JP6696263B2 - Method for scribing brittle material substrate and scribing head unit - Google Patents

Description

  The present invention relates to a scribing method for a brittle material substrate and a scribing head unit for scribing a brittle material substrate such as a glass substrate or a silicon wafer at a diamond point.

  Conventionally, a scribing tool using a scribing wheel or a diamond point made of single crystal diamond has been used to scribe a glass substrate or a silicon wafer. For glass substrates, a scribing wheel that rolls on the substrate has been mainly used, but due to advantages such as improved strength of the substrate after scribing, the use of diamond points, which are fixed blades, is also being considered. Is coming. Patent Documents 1 and 2 propose a point cutter for scribing a substrate having high hardness such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a cut point on the ridge of a pyramid or a tool having a conical tip is used.

JP, 2003-183040, A JP, 2005-079529, A

  When a glass substrate is scribed using a scribing tool using a diamond point as a tool, there is a problem that the diamond point has a short life and is damaged when it is scribed for several tens of meters.

  The present invention has been made to solve the above problems, and improves the durability of a scribing tool using a diamond point when cutting a brittle material substrate, prolongs its life, and reduces the frequency of replacement. An object of the present invention is to provide a scribing head unit that can be used and a scribing method using the same.

In order to solve this problem, the method of scribing the brittle material substrate of the present invention, a lubricant is applied along the scribing planned line to the brittle material substrate, and a scribing tool using diamond on the scribing planned line. By forming a trench line, which is a groove due to plastic deformation, on the surface of the brittle material substrate by pressing a point and moving the brittle material substrate and the scribing tool relative to each other , and causing a crack along the trench line. To scribe in.

  Here, a step of cleaning the scheduled scribe line may be included before applying the lubricant to the brittle material substrate.

  Here, a step of removing the lubricant film may be included after scribing the brittle material substrate.

  Here, a step of cleaning the points of the scribing tool after finishing the scribing may be included.

  Here, the lubricant may be either a paste or a liquid.

  Here, the lubricant may be one of lubricating oil, alcohol, a surfactant and water.

In order to solve this problem, the scribing head unit of the present invention presses the point of the scribing tool against the brittle material substrate with a predetermined load, and relatively moves it to form a groove due to plastic deformation on the surface of the brittle material substrate. A scribing head unit for scribing a certain trench line, the scribing tool having one or a plurality of points using diamond, a tool holder attached to the scribing head unit for fixing the scribing tool, and the scribing tool. And a lubricant applying unit that is attached to the head unit and applies a lubricant onto the scheduled scribing line.

  Here, the scribing head unit may include a foreign matter removing unit that removes foreign matter from the brittle material substrate along the scheduled scribing line.

Here, the foreign matter removing means may include a foreign matter removing holder attached to the scribing head unit , and a foreign matter removing member provided at a lower end of the foreign matter removing holder.

Wherein the lubricant applying unit includes a lubricant supply holder attached to the scribing head unit, and the lubricant applying member provided at the lower end of said lubricant supply holder may be provided with a.

  Here, the lubricant applying unit may include an inkjet that periodically supplies the lubricant.

  Here, the lubricant applying means may have a lubricant tank.

  According to the present invention having such characteristics, first, a lubricant is applied to the scribing line of the brittle material substrate, and the scribing tool having diamond points is used for scribing. Therefore, the diamond points are less likely to be worn, and the durability can be greatly improved. In addition, when cleaning the scheduled scribing line before applying the lubricant, foreign matter that has adhered to the brittle material substrate from the beginning or that occurs during scribing does not get caught in the brittle material substrate and the scribing tool. The effect that the damage of the points can be further reduced is obtained.

