TW202039193A - Method of dividing brittle substrate - Google Patents

Method of dividing brittle substrate Download PDF

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Publication number
TW202039193A
TW202039193A TW109124597A TW109124597A TW202039193A TW 202039193 A TW202039193 A TW 202039193A TW 109124597 A TW109124597 A TW 109124597A TW 109124597 A TW109124597 A TW 109124597A TW 202039193 A TW202039193 A TW 202039193A
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Taiwan
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line
edge
auxiliary
brittle substrate
blade
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TW109124597A
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Chinese (zh)
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曽山浩
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日商三星鑽石工業股份有限公司
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Priority to JPJP2016-035045 priority Critical
Priority to JP2016035045 priority
Application filed by 日商三星鑽石工業股份有限公司 filed Critical 日商三星鑽石工業股份有限公司
Publication of TW202039193A publication Critical patent/TW202039193A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B5/00Producing shaped articles from the material in moulds or on moulding surfaces, carried or formed by, in, or on conveyors irrespective of the manner of shaping
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets

Abstract

The invention provides a method of dividing a brittle substrate. In the present invention, prepared is a blade tip (51) that has first to third surfaces (SD1-SD3) and as a result has a ridge line (PS)and an apex (PP). A groove-shaped trench line (TL) is formed in a crack less state by sliding the blade tip (51) along one surface (SF1) of a brittle substrate (4) in a direction from the ridge line (PS) toward the first surface (SD1). A crack line (CL) is formed by cutting downward at an edge (ED) of the brittle substrate (4) using the ridge line (PS) of the blade tip (51) so as to cause a crack in the brittle substrate (4) in a thickness direction (DT) to extend along the trench line (TL) from the edge (ED). A continuous connection of the brittle substrate (4) in a direction that intersects the trench line (TL) is broken by the crack line (CL) below the trench line (TL).

Description

脆性基板之分斷方法Breaking method of brittle substrate
本發明係關於一種脆性基板之分斷方法。The invention relates to a method for breaking a brittle substrate.
於平面顯示器面板或太陽電池面板等電氣設備之製造中,常常必須分斷脆性基板。於典型性之分斷方法中,首先,於脆性基板上形成裂痕線。於本說明書中所謂「裂痕線」,係指於脆性基板之厚度方向局部地前進之裂痕於脆性基板之表面上線狀地延伸者。其次,進行所謂之斷裂步驟。具體而言,藉由對脆性基板施加應力,而使裂痕線之裂痕於厚度方向完全前進。藉此,脆性基板沿著裂痕線分斷。In the manufacture of flat-panel display panels or solar cell panels and other electrical equipment, it is often necessary to break the brittle substrate. In a typical breaking method, first, crack lines are formed on the brittle substrate. The term "crack line" in this specification refers to a crack that locally advances in the thickness direction of the brittle substrate and extends linearly on the surface of the brittle substrate. Secondly, the so-called breaking step is carried out. Specifically, by applying stress to the brittle substrate, the crack of the crack line completely advances in the thickness direction. Thereby, the brittle substrate is broken along the crack line.
根據專利文獻1,處於玻璃板之上表面之凹陷會於切割時產生。於該專利文獻1中,將該凹陷稱為「劃線」。又,與該劃線之刻設同時地,產生自劃線向正下方向延伸之裂痕。如該專利文獻1之技術所呈現,於習知之典型性之技術中,與劃線之形成同時地形成裂痕線。According to Patent Document 1, the depression on the upper surface of the glass plate is generated during cutting. In this patent document 1, this depression is called "scribing". In addition, simultaneously with the engraving of the scribe line, a crack extending from the scribe line in the direct downward direction is generated. As shown in the technique of Patent Document 1, in the conventional typical technique, the crack line is formed simultaneously with the formation of the scribe line.
根據專利文獻2,提出有與上述典型性之分斷技術明顯不同之分斷技術。根據該技術,首先,藉由利用脆性基板上之刃前緣之滑動產生塑性變形,而形成該專利文獻2中被稱為「劃線」之槽形狀。於本說明書中,以後將該槽形狀稱為「溝槽線」。於形成溝槽線之時間點,未於其下方形成裂痕。然後,藉由沿著溝槽線使裂痕伸展,而形成裂痕線。即,與典型性之技術不同,不伴隨裂痕之溝槽線一旦形成,之後便沿著溝槽線形成裂痕線。然後,沿著裂痕線進行通常之斷裂步驟。According to Patent Document 2, a breaking technique that is significantly different from the above-mentioned typical breaking technique is proposed. According to this technique, first, a groove shape called "scribing" in Patent Document 2 is formed by plastic deformation by the sliding of the leading edge of the blade on the brittle substrate. In this specification, this groove shape is hereinafter referred to as "groove line". At the time when the trench line was formed, no crack was formed under it. Then, the crack line is formed by extending the crack along the groove line. That is, unlike the typical technology, once the groove line without a crack is formed, a crack line is formed along the groove line thereafter. Then, the usual breaking step is performed along the crack line.
上述專利文獻2之技術中所使用之不伴隨裂痕之溝槽線與伴隨裂痕之同時形成之典型性之劃線相比,能夠藉由更低之負載之刃前緣之滑動而形成。因負載較小,故施加至刃前緣之損傷變小。因此,根據該分斷技術,可延長刃前緣之壽命。 [先前技術文獻] [專利文獻]The groove line without cracks used in the technique of the above-mentioned Patent Document 2 can be formed by sliding of the cutting edge with a lower load than the typical scribing line formed simultaneously with cracks. Due to the smaller load, the damage applied to the leading edge of the blade becomes smaller. Therefore, according to this breaking technology, the life of the cutting edge can be extended. [Prior Technical Literature] [Patent Literature]
[專利文獻1]日本專利特開平9-188534號公報 [專利文獻2]國際公開第2015/151755號[Patent Document 1] Japanese Patent Laid-Open No. 9-188534 [Patent Document 2] International Publication No. 2015/151755
[發明所欲解決之課題][The problem to be solved by the invention]
於習知之典型性之技術中,於劃刻時未形成裂痕係指劃刻失敗。然而,於上述專利文獻2之分斷技術中,藉由劃刻,而有意地形成不伴隨裂痕之溝槽線。而且,然後,產生沿著溝槽線之裂痕線。為了開始形成裂痕線,必須向脆性基板賦予使藉由溝槽線之形成而於脆性基板中產生之內部應力釋放之契機。關於賦予該契機之方法,於上述專利文獻2中提出有各種方法。根據本發明者之研究,該等方法亦有用,但殘留有形成裂痕線之概率稍低,或由於需要追加之斷裂步驟故而作業負擔稍大之課題。In conventional typical techniques, no cracks formed during scribing means that the scribing failed. However, in the cutting technique of the aforementioned Patent Document 2, groove lines without cracks are intentionally formed by scribing. And, then, a crack line along the groove line is generated. In order to start the formation of crack lines, it is necessary to give the brittle substrate an opportunity to release the internal stress generated in the brittle substrate by the formation of the groove line. Regarding the method for giving this opportunity, various methods are proposed in the aforementioned Patent Document 2. According to the research of the present inventors, these methods are also useful, but there is a problem that the probability of forming a crack line is slightly lower, or the work burden is slightly greater due to the need for additional breaking steps.
本發明係為了解決如以上之課題而完成者,其目的在於提供一種於形成其下方不具有裂痕之溝槽線之後,可更確實且容易地形成沿著溝槽線之裂痕線的脆性基板之分斷方法。 [解決課題之技術手段]The present invention was completed in order to solve the above-mentioned problems, and its purpose is to provide a brittle substrate that can more reliably and easily form a crack line along the groove line after forming a groove line without a crack underneath it. Breaking method. [Technical means to solve the problem]
按照本發明之一個態樣之脆性基板之分斷方法具有以下之步驟a)~e)。 a)準備具有設置有邊緣之一個面及與一個面垂直之厚度方向之脆性基板。 b)準備刃前緣,該刃前緣具有:第1面;第2面,其與第1面相鄰;及第3面,其係藉由與第2面相鄰而形成稜線且藉由與第1面及第2面之各者相鄰而形成頂點。 c)藉由於脆性基板之一個面上使刃前緣向自稜線朝向第1面之方向滑動,而利用塑性變形使具有槽形狀之溝槽線形成於脆性基板之一個面上。溝槽線係以成為無裂痕狀態之方式形成,即,於溝槽線之下方,脆性基板於與溝槽線交叉之方向連續地連接之狀態。 d)藉由利用步驟c)滑動之刃前緣之稜線切下脆性基板之一個面之邊緣,而使厚度方向之脆性基板之裂痕自邊緣沿著溝槽線伸展,藉此形成裂痕線。藉由裂痕線,使得於溝槽線之下方,脆性基板於與溝槽線交叉之方向連續性之連接中斷。 e)沿著裂痕線分斷脆性基板。The method for breaking a brittle substrate according to one aspect of the present invention has the following steps a) to e). a) Prepare a brittle substrate with a surface provided with edges and a thickness direction perpendicular to the surface. b) Prepare the cutting edge, which has: a first surface; a second surface, which is adjacent to the first surface; and a third surface, which forms a ridge by being adjacent to the second surface and It is adjacent to each of the first surface and the second surface to form a vertex. c) A groove line with a groove shape is formed on one surface of the brittle substrate by plastic deformation by sliding the leading edge of the blade in the direction from the ridge line to the first surface on one surface of the brittle substrate. The groove line is formed in a crack-free state, that is, under the groove line, the brittle substrate is continuously connected in the direction intersecting the groove line. d) Cut off the edge of one surface of the brittle substrate by using the ridge line of the sliding blade front edge in step c), so that the crack of the brittle substrate in the thickness direction extends from the edge along the groove line, thereby forming a crack line. With the crack line, under the groove line, the continuous connection of the brittle substrate in the direction crossing the groove line is interrupted. e) Break the brittle substrate along the crack line.
