TWI621278B - 具有應變改質表面活性區域之第三族氮化物奈米線ｌｅｄ及其製造方法 - Google Patents
具有應變改質表面活性區域之第三族氮化物奈米線ｌｅｄ及其製造方法 Download PDFInfo
- Publication number
- TWI621278B TWI621278B TW103143715A TW103143715A TWI621278B TW I621278 B TWI621278 B TW I621278B TW 103143715 A TW103143715 A TW 103143715A TW 103143715 A TW103143715 A TW 103143715A TW I621278 B TWI621278 B TW I621278B
- Authority
- TW
- Taiwan
- Prior art keywords
- indium
- semiconductor
- housing
- peaks
- atomic percent
- Prior art date
Links
- 239000002070 nanowire Substances 0.000 title claims abstract description 136
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 150000004767 nitrides Chemical class 0.000 title description 5
- 239000004065 semiconductor Substances 0.000 claims abstract description 179
- 229910052738 indium Inorganic materials 0.000 claims abstract description 163
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 162
- 238000000034 method Methods 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 22
- 229910002704 AlGaN Inorganic materials 0.000 claims description 16
- 230000004888 barrier function Effects 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 239000002105 nanoparticle Substances 0.000 claims description 4
- 238000011065 in-situ storage Methods 0.000 claims description 3
- 238000001338 self-assembly Methods 0.000 claims description 3
- 240000007594 Oryza sativa Species 0.000 claims description 2
- 235000007164 Oryza sativa Nutrition 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 235000012149 noodles Nutrition 0.000 claims description 2
- 235000009566 rice Nutrition 0.000 claims description 2
- 229910002601 GaN Inorganic materials 0.000 claims 24
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 6
- 125000006850 spacer group Chemical group 0.000 claims 6
- 239000010410 layer Substances 0.000 description 49
- 230000007547 defect Effects 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 5
- 239000002086 nanomaterial Substances 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 239000000203 mixture Substances 0.000 description 4
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- 239000002096 quantum dot Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- -1 GaN Chemical class 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 235000013339 cereals Nutrition 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 230000007847 structural defect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000011258 core-shell material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001194 electroluminescence spectrum Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 238000001127 nanoimprint lithography Methods 0.000 description 1
- 239000002061 nanopillar Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/013—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
- H10H20/0137—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials the light-emitting regions comprising nitride materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/815—Bodies having stress relaxation structures, e.g. buffer layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
- H10H20/82—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/819—Bodies characterised by their shape, e.g. curved or truncated substrates
- H10H20/821—Bodies characterised by their shape, e.g. curved or truncated substrates of the light-emitting regions, e.g. non-planar junctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/032—Manufacture or treatment of electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
- H10H20/833—Transparent materials
Landscapes
- Led Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361917046P | 2013-12-17 | 2013-12-17 | |
| US61/917,046 | 2013-12-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201530807A TW201530807A (zh) | 2015-08-01 |
| TWI621278B true TWI621278B (zh) | 2018-04-11 |
Family