FIG. 1 is a plan view and a side view showing an example of a scribing tool used for a tool holder according to an embodiment of the present invention. FIG. 2 is a perspective view of the tool holder according to this embodiment. FIG. 3 is a front view and a side view showing an example of the scribing head unit according to the first embodiment of the invention. FIG. 4 is a flowchart showing a glass substrate cutting method according to the embodiment of the present invention. FIG. 5 is a plan view of the glass substrate according to the embodiment of the present invention. FIG. 6 is an enlarged view of a scheduled scribe line of the glass substrate in the embodiment of the present invention. FIG. 7 is a sectional view of a trench line and a crack line formed in the scribing method according to the embodiment of the present invention. FIG. 8 is a diagram showing trench lines and assist lines of the glass substrate according to the present embodiment. FIG. 9 is a front view and a side view showing a scribe head unit according to a second embodiment of the present invention. FIG. 10 is a front view and a side view showing a scribing head unit according to a third embodiment of the present invention. FIG. 11 is a front view and a side view showing a scribe head unit according to a fourth embodiment of the present invention. FIG. 12 is a front view and a side view showing a scribe head unit according to a fifth embodiment of the present invention. FIG. 13 is a front view showing a scribing head unit according to the sixth embodiment of the present invention. FIG. 14 is a front view showing a scribe head unit according to the seventh embodiment of the present invention. FIG. 15 is a front view and a side view showing a scribing head unit according to an eighth embodiment of the present invention. FIG. 16 is a front view and a side view showing a scribe head unit according to a ninth embodiment of the present invention. FIG. 17 is a front view showing a scribe head unit according to the tenth embodiment of the present invention.

  Next, embodiments of the present invention will be described. First, FIG. 1 is a plan view and a side view showing an example of a multipoint diamond tool (hereinafter, simply referred to as a diamond tool) 10 which is a scribing tool held by a tool holder of a scribing head unit according to the present embodiment. The diamond tool 10 is based on a polygonal prism having a constant thickness and rotationally symmetrical number of sides. In this embodiment, a square columnar base 11 having a constant thickness is made of single crystal diamond and has a through hole 12 at the center thereof. Ridges 13a to 13d parallel to the axis passing through the through hole 12 (the axis perpendicular to the paper surface in FIG. 1A) are evenly formed on the outer peripheral surface of the quadrangle in the base 11.

  In the present embodiment, as shown in FIG. 1, the base 11 is ground like chamfering from both bottom surfaces of a square pole of a square corner toward the ridge line where the outer peripheral surfaces intersect. That is, as shown in FIG. 1B, the first inclined surfaces 14a to 14d are formed by polishing from the four corners of the bottom surface on the right side of the base 11 toward the ridgeline of the base 11. At this time, the base 11 is ground so that the sides sandwiching the ridgeline and the inclined surface form the same angle, that is, the inclined surface is an isosceles triangle with one end of the ridgeline as the apex. Such an inclined surface can be easily formed by laser processing or mechanical processing. Further, mechanical polishing may be further performed after the laser processing to obtain a more precise polished surface. In this way, four points P1 to P4 should be formed on the right side in the side view of the base as shown in FIG. 1B, with the intersections of the ridgelines 13a to 13d and the first inclined surfaces 14a to 14d as vertices. You can At this time, the inclined surfaces 14a to 14d of the base 11 become the top surface. Here, the top surface refers to a surface that is in contact with two outer peripheral surfaces forming a ridge and shares one end of the ridge.

Next, the other bottom surface of the base 11 is similarly polished toward the outer periphery of the base 11 to form the second inclined surfaces 15a to 15d. At this time, polishing is performed so that a ridge line remains between the first inclined surface and the second inclined surface, and the total polishing range of the first inclined surface and the second inclined surface does not exceed the thickness of the base. To do. In this way, four points P5 to P8 are formed on the left side in the side view of the base as shown in FIG. 1B, with the intersections of the ridgelines 13a to 13d and the second inclined surfaces 15a to 15d as points. You can By thus setting the points P1 to P8 at both ends of the ridgelines 13a to 13d, it is possible to form eight points on the outer periphery of the quadrangle diamond tool 10.

  Next, the tool holder will be described. FIG. 2 is a perspective view showing the assembly of the tool holder. As shown in FIG. 2, the tool holder main body 21 that constitutes a main part of the tool holder 20 includes a holder holding portion 22a having a rectangular parallelepiped shape, and a tool attaching portion 22b having a shape in which the upper half of the rectangular parallelepiped is cut out at its tip. It consists of As shown in FIG. 2, the holder holding portion 22a is provided with through holes 23a, 23b and 24a, 24b for attachment for fixing the tool holder to the scribe head unit. The tool mounting portion 22b has a thickness adjusting groove 25 which is cut out at a position near the holder holding portion 22a and is perpendicular to the longitudinal direction. As shown in FIG. 2, the tip portion has inclined surfaces 26a and 26b cut out from the left and right, and an inclined surface 26c cut out from below. Further, a screw groove 27 is provided at a substantially central portion of the tool mounting portion 22b so as to be perpendicular to the central axis. A tool holding groove 28 having a constant depth is formed on the surface of the tool attachment portion 22b along the central axis in the longitudinal direction of the tool holder body 21 by passing through the thread groove 27, and the tool holding groove 28 is outwardly formed at the tip end portion. It is opened at an angle of about 90 °. In other words, the width of the tool holding groove 28 becomes wider toward the tip, and the angle at which the extension line of the inner wall of the groove intersects is 90 °. It is assumed that the thickness adjusting groove 25 and the tool holding groove 28 have the same depth. Here, the region of the tool holding groove 28 opened to 90 ° is a holding region for holding the above-mentioned square diamond tool 10 and projecting its tip portion to the outside.

  A holder holder 30 is attached to the upper part of the tool attaching portion 22b. The holder holder 30 has a substantially rectangular parallelepiped shape and is attached to the recess of the tool attachment portion 22b to form the rectangular parallelepiped tool holder 20. Inclined surfaces 31a and 31b corresponding to the inclined surfaces 26a and 26b of the tool attachment portion 22b are provided on the left and right ends of the holder holder 30, and an inclined surface 31c corresponding to the inclined surface 26c is provided on the upper surface. A through hole 32 is provided in the central portion.

  When holding the diamond tool 10 in the tool holder 20, first, as a thickness adjusting member, a thickness adjusting pin 33 having the same diameter as the thickness of the diamond tool 10 is inserted into the thickness adjusting groove 25, and then the tool holding groove. The diamond tool 10 is fitted into 28, a pressing member 30 is covered with a part of the diamond tool 10 protruding, and a screw 34 is tightened to fix the tool. In this way, the lower surface of the holder holder 30 is always in contact with the surface of the tool attachment portion 22b in parallel, so that the diamond tool 10 can be reliably fixed to the tip.

  FIG. 3 is a front view and a side view showing a state where the tool holder 20 having the diamond tool 10 is attached to the scribe head unit. The scribe head unit 40A is configured such that the plate-shaped head plate 41 itself moves up and down as a whole by a slide mechanism (not shown). An air cylinder 42 for scribe load is fixed to the head plate 41. At the lower end of the air cylinder 42, a rod 42a protrudes so as to extend and contract. As shown in FIG. 3B, a guide mechanism 43 and a slide portion 44 are provided below the rod 42a of the head plate 41, and the slide portion 44 is pressed downward by a predetermined load. The guide mechanism 43 holds the slide portion 44 so as to be vertically movable. The slide portion 44 is provided with an L-shaped plate 45. The plate 45 moves up and down together with the slide portion 44, but the lower limit is restricted by the stopper 46. The tool holder 20 is obliquely fixed to the plate 45 by passing screws 47a and 47b through the through holes 23b and 24b. Then, by moving the scribing head unit 40A in the direction of arrow A, scribing can be performed.

A foreign matter removing holder 51 is provided on the block 50 at the right end of the head plate 41. As shown in FIG. 3 (b), the rectangular parallelepiped block 50 projects leftward from the head plate 41 so that the foreign matter removing holder and a lubricant supply holder described later are located at the same position as the diamond tool when viewed from the side. It is a thing. Like the tool holder, the foreign matter removal holder 51 is fixed in a rectangular parallelepiped shape and is vertically fixed, and a sponge 52 is attached to the tip. The sponge 52 is a foreign matter removing member that removes the foreign matter adhering to the scheduled scribing line by contacting the substrate immediately before scribing when the scribing head unit 40A is moved in the direction of arrow A. Here, the foreign matter removing holder 51 and the sponge 52, which is a flexible foreign matter removing member at the tip thereof, constitute a foreign matter removing means attached to the scribe head unit 40A.

  A lubricant supply holder 53 is attached to the block 50 adjacent to the foreign matter removal holder 51. The lubricant supply holder 53 has a rectangular parallelepiped shape and is vertically fixed like the foreign matter removing holder 51, and a sponge 54 is attached to the tip thereof. A lubricant is supplied to the sponge 54 from a lubricant supply unit (not shown) via a lubricant supply pipe 55. The sponge 54 is a lubricant application member that applies a lubricant on the scheduled scribing line immediately before scribing. Here, the supply amount and the supply timing of the lubricant are instructed from the supply unit mounted on the scribing device. Here, the lubricant supply holder 53 and the sponge 54, which is a flexible application member at the tip thereof, constitute a lubricant application means attached to the scribe head unit 40A.

  Next, a method of dividing the glass substrate which is the brittle material substrate by using the scribe head unit 40A of the present embodiment will be described with reference to the flowchart of FIG. 4 and the plan view of the glass substrate of FIG. First, in step S1, a glass substrate 60 having a flat surface SF is prepared. When scribing the glass substrate 60, one point P1 of the diamond tool 10 of the tool holder 20 that is attached at an angle is fixed so as to contact the glass substrate 60, and the scribing head unit 40A is fixed to the glass substrate 60. It is pushed near one side 60a, moved in the direction of the arrow A shown, and slid to a position close to the other side 60b of the planned dividing line. When the scribing head unit 40A is moved in this way, the sponge 52 attached to the foreign matter removing holder 51 removes the foreign matter on the scheduled scribing line. That is, as shown in step S2 of FIG. 4, cleaning is performed along the scheduled scribe line. At this time, as shown in an enlarged view of the scheduled scribing line SIL1 in FIG. 6A, cleaning is performed on a line having a predetermined width so that the scheduled scribing line SIL1 is included in the center. By cleaning the scheduled scribing line in this manner, foreign matter is prevented from being caught between the glass substrate 60 and the cutting edge during scribing, and damage to points of the diamond tool can be reduced.

  Next, the portion that has been cleaned with respect to the scheduled scribing line SIL1 is overlaid and the lubricant is thinly applied with the sponge 54 of the lubricant supply holder 53 as shown in FIG. 6B (step S3). Then, by performing scribing with the diamond tool of the scribing head held by the holder 20, the trench line TL1 is formed along the scheduled scribing line SIL1 as shown in FIG. 5 (step S4). At this time, since the diamond tool 10 is not rolled, it is possible to scribe at the same point. Actually, by moving the scribe head unit 40A, the steps S2 to S4 will proceed almost at the same time. By doing so, the wear of the points of the diamond tool can be significantly reduced due to the lubricating effect of the lubricant, and the service life can be extended. For example, the point of the diamond tool was worn for several tens of meters when the lubricant was not applied, but the durability can be maintained for several thousand meters when the lubricant is applied.

As shown in FIG. 7A showing the cross section of the circular portion of FIG. 5A, the trench line means that only grooves due to plastic deformation are formed on the surface SF of the glass substrate 60 by scribing, and cracks are formed in the thickness direction. It is a line that does not occur. For this reason, scribing for trench line formation can be performed under wider scribing conditions, such as a lower load than in the case of forming a normal scribing line that causes cracks. Further, in the present embodiment, the side 60a is the scribe upstream side and the side 60b is the downstream side.

  Similarly, the scribing head unit 40A is moved from left to right along the scheduled scribing lines SIL2 to SIL6 on the surface SF of the glass substrate 60. As a result, the sponge 52 of the foreign matter removal holder 51 removes the foreign matter on the scheduled scribing line, the sponge 54 of the lubricant supply holder 53 applies the lubricant, and the diamond tool 10 scribes the lubricant. In this way, five more trench lines TL2 to TL6 are formed in parallel with the trench line T1.

  Next, as shown in FIG. 8, an assist line AL1 is formed so as to intersect each trench line. The assist line AL1 is preferably formed on the downstream side of each trench line, that is, at a position near the side 60b. As shown in FIG. 1, the assist line AL1 may use a scribing tool having a diamond cutting edge, or may be formed by rolling a scribing wheel. In the present embodiment, the assist line is a crack line in which a crack is formed.

  When the assist line AL1 is formed in this manner, the glass substrate 60 is divided along the assist line AL1. At this time, a crack is generated from a position where the trench lines TL1 to TL6 already formed and the assist line AL1 intersect, as shown in FIG. 7B, and the crack extends to the upstream side of each of the trench lines TL1 to TL6 (step S5). Therefore, the trench lines TL1 to TL6 change into crack lines CL1 to CL6 accompanied by cracks therebelow.

  After that, in step S6 of FIG. 4, the glass substrate 60 can be cut into a desired shape by cutting the glass substrate 60 along the crack lines CL1 to CL6.

  Further, in the present embodiment, the assist line is formed and cracks are generated by separating along the assist line, but the process may be performed without the separation of the assist line. In this case, when the assist line is formed, a crack is formed along the trench line. Also, a step of forming a crack by sliding the diamond tool in the opposite direction at the end of the trench line without forming an assist line, or a step of extending the trench line and allowing the diamond tool to pass through the edge of the substrate. The cracks can also be generated along the trench line by performing the above.

  When the point P1 in contact with the substrate is deteriorated due to wear, the point P5 can be used by removing the tool holder from the scribing head unit, rotating the tool holder 180 °, and replacing the front and rear. Alternatively, the diamond tool 10 is once removed from the tool holder 20, rotated by 90 ° and fixed to the tool holder 20 again, and another point, for example, the point P2 is brought into contact with the glass substrate 60, and the scribe scheduled line is cleaned in the same manner. Apply lubricant and scribe.

Next, another embodiment of the scribe head unit having a function of removing foreign matters and applying a lubricant will be described. 9 to 17 show scribing head units according to the second to tenth embodiments, and the same parts as those in the above-described embodiments are designated by the same reference numerals. As shown in FIG. 9, in the scribe head unit 40B of the second embodiment, the sponge 54 provided at the tip of the lubricant supply holder 53 is a sponge for applying a lubricant and removing foreign matter. Is also used. By doing so, the foreign substance removing holder 51 and the sponge 52 are not necessary, and the structure can be simplified. In this case, the block 50 may be smaller.

  FIG. 10 is a front view showing an example of the scribe head unit 40C according to the third embodiment of the present invention. As shown in this figure, a foreign matter removing holder 51 is mounted on a flat support plate 70. Similar to the block 50, the support plate 70 projects the foreign matter removal holder 51 leftward from the head plate 41 so as to be at the same position as the diamond tool when viewed from the side. The sponge 52 fixed to the tip of the foreign matter removal holder 51 is the same as that in the first embodiment. Further, an ink jet unit 72 is provided on the support plate 71 adjacent thereto. The inkjet unit 72 applies the lubricant in a pulsed manner to the surface of the glass substrate 60 from the outlet 73, and the supply amount and timing are commanded by the controller of the scribing device. In this embodiment, as in the case of the first embodiment described above, the foreign matter removal holder 51 and the sponge 52 at the tip thereof remove foreign matter from the scheduled scribing line, and then apply a lubricant to scribe. it can. Here, the inkjet unit 72 constitutes a lubricant applying means for applying a lubricant to the glass substrate.

  FIG. 11 is a front view and a side view showing a scribe head unit 40D according to the fourth embodiment. In this embodiment, a sponge 74 is attached around the lubricant discharge port 73 at the tip of the inkjet unit 72 described above. By doing so, even if the lubricant is supplied in a pulsed manner, the sponge 74 can apply the lubricant with a constant width along the scheduled scribe line as shown in FIG. 6B.

  FIG. 12 is a front view and a side view showing a scribe head unit 40E according to the fifth embodiment. In this embodiment, the sponge 74 is used as a sponge for applying a lubricant and removing foreign matter. By doing so, the foreign substance removing holder 51 and the sponge 52 are not necessary, and the structure can be simplified.

  Next, FIG. 13 is a front view showing a scribe head unit 40F according to a sixth embodiment. In this scribing head unit, the lubricant supply pipe 53 is not connected to the lubricant supply holder 53, and only the sponge 54 is held. Then, the lubricant supply holder 53 of the scribing head unit 40F is periodically moved so as to be located right above the lubricant tank 56 holding the lubricant, and is lowered to immerse the sponge 54 in the lubricant. Raise the scribe head unit 40F. Then, the scribe head unit 40F is moved in the direction of the arrow A to apply the lubricant as in the first embodiment.

  Next, FIG. 14 is a front view showing a scribe head unit 40G according to the seventh embodiment. Also in this embodiment, the lubricant supply pipe is not connected to the lubricant supply holder 53, and the foreign matter removing holder 51 and the sponge 52 are omitted. In this embodiment, as in the sixth embodiment, the lubricant is applied by periodically immersing the sponge 54 in the lubricant tank 56, and also used as a sponge for removing foreign matter. Is. As a result, the sponge 54 can wipe the planned scribe line and apply the lubricant.

  Next, FIG. 15 is a front view and a side view showing a scribe head unit 40H according to an eighth embodiment. In this embodiment, the lubricant supply pipe 55 is fixed to the position adjacent to the tool holder 20 by the holder 80 without applying the lubricant to the scheduled scribing line using a sponge or the like, and the soft tube 81 is attached to the tool holder 20. Contact. In this embodiment, the lubricant is naturally dropped by its own weight and is transmitted through the tool holder 20, and the lubricant is supplied from the tip of the diamond tool 10 to the scribe scheduled line to apply the lubricant.

  Next, FIG. 16 is a front view and a side view showing a scribe head unit 40I according to a ninth embodiment of the present invention. Also in the present embodiment, the lubricant supply pipe 55 is fixed to the position adjacent to the tool holder 20 by the holder 80, and the sponge 82 is used to contact the tool holder 20 to apply the lubricant by the tool holder 20. Is.

  FIG. 17 is a front view showing a scribe head unit 40J according to the tenth embodiment of the present invention. As shown in the figure, the scribe head unit 40J is provided with a foreign substance removal holder 51 and a sponge 52 via a block 50, but the lubricant supply holder 53 and the sponge 54 are omitted. Then, the diamond tool 10 of the tool holder 20 is periodically made to directly penetrate into the lubricant tank 56, whereby the lubricant is applied to the scheduled scribe line. Here, in the scribe head units 40F, 40G and 40J having the lubricant tank 56 according to the sixth, seventh and tenth embodiments, the lubricant tank 56 constitutes a part of the lubricant applying means.

  In each of the above-described embodiments, a scribing tool having a plurality of points made of diamond is used as shown in FIG. 1, but a plurality of points are polished on the outer periphery of a polygon from the plate thickness direction or the outer peripheral direction. The formed scribing tool may be used, or a truncated pyramid or conical scribing tool may be used.

  Here, as shown in FIG. 4, the assist line is formed after the trench line is formed. However, after the trench line is formed, the step of removing the lubricant applied to the scheduled scribe line by wiping or the like is included. Good.

  Alternatively, the point portion of the diamond tool may be cleaned after the scribing for a certain distance is completed. In cleaning, an air blow may be blown to the point portion of the blade edge, or air may be sucked from the point portion. Further, the point portion may be ultrasonically cleaned, or the lubricant or foreign matter may be removed with a sponge or the like for cleaning. When removing the lubricant, a mat may be provided at the end of the substrate, and the mat may be passed through the mat with a scribing tool for cleaning.

  In each of the above-described embodiments, sponge is used as the foreign matter removing member or the lubricant applying member, but a flexible member that achieves a similar function, such as felt, can be used.

  In the above-described third, fourth, and fifth embodiments, the lubricant is directly applied to the substrate through the discharge port 73 of the inkjet unit or soaked in a sponge or felt before scribing. A liquid having a low viscosity, for example, a lubricating oil, an alcohol such as ethanol, a surfactant, or a known lubricant such as water can be used.

  In addition, in the eighth to tenth embodiments of the above-described embodiments, in addition to the above-described low-viscosity liquid, a liquid emulsion having a high viscosity and a lubricant component or a liquid oil component dispersed in the liquid. Can be used. In this case, even if it is thick, it can spread on the substrate by its own weight and can be supplied to the scribe scheduled line. Furthermore, in the first, second, sixth, and seventh embodiments, in addition to the above-mentioned low-viscosity liquid and high-viscosity liquid, a paste-like one, that is, a lubricant liquid in the liquid is used. You may use the paste, the wax, and the cream-like thing which dispersed the oil component. Although the paste-like lubricant does not flow on the substrate by its own weight, it can be applied with a sponge, felt, etc. and supplied onto the scheduled scribing line.