按照本發明之另一態樣之脆性基板之分斷方法具有以下之步驟a)~e)。 a)準備具有一個面及與一個面垂直之厚度方向之脆性基板。於一個面上設置有輔助線,該輔助線具有:輔助溝槽線,其具有槽形狀;及輔助裂痕線,其係藉由厚度方向之脆性基板之裂痕沿著輔助溝槽線延伸而構成。 b)準備刃前緣,該刃前緣具有:第1面;第2面,其與第1面相鄰;及第3面,其係藉由與第2面相鄰而形成稜線且藉由與第1面及第2面之各者相鄰而形成頂點。 c)藉由於脆性基板之一個面上使刃前緣向自稜線朝向第1面之方向滑動,而藉由塑性變形使具有槽形狀之溝槽線形成於脆性基板之一個面上。溝槽線係以成為無裂痕狀態之方式形成,即,於溝槽線之下方,脆性基板於與溝槽線交叉之方向連續地連接之狀態。 d)藉由利用步驟c)滑動之刃前緣之稜線與設置於脆性基板之一個面上之輔助線交叉,而使厚度方向之脆性基板之裂痕自輔助線沿著溝槽線伸展,藉此形成裂痕線。藉由裂痕線,使得於溝槽線之下方,脆性基板於與溝槽線交叉之方向連續性之連接中斷。 e)沿著裂痕線分斷脆性基板。 [發明之效果]The method for breaking a brittle substrate according to another aspect of the present invention has the following steps a) to e). a) Prepare a brittle substrate with one surface and a thickness direction perpendicular to one surface. An auxiliary line is provided on one surface, and the auxiliary line has: an auxiliary groove line having a groove shape; and an auxiliary crack line, which is formed by the crack of the brittle substrate in the thickness direction extending along the auxiliary groove line. b) Prepare the cutting edge, which has: a first surface; a second surface, which is adjacent to the first surface; and a third surface, which forms a ridge by being adjacent to the second surface and It is adjacent to each of the first surface and the second surface to form a vertex. c) A groove line with a groove shape is formed on one surface of the brittle substrate by plastic deformation by sliding the leading edge of the blade in the direction from the ridge line to the first surface due to one surface of the brittle substrate. The groove line is formed in a crack-free state, that is, under the groove line, the brittle substrate is continuously connected in the direction intersecting the groove line. d) By using step c) the ridge line of the sliding blade front edge crosses the auxiliary line provided on one surface of the brittle substrate, so that the cracks of the brittle substrate in the thickness direction extend along the groove line from the auxiliary line, thereby Form a crack line. With the crack line, under the groove line, the continuous connection of the brittle substrate in the direction crossing the groove line is interrupted. e) Break the brittle substrate along the crack line. [Effects of Invention]
根據按照本發明之一個態樣之脆性基板之分斷方法,第1,可容易地準備刃前緣。其原因在於,刃前緣之頂點係作為第1面、第2面及第3面之3個面相交之部位而設置。假設,於藉由超過3個面相交之部位而設置刃前緣之頂點之情形時,必須以通過3個面相交之點之方式,使剩餘之面之位置一致。因此,需要較高之加工精度。相對於此,於藉由3個面相交之部位而設置刃前緣之頂點之情形時,不需要那麼高之加工精度。第2,可更確實地形成沿著溝槽線之裂痕線。其原因在於,為了形成溝槽線而滑動之刃前緣之稜線切下脆性基板之一個面之邊緣。藉由該切下,而以較高之確實性獲得裂痕線之形成開始之契機。According to the method for cutting a brittle substrate according to one aspect of the present invention, first, the cutting edge can be easily prepared. The reason is that the apex of the leading edge of the blade is provided as a location where three of the first surface, the second surface, and the third surface intersect. Suppose that when the apex of the leading edge of the blade is set by the part where more than 3 faces intersect, the position of the remaining faces must be consistent by passing through the intersecting point of the 3 faces. Therefore, higher machining accuracy is required. On the other hand, when the apex of the leading edge of the blade is set by the part where the three faces intersect, such high machining accuracy is not required. Second, the crack line along the groove line can be formed more reliably. The reason is that the ridge line of the leading edge of the blade that slides to form the groove line cuts the edge of one surface of the brittle substrate. With this cutting, the opportunity to start the formation of the crack line is obtained with higher certainty.
根據按照本發明之另一態樣之脆性基板之分斷方法,第1,可容易地準備刃前緣。其原因在於,刃前緣之頂點係作為第1面、第2面及第3面之3個面相交之部位而設置。假設,於藉由超過3個面相交之部位而設置刃前緣之頂點之情形時,必須以通過3個面相交之點之方式,使剩餘之面之位置一致。因此,需要較高之加工精度。相對於此,於藉由3個面相交之部位而設置刃前緣之頂點之情形時,不需要那麼高之加工精度。第2,可更確實地形成沿著溝槽線之裂痕線。其原因在於,為了形成溝槽線而滑動之刃前緣之稜線向設置於脆性基板之一個面之輔助線與藉由滑動之刃前緣之頂點而形成之溝槽線之交點局部地施加應力。藉由該應力施加,而以較高之確實性獲得裂痕線之形成開始之契機。According to the method for separating a brittle substrate according to another aspect of the present invention, first, the cutting edge can be easily prepared. The reason is that the apex of the leading edge of the blade is provided as a location where three of the first surface, the second surface, and the third surface intersect. Suppose, in the case where the apex of the leading edge of the blade is set by the part where more than 3 faces intersect, the position of the remaining faces must be consistent by passing through the intersecting point of the 3 faces. Therefore, higher machining accuracy is required. In contrast, when the apex of the leading edge of the blade is set at the location where the three faces intersect, such high machining accuracy is not required. Second, the crack line along the groove line can be formed more reliably. The reason is that the ridge line of the sliding blade leading to form the groove line locally applies stress to the intersection of the auxiliary line provided on one surface of the brittle substrate and the groove line formed by the apex of the sliding blade leading . With the application of the stress, the opportunity to start the formation of the crack line is obtained with higher certainty.
以下,基於圖式對本發明之實施形態進行說明。再者,於以下之圖式中對相同或相當之部分標註相同之參照編號,不重複其說明。Hereinafter, an embodiment of the present invention will be described based on the drawings. Furthermore, the same or equivalent parts are marked with the same reference numbers in the following drawings, and the description is not repeated.
<實施形態1> (切割器具之構成) 參照圖1及圖2,首先,對本實施形態之玻璃基板4(脆性基板)之分斷方法之溝槽線之形成步驟中所使用的切割器具50之構成進行說明。切割器具50具有刃前緣51及柄52。刃前緣51係藉由固定於作為其固持器之柄52而保持。<Embodiment 1> (The composition of cutting equipment) 1 and 2, first, the configuration of the cutting tool 50 used in the formation step of the groove line of the method of dividing the glass substrate 4 (brittle substrate) of the present embodiment will be described. The cutting tool 50 has a leading edge 51 and a handle 52. The cutting edge 51 is held by being fixed to the handle 52 as its holder.
於刃前緣51設置有頂面SD1(第1面)及包圍頂面SD1之多個面。該等多個面包含側面SD2(第2面)及側面SD3(第3面)。頂面SD1、側面SD2及SD3(第1~第3面)朝向相互不同之方向,且相互相鄰。刃前緣51具有頂面SD1、側面SD2及SD3相交之頂點。藉由該頂點PP而構成刃前緣51之突起部。又,側面SD2及SD3形成構成刃前緣51之側部之稜線PS。稜線PS自頂點PP線狀地延伸,且具有線狀地延伸之凸形狀。根據以上之構成,刃前緣51具有:頂面SD1;側面SD2,其與頂面SD1相鄰;及側面SD3,其係藉由與側面SD2相鄰而形成稜線PS且藉由與頂面SD1及側面SD2之各者相鄰而形成頂點PP。A top surface SD1 (first surface) and a plurality of surfaces surrounding the top surface SD1 are provided on the blade front edge 51. These multiple surfaces include side surface SD2 (second surface) and side surface SD3 (third surface). The top surface SD1, the side surfaces SD2, and SD3 (first to third surfaces) face different directions and are adjacent to each other. The cutting edge 51 has a vertex where the top surface SD1, the side surfaces SD2, and SD3 intersect. The apex PP constitutes the protrusion of the blade edge 51. In addition, the side surfaces SD2 and SD3 form a ridge line PS constituting the side of the blade edge 51. The ridge line PS extends linearly from the vertex PP, and has a convex shape extending linearly. According to the above configuration, the blade front edge 51 has: a top surface SD1; a side surface SD2, which is adjacent to the top surface SD1; and a side surface SD3, which forms a ridge PS by being adjacent to the side surface SD2 and is connected to the top surface SD1 Each of and the side surface SD2 are adjacent to each other to form a vertex PP.
較佳為刃前緣51為金剛石點。即,自可減小硬度及表面粗糙度之方面而言,較佳為,刃前緣51由金剛石製成。更佳為,刃前緣51由單晶金剛石製成。進而較佳為,就結晶學而言,頂面SD1為{001}面,側面SD2及SD3之各者為{111}面。於該情形時,側面SD2及SD3具有不同之方向,但是結晶學上為相互等價之結晶面。Preferably, the leading edge 51 is a diamond point. That is, in terms of reducing hardness and surface roughness, it is preferable that the cutting edge 51 is made of diamond. More preferably, the cutting edge 51 is made of single crystal diamond. More preferably, in terms of crystallography, the top surface SD1 is a {001} surface, and each of the side surfaces SD2 and SD3 is a {111} surface. In this case, the side faces SD2 and SD3 have different directions, but they are crystallographically equivalent crystal faces.
再者,亦可使用並非單晶之金剛石,例如,亦可使用利用CVD(Chemical Vapor Deposition)法合成的多晶體金剛石。或者,亦可使用自微粒之石墨或非石墨狀碳將不包含鐵族元素等結合材燒結之多晶體金剛石粒子藉由鐵族元素等結合材而結合之燒結金剛石。Furthermore, diamonds that are not single crystals can also be used. For example, polycrystalline diamonds synthesized by the CVD (Chemical Vapor Deposition) method can also be used. Alternatively, it is also possible to use a sintered diamond in which polycrystalline diamond particles sintered from fine particles of graphite or non-graphite carbon without a binder such as an iron group element are bonded by a binder such as an iron group element.
柄52沿著軸向AX延伸。較佳為,刃前緣51以頂面SD1之法線方向大致沿著軸向AX之方式安裝於柄52。The shank 52 extends along the axial direction AX. Preferably, the leading edge 51 is mounted on the shank 52 in such a way that the normal direction of the top surface SD1 is substantially along the axial direction AX.
(玻璃基板之分斷方法) 其次,以下一面參照圖3所示之流程圖一面對玻璃基板4之分斷方法進行說明。(How to break the glass substrate) Next, the method of dividing the glass substrate 4 will be described below with reference to the flowchart shown in FIG. 3.
於步驟S10(圖3)中,準備欲被分斷之玻璃基板4(圖1)。玻璃基板4具有上表面SF1(一個面)及其相反之下表面SF2(另一個面)。於上表面SF1設置有邊緣ED。於圖4所示之例中,邊緣ED具有長方形狀。玻璃基板4具有與上表面SF1垂直之厚度方向DT。又,於步驟S20(圖3)中,準備具有上述刃前緣51之切割器具50(圖1及圖2)。In step S10 (Figure 3), prepare the glass substrate 4 (Figure 1) to be split. The glass substrate 4 has an upper surface SF1 (one surface) and an opposite lower surface SF2 (the other surface). An edge ED is provided on the upper surface SF1. In the example shown in FIG. 4, the edge ED has a rectangular shape. The glass substrate 4 has a thickness direction DT perpendicular to the upper surface SF1. Moreover, in step S20 (FIG. 3), the cutting tool 50 (FIG. 1 and FIG. 2) which has the said blade front edge 51 is prepared.
參照圖4,於步驟S30(圖3)中形成溝槽線TL。具體而言,進行以下之步驟。Referring to FIG. 4, a trench line TL is formed in step S30 (FIG. 3). Specifically, perform the following steps.
首先,將刃前緣51(圖1)之頂點PP於位置N1壓抵於上表面SF1。藉此,刃前緣51接觸於玻璃基板4。較佳為,位置N1如圖所示,自玻璃基板4之上表面SF1之邊緣ED離開。換言之,於刃前緣51之滑動開始時間點,避免刃前緣51與玻璃基板4之上表面SF1之邊緣ED碰撞。First, the apex PP of the leading edge 51 (FIG. 1) is pressed against the upper surface SF1 at the position N1. Thereby, the blade edge 51 contacts the glass substrate 4. Preferably, the position N1 is separated from the edge ED of the upper surface SF1 of the glass substrate 4 as shown in the figure. In other words, at the time when the sliding of the blade front edge 51 starts, the blade front edge 51 is prevented from colliding with the edge ED of the upper surface SF1 of the glass substrate 4.
其次,使如上所述壓抵之刃前緣51於玻璃基板4之上表面SF1上滑動(參照圖4之箭頭)。刃前緣51(圖1)於上表面SF1上向自稜線PS朝向頂面SD1之方向滑動。嚴格而言,刃前緣51向將自稜線PS經由頂點PP朝向頂面SD1之方向投影至上表面SF1上所成之方向DB滑動。方向DB大致沿著將頂點PP之附近之稜線PS之延伸方向投影至上表面SF1上所成之方向。於圖1中,方向DB對應於與將自刃前緣51延伸之軸向AX投影至上表面SF1上所成之方向相反之方向。因此,刃前緣51藉由柄52而壓入於上表面SF1上。Next, the front edge 51 pressed against as described above is slid on the upper surface SF1 of the glass substrate 4 (refer to the arrow in FIG. 4). The cutting edge 51 (FIG. 1) slides on the upper surface SF1 in a direction from the ridge line PS toward the top surface SD1. Strictly speaking, the cutting edge 51 slides in the direction DB formed by projecting the direction from the ridge line PS to the top surface SD1 through the vertex PP onto the upper surface SF1. The direction DB is substantially along the direction formed by projecting the extension direction of the ridge line PS near the vertex PP onto the upper surface SF1. In FIG. 1, the direction DB corresponds to the direction opposite to the direction formed by projecting the axial direction AX extending from the cutting edge 51 onto the upper surface SF1. Therefore, the cutting edge 51 is pressed into the upper surface SF1 by the shank 52.
於玻璃基板4之上表面SF1上滑動之刃前緣51(圖1)之稜線PS及頂面SD1之各者與玻璃基板4之上表面SF1形成角度AG1及角度AG2。較佳為,角度AG2小於角度AG1。Each of the ridge PS and the top surface SD1 of the front edge 51 (FIG. 1) sliding on the upper surface SF1 of the glass substrate 4 forms an angle AG1 and an angle AG2 with the upper surface SF1 of the glass substrate 4. Preferably, the angle AG2 is smaller than the angle AG1.
藉由上述滑動而於上表面SF1上產生塑性變形。藉此,於上表面SF1上形成具有槽形狀之溝槽線TL(圖5)。較佳為,溝槽線TL僅藉由玻璃基板4之塑性變形而產生,於該情形時,於玻璃基板4之上表面SF1上不會產生切削。為了避免切削,只要不使刃前緣51之負載過高即可。由於無切削,故可避免於上表面SF1上產生不佳之微細之碎片。但是,通常可容許少許之切削。Plastic deformation is generated on the upper surface SF1 by the above sliding. Thereby, a groove line TL having a groove shape is formed on the upper surface SF1 (FIG. 5 ). Preferably, the groove line TL is only generated by the plastic deformation of the glass substrate 4. In this case, no cutting will occur on the upper surface SF1 of the glass substrate 4. In order to avoid cutting, it is only necessary that the load on the leading edge 51 of the blade is not excessively high. Since there is no cutting, it can avoid the generation of poor fine chips on the upper surface SF1. However, usually a small amount of cutting is allowed.
溝槽線TL之形成係藉由於位置N1及位置N3e之間,使刃前緣51自位置N1經由位置N2向位置N3e滑動而進行。位置N2自玻璃基板4之上表面SF1之邊緣ED離開。位置N3e位於玻璃基板4之上表面SF1之邊緣ED。The groove line TL is formed by sliding the leading edge 51 from the position N1 to the position N3e through the position N2 due to the position N1 and the position N3e. The position N2 is away from the edge ED of the upper surface SF1 of the glass substrate 4. The position N3e is located at the edge ED of the upper surface SF1 of the glass substrate 4.
溝槽線TL係以成為無裂痕狀態之方式形成,即,於溝槽線TL之下方,玻璃基板4於與溝槽線TL之延伸方向(圖4中之橫方向)交叉之方向DC(圖5)連續地連接之狀態。於無裂痕狀態中,雖然形成有由塑性變形而形成之溝槽線TL,但不形成沿著其之裂痕。為了獲得適當之無裂痕狀態,而調整施加至刃前緣51之負載,以使其小至於溝槽線TL形成時間點不產生裂痕之程度,且大至產生如成為可於之後之步驟中產生裂痕之內部應力之狀態的塑性變形之程度。The trench line TL is formed in a crack-free state, that is, below the trench line TL, the glass substrate 4 is in a direction DC (Figure 4) intersecting the extending direction of the trench line TL (the horizontal direction in FIG. 4). 5) The state of continuous connection. In the crack-free state, although the groove line TL formed by plastic deformation is formed, no crack is formed along it. In order to obtain a proper crack-free state, the load applied to the leading edge 51 of the blade is adjusted so that it is as small as the time when the groove line TL is formed and does not produce cracks, and so large that it can be produced in a subsequent step The degree of plastic deformation of the internal stress state of the crack.
為了形成溝槽線TL,如上所述滑動之刃前緣51最終到達位置N3e。於刃前緣51位於位置N2之時間點維持無裂痕狀態,進而,維持至刃前緣51到達位置N3e之瞬間為止。若刃前緣51到達位置N3e,則刃前緣51之稜線PS(圖1)切下玻璃基板4之上表面SF1之邊緣ED。To form the groove line TL, the sliding blade leading edge 51 finally reaches the position N3e as described above. The crack-free state is maintained at the time point when the blade front edge 51 is located at the position N2, and further, it is maintained until the moment when the blade front edge 51 reaches the position N3e. When the blade front edge 51 reaches the position N3e, the ridge line PS (FIG. 1) of the blade front edge 51 cuts off the edge ED of the upper surface SF1 of the glass substrate 4.
參照圖6及圖7,藉由上述之切下,而於位置N3e產生微細之破壞。以該破壞為起點,以將溝槽線TL附近之內部應力釋放之方式產生裂痕。具體而言,厚度方向DT之玻璃基板4之裂痕自位於玻璃基板4之上表面SF1之邊緣ED之位置N3e沿著溝槽線TL伸展(參照圖6中之箭頭)。換言之,裂痕線CL之形成開始。藉此,作為步驟S50(圖3),自位置N3e向位置N1形成裂痕線CL。Referring to FIGS. 6 and 7, by the above-mentioned cutting, a slight damage occurs at the position N3e. Taking this failure as a starting point, a crack is generated in a manner to release the internal stress near the trench line TL. Specifically, the crack of the glass substrate 4 in the thickness direction DT extends along the groove line TL from the position N3e of the edge ED of the upper surface SF1 of the glass substrate 4 (refer to the arrow in FIG. 6). In other words, the formation of the crack line CL begins. Thereby, as step S50 (FIG. 3 ), the crack line CL is formed from the position N3e to the position N1.
再者,為了使裂痕線CL之形成更加確實,亦可使刃前緣51自位置N2向位置N3e滑動之速度小於自位置N1至位置N2之速度。同樣地,亦可使於自位置N2至位置N3e施加至刃前緣51之負載大於在維持無裂痕狀態之範圍內自位置N1至位置N2之負載。Furthermore, in order to make the formation of the crack line CL more reliable, the sliding speed of the cutting edge 51 from the position N2 to the position N3e may be lower than the speed from the position N1 to the position N2. Similarly, the load applied to the leading edge 51 from the position N2 to the position N3e may be greater than the load from the position N1 to the position N2 in the range where the crack-free state is maintained.
藉由裂痕線CL,使得於溝槽線TL之下方,玻璃基板4於與溝槽線TL之延伸方向(圖6中之橫方向)交叉之方向DC(圖7)連續性之連接中斷。此處所謂「連續性之連接」,換言之,係指不由裂痕遮蔽之連接。再者,於如上所述連續性之連接中斷之狀態中,亦可經由裂痕線CL之裂痕而使玻璃基板4之部分彼此接觸。又,亦可於溝槽線TL之正下方殘留少許連續性之連接。With the crack line CL, the continuous connection of the glass substrate 4 in the direction DC (FIG. 7) crossing the extending direction of the groove line TL (the horizontal direction in FIG. 6) is interrupted under the groove line TL. The so-called "connection of continuity" here, in other words, refers to a connection that is not covered by a crack. Furthermore, in the state where the continuous connection is interrupted as described above, the parts of the glass substrate 4 can also be brought into contact with each other through the crack of the crack line CL. In addition, a little continuous connection may be left directly under the trench line TL.
裂痕線CL(圖6)沿著溝槽線TL(圖4)而伸展之方向(圖6之箭頭)與形成有溝槽線TL之方向(圖4之箭頭)相反。為了利用此種方向關係產生裂痕線CL,於為了形成溝槽線TL而將刃前緣51向方向DB(圖1)滑動時,較佳為,使角度AG2小於角度AG1。若不滿足該角度關係,則不易產生裂痕線CL。又,若角度AG1及角度AG2大致相同,則是否產生裂痕線CL容易變得不穩定。The direction in which the crack line CL (Figure 6) stretches along the groove line TL (Figure 4) (arrow in Figure 6) is opposite to the direction in which the groove line TL is formed (arrow in Figure 4). In order to generate the crack line CL using this directional relationship, when sliding the leading edge 51 in the direction DB (FIG. 1) in order to form the groove line TL, it is preferable to make the angle AG2 smaller than the angle AG1. If this angle relationship is not satisfied, the crack line CL is unlikely to occur. In addition, if the angle AG1 and the angle AG2 are substantially the same, whether the crack line CL is generated or not will easily become unstable.
其次,於步驟S60(圖3)中,沿著裂痕線CL分斷玻璃基板4。即,進行所謂之斷裂步驟。斷裂步驟可藉由對玻璃基板4施加外力而進行。例如,藉由朝向玻璃基板4之上表面SF1上之裂痕線CL(圖7)將應力施加構件(例如,稱為「斷裂棒」之構件)壓抵於下表面SF2上,而將如打開裂痕線CL之裂痕之應力向玻璃基板4施加。再者,於裂痕線CL於其形成時於厚度方向DT完全前進之情形時,裂痕線CL之形成與玻璃基板4之分斷同時產生。Next, in step S60 (FIG. 3 ), the glass substrate 4 is divided along the crack line CL. That is, the so-called breaking step is performed. The breaking step can be performed by applying an external force to the glass substrate 4. For example, by facing the crack line CL on the upper surface SF1 of the glass substrate 4 (FIG. 7), a stress applying member (for example, a member called a "breaking rod") is pressed against the lower surface SF2, and the crack is opened. The stress of the crack of the line CL is applied to the glass substrate 4. Furthermore, when the crack line CL is fully advanced in the thickness direction DT when it is formed, the formation of the crack line CL occurs simultaneously with the breaking of the glass substrate 4.
根據以上內容進行玻璃基板4之分斷。再者,上述裂痕線CL之形成步驟與所謂之斷裂步驟本質上不同。斷裂步驟係藉由將已經形成之裂痕於厚度方向進而伸展而將基板完全地分離者。另一方面,裂痕線CL之形成步驟帶來自藉由溝槽線TL之形成而獲得之無裂痕狀態向具有裂痕之狀態的變化。認為該變化係藉由無裂痕狀態所具有之內部應力之釋放而產生。The glass substrate 4 is divided according to the above. Furthermore, the step of forming the crack line CL described above is essentially different from the so-called breaking step. The fracture step is to completely separate the substrate by extending the formed crack in the thickness direction. On the other hand, the formation step of the crack line CL comes from a change from a crack-free state to a cracked state obtained by the formation of the trench line TL. It is believed that this change is caused by the release of internal stress in the crack-free state.
(比較例1) 參照圖8,本比較例之刃前緣59之頂點PP設置於4個面SE1~SE4相交之部位。自頂點PP設置有4個稜線PS1~PS4。於該情形時,於圖4之步驟中,可將玻璃基板4之上表面SF1之邊緣ED利用稜線PS1~PS4之任一者切下。因此,與本實施形態同樣地,具有容易確實地形成裂痕線CL之優點。另一方面,刃前緣59之形成需要較高之加工精度,因此具有其形成並不容易之缺點。其原因在於,如本比較例般於由面SE1~SE4相交之部位設置刃前緣之頂點PP之情形時,必須以通過該等之中3個面相交之點之方式,使剩餘之1個面之位置一致。(Comparative example 1) Referring to FIG. 8, the vertex PP of the cutting edge 59 of this comparative example is set at the intersection of the four surfaces SE1 to SE4. Four ridge lines PS1 to PS4 are provided from the vertex PP. In this case, in the step of FIG. 4, the edge ED of the upper surface SF1 of the glass substrate 4 can be cut off by any one of the ridge lines PS1 to PS4. Therefore, like the present embodiment, there is an advantage that the crack line CL can be easily and reliably formed. On the other hand, the formation of the leading edge 59 requires high machining accuracy, and therefore has the disadvantage that its formation is not easy. The reason is that when the apex PP of the cutting edge is set at the intersection of the surfaces SE1~SE4 as in this comparative example, it is necessary to pass the point where the three surfaces intersect to make the remaining one The positions of the faces are the same.
(比較例2) 於本比較例中,將刃前緣51之滑動方向設為與方向DB(圖1)相反者。於該情形時,於圖4之步驟中,由頂面SD1而非稜線PS切下玻璃基板4之上表面SF1之邊緣ED。即,於切下時,於上述本實施形態中銳利之稜線PS起作用,相對於此,於本比較例中,平坦之頂面SD1起作用。因此,於本比較例中,變得不易產生成為裂痕線CL之形成開始之契機之微細之破壞。因此,確實地不易形成裂痕線CL。(Comparative example 2) In this comparative example, the sliding direction of the cutting edge 51 is set to be the opposite of the direction DB (FIG. 1 ). In this case, in the step of FIG. 4, the edge ED of the upper surface SF1 of the glass substrate 4 is cut from the top surface SD1 instead of the ridge line PS. That is, at the time of cutting, the sharp ridge line PS in the above-mentioned present embodiment functions. In contrast, in this comparative example, the flat top surface SD1 functions. Therefore, in this comparative example, it becomes less likely to produce the minute damage which is an opportunity to start the formation of the crack line CL. Therefore, it is surely difficult to form the crack line CL.
(效果) 根據本實施形態,第1,可容易地準備刃前緣51。其原因在於,與上述比較例1不同,刃前緣51之頂點係作為頂面SD1、側面SD2及側面SD3之3個面相交之部位而設置。假設,於藉由超過3個面相交之部位而設置刃前緣之頂點之情形時,必須以通過3個面相交之點之方式,使剩餘之面之位置一致。因此,需要較高之加工精度。相對於此,於藉由3個面相交之部位而設置刃前緣之頂點之情形時,不需要那麼高之加工精度。第2,可更確實地形成沿著溝槽線TL之裂痕線CL。其原因在於,與上述比較例2不同,為了形成溝槽線TL而滑動之刃前緣51之稜線PS切下玻璃基板4之上表面SF1之邊緣ED。藉由該切下,而以較高之確實性獲得裂痕線CL之形成開始之契機。(effect) According to this embodiment, first, the blade front edge 51 can be easily prepared. The reason for this is that, unlike Comparative Example 1 described above, the apex of the blade front edge 51 is provided as a location where the three surfaces of the top surface SD1, the side surface SD2, and the side surface SD3 intersect. Suppose that when the apex of the leading edge of the blade is set by the part where more than 3 faces intersect, the position of the remaining faces must be consistent by passing through the intersecting point of the 3 faces. Therefore, higher machining accuracy is required. On the other hand, when the apex of the leading edge of the blade is set by the part where the three faces intersect, such high machining accuracy is not required. Second, the crack line CL along the trench line TL can be formed more reliably. The reason is that, unlike the above-mentioned comparative example 2, the ridge line PS of the blade front edge 51 that slides to form the groove line TL cuts the edge ED of the upper surface SF1 of the glass substrate 4. With this cutting, the opportunity to start the formation of the crack line CL is obtained with higher certainty.