ID=53403568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103143715A TWI621278B (zh) | 2013-12-17 | 2014-12-15 | 具有應變改質表面活性區域之第三族氮化物奈米線ｌｅｄ及其製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US9281442B2 (enExample) |
| EP (1) | EP3084847B1 (enExample) |
| JP (1) | JP6409063B2 (enExample) |
| TW (1) | TWI621278B (enExample) |
| WO (1) | WO2015095049A1 (enExample) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2297794B1 (en) | 2008-07-07 | 2017-09-06 | Glo Ab | Nanostructured light emitting diode |
| WO2015095049A1 (en) | 2013-12-17 | 2015-06-25 | Glo Ab | Iii-nitride nanowire led with strain modified surface active region and method of making thereof |
| WO2016022824A1 (en) | 2014-08-08 | 2016-02-11 | Glo Ab | Pixilated display device based upon nanowire leds and method for making the same |
| EP3180806A4 (en) * | 2014-08-12 | 2018-03-07 | Glo Ab | Iii-nitride nanowire led with strain modified surface active region and method of making thereof |
| US9620559B2 (en) | 2014-09-26 | 2017-04-11 | Glo Ab | Monolithic image chip for near-to-eye display |
| US10290767B2 (en) | 2015-06-09 | 2019-05-14 | The Royal Institution For The Advancement Of Learning/Mcgill University | High efficiency visible and ultraviolet nanowire emitters |
| US11322652B2 (en) * | 2015-12-14 | 2022-05-03 | Ostendo Technologies, Inc. | Methods for producing composite GaN nanocolumns and light emitting structures made from the methods |
| EP3446330A4 (en) | 2016-04-22 | 2019-12-18 | Glo Ab | DIRECT VIEW DISPLAY WITH A SMALL TILTING ANGLE AND METHOD FOR PRODUCING THE SAME |
| KR20180133436A (ko) | 2016-05-04 | 2018-12-14 | 글로 에이비 | 상이한 색상의 led를 포함하는 일체형 다색 직시형 디스플레이와 이의 제조 방법 |
| US10096469B2 (en) * | 2016-08-24 | 2018-10-09 | COMSATS Institute of Information Technology (CIIT) | Sn doped ZnS nanowires for white light source material |
| JP6662464B2 (ja) | 2016-09-29 | 2020-03-11 | 日亜化学工業株式会社 | 発光素子 |
| KR102335714B1 (ko) | 2016-10-24 | 2021-12-06 | 글로 에이비 | 발광 다이오드, 디스플레이 소자 및 직시형 디스플레이 소자 |
| KR102305344B1 (ko) | 2017-01-09 | 2021-09-27 | 글로 에이비 | 다이렉트 뷰 디스플레이를 위한 집적 반사기를 갖는 발광 다이오드 및 이의 제조 방법 |
| US10998465B2 (en) | 2017-01-09 | 2021-05-04 | Glo Ab | Light emitting diodes with integrated reflector for a direct view display and method of making thereof |
| US20180277713A1 (en) * | 2017-03-21 | 2018-09-27 | Glo Ab | Red light emitting diodes having an indium gallium nitride template layer and method of making thereof |
| JP7147132B2 (ja) * | 2017-05-31 | 2022-10-05 | セイコーエプソン株式会社 | 発光装置、プロジェクター、および発光装置の製造方法 |
| US10418499B2 (en) | 2017-06-01 | 2019-09-17 | Glo Ab | Self-aligned nanowire-based light emitting diode subpixels for a direct view display and method of making thereof |
| US11417794B2 (en) | 2017-08-15 | 2022-08-16 | Nanosys, Inc. | Method of making a semiconductor device using nano-imprint lithography for formation of a selective growth mask |
| US10439101B2 (en) * | 2017-08-18 | 2019-10-08 | Intel Corporation | Micro light-emitting diode (LED) elements and display |
| US10707374B2 (en) | 2017-09-15 | 2020-07-07 | Glo Ab | Etendue enhancement for light emitting diode subpixels |
| EP3692580A4 (en) | 2017-10-06 | 2022-07-13 | Nanosys, Inc. | LED WITH OXIDIZED METAL CONTACTS |
| US11362238B2 (en) | 2017-10-06 | 2022-06-14 | Nanosys, Inc. | Light emitting diode containing oxidized metal contacts |
| FR3076399B1 (fr) * | 2017-12-28 | 2020-01-24 | Aledia | Dispositif optoelectronique comprenant des diodes electroluminescentes tridimensionnelles |
| US10627673B2 (en) | 2018-04-06 | 2020-04-21 | Glo Ab | Light emitting diode array containing a multilayer bus electrode and method of making the same |
| US11257983B2 (en) | 2018-04-11 | 2022-02-22 | Nanosys, Inc. | Light emitting diodes formed on nanodisk substrates and methods of making the same |
| TW202431960A (zh) | 2018-04-20 | 2024-08-01 | 美商納諾西斯有限公司 | 用於直視型顯示器之子像素發光二極體及其製造方法 |
| WO2019240894A1 (en) | 2018-06-14 | 2019-12-19 | Glo Ab | Epitaxial gallium nitride based light emitting diode and method of making thereof |
