
12‧‧‧金屬層
13‧‧‧封裝層
14‧‧‧屏蔽框架
15‧‧‧金屬薄膜
17‧‧‧銲錫材料
17a‧‧‧球狀異物
2‧‧‧電子封裝件
20‧‧‧承載結構
20a‧‧‧第一表面
20b‧‧‧第二表面
201‧‧‧線路層
202‧‧‧電性接觸墊
203‧‧‧植球墊
21‧‧‧電子元件
210‧‧‧導電凸塊
211‧‧‧銲線
22‧‧‧導電層
22a‧‧‧區塊
22c‧‧‧邊緣
220,320‧‧‧凹部
23‧‧‧包覆層
23a‧‧‧頂面
24‧‧‧屏蔽件
25‧‧‧導電件
26‧‧‧導電元件
27‧‧‧導電材
A‧‧‧置晶區
t,r‧‧‧佈設寬度
第1A圖係為習知射頻模組之剖面示意圖;第1B圖係為第1A圖之局部上視示意圖;第1C圖係為第1A圖之局部立體示意圖;第1D圖係為第1A圖之局部放大示意圖;第2A圖係為本發明之電子封裝件之剖面示意圖;第2B圖係為第2A圖之承載結構之局部上視示意圖;以及第3A至3C圖係為對應第2B圖之不同實施例之局部放大示意圖。
以下藉由特定的具體實施例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地瞭解本發明之其他優點及功效。
須知,本說明書所附圖式所繪示之結構、比例、大小等,均僅用以配合說明書所揭示之內容,以供熟悉此技藝之人士之瞭解與閱讀,並非用以限定本發明可實施之限定條件,故不具技術上之實質意義,任何結構之修飾、比例關係之改變或大小之調整,在不影響本發明所能產生之功效及所能達成之目的下,均應仍落在本發明所揭示之技術內容得能涵蓋之範圍內。同時,本說明書中所引用之如「上」、「第一」、「第二」、「側」、「頂」及「一」等之用語,亦僅為便於敘述之明瞭,而非用以限定本發明可實施之範圍,其相對關係之改變或調整,在無實質變更技術內容下,當亦視為本發明可實施之範疇。
請參閱第2A及2B圖,係為本發明之電子封裝件2的剖面及局部上視示意圖。
如第2A及2B圖所示,所述之電子封裝件2係包括:一承載結構20、至少一電子元件21、一屏蔽件24、一包覆層23以及一導電件25。
所述之承載結構20係具有相對之第一表面20a與第二表面20b,且該第一表面20a具有一導電層22,且於該導電層22之佈設路徑之邊緣22c形成有至少一凹部220。
於本實施例中,該承載結構20之第一表面20a係定義有至少一置晶區A,且令該導電層22對應位於該置晶區A之外圍,使該導電層22沿環形佈設。具體地,該承載結構20係為具有核心層之線路結構或無核心層(coreless)之線路配置,該線路配置具有至少一線路層201,例如為扇出(fan out)型重佈線路層(redistribution layer,簡稱RDL)。應可理解地,該承載結構20亦可為其它承載晶片之承載件,如有機板材、晶圓(wafer)、或其他具有金屬佈線(routing)之載板,並不限於上述。
再者,該線路層201具有複數外露於該第一表面20a之電性接觸墊202,且具有複數外露於該第二表面20b之植球墊203,以供結合複數如銲球之導電元件26於其上。
又,該導電層22係呈現不連續之圖形。例如,該凹部220係斷開該導電層22之佈設路徑,使該導電層22包含複數相分離之區塊22a,以構成不連續環狀,且至少一區塊22a用於接地,而該些區塊22a之排設係呈現如第2B圖 所示之直線式或如第3A及3B圖所示之交錯式,其中,該交錯式的排設可有效遮蔽外界電磁波(或訊號)干擾,進一步達到強化EMI屏蔽效果,且該些區塊22a之排設並不限第2B、3A及3B圖所示之單圈或單排,其可為多圈或多排,以提供較佳的EMI屏蔽效果。此外,該區塊22a之形狀可依需求設計,如圓形、三角形或其它幾何圖形等,並不限於第2B、3A及3B圖所示之矩形。
另外,如第3C圖所示,該導電層22亦可呈現連續彎折之形狀。具體地,該凹部320未斷開該導電層22之佈設路徑,使該導電層22成為一彎折式連續環狀。
所述之電子元件21係設於該承載結構20之第一表面20a之置晶區A上且電性連接該承載結構20之線路層201之電性接觸墊202。
於本實施例中,該電子元件21係為主動元件、被動元件或其二者組合等,其中,該主動元件係例如半導體晶片,且該被動元件係例如電阻、電容及電感。例如,該電子元件21係為射頻晶片(例如:藍芽晶片或Wi-Fi晶片),但亦可為其它不受電磁波干擾之電子元件。具體地,該電子元件21係以覆晶方式(如藉由導電凸塊210)或打線方式(如藉由銲線211)電性連接該線路層201之電性接觸墊202。然而,有關該電子元件21電性連接該承載結構20之方式不限於上述。
所述之屏蔽件24係立設於該承載結構20之第一表面20a上且位於該些電子元件21之周圍並對應結合於該導電 層22上。
於本實施例中,該屏蔽件24係為導電材質(如銅、金、鎳或鋁等之金屬)之框架,如第1C圖所示之結構,但不限於此,例如,該屏蔽件24復可於各該電子元件21之間額外形成有擋牆,故該屏蔽件24之結構可依需求設計,並無特別限制。
再者,於該承載結構20上設置該屏蔽件24之製程方式繁多,並無特別限制。例如,可先設置該屏蔽件24於該導電層22上,再形成該包覆層23於該承載結構20之第一表面20a上,以令該包覆層23包覆該導電層22與該屏蔽件24;或者,先形成該包覆層23於該承載結構20之第一表面20a上,再於該包覆層23中形成穿孔,之後形成填充材於該穿孔中以作為該屏蔽件24。
又,該導電層22係藉由導電材27結合該屏蔽件24,且該導電材27係為銲錫材(如錫膏)或導電膠。
另外,該導電層22之佈設寬度t係大於該屏蔽件24之佈設寬度r。
據此,藉由該屏蔽件24作為電磁波屏障以遮蔽該些電子元件21的側向,而防止外界電磁波(或訊號)干擾,使該些電子元件21得以保持應有的功效。
所述之包覆層23係形成於該承載結構20之第一表面20a上以包覆該導電層22、該些電子元件21與該屏蔽件24。
於本實施例中,該包覆層23係為絕緣材,如聚醯亞胺(polyimide,簡稱PI)、乾膜(dry film)、環氧樹脂(epoxy) 或封裝材(molding compound),其可用壓合(lamination)或模壓(molding)之方式形成於該承載結構20之第一表面20a上。
再者,該屏蔽件24之部分表面(頂面)係外露於該包覆層23之頂面23a。例如,形成孔洞於該包覆層23上,以令該屏蔽構件24之頂面外露於該孔洞;或者,如第2A圖所示,進行整平製程,使該屏蔽件24之頂面齊平該包覆層23之頂面23a。
所述之導電件25係設於該包覆層23之頂面23a上且接觸該屏蔽件24以電性連接該屏蔽件24,以令該導電件25與該屏蔽件24作為電磁屏蔽(EMI shielding)。
於本實施例中,形成該導電件25之材質係如金屬或導電膠,如金、銀、銅(Cu)、鎳(Ni)、鐵(Fe)、鋁(Al)、不銹鋼(Sus)等,但不以此為限。
再者,該導電件25可為蓋體,以置放於該包覆層23上;或者,該導電件25可為導電層,其可藉由電鍍、塗佈(coating)、濺鍍(sputtering)、化鍍、無電鍍或蒸鍍等方式形成。