<實施形態2> 再次,參照圖4,於本實施形態中,對在玻璃基板4之上表面SF1上刃前緣51會滑動之位置供給潤滑劑。換言之,形成溝槽線TL(圖4)之步驟(圖3:步驟S30)如圖9所示,包含供給潤滑劑之步驟S31、及於供給有潤滑劑之位置使刃前緣51滑動之步驟S32。為了實施步驟S31,例如,只要於柄52(圖1)設置潤滑劑供給部(未圖示)即可。再者,關於該等以外之構成,由於與上述實施形態1之構成大致相同,故而不重複其說明。又,步驟S31亦能夠應用於下述實施形態3~5。<Embodiment 2> Again, referring to FIG. 4, in this embodiment, the lubricant is supplied to the position where the leading edge 51 of the upper surface SF1 of the glass substrate 4 can slide. In other words, the step of forming the groove line TL (FIG. 4) (FIG. 3: Step S30) is shown in FIG. 9, and includes the step S31 of supplying lubricant and the step of sliding the leading edge 51 of the blade at the position where the lubricant is supplied. S32. In order to implement step S31, for example, what is necessary is just to provide a lubricant supply part (not shown) in the handle 52 (FIG. 1). In addition, since the structure other than these is substantially the same as the structure of the said Embodiment 1, the description is not repeated. In addition, step S31 can also be applied to the following embodiments 3 to 5.
於本實施形態中,與實施形態1同樣,選擇方向DB(圖1)作為刃前緣51之前進方向。於對刃前緣51之負載相同之條件下,向方向DB之滑動與向其相反方向之滑動相比,對刃前緣51之損傷容易變大。根據本實施形態,可有效地抑制該損傷。藉此,可延長刃前緣之壽命。In this embodiment, as in the first embodiment, the direction DB (FIG. 1) is selected as the forward direction of the blade edge 51. Under the condition of the same load on the blade leading edge 51, the sliding in the direction DB is more likely to damage the blade leading edge 51 than the sliding in the opposite direction. According to this embodiment, this damage can be effectively suppressed. In this way, the life of the leading edge of the blade can be extended.
<實施形態3> 參照圖10,於步驟S10(圖3)中,準備與上述實施形態1同樣之玻璃基板4。但是,於本實施形態中,於玻璃基板4之上表面SF1上設置有輔助線AL。參照圖11,輔助線AL具有輔助溝槽線TLa及輔助裂痕線CLa。輔助溝槽線TLa具有槽形狀。輔助裂痕線CLa係藉由厚度方向DT之玻璃基板4之裂痕沿著輔助溝槽線TLa延伸而構成。<Embodiment 3> Referring to FIG. 10, in step S10 (FIG. 3), the same glass substrate 4 as in the first embodiment described above is prepared. However, in this embodiment, the auxiliary line AL is provided on the upper surface SF1 of the glass substrate 4. 11, the auxiliary line AL has an auxiliary groove line TLa and an auxiliary crack line CLa. The auxiliary trench line TLa has a groove shape. The auxiliary crack line CLa is formed by the crack of the glass substrate 4 in the thickness direction DT extending along the auxiliary groove line TLa.
於本實施形態中,輔助線AL係藉由同時形成輔助溝槽線TLa及輔助裂痕線CLa之步驟而設置於玻璃基板4之上表面SF1。此種輔助線AL可藉由通常之典型性之切割方法而形成。例如,此種輔助線AL如圖10之箭頭所示,可藉由將刃前緣擱置於玻璃基板4之上表面SF1之邊緣ED,然後使其於上表面SF1上移動而進行。藉由擱置時之衝擊而產生微細之裂痕,從而,於形成輔助溝槽線TLa時,能夠容易地同時形成輔助裂痕線CLa。為了抑制對擱置時之刃前緣及玻璃基板4之損傷,該刃前緣較佳為具有與刃前緣51之形狀不同之適合於擱置之形狀者。具體而言,刃前緣較佳為能夠旋動地保持者(輪型者)。換言之,刃前緣較佳為於玻璃基板4上旋動者而並非滑動者。再者,輔助線AL之起點於圖10中為邊緣ED,但亦可自邊緣ED離開。In the present embodiment, the auxiliary line AL is provided on the upper surface SF1 of the glass substrate 4 by simultaneously forming the auxiliary trench line TLa and the auxiliary crack line CLa. Such auxiliary line AL can be formed by a usual typical cutting method. For example, such auxiliary line AL, as shown by the arrow in FIG. 10, can be performed by placing the cutting edge on the edge ED of the upper surface SF1 of the glass substrate 4, and then moving it on the upper surface SF1. The minute cracks are generated by the impact at the time of leaving, so that when the auxiliary groove line TLa is formed, the auxiliary crack line CLa can be easily formed at the same time. In order to prevent damage to the leading edge of the blade and the glass substrate 4 when placed, the leading edge of the blade preferably has a shape different from the shape of the leading edge 51 and suitable for placing. Specifically, the leading edge of the blade is preferably a holder capable of rotating (wheel type). In other words, the leading edge of the blade is preferably the one that rotates on the glass substrate 4 rather than the one that slides. Furthermore, the starting point of the auxiliary line AL is the edge ED in FIG. 10, but it can also be separated from the edge ED.
其次,於步驟S20(圖3)中,準備與實施形態1同樣之刃前緣51。再者,為了使上述輔助線AL用之刃前緣之準備容易,亦可使用該刃前緣51形成上述之輔助線AL。或者,亦可使用具有與刃前緣51之形狀同樣之形狀之刃前緣形成上述輔助線AL。Next, in step S20 (FIG. 3), the same blade edge 51 as in the first embodiment is prepared. Furthermore, in order to facilitate the preparation of the blade front edge for the auxiliary line AL, the blade front edge 51 may also be used to form the auxiliary line AL described above. Alternatively, a cutting edge having the same shape as that of the cutting edge 51 may be used to form the auxiliary line AL.
參照圖12,其次,於步驟S30(圖3)中形成溝槽線TL。具體而言,進行以下之步驟。Referring to FIG. 12, secondly, a trench line TL is formed in step S30 (FIG. 3). Specifically, perform the following steps.
首先,進行與實施形態1同樣之動作。具體而言,於位置N1將刃前緣51(圖1)之頂點PP壓抵於上表面SF1。其次,使經壓抵之刃前緣51於玻璃基板4之上表面SF1上向方向DB(圖1)滑動(參照圖12之箭頭)。藉此,溝槽線TL以無裂痕狀態形成於上表面SF1上。First, the same operation as in the first embodiment is performed. Specifically, the apex PP of the cutting edge 51 (FIG. 1) is pressed against the upper surface SF1 at the position N1. Next, the pressed blade front edge 51 is slid in the direction DB (FIG. 1) on the upper surface SF1 of the glass substrate 4 (refer to the arrow in FIG. 12). Thereby, the trench line TL is formed on the upper surface SF1 in a crack-free state.
於本實施形態中,溝槽線TL之形成係藉由使刃前緣51於位置N1及位置N3a之間自位置N1經由位置N2向位置N3a滑動而進行。位置N3a配置於輔助線AL上。位置N2配置於位置N1與位置N3a之間。較佳為,刃前緣51超過輔助線AL上之位置N3a進而滑動至位置N4為止。較佳為,位置N4自邊緣ED離開。In this embodiment, the groove line TL is formed by sliding the cutting edge 51 between the position N1 and the position N3a from the position N1 through the position N2 to the position N3a. The position N3a is arranged on the auxiliary line AL. The position N2 is arranged between the position N1 and the position N3a. Preferably, the cutting edge 51 exceeds the position N3a on the auxiliary line AL and then slides to the position N4. Preferably, the position N4 is away from the edge ED.
為了形成溝槽線TL,如上所述滑動之刃前緣51於位置N3a與輔助線AL交叉。因此,刃前緣51之稜線PS(圖1)亦與輔助線AL交叉。藉由該交叉而於位置N3a產生微細之破壞。以該破壞為起點,而以釋放溝槽線TL附近之內部應力之方式產生裂痕。具體而言,厚度方向DT之玻璃基板4之裂痕自位於輔助線AL上之位置N3a沿著溝槽線TL伸展(參照圖13之箭頭)。換言之,開始裂痕線CL之形成(圖13)。藉此,作為步驟S50(圖3),自位置N3a向位置N1形成裂痕線CL。於形成裂痕線CL之後,與實施形態1同樣,藉由裂痕線CL,使得於溝槽線TL之下方,玻璃基板4於與溝槽線TL交叉之方向連續性之連接中斷。In order to form the groove line TL, the sliding blade leading edge 51 crosses the auxiliary line AL at the position N3a as described above. Therefore, the ridge line PS (FIG. 1) of the cutting edge 51 also crosses the auxiliary line AL. By this intersection, a slight damage is generated at the position N3a. Taking this failure as a starting point, a crack is generated in a manner to release the internal stress near the trench line TL. Specifically, the crack of the glass substrate 4 in the thickness direction DT extends along the groove line TL from the position N3a on the auxiliary line AL (refer to the arrow in FIG. 13). In other words, the formation of the crack line CL begins (Figure 13). Thereby, as step S50 (FIG. 3), the crack line CL is formed from the position N3a to the position N1. After the crack line CL is formed, as in the first embodiment, the crack line CL causes the continuous connection of the glass substrate 4 in the direction crossing the groove line TL under the groove line TL to be interrupted.
刃前緣51到達位置N3a之後,自玻璃基板4離開。較佳為,刃前緣51超過位置N3a滑動至位置N4為止之後,自玻璃基板4離開。After the blade edge 51 reaches the position N3a, it is separated from the glass substrate 4. Preferably, after the blade leading edge 51 slides beyond the position N3a to the position N4, it moves away from the glass substrate 4.
其次,於步驟S60(圖3)中,與實施形態1同樣地,沿著裂痕線CL分斷玻璃基板4。根據以上內容,進行本實施形態之玻璃基板4之分斷方法。Next, in step S60 (FIG. 3 ), similarly to Embodiment 1, the glass substrate 4 is divided along the crack line CL. Based on the above, the method of cutting the glass substrate 4 of this embodiment is performed.
根據本實施形態,第1,以與實施形態1同樣之理由,可容易地準備刃前緣51。第2,與實施形態1同樣地,可更確實地形成沿著溝槽線TL之裂痕線CL。其原因在於,為了形成溝槽線TL而滑動之刃前緣51之稜線PS向設置於玻璃基板4之上表面SF1之輔助線AL與藉由滑動之刃前緣51之頂點而形成之溝槽線TL交叉的位置N3a(圖12)局部地施加應力。藉由該應力施加,而以較高之確實性獲得裂痕線CL之形成開始之契機。According to this embodiment, first, for the same reason as in the first embodiment, the cutting edge 51 can be easily prepared. Second, as in the first embodiment, the crack line CL along the trench line TL can be formed more reliably. The reason is that the ridge line PS of the sliding edge 51 to form the groove line TL is directed toward the auxiliary line AL provided on the upper surface SF1 of the glass substrate 4 and the groove formed by the apex of the sliding edge 51 The position N3a (FIG. 12) where the line TL intersects locally applies stress. With the application of the stress, an opportunity to start the formation of the crack line CL is obtained with higher certainty.
<實施形態4> 於本實施形態中,與實施形態3不同,輔助線AL(圖11及圖12)所具有之輔助溝槽線TLa及輔助裂痕線CLa之各者係藉由類似於實施形態1中所說明之溝槽線TL及裂痕線CL之形成方法的方法而形成。以下,對該方法具體地進行說明。<Embodiment 4> In this embodiment, different from the third embodiment, the auxiliary groove line TLa and the auxiliary crack line CLa of the auxiliary line AL (FIG. 11 and FIG. 12) are similar to those described in the first embodiment. The trench line TL and the crack line CL are formed by the method of forming. Hereinafter, this method will be specifically described.
首先,準備使用於輔助線AL之形成之刃前緣。該刃前緣亦可與刃前緣51(圖1及圖2)相同。即,輔助線AL之形成與然後形成之溝槽線TL之形成亦可藉由共通之刃前緣51而進行。或者,作為用以形成輔助線AL之刃前緣,亦可準備與刃前緣51不同之刃前緣(以下,稱為「輔助刃前緣」)。輔助刃前緣亦可具有與刃前緣51(圖1及圖2)之形狀相同之形狀。或者,輔助刃前緣亦可具有與刃前緣51之形狀不同之形狀。於輔助刃前緣具有與刃前緣51之形狀不同之形狀之情形時,較佳亦為,輔助刃前緣具有形成頂點PP及稜線PS之頂面SD1、側面SD2及側面SD3之構成,上述形狀之差異係由該等構成間之配置之差異所引起者。此處考慮之刃前緣之「形狀」係刃前緣中頂點PP附近之部分,即對玻璃基板4起作用之部分之形狀,自該作用部分離開之部分之形狀通常並不重要。以下,為了不贅述,存在將使用於輔助線AL之形成之刃前緣無論其為刃前緣51或者為輔助刃前緣均僅稱為「刃前緣」之情形。First, prepare the leading edge for the formation of the auxiliary line AL. The blade front edge may also be the same as the blade front edge 51 (FIG. 1 and FIG. 2). That is, the formation of the auxiliary line AL and the formation of the trench line TL formed thereafter can also be performed by the common blade edge 51. Alternatively, as the leading edge for forming the auxiliary line AL, a leading edge different from the leading edge 51 (hereinafter, referred to as "auxiliary leading edge") may be prepared. The auxiliary blade front edge may also have the same shape as that of the blade front edge 51 (FIG. 1 and FIG. 2). Alternatively, the auxiliary blade front edge may have a shape different from that of the blade front edge 51. When the auxiliary blade front edge has a shape different from that of the blade front edge 51, it is also preferable that the auxiliary blade front edge has a top surface SD1, a side surface SD2, and a side surface SD3 forming the apex PP and the ridge line PS. The difference in shape is caused by the difference in the configuration of these components. The "shape" of the leading edge considered here is the part near the apex PP in the leading edge, that is, the shape of the part that acts on the glass substrate 4, and the shape of the part away from the acting part is usually not important. Hereinafter, in order not to repeat the description, there are cases in which the blade front edge used for the formation of the auxiliary line AL is simply referred to as the “blade front edge” whether it is the blade front edge 51 or the auxiliary blade front edge.
參照圖14,其次,藉由類似於溝槽線TL之形成(圖4)之方法,而以無裂痕狀態形成輔助溝槽線TLa。參照圖15,其次,藉由類似於沿著溝槽線TL之裂痕線CL之形成方法(圖6)之方法,而形成沿著輔助溝槽線TLa(圖14)之輔助溝槽線TLa。根據以上內容,形成輔助線AL(圖11)。Referring to FIG. 14, secondly, the auxiliary trench line TLa is formed in a crack-free state by a method similar to the formation of the trench line TL (FIG. 4 ). Referring to FIG. 15, secondly, the auxiliary trench line TLa along the auxiliary trench line TLa (FIG. 14) is formed by a method similar to the method for forming the crack line CL along the trench line TL (FIG. 6 ). Based on the above, the auxiliary line AL is formed (Figure 11).
其次,與實施形態3同樣地,於步驟S30及S50(圖3)中,形成溝槽線TL(圖12)及裂痕線CL(圖13),於步驟S60(圖3)中,沿著裂痕線CL分斷玻璃基板4。根據以上內容,進行本實施形態之玻璃基板4之分斷方法。Next, as in the third embodiment, in steps S30 and S50 (FIG. 3), the groove line TL (FIG. 12) and the crack line CL (FIG. 13) are formed, and in step S60 (FIG. 3), along the crack The line CL breaks the glass substrate 4. Based on the above, the method of cutting the glass substrate 4 of this embodiment is performed.
於本實施形態中,於溝槽線TL(圖12)之形成時施加至刃前緣51之負載與於輔助溝槽線TLa(圖14)之形成時施加至刃前緣之負載相比較大。根據本發明者之實驗性之研究,藉由如此對負載設置差異,可更確實地產生裂痕線CL。In this embodiment, the load applied to the leading edge 51 when the groove line TL (FIG. 12) is formed is larger than the load applied to the leading edge when the auxiliary groove line TLa (FIG. 14) is formed . According to the experimental research of the inventor, by setting the difference in the load in this way, the crack line CL can be generated more reliably.
較佳為,溝槽線TL(圖12)之形成時之角度AG2(圖1)小於輔助溝槽線TLa之形成時之角度AG2(圖1)。藉由使用此種角度關係,尤其,即便於用以形成輔助溝槽線TLa之刃前緣為刃前緣51或者為具有與刃前緣51之形狀相同之形狀之輔助刃前緣之情形時,亦容易設置上述負載之差異。該理由在於,於刃前緣之形狀同樣之情形時,角度AG2越小,則能夠以無裂痕狀態形成溝槽線TL(或輔助溝槽線TLa)之負載越大。於溝槽線TL之形成時,若角度AG2過大,則難以同時實現以無裂痕狀態形成溝槽線TL與使用較輔助溝槽線TLa之形成時之負載更大之負載。相對於此,於溝槽線TL(圖12)之形成時之角度AG2(圖1)小於輔助溝槽線TLa之形成時之角度AG2(圖1)之情形時,於溝槽線TL之形成時,容易使用較輔助溝槽線TLa之形成時之負載更大之負載。因此,無須擔心對溝槽線TL用之刃前緣51應用面向高負載之刃前緣設計,且對輔助溝槽線TLa用之刃前緣應用面向低負載之刃前緣設計。因此,於輔助溝槽線TLa之形成時,可使用溝槽線TL之形成時所使用之刃前緣51或具有與其形狀相同之形狀之輔助刃前緣。Preferably, the angle AG2 (FIG. 1) when the trench line TL (FIG. 12) is formed is smaller than the angle AG2 (FIG. 1) when the auxiliary trench line TLa is formed. By using this angle relationship, especially, even when the leading edge used to form the auxiliary groove line TLa is the leading edge 51 or the auxiliary leading edge having the same shape as the leading edge 51 , It is also easy to set the above load difference. The reason is that when the shape of the cutting edge is the same, the smaller the angle AG2, the greater the load that can form the groove line TL (or the auxiliary groove line TLa) in a crack-free state. During the formation of the trench line TL, if the angle AG2 is too large, it is difficult to simultaneously realize the formation of the trench line TL in a crack-free state and the use of a larger load than the auxiliary trench line TLa. In contrast, when the angle AG2 (FIG. 1) when the trench line TL (FIG. 12) is formed is smaller than the angle AG2 when the auxiliary trench line TLa is formed (FIG. 1), when the trench line TL is formed At this time, it is easy to use a load larger than the load when the auxiliary trench line TLa is formed. Therefore, there is no need to worry about applying a high-load-oriented blade front design to the blade front edge 51 for the groove line TL, and applying a low-load blade front design to the blade front edge for the auxiliary groove line TLa. Therefore, when forming the auxiliary groove line TLa, the cutting edge 51 used in the formation of the groove line TL or the auxiliary cutting edge having the same shape as the auxiliary cutting edge can be used.
於如上所述對角度AG2(圖1)設置差異之情形時,作為用以形成輔助溝槽線TLa之刃前緣,較佳為,與用以形成溝槽線TL之刃前緣51不同地,準備輔助刃前緣。藉此,可於刃前緣51之角度AG2適合於溝槽線TL之形成之狀態下固定刃前緣51之姿勢。換言之,於輔助溝槽線TLa之形成步驟與溝槽線TL之形成步驟之間,不需要用以使角度AG2最佳化之刃前緣51之姿勢調整。In the case where the angle AG2 (FIG. 1) is different as described above, the leading edge for forming the auxiliary groove line TLa is preferably different from the leading edge 51 for forming the groove line TL , Prepare the leading edge of the auxiliary blade. Thereby, the posture of the blade front edge 51 can be fixed in a state where the angle AG2 of the blade front edge 51 is suitable for the formation of the groove line TL. In other words, between the step of forming the auxiliary groove line TLa and the step of forming the groove line TL, the posture adjustment of the blade leading edge 51 for optimizing the angle AG2 is not required.
<實施形態5> 參照圖16及圖17,於本實施形態中,於溝槽線TL之形成時使用刃前緣51,於輔助溝槽線TLa之形成時,使用輔助刃前緣51a作為實施形態4中所說明之輔助刃前緣。刃前緣51之形狀與輔助刃前緣51a之形狀相互不同。例如,於頂點PP(參照圖2)之附近,刃前緣51及輔助刃前緣51a之各者具有與稜線PS垂直之剖面之稜線PS之角度AP及APa,角度AP大於角度APa。再者,關於該等以外之構成,由於與上述實施形態4之構成大致相同,故而不重複其說明。<Embodiment 5> 16 and 17, in this embodiment, the leading edge 51 is used in the formation of the groove line TL, and the auxiliary leading edge 51a is used in the formation of the auxiliary groove line TLa as described in the fourth embodiment. The leading edge of the auxiliary blade. The shape of the leading edge 51 and the shape of the auxiliary leading edge 51a are different from each other. For example, in the vicinity of the vertex PP (refer to FIG. 2), each of the blade front edge 51 and the auxiliary blade front edge 51a has the angles AP and APa of the ridge line PS of the cross section perpendicular to the ridge line PS, and the angle AP is greater than the angle APa. In addition, since the structure other than these is substantially the same as the structure of the said Embodiment 4, the description is not repeated.
根據本實施形態,於輔助溝槽線TLa之形成時與溝槽線TL之形成時,使用具有不同之形狀之刃前緣。藉此,作為刃前緣之形狀,於輔助溝槽線TLa及溝槽線TL之各者之形成時,可使用適合相對低負載者及適合高負載者。因此,於輔助溝槽線TLa及溝槽線TL之形成時可更確實地獲得無裂痕狀態,且可自輔助溝槽線TLa及溝槽線TL之各者更確實地產生輔助裂痕線CLa及裂痕線CL。According to this embodiment, in the formation of the auxiliary trench line TLa and the formation of the trench line TL, the cutting edges having different shapes are used. Thereby, as the shape of the cutting edge, when forming each of the auxiliary groove line TLa and the groove line TL, those suitable for relatively low load and those suitable for high load can be used. Therefore, when the auxiliary trench line TLa and the trench line TL are formed, a crack-free state can be obtained more reliably, and the auxiliary crack line CLa and CLa can be generated more reliably from each of the auxiliary trench line TLa and the trench line TL. Crack line CL.
再者,於上述各實施形態中對上表面SF1之邊緣為長方形狀之情形時進行了圖示,但亦可使用其他形狀。又,對上表面SF1平坦之情形時進行了說明,但上表面亦可彎曲。又,對溝槽線TL為直線狀之情形時進行了說明,但溝槽線TL亦可為曲線狀。又,對使用玻璃基板4作為脆性基板之情形時進行了說明,但脆性基板亦可由玻璃以外之脆性材料製作,例如,可由陶瓷、矽、化合物半導體、藍寶石或石英製作。In addition, in each of the above-mentioned embodiments, the case where the edge of the upper surface SF1 has a rectangular shape is illustrated, but other shapes may also be used. In addition, the case where the upper surface SF1 is flat has been described, but the upper surface may be curved. In addition, the case where the groove line TL is linear has been described, but the groove line TL may be curved. In addition, the case where the glass substrate 4 is used as a brittle substrate has been described, but the brittle substrate may be made of brittle materials other than glass, for example, it may be made of ceramic, silicon, compound semiconductor, sapphire, or quartz.
ED:邊緣 AL:輔助線 CL:裂痕線 SD1:頂面(第1面) SD2:側面(第2面) SD3:側面(第3面) SF、SF1:上表面(一個面) PP:頂點 TL:溝槽線 PS:稜線 CLa:輔助裂痕線 TLa:輔助溝槽線 4:玻璃基板(脆性基板) 51:刃前緣 51a:輔助刃前緣ED: Edge AL: auxiliary line CL: Crack line SD1: Top surface (side 1) SD2: Side (the second side) SD3: Side (the third side) SF, SF1: upper surface (one surface) PP: Vertex TL: groove line PS: ridgeline CLa: auxiliary crack line TLa: auxiliary groove line 4: Glass substrate (brittle substrate) 51: Blade Front Edge 51a: auxiliary blade leading edge
[圖1]係概略性地表示本發明之實施形態1之脆性基板之分斷方法中所使用的切割器具之構成之側視圖。 [圖2]係圖1之箭頭II之視點之概略俯視圖。 [圖3]係概略性地表示本發明之實施形態1~5之脆性基板之分斷方法之構成的流程圖。 [圖4]係概略性地表示本發明之實施形態1之脆性基板之分斷方法之第1步驟的俯視圖。 [圖5]係沿著圖4之線V-V之概略端面圖。 [圖6]係概略性地表示本發明之實施形態1之脆性基板之分斷方法之第2步驟的俯視圖。 [圖7]係沿著圖6之線VII-VII之概略端面圖。 [圖8]係概略性地表示比較例之脆性基板之分斷方法中所使用的切割器具之構成之俯視圖。 [圖9]係概略性地表示本發明之實施形態2之脆性基板之分斷方法中的溝槽線之形成方法之構成之流程圖。 [圖10]係概略性地表示本發明之實施形態3之脆性基板之分斷方法之第1步驟之俯視圖。 [圖11]係沿著圖10之線XI-XI之概略端面圖。 [圖12]係概略性地表示本發明之實施形態3之脆性基板之分斷方法之第2步驟的俯視圖。 [圖13]係概略性地表示本發明之實施形態3之脆性基板之分斷方法之第3步驟的俯視圖。 [圖14]係概略性地表示本發明之實施形態4之脆性基板之分斷方法之第1步驟的俯視圖。 [圖15]係概略性地表示本發明之實施形態4之脆性基板之分斷方法之第2步驟的俯視圖。 [圖16]係概略性地表示本發明之實施形態5之脆性基板之分斷方法中所使用的刃前緣之構成之剖視圖。 [圖17]係概略性地表示本發明之實施形態5之脆性基板之分斷方法中所使用的輔助刃前緣之構成之剖視圖。[Fig. 1] is a side view schematically showing the structure of a cutting tool used in the method of breaking a brittle substrate according to the first embodiment of the present invention. [Fig. 2] is a schematic plan view from the point of view of arrow II in Fig. 1. [Fig. [Fig. 3] is a flowchart schematically showing the structure of the method of breaking a brittle substrate according to Embodiments 1 to 5 of the present invention. [Fig. 4] is a plan view schematically showing the first step of the method of breaking a brittle substrate according to the first embodiment of the present invention. [Fig. 5] A schematic end view taken along the line V-V in Fig. 4. [Fig. 6] is a plan view schematically showing the second step of the method of breaking a brittle substrate according to the first embodiment of the present invention. [Fig. 7] A schematic end view taken along the line VII-VII of Fig. 6. [Fig. 8] is a plan view schematically showing the configuration of the cutting tool used in the method of breaking the brittle substrate of the comparative example. [Fig. 9] is a flowchart schematically showing the structure of the method of forming trench lines in the method of breaking a brittle substrate according to the second embodiment of the present invention. [Fig. 10] A plan view schematically showing the first step of the method of breaking a brittle substrate according to Embodiment 3 of the present invention. [Fig. 11] is a schematic end view taken along the line XI-XI of Fig. 10. [Fig. 12] A plan view schematically showing the second step of the method of breaking a brittle substrate according to Embodiment 3 of the present invention. Fig. 13 is a plan view schematically showing the third step of the method of breaking a brittle substrate according to the third embodiment of the present invention. Fig. 14 is a plan view schematically showing the first step of the method of breaking a brittle substrate according to the fourth embodiment of the present invention. [Fig. 15] A plan view schematically showing the second step of the method of breaking a brittle substrate according to the fourth embodiment of the present invention. [Fig. 16] is a cross-sectional view schematically showing the structure of the cutting edge used in the method of breaking a brittle substrate according to the fifth embodiment of the present invention. Fig. 17 is a cross-sectional view schematically showing the structure of the auxiliary blade leading edge used in the method of breaking a brittle substrate according to the fifth embodiment of the present invention.