| US11239212B2 (en) | 2018-08-24 | 2022-02-01 | Nanosys, Inc. | Light emitting diode array containing a black matrix and an optical bonding layer and method of making the same |
| KR102724659B1 (ko) | 2018-12-03 | 2024-10-31 | 삼성전자주식회사 | 비활성화된 영역을 포함하는 발광 다이오드 및 이의 제조방법 |
| US11637219B2 (en) | 2019-04-12 | 2023-04-25 | Google Llc | Monolithic integration of different light emitting structures on a same substrate |
| WO2020243147A1 (en) | 2019-05-30 | 2020-12-03 | Glo Ab | Light emitting diode device containing a positive photoresist insulating spacer and a conductive sidewall contact and method of making the same |
| FR3098012B1 (fr) * | 2019-06-25 | 2023-01-13 | Aledia | Procédé d'homogénéisation de la section de nanofils pour diodes électroluminescentes |
| FR3098992B1 (fr) * | 2019-07-18 | 2023-01-13 | Aledia | Diode électroluminescente et procédé de fabrication |
| GB2586862B (en) | 2019-09-06 | 2021-12-15 | Plessey Semiconductors Ltd | LED precursor incorporating strain relaxing structure |
| US11462659B2 (en) * | 2019-09-10 | 2022-10-04 | Koito Manufacturing Co., Ltd. | Semiconductor light emitting device and manufacturing method of semiconductor light emitting device |
| US11594663B2 (en) | 2019-12-20 | 2023-02-28 | Nanosys, Inc. | Light emitting diode device containing a micro lens array and method of making the same |
| US11798988B2 (en) | 2020-01-08 | 2023-10-24 | Microsoft Technology Licensing, Llc | Graded planar buffer for nanowires |
| US12074251B2 (en) | 2020-04-30 | 2024-08-27 | Samsung Electronics Co., Ltd. | Semiconductor device containing stress relaxation layer and method of making thereof |
| US11973172B2 (en) | 2020-05-18 | 2024-04-30 | Glo Technologies Llc | Subpixel light emitting diodes for direct view display and methods of making the same |
| US11488822B2 (en) | 2020-05-29 | 2022-11-01 | Microsoft Technology Licensing, Llc | SAG nanowire growth with ion implantation |
| US11929253B2 (en) * | 2020-05-29 | 2024-03-12 | Microsoft Technology Licensing, Llc | SAG nanowire growth with a planarization process |
| JP7176700B2 (ja) * | 2020-07-31 | 2022-11-22 | セイコーエプソン株式会社 | 発光装置およびプロジェクター |
| JP7520305B2 (ja) * | 2020-08-31 | 2024-07-23 | 株式会社小糸製作所 | 半導体発光素子および半導体発光素子の製造方法 |
| WO2022150162A1 (en) | 2021-01-08 | 2022-07-14 | Nanosys, Inc. | Light-emitting diode device containing microlenses and method of making the same |
| CN114122204B (zh) * | 2021-11-26 | 2024-03-12 | 江苏第三代半导体研究院有限公司 | 一种半导体外延片及其制备方法与应用 |
| US20230369535A1 (en) * | 2022-05-10 | 2023-11-16 | Meta Platforms Technologies, Llc | Nanowire architecture for micro-displays |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090096704A (ko) * | 2006-12-22 | 2009-09-14 | 큐나노 에이비 | 직립 나노와이어 구조를 갖는 ｌｅｄ 및 이를 제조하는 방법 |
| US20100276664A1 (en) * | 2006-03-10 | 2010-11-04 | Hersee Stephen D | Thin-walled structures |
| US20120225526A1 (en) * | 2007-10-04 | 2012-09-06 | Stc.Unm | NANOWIRE AND LARGER GaN BASED HEMTS |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3282174B2 (ja) * | 1997-01-29 | 2002-05-13 | 日亜化学工業株式会社 | 窒化物半導体発光素子 |
| JP4158519B2 (ja) * | 2002-12-26 | 2008-10-01 | 住友電気工業株式会社 | 白色発光素子およびその製造方法 |
| US20140012224A1 (en) * | 2006-04-07 | 2014-01-09 | The Regents Of The University Of California | Targeted hollow gold nanostructures and methods of use |
| EP2102899B1 (en) | 2007-01-12 | 2020-11-11 | QuNano AB | Nitride nanowires and method of producing such |
| JP2009105088A (ja) * | 2007-10-19 | 2009-05-14 | Panasonic Electric Works Co Ltd | 半導体発光素子およびそれを用いる照明装置ならびに半導体発光素子の製造方法 |
| SE533090C2 (sv) * | 2008-07-09 | 2010-06-22 | Qunano Ab | Nanostrukturerad ljusdiod |
| US8138493B2 (en) | 2008-07-09 | 2012-03-20 | Qunano Ab | Optoelectronic semiconductor device |
| US8932940B2 (en) * | 2008-10-28 | 2015-01-13 | The Regents Of The University Of California | Vertical group III-V nanowires on si, heterostructures, flexible arrays and fabrication |
