TWI625313B - Scribing method - Google Patents

Abstract

On the one hand, the present invention suppresses damage to the blade tip and reliably starts to form a scribe line at a desired position.

The substrate 4 is provided with a surface surrounded by edges having corners formed by the first and second sides D1 and D2. The first auxiliary line AL1 is formed by scribing the surface of the substrate 4 so as to partially sandwich the surface of the substrate 4 with the first side D1. The blade tip is pressed against the surface of the substrate 4 to be separated from the edge and located between the first side D1 and the first auxiliary line AL1. Slide the blade tip on the first track crossing the first auxiliary line AL1. Starting from the intersection of the blade tip and the first auxiliary line AL1, the first scribe line SL1 starts to form.

Description

Scribing method

The present invention relates to a scribing method for a substrate, and more particularly, to a scribing method using a blade tip.

In the manufacture of electrical devices such as flat display panels or solar panels, substrates made of brittle materials, such as glass plates, semiconductor wafers, sapphire wafers, or ceramic plates, must often be cut. At this time, the substrate is often scribed with a scribe device. That is, a scribe line is formed on the substrate surface. Scribing refers to a crack that runs at least partially in the thickness direction of the substrate and extends linearly on the surface of the substrate. When a crack progresses completely in the thickness direction, the substrate can be completely cut along the scribe line only by forming a scribe line. When a crack progresses only partially in the thickness direction, a stress application called a breaking step is performed after the scribe line is formed. The crack is completely advanced in the thickness direction by the breaking step, and the substrate is completely cut along the scribe line.

If the edge of the substrate is used as a starting point, a scribe line can be easily formed. The reason is that a local crack is easily caused at the edge of the substrate, so that the scribe line can be extended with the crack as a starting point. However, it is more common to expect to form a scribe line on a substrate from a position away from the edge. In this case, since the starting point of the scribe line is located on a flat surface of the substrate surface, when the scribe line starts to be formed, it is easy to cause the blade tip to slip on the substrate. Therefore, cracks (hereinafter referred to as starting cracks) which are the beginnings for starting the formation of the scribe lines are less likely to occur. Therefore, the technique of starting crack formation is being studied.

According to Japanese Patent Laid-Open No. 2000-264656 (Patent Document 1), Yu Gong is disclosed The method of scoring the piece surface. The scribing device includes a scribing body and a scribing body including a vibration generating member that applies vibration to the cutter. According to this method, the scribe body is relatively moved along the workpiece surface in a state where the scribe body is separated from the workpiece and positioned upward, so that the cutter is positioned directly above the scribe starting point. Then, by lowering the scribing body, the front end of the cutter touches the scribing start point with the weight of the scribing body. Thereafter, by applying an impact to the scribing body, a starting crack is formed on the workpiece surface at the starting point of the scribing line that is separated from the edge. By applying vibration to the workpiece, a scribe line is formed starting from the crack at the starting point.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2000-264656

According to the scribing device described in the above publication, the starting crack is formed by applying an impact to the scribing body (scribing head). However, if the intention is to rely solely on the impact to obtain the starting point of the scribe line, a large impact force must be applied to the cutter. Therefore, the tip of the cutter is greatly damaged.

The present invention is completed in order to solve the above problems, and an object thereof is to provide a scribing method capable of forming a scribing line from the position where the substrate is separated from the edge while suppressing damage to the blade tip.

The scribing method of the present invention includes the following steps. A substrate provided with a surface surrounded by edges having corners composed of first and second sides is prepared. The first auxiliary line is formed by scribing the surface of the substrate to partially sandwich the surface of the substrate with the first side. The blade tip that is separated from the substrate is pressed against the substrate that is separated from the edge and located between the first side and the first auxiliary line. The blade tip pressed against the surface of the substrate is slid on the first track crossing the first auxiliary line. Beginning with the intersection of the blade tip and the first auxiliary line, the first 1 underline.

According to this scribing method, the first scribing line is formed starting from the intersection of the sliding blade tip and the first auxiliary line. Thereby, it is not necessary to apply a large impact to the blade tip in order to secure the opening of the first scribe line. Therefore, the first scribe line can be formed from the position where the edge of the substrate leaves from the edge while suppressing damage to the blade edge.

Preferably, when the first auxiliary line is formed, the surface of the substrate is scribed from the second side. With this, it is possible to start forming the first auxiliary line starting from the second side.

More preferably, when the surface of the substrate is scribed from the second side, the blade tip is caused to slide on the surface of the substrate. Generally speaking, it is not easy to obtain the beginning of cutting the sliding blade tip into the surface of the substrate, but it is easy to cut the sliding blade tip into the substrate on the second side of the substrate, that is, on the edge. Therefore, even if a sliding blade is used, it is possible to easily start forming the first auxiliary line.

The scribing method may further include the following steps. The blade tip that is separated from the substrate is pressed against the surface of the substrate and is separated from the edge and located between the second side and the first scribe line. The blade tip pressed against the surface of the substrate is slid on the second track crossing the first scribe line. Starting with the intersection of the blade tip and the first scribe line, a second scribe line begins to form. Thereby, the first scribe line is used as an auxiliary line for ensuring the formation of the second scribe line. Therefore, the steps can be simplified as compared with a case where an auxiliary line is separately formed.

Alternatively, the scribing method may further include the following steps. A second auxiliary line extending between the second side and the first scribe line is formed by scribing the surface of the substrate from the first side. The blade tip that is separated from the substrate is pressed against the surface of the substrate and is separated from the edge and located between the second side and the second auxiliary line. The blade point pressed against the surface of the substrate is slid on the second track which sequentially intersects the second auxiliary line and the first scribe line. Starting with the intersection of the blade tip and the second auxiliary line, a second scribe line begins to form. Thereby, the second scribe line started to be formed by the second auxiliary line crosses the first scribe line after being stabilized by stretching. Therefore, the second scribe line can be formed stably near the first scribe line.

According to the present invention, as described above, it is possible to form a scribing line from the position where the substrate moves away from the edge while suppressing damage to the blade edge.

4‧‧‧ mother substrate (substrate)

11‧‧‧Workbench

30‧‧‧ crossed head

110‧‧‧Main body

120‧‧‧ Cutter

121‧‧‧Blade

122‧‧‧ knife holder

130‧‧‧Load Department

131‧‧‧cylinder

132‧‧‧Press pin

AL1, AL1v‧‧‧Auxiliary line (1st auxiliary line)

AL2‧‧‧Auxiliary line (second auxiliary line)

AX‧‧‧ Fulcrum

D1 ~ D4‧‧‧sides (1st ~ 4th sides)

DR1, DR2‧‧‧ direction

F, LD‧‧‧force

NL1, NL2 ‧‧‧ intervals

PA1, PA2 ‧‧‧ intersection

PE1, PE2, PE2

PL1‧‧‧Start

PP1, PP2‧‧‧ contact points

PS2‧‧‧ Intersection

SL1, SL1v ‧‧‧ crossed (first crossed)

SL1a ~ SL1d, SL1va ~ SL1vd‧‧‧

SL2, SL2v ‧‧‧ crossed (2nd crossed)

SL2a, SL2b, SL2va, SL2vb‧‧‧

TJ1, TJ1v‧‧‧track (track 1)

TJ2, TJ2v‧‧‧track (Track 2)

U1 ~ U12‧‧‧Unit substrate

FIG. 1 is a flowchart schematically showing a scribing method in Embodiment 1 of the present invention.

FIG. 2 is a plan view schematically showing the first step of the scribing method in Embodiment 1 of the present invention.

Fig. 3 is a plan view schematically showing a second step of the scribing method in the first embodiment of the present invention.

Fig. 4 is a plan view schematically showing a third step of the scribing method in the first embodiment of the present invention.

5 is a plan view schematically showing a fourth step of the scribing method in the first embodiment of the present invention.

Fig. 6 is a plan view schematically showing a fifth step of the scribing method in the first embodiment of the present invention.

Fig. 7 is a plan view schematically showing a sixth step of the scribing method in the first embodiment of the present invention.

8 is a plan view schematically showing a seventh step of the scribing method in the first embodiment of the present invention.

Fig. 9 is a partial side view schematically showing the step of Fig. 2;

Fig. 10 is a partial side view schematically showing a step of the scribing method in Embodiment 2 of the present invention.

11 is a plan view schematically showing a first step of a scribing method in Embodiment 3 of the present invention.