Further, in each of the above-described embodiments, the substrate is scribed by moving the scribing head unit, but the scribe head unit is fixed and the substrate is moved to remove foreign matter, apply a lubricant, and scribe. May be.

  Further, in the above-described first and sixth embodiments, the foreign matter removing holder and the lubricant supply holder are mounted adjacent to each other on the same block, but unlike the fourth embodiment, the foreign matter removing holder and the lubricant supply holder are attached. Each supply holder may be individually attached to the support plate.

  INDUSTRIAL APPLICABILITY The present invention can minimize wear of diamond points when scribing a brittle material substrate with a scribing tool having diamond points, and can be effectively used in a scribing apparatus using diamond points.

10 multi-point diamond tool 11 base 12 through hole 13a to 13d ridge line 14a to 14d first inclined surface 15a to 15d second inclined surface 20 tool holder 21 tool holder main body 22a holder holding portion 22b tool holding portion 23a, 23b, 24a , 24b Through hole 25 Thickness adjusting groove 26a, 26b, 26c, 31a, 31b, 31c Inclined surface 27 Screw groove 28 Tool holding groove 30 Holder press 33 Thickness adjusting pin 34 Screw 40A-40J Scribing head unit 41 Head plate 42 Air Cylinder 43 Guide mechanism 44 Slide part 45 Plate 50 Block 51 Foreign substance removal holder 52 Sponge 53 Lubricant supply holder 54 Sponge 55 Lubricant supply pipe 56 Lubricant tank 60 Glass substrate 70, 71 Support play 72 ink jet unit 73 outlet 74 sponge 80 holder 81 tube 82 Sponge P1~P8 point SIL1~SIL6 scribed TL1~TL6 trench line AL assist line CL1~CL6 crack line

Claims (12)

Apply a lubricant to the brittle material substrate along the planned scribe line,
By pressing the point of the scribing tool using diamond on the planned scribe line and moving the brittle material substrate and the scribing tool relatively , a trench line which is a groove due to plastic deformation is formed on the surface of the brittle material substrate. Then, a method for scribing a brittle material substrate in which a scribe is performed by generating a crack along the trench line .   The method for scribing a brittle material substrate according to claim 1, further comprising: cleaning a scheduled scribing line before applying a lubricant to the brittle material substrate.   The method for scribing a brittle material substrate according to claim 1 or 2, further comprising the step of removing the lubricant film after scribing the brittle material substrate.   The method for scribing a brittle material substrate according to any one of claims 1 to 3, further comprising a step of cleaning points of a scribing tool after finishing the scribing.   The method for scribing a brittle material substrate according to claim 1, wherein the lubricant is either a paste or a liquid.   The brittle material substrate scribing method according to claim 1, wherein the lubricant is one of a lubricating oil, an alcohol, a surfactant, and water. A scribe head unit for forming a trench line, which is a groove due to plastic deformation, on the surface of a brittle material substrate by pressing a point of a scribing tool against the brittle material substrate with a predetermined load and relatively moving the point.
A scribing tool having one or more points using diamonds,
A tool holder attached to the scribing head unit for fixing the scribing tool,
A scribing head unit, which is attached to the scribing head unit, and includes a lubricant applying unit that applies a lubricant onto a scheduled scribing line. The scribe head unit is
The scribing head unit according to claim 7, further comprising foreign matter removing means for removing foreign matter from the brittle material substrate along the planned scribing line. The foreign matter removing means,
A foreign matter removal holder attached to the scribing head unit ,
The scribe head unit according to claim 8, further comprising a foreign matter removing member provided at a lower end of the foreign matter removing holder. The lubricant applying means,
A lubricant supply holder attached to the scribing head unit,
The scribe head unit according to any one of claims 7 to 9, further comprising a lubricant applying member provided at a lower end of the lubricant supply holder. The lubricant applying means,
The scribe head unit according to any one of claims 7 to 9, which has an inkjet that periodically supplies a lubricant.   The scribe head unit according to claim 7, wherein the lubricant applying unit has a lubricant tank.

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