據此,藉由該導電件25作為電磁波屏障以遮蔽該些電子元件21的上方,而防止外界電磁波(或訊號)干擾,使該些電子元件21得以保持應有的功效。
綜上所述,本發明之電子封裝件2係藉由該導電層22之佈設路徑之邊緣22c形成有該凹部220,320之設計,以減少該導電層22之佈設面積,再以例如模板印刷(stencil printing)或其它方式於該佈設面積上形成相對應的導電材27,因而能減少該導電材27之使用量(如銲錫量),故相較於習知技術,本發明之電子封裝件2能使用較少的導電材27,因而於可靠度測試時,即使該包覆層23與該屏蔽件24之間發生分層、或該包覆層23裂開且延伸至該包覆層23之頂面23a,能有效避免受熱呈熔融狀態之導電材27流動至該包覆層23之頂面23a,進而能避免該導電件25受損。因此,本發明之電子封裝件2能避免應用其之產品發生異常,故能有效提高產品良率。
另一方面,透過該凹部220呈現不連續形狀(如第2B、3A及3B圖所示)之設計時,可將該導電材27限制於該導電層22之範圍,以避免該導電材27沿水平方向朝外流動,致使該屏蔽件24與該導電層22之間因導電材27厚度不足而接觸不良之問題。
上述該些實施樣態僅例示性說明本發明之功效,而非用於限制本發明,任何熟習此項技藝之人士均可在不違背本發明之精神及範疇下,對上述該些實施態樣進行修飾與改變。此外,在上述該些實施態樣中之元件的數量僅為例示性說明,亦非用於限制本發明。因此本發明之權利保護範圍,應如後述之申請專利範圍所列。

Claims (14)

  1. 一種電子封裝件,係包括:承載結構,其表面具有導電層,且該導電層之佈設路徑之邊緣形成有至少一凹部;電子元件,係設置並電性連接至該承載結構;屏蔽件,係設於該導電層上;包覆層,係形成於該承載結構上且包覆該導電層、該電子元件與該屏蔽件;以及導電件,係設於該包覆層上且電性連接該屏蔽件。
  2. 如申請專利範圍第1項所述之電子封裝件,其中,該承載結構定義有置晶區以供接置該電子元件,且該導電層係對應位於該置晶區之周圍。
  3. 如申請專利範圍第1項所述之電子封裝件,其中,該導電層係呈環形佈設於該承載結構表面。
  4. 如申請專利範圍第3項所述之電子封裝件,其中,該環形係為單圈或多圈。
  5. 如申請專利範圍第1項所述之電子封裝件,其中,該導電層包含複數相分離之區塊。
  6. 如申請專利範圍第5項所述之電子封裝件,其中,該些區塊之排設係呈直線式或交錯式。
  7. 如申請專利範圍第1項所述之電子封裝件,其中,該導電層係呈現連續彎折之形狀。
  8. 如申請專利範圍第6或7項所述之電子封裝件,其中,該導電層之排設係呈單排或多排。
  9. 如申請專利範圍第1項所述之電子封裝件,其中,該導電層係藉由導電材結合該屏蔽件。
  10. 如申請專利範圍第9項所述之電子封裝件,其中,該導電材係為銲錫材或導電膠。
  11. 如申請專利範圍第1項所述之電子封裝件,其中,該屏蔽件係位於該電子元件周圍。
  12. 如申請專利範圍第1項所述之電子封裝件,其中,該屏蔽件之部分表面係外露於該包覆層以接觸該導電件。
  13. 如申請專利範圍第1項所述之電子封裝件,其中,該導電件係為導電層或蓋體。
  14. 如申請專利範圍第1項所述之電子封裝件,其中,該導電層之佈設寬度係大於該屏蔽件之佈設寬度。
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