FIG. 12 is a plan view schematically showing a second step of the scribing method in Embodiment 3 of the present invention.

Fig. 13 is a diagram showing the third step of the scribing method in the third embodiment of the present invention. Top view.

FIG. 14 is a plan view schematically showing a fourth step of the scribing method in Embodiment 3 of the present invention.

Fig. 15 is a plan view schematically showing a fifth step of the scribing method in the third embodiment of the present invention.

Fig. 16 is a plan view schematically showing a sixth step of the scribing method in the third embodiment of the present invention.

Fig. 17 is a plan view schematically showing a seventh step of the scribing method in the third embodiment of the present invention.

FIG. 18 is a flowchart schematically showing a scribing method in Embodiment 4 of the present invention.

FIG. 19 is a plan view schematically showing the first step of the scribing method in Embodiment 4 of the present invention.

FIG. 20 is a plan view schematically showing a second step of the scribing method in Embodiment 4 of the present invention.

FIG. 21 is a plan view schematically showing the third step of the scribing method in Embodiment 4 of the present invention.

22 is a plan view schematically showing a fourth step of the scribing method in Embodiment 4 of the present invention.

Hereinafter, embodiments of the present invention will be described based on the drawings. Moreover, in the following drawings, the same or corresponding parts are marked with the same reference numbers, and the description thereof will not be repeated.

(Embodiment 1)

FIG. 1 is a flowchart schematically showing a scribing method in this embodiment. 2 to 8 are top views sequentially showing steps of the scribing method.

Referring to Fig. 2, a mother substrate 4 (substrate) made of glass is prepared (Fig. 1: Step S10). to The mother substrate 4 is provided with a surface surrounded by edges having sides D1 to D4 (first to fourth sides). The sides D1 and D2 constitute the upper left corner in the figure. The edges D2 and D3 constitute the upper right corner in the figure. The edges D3 and D4 constitute the lower right corner in the figure. The sides D4 and D1 constitute the lower left corner in the figure. In this embodiment, the surface of the mother substrate 4 is surrounded by rectangular edges having these four corners. Here, a rectangle is a concept including a square.

The surface of the mother substrate 4 is scribed from the side D2 toward a direction DR1 parallel to the side D1. Specifically, referring to FIG. 9, on the surface of the mother substrate 4 supported on the table 11, the tip 121 (FIG. 9) of the cutter 120 is slid in the direction DR1. Thereby, the auxiliary line AL1 (the first auxiliary line) is formed in the direction DR1 from the starting point PL1 which is separated from the side D1 and located on the side D2 (FIG. 1: Step S20). The auxiliary line AL1 is formed so as to partially sandwich the surface of the mother substrate 4 with the side D1 (in the figure, the left portion of the mother substrate 4 is sandwiched). In this embodiment, the auxiliary line AL1 extends parallel to the side D1 and connects the sides D2 and D4.

Furthermore, as shown in FIG. 9, the cutting blade 120 may further include a blade holder 122 holding a blade tip 121. The cutter 120 is preferably a diamond point. That is, the blade tip 121 is preferably made of diamond. Diamonds are natural or synthetic single crystal diamonds, polycrystalline diamonds, or sintered diamonds made by combining diamond particles with binding materials such as iron group elements.

Referring to FIG. 3, the blade tip 121 (FIG. 9) separated from the mother substrate 4 is pressed against the contact point PP1 on the surface of the mother substrate 4 (FIG. 1: step S30). The contact point PP1 is separated from the edge of the mother substrate 4 between the edge D1 and the auxiliary line AL1. Here, the "between the side D1 and the auxiliary line AL1" means a position sandwiched between the side D1 and the auxiliary line AL1 and separated from each of the side D1 and the auxiliary line AL1. In this embodiment, the cutting edge 121 is the same as or the same as the cutting edge used to form the auxiliary line AL1. Then, the blade tip 121 pressed against the surface of the mother substrate 4 is caused to slide on the track TJ1 (the first track) that crosses the auxiliary line AL1 at the intersection PA1 and extends to the side D3 (DR2 in a direction parallel to the side D2 ( Figure 1: Step S40).