| KR101549620B1 (ko) * | 2009-01-30 | 2015-09-02 | 삼성전자주식회사 | ｐｎ 구조를 지닌 Ｚｎ 산화물 나노 와이어 및 그 제조 방법 |
| KR20110064702A (ko) * | 2009-12-08 | 2011-06-15 | 삼성전자주식회사 | 요철 구조를 지닌 코어-쉘 나노 와이어 및 이를 이용한 열전 소자 |
| US9112240B2 (en) * | 2010-01-04 | 2015-08-18 | Nanotek Instruments, Inc. | Lithium metal-sulfur and lithium ion-sulfur secondary batteries containing a nano-structured cathode and processes for producing same |
| EP2553696A4 (en) * | 2010-04-02 | 2016-07-06 | Intel Corp | LOAD MEMORY DEVICE, METHOD OF MANUFACTURING THEREFOR, METHOD FOR PRODUCING AN ELECTRICALLY CONDUCTIVE STRUCTURE THEREFOR, MOBILE ELECTRONIC DEVICE THEREWITH AND MICROELECTRONIC DEVICE THEREWITH |
| CN103098237A (zh) * | 2010-06-18 | 2013-05-08 | Glo公司 | 纳米线发光二极管结构及其制造方法 |
| CA2802500A1 (en) * | 2010-06-24 | 2011-12-29 | Glo Ab | Substrate with buffer layer for oriented nanowire growth |
| KR20120052651A (ko) | 2010-11-16 | 2012-05-24 | 삼성엘이디 주식회사 | 나노로드 발광소자 |
| KR20120059064A (ko) | 2010-11-30 | 2012-06-08 | 삼성엘이디 주식회사 | 발광소자 및 그 제조방법 |
| JP5409707B2 (ja) * | 2011-06-15 | 2014-02-05 | シャープ株式会社 | 半導体素子、半導体素子の製造方法、発光ダイオード、光電変換素子、太陽電池、照明装置、バックライトおよび表示装置 |
| US8937297B2 (en) * | 2011-12-02 | 2015-01-20 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Optoelectronic device including nanowires with a core/shell structure |
| TW201511357A (zh) | 2013-06-07 | 2015-03-16 | Glo Ab | 多色ｌｅｄ及其製造方法 |
| WO2015095049A1 (en) | 2013-12-17 | 2015-06-25 | Glo Ab | Iii-nitride nanowire led with strain modified surface active region and method of making thereof |
-
2014
- 2014-12-15 WO PCT/US2014/070347 patent/WO2015095049A1/en not_active Ceased
- 2014-12-15 TW TW103143715A patent/TWI621278B/zh not_active IP Right Cessation
- 2014-12-15 EP EP14872419.8A patent/EP3084847B1/en active Active
- 2014-12-15 JP JP2016526939A patent/JP6409063B2/ja active Active
- 2014-12-15 US US14/570,521 patent/US9281442B2/en active Active
-
2016
- 2016-03-04 US US15/060,950 patent/US9761757B2/en active Active
-
2017
- 2017-08-14 US US15/676,654 patent/US10026866B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100276664A1 (en) * | 2006-03-10 | 2010-11-04 | Hersee Stephen D | Thin-walled structures |
| KR20090096704A (ko) * | 2006-12-22 | 2009-09-14 | 큐나노 에이비 | 직립 나노와이어 구조를 갖는 ｌｅｄ 및 이를 제조하는 방법 |
| US20120225526A1 (en) * | 2007-10-04 | 2012-09-06 | Stc.Unm | NANOWIRE AND LARGER GaN BASED HEMTS |
Also Published As
| Publication number | Publication date |
|---|---|
| US9761757B2 (en) | 2017-09-12 |
| JP6409063B2 (ja) | 2018-10-17 |
| WO2015095049A1 (en) | 2015-06-25 |
| JP2017503333A (ja) | 2017-01-26 |
| TW201530807A (zh) | 2015-08-01 |
| US20170345969A1 (en) | 2017-11-30 |
| US10026866B2 (en) | 2018-07-17 |
| US20150207028A1 (en) | 2015-07-23 |
| US20160260866A1 (en) | 2016-09-08 |
| EP3084847B1 (en) | 2018-02-14 |
| US9281442B2 (en) | 2016-03-08 |
| EP3084847A4 (en) | 2017-05-31 |
| EP3084847A1 (en) | 2016-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI621278B (zh) | 具有應變改質表面活性區域之第三族氮化物奈米線ｌｅｄ及其製造方法 | |
| US10205054B2 (en) | III-nitride nanowire LED with strain modified surface active region and method of making thereof | |
| JP6486519B2 (ja) | ナノワイヤサイズの光電構造及びその選択された部分を改質する方法 | |
| US8350249B1 (en) | Coalesced nanowire structures with interstitial voids and method for manufacturing the same | |
| US9570651B2 (en) | Coalesced nanowire structures with interstitial voids and method for manufacturing the same | |
| US20160020364A1 (en) | Two step transparent conductive film deposition method and gan nanowire devices made by the method | |
| US9196787B2 (en) | Nanowire LED structure with decreased leakage and method of making same | |
| US9196792B2 (en) | Nanowire LED structure with decreased leakage and method of making same | |
| US9972750B2 (en) | Use of dielectric film to reduce resistivity of transparent conductive oxide in nanowire LEDs | |
| TW201511334A (zh) | 具有經減低漏電之奈米線發光二極體結構及其製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |