TWI613409B - 真空乾燥之終點檢測方法及真空乾燥裝置 - Google Patents

真空乾燥之終點檢測方法及真空乾燥裝置 Download PDF

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Publication number
TWI613409B
TWI613409B TW104138775A TW104138775A TWI613409B TW I613409 B TWI613409 B TW I613409B TW 104138775 A TW104138775 A TW 104138775A TW 104138775 A TW104138775 A TW 104138775A TW I613409 B TWI613409 B TW I613409B
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TW
Taiwan
Prior art keywords
vacuum
value
drying
measurement
end point
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TW104138775A
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English (en)
Chinese (zh)
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TW201638543A (zh
Inventor
Tsuyoshi Yoshimoto
Yoichi Ohinata
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Ulvac Inc
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Publication of TWI613409B publication Critical patent/TWI613409B/zh

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  • Drying Of Solid Materials (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
TW104138775A 2014-12-05 2015-11-23 真空乾燥之終點檢測方法及真空乾燥裝置 TWI613409B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014246677A JP6513379B2 (ja) 2014-12-05 2014-12-05 真空乾燥の終点検知方法及び真空乾燥装置

Publications (2)

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TW201638543A TW201638543A (zh) 2016-11-01
TWI613409B true TWI613409B (zh) 2018-02-01

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TW104138775A TWI613409B (zh) 2014-12-05 2015-11-23 真空乾燥之終點檢測方法及真空乾燥裝置

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JP (1) JP6513379B2 (ja)
KR (1) KR20160068693A (ja)
TW (1) TWI613409B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018129694A1 (de) * 2018-11-26 2020-05-28 Khs Corpoplast Gmbh Vorrichtung und Verfahren zur Plasmabehandlung von Behältern

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977895B2 (ja) * 1997-05-14 2007-09-19 芝浦メカトロニクス株式会社 回収溶剤の再生装置及び真空乾燥装置
TW201235627A (en) * 2010-10-29 2012-09-01 Ulvac Inc Vacuum freeze-drying apparatus and method for producing freezed particles
JP5094372B2 (ja) * 2007-12-26 2012-12-12 株式会社アルバック 真空乾燥装置における乾燥終点の確認方法
CN103411390A (zh) * 2013-07-18 2013-11-27 上海海洋大学 一种冰温真空干燥装置及生鲜鱼片冰温真空干燥的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0594372A (ja) 1991-03-19 1993-04-16 Fujitsu Ltd バツフア記憶制御方式
KR102500426B1 (ko) * 2012-02-01 2023-02-16 리바이브 일렉트로닉스, 엘엘씨 전자 디바이스 건조 방법 및 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3977895B2 (ja) * 1997-05-14 2007-09-19 芝浦メカトロニクス株式会社 回収溶剤の再生装置及び真空乾燥装置
JP5094372B2 (ja) * 2007-12-26 2012-12-12 株式会社アルバック 真空乾燥装置における乾燥終点の確認方法
TW201235627A (en) * 2010-10-29 2012-09-01 Ulvac Inc Vacuum freeze-drying apparatus and method for producing freezed particles
CN103411390A (zh) * 2013-07-18 2013-11-27 上海海洋大学 一种冰温真空干燥装置及生鲜鱼片冰温真空干燥的方法

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Publication number Publication date
JP6513379B2 (ja) 2019-05-15
JP2016109348A (ja) 2016-06-20
KR20160068693A (ko) 2016-06-15
TW201638543A (zh) 2016-11-01

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