Referring to FIG. 4, starting from the intersection of the blade tip 121 and the auxiliary line AL1, a scribe line SL1 (first scribe line) is formed. Specifically, the interval NL1 from the contact point PP1 to the intersection PA1 The blade tip 121 sliding on the surface of the mother substrate 4 buckles into the crack of the auxiliary line AL1 at the intersection PA1. Thereby, the knife edge 121 starts to form the scribe line SL1 starting from the intersection PA1.

Moreover, when the blade tip 121 slides on the surface of the mother substrate 4, it is easy to form a scratch on the surface of the mother substrate 4. This scratch is too shallow for use in the above-mentioned breaking step, so it does not belong to the "scribe line" in this specification.

Referring to FIG. 5, scribe lines SL1 a to SL1 d are formed between the scribe line SL1 and the side D4 in parallel with the scribe line SL1. The method for forming the scribe lines SL1a to SL1d is the same as the method for forming the scribe lines SL1.

Referring to FIG. 6, the blade tip 121 (FIG. 9) separated from the mother substrate 4 is pressed against the contact point PP2 on the surface of the mother substrate 4 (FIG. 1: Step S50). The contact point PP2 is separated from the edge of the mother substrate 4 and is between the edge D2 and the scribe line SL1. Here, the "between the edge D2 and the scribe line SL1" means a position sandwiched between the edge D2 and the scribe line SL1 and separated from each of the edge D2 and the scribe line SL1. In this embodiment, the cutting edge 121 is the same as or the same as the cutting edge used to form the auxiliary line AL1. Then, the blade tip 121 pressed against the surface of the mother substrate 4 is slid in parallel with the side D1 on the track TJ2 (second track) crossing the scribe line SL1 at the intersection PS2 (FIG. 1: Step S60).

Referring to FIG. 7, starting from the intersection of the blade point 121 and the scribe line SL1, a scribe line SL2 (second scribe line) is started. Specifically, the blade tip 121 sliding on the surface of the mother substrate 4 between the contact point PP2 and the intersection point PS2 snaps into the crack SL1 at the intersection point PS2, thereby starting to form with the intersection point PS2 as a starting point. Line SL2.

Referring to FIG. 8, scribe lines SL2a and SL2b are formed between the scribe line SL2 and the side D3 in parallel with the scribe line SL2. The formation method of the scribe lines SL2a and SL2b is the same as the formation method of the scribe lines SL2.

In the above manner, the lines SL1 and SL1a to SL1d parallel to the side D2, and the auxiliary lines AL1, SL2, SL2a, and SL2b parallel to the side D1 are divided into the parts of the unit substrates U1 to U12. . Next, the mother substrate 4 is transported to a separation package. (Not shown). Then, the breaking step of the mother substrate 4 is performed. Thereby, the unit substrates U1 to U12 separated from each other are obtained.

According to this embodiment, the sliding blade point 121 (FIG. 9) and the auxiliary line AL1 (FIG. 4) intersect at the intersection PA1 as an opening, and the scribe line SL1 is formed. Thereby, it is not necessary to apply a large impact to the blade tip 121 in order to secure the start of the scribe line SL1. Therefore, the scribe line SL1 can be formed from the position (crossing point PA1) where the edge of the mother substrate 4 is separated from the edge of the mother substrate 4 while suppressing damage to the blade tip 121.

When the auxiliary line AL1 (FIG. 2) is formed, the surface of the mother substrate 4 is scribed from the starting point PL1 on the side D2. Thereby, the auxiliary line AL1 can be formed starting from the side D2. When the surface of the mother substrate 4 is scribed from the side D2, the blade tip 121 (FIG. 9) is caused to slide on the surface of the mother substrate 4. Generally speaking, it is not easy to obtain the beginning of cutting the sliding blade point 121 into the surface of the mother substrate 4, but it is easy to cut the sliding blade point 121 into the mother substrate 4 on the edge D2 of the mother substrate 4, that is, on the edge. Therefore, even if the sliding blade point 121 is used, the auxiliary line AL1 can be easily formed.

Further, starting from the intersection of the blade edge 121 and the scribe line SL1 (FIG. 7) at the intersection PS2, the scribe line SL2 is formed. Thereby, the scribe line SL1 is used as an auxiliary line for ensuring the start of the formation of the scribe line SL2. Therefore, the steps can be simplified as compared with a case where an auxiliary line is separately formed.

(Embodiment 2)

Referring to FIG. 10, when the scribe line SL1 is formed in the first embodiment (FIG. 3 and FIG. 4), the scribe head 30 is used in this embodiment. The scribing head 30 and a mechanism (not shown in FIG. 10) for relatively displacing the scribing head 30 with respect to the mother substrate 4 are installed in a scribing device and used.

The scribe head 30 includes a main body portion 110, a cutter 120 (FIG. 9), and a load portion 130. The cutter 120 is attached to the main body portion 110. The cutter 120 is pressed against the surface of the mother substrate 4 with a force F due to the action from the main body portion 110. The main body portion 110 is rotatably supported around the fulcrum AX. The load portion 130 can apply a continuous force LD to the main body portion 110 so as to press the cutting blade 120 against the surface of the mother substrate 4. The load part 130 includes a cylinder 131 for generating a force LD, and The pin 132 is pressed with a force transmission.

By applying a continuous force LD to the main body portion 110 with the cylinder 131, the blade tip 121 of the cutter 120 is pressed against the surface of the mother substrate 4 with a force F. By moving the scribing head 30 in the direction DR2 under the state of applying the force F, the blade tip 121 is moved on the surface of the mother substrate 4. The direction DR2 is along the direction from the fulcrum AX toward the blade tip 121. Thereby, the movement of the blade edge 121 on the surface of the mother substrate 4 is performed so that the fulcrum AX is located behind the blade edge 121.

In addition, the configuration other than the above is substantially the same as the configuration of the first embodiment. Therefore, the same or corresponding elements are denoted by the same reference numerals, and descriptions thereof will not be repeated.

According to this embodiment, the load can be transmitted to the blade tip 121 by the rotational movement of the main body portion 110. When the tool tip 121 moves on the surface of the mother substrate 4, the fulcrum AX is located behind the tool tip 121. Thereby, in the formation of the scribe line SL1, the cutter 120 is easily cut into the mother substrate 4. Therefore, the beginning of the formation of the scribe line SL1 can be obtained more surely at the intersection PA1 (FIG. 4). Therefore, the scribe line SL1 can be formed more reliably.

(Embodiment 3)

11 to 17 are top views sequentially showing steps of the scribing method in this embodiment.

11, a mother substrate 4 is prepared (FIG. 1: step S10). The surface of the mother substrate 4 is drawn from the edge D2 to the direction DR1 parallel to the edge D1 by the knife edge 121 (FIG. 9) to the end point PE1. The end point PE1 is separated from the edge of the surface of the mother substrate 4. Thereby, the auxiliary line AL1v (the first auxiliary line) is formed in the direction DR1 from the starting point PL1 which is separated from the side D1 and located on the side D2 (FIG. 1: Step S20). The auxiliary line AL1 is formed by partially sandwiching the surface of the mother substrate 4 with the side D1 (in the figure, the upper left portion of the mother substrate 4 is sandwiched). In this embodiment, the auxiliary line AL1 extends parallel to the side D1.

Referring to FIG. 12, the blade tip 121 (FIG. 9) separated from the mother substrate 4 is pressed against the contact point PP1 on the surface of the mother substrate 4 (FIG. 1: step S30). The contact point PP1 is separated from the edge of the mother substrate 4 and between the edge D1 and the auxiliary line AL1v. Here, the so-called "edge D1 and auxiliary line AL1v "Between" means a position sandwiched between the side D1 and the auxiliary line AL1v and away from each of the side D1 and the auxiliary line AL1v. In this embodiment, the cutting edge 121 is the same as or the same as the cutting edge used to form the auxiliary line AL1v. Then, the blade tip 121 pressed on the surface of the mother substrate 4 is caused to slide on the track TJ1v (the first track) that crosses the auxiliary line AL1v at the intersection PA1 and extends to the end point PE2, and is directed to the direction DR2 parallel to the side D2 (Figure 1: Step S40). The end point PE2 is separated from the edge of the surface of the mother substrate 4.