AG1:角度 AG1: Angle
AG2:角度 AG2: Angle
AX:軸向 AX: axial
DB:方向 DB: direction
DT:厚度方向 DT: thickness direction
ED:邊緣 ED: Edge
PP:頂點 PP: Vertex
PS:稜線 PS: ridge
SD1:頂面(第1面) SD1: Top surface (side 1)
SD3:側面(第3面) SD3: Side (3rd side)
SF1:上表面(一個面) SF1: Upper surface (one surface)
SF2:下表面(另一個面) SF2: Lower surface (the other side)
4:玻璃基板(脆性基板) 4: Glass substrate (brittle substrate)
50:切割器具 50: cutting tools
51:刃前緣 51: Blade Front Edge
52:柄 52: handle

Claims (4)

  1. 一種脆性基板之分斷方法,其具備如下步驟: a)準備具有設置有邊緣之一個面及與上述一個面垂直之厚度方向之脆性基板; 進而具備如下步驟: b)準備刃前緣,上述刃前緣具有:第1面;第2面,其與上述第1面相鄰;及第3面,其藉由與上述第2面相鄰而形成稜線且藉由與上述第1面及上述第2面之各者相鄰而形成頂點; 進而具備如下步驟: c)藉由於上述脆性基板之上述一個面上使上述刃前緣向自上述稜線朝向上述第1面之方向滑動,而利用塑性變形使具有槽形狀之溝槽線形成於上述脆性基板之上述一個面上,上述溝槽線係以成為無裂痕狀態之方式形成,即,於上述溝槽線之下方,上述脆性基板於與上述溝槽線交叉之方向連續地連接之狀態;上述刃前緣之上述第1面與上述脆性基板之上述一個面所成之角度,小於上述刃前緣之上述稜線與上述脆性基板之上述一個面所成之角度; 進而具備如下步驟: d)藉由利用上述步驟c)滑動之上述刃前緣之上述稜線切下上述脆性基板之上述一個面之上述邊緣,而使上述厚度方向之上述脆性基板之裂痕自上述邊緣沿著上述溝槽線伸展,藉此形成裂痕線,藉由上述裂痕線,使得於上述溝槽線之下方,上述脆性基板於與上述溝槽線交叉之方向連續性之連接中斷; 進而具備如下步驟: e)沿著上述裂痕線分斷上述脆性基板。A method for breaking a brittle substrate, which has the following steps: a) Prepare a brittle substrate with a surface provided with an edge and a thickness direction perpendicular to the above-mentioned surface; And then have the following steps: b) Prepare the blade front edge, the blade front edge has: a first surface; a second surface, which is adjacent to the first surface; and a third surface, which forms a ridge by being adjacent to the second surface and A vertex is formed by being adjacent to each of the first surface and the second surface; And then have the following steps: c) As the one surface of the brittle substrate slides the front edge of the blade in the direction from the ridge line to the first surface, a groove line having a groove shape is formed on the one of the brittle substrate by plastic deformation On the surface, the groove line is formed in a crack-free state, that is, under the groove line, the brittle substrate is continuously connected in the direction intersecting the groove line; The angle formed by the first surface and the one surface of the brittle substrate is smaller than the angle formed by the ridge line of the blade leading edge and the one surface of the brittle substrate; And then have the following steps: d) Cut the edge of the one surface of the fragile substrate by using the ridge line of the leading edge of the blade that slides in the step c), so that the cracks of the fragile substrate in the thickness direction follow the groove from the edge The line stretches, thereby forming a crack line. By the crack line, below the groove line, the continuous connection of the brittle substrate in the direction crossing the groove line is interrupted; And then have the following steps: e) Break the brittle substrate along the crack line.
  2. 如申請專利範圍第1項之脆性基板之分斷方法,其中 於上述步驟d)中,於上述刃前緣之上述稜線切下上述脆性基板之上述一個面之上述邊緣時施加於上述刃前緣之負載,大於上述步驟c)中施加於上述刃前緣之負載。For example, the method for breaking the brittle substrate in the first item of the scope of patent application, which In the above step d), the load applied to the blade front edge when the ridge line of the blade front edge cuts the edge of the one surface of the brittle substrate is greater than the load applied to the blade front edge in the step c). load.
  3. 如申請專利範圍第1或2項之脆性基板之分斷方法,其中 於上述步驟d)中,於上述刃前緣之上述稜線切下上述脆性基板之上述一個面之上述邊緣時之上述刃前緣之滑動速度,小於上述步驟c)中之上述刃前緣之滑動速度。For example, the method of breaking the brittle substrate in item 1 or 2 of the scope of patent application, which In the above step d), the sliding speed of the cutting edge when the edge of the one surface of the brittle substrate is cut at the ridge line of the cutting edge is less than the sliding speed of the cutting edge in the step c) speed.
  4. 一種脆性基板之分斷方法,其具備如下步驟: a)準備具有一個面及與上述一個面垂直之厚度方向之脆性基板,於一個面上設置有輔助線,該輔助線具有:輔助溝槽線,其具有槽形狀;及輔助裂痕線,其係藉由上述厚度方向之上述脆性基板之裂痕沿著上述輔助溝槽線延伸而構成; 進而具備如下步驟: b)準備刃前緣,上述刃前緣具有:第1面;第2面,其與上述第1面相鄰;及第3面,其藉由與上述第2面相鄰而形成稜線且藉由與上述第1面及上述第2面之各者相鄰而形成頂點; 進而具備如下步驟: c)藉由於上述脆性基板之上述一個面上使上述刃前緣向自上述稜線朝向上述第1面之方向滑動,而利用塑性變形使具有槽形狀之溝槽線形成於上述脆性基板之上述一個面上,上述溝槽線係以成為無裂痕狀態之方式形成,即,於上述溝槽線之下方,上述脆性基板於與上述溝槽線交叉之方向連續地連接之狀態;上述刃前緣之上述第1面與上述脆性基板之上述一個面所成之角度,小於上述刃前緣之上述稜線與上述脆性基板之上述一個面所成之角度; 進而具備如下步驟: d)藉由利用上述步驟c)滑動之上述刃前緣之上述稜線與設置於上述脆性基板之上述一個面上之上述輔助線交叉,而使上述厚度方向之上述脆性基板之裂痕自上述輔助線沿著上述溝槽線伸展,藉此形成裂痕線,藉由上述裂痕線,使得於上述溝槽線之下方,上述脆性基板於與上述溝槽線交叉之方向連續性之連接中斷; 進而具備如下步驟: e)沿著上述裂痕線分斷上述脆性基板; 上述步驟a)包含如下步驟: a1)準備上述刃前緣及輔助刃前緣之任一者,上述輔助刃前緣具有:第1面;第2面,其與上述第1面相鄰;及第3面,其係藉由與上述第2面相鄰而形成稜線且藉由與上述第1面及上述第2面之各者相鄰而形成頂點;進而包含如下步驟: a2)藉由使上述刃前緣及上述輔助刃前緣之任一者於上述脆性基板之上述一個面上向自上述稜線朝向上述第1面之方向滑動,而利用塑性變形使上述輔助溝槽線形成於上述脆性基板之上述一個面上,上述輔助溝槽線係以形成無裂痕狀態之方式形成,即,於上述輔助溝槽線之下方,上述脆性基板於與上述輔助溝槽線交叉之方向連續地連接之狀態; 進而包含如下步驟: a3)藉由使上述厚度方向之上述脆性基板之裂痕沿著上述輔助溝槽線伸展,而形成上述輔助裂痕線,藉由上述輔助裂痕線,使得於上述輔助溝槽線之下方,上述脆性基板於與上述溝槽線交叉之方向連續性之連接中斷。A method for breaking a brittle substrate, which has the following steps: a) Prepare a brittle substrate with one surface and a thickness direction perpendicular to the above one surface, and an auxiliary line is arranged on one surface. The auxiliary line has: auxiliary groove lines having a groove shape; and auxiliary crack lines, which are Formed by the cracks of the brittle substrate in the thickness direction extending along the auxiliary groove line; And then have the following steps: b) Prepare the cutting edge, the cutting edge has: a first surface; a second surface, which is adjacent to the first surface; and a third surface, which forms a ridge by being adjacent to the second surface and A vertex is formed by being adjacent to each of the first surface and the second surface; And then have the following steps: c) As the one surface of the brittle substrate slides the blade leading edge in the direction from the ridge line to the first surface, a groove line having a groove shape is formed on the one of the brittle substrate by plastic deformation On the surface, the groove line is formed in a non-cracked state, that is, under the groove line, the brittle substrate is continuously connected in a direction intersecting the groove line; The angle formed by the first surface and the one surface of the brittle substrate is smaller than the angle formed by the ridge line of the blade leading edge and the one surface of the brittle substrate; And then have the following steps: d) By using the above step c), the ridge line of the leading edge of the blade to be slid crosses the auxiliary line provided on the one surface of the fragile substrate, so that the cracks of the fragile substrate in the thickness direction are separated from the auxiliary line Extending along the groove line, thereby forming a crack line, by the crack line, under the groove line, the continuous connection of the brittle substrate in the direction crossing the groove line is interrupted; And then have the following steps: e) Break the above-mentioned brittle substrate along the above-mentioned crack line; The above step a) includes the following steps: a1) Prepare any one of the front edge of the blade and the front edge of the auxiliary blade. The front edge of the auxiliary blade has: a first surface; a second surface adjacent to the first surface; and a third surface by A ridge is formed adjacent to the second surface and a vertex is formed adjacent to each of the first surface and the second surface; further including the following steps: a2) By sliding any one of the leading edge of the blade and the leading edge of the auxiliary blade on the one surface of the brittle substrate in a direction from the ridge line to the first surface, the auxiliary groove is plastically deformed The line is formed on the one surface of the fragile substrate, and the auxiliary groove line is formed in a non-cracked state, that is, under the auxiliary groove line, the fragile substrate crosses the auxiliary groove line. The state of continuous connection; It further includes the following steps: a3) The auxiliary crack line is formed by extending the crack of the brittle substrate in the thickness direction along the auxiliary groove line, and the auxiliary crack line makes the brittle substrate under the auxiliary groove line The connection of the continuity in the direction crossing the groove line is interrupted.
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