Referring to FIG. 13, starting at the intersection of the blade point 121 and the auxiliary line AL1v, a scribe line SL1v (first scribe line) is formed. Specifically, the blade tip 121 sliding on the surface of the mother substrate 4 from the contact point PP1 to the intersection point PA1 is snapped into the crack of the auxiliary line AL1v at the intersection point PA1, thereby starting from the intersection point PA1. A scribe line SL1v is formed.

Referring to FIG. 14, scribe lines SL1va to SL1vd are formed between the scribe line SL1v and the side D4 in parallel with the scribe line SL1v. The method for forming the scribe lines SL1va to SL1vd is the same as the method for forming the scribe lines SL1v.

Referring to FIG. 15, the blade tip 121 (FIG. 9) separated from the mother substrate 4 is pressed against the contact point PP2 on the surface of the mother substrate 4 (FIG. 1: step S50). The contact point PP2 is separated from the edge of the mother substrate 4 and is between the edge D2 and the scribe line SL1v. Here, the "between the edge D2 and the scribe line SL1v" means a position sandwiched between the edge D2 and the scribe line SL1v and separated from each of the edge D2 and the scribe line SL1v. In this embodiment, the cutting edge 121 is the same as or the same as the cutting edge used to form the auxiliary line AL1v. Then, the blade tip 121 pressed against the surface of the mother substrate 4 is slid in parallel with the side D1 on the track TJ2v (second track) crossing the scribe line SL1v at the intersection PS2 and extending to the end point PE3 (FIG. 1) : Step S60). The end point PE3 is separated from the edge of the surface of the mother substrate 4.

Referring to FIG. 16, starting from the intersection of the blade point 121 and the scribe line SL1v, a scribe line SL2v (second scribe line) is started. Specifically, the blade tip 121 sliding on the surface of the mother substrate 4 from the contact point PP2 to the intersection point PS2 snaps into the crack SL1v at the intersection point PS2, thereby starting from the intersection point PS2 A scribe line SL2v is formed.

Referring to FIG. 17, a scribe line parallel to the scribe line SL2v is formed between the scribe line SL2v and the edge D3. SL2va and SL2vb. The formation method of the scribe lines SL2va and SL2vb is the same as the formation method of the scribe lines SL2v.

In the above manner, the scribe lines SL1v and SL1va ~ SL1vd parallel to the side D2 and the auxiliary lines AL1v, scribe lines SL2v, SL2va, and SL2vb parallel to the side D1 are divided into unit substrates U1 to U12. section. Then, the mother substrate 4 is transferred to a breaking device (not shown). Then, the breaking step of the mother substrate 4 is performed. Thereby, the unit substrates U1 to U12 separated from each other are obtained.

In addition, the configuration other than the above is substantially the same as the configuration of the first or second embodiment. Therefore, the same or corresponding elements are denoted by the same reference numerals, and descriptions thereof will not be repeated.

According to this embodiment, at the time point when the scribe is finished, the edges of the surface of the mother substrate 4 are arranged in a row as shown in FIG. 17. Specifically, the area not divided by the scribe line extends along the edge from edge D1 to edge D2 in sequence through edge D4 and edge D3. This can prevent the mother substrate 4 from being accidentally separated into a plurality of portions during the transportation of the mother substrate 4 after the scribing and before the cutting.

(Embodiment 4)

FIG. 18 is a flowchart schematically showing a scribing method in this embodiment. In this embodiment, first, the same steps as those in FIGS. 2 to 5 of the first embodiment (the same steps as steps S10 to S40 in FIG. 1) are performed. The following steps will be described below.

Referring to FIG. 19, by scoring the surface of the mother substrate 4 from the side D1, an auxiliary line AL2 (second auxiliary line) extending to be sandwiched between the side D2 and the scribe line SL1 is formed (FIG. 18: Step S52).

Referring to FIG. 20, the blade tip 121 (FIG. 9) separated from the mother substrate 4 is pressed against the contact point PP2 on the surface of the mother substrate 4 (FIG. 18: step S54). The contact point PP2 is separated from the edge of the mother substrate 4 and between the edge D2 and the auxiliary line AL2. Here, the term "between the edge D2 and the auxiliary line AL2" refers to a position sandwiched between the side D2 and the auxiliary line AL2 and separated from each of the side D2 and the auxiliary line AL2. Home. In this embodiment, the cutting edge 121 is the same as or the same as the cutting edge used to form the auxiliary line AL1. Then, the blade tip 121 pressed against the surface of the mother substrate 4 is slid on the track TJ2 (second track) which sequentially crosses the auxiliary line AL2 and the scribe line SL1 (FIG. 18: Step S62).

21, starting from the intersection of the blade point 121 and the auxiliary line AL2, a scribe line SL2 (second scribe line) is started. Specifically, the blade tip 121 sliding on the surface of the mother substrate 4 from the contact point PP2 to the intersection point PA2 is buckled into the crack of the auxiliary line AL2 at the intersection point PA2, thereby taking the intersection point PA2 as a starting point, The formation of the scribe line SL2 begins.

22, scribe lines SL2a and SL2b are formed between the scribe line SL2 and the side D3 in parallel with the scribe line SL2. The formation method of the scribe lines SL2a and SL2b is the same as the formation method of the scribe lines SL2.

In the above manner, the scribe lines SL1 and SL1a to SL1d parallel to the side D2 and the auxiliary lines AL1, scribe lines SL2, SL2a, and SL2b parallel to the side D1 are divided into the unit substrates U1 to U12. section. Then, the mother substrate 4 is transferred to a breaking device (not shown). Then, the breaking step of the mother substrate 4 is performed. Thereby, the unit substrates U1 to U12 separated from each other are obtained.

According to this embodiment, the scribe line SL2 started to be formed using the auxiliary line AL2 (FIG. 21) crosses the scribe line SL1 after being stabilized by stretching. Thereby, the scribe line SL2 can be stably formed in the vicinity of the scribe line SL1.

In addition, the present invention can freely combine various embodiments within the scope of the invention, or appropriately change or omit each embodiment. For example, in each of the above embodiments, the auxiliary line AL1 is formed from the starting point PL1 (FIG. 2) on the side D2 of the mother substrate 4, but may be formed from the starting point away from the side D2. In addition, instead of moving the knife edge 121 while standing the mother substrate 4 as shown in FIG. 9 to perform scribing, a relative equivalent movement between the mother substrate 4 and the knife edge 121 may be generated. The mother substrate 4 is moved while the blade tip 121 is stationary, or both are moved. The mother substrate 4 is made of glass, but may be made of other brittle materials. production. In addition, the scribe line for forming the auxiliary line AL1 (FIG. 2) can also be performed by turning the wheel-shaped blade tip instead of sliding the blade tip 121 on the surface of the mother substrate 4 (FIG. 9). The same applies to the auxiliary line AL2 (FIG. 19).

Claims (5)

A scribing method includes the steps of preparing a substrate provided with a surface surrounded by edges having corners composed of first and second sides; and by scribing the surface of the substrate, the surface is aligned with the first The first auxiliary line is formed in such a manner that the surface of the substrate is sandwiched between one side; the blade tip separated from the substrate is pressed against the surface of the substrate and separated from the edge and located on the first side and The position between the first auxiliary line; and the blade tip pressed against the surface of the substrate slides on a first track that intersects the first auxiliary line; and the blade tip and the first auxiliary The line crosses at the beginning and begins to form the first scribe line. For example, the scribe method of item 1, wherein the step of forming the first auxiliary line includes a step of scribe the surface of the substrate from the second side. For example, the scribing method of claim 2, wherein the step of scribing the surface of the substrate from the second side includes a step of sliding a knife edge on the surface of the substrate. The scribing method according to any one of claims 1 to 3, further comprising the step of: pressing a blade tip separated from the substrate against the surface of the substrate and leaving from the edge and located on the second side and The position between the first scribe line; and the blade tip pressed against the surface of the substrate slides on a second track crossing the first scribe line; and the blade tip and the first scribe The line crosses at the beginning and begins to form a second scribe line. The scribing method according to any one of claims 1 to 3, which includes the following steps: by scribing the surface of the substrate from the first side to form a sandwich between the second side and the first The second auxiliary line extending between the scribe lines; pressing the blade tip separated from the substrate against the surface of the substrate from the edge and located between the second side and the second auxiliary line Position; and the blade tip pressed against the surface of the substrate slides on the second track which sequentially intersects the second auxiliary line and the first scribe line; and the blade tip and the second auxiliary line The cross is the beginning, and a second scribe line begins to form.